JP2005121103A - Selector valve and selector apparatus for low vacuum - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a low vacuum selector valve which has a simple structure and a small occupied space, and is low-priced. <P>SOLUTION: The low vacuum selector valve comprises a sliding gasket 4 composed of a rubber plate 4a and a seal plate 4b, which is integrated with the rubber plate and has a surface of an excellent sliding ability, a fixed cylinder 2, which is fixed from the rubber plate 4a of the sliding gasket 4 and has a suction hole, and a rotary body 3, which is rotatably connected to the fixed cylinder 2 in the state that the rotary body 3 is brought into sliding contact with the fixed cylinder 2 via the sliding gasket 4 and has a sucked hole. The sliding gasket 4 has a communication hole 4c, which is eccentric with respect to the rotary axis and can communicate with the suction hole of the fixed cylinder 2 and the sucked hole of the rotary body 3. When the rotary body 3 is rotationally driven with respect to the fixed cylinder 2, the vacuum pressure communication state of the suction hole of the fixed cylinder 2 and the sucked hole of the rotary body 3 is switched over by means of the communication hole 4c of the sliding gasket 4. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a low vacuum switching valve used for switching a vacuum suction line of a low vacuum device, and a structure of a low vacuum switching device.

  Conventionally, there are many types of vacuum switching valves, such as a type in which the vacuum seal portion rotates and slides and a type in which the vacuum seal portion slides up and down. Each type of switching valve is composed of a main body having a suction port and a seal shaft portion that is slidably fitted to the main body. Each component has a complicated structure. It has sufficient fitting accuracy to maintain a high degree of vacuum. On the other hand, a control system that switches the vacuum suction line in multiple directions in the conventional vacuum sequence system uses many electromagnetic valves that can be switched in multiple directions, and is configured to switch the vacuum suction line by turning on and off the electromagnetic valve. Yes.

  The conventional vacuum switching valve described above usually has a specification applicable to switching of a vacuum system in the medium vacuum region (10 to 0.01 pa) or higher. Therefore, as a switching valve applied to a low-vacuum system of a low vacuum region (10 pa) or less, the sealing performance is over-specification, which is disadvantageous in terms of cost. Further, it is an obstacle to downsizing in the arrangement space.

  Conventionally, a switching valve that is used in the above-described medium vacuum region or higher is commercially available, but a low-vacuum switching valve that can be used only in the low vacuum region has not yet been provided. is there.

  On the other hand, in the conventional vacuum sequence system to which the electromagnetic valve is applied, of course, an electric control system such as a sequencer for controlling the electromagnetic valve is indispensable, and the electric control system is equipped together with a number of electromagnetic valves. Expensive equipment costs are required. Furthermore, complicated piping equipment that constitutes the vacuum line is also required.

  An object of the present invention is to provide a low-vacuum switching valve or a low-vacuum switching device that has a simple structure, is inexpensive, and occupies little space.

  The switching valve for low vacuum according to claim 1 of the present invention is a sliding gasket comprising an elastic plate member that can be elastically deformed and a seal member that is integrated with the elastic plate member and has a good slidable surface. The elastic plate side of the gasket is fixed, and the suction side coupling member having at least one suction hole and the relative rotation with the suction side coupling member slidably contacted via the sliding gasket And a suction side coupling member having at least one suction hole, and the sliding gasket is a center other than the rotation center of the suction side coupling member and the suction side coupling member. And a communication hole provided at a position and capable of communicating with the suction hole of the suction side connection member and the suction target hole of the suction side connection member.

  According to a second aspect of the present invention, there is provided a low-vacuum switching device comprising a sliding gasket comprising an elastically deformable elastic plate member and a seal member integrated with the elastic plate member and having a good slidable surface, Straight side with the elastic plate side of the sliding gasket fixed and a suction side body member having at least one suction hole, and slidably contacting the suction side body member via the sliding gasket Or a suction-side moving body member supported at least in a rotatable manner and having at least one suction hole, and the sliding gasket includes the suction-side main body member and the suction-side movement. A communicating opening is provided on the position of movement with the body member and is capable of communicating with the suction hole and the suction hole.

  The low vacuum switching device according to claim 3 of the present invention is the low vacuum switching device according to claim 2, wherein at least one vacuum actuator member is provided in the suction hole of the suction side moving body member. Connected.

  As described above, according to the present invention, it is possible to provide a low-vacuum switching valve or a low-vacuum switching device that has a simple structure and is inexpensive. By applying the low vacuum switching device, it is possible to realize a low vacuum system with a low equipment cost that does not require an expensive vacuum switching valve, a switching electromagnetic valve or the like.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is an exploded perspective view of a low vacuum switching valve according to a first embodiment of the present invention. FIG. 2 is a cross-sectional view taken along the line AA of FIG. In the description of this embodiment and the second and third embodiments, the suction side direction (−P direction) is the rear, and the suction side direction (+ P direction) is the front.

  As shown in FIGS. 1 and 2, a low vacuum switching valve 1 according to this embodiment includes a fixed cylinder 2 as a suction side connecting member, a rotating body 3 as a suction side connecting member, and a disc-shaped sliding gasket. 4, a retaining ring 5 for preventing the rotating body from being detached, a vacuum pipe connector (a piping joint, hereinafter referred to as a piping connector) 6 attached to the fixed cylinder 2, and a rotating body 3. The piping connector 8 is provided.

  The fixed cylinder 2 is a member having a cylindrical shape, and is provided with a fitting hole portion 2a into which the rotating body 3 is rotatably fitted, and a bottomed portion provided on the rear end side on the central axis and having a pipe connector screw portion. Connector mounting hole 2b and a bottomed eccentric hole 2c that is a suction hole that is eccentric by a predetermined amount with respect to the central axis and opens to the fitting hole 2a side.

  The fitting hole 2a has a bottom surface 2d and is open to the front side, and a retaining ring groove 2e is provided on the inner periphery thereof. The pipe connector mounting hole 2 b and the eccentric hole 2 c communicate with each other inside the fixed cylinder 2.

  The sliding gasket 4 is composed of a rubber plate 4a that is an elastic plate member that can be elastically deformed in the thickness direction, and a seal plate 4b that is a good slidable seal member that is integrated with the rubber plate 4a by adhesion or the like. The outer diameter is substantially equal to the inner diameter of the fitting hole 2 a of the fixed cylinder 2. The sliding gasket 4 is provided with a communication hole 4c that penetrates the rubber plate 4a and the seal plate 4b at a position eccentric from the center axis by a predetermined amount and communicates with the eccentric hole 2c.

  The rubber plate 4a is formed of, for example, a neoprene rubber sheet, a foam rubber sheet, an independent foam rubber sheet, or a rubber sheet formed by sandwiching both surfaces of a sponge material with a neoprene rubber sheet. The seal plate 4b is made of, for example, a resin sheet having good slidability such as a fluororesin.

