JP2005121436A - Swing device movable longitudinally and laterally - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enhance positioning precision, stability and the like, and to simplify a support unit for supporting a base and a stage to realize compactification. <P>SOLUTION: The stage 2 is supported on the base B by a plurality of first support units 12, and the stage 2 is driven to be movable longitudinally and laterally and to be swingable, by a plurality of driving mechanisms 4. The each first support unit 12 has an inner member 17 fixed to a base B side, and an outer member 18 fixed to a stage 2 side, and is constituted to support the outer member 18 onto the inner member 17, by interposing the first rolling member 20 held to the first holding member 19 in a periphery of the upper face center of a base member 17a in the inner member 17, and by interposing the second rolling member 22 held to the second holding member 21 between a base edge member 17b in the inner member 17 and an outer lower edge member 18c in the outer member 18. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a vertical / horizontal movement swiveling device that can be applied to a precision measurement / inspection instrument and a positioning stage in alignment work in an LC manufacturing process.

  2. Description of the Related Art In recent years, a vertical / horizontal movement swivel support mechanism has been proposed which is a mechanism that does not have a vertical / horizontal movement mechanism and a swivel mechanism combined vertically, and does not occupy the central portion of the stage.

For example,
In such a vertical / horizontal movement turning support mechanism, as shown in FIGS. 6 to 9, the stage 2 is supported on the base 1 by the support units 3, 3, 3 so as to be capable of vertical / horizontal movement turning. In this configuration, a predetermined vertical / horizontal movement turning operation is performed by three drive mechanisms 4, 4, 4. As shown in FIG. 8, the support unit 3 includes an inner support plate 5 and two outer support plates 6 a and 6 b that are integrally coupled with the inner support plate 5 interposed therebetween. The ball 8 held by the holding member 7 is interposed between the outer support plates 6a and 6b, so that the inner support plate 5 and the outer support plates 6a and 6b are relatively free to move on a plane. In this case, the outer support plates 6 a and 6 b surround the inner support plate 5, and the play holes 9 are formed in the outer support plates 6 a and 6 b on one side and the holding member 7. The mounting member 10 is protruded outside the outer support plates 6a and 6b through the play hole 9.

  In such a configuration, the mounting member 10 of the inner support plate 5 is attached to the frame portion of the base 1, and the upper outer support plates 6 a and 6 b are attached to the frame portion of the stage 2, whereby the stage 2 is placed on the base 1. Can be supported. In this case, the support unit 3 is installed at the three ends of one side of each frame part and in the middle of the opposite sides and is supported in a so-called three-point support type (see FIG. 6).

  As described above, the stage 2 is supported by the ball 8 held by the holding member 7 so as to be free to move, that is, to be able to move vertically and horizontally, while being limited by the movement stroke of each support unit 3. it can. Each support unit 3 has a moving stroke defined by the distance between the mounting member 10 and the play hole 9.

  The stage can be moved in a vertical and horizontal movement by selectively driving the three drive mechanisms 4, 4, and 4.

However, as described above, the support unit 3 includes the inner support plate 5 and the two outer support plates 6a and 6b joined together with the inner support plate 5 interposed therebetween. Since the ball 8 held by the holding member 7 is interposed between the plates 6a and 6b, as a result, the inner support plate 5 and the outer support plates 6a and 6b are arranged in the height direction via the ball 8. It can be said that there is room for improvement in the configuration of the support unit 3.
The present invention has been proposed from such a background, and in the vertical and horizontal movement turning device, a support unit for supporting the base and the stage for further improvement in positioning accuracy, stability and the like, and further downsizing. An object of the present invention is to provide a vertical and horizontal movement swivel device that simplifies the above.

