JP2005121468A - Food foreign substance inspection device for hair or the like using fluorescent x-ray - Google Patents

Food foreign substance inspection device for hair or the like using fluorescent x-ray Download PDF

Info

Publication number
JP2005121468A
JP2005121468A JP2003356322A JP2003356322A JP2005121468A JP 2005121468 A JP2005121468 A JP 2005121468A JP 2003356322 A JP2003356322 A JP 2003356322A JP 2003356322 A JP2003356322 A JP 2003356322A JP 2005121468 A JP2005121468 A JP 2005121468A
Authority
JP
Japan
Prior art keywords
food
ray
fluorescent
foreign matter
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003356322A
Other languages
Japanese (ja)
Inventor
Keiji Yada
慶治 矢田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tohken Co Ltd
Original Assignee
Tohken Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tohken Co Ltd filed Critical Tohken Co Ltd
Priority to JP2003356322A priority Critical patent/JP2005121468A/en
Publication of JP2005121468A publication Critical patent/JP2005121468A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a food foreign matter inspection device capable of detecting foreign matter comprising a light element such as a hair intermingled in food or the like. <P>SOLUTION: In this food foreign matter inspection device having an X-ray generation means for allowing an electron beam from an electron source to hit on an X-ray generation target to generate the X-ray, the food which is an inspection object is irradiated with the X-ray, and a fluorescent X-ray generated from the food is detected, to thereby detect a foreign matter intermingled in the food. In the device, a fluorescent X-ray detection means for detecting the fluorescent X-ray is arranged on the oblique upside or on the oblique downside of the food and out of an arrival region of the X-ray generated from the X-ray generation target. The device is also equipped with a florescent X-ray analysis means for specifying existence and the kind of the foreign matter intermingled in the food by analyzing the kind and the content of an element included in the food based on a fluorescent X-ray detection signal from the fluorescent X-ray detection means, and a display means for displaying the analysis result. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は食品異物検査装置に関し、より詳しくは、食品等に混入した毛髪等の軽元素からなる異物の検出を可能とする蛍光X線を利用した食品異物検査装置に関する。   The present invention relates to a food foreign object inspection apparatus, and more particularly to a food foreign object inspection apparatus using fluorescent X-rays that enables detection of foreign substances composed of light elements such as hair mixed in food.

加工食品の製造においては、品質の維持の為に、金属片、骨片あるいは毛髪等の異物の混入を防止する必要があるが、異物混入を完全に防止することは困難であるため、製造過程において検査装置を用いて異物混入の有無をチェックし、異物が混入した加工食品を排除することが行われている。
前記検査は非破壊で行う必要があるため、通常はX線検査装置を用いて被検査体にX線を透過させ、透過したX線を検出して画像処理を行って異物を検出していた。
しかしながら、従来のX線検査装置では、比較的重い元素からなる金属等の異物は検出できるが、毛髪等の軽元素からなる異物のX線透視画像の画像分析では明確な強度差が得られず、透視X線による画像処理では検出が不可能であった。
特開2002−139458号公報
In the production of processed foods, it is necessary to prevent foreign matter such as metal pieces, bone pieces or hair from being mixed in order to maintain quality, but it is difficult to completely prevent foreign matter from entering the manufacturing process. In US Pat. No. 5,836, the presence or absence of foreign matter is checked using an inspection device, and processed food containing foreign matter is excluded.
Since the inspection needs to be performed non-destructively, normally, an X-ray inspection apparatus is used to transmit X-rays to the object to be inspected, and the transmitted X-rays are detected and image processing is performed to detect foreign matters. .
However, the conventional X-ray inspection apparatus can detect foreign substances such as metals made of relatively heavy elements, but a clear intensity difference cannot be obtained by image analysis of X-ray fluoroscopic images of foreign substances made of light elements such as hair. Detection was impossible by image processing using fluoroscopic X-rays.
JP 2002-139458 A

本発明は、かかる従来技術の問題点に鑑みなされたものであり、食品等に混入した毛髪等の軽元素からなる異物の検出を可能とする食品異物検査装置を提供することを目的とする。   The present invention has been made in view of the problems of the prior art, and an object of the present invention is to provide a food foreign matter inspection apparatus that can detect foreign matters composed of light elements such as hair mixed in food.

