JP2005102397A - Actuator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an actuator in which a connecting line connected to a displacement part can be prevented from being broken. <P>SOLUTION: The actuator 100 comprises: a first piezoelectric element 1 and a second piezoelectric element 2 that generate displacements; a chip member 3 that is connected to one-side ends of the first piezoelectric element 1 and the second piezoelectric element 2, and composes the displacements of the first piezoelectric element 1 and the second piezoelectric element 2; a drive part 10 composed of a base member 4 that fixes other-side ends of the first piezoelectric element 1 and the second piezoelectric element 2; a rotor 20 that is driven by being transmitted with a driving force by the chip member 3; and a flexible board 60 that electrically connects the first piezoelectric element 1 and the second piezoelectric element 2 and the outside. The flexible board 60 is bent at least at two points in the vicinity of the connecting point of the first piezoelectric element 1 and the second piezoelectric element 2 along bending lines 65a to 65d, and located inside planes 71a, 71b wherein each bending line 65a to 65d passes through the center 72 of the oscillatory rotation of the drive part 10, or in the vicinity thereof. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an actuator that drives a drive unit using a displacement element and frictionally transmits a drive force to a driven unit.

  Conventionally, two electromechanical conversion elements (displacement elements) such as piezoelectric elements are configured to be orthogonal to each other, and a displacement synthesis unit provided at an intersection of the displacement elements orthogonal to each other is driven to draw a predetermined locus. An actuator that drives a driven part such as a rotor in a predetermined direction has been proposed.

  FIG. 17 is a diagram for explaining a conventional actuator. As shown in FIG. 17, the conventional actuator 700 has two electromechanical transducer elements (roll-type first piezoelectric element 101 and second piezoelectric element 102) arranged so as to intersect at substantially right angles, and their intersecting side ends. The chip member 103 is joined to the part by an adhesive. On the other hand, the other end portions of the first and second piezoelectric elements 101 and 102 are bonded to the base member 104 with an adhesive. Further, the driving unit 110 including the first piezoelectric element 101, the second piezoelectric element 102, the chip member 103, the base member 104, and the like is urged by the pressure unit 130 so that the chip member 103 contacts the rotor 120. Has been. The pressing unit 130 is a torsion coil spring having two arms, and the driving unit 110 is indicated by an arrow Y4 so that the tip member 103 abuts against the inner peripheral surface of the rotor 120 by the respective arms of the pressing unit 130. Pressurized in the direction. Further, the position of the drive unit 110 is fixed by a restriction unit 151 provided on the rotation shaft 121 of the rotor 120. The first piezoelectric element 101 is electrically connected to the outside through lead wires 161 and 162, and the second piezoelectric element 102 is electrically connected to the outside through lead wires 163 and 164.

  In the conventional actuator 700, when a drive signal having a predetermined phase difference is applied to the first piezoelectric element 101 and the second piezoelectric element 102, the piezoelectric elements are driven at different phases, and the first and second piezoelectric elements 101 and 102 are driven. The tip member 103 provided at the intersection of the piezoelectric elements 101 and 102 is driven so as to draw a predetermined elliptical orbit. Further, since the base member 104 is not a rigid body but an elastic body, the vibration of the first piezoelectric element 101 or the second piezoelectric element 102 is applied to the second piezoelectric element 102 or the first piezoelectric element 101 via the base member 104. Communicated. While the tip member 103 is driven to draw an elliptical orbit, the tip member 103 comes into contact with the rotor 120 in a certain section, and the rotor 120 is predetermined by the frictional force acting between the tip member 103 and the rotor 120. It is driven to rotate in the direction of. Then, by using the rotating shaft 121 of the rotor 120 as an output shaft directly or by providing a pin on an end surface perpendicular to the rotating shaft 121 of the rotor 120 and engaging a link lever or the like with this pin, A driving force can be supplied.

18 is a cross-sectional view of the conventional actuator shown in FIG. 17 taken along line FF. As shown in FIG. 18, on the cylindrical surface of the second piezoelectric element 102, the first electrode portion 102a to which the electrode material is applied, the second electrode portion 102b to which the electrode material is applied, and the first electrode portion to which the electrode material is not applied are not applied. The formation part 102c and the 2nd electrode non-formation part 102d which does not apply | coat an electrode material similarly are provided. By applying a voltage between the first electrode portion 102a and the second electrode portion 102b, the second piezoelectric element 102 is displaced in the length direction passing through the center of the rod-shaped cross section. The first electrode portion 102 a is bonded to the lead wire 163 by the bonding portion 193, and the second electrode portion 102 b is bonded to the lead wire 164 by the bonding portion 194. For the joining portions 193 and 194, for example, a conductive joining material such as solder is used. The first piezoelectric element 101 has the same configuration. In addition, there exists patent document 1 as another structural example of an actuator.
JP-A-10-225151

  By the way, when the tip member 103 draws an elliptical locus shown by the arrow Y1 in FIG. 17, the rotor 120 is driven in the direction of the arrow Y2, so that the tip member 103 receives a frictional force in the direction of the arrow Y3 from the rotor 120. It becomes. At this time, there is no problem as long as the restricting portion 151 and the base member 104 are fitted with no gap. However, if the fitting is loose due to some factor and the rattling is large, the driving portion 110 is shaken from the neutral position by a frictional force. A moving phenomenon occurs. Further, the drive unit 110 swings every time the rotor 120 rotates forward, reverse, and stops, and the same phenomenon occurs when the rotor 120 receives an external force. By such an operation, the fixed lead wires 161 to 164 are repeatedly bent and fatigued, or the lead wires 161 to 164 continue to come into contact with other members at unexpected locations due to swinging, and finally May be damaged.