  The sliding gasket 4 is attached with the rubber plate 4a side adhered and fixed (in close contact) to the fitting hole bottom surface 2d of the fixed cylinder 2 with a double-sided adhesive tape. In this attached state, the eccentric hole 2c of the fixed cylinder 2 and the communication hole 4c of the sliding gasket 4 are positioned to face each other and communicate with each other.

  The rotating body 3 is a member made of polyacetal resin, metal, or the like, and has a bottomed connector mounting hole 3b having a pipe connector screw portion on the central axis disposed on the front end side, and a rear end surface 3a side. An open bottomed eccentric hole 3c is provided. The connector mounting hole 3b and the eccentric hole 3c communicate with each other to form a suction hole. Further, the eccentric hole 3c is arranged eccentrically by the same amount as the eccentric amount of the communication hole 4c of the sliding gasket.

  The rotating body 3 is inserted into the fitting hole 2a of the fixed cylinder 2 and inserted. In this inserted state, the retaining ring 5 is mounted in the retaining ring groove 2e. When the retaining ring 5 is mounted, the sliding gasket 4 is pressed by the rotating body 3 and is sandwiched between the fixed cylinder 2 and the rotating body 3 while being compressed in the thickness direction. Therefore, the slidable seal plate 4b and the rear end surface 3a of the rotating body 3 are in a state in which the slidable surfaces are joined with a predetermined contact force, are supported in a rotatable state, and have a communication hole. The joint surface between 4c and the eccentric hole 3c is kept in a sufficiently sealed state against the low vacuum state.

  When the rotating body 3 is rotationally driven by a rotation driving device (not shown), the eccentric hole 3c communicates with the communicating hole 4c when the eccentric hole 3c of the rotating body 3 reaches the position of the communicating hole 4c of the sliding gasket 4. In other conditions, communication is not possible. Therefore, between the connector mounting hole 2b of the fixed cylinder 2 and the connector mounting hole 3b of the rotating body 3 is switched between a communication state and a blocking state as the rotating body 3 rotates.

  Piping connectors 6 and 8 are screwed onto the piping connector thread portion of the fixed cylinder 2 and the piping connector thread portion of the rotating body 3, respectively, and the suction side vacuum pipe 7 and the suction side are connected to these piping connectors 6 and 8, respectively. Each vacuum pipe 9 is fixed. The vacuum pipe 7 is connected to a vacuum pump device (not shown). On the other hand, the vacuum pipe 9 is connected to a low-vacuum actuator device (not shown) such as a vacuum pad that rotates integrally with the rotating body 3 or rotates synchronously.

  In the vacuum pump device incorporating the low-vacuum switching valve 1 and the low-vacuum operation vacuum pad device of the present embodiment having the above-described configuration, the rotating body 3 is driven to rotate while the vacuum pipe 7 side is vacuumed. Then, the vacuum pressure is transmitted to the vacuum pipe 9 side through the eccentric hole 3c at a predetermined time during one rotation of the rotating body 3. The vacuum pad or the like is switched between suction and non-suction states, and a predetermined operation is executed.

  As described above, according to the low-vacuum switching valve 1 of the present embodiment described above, the rotary body 3 and the sliding gasket 4 are sealed in a slidable state in a low vacuum suction state. Along with the rotation, the vacuum pressure can be transmitted to the vacuum pipe 9 side, and the switching of the vacuum state is surely performed. The sealing structure of the low vacuum switching valve 1 is very simple, does not require high processing accuracy like a conventional vacuum valve, and is necessary for a low vacuum level and has a sufficient sealing function. ing. Therefore, it is possible to provide a low-cost low-vacuum switching valve that does not become overspec.

  In addition, the communicating hole 4c of the sliding gasket 4 in this embodiment or the eccentric hole 3c provided in the rotating body 3 is not a circular shape, but is a long hole having a predetermined angle along the circumferential direction. It is possible to increase the vacuum suction period (angle) during one rotation. Further, by providing a plurality of eccentric holes 3c provided in the rotator 3, the number of times of vacuum switching during one rotation of the rotator 3 can be set to a plurality of times.

  In addition, when the low vacuum switching valve 1 is applied to switch the suction of the vacuum pad set at a fixed position, a rotary distribution type vacuum pressure transmission device capable of sliding rotation is incorporated on the piping connector connection side of the rotating body 3. Can be applied. The rotation distribution type vacuum pressure transmission device will be described in detail in a second embodiment to be described later.

  Next, a low vacuum switching valve according to a second embodiment of the present invention will be described with reference to FIGS.

  FIG. 3 is an exploded perspective view of the low vacuum switching valve of the present embodiment. 4 is a cross-sectional view taken along line BB in FIG.

  As shown in FIGS. 3 and 4, a low vacuum switching valve (hereinafter referred to as a switching valve) 11 of the present embodiment includes a fixed member 12 that is a suction side connecting member and a rotary cylinder 13 that is a suction side connecting member. And a disc-shaped sliding gasket 14, a retaining ring 15 for retaining the rotating cylinder, and a vacuum piping pipe (hereinafter referred to as a vacuum pipe) 17 on the suction side are connected to the fixing member 12. A vacuum pipe connector (hereinafter referred to as a pipe connector) 16 and a vacuum pipe 19 on the suction side are connected, and a plurality of pipe connectors 18 attached to the rotary cylinder 13 are provided.

  The fixing member 12 is a member having a cylindrical block shape, and the rotating cylinder 13 is rotatably fitted on the outer periphery thereof. This fixing member 12 has an eccentric hole 12c which is a suction hole penetrating therethrough provided with a pipe connector mounting screw hole 12b at a position eccentric from the central axis by a predetermined amount.

  The sliding gasket 14 is composed of a rubber plate 14a that is an elastic plate member that can be elastically deformed in the thickness direction, and a seal plate 14b that is a good slidable seal member integrated with the rubber plate 14a by adhesion or the like. It is substantially equal to the outer diameter of the fixing member 12. The sliding gasket 14 is provided with a communication hole 14c that penetrates the rubber plate 14a and the seal plate 14b at a position eccentric from the central axis by a predetermined amount and communicates with the eccentric hole 12c.

  The rubber plate 14a is formed of, for example, a neoprene rubber sheet, a foam rubber sheet, an independent foam rubber sheet, or a rubber sheet formed by sandwiching both surfaces of a sponge material with a neoprene rubber sheet. The seal plate 14b is made of, for example, a resin sheet having good slidability such as a fluororesin.

  The sliding gasket 14 is attached with the rubber plate 14a side adhered and fixed (in close contact) to the front end surface 12a of the fixing member 12 with a double-sided adhesive tape. In this attached state, the eccentric hole 12c of the fixing member 12 and the communication hole 14c of the sliding gasket 14 face each other and communicate with each other.

  The rotating cylinder 13 is a member made of polyacetal resin, metal or the like, and has a bottomed fitting hole 13a into which the fixing member 12 is fitted, a retaining ring groove 13e on the inner periphery of the fitting hole 13a, and a pipe connector. A plurality of through holes 13c that are threaded through and have screw holes 13b are provided. The plurality of communication holes 13c are arranged on a circumference passing through the position of the communication hole 14c of the sliding gasket.