本発明は食品等に混入した毛髪等の軽元素からなる異物の検出を可能とする食品異物検査装置に関し、本発明の上記目的は、電子源からの電子線をX線発生用ターゲットに当ててX線を発生させるX線発生手段を有し、前記X線を検査対象である食品に照射し、該食品から発生する蛍光X線を検出して、前記食品に混入している異物の検出を行う食品異物検査装置において、前記蛍光X線を検出する蛍光X線検出手段が、前記食品の斜め上方若しくは斜め下方で且つ前記X線発生用ターゲットから発生するX線の到達領域外に配置されるとともに、前記蛍光X線検出信号に基づいて食品に含まれる元素の種類及び含有量を分析することにより、前記食品に混入している異物の有無及びその種類を特定する蛍光X線分析手段と、分析結果を表示する表示手段とをさらに具備することにより達成される。   The present invention relates to a food foreign object inspection apparatus that enables detection of foreign substances consisting of light elements such as hair mixed in food, etc. The above object of the present invention is to apply an electron beam from an electron source to an X-ray generation target. X-ray generating means for generating X-rays, irradiating the food to be inspected with X-rays, detecting fluorescent X-rays generated from the food, and detecting foreign matter mixed in the food In the food foreign body inspection apparatus to be performed, the fluorescent X-ray detection means for detecting the fluorescent X-rays is disposed obliquely above or below the food and outside the X-ray generation area generated from the X-ray generation target. In addition, by analyzing the type and content of the element contained in the food based on the fluorescent X-ray detection signal, the fluorescent X-ray analysis means for specifying the presence and type of foreign matter mixed in the food, Display analysis results It is accomplished by further comprising display means that.

また、本発明の上記目的は、前記蛍光X線検出手段を、前記食品の斜め上方若しくは斜め下方で且つ前記X線発生用ターゲットから発生するX線の到達領域外に複数個配置することにより、効果的に達成される。   Further, the object of the present invention is to arrange a plurality of fluorescent X-ray detection means obliquely above or below the food and outside the X-ray generation area generated from the X-ray generation target. Effectively achieved.

さらに、本発明の上記目的は、前記蛍光X線検出手段を、高感度の位置検出可能な比例計数管若しくは半導体線形検出器とすることにより、より効果的に達成される。   Furthermore, the above-mentioned object of the present invention is achieved more effectively by making the fluorescent X-ray detection means a proportional counter or a semiconductor linear detector capable of highly sensitive position detection.

またさらに、本発明の上記目的は、前記蛍光X線検出手段の蛍光X線入射口の前にコリメータを設けることにより、より効果的に達成される。
さらにまた、本発明の上記目的は、食品のどの部分に異物が混入しているかを表示する機能を具備したことを特徴とする前記食品異物検査装置によって、より効果的に達成される。
Furthermore, the above object of the present invention can be achieved more effectively by providing a collimator in front of the fluorescent X-ray entrance of the fluorescent X-ray detection means.
Furthermore, the above object of the present invention is more effectively achieved by the food foreign object inspection apparatus characterized in that it has a function of displaying in which part of the food a foreign object is mixed.

本発明に係る蛍光X線を利用した毛髪等の食品異物検査装置によれば、従来の食品異物検査装置では不可能であった毛髪等の軽元素から成る異物の混入を検出することができ、また、異物の混入している場所の特定も可能となるという効果がある。   According to the food foreign matter inspection device such as hair using the fluorescent X-ray according to the present invention, it is possible to detect the contamination of foreign matters composed of light elements such as hair, which was impossible with the conventional food foreign matter inspection device, In addition, there is an effect that it is possible to specify a place where foreign substances are mixed.

