JP2005135947A - Photomask housing vessel - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a photomask housing vessel which enables a handler to load or unload a photomask onto or from it without bringing the handler into contact with its side, is kept stable on a workbench while a lid is opened, and enables the loading/unloading of the photomask to be easily automated. <P>SOLUTION: A stationary member is provided inside a main body and a lid, the height H1 of a hinge from the outer surface of the main body is equal to the height H2 of the hinge from the outer surface of the lid. Provided that the height of the surface of a part supporting the photomask from the outer surface of the main body is represented by H3, H3 is so set as to satisfy formula, H3>H1=H2. Provided that the height of the top of three sides from the outer surface of the main body is represented by H4, H4 is so set as to satisfy formula, H1=H2>H4, and a height difference H5 between H3 and H4 is set proper so as to automate the loading/unloading of the photomask . <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a container for storing a photomask, and in particular, a photomask can be easily placed and taken out by a handler, is stable when the lid is opened, and the photomask is placed and taken out automatically. The present invention relates to a container for storing a photomask or a photomask blank that can be easily performed.

  The photomask must be managed so that dust does not adhere to the photomask during transportation or storage in a container.

  For example, the photomask stored in the container is a container so that the plastic mask scraped by the photomask substrate does not adhere to the photomask due to backlash during transportation. Must be securely fixed inside.

  Also, when the lid of the container is opened, the dust adhering to the upper part of the lid enters the container and does not adhere to the photomask, that is, the dust adhering to the upper part of the lid has entered the container. A container with a structure that does not enter must be used.

  Also, when the lid is attached to the main body of the container, make sure that the gap is easily and easily covered with adhesive tape to prevent dust from entering the container through the gap between the main body and the lid. Must be used.

  The perspective view shown in FIG. 1 is an example of a photomask storage container devised to satisfy the above requirements. FIG. 2 is an enlarged perspective view showing the appearance of the photomask storage container with the lid attached to the main body of the photomask storage container, and shows the vicinity of the hinge on the outer surface of one side surface portion provided with the hinge. Show.

  As shown in FIGS. 1 and 2, the photomask storage container of this example is connected to a main body (22) and a lid (23) by a pair of hinges (28) provided on one side portion so as to be freely opened and closed. The horizontal cross section is a flat container up and down a square.

  A fixing member (24) for securely fixing the photomask (26) is erected at a position near the corner of the bottom of the inner surface of the main body (22). The fixing member (24) has an L-shape for positioning in the horizontal direction.

  In addition, a fixing member (25) is erected corresponding to the fixing member (24) on the inner bottom surface of the main body (22) at a position near the corner portion of the inner bottom surface of the lid (23). The fixing member (25) has an L shape in order to perform horizontal positioning in the same manner as the fixing member (24).

  In this photomask storage container, the photomask (26) is placed on the fixing member (24) of the main body (22), the lid (23) is closed via the hinge (28), and a locking portion (not shown). Since the photomask (26) is securely fixed by the fixing members (24) and (25) by locking, the photomask (26) moves inside the container during transportation and hits the container. Will not occur.

  Further, in this example of the photomask storage container, when the container is opened and the internal photomask (26) is taken out, the container is held almost horizontally and the lid (23) is gently placed on the hinge (28) side. If it is opened, even if dust accumulates on the lid (23), it only falls in the direction of the inclined hinge (28) and does not enter the body (22).

  Therefore, the photomask (26) accommodated in the container is not contaminated by dust accumulated on the lid (23).

  Further, a flat plate-like bulge portion (11) parallel to the opening end is provided on the outer peripheral side surface of the main body (22) of the photomask storage container, and bulges downward from the bulge portion (11). The protruding portion (11b) is extended, and a hinge (28a) is continuously provided in an L shape at the lower end of the protruding portion (11b).

  The hinge (28a) is a hinge on the main body (22) side that constitutes the hinge (28) that connects the main body and the lid so as to be freely opened and closed.