In order to solve the above-described problem, in the present invention, in the first aspect, the stage is supported on the base by a plurality of first support units that are relatively free to move on a plane. The drive mechanism is configured to adjust the stage so that the stage can be moved vertically and horizontally, and can be pivoted. The first support unit includes an inner member that supports a downward load and an outer member that supports an upward load. The inner member is disposed on the base with a flat top surface and a step at an equidistant distance from a central axis passing through the center of the base member in the orthogonal direction in the vicinity of the base member upper surface edge. A base edge member having a smaller dimension in the central axis direction than the base member, and when the outer member surrounds the inner member from above, the base edge member of the inner member is Opposite outer bottom A first rolling member held by the first holding member is interposed around the center of the upper surface of the base member in the inner member, and a base edge member in the inner member and an outer lower edge in the outer member A vertical and horizontal movement swiveling device is proposed in which a second rolling member held by a second holding member is interposed between members, and an outer member is supported by an inner member.
According to the present invention, in claim 2, the stage is supported on the base by the second and third support units alternately arranged and relatively movable on the plane. The stage is configured so that the stage can be moved vertically and horizontally by a mechanism, and the second support unit projects with a lower member fixed on the base side and an axis extending vertically through the center of the lower member. The lower member and the upper member have a large number of rolling elements held by a holding member between the upper member and the lower member. The third support unit includes a lower member disposed on the base side and a through hole provided in a central portion of the lower member. An upper member fixed to a mounting member fixed on the side, and the lower portion Is fixed to the lower surface of the stage via a space member, and the upper member is disposed in a gap formed by the space member. A holding member is provided between the lower surface of the upper member and the upper surface of the lower member. A vertical / horizontal moving swivel device is proposed in which a large number of held rolling elements are interposed to freely move in the horizontal direction.
According to the present invention, in the third aspect, the stage is supported on the base by the plurality of first support units that are relatively free to move on the plane on the stage frame side. The stage is configured to be vertically and horizontally movable and turnable, and the first support unit includes an inner member that supports a downward load and an outer member that supports an upward load, and the inner member Is a base member that is fixed on the base and has a flat top surface, and a base member that is disposed in the vicinity of the edge of the top surface of the base member at an equal distance from a central axis that passes through the center of the base member in the orthogonal direction. A base edge member having a smaller dimension in the central axis direction than the outer member, and when the outer member surrounds the inner member from above, an outer lower portion that faces the base edge member of the inner member from the lower surface side. Extend the edge member A first rolling member held by the first holding member is interposed around the center of the upper surface of the base member of the inner member, and a second portion is interposed between the base edge member of the inner member and the outer lower edge member of the outer member. A vertical / horizontal movement swiveling device is proposed in which a second rolling member held by a holding member is interposed to support an outer member on an inner member.
Also, in the present invention, in claim 4, the stage is supported on the base by the second and third support units that are alternately arranged on the stage frame portion side and can relatively freely move on the plane. As described above, the stage is configured to be vertically and horizontally movable and pivotable by a plurality of drive mechanisms, and the second support unit penetrates the lower member fixed on the base side and the center of the lower member in the vertical direction. The lower member and the upper member are held by a holding member between the upper member and the lower member. The mounting member has a mounting member protruding around the axis and an upper member fixed on the lower surface of the stage. A number of rolling elements are interposed to allow free movement in the horizontal direction, and the third support unit is provided via a lower member disposed on the base side and a through hole provided in a central portion of the lower member. And fixed to a mounting member fixed on the base side. The lower member is fixed to the lower surface of the stage via a space member, and the upper member is disposed in a gap formed by the space member. A vertical / horizontal movement swiveling device is proposed in which a large number of rolling elements held by a holding member are interposed between upper surfaces of lower members so as to be freely movable in the horizontal direction.
Further, according to the present invention, in claim 5, the drive mechanism is attached to the base side, and is attached to the stage side, the linear actuator having an actuating rod that drives in a driving direction parallel to the plane, and the actuating rod A guide member disposed in a direction orthogonal to the driving direction of the actuator, a movable element arranged movably on the guide member, and the movable element and the actuating rod are coupled to be rotatable about an axis perpendicular to the plane. We propose a vertical and horizontal moving swivel device with the above structure.