  The present invention has been made to solve the above problems, and an object of the present invention is to provide an actuator that can prevent disconnection of a connection line connected to a displacement portion.

  The actuator according to the present invention includes a plurality of displacement units that generate a predetermined displacement, a combining unit that is coupled to one end of each of the plurality of displacement units, and combines the displacements of the plurality of displacement units, and the plurality of the plurality of displacement units. A flexible circuit board that electrically connects the displacement unit and the outside, a drive unit comprising a fixed unit for fixing the other end of the displacement unit, a driven unit that is driven by a driving force transmitted by the combining unit The flexible substrate is bent at at least two fold lines in the vicinity of the connection portion with the displacement portion, and any of the fold lines is in a plane passing through the center of swinging rotation of the drive portion, or It is characterized by being in the vicinity.

  According to this configuration, the flexible substrate that electrically connects the displacement portion and the outside is bent by at least two fold lines in the vicinity of the connection portion with the displacement portion, and any of the fold lines is the oscillation of the drive portion. Since it is in the plane passing through the center of rotation or in the vicinity of it, even if an excessive force is applied to the drive part, it can prevent the connection line connected to the displacement part from being disconnected by bending the bending line. It is possible to prevent the connection line from being peeled off from the displacement portion.

  In the actuator described above, it is preferable that the plurality of displacement portions include a pair of piezoelectric elements, and bending lines of the flexible substrate connected to the piezoelectric elements are not parallel to each other.

  According to this configuration, since the bending lines of the flexible substrate connected to the pair of piezoelectric elements are not parallel to each other, the flexible substrate is not twisted, and can respond to the swinging rotation of the drive unit by simply bending and extending. be able to.

  In the actuator, the plurality of displacement portions include a pair of piezoelectric elements, and when the center of swinging rotation of the driving portion is at infinity, a plurality of the planes exist and are connected to the piezoelectric elements. The bending line of the flexible substrate is preferably in a different plane of the plurality of planes or in the vicinity thereof.

  According to this configuration, when the center of swinging rotation of the driving unit is at infinity, there are a plurality of planes passing through the center of swinging rotation of the driving unit, and the bending line of the flexible substrate connected to each piezoelectric element is Because it is in or near a different plane of the plurality of planes, even if the center of swinging rotation of the drive unit is at infinity, the flexible substrate can be bent and stretched almost simply without being twisted. This can correspond to the swinging rotation of the drive unit.

  In the above actuator, the flexible substrate may be connected to the piezoelectric element by bending at least two electrodes with respect to one piezoelectric element into a substantially U-shape, It is preferable to provide a gap between the piezoelectric element.

  According to this configuration, the flexible substrate is connected to the piezoelectric element by bending at least two electrodes with respect to one piezoelectric element into a substantially U-shape, and the surface of the piezoelectric element other than the vicinity of the piezoelectric element Since a gap is provided between the electrode of the flexible substrate and the electrode of the piezoelectric element by a bonding material, the electrode of the flexible substrate and the electrode of the piezoelectric element are short-circuited by the flow of the bonding material. Can be prevented.

  According to the first aspect of the present invention, even if an excessive force is applied to the drive unit and the drive unit moves, the connection line connected to the displacement unit can be prevented from being disconnected by bending the bending line. Can be prevented from peeling off from the displacement portion.

  According to the second aspect of the present invention, it is possible to cope with the swinging rotation of the drive unit by simply bending and stretching the flexible substrate without being twisted.

  According to the third aspect of the present invention, even when the center of swinging rotation of the drive unit is at infinity, the flexible substrate is not twisted, and the drive unit swings and rotates simply by bending and extending. Can respond.

  According to the fourth aspect of the present invention, when the electrode of the flexible substrate and the electrode of the piezoelectric element are joined by the joining material, the electrode of the flexible substrate and the electrode of the piezoelectric element are short-circuited by flowing of the joining material. This can be prevented.

  Embodiments according to the present invention will be described below with reference to the drawings.

(First embodiment)
The actuator which is the 1st Embodiment of this invention is demonstrated. 1 is a partial perspective view showing the configuration of the actuator in the first embodiment, FIG. 2 is a perspective view showing the configuration excluding the pressing member of the actuator shown in FIG. 1, and FIG. It is a rear view of the actuator shown in FIG.

  1 to 3, the actuator 100 includes a driving unit 10 that drives a rotor (corresponding to a driven unit) 20, a pressurizing unit 30 that pressurizes and contacts the driving unit 10 with the rotor 20, and a driving unit 10. 2 includes a pressing member 40 that restricts movement in the z-axis direction illustrated in FIG. 2 and a holder 50 that holds the drive unit 10. The drive unit 10 includes, for example, two displacement elements (corresponding to a displacement unit) 1 and 2 intersected at a sandwiching angle of 90 degrees, a chip member (corresponding to a combining unit) 3 bonded to the intersection, and It comprises a base member (corresponding to a fixed portion) 4 bonded to the base ends of the displacement elements 1 and 2.