  Further, the lid (23) attached to the opening of the main body (22) has a bulge flush with the outer surface of the flat plate-like bulging portion (11) of the main body (22) at the opening end side of the side surface. It has a part (21) and can be attached to the side part of the main body (22) by the bulging part (21).

  A hinge (28b) on the lid (23) side constituting the hinge (28) from the bulging portion (21) is provided by the same method as the hinge (28a) of the main body (22). Reference numeral (28c) is a pin constituting the hinge (28) by connecting the hinge (28a) of the main body (22) and the hinge (28b) of the lid (23) so as to be freely opened and closed.

  As shown in FIG. 2, the container for storing a photomask is provided with a bulging portion (11) of the main body (22) and a bulging portion (21) of the lid (23) provided to be flush with each other. Since the hinge (28) is provided downward from the periphery (A), that is, on the side of the main body (22), the periphery (A) can be easily and surely covered with an adhesive tape or the like.

  For this reason, there is no possibility that dust enters the container during transportation or storage and contaminates the photomask (26) being stored.

  As described above, the photomask storage container of this example is a photomask storage container devised to satisfy the above requirements, but several problems have been raised thereafter.

  For example, as shown in FIG. 1, the photomask (26) is placed on the fixing member (24) of the main body (22) using the handler (27), or is taken out from the fixing member (24). During handling of the handler (27), the handle portion of the handler (27) may come into contact with the open end of the side surface provided with the hinge (28), and the photomask (26) is placed or taken out. It is a problem that it is difficult to do.

  FIG. 3 is a side sectional view of the photomask storage container shown in FIG. 1, and during handling of the handler (27), the handler (27) is attached to the open end of the side surface shown in FIG. The handle part tends to touch.

  As shown in FIG. 3, when the lid (23) is opened to the hinge (28) side, the lower part of the outer surface of the main body (22) is tilted, and the main body (22) and the lid (23) are opened and closed. The containers that are freely connected by the hinge (28) are in an unstable state on the work table, and care should be taken when placing or taking out the photomask (26) using the handler (27). The problem is that you have to pay.

  When the lid (23) is opened to the hinge (28) side, the container becomes unstable, as shown in FIG. 2, where the hinge (28) is positioned below the peripheral edge (A), that is, It is assumed that the main body (22) is spaced apart from the main body (22).

  FIG. 4 is an enlarged side view showing the vicinity of the hinge (28) of the photomask storage container shown in FIG. FIG. 4 (a) shows a state in which the lid (23) is attached to the main body (22), and FIG. 4 (b) shows the lid (23) opened on the hinge side of the main body (22). Shows the state.

  As shown in FIG. 4 (a), with the lid (23) attached to the main body (22), the hinge (28) is separated from the peripheral edge (A) to the lower main body (22) side. Is provided.

  Therefore, as shown in FIG. 4B, in a state where the lid (23) is opened on the hinge side of the main body (22), from the lower part of the outer surface of the main body to the hinge (28) provided on one side surface of the main body. The relationship between the height (C) and the height (D) from the upper outer surface of the lid body to the hinge is D> C, and a gap of DC = E is provided between the main body (22) and the work table. This causes the container to become unstable.

As shown in FIGS. 1 and 3, in the photomask storage container of this example, the photomask (26) placed on the fixing member (24) of the main body (22) is the main body (22). ) Is placed at substantially the same height as each side surface portion. Therefore, when it is attempted to automate the placement and removal of the photomask (26) from the photomask storage container, the main body (22) This is a problem that the height of each side surface of the material becomes an obstacle, and it is difficult to automate mounting and taking out.
Japanese Utility Model Publication No. 6-30686

  The present invention has been made to solve the above problems, and is a photomask storage container in which a main body and a lid are connected to each other through a hinge so as to be opened and closed. When placing on or taking out from the fixed member, the photomask can be easily placed or taken out without the handler contacting the open end of the side surface of the main body. When the lid is opened to the hinge side, the container in which the main body and the lid are openably / closably connected via the hinge does not become unstable, and the photomask is placed or taken out automatically. It is an object of the present invention to provide a photomask storage container having a structure capable of easily performing the above.