  According to the present invention, the support unit can be simplified and the distance between the base and the stage can be suppressed as much as possible. Therefore, further improvement in positioning accuracy, stability, etc., and compactness can be achieved. A wide range of uses such as processing machines and precision positioning devices can be expected.

According to the first aspect of the present invention, the first support unit includes the outer member and the inner member that are held by the first holding member by the base member in the inner member and the base edge member that is integral at both side edges of the base member. Since it is configured to be in a relatively movable state via the first rolling member and the second rolling member held by the second holding member, the height is higher than that of the conventional support unit shown in FIG. It can be suppressed and the configuration can be simplified.
At that time, a load is applied to the upper surface of the base member of the inner member from the stage side via the outer base member of the outer member. It may become an unbalanced load.
When an unbalanced load is applied, a downward force is applied to one end of the outer base member in the outer member, and an upward force is applied to the other.
However, since the outer member and the inner member are in contact with the outer base member and the outer lower edge member via the second rolling member held by the second holding member, the outer member swings. Therefore, it is possible to perform a stable vertical and horizontal movement turning operation.
Thus, further improvement in positioning accuracy, stability, etc., and compactness of the vertical and horizontal movement swivel device configured to support the stage on the base by the first support unit can be achieved.

  According to claim 2, since the stage is supported by using the second support unit that supports the load from above to below and the three support units that support the load from below to above, the stage It is possible to stably support the stage even against an unbalanced load, and the relative free movement of the stage is not hindered.

  According to the third aspect, the second support unit that supports the load from the upper side to the lower side and the three support units that support the load from the lower side to the upper side are alternately arranged on the frame part side of the frame-shaped stage. By providing, a vertical / horizontal movement turning operation can be provided to the vertical / horizontal movement turning apparatus.

  According to the fourth aspect, since the stage is supported on the frame portion side of the frame-shaped stage by the first support unit that supports the load from both the upper and lower directions, the stage can be freely moved. While supporting the stage stably, a free vertical and horizontal movement swivel operation can be brought about without hindering the relative free movement of the stage.

  According to the fifth aspect of the present invention, the stage can be swiveled in the vertical and horizontal directions on the surface including the upper surface of the stage by driving the plurality of driving mechanisms appropriately, selectively or in combination.

  DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the vertical / horizontal movement turning device according to the present invention will be described below with reference to the accompanying drawings. In addition, since the same thing can be used for the component which comprises the conventional alignment stage 1 mentioned above here, it attaches | subjects and demonstrates the same code | symbol.

FIG. 1 shows a vertical and horizontal movement turning device 11. That is, in this vertical / horizontal moving swivel device 11, the stage 2 is supported on a base (described later) by a plurality of first support units 12 that can relatively freely move on a plane, and a plurality of drive mechanisms 4, 4, 4. 4, the stage 2 is driven so as to be movable in the vertical and horizontal directions and turnable.
Although the details will be described later, the first support unit 12 is disposed in the vicinity of the four corners and at the center of the rectangular stage 2.

  The drive mechanisms 4, 4, 4 have a well-known configuration, and guide rails 13 are arranged at three end surfaces of the four end surfaces of the stage 2 so as to be orthogonal to the end surfaces, and the guide rails 13. The moving element 14 is moved along the moving line 14, and the moving rod 16 a of the linear actuator 16 is connected to the moving element 14 via the rotary joint 15. Among the drive mechanisms 4, 4, 4, the drive mechanisms 4, 4 arranged on the end faces facing each other are set so that the operation directions are parallel to the end faces and opposite to each other, and the remaining drive mechanisms 4 are The operation direction is set in a direction orthogonal to the operation direction of the facing drive mechanism 4.

Next, the first support unit 12 will be described in detail.
That is, as shown in FIG. 2, the first support unit 12 includes an inner member 17 fixed on the base B side and an outer member 18 fixed on the stage 2 side.