  The fixing member 12 having the sliding gasket 14 attached thereto is fitted into the fitting hole 13a of the rotary cylinder 13 and inserted. In this inserted state, the retaining ring 15 is mounted in the retaining ring groove 13e. When the retaining ring 15 is mounted, the sliding gasket 14 is pressed by the rotating cylinder 13 and is sandwiched between the fixing member 12 and the rotating cylinder 13 in a compressed state in the thickness direction. Therefore, the good slidable seal plate 14b and the fitting hole bottom surface 13d of the rotary cylinder 13 are joined with a predetermined contact force, are supported in a rotatable state, and are connected to the communication hole 14c and the communication hole. The joint surface with 13c is kept in a sufficiently sealed state against the low vacuum state.

  When the rotary cylinder 13 is rotationally driven by a rotation driving device (not shown), when any one of the plurality of communication holes 13c of the rotary cylinder 13 reaches the position of the communication hole 14c of the sliding gasket 14, The communication hole 14c communicates, and in other states, the communication hole 14c does not communicate. Accordingly, between the piping connector mounting screw hole 12 b of the fixing member 12 and the piping connector mounting screw hole 13 b of the rotating cylinder 13, the communication state and the blocking state are switched as the rotating cylinder 13 rotates.

  A pipe connector 16 is screwed into the pipe connector mounting screw hole 12b of the fixing member 12, and a vacuum pipe 17 is fixed to the pipe connector. The vacuum pipe 17 is connected to a low-vacuum vacuum pump device (not shown).

  On the other hand, a pipe connector 18 is screwed into each of the plurality of pipe connector mounting screw holes 13 b of the rotating cylinder 13, and each vacuum pipe 19 is fixed to the pipe connector 18. The vacuum pipe 19 is connected to a plurality of vacuum actuator units that rotate integrally with the rotating cylinder 13 or that rotate in synchronism, such as a low vacuum actuator device (not shown) having a plurality of vacuum pads. The

  In the low vacuum actuator device incorporating the low vacuum switching valve 11 of the present embodiment having the above-described configuration, when the rotary cylinder 13 is rotationally driven with the vacuum pipe 17 side being sucked by low vacuum, the rotary cylinder 13 is driven. The plurality of communication holes 13c are sequentially positioned on the communication holes 14c of the sliding gasket 14 on the fixing member 12 side. Accordingly, the vacuum state on the vacuum pipe 17 side is sequentially transmitted to each vacuum pipe 19 side, and each vacuum pad of the connected low vacuum actuator device is sequentially switched between the suction and non-suction states, and a predetermined operation is executed. .

  As described above, according to the low-vacuum switching valve 11 of the present embodiment as described above, it is necessary for a low degree of vacuum as in the case of the first embodiment, and has a low cost and a sufficient sealing function. A switching valve for vacuum can be provided. In particular, in the case of this embodiment, it can be applied for sequential switching of a device having a plurality of low vacuum actuator units, and there is no need to use a large number of high-precision vacuum switching valves and electromagnetic valves as in the prior art. Also, the arrangement space is very advantageous.

  In addition, the vacuum suction state of the plurality of vacuum pipes 19 is increased by increasing the number of eccentric holes provided in the sliding gasket 14 in the second embodiment described above, or by forming the eccentric holes in the shape of a long hole in the circumferential direction. It can be changed to various states. For example, as shown in the plan view of the modification of FIG. 5A, several vacuum suction systems of a plurality of vacuum pipes 19 are provided by providing a plurality of communication holes 14Ac on the circumference of a predetermined radius of the sliding gasket 14A. The (exhaust system) can be switched so as to be in the suction state at the same time. However, in this case, as shown in FIG. 3, for example, the fixing member 12 needs to be provided with a screw hole 12b 'for mounting the piping connector and an eccentric hole 12c' so as to face the communication hole 14c 'of the added sliding gasket. is there.

  Further, as shown in the plan view of the modified example of FIG. 5B, by providing the communication hole 14Bc in the shape of a long hole in the circumferential direction of the sliding gasket 14B, the rotating cylinder 13 of each vacuum pipe 19 can be rotated once. The continuous vacuum suction period can be increased. Thereby, it is possible to cope with various controls of the low vacuum actuator. Furthermore, according to this modification, a plurality of vacuum suction systems (exhaust systems) can be opened and closed simultaneously or for a predetermined period. In addition, various complicated switching operations can be performed by crossing, branching, joining, and the like of the connection pipe on the suction side.

  Further, when the low vacuum switching valve 11 is applied to vacuum suction switching of a vacuum pad or the like set at a fixed position, a rotatable distribution type vacuum pressure transmission device is incorporated on the pipe connector connection side of the rotary cylinder 13. Applicable. The rotary distribution type vacuum pressure transmission device has, for example, a fixed outer cylinder part and an inner cylinder part that is rotationally driven with respect to the outer cylinder part. Provide piping connectors to be connected to the number of fixed vacuum pads corresponding to the number of connectors. The inner cylinder portion is provided with communication holes that communicate with the connectors of the rotating cylinder 13, and the communication holes communicate with the pipe connectors of the outer cylinder portion. Along with the rotation of the inner cylinder part, the vacuum pressure is sequentially distributed to the vacuum pads via the pipe connectors of the outer cylinder part. Alternatively, if the low-vacuum switching valve 11 is configured so that the rotating cylinder 13 side is fixedly supported and the fixing member 12 side is rotationally driven, it can be applied to vacuum suction switching of a vacuum pad or the like set at a fixed position.

Next, a vacuum traveling apparatus incorporating a low vacuum switching valve according to a third embodiment of the present invention will be described with reference to FIGS.
FIG. 6 is a cross-sectional view taken along the support shaft of the vacuum traveling apparatus of the present embodiment, and FIG. 7 is a cross-sectional view taken along the line CC in FIG.

  The vacuum traveling device 31 of the present embodiment rotates with the vacuum pad 48 located on the traveling surface side out of the vacuum pads 48 arranged on the circumference sucked at a low degree of vacuum, and travels on the traveling surface 59. A traveling device that travels while adsorbing. The traveling device 31 includes a low-vacuum vacuum pump and a drive motor (not shown), drives the drive motor, and the vacuum suction pressure of the vacuum pump is switched from the vacuum pipe 53A to the low-vacuum switching valve 52. Are switched to a plurality of vacuum pads 48 that are rotated through, and sequentially transmitted.