本発明に係る食品異物検査装置は、X線を検査対象である食品に照射し、毛髪や他の異物に特有の元素の蛍光X線(X線照射による2次特性X線)を検出し、分析することで毛髪等の混入を検出し、食品の品質の良、不良を判定するものである。すなわち、図1に示すような分析結果が得られた場合、横軸におけるピークの位置は元素の種類を表し、縦軸は含まれている元素の濃度を表している。これにより、この異物が何であるかを特定することが可能となる。
毛髪を構成する蛋白質ケラチンは、羊毛などと同じく、大きな特徴として硫黄を含み又中心部に少量のカルシウムを含む。これは、他の冷凍食品、乾燥食品には無い特徴である。従って、蛍光X線でS及びCaの元素の信号を効率良く正確に取り出すことで毛髪の混入を検出することが本発明の要点である。
The food foreign matter inspection apparatus according to the present invention irradiates food to be inspected with X-rays, detects fluorescent X-rays of elements peculiar to hair and other foreign matters (secondary characteristic X-rays by X-ray irradiation), Analyzes are performed to detect contamination of hair and the like, and to determine whether food quality is good or bad. That is, when an analysis result as shown in FIG. 1 is obtained, the peak position on the horizontal axis represents the type of element, and the vertical axis represents the concentration of the contained element. As a result, it is possible to specify what the foreign matter is.
The protein keratin that constitutes hair, like wool, contains sulfur as a major feature and a small amount of calcium in the center. This is a feature not found in other frozen foods and dry foods. Therefore, the main point of the present invention is to detect hair contamination by efficiently and accurately extracting S and Ca element signals with fluorescent X-rays.

以下、本発明を実施するための最良の形態につき、図面を参照して詳細に説明する。
図2は本発明に係る食品に混入している異物の検出を行う食品異物検査装置の第一実施例を示すものである。図中、X線発生器は電子源からの電子線をX線発生用ターゲットに当ててX線を発生させるものであり、発生したX線を検査対象物である食品に照射すると、全方位に被検査対象物の構成元素特有の波長をもった蛍光X線が発生する。発生した蛍光X線のうち被検査対象物の斜め上方(実線で示している)もしくは斜め下方(点線で示している)に配置された蛍光X線検出器に入射したものは電気信号に変換される。
なお、蛍光X線検出器を被検査対象物の斜め上方もしくは斜め下方に配置するのは以下の理由による。すなわち、X線発生器からは連続X線と特性X線が出るが、特に連続X線は電子の入射方向に沿って下方に照射される。そのため被検査対象物の真下に蛍光X線検出器を置いても連続X線がバックグラウンドになり蛍光X線が測定できないので、被検査対象物の斜め上方、もしくは斜め下方で且つX線発生器からの直接X線の到達領域外(本例では食品の斜め上方もしくは斜め下方)に蛍光X線検出器を配置しているのである。
図3は図2の食品異物検査装置の斜視図であり、蛍光X線検出器の入射面がコンベアの移動方向に対して直角になるように配置されていることを示している。
Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the drawings.
FIG. 2 shows a first embodiment of a food foreign matter inspection apparatus for detecting foreign matters mixed in food according to the present invention. In the figure, an X-ray generator generates an X-ray by applying an electron beam from an electron source to an X-ray generation target. When the generated X-ray is irradiated to a food to be inspected, it is omnidirectional. X-ray fluorescence having a wavelength peculiar to the constituent element of the object to be inspected is generated. Of the generated fluorescent X-rays, those incident on the fluorescent X-ray detector disposed obliquely above (indicated by solid lines) or diagonally below (indicated by dotted lines) of the object to be inspected are converted into electrical signals. The
The fluorescent X-ray detector is disposed obliquely above or obliquely below the object to be inspected for the following reason. That is, continuous X-rays and characteristic X-rays are emitted from the X-ray generator, and in particular, continuous X-rays are irradiated downward along the incident direction of electrons. Therefore, even if a fluorescent X-ray detector is placed directly under the object to be inspected, the continuous X-rays are in the background and the fluorescent X-ray cannot be measured. Therefore, the X-ray generator is obliquely above or below the object to be inspected. The fluorescent X-ray detector is arranged outside the direct X-ray arrival area from (in this example, diagonally above or diagonally below the food).
FIG. 3 is a perspective view of the food foreign object inspection apparatus of FIG. 2 and shows that the incident surface of the fluorescent X-ray detector is arranged so as to be perpendicular to the moving direction of the conveyor.