  The inner member 17 is fixed on the base B, has a flat upper surface 17a, and a base member 17a near the upper surface edge of the base member 17a with respect to a central axis Z passing through the center of the base member 17a in an orthogonal direction. A base edge member 17b having a small dimension in the central axis Z direction as compared with the base member 17a, which is stepped at a distance, is provided.

  When the outer member 18 is surrounded by the inner member 17 from above, the outer member 18 is arranged so as to face the base member 17a and the base edge member 17b with the center axis Z of the base member 17a of the inner member 17 being centered. The outer base member 18a and the outer lower edge member 18c arranged to face the base edge member 17b of the inner member 17 through the outer frame member 18b from the lower surface side.

  The first rolling member 20 held by the first holding member 19 is interposed around the center of the upper surface of the base member 17a of the inner member 17, and the outer edge of the base edge member 17b and the outer member 18 of the inner member 17 are interposed. The second rolling member 22 held by the second holding members 21, 21 is interposed between the edge members 18 c so that the outer member 18 is supported by the inner member 17.

  In the first support unit 12 configured as described above, an appropriate distance d1 is provided between the base member 17a of the inner member 17 and the outer lower edge member 18c of the outer member 18, and the base edge of the inner member 17 is also provided. An interval d2 is provided between the member 17b and the outer frame member 18b of the outer member 18. Note that d1 = d2. These intervals d1 and d2 define the movement stroke.

In the vertical / horizontal movement turning device 11 as described above, the three drive mechanisms 4, 4, 4 are driven in an appropriate amount, selectively, or in combination based on software, so that the stage 2 includes the upper surface of the stage 2. Above, it is possible to adjust the turn in the vertical and horizontal directions (X, Y).
For example, when the operating rods 16a and 16a in the linear actuators 16 and 16 which are the opposing drive mechanisms 4 and 4 are operated in equal amounts in opposite directions (one is extended and the other is contracted), the opposing drive mechanisms 4 , 4 is applied to the moving element 14 on the guide rail 13 mounted in a direction perpendicular to the end face of the stage 2 in the drawing, thrust in the X direction in the figure can be given, and the stage 2 can be moved in the X direction.

  On the other hand, when only the operation rod 16a in the linear actuator 16 which is the drive mechanism 4 mounted in the direction orthogonal to the end surface of the stage 2 on which the opposed drive mechanisms 4 and 4 are disposed, the stage 2 is It can be moved in the direction.

  Further, the operating rods 16a and 16a of the linear actuators 16 and 16 which are the opposing drive mechanisms 4 and 4 are operated in equal amounts in opposite directions, and orthogonal to the end face of the stage 2 on which the opposing drive mechanisms 4 and 4 are disposed. When the actuating rod 16a in the linear actuator 16 that is the drive mechanism 4 mounted in the direction to be actuated, the stage 2 can be moved in the diagonal direction.

  Further, the operating rods 16a and 16a in the linear actuators 16 and 16 which are the opposing drive mechanisms 4 and 4 are operated in equal amounts (expanded in the same direction), and the stage in which the opposing drive mechanisms 4 and 4 are disposed. When the actuating rod 16a in the linear actuator 16 which is the drive mechanism 4 mounted in the direction orthogonal to the two end faces is actuated (expanded in the same direction), the stage 2 can be turned by a small angle.

By the way, such a vertical / horizontal movement / swivel operation of the vertical / horizontal movement / swivel device 11 can be realized by relatively freely moving the plurality of first support units 12 supporting the stage 2 on the base B on the plane. It is.
That is, the stage 2 is attached to the outer base member 18 a of the outer member 18, and the downward load at this time is transmitted through the outer base member 18 a and the first rolling member 20 held by the first holding member 19. The inner member 17 rests on the upper surface of the base member 17a. At this time, there is a minute gap between the base edge member 17 b integrated with the base member 17 a in the inner member 17 and the outer base member 18 a in the outer member 18.
The base edge member 17b of the inner member 17 has outer lower edge members 18c on both sides of the outer base member 18a of the outer member 18 arranged to face each other via the outer frame member 18b from the lower surface side, The second holding members 21 and 21 are in contact with each other via the second rolling member 22 held.