  In addition to the vacuum pump and the drive motor, the vacuum traveling device 31 includes a support shaft 32 fixedly supported on the gantry arm portions 33 and 36 as shown in FIGS. 6 and 7, and a ball bearing 39 on one side of the support shaft 32. The rotation support plate 41 and the rotating cylinder 42 of the sucked connecting member that are rotatably supported in an integrated state, and the rotation support plates 43 and 44 that are also rotatably supported by the ball bearing 40 on the other side of the support shaft 32. And a plurality of support rods 45 penetrating on the circumference centering on the support shaft between the rotation support plates 41 and 43, and being rotatably arranged, and pad support plates 46 and 47 through the plurality of support rods 45, respectively. Adhering to a plurality of vacuum pads 48 as vacuum actuators to be supported, a drive gear 49 fixed to the support plate 41 and the rotating cylinder 42 by a screw member 50, and a flange 32b of the support shaft 32 The sliding gasket 51, the suction vacuum connector 53 screwed to the rear end portion of the support shaft 32, the vacuum pipe 53A connecting the vacuum connector 53 and the vacuum pump side, and the rotating cylinder 42 are screwed. A plurality of vacuum connectors 54, a plurality of vacuum connectors 56 to be sucked into the respective vacuum pads 48, and a plurality of vacuum pipes 55 to be sucked connecting the vacuum connectors 54, 56 are provided.

  The support shaft 32 is integrated with the gantry arms 33 and 36 by tightening nuts 35 at the front and rear ends of the support shaft 32 via a sleeve 34 on the rear side and a sleeve 38 and a rotation stop plate 37 on the front side. Fixedly supported. The support shaft 32 is provided with a flange portion 32 b that forms a suction side connecting member on the rear side, and a communication hole 32 a that communicates with the flange portion 32 b and the vacuum connector 53. The vacuum connector 53 is fitted with a suction side vacuum pipe 53A.

  The rotary support plates 41 and 43, the rotary cylinder 42, and the support rod 45 that are integrated with the drive gear 49 are driven to rotate about the support shaft 32 as the drive gear rotates.

  The low-vacuum switching valve 52 includes a flange portion 32b provided on the support shaft 32 described above, a sliding gasket 51 attached to the flange portion 32b, and a rotating cylinder 42 that rotates relative to the support shaft 32. Is done.

  The flange portion 32b is provided with an eccentric hole 32c that communicates with the communication hole 32a and is eccentric from the support axis on the front end surface 32d of the flange portion 32b and forms a suction hole. The eccentric hole 32c is disposed on the lower side (traveling surface 59 side) of the traveling device 31 on the circumference.

  The sliding gasket 51 is composed of a rubber plate 51a that is an elastic plate member that can be elastically deformed in the thickness direction, and a seal plate 51b that is a good slidable seal member integrated with the rubber plate 51a by adhesion or the like. The outer diameter of the front end face 32d of the flange portion 32b or the outer diameter substantially equal to the inner diameter of the rotary cylinder 42 is provided. The sliding gasket 51 is provided at a radial position corresponding to the amount of eccentricity of the eccentric hole 32c of the flange portion 32b and penetrates the rubber plate 51a and the seal plate 51b, and communicates with the eccentric hole 32c. A communication hole 51c is arranged. The communication hole 51c has an elongated hole shape extending in the circumferential direction, and has an opening length corresponding to a rotation angle that requires suction of the vacuum pad 48 of the traveling device 31. For example, in the case of the traveling device 31, since six vacuum pads 48 are arranged on the circumference, the rotation angle corresponding to the vacuum suction period of the vacuum pad 48 is approximately 60 degrees. The opening length in the circumferential direction of the communication hole 51c is set so as to satisfy the rotation angle.

  The rubber plate 51a is formed of, for example, a neoprene rubber sheet, a foam rubber sheet, an independent foam rubber sheet, or a rubber sheet formed by sandwiching both surfaces of a sponge material with a neoprene rubber sheet. The seal plate 51b is made of, for example, a resin sheet having good slidability such as fluororesin.

  The sliding gasket 51 is bonded and fixed (closely attached) to the front end surface of the flange portion 32b with a double-sided adhesive tape on the rubber plate 51a side. In this fixed support state, the eccentric hole 32c of the flange 32b and the communication hole 51c of the sliding gasket 51 are in communication.

  The rotary cylinder 42 is rotationally driven together with the rotary support plate 41, and has a cylindrical inner circumferential concave portion 42a into which the flange portion 32b of the support shaft 32 is inserted. The bottom surface 42c of the recess is provided with a round hole-shaped communication hole 42b, which is a plurality of sucked holes penetrating at a position on the circumference of the radius where the communication hole 51c of the sliding gasket is located. Furthermore, the communication hole 42b is provided with a screw part 42d for vacuum connector screwing. The plurality of communication holes 42b are provided in a number corresponding to the number of the vacuum pads 48, and are arranged along a circumference passing through the position of the communication hole 51c of the sliding gasket 51.

  In a state where the rotation support plate 41 and the rotation cylinder 42 are rotatable with respect to the support shaft 32 and are restricted in the axial direction, the rubber plate 51a is slid with the concave bottom surface 42c of the rotation cylinder 42 in a compressed state. The seal plate 51b of the gasket 51 is held in contact with a predetermined pressing force. Therefore, the sliding gasket 51 and the concave bottom surface 42c of the rotary cylinder 42 are supported in a freely slidable state via the seal plate 51b with good sliding property, and the joint surface between the communication hole 51c and the communication hole 42b is It is kept in a sufficiently sealed state against a low vacuum state.

  When the rotary cylinder 42 is rotationally driven via the drive gear 49, the communication hole 43b, the communication hole 51c, and the eccentricity when the communication hole 42b of the rotary cylinder 42 reaches the opening position of the communication hole 51c of the sliding gasket 51. The hole 32c communicates and does not communicate in other states. Therefore, a predetermined period corresponding to the rotation of the rotary cylinder 42 (a predetermined time corresponding to the vacuum pad 48 corresponding to the suction period) is formed between the eccentric hole 32c of the support shaft 32 and each communication hole 42b of the rotary cylinder 42. It communicates only when it is in the angular range, and is switched off during the other periods.

  In the vacuum traveling device 31 of the present embodiment having the above-described configuration, when traveling on the traveling surface 59 while adsorbing, the communication hole 32a and the eccentric hole 32c of the support shaft 32 have a predetermined low vacuum pressure via the vacuum pipe 53A. The drive gear 49 is rotationally driven under the state of being sucked by. The vacuum pad 48 and the rotating cylinder 42 are rotated with respect to the support shaft 32 by the rotation of the drive gear 49. Of the plurality of communication holes 42b of the rotating cylinder 42, the communication hole 42b that reaches the communication hole 51c (circumferential elongate hole) of the lower sliding gasket 51 communicates with the suction-side eccentric hole 32c and is in a vacuum suction state. . The vacuum pad 48 on the traveling surface side connected to the communication hole 42b in the suction state is switched to the suction state. Since the vacuum pad 48 rotates while being attracted to the traveling surface 59, the traveling device 31 can travel on the traveling surface 59.