  As the displacement elements 1 and 2 (hereinafter referred to as the first piezoelectric element 1 and the second piezoelectric element 2), roll-type piezoelectric elements that convert an electric signal into displacement by a piezoelectric effect are used. The tip member 3 is made of a metal material that stably obtains a high coefficient of friction and is not easily worn. The base member 4 is made of a metal material that can be easily manufactured and has high strength. In addition, an adhesive that is appropriately selected depending on the material of the base member 4 and the material of the chip member 3 for bonding the base member 4 and the piezoelectric elements 1 and 2 and bonding the chip member 3 and the piezoelectric elements 1 and 2. In particular, an epoxy resin adhesive having excellent adhesive strength and strength is used.

  Here, a roll-type piezoelectric element used as a displacement element in the present embodiment will be described. Roll-type piezoelectric elements are formed at both ends by folding a laminated body with electrodes on both sides of a thin plate-shaped piezoelectric material that exhibits piezoelectric properties such as lead zirconate titanate (PZT) into two near the center. The piezoelectric element is laminated in a roll shape by winding up the laminated body from the crease portion. The two electrodes exposed to the outside when wound up are each connected to an external device such as a drive power source via a signal line. When a predetermined voltage is applied to the signal line, an electric field is generated in the thin plate piezoelectric material sandwiched between the two electrodes.

  When a DC driving voltage is applied between the electrodes by the driving power source, the thin plate piezoelectric material expands or contracts in the same direction and expands and contracts as a whole piezoelectric element. When an AC drive voltage (AC signal) is applied between the electrodes by the drive power supply, the thin plate piezoelectric material repeatedly expands and contracts in the same direction according to the electric field, and the piezoelectric element as a whole repeats expansion and contraction. A piezoelectric element has a unique resonance frequency determined by its structure and electrical characteristics. When the frequency of the alternating drive voltage coincides with the resonance frequency of the piezoelectric element, the impedance decreases and the displacement of the piezoelectric element increases. Since the piezoelectric element has a small displacement with respect to its outer dimensions, it is desirable to use this resonance phenomenon in order to drive at a low voltage.

  The drive unit 10 is slidably held by a regulation unit 51 provided in the holder 50. The base member 4 includes two planes perpendicular to the x-axis (see FIG. 2), and the restricting portion 51 has parallel and smooth side surfaces facing the two planes. The drive unit 10 is held so as to be movable only within the yz plane (see FIG. 2) with respect to the holder 50 when the two planes of the base member 4 and the regulating unit 51 abut against each other and slide. Note that a friction reducing material is applied as necessary so that the surfaces on which the base member 4 and the restricting portion 51 come into contact with each other can slide with low friction. As this friction reducing material, for example, grease or the like is used.

  The pressurizing unit 30 is constituted by, for example, a torsion coil spring, and the coil portion is passed through a spring guide shaft 53 provided in the holder 50, and the two arms are in contact with the lower end of the base member 4 shown in FIG. They are in contact with each other and are arranged to pressurize the base member 4. The pressurizing unit 30 applies a force in the direction indicated by the arrow 71 and the arrow 72 illustrated in FIG. 2 to the base member 4. As a result, the drive unit 10 is pressed against the inner peripheral surface of the driven unit 20 with a predetermined pressure, and receives the force indicated by the arrow 73 shown in FIG.

  The driven portion 20 is, for example, a cylindrical rotor and is made of a metal such as aluminum. In order to prevent wear due to contact with the tip member 3, the contact portion with the tip member 3 is subjected to surface treatment such as anodized. It has been subjected. Due to the elliptical trajectory 81 drawn by the tip member 3 and the frictional force generated by the pressing force indicated by the arrow 73, the driven part 20 has a positive direction around the rotation shaft 21 as indicated by a double arrow 82 (see FIG. 1). Or rotate in the opposite direction. The rotating shaft 21 is rotatably held by a rotating shaft holding portion 52 provided in the holder 50. The rotating shaft holding part 52 is a sliding bearing or a rolling bearing. The drive unit 10 is disposed so as to be sandwiched between the contact surface (not shown) of the holder 50 and the pressing member 40 in the rotation axis direction, and movement in the rotation axis direction is limited.

  Here, the rotation principle of the driven part 20 in the actuator 100 will be described. By applying a drive signal having a predetermined phase difference to the first piezoelectric element 1 and the second piezoelectric element 2, the piezoelectric elements 1 and 2 are driven at different phases, and at the intersection of the piezoelectric elements 1 and 2. The provided tip member 3 is driven to draw a predetermined elliptical orbit (including a circular orbit). While the tip member 3 is driven to draw a predetermined elliptical orbit, the tip member 3 comes into contact with the inner peripheral surface of the driven portion 20 in a certain section, and the inner peripheral surface of the tip member 3 and the driven portion 20. The driven portion 20 is rotated in a predetermined direction by the frictional force acting between the two. In addition, by reversing the phase shift direction of the drive signal, the direction of the orbit of the tip member 3 is reversed, and the rotation of the driven part 20 can be reversed. In the actuator 100, when two independent movements orthogonal to each other are synthesized, the intersection point draws a locus according to an elliptical vibration equation (Lissajous equation).

  In the present embodiment, by applying a drive signal having a predetermined phase difference to each of the first piezoelectric element 1 and the second piezoelectric element 2, two-phase driving the piezoelectric elements 1 and 2 with different phases. However, the present invention is not particularly limited to this, and is a single phase in which one of the first piezoelectric element 1 and the second piezoelectric element 2 is driven to drive the other piezoelectric element. It may be driven. For example, only the first piezoelectric element 1 is driven, the vibration is transmitted to the second piezoelectric element 2 via the base member 4, and the second piezoelectric element 2 is resonated with a predetermined phase difference. Then, the tip member 3 provided at the intersection of the first piezoelectric element 1 and the second piezoelectric element 2 is driven so as to draw an elliptical orbit (including a circular orbit).