The present invention is a photomask storage container in which a main body and a lid are connected to each other through a hinge so as to be freely opened and closed.
1) A fixing member for fixing the photomask is provided on the inner surface of the main body and the lid, respectively.
2) The height (H1) from the lower part of the main body outer surface to the hinge provided on one side of the main body is equal to the height (H2) from the upper surface of the lid body to the hinge,
3) The relationship between the height (H3) from the lower portion of the outer surface of the main body to the partial surface supporting the L-shaped photomask of the fixing member on the inner surface of the main body, and H1 and H2 is H3> H1 = H2.
4) The relationship between the height (H4) from the lower portion of the outer surface of the main body to the upper portion of the three side surface portions where the hinge of the main body is not provided, and H1 and H2 is H1 = H2> H4,
5) A photomask storage container characterized in that the difference between H3 and H4 (H5, H5 = H3−H4) has an interval suitable for automating placement and removal of the photomask.

In the present invention, 1) a fixing member for fixing a photomask is provided on the inner surface of the main body and the lid, and 2) the height (H1) from the lower surface of the main body to the hinge and the upper surface of the lid body to the hinge. The height (H2) is equal. 3) The relationship between the height (H3) from the lower part of the outer surface of the main body to the partial surface supporting the photomask of the fixing member and H1 and H2 is H3> H1 = H2, and 4) The relationship between the height (H4) from the lower outer surface of the main body to the upper portion of the three side surfaces, and H1 and H2 is H1 = H2> H4. 5) The difference between H3 and H4 (H5) is the placement of the photomask. Since the photomask storage container has an interval suitable for automation of taking out, when the photomask is placed on the fixing member of the main body using the handler or is taken out from the fixing member, the handler Without touching the open end of the The mask can be easily placed or taken out, and when the lid is opened on the hinge side on the workbench, the container in which the main body and the lid are connected openably and closably via the hinge is unstable. In addition, the photomask storage container has a structure in which the photomask can be easily placed or taken out automatically.

  Hereinafter, embodiments of the present invention will be described in detail.

  FIG. 5 is a perspective view showing an embodiment of a photomask storage container according to the present invention. FIG. 5 shows a state in which the lid (13) is opened on the hinge (18) side of the main body (12).

  As shown in FIG. 5, the container for storing a photomask according to this embodiment has a horizontal section in which a main body (12) and a lid (13) are connected to each other by a hinge (18) provided on one side surface thereof so as to be opened and closed. Is a flat container up and down the square.

  A fixing member (14) for securely fixing the photomask (16) is erected at a position close to the corner portion at the bottom of the inner surface of the main body (12). The fixing member (14) has an L-shape for horizontal positioning.

  In addition, a fixing member (15) is erected corresponding to the fixing member (14) on the inner bottom surface of the main body (12) at a position near the corner portion of the inner bottom surface of the lid (13). The fixing member (15) has an L-shape in order to perform horizontal positioning in the same manner as the fixing member (14).

  In this photomask storage container, the photomask (16) is placed on the fixing member (14) of the main body (12), the lid (13) is closed via the hinge (18), and a locking portion (not shown). Since the photomask (16) is securely fixed by the fixing members (14) and (15), the plastic mask does not move and move into the container during transportation to generate plastic powder.

  In addition, when the container for storing a photomask of this embodiment is opened and the internal photomask (16) is taken out, the container is held almost horizontally and the lid (13) is placed on the hinge (18) side. If it is opened gently, even if dust accumulates on the lid (13), it will only fall in the direction of the inclined hinge (18) and will not enter the body (12).

  Therefore, the photomask (16) accommodated in the container is not contaminated by dust accumulated on the lid (13).