  As described above, according to the vacuum traveling device 31 in which the low-vacuum switching valve 52 of the present embodiment described is incorporated, it is necessary for the low vacuum level used, and has a low cost and a sufficient sealing function. A vacuum switching valve 52 is incorporated, and a vacuum traveling device with reduced cost can be realized. Furthermore, it is possible to switch the vacuum suction of a plurality of vacuum pads only by providing one low vacuum switching valve 52, and the travel device can be made compact.

  In the low-vacuum switching valve 52, a long hole-shaped communication hole 51c is provided on the sliding gasket 51 side along the circumferential direction, and a round hole-shaped communication hole 42b is provided on the rotary cylinder 42 side. However, these hole shapes may be reversed. That is, even if the communication hole 51c side is a round hole and the communication hole 42b side is a long hole, it has the same function.

Next, a low vacuum switching device according to a fourth embodiment of the present invention will be described with reference to FIGS.
FIG. 8 is an exploded perspective view of the low vacuum switching device of this embodiment, and FIG. 9 is a cross-sectional view of the low vacuum switching device of FIG. 10 is a cross-sectional view taken along the line DD of FIG.

  The low vacuum switching device 61 of this embodiment is a device corresponding to a low vacuum switching valve for switching and distributing a low vacuum pressure by a vacuum pump to a plurality of vacuum actuator devices.

  As shown in FIG. 8 and the like, the low vacuum switching device 61 includes a suction base 62 as a suction side main body member, a sliding gasket 63, a freely movable piece group 64 including a suction side moving body member, and a piece presser plate. 65, a rotational drive system including a sprocket wheel 68, a piping connector 69 to which the suction side vacuum pipe 70 is connected, and a piping connector 71 to which the suction side vacuum pipe 72 is connected. The suction side vacuum pipe 70 is connected to a suction line of a vacuum pump device (not shown). Further, the suction side vacuum pipe 72 is connected to a vacuum actuator device (not shown), for example, a vacuum pad, which moves in a circular manner in synchronization with the circulating movement of the freely movable piece group 64. Further, the rotational drive system of the sprocket wheel is driven by a rotational drive source (not shown).

  The suction table 62 is formed with an annular parallel guide groove 62a including a rectilinear groove portion having a bottom surface on the upper surface side and semicircular circumferential groove portions provided continuously at both ends of the rectilinear groove. A plurality of suction holes 62c to 62g are provided at predetermined positions in the linearly-groove portion and the semicircular groove portion of the guide groove 62a. A connector screw portion 62f for screwing the pipe connector 69 is provided below the suction hole 62c and other suction holes. Further, a shaft support hole 62g is provided at a circular center position of one semicircular groove portion, and a drive shaft 67 is rotatably supported in the shaft support hole 62g. A drive gear 66 of a rotational drive system is fixed to the lower end of the drive shaft.

  The sliding gasket 63 has an annular plate shape composed of a rectilinear portion that can be inserted into the guide groove 62a of the suction table 62 and a semicircular portion, and a rubber plate 63a that is an elastic plate member on the lower side, and an upper side And a seal plate 63b which is a seal plate member having good sliding property. The sliding gasket 63 is fixed to the bottom surface of the guide groove 62a of the suction table 62 by bonding the rubber plate 63a side with a double-sided adhesive tape. The sliding gasket 63 is provided with openings 63c, 63d, 63e, 63f, and 63g that are communication openings that open in the thickness direction.

  The opening 63c has a long hole shape that extends long along the straight part of the sliding gasket, and is located above the suction hole 62c. The opening 63d has a long hole shape that extends long along the semicircular portion of the sliding gasket, and is located above the suction hole 62d. The openings 63e, 63f, and 63g each have a round hole shape and are located above the suction holes 62e, 62f, and 62g.

  The freely movable piece group 64 includes a predetermined number of freely movable pieces 64A which are suction side moving body members and a plurality of predetermined freely movable pieces 64B. The number of freely movable pieces 64A matches the number of vacuum actuators connected. The total number of the freely movable pieces 64 </ b> A and the freely movable pieces 64 </ b> B is the number that these freely movable piece groups fill the circumference of the guide groove without any gap along the guide groove 62 a of the suction table 62.

  The freely movable piece 64A is a member having a substantially cylindrical block shape, and is provided with a concave portion 64Aa formed by a curved surface having a cylindrical radius on one side surface of the cylindrical shape, and has a groove portion 64Ab at the upper portion of the cylindrical portion. Is provided with a stepped head 64Ac having a diameter smaller than the outer diameter of the cylinder. Further, a suction hole 64Ae penetrating in the vertical direction about the shaft center is provided. The suction hole 64Ae is provided with a pipe connector mounting screw portion 64Ad. The cylindrical portion diameter is substantially the same as the width of the guide groove 62a of the suction table 62, and is fitted into the guide groove 62a so as to be movable along the guide groove 62a.

  The externally movable piece 64B has the same outer shape as the freely movable piece 64A, has a substantially cylindrical block shape, and is provided with a stepped head 64Bc having a concave part 64Ba and a groove part 64Bb. However, there is no suction hole.

  A predetermined number of the freely movable pieces 64A and 64B as the freely movable piece group 64 are inserted into the guide groove 62a to which the sliding gasket 63 of the suction table 62 is attached in a state where the cylindrical outer diameter surface and the recessed portion are combined with each other, The guide groove 62a is inserted in a state where there is no gap. In the inserted state, each of the freely movable pieces 64A and 64B is formed by combining a cylindrical outer diameter surface and a concave portion with each other, and thus can move along the guide groove 62a in a state where the rotation of each piece is restricted. . Further, the lower surfaces of the freely movable pieces 64 </ b> A and 64 </ b> B are in sliding contact with the seal plate 63 b of the sliding gasket 63. The freely movable piece 64A in the freely movable piece group 64 is a predetermined interval with respect to the freely movable piece 64B, that is, an interval related to the vacuum actuator device that is symmetrical to the connection destination, and a sliding gasket. It arrange | positions according to the space | interval of 63 each opening part.

  The piece holding plate 65 includes an intermediate plate 65 a and divided plates 65 b and 65 c, and forms a groove portion 65 d along the guide groove 62 a of the suction table 62. The width of the groove is narrower than the guide groove 62a and wider than the diameter of the grooves 64Ab and 64Bb of the freely movable pieces 64A and 64B. Note that the piece holding plate 65 is divided into an intermediate plate 65a and divided plates 65b and 65c for assembly reasons.

  Each cylindrical upper surface portion of the freely movable pieces 64A and 64B in the free state inserted into the guide groove 62a protrudes from the upper surface of the suction table 62 by a slight dimension. Therefore, the piece holding plate 65 is attached to the outside of the groove portion 64Ab and fixedly attached to the suction table 62 while holding down the cylindrical upper surface portions of the protruding movable pieces 64A and 64B. As described above, the rubber plate 63a of the sliding gasket 63 is compressed in order to hold down the upper surface of each of the freely movable pieces 64A and 64B with the piece holding plate 65. In the mounted state, the bottom surfaces of the freely movable pieces 64A and 64B abut against the seal plate 63b of the sliding gasket 63 with a predetermined abutting force and are held in a slidable state. Further, the bottom surfaces of the freely movable pieces 64A and 64B and the seal plate 63b having good slidability are in contact with each other with a predetermined contact force, and the cylindrical outer diameters and the recesses of the freely movable pieces 64A and 64B are: Since the guide groove 62a is in contact with the rectilinear portion and the circumferential portion with no gap, the sealing portions 63c, 63d, 63e, 63f, 63g of the sliding gasket 63 and the suction hole 64Ae of the freely movable piece 64A are provided. Both of the sealing properties are sufficiently maintained in a low vacuum state.