  Power supply to the drive unit 10 is performed by the flexible substrate 60. The flexible substrate 60 has flexibility, and electrically connects the first piezoelectric element 1 and the outside, and electrically connects the second piezoelectric element 2 and the outside, and the first electrode portion 61a. The second electrode portion 61b, the third electrode portion 61c, the fourth electrode portion 61d, and the conduction portion 62 are provided. In addition, as a base substrate of the flexible substrate 60, a polyimide (PI) film having high heat resistance and excellent flexibility, a low-cost polyester (PET) film that is inferior in heat resistance to the PI film, and the like are used. It is done.

  FIG. 4 is a cross-sectional view of the actuator shown in FIG. The electrical connection between the first electrode portion 61a and the second electrode portion 61b of the flexible substrate 60 and the first piezoelectric element 1 is as follows. As shown in FIG. 4, on the cylindrical surface of the first piezoelectric element 1, the first electrode portion 1a to which the electrode material is applied, the second electrode portion 1b to which the electrode material is applied, and the first electrode non-applied to the electrode material are not applied. The formation part 1c and the 2nd electrode non-formation part 1d which does not apply | coat an electrode material similarly are provided.

  The first electrode portion 61 a of the flexible substrate 60 is bonded to face the first electrode portion 1 a of the first piezoelectric element 1, and the second electrode portion 61 b of the flexible substrate 60 is connected to the second electrode portion of the first piezoelectric element 1. It is joined facing 1b. The joining portion 91 joins the first electrode portion 61 a of the flexible substrate 60 and the first electrode portion 1 a of the first piezoelectric element 1, and the joining portion 92 is connected to the second electrode portion 61 b of the flexible substrate 60 and the second electrode portion 61 b. The piezoelectric element 1 is joined to the second electrode portion 1b. Similarly, the third electrode portion 61 c of the flexible substrate 60 is joined to face the first electrode portion 2 a of the second piezoelectric element 2, and the fourth electrode portion 61 d of the flexible substrate 60 is connected to the second electrode portion 2 a of the second piezoelectric element 2. The two electrode portions 2b are joined facing each other. The joining portion 93 joins the third electrode portion 61 c of the flexible substrate 60 and the first electrode portion 2 a of the second piezoelectric element 2, and the joining portion 94 is connected to the fourth electrode portion 61 d of the flexible substrate 60 and the fourth electrode portion 61 d. 2 The second electrode portion 2b of the piezoelectric element 2 is joined. For the joining portions 91, 92, 93, and 94, for example, a conductive joining material such as solder, a conductive adhesive, ACP (anisotropic conductive paste), or ACF (anisotropic conductive film) is used.

  In the present embodiment, the electrode portion is provided on the inner side (piezoelectric element side) of the flexible substrate 60. However, the present invention is not particularly limited thereto, and the electrode is provided on the outer side of the flexible substrate 60 (opposite side of the piezoelectric element). A part may be provided. FIG. 5 is a diagram for explaining another method of attaching the piezoelectric element and the flexible substrate. As shown in FIG. 5, in another attachment method, the first electrode portion 61 a and the second electrode portion 61 b are provided outside the flexible substrate 60, and the first electrode portion 61 a of the flexible substrate 60 and the first piezoelectric element 1 are connected to each other. The first electrode part 1 a is joined so as to be covered by the joint part 91, and the second electrode part 61 b of the flexible substrate 60 and the second electrode part 1 b of the first piezoelectric element 1 are joined so as to be covered by the joint part 92.

  6 is a view in the direction of the arrow B of the actuator shown in FIG. 3, and FIG. 7 is a developed view of the flexible substrate shown in FIGS.

  As shown in FIG. 6 and FIG. 7, the flexible substrate 60 is provided at one end which is bent into a U shape by a fold line 64 a and a fold line 64 b and is bent into a U shape as described above. The first electrode portion 61a is joined to the first electrode portion 1a of the first piezoelectric element 1, and the second electrode portion 61b provided at the other end is joined to the second electrode portion 1b of the first piezoelectric element 1. The In addition, the flexible substrate 60 is bent in a staircase pattern at a fold line 65 a and a fold line 65 b in the vicinity of the connection portion with the first piezoelectric element 1. Similarly, the flexible substrate 60 is folded in a U shape by a folding line 64c and a folding line 64d, and the third electrode portion 61c provided at one end portion folded in the U shape has a second piezoelectric element. The second electrode portion 2 b of the second piezoelectric element 2 is bonded to the second electrode portion 2 b of the second piezoelectric element 2. In addition, the flexible substrate 60 is bent in a staircase pattern at a fold line 65 c and a fold line 65 d in the vicinity of the connection portion with the second piezoelectric element 2.

  As shown in FIG. 7, in the flexible substrate 60, the first electrode portion 61a, the second electrode portion 61b, the third electrode portion 61c, and the fourth electrode portion 61d are composed of the fifth electrode portion 63a, the sixth electrode portion 63b, The seventh electrode portion 63c and the eighth electrode portion 63d are electrically connected to the one-to-one relationship by the copper foil C. The copper foil C is a rolled copper foil having good flexibility, and is bonded to the base substrate of the flexible substrate 60 with, for example, an epoxy thermosetting adhesive. The surface other than each electrode part of the flexible substrate 60 is covered with a cover material, and the copper foil C is prevented from coming into contact with other members. The fifth electrode portion 63a, the sixth electrode portion 63b, the seventh electrode portion 63c, and the eighth electrode portion 63d are connected to an external substrate and apply a voltage to the first piezoelectric element 1 and the second piezoelectric element 2. Used for.

