JP2005064279A - Substrate holding case and substrate carrying system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent the generation of mishandling and the adhesion of dust to a substrate at the time of taking out the substrate by a robot as to a substrate holding case for holding the substrate in a vertical position. <P>SOLUTION: The substrate holding case 1 is provided with an outer box 3 of which the upper part is opened, and an inner box 4 to be attached/detached to/from the inside of the outer box 3 and capable of holding the substrate 2 to be inserted from the upper part along a substrate holding groove 4b of the inner box 4 in the vertical position. Legs 4c, 3b for holding the inner box 4 and/or outer box 3 in a laid position are formed on the outside surface of the inner box 4 and/or outer box 3. When the inner box 4 and/or outer box 3 are supported by the legs 4c, 3b, the substrate 2 is held in a horizontal position, and the horizontal insertion/extraction of the substrate 2 can be allowed. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a substrate holding case for holding a substrate such as a photomask, photoblank, or substrate, and further relates to a substrate transfer system that uses a robot or the like to insert a substrate into or pull out a substrate from the substrate holding case.

  There is known a substrate holding case for holding a photomask, a substrate such as a photo blank or a substrate as a material thereof (see, for example, Patent Document 1). This type of substrate holding case is used not only as a shipping case for substrates that have been manufactured, but also as a carrying case or storage case for substrates in the manufacturing process.

The substrate holding case usually includes an outer box having an upper opening and an inner box provided inside the outer box, and holds the substrate inserted from above, for example, in a vertical posture along the substrate holding groove of the inner box. Is configured to do.
The substrate holding grooves are formed on the two inner side surfaces of the inner box facing each other in order to hold both side edges of the substrate to be inserted. A plurality of substrate holding grooves are formed in parallel.
The groove width of the substrate holding groove is set according to the thickness dimension of the substrate to be held, and a predetermined clearance is secured between the substrate and the substrate holding groove.

Conventionally, a substrate is inserted into a substrate holding case and a substrate is pulled out manually, and gloves and a handling jig are used at that time. And with the substrate holding case that holds the substrate in a vertical position, it is possible to insert and pull out the substrate while supporting only the upper end of the substrate, ensuring good workability when manually inserting and pulling out the substrate It had been.
JP 2001-154341 A

By the way, in recent years, an increasing number of cases where a robot inserts a substrate into or pulls out a substrate from a substrate holding case. For example, automation is performed in which a customer who has purchased photo blanks takes out photo blanks held in a shipping case / substrate holding case by a robot and automatically conveys them to a cassette in the next process.
However, when a substrate is inserted into or pulled out from a substrate holding case that holds the substrate in a vertical position using a robot, the following problems occur.

  As described above, since a predetermined clearance is ensured between the substrate and the substrate holding groove, when the substrate is held in the vertical posture by the substrate holding groove, the clearance is equivalent to the substrate holding groove. Variations in the position of the substrate, such as the substrate being held at an angle, make the position of the substrate unstable. For this reason, when the substrate in the vertical posture is pulled out by the robot, the substrate is rubbed and dusted by the substrate holding groove due to the positional deviation corresponding to the clearance, and attached.

  In addition, when a substrate is inserted into or pulled out from the substrate holding case, the substrate handling direction is the vertical direction, and thus a multi-axis robot having a vertical movement function is required. However, when this type of robot operates above the substrate, dust generated from the robot may adhere to the substrate. In particular, in the case of a substrate such as a photomask, slight dust adhesion adversely affects the photomask pattern defect and transfer characteristics and becomes a serious defect and cannot be ignored.

  The present invention has been considered in view of the above circumstances, and includes an outer box having an opening and an inner box that is detachably provided inside the outer box, and is inserted along a substrate holding groove of the inner box. While holding the substrate in a vertical position, it is possible to insert and pull out the substrate in the horizontal direction, and when removing the substrate with a robot, a substrate holding case that can prevent dust from adhering to the substrate, and It is an object of the present invention to provide a substrate transfer system that can perform a highly clean automated process that prevents dust generation during insertion and / or withdrawal and that is free from robot handling errors.