  The sprocket wheel 68 has a shaft hole 68a and tooth portions 68c and valley portions 68b that can be engaged with the grooves 64Ab and 64Bb of the freely movable pieces 64A and 64B on the outer periphery thereof.

  The sprocket wheel 68 is attached by fixing the shaft hole 68a to the suction stand side drive shaft 67 and engaging the tooth portion 68c with the groove portions 64Ab and 64Bb of the freely movable pieces 64A and 64B.

  When the sprocket wheel 68 is rotationally driven by the drive gear 66, the freely movable pieces 64A and 64B move along the guide groove 62a. Since the freely movable piece group 64 composed of the freely movable pieces 64A and 64B is arranged without a gap over the entire area of the guide groove 62a of the suction table 62, it moves around the guide groove 62a. When the freely movable piece group 64 moves around, if the suction hole 64Ae of the freely movable piece 64A reaches any of the openings 63c, 63d, 63e, 63f, 63g of the sliding gasket 63, the suction of the suction table 62 is performed. The hole and the suctioned hole 64Ae of the freely movable piece 64A are in communication with each other. Further, when the suction hole 64Ae moves outside the range of any one of the openings 63c, 63d, 63e, 63f, and 63g, the communication state is switched to a blocking state.

  A piping connector 71 is screwed into the piping connector mounting screw portion 64Ad of the suctioned hole 64Ae of the plurality of freely movable pieces 64A, and the suctioned-side vacuum pipe 72 is connected to the connector 71.

  In the low vacuum switching device 61 of the present embodiment having the above-described configuration, the suction side vacuum pipe 70 is connected to the vacuum pump device side, and the suction side vacuum pipe 72 circulates in a state of being synchronized with the freely movable piece group 64. It is connected to a moving vacuum actuator device (not shown) such as a vacuum pad. The drive gear 66 is driven by a rotational drive source (not shown), and the sprocket wheel 68 is rotationally driven.

  When the sprocket wheel 68 is rotationally driven while the suction side vacuum pipe 70 is sucked with a low vacuum, the freely movable piece groups 64 move along the guide grooves 62a of the suction table 62, respectively. During the movement, when the suctioned hole 64Ae of the freely movable piece 64A reaches any of the openings 63c, 63d, 63e, 63f, 63g of the sliding gasket 63, a vacuum actuator (for example, a vacuum pad) is vacuumed. A predetermined operation is executed. When the suction hole 64Ae moves out of the range of the openings 63c, 63d, 63e, 63f, 63g of the sliding gasket 63, the vacuum pad is released from vacuum suction. The openings 63c and 63d of the sliding gasket 63 each have a predetermined length along the moving direction, and the vacuum pad is sucked for a period corresponding to the length of the openings 63c and 63d. Is done.

  According to the low vacuum switching device 61 of the present embodiment described above, it is necessary for the low vacuum degree used in the same manner as in the third embodiment, and is low in cost and has a sufficient sealing function. A vacuum switching device can be provided. In particular, a freely movable piece group 64 that moves along a guide groove that surrounds the suction table 62 is arranged, and a suction on / off period of a vacuum actuator connected to a specific freely movable piece in the freely movable piece group 64 is slid. It can be controlled by the shape (length in the moving direction) of the opening of the moving gasket. Accordingly, complicated control of the circulating vacuum actuator can be performed by the low vacuum switching device 61 having this simple configuration. Conventionally, when the above-described control is performed, a large number of vacuum switching valves are required, and the operation thereof needs to be controlled by a complicated control system, which increases equipment costs and occupies space. Although there is a possibility of increasing, according to the present embodiment, those problems can be solved.

  In the vacuum switching device 61, if a rubber sheet is attached to the lower surface portion of the freely movable piece, the sealing performance is further improved.

  As a modified example of the guide groove shape of the suction table and the sliding gasket in the low vacuum switching device 61 of the fourth embodiment, it is possible to propose a guide groove shape and a sliding gasket shape as shown in FIG. It is. However, the drive system and the vacuum transmission system in the present modification are the same as those applied to the fourth embodiment.

  In this modification, the guide groove 74a provided on the suction table is formed by combining a straight portion and a curved portion, and the curved portion is formed by a free curved portion that bends on both sides of the width as shown in FIG. Has been. However, the guide groove 74a goes around following a straight portion and a curved portion (not shown).

  The sliding gasket 73 attached to the bottom surface of the guide groove 72a has a shape that matches the shape of the guide groove 72a. In addition, an elongated hole-shaped opening 73c that is a communication opening along the straight portion, and round hole openings 73d, 73e, and 73f that are communication openings provided in a curved portion are arranged. Note that the freely movable piece group 64 inserted into the guide groove 74a is composed of freely movable pieces 64A and 64B, similar to those applied to the third embodiment.

  A plurality of freely movable piece group driving sprocket wheels 68 are arranged at the main portion of the curved portion of the guide groove 74a, and sequentially move the freely movable piece group 64 inserted into the guide groove 74a.

  According to the low vacuum switching device to which the present modification is applied, since the guide groove 74a is arranged along a line close to a free curve, the arrangement of the vacuum pad connected to the freely movable piece 64A via the vacuum pipe 72 is possible. Since the degree of freedom increases, the application range of the vacuum switching device is expanded.

Next, a low vacuum switching device according to a fifth embodiment of the present invention will be described with reference to FIGS.
FIG. 12 is an exploded perspective view of a main part of the low vacuum switching device of the present embodiment. FIG. 13 is a cross-sectional view of the suction table portion of the low vacuum switching device on the plane perpendicular to the sprocket drive axis. FIG. 14 is a cross-sectional view on a vertical cross section (a plane perpendicular to the sprocket drive axis) along the moving direction of the freely movable piece applied to the low vacuum switching device.

  The low vacuum switching device 81 of the present embodiment is a low vacuum switching valve for switching and distributing the low vacuum pressure by the vacuum pump to a plurality of vacuum actuator devices in the same manner as the low vacuum switching device 61 of the fourth embodiment. It is a corresponding device. And in this apparatus, the vacuum pressure with respect to a several vacuum actuator apparatus is distributed when a freely movable piece group circulates and moves on the ellipse outer peripheral surface of a suction stand.

