JP2005121633A5 - - Google Patents
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- JP2005121633A5 JP2005121633A5 JP2004248706A JP2004248706A JP2005121633A5 JP 2005121633 A5 JP2005121633 A5 JP 2005121633A5 JP 2004248706 A JP2004248706 A JP 2004248706A JP 2004248706 A JP2004248706 A JP 2004248706A JP 2005121633 A5 JP2005121633 A5 JP 2005121633A5
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Claims (13)
前記基板を透過したＸ線を検出するＸ線検出手段と、
前記Ｘ線照射手段と前記Ｘ線検出手段との間において前記基板を揺動させる揺動手段と、
前記揺動手段を所定角度内で揺動駆動させる制御手段と、
前記Ｘ線検出手段の検出結果に基づいて前記基板の検査を行う検査手段と、
を具備することを特徴とするＸ線検査装置。 X-ray irradiation means for irradiating the substrate with X-rays;
X-ray detection means for detecting X- rays transmitted through the substrate ;
A swinging means for swinging the Oite the substrate between the X-ray detection means and said X-ray irradiation means,
Control means for driving the swing means to swing within a predetermined angle ;
Inspection means for inspecting the substrate based on the detection result of the X-ray detection means;
X-ray inspection apparatus characterized by comprising a.
前記基板を透過したＸ線を検出するＸ線検出手段と、
前記Ｘ線照射手段と前記Ｘ線検出手段との間において前記基板を揺動させる揺動手段と、
前記Ｘ線検出手段の駆動と前記揺動手段の駆動とを同期させるＸ線検出用揺動手段と、
前記揺動手段の直交２軸をそれぞれ位相の異なる所定角度内で揺動させる制御手段と、
前記Ｘ線検出手段の検出結果に基づいて前記基板の検査を行う検査手段と、を具備することを特徴とするＸ線検査装置。 X-ray irradiation means for irradiating the substrate with X-rays;
X-ray detection means for detecting X-rays transmitted through the substrate;
Rocking means for rocking the substrate between the X-ray irradiation means and the X-ray detection means;
X-ray detection swinging means for synchronizing the drive of the X-ray detection means and the swinging means;
Control means for swinging two orthogonal axes of the swing means within predetermined angles with different phases;
X-ray inspection apparatus comprising: inspection means for inspecting the substrate based on a detection result of the X-ray detection means .
Ｘ線の照射範囲内で基板をＸ線照射軸の直交方向に移動させる基板用移動手段と、
前記基板を透過したＸ線を検出する検出面を有するＸ線検出手段と、
前記Ｘ線検出手段を前記Ｘ線照射軸の直交方向に移動させるＸ線検出用移動手段と、
前記基板用移動手段と前記Ｘ線検出用移動手段とを同期駆動制御するモータ制御手段と、
前記Ｘ線検出手段により形成されたＸ線画像から前記基板の任意断層面のＸ線画像を抽出する画像処理手段と、
前記Ｘ線画像に基づいて前記基板の任意断層面を検査する検査手段と、を具備し、
前記基板用移動手段は、前記Ｘ線検出用移動手段と同期して前記検出面の中心点を前記Ｘ線焦点と前記基板の中心点とを結ぶ直線上に配置させる構成であることを特徴とするＸ線検査装置。 X-ray irradiation means for irradiating X-rays in a conical shape having an X-ray focal point as a vertex ;
A substrate moving means for moving the substrate in a direction orthogonal to the X-ray irradiation axis within the X-ray irradiation range;
X-ray detection means having a detection surface for detecting X- rays transmitted through the substrate ;
X-ray detection moving means for moving the X-ray detection means in a direction orthogonal to the X-ray irradiation axis;
Motor control means for synchronously driving and controlling the substrate moving means and the X-ray detection moving means;
Image processing means for extracting an X-ray image of an arbitrary tomographic plane of the substrate from the X-ray image formed by the X-ray detection means;
An inspection means for inspecting an arbitrary tomographic plane of the substrate based on the X-ray image,
The substrate moving means is configured to arrange the center point of the detection surface on a straight line connecting the X-ray focal point and the center point of the substrate in synchronization with the X-ray detection moving means. X-ray inspection apparatus for.