  In FIG. 7, the flexible substrate 60 is valley-folded along the folding lines 64 a to 64 d, 65 b, and 65 d toward the paper surface, and is mountain-folded along the folding lines 65 a and 65 c. Note that the bending radius for bending the flexible substrate 60 is appropriately set in consideration of bending strength, mounting space, and the like. The flexible substrate 60 is attached to the actuator 100 in the state shown in FIGS.

  Among these bend lines, the bend lines 65 a and 65 b are, as shown in FIG. 6, the first electrode portion 61 a and the second electrode portion 61 b of the first piezoelectric element 1 and the conduction portion 62 exposed to the outside of the actuator 100. Is located between. Thereby, even if the conduction | electrical_connection part 62 is fixed, it becomes possible for the drive part 10 of the actuator 100 to move to some extent by bending | flexion of the bending lines 65a and 65b. Therefore, even if an excessive force is applied to the driving unit 10 of the actuator 100 to move, the flexible substrate 60 is disconnected due to the bending lines 65a and 65b, and the first electrode unit 61a and the second electrode unit 61b are It is possible to prevent the piezoelectric element 1 from being peeled off. The same applies to the folding lines 65c and 65d.

  By the way, since the tip member 3 is in contact with the inner peripheral surface of the rotor 20 by the pressurizing unit 30, the actuator 100 swings by receiving the frictional force described above from the rotor 20. The swinging angle depends on the fitting with the restricting portion 51 and the magnitude of the force of the pressing portion 30. The plane 71a and the plane 71b shown in FIG. 3 are planes that are perpendicular to the page and intersect each other substantially perpendicularly, and the line of intersection coincides with the center 72 of the oscillating rotation in the drive unit 10 of the actuator 100. The bending lines 65a and 65b of the flexible substrate 60 are parallel to the plane 71a and are provided in the vicinity of the plane 71a. Similarly, the folding lines 65c and 65d of the flexible substrate 60 are provided so as to be parallel to the plane 71b and located in the vicinity of the plane 71b.

  As described above, the flexible substrate 60 that electrically connects the first piezoelectric element 1 and the outside is bent in a stepped manner by at least two folding lines 65 a and 65 b in the vicinity of the connection position with the first piezoelectric element 1. Since any of the fold lines 65a and 65b is in or near the plane 71a passing through the center 72 of the swinging rotation of the drive unit 10, the fold line 65a can be moved even if an excessive force is applied to the drive unit 10. , 65b can prevent the flexible substrate 60 connected to the first piezoelectric element 1 from being disconnected and prevent the flexible substrate 60 from being peeled off from the first piezoelectric element 1. The same applies to the second piezoelectric element 2.

  In addition, four folding lines 65a to 65d of the flexible substrate 60 are provided at such positions, and the flexible substrate 60 is bent in a step shape, so that the flexible substrate 60 is not twisted and is simply bent and stretched. It is possible to cope with the swinging rotation in the drive unit 10. That is, it can be said that the arrangement of the folding lines 65a to 65d is the arrangement with the least risk of load, loss, and disconnection.

  Further, when the bent portion of the flexible substrate 60 is only the fold lines 65a and 65b, a phenomenon of returning to the shape before being bent by the spring back occurs. The same applies to the case of only the folding lines 65c and 65d. When such a phenomenon occurs, not only the bent shape cannot be maintained, but also an unnecessary force due to the spring back acts on the drive unit 10 of the actuator 100, which is not preferable. On the other hand, as shown in FIG. 3, the two planes 71a and 71b cross each other at substantially right angles. That is, the folding of the folding lines 65c and 65d is substantially perpendicular to the folding of the folding lines 65a and 65b. Of course, these bent portions are not separate flexible substrates, but are integrated in the portion reaching the conduction portion 62, and are thus constrained to each other and do not return to the original shape. Therefore, by arranging the folding lines 65a and 65b and the folding lines 65c and 65d of the flexible substrate 60 so as to be substantially perpendicular, the flexible substrate 60 is not subjected to any special parts or processing. Spring back can be prevented.

  Note that the plane 71a and the plane 71b do not necessarily need to intersect each other perpendicularly, and only need to restrain the bending of the flexible substrate 60, and therefore do not have to be in the same plane. However, the angle formed by the plane 71a and the plane 71b is preferably closer to an acute angle.

  Thus, the fold line 65a and the fold line 65b of the flexible substrate 60 connected to the first piezoelectric element 1 and the fold line 65c and the fold line 65d of the flexible substrate 60 connected to the second piezoelectric element 2 are parallel to each other. Therefore, the flexible substrate 60 can cope with the swinging rotation of the driving unit 10 by simply bending and stretching without twisting.

  Further, the position of the center 72 of the oscillating rotation in the driving unit 10 of the actuator 100 does not need to be obtained accurately because the flexible substrate 60 only needs to be largely twisted. That is, since the tip member 3 moves along the inner peripheral surface of the rotor 20, the tip member 3 may substantially coincide with the center line of the rotating shaft 21 of the rotor 20.