  FIG. 6 is a side view of the photomask storage container with the lid (13) shown in FIG. 5 opened on the hinge (18) side of the main body (12). FIG. 7 is a side view of the main body (12) with the lid (13) attached thereto. FIG. 8 is an explanatory diagram in which the vicinity of the hinge (18) in the side view of the photomask storage container shown in FIG. 6 is enlarged.

  As shown in FIGS. 6 and 8, the photomask storage container according to the present invention has a height (H1) from the lower part of the outer surface of the main body to the hinge provided on one side of the main body, and the upper part of the outer surface of the lid. The height to the hinge (H2) is equal. Here, the height to the hinge (H1) is more precisely the height to the rotation center axis of the hinge (18).

  As shown in FIG. 8, the height from the lower part of the outer surface of the main body to the upper part of one side surface of the main body (12) provided with the hinge (18) is the same height as the height (H1) to the hinge.

  Also, the height from the upper part of the lid body to the upper part of one side part of the lid (13) provided with the hinge (18) is the same height as the height (H2) to the hinge.

More specifically, the photomask storage container according to the present invention has a height (H1) from the lower part of the outer surface of the main body to the hinge provided on one side surface of the main body and the upper part of one side surface of the main body, and the outer surface of the lid body. The height (H2) from the upper part to the hinge and from the upper part of the lid outer surface to the upper part of one side part of the lid provided with the hinge is equal.

  Therefore, as shown in FIGS. 6 and 8, when the lid (13) is opened to the hinge (18) side, the lower part of the outer surface of the main body (12) does not tilt, and the main body (12) and the lid The container connected to the body (13) by the hinge (18) so as to be freely opened and closed is in a stable state horizontally on the work table.

  Therefore, for example, it becomes easy to place or take out the photomask (16) using the handler (17).

  Further, in the photomask storage container according to the present invention, as shown in FIG. 8, the height from the lower part of the outer surface of the main body to the partial surface (F) for supporting the L-shaped photomask of the fixing member (14) on the inner surface of the main body. The relationship between the height (H3) and the height (H1) from the lower part of the outer surface of the main body to the hinge provided on one side surface of the main body and the height (H2) from the upper part of the outer surface of the lid to the hinge is H3> H1 = H2.

  Therefore, as shown in FIG. 6, during the handling of the handler (17), for example, the photomask (16) is placed on the fixing member (14) of the main body (12) or removed from the fixing member (14). In addition, the handle portion of the handler (17) comes into contact with the opening end of the side surface portion provided with the hinge (18), and it is difficult to operate the handler (17) on which the photomask (16) is placed or taken out. Will be solved.

  In addition, as shown in FIG. 8, the photomask storage container according to the present invention has a height (H4) from the lower portion of the outer surface of the main body to the upper portion of the three side surfaces where the hinge of the main body is not provided, and the lower portion of the main body outer surface to the main body. The relationship between the height (H1) to the hinge provided on one side surface portion and the height (H2) from the upper part of the lid outer surface to the hinge is H1 = H2> H4.

  Further, a height (H3) from the lower part of the outer surface of the main body to a partial surface (F) of the fixing member (14) on the inner surface of the main body that supports the L-shaped photomask, and a hinge of the main body from the lower part of the outer surface of the main body are provided. Differences (H5) and (H5 = H3−H4) from the height (H4) up to the upper part of the three side surface portions that are not present are intervals suitable for automating the placement and removal of the photomask.

  FIG. 9A is a side view of a state in which the photomask (16) is placed on the fixing member (14) on the inner surface of the main body (12). FIG. 9B is a plan view in that state.

  As shown in FIGS. 9A and 9B, the photomask storage container according to the present invention has a difference (H5) between H3 and H4, and this interval is an interval adapted for automation. is there.