図4は一次元の蛍光X線検出器(ラインセンサー)を用いた場合を模式的に表したものであり、複数の半導体検出素子が列状に配列されたものである。前記半導体検出素子としては冷却不要で検出感度の高いCdTe(テルル化カドミウム半導体)が利用可能である。この他に、位置検出可能な比例計数管も、分解能は上記半導体検出素子より幾分劣るが、より高感度である点で有効である。
蛍光X線検出器から出力された信号は、パルスハイトアナライザ(波高分析器)を介して分析用PCに入力され、蛍光X線の検出情報及び各元素を特定するための設定値に基づいて被検査対象物の元素の分析処理が行われるようになっている。
分析用PCにおいて、毛髪の検出は、毛髪からのS及びCaの蛍光X線の強度と各成分間の比例関係又はパターンマッチングを根拠に判定する。又、検出精度を上げるため、吸収の補正処理と、バックグラウンドと呼ばれる背景雑音の除去が行われる。
FIG. 4 schematically shows the case where a one-dimensional fluorescent X-ray detector (line sensor) is used, in which a plurality of semiconductor detection elements are arranged in a line. As the semiconductor detection element, CdTe (cadmium telluride semiconductor) having high detection sensitivity without requiring cooling can be used. In addition, the proportional counter capable of position detection is also effective in that it has higher sensitivity, although the resolution is somewhat inferior to that of the semiconductor detection element.
The signal output from the fluorescent X-ray detector is input to the analysis PC via a pulse height analyzer (wave height analyzer), and is detected based on the detection information of the fluorescent X-ray and the set value for specifying each element. An analysis process of the element of the inspection object is performed.
In the PC for analysis, the detection of hair is determined on the basis of the proportionality or pattern matching between the intensity of fluorescent X-rays of S and Ca from the hair and each component. Further, in order to increase the detection accuracy, absorption correction processing and background noise called background are removed.

図5は、一次元の蛍光X線検出器を検出器とする場合で、より高い検出位置精度を求めるために各検出素子の前にコリメータを設けた場合を示す図である。コリメータの性能は検出感度と検出位置精度の相互関係で決定される。なお、コリメータとは垂直に入射してきた放射線だけを検出器内に通過させる働きを持つもので、ほとんどのものは鉛でできている。前記蛍光X線検出器、パルスハイトアナライザ及び分析用PCにより、エネルギー分散型蛍光X線分析装置が構成され、この装置は市販されているものが利用できる。   FIG. 5 is a diagram showing a case where a one-dimensional fluorescent X-ray detector is used as a detector and a collimator is provided in front of each detection element in order to obtain higher detection position accuracy. The performance of the collimator is determined by the correlation between detection sensitivity and detection position accuracy. The collimator has the function of allowing only the vertically incident radiation to pass through the detector, and most are made of lead. The fluorescent X-ray detector, the pulse height analyzer, and the analysis PC constitute an energy dispersive fluorescent X-ray analyzer, and a commercially available apparatus can be used.

なお、図3に示す例では、前記X線発生器から照射されるX線は扇状(平面状)に食品に照射されているが、円錐状に照射してもよい。扇状に照射する場合は、一次元の検出器(ラインセンサー)とコンベアによる被検査対象物の移動により、二次元画像を得ることができるが、さらにX線反射板を設けることによって信号量を増加させ、より明瞭な画像にすることができる。この二次元画像と毛髪を検出する構成を組み合わせることにより、どこの部分に毛髪が存在するのかを前記分析用PCの画面(表示手段)に表示することができる。存在位置は、色やマークで他のものと識別し表示することも可能である。   In addition, in the example shown in FIG. 3, although the X-ray irradiated from the said X-ray generator is irradiated to the food in fan shape (planar shape), you may irradiate to cone shape. In the case of fan-shaped irradiation, a two-dimensional image can be obtained by moving the object to be inspected by a one-dimensional detector (line sensor) and a conveyor, but the amount of signal is increased by providing an X-ray reflector. And a clearer image can be obtained. By combining this two-dimensional image and the structure for detecting hair, it is possible to display on which screen the hair is present on the screen (display means) of the analysis PC. The existence position can be identified and displayed by other colors and marks.

本発明に係る食品異物検査装置の第二実施例は、第一実施例において蛍光X線検出器を複数設けた場合に相当する(図示せず。)。これは蛍光X線の強度が、非常に弱く、かつエネルギーも低い為に、被検査対象物内および空気中での吸収を考慮し、感度の向上と検出ミス防止を図る為に設けられるものである。なお、蛍光X線検出器を複数設ける場合、被検査対象物の斜め上方に2個の蛍光X線検出器を配置してもよいし、2個とも斜め下方でもよいし、1個が斜め上方、他の1個が斜め下方でもよい。また、蛍光X線検出器の数を3個以上にしてもよいことは言うまでもない。   The second embodiment of the food foreign object inspection apparatus according to the present invention corresponds to the case where a plurality of fluorescent X-ray detectors are provided in the first embodiment (not shown). This is provided to improve sensitivity and prevent detection errors in consideration of absorption in the object to be inspected and in the air because the intensity of fluorescent X-ray is very weak and energy is low. is there. When a plurality of fluorescent X-ray detectors are provided, two fluorescent X-ray detectors may be arranged obliquely above the object to be inspected, both of them may be obliquely below, or one may be obliquely upward. The other one may be obliquely downward. Needless to say, the number of fluorescent X-ray detectors may be three or more.