Ｘ線の照射範囲内で基板をＸ線照射軸の直交方向に移動させる基板用移動手段と、
前記基板を透過したＸ線を検出する検出面を有するＸ線検出手段と、
前記Ｘ線検出手段を前記Ｘ線照射軸の直交方向に移動させるＸ線検出用移動手段と、
前記基板用移動手段と前記Ｘ線検出用移動手段とを同期駆動制御する制御手段と、
前記Ｘ線検出手段により形成されたＸ線画像から前記基板の任意断層面のＸ線画像を抽出する画像処理手段と、
前記Ｘ線画像に基づいて前記基板の任意断層面の検査を行う検査手段と、を具備し、
前記Ｘ線検出手段は、前記基板用移動手段と前記Ｘ線検出用移動手段とのそれぞれでの水平面での同期回転動作における１回転の期間にＸ線撮影を行う構成であることを特徴とするＸ線検査装置。 X-ray irradiation means for irradiating X-rays in a conical shape having an X-ray focal point as a vertex;
A substrate moving means for moving the substrate in a direction orthogonal to the X-ray irradiation axis within the X-ray irradiation range;
X-ray detection means having a detection surface for detecting X-rays transmitted through the substrate;
X-ray detection moving means for moving the X-ray detection means in a direction orthogonal to the X-ray irradiation axis;
Control means for synchronously driving and controlling the substrate moving means and the X-ray detection moving means;
Image processing means for extracting an X-ray image of an arbitrary tomographic plane of the substrate from the X-ray image formed by the X-ray detection means;
An inspection means for inspecting an arbitrary tomographic plane of the substrate based on the X-ray image,
The X-ray detection means is configured to perform X-ray imaging during a period of one rotation in a synchronous rotation operation on a horizontal plane in each of the substrate moving means and the X-ray detection moving means. X-ray inspection equipment.
Ｘ線の照射範囲内で基板をＸ線照射軸の直交方向に移動させる基板用移動手段と、
前記基板を透過したＸ線を検出する検出面を有するＸ線検出手段と、
前記Ｘ線検出手段を前記Ｘ線照射軸の直交方向に移動させるＸ線検出用移動手段と、
前記基板用移動手段と前記Ｘ線検出用移動手段とを同期駆動制御する制御手段と、
前記Ｘ線検出手段により形成されたＸ線画像から前記基板の任意断層面のＸ線画像を抽出する画像処理手段と、
前記Ｘ線画像から前記基板の任意断層面を検査する検査手段と、を具備し、
前記Ｘ線検出手段は、前記基板用移動手段と前記Ｘ線検出用移動手段との同期回転動作中の回転停止時にＸ線撮影を行う構成であることを特徴とするＸ線検査装置。 X-ray irradiation means for irradiating X-rays in a conical shape having an X-ray focal point as a vertex;
A substrate moving means for moving the substrate in a direction orthogonal to the X-ray irradiation axis within the X-ray irradiation range;
X-ray detection means having a detection surface for detecting X-rays transmitted through the substrate;
X-ray detection moving means for moving the X-ray detection means in a direction orthogonal to the X-ray irradiation axis;
Control means for synchronously driving and controlling the substrate moving means and the X-ray detection moving means;
Image processing means for extracting an X-ray image of an arbitrary tomographic plane of the substrate from the X-ray image formed by the X-ray detection means;
An inspection means for inspecting an arbitrary tomographic plane of the substrate from the X-ray image,
2. The X-ray inspection apparatus according to claim 1, wherein the X-ray detection unit is configured to perform X-ray imaging when rotation is stopped during synchronous rotation of the substrate moving unit and the X-ray detection moving unit .
前記基板を透過したＸ線を検出する検出工程と、A detection step of detecting X-rays transmitted through the substrate;
検出した前記Ｘ線のＸ線画像データから前記基板の任意断層面のデータを抽出する抽出工程と、An extraction step of extracting data of an arbitrary tomographic plane of the substrate from the detected X-ray image data of the X-ray;
前記基板を揺動させる揺動工程と、A swinging step of swinging the substrate;
前記抽出工程の抽出結果に基づいて前記基板を検査する検査工程と、を有することを特徴とするＸ線検査方法。An inspection step of inspecting the substrate based on the extraction result of the extraction step.