  As shown in FIG. 12, the low vacuum switching device 81 is fixed on a suction base 82 as a suction side main body member, a belt-like sliding gasket 83, and a sealing rubber belt 85, and includes a suction side moving body member. A moving piece group 84, a piece guide plate 87, a pair of sprocket wheels 89 supported by a sprocket drive shaft 88, a piping connector 91 to which a suction side vacuum pipe 90 is connected, and a suction side vacuum pipe 92 are connected. And a piping connector 93. The suction side vacuum pipe 90 is connected to a suction line of a low vacuum pump device (not shown). The suction side vacuum pipe 92 is connected to a vacuum actuator device (not shown), such as a vacuum pad, which moves in a circular manner in synchronization with the circulating movement of the freely movable piece group 84. Further, the sprocket wheel 89 is driven by a rotational drive source (not shown) via a sprocket drive shaft 88.

  The suction table 82 has an annular guide groove 82a along the outer periphery of the ellipse, and a side plate 86 is fixed to one side surface of the guide groove by screws 86a. The guide groove 82a includes a semicircular outer circumferential surface portion at one end centered on the sprocket drive shaft 88, and upper and lower rectilinear groove portions that are connected to the outer circumferential surface portion and extend in a direction orthogonal to the sprocket drive shaft 88. The outer circumferential surface portion on the other end side connected to the rectilinear groove portion is formed on an annular ellipse outer circumferential surface.

  In addition, a pair of guide plates 87 that form pin insertion guide portions 87a having a predetermined gap along the outer circumferences on both sides of the width of the guide groove 82a are arranged. The guide plate 87 is fixedly supported by the suction table 82 and the side plate 86. In the pin insertion guide portion 87a, a driven pin 84f of a freely movable piece group 84 to be described later is slidably inserted.

  A single or a plurality of suction holes 82b, 82c, and 82d are provided at a desired position in the circumferential direction in the central portion of the guide groove 82a. Connector screw portions for screwing the pipe connector 91 are provided inside the suction table such as the suction holes 82b.

  The sprocket drive shaft 88 is rotatably supported at the center position of the outer circumferential surface portion on one end side of the guide groove 82a of the suction table 82, and a sprocket wheel 89 is fixed to both ends thereof. The drive shaft 88 is rotationally driven by a rotational drive system (not shown).

  The sprocket wheel 89 has a shaft hole 89 a that is fitted and fixed to the sprocket drive shaft 88, and has a tooth portion 89 b that can be engaged with the driven pin 84 f of the freely movable piece group 84 on the outer periphery.

  The sliding gasket 83 has an annular plate shape, and is a member formed by laminating a rubber plate 83a that is an elastic plate member on the inside and a seal plate 83b that is a seal plate member having good sliding properties on the outside. The sliding gasket 83 is fixed by adhering the rubber plate 83a side to the groove bottom surface of the guide groove 82a of the suction table 82 with a double-sided adhesive tape. The sliding gasket 83 has a width that matches the groove width of the guide groove 82a. The sliding gasket 83 includes a long hole-shaped opening 83c or a round hole-shaped opening 83d, which is a communication opening that opens in the thickness direction, and the suction holes 82b, 82c, 82d of the suction table 82. Correspondingly arranged.

  The freely movable piece group 84 includes a predetermined number of freely movable pieces 84A which are suction side moving body members and a plurality of predetermined freely movable pieces 84B. The number of freely movable pieces 84A matches the number of vacuum actuators to be connected.

  The freely movable piece 84A has both side surfaces and upper and lower surfaces that are parallel to each other, and has a convex surface 84d and a concave surface 84e that are circumferential surfaces of a predetermined radius before and after the movement direction. Further, the driven pins 84f protrude and are fixed on both side surfaces, and further, a suction hole 84Aa penetrating in the vertical direction is provided. In the suction hole 84Aa, a connector screw portion 84Ab for attaching the pipe connector 93 is provided on the upper side (FIG. 14). The width of the side surface of the freely movable piece 84A is substantially the same as the width of the guide groove 82a of the suction table 82, and is fitted into the guide groove 82a to be slidable.

  The freely movable piece 84B has the same outer shape as that of the freely movable piece 84A, and has a convex surface 84d and a concave surface 84e made of a circumferential surface with a predetermined radius before and after the moving direction, and driven pins 84f project and fix on both side surfaces. Has been. However, there is no suction hole.

  The freely movable piece 84A is inserted into a desired position interval on the outer peripheral surface of the annular sealing rubber belt 85, and the freely movable piece 84B is inserted between the freely movable pieces 84A, and the freely movable pieces 84A and 84B. The convex surface 84d and the concave surface 84e of each other are combined and fixed on the rubber belt 85 with no gap. As shown in FIG. 14, the freely movable piece 84A is fixed to the rubber belt 85 by caulking the caulking portion 84Ac below the suction hole 84Aa on the opening hole 85a provided in the rubber belt 85. The freely movable piece 84B is also fixed to the rubber belt 85 by a lower caulking portion (not shown).

  The radius R1 of the convex surface 84d and the concave surface 84e provided on the freely movable pieces 84A and 84B and the arrangement pitch angle θ1 of the freely movable piece correspond to the radius R0 of the outer circumferential surface portion of the guide groove 82a of the suction table 82. Determined.

  The low vacuum switching device 81 having the above-described configuration is assembled to the suction table 82, respectively. That is, with the side plate 86 removed from the suction table 82, the sliding gasket 83 is bonded and fixed onto the guide groove 82a with the seal plate side as the outer peripheral side. Further, the rubber belt 85 to which the freely movable piece group 84 is fixed is fitted along the outer periphery of the sliding gasket 83 in a slidable state. Therefore, the side plate 86 is fixed to the side surface of the suction table 82 with screws 86 a, and the guide plate 87 is attached and fixed along the outer periphery of the side portion of the suction table 82. When the side plate 86 and the guide plate 87 are attached, the driven pins 84f on both side surfaces of the freely movable pieces 84A and 84B are guided and moved by the pin insertion guide portions 87a on both sides formed by the guide plate 87 (sliding). In a movable state). In a state in which the driven pin 84f is slidably fitted into the pin insertion guide portion 87a, the freely movable pieces 84A and 84B are pressed toward the rubber belt 85 and the sliding gasket 83 via the driven pin 84f. By this pressing, the surface around the opening hole 85a of the rubber belt 85 below the suction hole 84Aa of the freely movable piece 84A is brought into close contact with the seal plate 83b of the sliding gasket 83. Therefore, the contact surfaces of the suction hole 84Aa, the rubber belt opening hole 85a, and the seal plate 83b are sealed and held under a low vacuum under the operating state of the apparatus. In particular, when the freely movable piece 84A passes through the outer circumferential portion of the guide groove of the suction table 82, the rubber belt 85 is elastically deformed to ensure a sealed state between the seal plate 83 and the degree of vacuum.