元素分析結果のモデルを示す図である。It is a figure which shows the model of an elemental analysis result. 本発明に係る食品異物検査装置の第一実施例を示す図である。It is a figure which shows the 1st Example of the food foreign material inspection apparatus which concerns on this invention. 本発明に係る食品異物検査装置の第一実施例の斜視図である。1 is a perspective view of a first embodiment of a food foreign object inspection apparatus according to the present invention. 一次元の蛍光X線検出器(ラインセンサー)を用いた場合を模式的に表したものである。A case where a one-dimensional fluorescent X-ray detector (line sensor) is used is schematically shown. 蛍光X線検出器の前にコリメータを設けた場合の図である。It is a figure at the time of providing a collimator in front of a fluorescent X-ray detector.

Claims (5)

電子源からの電子線をX線発生用ターゲットに当ててX線を発生させるX線発生手段を有し、前記X線を検査対象である食品に照射し、該食品から発生する蛍光X線を検出して、前記食品に混入している毛髪等の異物の検出を行う食品異物検査装置において、
前記蛍光X線を検出する蛍光X線検出手段が、前記食品の斜め上方もしくは斜め下方で且つ前記X線発生用ターゲットから発生するX線の到達領域外に配置されるとともに、
前記蛍光X線検出手段からの蛍光X線検出信号に基づいて前記食品に含まれる元素の種類及び含有量を分析することにより、前記食品に混入している異物の有無及びその種類を特定する蛍光X線分析手段と、分析結果を表示する表示手段とをさらに具備したことを特徴とする、食品に混入している異物の検出を行う食品異物検査装置。
X-ray generation means for generating X-rays by applying an electron beam from an electron source to an X-ray generation target, irradiating the food to be inspected with the X-rays, and generating fluorescent X-rays generated from the food In the food foreign matter inspection apparatus that detects and detects foreign matters such as hair mixed in the food,
The fluorescent X-ray detection means for detecting the fluorescent X-ray is disposed obliquely above or below the food and outside the X-ray generation area generated from the X-ray generation target,
Fluorescence that identifies the presence and type of foreign matter mixed in the food by analyzing the type and content of the element contained in the food based on the fluorescent X-ray detection signal from the fluorescent X-ray detection means A food foreign matter inspection apparatus for detecting foreign matter mixed in food, further comprising X-ray analysis means and display means for displaying an analysis result.
前記蛍光X線検出手段が、前記食品の斜め上方もしくは斜め下方で且つ前記X線発生用ターゲットから発生するX線の到達領域外に複数個配置されていることを特徴とする請求項1に記載の食品に混入している異物の検出を行う食品異物検査装置。   2. The fluorescent X-ray detection means is arranged in a plurality obliquely above or obliquely below the food and outside the X-ray generation area generated from the X-ray generation target. Food foreign matter inspection device that detects foreign matter mixed in food. 前記蛍光X線検出手段が、高感度の位置検出可能な比例計数管若しくは半導体線形検出器であることを特徴とする請求項1又は2に記載の食品に混入している異物の検出を行う食品異物検査装置。   3. The food for detecting foreign matter mixed in food according to claim 1, wherein the fluorescent X-ray detection means is a proportional counter or a semiconductor linear detector capable of highly sensitive position detection. Foreign matter inspection device. 前記蛍光X線検出手段の蛍光X線入射口の前にコリメータが設けられていることを特徴とする請求項1乃至3のいずれかに記載の食品に混入している異物の検出を行う食品異物検査装置。   4. A food foreign object for detecting a foreign substance mixed in food according to claim 1, wherein a collimator is provided in front of the fluorescent X-ray entrance of the fluorescent X-ray detection means. Inspection device. 食品のどの部分に異物が混入しているかを表示する機能を具備したことを特徴とする請求項1乃至4のいずれかに記載の食品に混入している異物の検出を行う食品異物検査装置。   The food foreign matter inspection apparatus for detecting foreign matter mixed in food according to any one of claims 1 to 4, further comprising a function of displaying which part of the food contains foreign matter.
JP2003356322A 2003-10-16 2003-10-16 Food foreign substance inspection device for hair or the like using fluorescent x-ray Pending JP2005121468A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003356322A JP2005121468A (en) 2003-10-16 2003-10-16 Food foreign substance inspection device for hair or the like using fluorescent x-ray