Here, a load is applied to the upper surface of the base member 17 a of the inner member 17 from the stage 2 side via the outer base member 18 a of the outer member 18. May be applied to the outer base member 18a of the outer member 18 as an offset load from the stage 2 side.
When an unbalanced load is applied, a downward force is applied to one end of the outer base member 18a of the outer member 18, and an upward force is applied to the other.
However, the outer member 18 and the inner member 17 are not only the outer base member 18a but also the outer lower edge member 18c as described above, via the second rolling member 22 held by the second holding members 21 and 21. Since they are in contact with each other, the outer member 18 does not swing, and the relative free movement of the outer member 18 and the inner member 17 is not hindered. Therefore, the vertical / horizontal movement turning device 11 can perform a stable vertical / horizontal movement turning operation.
At that time, the distance d1 between the base member 17a in the inner member 17 and the outer lower edge member 18c in the outer member 18, and the distance d2 between the base edge member 17b in the inner member 17 and the outer frame member 18b in the outer member 18. Thus, the outer member 18 and the inner member 17 can relatively freely move on a plane within the range of the movement stroke defined.

  As described above, the first support unit 12 includes the first holding member, the outer member 18 and the inner member 17 including the base member 17a in the inner member 17 and the base edge member 17b integrated on both side edges of the base member 17a. Since the first rolling member 20 held by 19 and the second rolling member 22 held by the second holding members 21 and 21 are in contact with each other in a relatively movable state, the conventional structure shown in FIG. Since the height can be suppressed and the configuration can be simplified as compared with the support unit 3 of the vertical and horizontal movement swiveling device 11 configured to support the stage 2 on the base B by the first support unit 12, Improvements in positioning accuracy, stability, etc., and compactness can be achieved.

  Moreover, the vertical / horizontal movement turning device 11 according to the present invention can also be implemented as follows. That is, in the vertical and horizontal movement turning device 11 shown in FIG. 3, the frame-like stage 2 having the window portion W at the central portion is alternately arranged on the base B on the stage 2 frame portion side. The stage 2 is supported by freely movable second and third support units 23 and 24, and the stage 2 is adjusted to be movable in the vertical and horizontal directions and to be rotatable by a plurality of drive mechanisms (not shown).

The second support unit 23 is a unit having a function of supporting a load from above to below, and is disposed at four corners of the frame-like stage 2.
That is, the second support unit 23 includes a lower member 25 fixed on the base B side, an attachment member 26 projecting about an axis Z passing through the center of the lower member 25 in the vertical direction, and a lower surface side of the stage 2. The lower member 25 and the upper member 27 having a fixed upper member 27 have a large number of rolling members 29 held by a holding member 28 interposed between the upper member 27 and the lower member 25. The structure allows free movement in the horizontal direction.
In this case, the moving stroke of the second support unit 23 is defined by the gap G between the mounting member 26 and the holding member 28 holding a large number of rolling members 29 (substantially twice the gap G).

On the other hand, the third support unit 24 is a unit having a function of supporting a load from below to above. That is, the third support unit 24 is disposed on the base B side via the lower member 25 disposed on the base B side of the frame-shaped stage 2 and the through hole 30 provided in the central portion of the lower member 25. The lower member 25 is screwed to the lower surface side of the stage 2 via a space member 31 and is formed in a gap formed by the space member 31. The upper member 27 is disposed, and a large number of rolling members 29 held by a holding member 28 are interposed between the lower surface of the upper member 27 and the upper surface of the lower member 25, so that a free movement in the horizontal direction is possible. Yes.
In this case, in the third support unit 24, the moving stroke is defined by the distance d generated between the through hole 30 provided in the central portion of the lower member 25 and the mounting member 26 in the upper member 27. An interval d having the same dimension is also formed between the upper member 27 and the space member 31 on the lower member 25 side.