  In order to achieve the above object, a substrate holding case of the present invention includes an outer box having an opening, and an inner box that is detachably provided inside the outer box, and is inserted along a substrate holding groove of the inner box. A substrate holding case for holding a substrate, wherein a leg portion is provided on an outer surface of the inner box and / or the outer box to support the inner box and / or the outer box in a lateral position, and the inner box When the outer box is supported by the legs, the substrate is in a horizontal posture, and the substrate can be inserted and / or pulled out in the horizontal direction.

  If the substrate holding case is configured in this manner, when holding the substrate inserted from above, for example, along the substrate holding groove of the middle box, the middle box and / or the outer box is placed in a lying position. The inner box and / or the outer box are supported by the legs, and the horizontal insertion and / or withdrawal of the substrate becomes possible. As a result, the substrate is positioned in contact with the substrate holding groove of the inner box, so that the substrate can be lifted and pulled out so as not to contact the holding groove, and the substrate is rubbed in the holding groove. Dust generation can be prevented.

  Further, it becomes possible to insert the substrate into the substrate holding case and pull out the substrate with a SCARA robot. This eliminates the need for expensive robots that require advanced control techniques such as multi-axis robots. In addition, the SCARA robot can handle the substrate with the drive part always placed below the substrate, thus preventing dust generated from the robot from adhering to the substrate and Can be suppressed.

In the substrate holding case of the present invention, the inner box and / or the outer box includes the leg portions on two outer surfaces parallel to the substrate.
If the substrate holding case is configured in this manner, when the substrate is pulled out in the horizontal direction, the middle box and / or the outer box in the lying position can be arbitrarily turned upside down. Thereby, even if the direction (front and back) of a board | substrate differs for every inner box, a board | substrate can be pulled out in a desired direction.

Moreover, the board | substrate holding case of this invention is set as the structure by which the latching | locking part which latches the said leg part of the said inner box is provided in the inner surface of the said outer box.
If the substrate holding case is configured in this way, the movement of the inner box relative to the outer box can be restricted, and dust generation due to vibration can be prevented. And since the leg part of an inner box is utilized, a structure can be simplified compared with the case where an exclusive protrusion is provided in an inner box.

In order to achieve the above object, the substrate transport system of the present invention uses the substrate holding case, and a stage on which the inner box and / or the outer box are placed, and the stage placed on the stage. A hand member for inserting and / or pulling out the substrate with respect to the inner box and / or the outer box,
The stage includes a positioning unit that positions the inner box and / or the outer box in a sideways posture with respect to the stage by engaging with the leg part,
The robot is configured to insert and / or pull out the substrate with respect to the inner box or the outer box containing the inner box positioned in a lying position on the stage.

  Accordingly, when the substrate is taken out, the position of the substrate relative to the substrate holding groove can be stably positioned, and dust generation at the time of inserting and / or pulling out the substrate can be prevented, so that the substrate transfer system capable of a highly clean automated process. Can be obtained.

In addition, since it is possible to insert a substrate into the substrate holding case and pull out the substrate with a SCARA robot, the construction of the substrate transfer system can be made inexpensive, and dust generated from the robot can adhere to the substrate. And the defect of the substrate due to dust can be suppressed.
In addition, since the stage includes a positioning portion that positions the middle box and / or outer box in a sideways position with respect to the stage by engaging with the legs, the position of the substrate with respect to the stage is accurately defined. Robot handling mistakes can be prevented.

  As described above, according to the present invention, an outer box having an opening and an inner box that is detachably provided inside the outer box are provided to hold a substrate inserted along the substrate holding groove of the inner box. However, since it is possible to insert and pull out the substrate in the horizontal direction, it is possible to prevent dust from adhering to the substrate when the substrate is taken out by the robot.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[Substrate holding case]
First, an embodiment of a substrate holding case according to the present invention will be described with reference to FIGS.
FIG. 1 is a partially cutaway front view of a substrate holding case, and FIG. 2 is a partially cutaway plan view of the substrate holding case.

As shown in these drawings, the substrate holding case 1 has an outer box 3 having an upper opening and a detachably mounted inside the outer box 3 in order to hold the substrate 2 in a vertical posture. A box 4 and a lid 5 covering the upper opening of the outer box 3 are provided.
Examples of the substrate 2 include a photomask having a main surface of a square, a photo blank serving as a material thereof, and a substrate. Normally, the substrate 2 is stored in the inner box 4, the inner box 4 is stored in the outer box 3, and then the upper opening of the outer box 3 is covered with the lid 5, so that the substrate 2 is held in the substrate holding case. 1 is stored in a sealed state.