  Furthermore, as shown in FIGS. 4 and 5, an intermediate portion 66 a between the first electrode portion 61 a and the second electrode portion 61 b of the flexible substrate 60 is attached so as to maintain a gap 67 that is equal to or larger than a certain level with the first piezoelectric element 1. It is preferable. This is because, depending on the bonding material used for the bonding portion 91 and the bonding portion 92, the bonding material flows into the gap 67 due to surface tension during attachment, and the first electrode portion 61a and the second electrode portion 61b are short-circuited. Because there is a risk of doing. However, by providing the gap 67 corresponding to the bonding material, it is possible to prevent in advance a problem that the first electrode portion 61a and the second electrode portion 61b are short-circuited.

  As described above, the flexible substrate 60 is connected to each of the piezoelectric elements 1 and 2 by bending at least two electrodes with respect to one piezoelectric element into a substantially U shape, and in the vicinity of the electrodes of the piezoelectric elements 1 and 2. Since a gap is provided between the other surface and the piezoelectric elements 1 and 2, when the electrodes of the flexible substrate 60 and the electrodes of the piezoelectric elements 1 and 2 are bonded together by a bonding material, the bonding material flows in and is flexible. It is possible to prevent a short circuit between the electrode of the substrate 60 and the electrodes of the piezoelectric elements 1 and 2.

  A slight load is also applied in the direction parallel to the surface of the flexible substrate (direction in the planes 71a and 71b) between the fold line 65a and the fold line 65b and between the fold line 65c and the fold line 65d. May take. In this case, the flexible substrate 60 may be easily bent by providing a notch on the side surface between the fold line 65a and the fold line 65b and between the fold line 65c and the fold line 65d.

  In the present embodiment, the flexible substrate 60 is folded in a U-shape along the folding lines 64a to 64d at the joint portion between the first piezoelectric element 1 and the second piezoelectric element 2 and the flexible substrate 60. Is not particularly limited to this, and may be bent into other shapes such as a substantially U-shape or U-shape.

  Furthermore, in this embodiment, as shown in FIG. 6, the flexible substrate 60 is bent in a stepped manner along the fold line 65a and the fold line 65b and connected to the first piezoelectric element 1, but the present invention is particularly limited to this. Instead, the flexible substrate 60 may be bent into a substantially U shape at the fold line 65 a ′ and the fold line 65 b ′ and connected to the first piezoelectric element 1, as indicated by a one-point difference line in FIG. 6. In this case, the first electrode portion 61a, the second electrode portion 61b, the third electrode portion 61c and the fourth electrode portion 61d of the flexible substrate 60, the fifth electrode portion 63a, the sixth electrode portion 63b, the seventh electrode portion 63c, and The eighth electrode portion 63d and the copper foil C are not on the front surface (upper surface in the flexible substrate 60 in FIG. 6) 60u, but on the rear surface (lower surface in the flexible substrate 60 in FIG. 6) 60s. Will be placed. In this way, the flexible substrate 60 that electrically connects the first piezoelectric element 1 and the outside is substantially U-shaped at at least two folding lines 65 a ′ and 65 b ′ in the vicinity of the connection position with the first piezoelectric element 1. Since both the fold lines 65a 'and 65b' are in or near the plane 71a passing through the center 72 of the swinging rotation of the drive unit 10, the same effects as in the first embodiment are obtained. Can be obtained. The same applies to the second piezoelectric element 2.

(Second Embodiment)
Next, an actuator according to a second embodiment of the present invention will be described. FIG. 8 is a rear view showing the configuration of the actuator in the second embodiment, and FIG. 9 is a view in the direction of the arrow D of the actuator shown in FIG.

  In the actuator 100 according to the first embodiment, the flexible substrate 60 is provided in parallel to the lower surface of the actuator 100 (the xy plane shown in FIG. 2). However, in the second embodiment, the flexible substrate 60 is the same as the first embodiment. In contrast, the flexible substrate 60 is drawn out in the lower surface direction (z-axis direction) of the actuator 100. In the following description, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  As shown in FIGS. 8 and 9, the flexible substrate 60 is bent in a U shape by a fold line 264 a and a fold line 264 b, and a first electrode provided at one end portion that is bent in a U shape. The part 61 a is joined to the first electrode part 1 a of the first piezoelectric element 1, and the second electrode part 61 b provided at the other end is joined to the second electrode part 1 b of the first piezoelectric element 1. Similarly, the flexible substrate 60 is folded in a U shape by a fold line 264c and a fold line 264d, and the third electrode portion 61c provided at one end bent in the U shape has a second piezoelectric element. The second electrode portion 2 b of the second piezoelectric element 2 is bonded to the second electrode portion 2 b of the second piezoelectric element 2. Further, the flexible substrate 60 is bent 90 degrees in a direction (z-axis direction) opposite to the first piezoelectric element 1 by a bending line 265a in the vicinity of the connection portion with the first electric element 1, and the flexible board 60 is bent by the bending line 265b. Folded 135 degrees in the moving direction (x-axis direction), bent 90 degrees in the z-axis direction at a fold line 265c near the connection point with the second electric element 2, bent 135 degrees in the x-axis direction at the fold line 265d, The conduction part 62 is pulled out in the lower surface direction (z-axis direction) of the driving part 10 of the actuator 200.

  The planes 71a and 71b shown in FIGS. 8 and 9 are planes that are perpendicular to the plane of the paper and intersect each other substantially perpendicularly, and the intersecting line is the center of oscillation rotation 72 in the drive unit 10 of the actuator 200. Match. The folding lines 265a and 265b of the flexible substrate 60 are lines parallel to the plane 71a and are provided in the vicinity of the plane 71a. Similarly, the folding lines 265c and 265d of the flexible substrate 60 are provided so as to be parallel to the plane 71b and located in the vicinity of the plane 71b. In this way, by arranging the fold line, two effects can be obtained as in the first embodiment.