  The sprocket wheels 89 supported by the sprocket drive shaft 88 are arranged on both side surfaces of the suction table 82, and each driven pin 84f is engaged with the teeth 89b of the pair of sprocket wheels 89. The pipe connector 91 is screwed and fixed to the connector screw portion of the suction hole 82b of the suction base 82. A pipe connector 93 is screwed and fixed to the connector screw portion 84Ab of the suction hole 84Aa of the plurality of freely movable pieces 84A. A suction-side vacuum pipe 90 connected to the suction line of the low vacuum pump device is connected to the pipe connector 91. Further, a suction side vacuum pipe 92 connected to a vacuum actuator device (not shown) is connected to the pipe connector 93. The vacuum actuator device moves around in synchronism with the low vacuum switching device 81.

  In the low vacuum switching device 81 assembled as described above, if the sprocket wheel 89 is rotationally driven in the T direction by a rotational drive source (not shown) while the suction side vacuum pipe 90 side is sucked with a low vacuum, it is free. The moving piece group 84 is driven via the driven pins 84 f on both sides, and moves in the S direction along the guide groove 82 a of the suction table 82. In particular, on the circumferential surface portion of the guide groove, the convex portion 84d and the concave portion 84e of the freely movable piece group 84 move along the circumferential surface while changing the mutual contact engagement position. A suction-side vacuum pipe 92 on the vacuum actuator device coupling side is connected to the freely movable piece 84A, and the vacuum suction state of the vacuum actuator device is switched according to the linear movement and the movement along the circumference.

  That is, during the movement, when the suction hole 84Aa of the freely movable piece 84A reaches one of the openings 83c and 83d of the sliding gasket 83, a vacuum actuator (for example, a vacuum pad) is vacuum-sucked to perform a predetermined operation. Is executed. When the suction hole 84Aa moves out of the range of the openings 83c and 83d of the sliding gasket 83, the vacuum pad is released from vacuum suction. The opening 83c of the sliding gasket 83 has a predetermined length along the moving direction, and the vacuum pad is sucked for a period corresponding to the length of the opening 83c.

  According to the low vacuum switching device 81 of the fifth embodiment described above, the same effect as in the case of the fourth embodiment is obtained, but in particular, the sliding surface of the freely movable piece group 84 is the sprocket drive shaft 88. The piping connector 93 to which the suction side vacuum pipe 92 is connected is along the elliptical plane consisting of a circumferential surface parallel to the axial direction and a rectilinear plane. It is arranged on the outer side of the surface. Therefore, the low vacuum switching device 81 can be applied when the pipe connector 93 needs to be arranged in the radial direction on the ellipse as described above.

  In addition, although the free movement piece group 84 in the low vacuum switching device 81 of the said embodiment was made to move on an ellipse, it is set as the structure which only slides on the guide groove of a cylindrical surface, not only this. Is also possible. Further, the rubber belt 85 is not necessarily required in an apparatus in which no suction hole is disposed in the outer circumferential portion of the guide groove 82a of the suction table 82.

  The low-vacuum switching valve or the low-vacuum switching device according to the present invention can be applied to a vacuum actuator device using a low vacuum, and the vacuum actuator system can be made compact and low in cost. Is done.

1 is an exploded perspective view of a low vacuum switching valve according to a first embodiment of the present invention. It is AA sectional drawing of FIG. It is a disassembled perspective view of the switching valve for low vacuums which is the 2nd Embodiment of this invention. It is BB sectional drawing of FIG. FIG. 5A is a plan view of a modified example of the sliding gasket applied to the low-vacuum switching valve of FIG. 3, FIG. 5A shows one of the modified examples, and FIG. Another one of the examples is shown. It is sectional drawing along the support shaft of the vacuum traveling apparatus which is 3rd Embodiment of this invention. It is CC sectional drawing of FIG. It is a disassembled perspective view of the low vacuum switching apparatus which is the 4th Embodiment of this invention. It is sectional drawing which looked at the low vacuum switching apparatus of FIG. 8 from the sprocket wheel upper surface part. It is DD sectional drawing of FIG. It is a top view which shows the modification with respect to the guide groove and sliding gasket of a suction stand applied to the low vacuum switching apparatus of 4th Embodiment. It is a disassembled perspective view of the principal part of the low vacuum switching apparatus which is the 5th Embodiment of this invention. It is sectional drawing in the sprocket drive axis orthogonal surface of the suction stand part of the low vacuum switching apparatus of FIG. It is sectional drawing on the longitudinal cross-section (sprocket drive shaft orthogonal surface) along the moving direction of the free movement piece applied to the low vacuum switching apparatus of FIG.

Explanation of symbols

2 ... Fixed cylinder (suction side connecting member)
2c: Eccentric hole (suction hole)
3 ... Rotating body (suctioned side connecting member)
3c: Eccentric hole (suctioned hole)
4, 14, 51, 63, 73
... Sliding gaskets 4a, 14a
... Rubber plate (elastic plate member)
4b, 14b
... Seal plate (seal member)
4c, 14c, 14Ac, 14Bc, 51c
... Communication hole 12 ... Fixing member (suction side connecting member)
12c: Eccentric hole (suction hole)
13 ... Rotating cylinder (suctioned side connecting member)
13c ... Communication hole (suctioned hole)
32b ... buttocks (suction side connecting member)
32c ... Eccentric hole (suction hole)
42... Rotating cylinder (suction side connecting member)
42b ... Communication hole (suctioned hole)
48… Vacuum pad (Vacuum actuator member)
62,82
... Suction table (suction side body member)
62c, 82b
... Suction holes 63c, 63d, 63e, 63f, 63g, 73c,
73d, 73e, 73f, 83c, 83d
... Opening (communication opening)
64A, 84A
... Free moving piece (movable member on suction side)
64Ae, 84Aa
... Suction hole

Agent Patent Attorney Susumu Ito

Claims (3)

A sliding gasket comprising an elastically deformable elastic plate member and a seal member integrated with the elastic plate member and having a good sliding surface;
A suction-side connecting member to which the elastic plate side of the gasket is fixed and has at least one suction hole;
A suction-side connecting member connected to the suction-side connecting member so as to be relatively rotatable in a slidable contact state via the sliding gasket, and having at least one suction hole;
The sliding gasket is provided at a position other than the center of rotation of the suction side connecting member and the suction side connecting member, and the suction hole of the suction side connecting member and the target side of the suction side connecting member. A switching valve for low vacuum, characterized in that it has a communication hole capable of communicating with a suction hole. A sliding gasket comprising an elastically deformable elastic plate member and a seal member integrated with the elastic plate member and having a good sliding surface;
A suction side main body member having at least one suction hole to which the elastic plate material side of the sliding gasket is fixed;
A suction-side moving body that is supported so as to be linearly movable or rotationally movable while being slidably in contact with the suction-side main body member via the sliding gasket and has at least one suction hole. Members,
And the sliding gasket is disposed on a sliding surface between the suction-side body member and the suctioned-side moving body member, and has a communication opening that can communicate with the suction hole and the suctioned hole. A low-vacuum switching device. 3. The low vacuum switching device according to claim 2, wherein at least one vacuum actuator member is connected to the suction hole of the suction side moving body member.

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