As described above, also in the second and third support units 23 and 24, a large number of rollings in which the lower member 25 and the upper member 27 are held by the single holding member 28 on the base B side and the stage 2 side. Since the member 29 is interposed so as to be freely movable in the horizontal direction, the height dimension can be suppressed, thereby further improving the positioning accuracy, stability, etc. of the vertical and horizontal movement turning device 11, and Compactness is achieved.
The second and third support units 23 and 24 have different movement strokes. In this case, the second support unit 23 holds the mounting member 26 and a large number of rolling members 29 so that the moving stroke of the second support unit 23 is larger than that of the third support unit 24. If the gap G with the member 28 is set, the vertical / horizontal movement swiveling device 11 can be provided with any vertical / horizontal movement / turning motion.

  The second support unit 23 is a unit having a function of supporting a load from above to below, whereas the third support unit 24 is a unit having a function of supporting a load from below to above. By arranging these second and third support units 23 and 24 alternately, the stage can be stabilized even when an unbalanced load is applied from the stage 2 to the second and third support units 23 and 24 during operation. It can support and can contribute to the improvement of the positioning accuracy, stability, etc. of the vertical / horizontal movement turning device 11.

  As mentioned above, although the vertical / horizontal movement turning apparatus 11 according to the present invention has been described with reference to the first embodiment and the second embodiment, the stage 2 shown in the first embodiment is replaced with the second and second embodiments although illustration is omitted. A configuration in which the three support units 23 and 24 are supported in combination is also possible.

  According to such a vertical and horizontal movement swiveling device 11, by alternately arranging the second and third support units 23 and 24, it is possible to suitably support an uneven load on the stage 2, This can contribute to further improvement in positioning accuracy and stability.

  Furthermore, the frame-like stage 2 shown in the second embodiment can be supported by the first support unit 12 used in the first embodiment (not shown).

  According to such a configuration, the stage 2 is supported so as to be freely movable by the first support unit 12 that supports the load from both the upper and lower directions, so that the stage 2 is stably supported against the uneven load. At the same time, it is possible to provide a free vertical / horizontal movement swivel operation without hindering the relative free movement of the stage 2.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic plan view showing one embodiment of a vertical / horizontal movement turning device according to the present invention. It is a cross-sectional explanatory drawing of the 1st support unit used for the vertical / horizontal movement turning apparatus shown in FIG. It is a schematic plan view which shows another embodiment of the vertical / horizontal movement turning apparatus concerning this invention. FIG. 4 is a cross-sectional explanatory view of a second support unit used in the vertical / horizontal movement turning device shown in FIG. 3. FIG. 4 is a cross-sectional explanatory view of a third support unit used in the vertical and horizontal movement turning device shown in FIG. 3. It is a schematic plan view which shows an example of the conventional vertical / horizontal movement turning mechanism. It is principal part cross-sectional explanatory drawing cut | disconnected along the AA line of the vertical / horizontal movement turning mechanism shown in FIG. FIG. 7 is an enlarged cross-sectional explanatory diagram of a support unit used in the vertical / horizontal movement turning mechanism shown in FIG. 6. It is sectional explanatory drawing which cut | disconnected along the BB line of the support unit shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Base 2 Stage 3 Support unit 4 Drive mechanism 5 Inner support plate 6a, 6b Outer support plate 7 Holding member 8 Ball 9 Play hole 10 Mounting member 11 Vertical / horizontal movement turning device 12 First support unit 13 Guide rail 14 Mover 15 Rotating joint 16 linear actuator 16a operating rod 17 inner member 17a base member 17b base edge member 18 outer member 18a outer base member 18b outer frame member 18c outer lower edge member 19 first holding member 20 first rolling member 21 second holding member 22 second 2 rolling member 23 2nd support unit 24 3rd support unit 25 lower member 26 mounting member 27 upper member 28 holding member 29 rolling member 30 through hole 31 space member

Claims (5)