  That is, when the actuator 200 is swung by receiving the frictional force from the rotor 20, the actuator 200 is rotated around the center 72 of the rocking rotation. Therefore, the flexible substrate 60 can be oscillated and rotated in the drive unit 10 without being twisted by bending and extending and deforming the four folding lines 265a to 265d and the vicinity thereof in the flexible substrate 60.

  In addition, when the bent portion of the flexible substrate 60 is only the fold lines 265a and 265b, a phenomenon of returning to the shape before being bent by the spring back occurs. The same applies to the case of only the folding lines 265c and 265d. When such a phenomenon occurs, not only the bent shape cannot be maintained, but also an unnecessary force due to the spring back acts on the driving unit 10 of the actuator 200, which is not preferable. On the other hand, as shown in FIG. 8, the two planes 71a and 71b cross each other at substantially right angles. That is, the folding lines 265c and 265d are in a substantially right-angled positional relationship with respect to the folding lines 265a and 265b. Of course, these bent portions are not separate flexible substrates, but are integrated in the portion reaching the conduction portion 62, and are thus constrained to each other and do not return to the original shape. Therefore, by arranging the folding lines 265a and 265b of the flexible substrate 60 and the folding lines 265c and 265d so as to be substantially perpendicular to each other, the flexible substrate 60 is not subjected to any special parts or processing. Spring back can be prevented.

(Third embodiment)
Next, an actuator according to a third embodiment of the present invention will be described. FIG. 10 is a perspective view showing the configuration of the actuator in the third embodiment, and FIG. 11 is a rear view of the actuator shown in FIG.

  In the case of the first and second embodiments, as shown in FIGS. 2 and 8, the rotation shaft 21 of the rotor 20 is composed of the first piezoelectric element 1, the second piezoelectric element 2, and the chip that are components of the drive unit 10. Although provided in a closed space surrounded by the member 3 and the base member 4, it is not always necessary to provide the rotating shaft 21 of the rotor 20 in each component of the drive unit 10. That is, the position of the rotating shaft 21 changes depending on the arrangement of the driving unit 10 and the rotor 20, and the center 72 of the swinging rotation in the driving unit 10 of the actuator 300 also changes. Therefore, in the third embodiment, a case where the rotating shaft 21 of the rotor 20 is outside each component of the drive unit 10 will be described. In the following description, the same components as those in the first embodiment and the second embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  The actuator 300 in the third embodiment shown in FIG. 10 includes a drive unit 10 that drives the rotor 20, two pressurization units 31 and 32 that pressurize and contact the drive unit 10 with the rotor 20, and the drive unit 10. 2 includes a pressing member (not shown) that restricts movement in the z-axis direction and a holder (not shown) that holds the drive unit 10. The drive unit 10 includes, for example, two piezoelectric elements 1 and 2 that intersect at an angle of 90 degrees, a chip member 3 that is bonded to the intersection, and a base member that is bonded to the base ends of the piezoelectric elements 1 and 2. 4.

  As shown in FIG. 11, the flexible substrate 60 is folded in a U shape by a fold line 364a and a fold line 364b, and a first electrode portion 61a provided at one end portion folded in a U shape is provided. The second electrode portion 61 b that is joined to the first electrode portion 1 a of the first piezoelectric element 1 and provided at the other end is joined to the second electrode portion 1 b of the first piezoelectric element 1. In addition, the flexible substrate 60 is bent in a staircase pattern at a fold line 365 a and a fold line 365 b in the vicinity of the connection portion with the first electric element 1. Similarly, the flexible substrate 60 is folded in a U shape by a fold line 364c and a fold line 364d, and the third electrode portion 61c provided at one end portion folded in the U shape has a second piezoelectric element. The second electrode portion 2 b of the second piezoelectric element 2 is bonded to the second electrode portion 2 b of the second piezoelectric element 2. Further, the flexible substrate 60 is bent in a staircase pattern at a folding line 365c and a folding line 365d in the vicinity of a connection portion with the second electric element 2.

  As shown in FIGS. 10 and 11, in the actuator 300 according to the third embodiment, the rotating shaft 21 of the rotor 20 is provided outside the drive unit 10.

  A plane 71a and a plane 71b shown in FIG. 11 are planes that are perpendicular to the page and intersect each other substantially perpendicularly, and the line of intersection coincides with the center 72 of the oscillating rotation in the drive unit 10 of the actuator 300. The bending lines 365a and 365b of the flexible substrate 60 are lines parallel to the plane 71a and are provided in the vicinity of the plane 71a. Similarly, the folding lines 365c and 365d of the flexible substrate 60 are provided so as to be parallel to the plane 71b and located in the vicinity of the plane 71b. In this way, by arranging the fold line, two effects can be obtained as in the first embodiment.

  That is, when the actuator 300 is swung by receiving the frictional force from the rotor 20, the actuator 300 is rotated around the center 72 of the swinging rotation. Therefore, the flexible substrate 60 can be oscillated and rotated in the drive unit 10 of the actuator 300 without being twisted by bending and extending and deforming the four folding lines 365a to 365d and the vicinity thereof in the flexible substrate 60.