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003356322A JP2005121468A (en) 2003-10-16 2003-10-16 Food foreign substance inspection device for hair or the like using fluorescent x-ray

Publications (1)

Publication Number Publication Date
JP2005121468A true JP2005121468A (en) 2005-05-12

Family

ID=34613602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003356322A Pending JP2005121468A (en) 2003-10-16 2003-10-16 Food foreign substance inspection device for hair or the like using fluorescent x-ray

Country Status (1)

Country Link
JP (1) JP2005121468A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017227627A (en) * 2016-05-13 2017-12-28 ブルーカー アーイクスエス ゲーエムベーハーBruker AXS GmbH Device for selecting sample, in particular, scrap particles by fluorescent x-ray
KR20190142613A (en) 2018-06-18 2019-12-27 켐아이넷(주) System for discriminating foreign materials in food based on spectrum analysis and process of the same
US11867645B2 (en) 2018-10-18 2024-01-09 Security Matters Ltd. System and method for detection and identification of foreign elements in a substance by X-ray or Gamma-ray detection and emission

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017227627A (en) * 2016-05-13 2017-12-28 ブルーカー アーイクスエス ゲーエムベーハーBruker AXS GmbH Device for selecting sample, in particular, scrap particles by fluorescent x-ray
US10697909B2 (en) 2016-05-13 2020-06-30 Bruker Axs Gmbh Device for sorting materials, in particular scrap particles, by means of X-ray fluorescence
KR20190142613A (en) 2018-06-18 2019-12-27 켐아이넷(주) System for discriminating foreign materials in food based on spectrum analysis and process of the same
US11867645B2 (en) 2018-10-18 2024-01-09 Security Matters Ltd. System and method for detection and identification of foreign elements in a substance by X-ray or Gamma-ray detection and emission

Similar Documents

Publication Publication Date Title
US8891729B2 (en) X-ray analyzer and X-ray analysis method
JP4741986B2 (en) Optical inspection method and optical inspection apparatus
JP4711759B2 (en) X-ray inspection equipment
US20050105680A1 (en) Non-destructive inspection of material in container
US20100002833A1 (en) X-ray analysis apparatus and x-ray analysis method
JP2012513023A5 (en)
JP2007535671A (en) Apparatus and method for inspecting material flow by light scattering inside the material
JP2009530018A (en) Double source scanning detection of ionizing radiation
JP4725350B2 (en) Transmission X-ray measurement method
JP3715524B2 (en) X-ray foreign object detection device
JPH0260329B2 (en)
JP2002168803A (en) X-ray foreign matter detector
JPH0663959B2 (en) Method and apparatus for measuring basis weight distribution
US20110206186A1 (en) X-ray analyzer and mapping method for an x-ray analysis
US20220196578A1 (en) An apparatus to operate a quality control in industrial production lines, corresponding method and computer program product
JP2005121468A (en) Food foreign substance inspection device for hair or the like using fluorescent x-ray
US20190025231A1 (en) A method of detection of defects in materials with internal directional structure and a device for performance of the method
US20030164944A1 (en) Apparatus for determining the shape and/or size of little particles
JP4906602B2 (en) Defect inspection apparatus and defect inspection method for polycrystalline silicon substrate
JPH06503877A (en) Imaging methods for defining the structure of objects
EP4130725A1 (en) Foreign matter inspection device
US6906796B2 (en) Device and method for irradiation
JP7079966B2 (en) X-ray detector
JP2000055842A (en) X-ray image pick-up analysis method and device
JP2006329822A (en) Electromagnetic wave detector and inspection device therewith

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060905

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20081120

A131 Notification of reasons for refusal

Effective date: 20081202

Free format text: JAPANESE INTERMEDIATE CODE: A131

A02 Decision of refusal

Effective date: 20090331

Free format text: JAPANESE INTERMEDIATE CODE: A02