The outer box 3 includes a flange-like fitting portion 3a at the peripheral edge of the upper opening. When the lid 5 is put on, the fitting portion 3a is fitted with the fitting portion 5a formed on the peripheral portion of the lid 5, and the inside of the substrate holding case 1 is sealed. In this embodiment, the outer case 3 and the lid 5 are integrally fixed by engaging the fitted portions 3a and 5a with the hooks 6 as separate members.
A retainer 7 is provided on the upper lower surface of the lid 5. When the outer box 3 is covered with the lid 5, the retainer 7 is elastically brought into contact with the upper end corner of the substrate 2, so that rattling of the substrate 2 is suppressed.

In order to facilitate cleaning, the inner box 4 is formed in a box shape in which the upper part and the bottom part are opened, and support pieces 4a for supporting the lower end of the substrate 2 are provided on the opposite left and right inner edges of the bottom part opening. Is formed. Further, a pair of substrate holding grooves 4b are formed in the vertical direction on the left and right inner side surfaces of the inner box 4 facing each other, and by inserting the substrate 2 along these substrate holding grooves 4b, the left and right side edges of the substrate 2 Part is held. In the present embodiment, three substrate holding grooves 4b are formed in parallel on each inner side surface of the inner box 4 so that the three substrates 2 can be accommodated.
In the present embodiment, a substrate holding case capable of storing three substrates 2 is used. However, the present invention is not limited to this, and the number of substrates 2 may be one or a plurality other than three.
The groove width of the substrate holding groove 4b is set larger than the thickness dimension of the substrate 2 to be held, and a predetermined clearance is secured between the substrate 2 and the substrate holding groove 4b. This facilitates the insertion and withdrawal of the substrate 2 from the substrate holding groove 4b and suppresses damage to the substrate 2 due to friction.
The material for forming the outer box 3, the inner box 4 and the lid 5 is not particularly limited, but is preferably selected from various resins such as polypropylene, acrylic, polyethylene, polyamide and ABS.

Next, features of the substrate holding case 1 according to the present invention will be described.
Fig.3 (a) is a front view of a middle box, FIG.3 (b) is a side view which shows the middle box of a lying down attitude | position.
As shown in FIGS. 1 to 3, legs 4 c are provided on the front and back surfaces (two outer surfaces parallel to the substrate 2) of the inner box 4 for supporting the inner box 4 in a lying position. . In the present embodiment, the leg portion 4c is a square protrusion, and this is disposed at the four corners of the front and back of the inner box 4. However, the shape and number of the leg portions 4c are not limited to this, It can be changed as appropriate. Further, the leg portion 4c may be integrally formed with the inner box 4, or may be formed as a separate member and fixed to the inner box 4.
The projecting dimension of each leg 4c is adjusted such that the substrate 2 held by the inner box 4 is in a horizontal position when the inner box 4 is laid down and supported by the legs 4c.

  If the inner box 4 is configured in this way, the substrate 2 can be placed in a horizontal posture only by placing the inner box 4 on its side, and the substrate 2 can be inserted and pulled out in the horizontal direction. In this state, the substrate 2 is brought into contact with one side surface of the substrate holding groove 4b by gravity and the position is stabilized. Therefore, the substrate 2 is lifted and pulled out so as not to contact the substrate holding groove 4b by the robot. Can prevent dust generation caused by rubbing with the substrate holding groove 4b.

  Further, if the inner box 4 is configured in this way, the substrate 2 can be inserted into the substrate holding case 1 and the substrate 2 can be pulled out by the SCARA robot. The SCARA robot does not require advanced control technology like a multi-axis robot, is relatively inexpensive, and can handle the substrate 2 with the drive part always placed below the substrate 2. Therefore, it is possible to prevent dust generated from the robot from adhering to the substrate 2 and to suppress defects in the substrate 2 due to dust.