基板を透過した前記Ｘ線をＸ線検出手段の検出面で検出する検出工程と、A detection step of detecting the X-ray transmitted through the substrate on a detection surface of the X-ray detection means;
検出された前記Ｘ線により形成されたＸ線画像から前記基板の任意断層面のＸ線画像を抽出する抽出工程と、An extraction step of extracting an X-ray image of an arbitrary tomographic plane of the substrate from an X-ray image formed by the detected X-ray;
前記基板をＸ線の照射範囲内でＸ線照射軸と垂直方向に移動させる移動工程と、A moving step of moving the substrate in a direction perpendicular to the X-ray irradiation axis within an X-ray irradiation range;
前記移動工程の移動に同期して前記基板と同一平面上においてＸ線画像中心に目標点を配置する第１配置工程と、A first arrangement step of arranging a target point at the center of the X-ray image on the same plane as the substrate in synchronization with the movement of the movement step;
前記Ｘ線焦点と前記基板の検査箇所の中心点とを結ぶ直線上に前記検出面の中心点を配置する第２配置工程と、A second arrangement step of arranging the center point of the detection surface on a straight line connecting the X-ray focal point and the center point of the inspection location of the substrate;
前記抽出工程の抽出結果に基づいて前記基板の検査を行う検査工程と、を有することを特徴とするＸ線検査方法。And an inspection step of inspecting the substrate based on the extraction result of the extraction step.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004248706A JP4386812B2 (en) | 2003-08-27 | 2004-08-27 | X-ray inspection equipment |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003303188 | 2003-08-27 | ||
| JP2003330180 | 2003-09-22 | ||
| JP2004248706A JP4386812B2 (en) | 2003-08-27 | 2004-08-27 | X-ray inspection equipment |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005121633A JP2005121633A (en) | 2005-05-12 |
| JP2005121633A5 true JP2005121633A5 (en) | 2007-04-26 |
| JP4386812B2 JP4386812B2 (en) | 2009-12-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004248706A Expired - Fee Related JP4386812B2 (en) | 2003-08-27 | 2004-08-27 | X-ray inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4386812B2 (en) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0415053D0 (en) * | 2004-07-05 | 2004-08-04 | Dage Prec Ind Ltd | X-ray manipulator |
| JP4926645B2 (en) * | 2006-10-24 | 2012-05-09 | 名古屋電機工業株式会社 | Radiation inspection apparatus, radiation inspection method, and radiation inspection program |
| JP2008298480A (en) * | 2007-05-29 | 2008-12-11 | Beamsense Co Ltd | Stereo fluoroscopic device, and stereo observation method using therefor |
| JP5125423B2 (en) * | 2007-11-01 | 2013-01-23 | オムロン株式会社 | Method of inspecting solder electrode by X-ray tomographic image and board inspection apparatus using this method |
| JP4818245B2 (en) * | 2007-11-14 | 2011-11-16 | 株式会社 コアーズ | Heating X-ray observation device |
| JPWO2009078415A1 (en) * | 2007-12-17 | 2011-04-28 | 株式会社ユニハイトシステム | X-ray inspection apparatus and method |
| JP5396751B2 (en) * | 2008-06-18 | 2014-01-22 | オムロン株式会社 | Board inspection equipment using X-rays |
| WO2010074030A1 (en) * | 2008-12-22 | 2010-07-01 | オムロン株式会社 | X-ray inspection method and x-ray inspection apparatus |
| JP5444718B2 (en) | 2009-01-08 | 2014-03-19 | オムロン株式会社 | Inspection method, inspection device, and inspection program |
| JP4574718B1 (en) | 2009-04-22 | 2010-11-04 | 株式会社アドバンテスト | Electromagnetic wave measuring apparatus, measuring method, program, recording medium |
| JP5569061B2 (en) * | 2010-03-15 | 2014-08-13 | オムロン株式会社 | X-ray inspection method, X-ray inspection apparatus and X-ray inspection program |
| JP5220060B2 (en) * | 2010-06-02 | 2013-06-26 | 株式会社アドバンテスト | Electromagnetic wave measuring apparatus, measuring method, program, recording medium |
| WO2013021413A1 (en) * | 2011-08-05 | 2013-02-14 | 株式会社島津製作所 | Radiography device |
| JP2013061257A (en) * | 2011-09-14 | 2013-04-04 | Omron Corp | X-ray inspection device, x-ray inspection device control method, program for controlling x-ray inspection device, and recording medium storing program therein |
| KR101181845B1 (en) * | 2011-12-22 | 2012-09-11 | 주식회사 쎄크 | Automatic x-ray inspection apparatus for surface mount technology in-line |
| KR101467478B1 (en) * | 2013-09-13 | 2014-12-01 | (주)시스트 | Apparatus and method for scanning circuit elements using x-ray |
| KR101381927B1 (en) * | 2013-09-13 | 2014-04-24 | 김선택 | Apparatus and method for obliquely scanning circuit elements using x-ray |
| EP2927945B1 (en) * | 2014-04-04 | 2023-05-31 | Nordson Corporation | X-ray inspection apparatus for inspecting semiconductor wafers |
| JP6578369B2 (en) * | 2016-02-04 | 2019-09-18 | エクスロン インターナショナル ゲゼルシャフト ミット ベシュレンクテル ハフツングＹｘｌｏｎ Ｉｎｔｅｒｎａｔｉｏｎａｌ Ｇｍｂｈ | Method for reconstructing a specimen in an X-ray CT method in an X-ray CT system using intelligent path curves |
| EP3690429B1 (en) | 2019-02-04 | 2021-11-03 | MICROTEC S.r.l. | Tunnel ct scanner |
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- 2004-08-27 JP JP2004248706A patent/JP4386812B2/en not_active Expired - Fee Related
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