  Therefore, when performing automation using a transfer robot as a means for placing or taking out the photomask (16) on the fixing member (14), it is limited to placing or taking out the photomask (16) from above. Instead, as indicated by the white thick arrow, for example, the photomask (16) is supported from below by a fork-like arm (not shown) of a transfer robot and placed on the fixing member (14), Alternatively, automation such as inserting an arm under the photomask (16) placed on the fixing member (14) and taking it out from the fixing member (14) can be easily performed.

  At this time, the photomask (16) is placed on or taken out from the fixing member (14), as shown in FIG. 9B, on the main body (12) provided with no hinge (18). Since it can be performed from the direction of the three side surfaces, the container for storing a photomask according to the present invention has a high degree of freedom in designing the flow line for placing and taking out the photomask (16) in the manufacturing process. .

  Further, the photomask storage container according to the present invention is, for example, from the side of the side where the hinge (18) is provided above the photomask (16) when placing and taking out using a handler. As described above, the handler can be easily handled from the direction of the three side surfaces of the main body (12) not provided with the hinge (18).

It is a perspective view of an example of the container for photomask storages devised as satisfying the requirements of the container for photomask storages. It is the perspective view which expanded and represented the external appearance of the state by which the cover body was adhere | attached on the main body of the container for photomask accommodation of FIG. It is a sectional side view of the container for photomask accommodation shown in FIG. (A) is the side view which expands the vicinity of the hinge of the container for photomask accommodation shown in FIG. 3, and shows the state by which the cover body was attached to the main body.

(B) is the side view which expands the vicinity of the hinge of the container for photomask accommodation shown in FIG. 3, and shows the state which opened the cover body to the hinge side.
It is a perspective view which shows the state which opened the cover body to the hinge side of the main body of one Example of the container for photomask storage by this invention. It is a side view which shows the state which opened the cover body to the hinge side of the main body of one Example of the container for photomask storage by this invention. It is a side view of the state by which the cover body was adhered to the main body of one Example of the container for photomask storage by this invention. It is explanatory drawing which expanded the vicinity of the hinge of the side view of the photomask storage container shown in FIG. (A) is the side view of the state in which the photomask was mounted on the fixing member of the main body inner surface of one Example of the container for photomask storage by this invention.

  (B) is a top view of the state by which the photomask was mounted on the fixing member of the inner surface of a main body of one Example of the container for photomask storage by this invention.

Explanation of symbols

12, 22 ... Photomask storage container body 13, 23 ... Photomask storage container lid 18, 28, 28a, 28b ... Hinge 28c provided on one side surface ... One side surface Hinge pins 16, 26... Photomask 14, 15, 24, 25... Fixing member 11, 11 b. Bulging portion A on the outer peripheral portion of the side surface of the body 17 and the peripheral edges 17 and 27 where the main body and the lid meet together. Handler H1... Height H2 from the lower portion of the outer surface of the main body to the hinge provided on one side surface of the main body ... Height from upper part of lid outer surface to hinge H3 ... Height from lower part of main body to partial surface supporting photomask H4 ... Height from lower part of main body to upper part of three side faces H5 ...・ The difference between H3 and H4

Claims (1)

In the photomask storage container in which the main body and the lid are connected to each other through a hinge, 1) A fixing member for fixing the photomask is provided on each of the inner surfaces of the main body and the lid.
2) The height (H1) from the lower part of the main body outer surface to the hinge provided on one side of the main body is equal to the height (H2) from the upper surface of the lid body to the hinge,
3) The relationship between the height (H3) from the lower portion of the outer surface of the main body to the partial surface supporting the L-shaped photomask of the fixing member on the inner surface of the main body, and H1 and H2 is H3> H1 = H2.
4) The relationship between the height (H4) from the lower portion of the outer surface of the main body to the upper portion of the three side surface portions where the hinge of the main body is not provided, and H1 and H2 is H1 = H2> H4,
5) The photomask storage container characterized in that the difference between H3 and H4 (H5, H5 = H3−H4) has an interval suitable for automating placement and removal of the photomask.

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