  Moreover, since the middle box 4 of this embodiment is provided with the leg part 4c in the two outer surfaces parallel to the board | substrate 2, when laying down the middle box 4, it will be which direction according to the accommodation state of the board | substrate 2. Also, the inner box 4 can be arbitrarily reversed. Thereby, even if the accommodation state (front and back) of the board | substrate 2 differs for every inner box 4, it becomes possible to lie down the inner box 4 in arbitrary directions and to draw out the board | substrate 2 by a desired direction.

FIG. 4 is a side view showing the substrate holding case in a lying position.
As shown in FIGS. 1, 2, and 4, legs 3 b are provided on the front and rear surfaces (two outer surfaces parallel to the substrate 2) of the outer box 3 to support the outer box 3 in a lying position. It has been. In the present embodiment, the leg portion 3b is an L-shaped projection and is disposed at the four corners of the front and back of the outer box 3. However, the shape and number of the leg portions 3b are not limited thereto. Can be changed as appropriate. Further, the leg 3b may be integrally formed with the outer box 3, or may be formed as a separate member and fixed to the outer box 3.
The protruding dimension of each leg portion 3b is adjusted so that the substrate 2 held by the inner box 4 is in a horizontal posture when the outer box 3 is laid down and supported by the leg portion 3b.

When the outer box 3 is configured in this way, the substrate 2 can be placed in a horizontal position by simply putting the outer box 3 on its side while the inner box 4 is stored, and the substrate 2 can be inserted and pulled out in the horizontal direction. The same effect as that obtained when the middle box 4 is placed on its side is obtained.
In addition, in this case, there is no need to take out the inner box 4 from the outer box 3, so there is an advantage that the work procedure is reduced and the work efficiency is increased.
When the present embodiment is applied to the substrate transport system, a stopper (locking means) for preventing the inner box 4 from moving back and forth when the substrate is inserted and / or pulled out is provided on the stage 8. preferable.

5A to 5C are horizontal cross-sectional views showing the locking portion of the outer box.
Although omitted in FIGS. 1 and 2, a locking portion 3 c that locks the leg portion 4 c of the inner box 4 is provided on the inner side surface (two inner side surfaces parallel to the substrate 2) of the outer box 3. ing. The locking portion 3c of the present embodiment is a protrusion formed so as to lock the side portion of the leg portion 4c when the inner box 4 is attached to the outer box 3, and the front and rear direction of the inner box 4 is Reduces rattling. For example, as shown in FIG. 5 (a), both sides of each leg 4c may be locked, and as shown in FIGS. 5 (b) and 5 (c), the leg 4c. The one side part may be latched.
If the outer box 3 is configured in this way, the movement of the inner box 4 relative to the outer box 3 can be restricted, so that the inner box 4 moves in the outer box 1 while the substrate holding case 1 is being transported. And dust generation due to vibration can be prevented. In addition, since the legs 4c of the inner box 4 are used, the structure can be simplified as compared with the case where a dedicated protrusion is provided on the inner box 4.

[Substrate transport system]
Next, an embodiment of a substrate transfer system according to the present invention will be described with reference to FIGS.
FIG. 6 is a perspective view showing the substrate transfer system, and FIG. 7 is a side view showing the inner box positioned on the stage.
As shown in this figure, the substrate transport system includes a substrate holding case 1 having the outer box 3 for holding the substrate 2 and an inner box 4 accommodated therein, and a stage 8 on which the inner box 4 is placed. And a robot 9 having a hand member 9a for inserting and pulling out the substrate 2 from the middle box 4 placed on the stage 8.
In the substrate transfer system of the present embodiment, the inner box 4 is placed on the stage 8. However, the present invention can be applied to the case where the outer box 3 in which the inner box 4 is stored is placed on the stage 8. Further, the hand member 9a may be manually operated instead of being operated by the robot 9.

The stage 8 includes a positioning portion 8a for positioning the middle box 4 (or the outer box 3 and the middle box 4) in a sideways position with respect to the stage 8 by engaging with the leg portion 4c (or the leg portion 3b). Yes. In the present embodiment, the positioning portion 8a is formed as an L-shaped protrusion and is disposed at four locations on the stage 8. However, the shape and number of the positioning portions 8a are not limited to this, and may be changed as appropriate. be able to.
When the middle box 4 is placed on the stage 8 configured as described above, the position of the middle box 4 with respect to the stage 8 can be adjusted by engaging the outer corner of the leg 4c with the inner corner of the positioning portion 8a. Accurate positioning.