The stage is supported on the base by a plurality of first support units that are relatively free to move on a plane, and the stage is adjusted to be vertically and horizontally movable and turnable by a plurality of drive mechanisms. The first support unit includes an inner member that supports a downward load and an outer member that supports an upward load, and the inner member is fixed on the base, and is flat on the upper surface. And a base having a smaller dimension in the direction of the central axis compared to the base member, wherein the base member is disposed in the vicinity of the upper edge of the base member at a distance equal to the central axis passing through the center of the base member in the orthogonal direction. And an outer lower edge member extending from the lower surface side to the base edge member of the inner member when the outer member surrounds the inner member from above, and the base member of the inner member Around the top center The first rolling member held by the holding member is interposed, and the second rolling member held by the second holding member is interposed between the base edge member of the inner member and the outer lower edge member of the outer member. A vertical and horizontal movement turning device characterized in that the outer member is supported by the inner member. The stage can be moved vertically and horizontally by a plurality of drive mechanisms as a structure that is supported by the second and third support units that are alternately arranged on the base and that can move relatively freely on a plane. And the second support unit includes a lower member fixed to the base side, a mounting member projecting about an axis passing through the center of the lower member in the vertical direction, and the lower surface side of the stage The lower member and the upper member can be freely moved in the horizontal direction by interposing a number of rolling elements held by the holding member between the upper member and the lower member. The third support unit is fixed to an attachment member fixed on the base side through a lower member arranged on the base side and a through hole provided in a central portion of the lower member. An upper member, and the lower member has a space on the lower surface side of the stage. The upper member is arranged in a gap formed by the space member, and the rolling member held by the holding member is interposed between the lower surface of the upper member and the upper surface of the lower member. A vertical and horizontal movement swiveling device characterized by being configured to be freely movable in the horizontal direction. As a configuration in which the stage is supported on the base by a plurality of first support units that are relatively free to move on a plane on the stage frame side, the stage can be moved vertically and horizontally by a plurality of drive mechanisms, and The first support unit includes an inner member that supports a downward load and an outer member that supports an upward load, and the inner member is fixed on the base. A base member having a flat upper surface and a step in the vicinity of the upper surface of the base member at an equal distance with respect to the central axis passing through the center of the base member in the orthogonal direction. A base edge member having a small length, and when the outer member surrounds the inner member from above, an outer lower edge member that extends from the lower surface to the base edge member of the inner member is extended, and the inner member is extended. In the upper surface of the base member The second rolling member held by the second holding member is interposed between the base edge member of the inner member and the outer lower edge member of the outer member, with the first rolling member held by the first holding member interposed therebetween. A vertical and horizontal movement swiveling device characterized in that a moving member is interposed to support an outer member on an inner member. The stage is supported by a second support unit and a third support unit, which are alternately arranged on the stage frame portion side and can be moved relatively freely on a plane, by a plurality of drive mechanisms. The second support unit includes a lower member fixed on the base side, and an attachment member projecting about an axis passing through the center of the lower member in the vertical direction. The lower member and the upper member are horizontally provided with a number of rolling elements held by a holding member interposed between the upper member and the lower member. The third support unit is fixed on the base side through a lower member disposed on the base side and a through hole provided in a central portion of the lower member. An upper member fixed to an attachment member, and the lower member is A shaft is fixed to the lower surface side of the cage via a space member, and the upper member is disposed in a gap formed by the space member. The upper member is held by a holding member between the lower surface of the upper member and the upper surface of the lower member. A vertical and horizontal movement swiveling device characterized in that a large number of rolling elements are interposed to freely move in the horizontal direction. The drive mechanism is attached to the base side and has a linear actuator provided with an operating rod that drives the driving direction parallel to the plane, and is attached to the stage side and arranged in a direction perpendicular to the driving direction of the operating rod. The guide member, a mover disposed movably on the guide member, and the mover and the operating rod are connected to each other so as to be rotatable about an axis orthogonal to the plane. Item 5. The vertical and horizontal movement turning device according to any one of Items 1 to 4.

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