The robot 9 is configured to insert and pull out the substrate 2 with respect to the middle box 4 positioned on the stage 8 in a lying position. At this time, the middle box 4 is in a sideways posture, and since the insertion and withdrawal directions of the substrate 2 are horizontal, the substrate 2 can be inserted and pulled out using a SCARA robot.
The robot 9 has a plate-like hand 9a, and a plurality of receiving members 9b for receiving the substrate 2 from below are provided on the upper part thereof. The hand 9a is capable of at least a horizontal operation for inserting and pulling out the substrate 2 and a vertical operation for transferring the substrate 2, and a combination of the horizontal operation and the vertical operation allows the substrate 2 to be moved relative to the inner box 4. Insertion and withdrawal are performed.

If the substrate transport system is configured in this manner, the inner box 4 is placed in a horizontal position, and the substrate 2 can be inserted and pulled out in the horizontal direction. Therefore, when the substrate 2 is taken out, the position of the substrate 2 with respect to the substrate holding groove 4b is stabilized. Since the substrate can be positioned and dust generation during insertion and / or withdrawal of the substrate can be prevented, a substrate transfer system capable of a highly clean and automated process can be obtained, and handling errors of the robot 9 can be prevented. Is possible.
Moreover, since the stage 8 includes a positioning portion 8a for positioning the middle box 4 in the lying position with respect to the stage 8 by engaging with the leg 4c, the middle box 4 and the outer box 3 are placed on the stage 8. It becomes possible to position accurately and to improve the handling accuracy of the robot 9.
In addition, since the substrate 2 can be inserted into and pulled out from the inner box 4 by the SCARA robot 9, dust generation from the robot 9 is prevented from adhering to the substrate 2, and the substrate 2 caused by dust is prevented. Defects can be suppressed.

  The substrate holding case of the present invention is used as a shipping case, a transport case, a storage case, and the like for storing substrates such as a photomask, a photo blank as a material thereof, and a substrate. The substrate transfer system of the present invention is useful when a substrate is pulled out from a substrate holding case or inserted into the substrate holding case using a robot.

It is a partially cutaway front view of a substrate holding case. It is a partially notched top view of a board | substrate holding case. (A) is a front view of a middle box, (b) is a side view which shows a middle box in a sideways posture. It is a side view which shows the board | substrate holding case of a lying down attitude | position. (A)-(c) is a horizontal sectional view which shows the latching | locking part of an outer case. It is a perspective view which shows a board | substrate conveyance system. It is a side view which shows the inner box positioned on the stage.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate holding case 2 Substrate 3 Outer box 3b Leg part 3c Locking part 4 Middle box 4b Substrate holding groove 4c Leg part 5 Lid 8 Stage 8a Positioning part 9 Robot 9a Hand

Claims (4)

An outer box having an opening, and an inner box provided detachably inside the outer box, and a substrate holding case for holding a substrate inserted along a substrate holding groove of the inner box,
Legs are provided on the outer surface of the inner box and / or the outer box to support the inner box and / or the outer box in a lateral position, and the inner box and / or the outer box are supported by the legs. Then, the substrate is in a horizontal posture, and the substrate can be inserted and / or pulled out in the horizontal direction.   The substrate holding case according to claim 1, wherein the inner box and / or the outer box includes the leg portions on two outer surfaces parallel to the substrate.   The substrate holding case according to claim 1, wherein a locking portion that locks the leg portion of the inner box is provided on an inner surface of the outer box. A substrate transfer system using the substrate holding case according to claim 1,
A stage on which the inner box and / or the outer box are placed; and a hand member that inserts and / or pulls out the substrate with respect to the inner box and / or the outer box placed on the stage. With
The stage includes a positioning unit that positions the inner box and / or the outer box in a sideways posture with respect to the stage by engaging with the leg part,
The substrate transfer system, wherein the robot inserts and / or pulls out the substrate with respect to the inner box or the outer box containing the inner box positioned on the stage in a lying position.

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