  Further, when the bent portion of the flexible substrate 60 is only the fold lines 365a and 365b, a phenomenon of returning to the shape before being bent by the spring back occurs. The same applies to the case of only the folding lines 365c and 365d. If such a phenomenon occurs, the bent shape cannot be maintained, and an unnecessary force due to the spring back acts on the actuator 300, which is not preferable. On the other hand, as shown in FIG. 11, the two planes 71a and 71b cross each other at substantially right angles. That is, the folding lines 365c and 365d are in a substantially right-angled positional relationship with respect to the folding lines 365a and 365b. Of course, these bent portions are not separate flexible substrates, but are integrated in the portion reaching the conduction portion 62, and are thus constrained to each other and do not return to the original shape. Therefore, by arranging the folding lines 365a and 365b and the folding lines 365c and 365d of the flexible substrate 60 so as to be substantially perpendicular, the flexible substrate 60 is not subjected to any special parts or processing. Spring back can be prevented.

  As described above, even if the rotation shaft 21 of the rotor and the center 72 of the swinging rotation of the drive unit 10 are at different positions, the shape of the flexible substrate 60 and the way to attach the first piezoelectric element 1 and the second piezoelectric element 2 can be adjusted. By changing a little, the same effect as said 1st-3rd embodiment can be acquired.

  In the actuator 300 according to the third embodiment shown in FIGS. 10 and 11, the conductive portion 62 of the flexible substrate 60 is drawn out to the base member 4 side. This is because the conductive portion 62 is on the chip member 3 side. If the shape is changed so as to be pulled out, or if it is bent in this shape even once, it is possible to easily pull out the conducting portion 62 toward the chip member 3 side.

(Fourth embodiment)
Next, an actuator according to a fourth embodiment of the present invention will be described. FIG. 12 is a rear view showing the configuration of the actuator in the fourth embodiment.

  In the actuator 300 according to the third embodiment, the flexible substrate 60 is provided in parallel to the lower surface of the actuator 300 (the xy plane shown in FIG. 2). However, in the fourth embodiment, the flexible substrate 60 is the same as the third embodiment. In contrast, the flexible substrate 60 is drawn out in the lower surface direction (z-axis direction) of the actuator 300. In the following description, the same components as those in the first to third embodiments are denoted by the same reference numerals, and the description thereof is omitted.

  As shown in FIG. 12, the flexible substrate 60 is bent in a U shape by a fold line 464a and a fold line 464b, and a first electrode portion 61a provided at one end portion bent in the U shape is provided. The second electrode portion 61 b that is joined to the first electrode portion 1 a of the first piezoelectric element 1 and provided at the other end is joined to the second electrode portion 1 b of the first piezoelectric element 1. Similarly, the flexible substrate 60 is folded in a U shape by a fold line 464c and a fold line 464d, and the third electrode portion 61c provided at one end portion folded in the U shape has a second piezoelectric element. The second electrode portion 2 b of the second piezoelectric element 2 is bonded to the second electrode portion 2 b of the second piezoelectric element 2. In addition, the flexible substrate 60 is bent 90 degrees in the lower surface direction (z-axis direction) of the drive unit 10 of the actuator 400 by a bend line 465a in the vicinity of the connection portion with the first electric element 1, and the rotor 20 is moved by the bend line 465b. Is bent 135 degrees in the direction (x-axis direction), is bent 90 degrees in the z-axis direction by a fold line 465c in the vicinity of the connection portion with the second electric element 2, is bent 135 degrees in the x-axis direction by a fold line 465d, and is conductive The part 62 is pulled out in the z-axis direction.

  A plane 71 a and a plane 71 b shown in FIG. 12 are planes that are perpendicular to the page and intersect each other substantially perpendicularly, and the line of intersection coincides with the center 72 of the oscillating rotation in the drive unit 10 of the actuator 400. The folding lines 465a and 465b of the flexible substrate 60 are lines parallel to the plane 71a and are provided in the vicinity of the plane 71a. Similarly, the folding lines 465c and 465d of the flexible substrate 60 are provided so as to be parallel to the plane 71b and located in the vicinity of the plane 71b. In this way, by arranging the fold line, two effects can be obtained as in the first embodiment.

  In other words, when the actuator 400 swings by receiving a frictional force from a rotor (not shown), the actuator 400 rotates around the center 72 of the swinging rotation. Therefore, even if the rotation shaft 21 of the rotor and the center 72 of the swinging rotation of the drive unit 10 are at different positions, the flexible substrate 60 is flexible by bending and extending and deforming the four folding lines 465a to 465d and the vicinity thereof. The substrate 60 can be oscillated and rotated in the drive unit 10 of the actuator 400 without being twisted.

  Further, when the bent portion of the flexible substrate 60 is only the fold lines 465a and 465b, a phenomenon of returning to the shape before being bent by the spring back occurs. The same applies to the case of only the folding lines 465c and 465d. If such a phenomenon occurs, the bent shape cannot be maintained, and an unnecessary force due to the spring back acts on the drive unit 10 of the actuator 400, which is not preferable. On the other hand, as shown in FIG. 12, the two planes 71a and 71b intersect each other at substantially right angles. That is, the bending lines 465c and 465d are bent at a substantially right angle relative to the bending lines 465a and 465b. Of course, these bent portions are not separate flexible substrates, but are integrated in the portion reaching the conduction portion 62, and are thus constrained to each other and do not return to the original shape. Therefore, even if the rotation shaft 21 of the rotor and the center 72 of the swinging rotation of the drive unit 10 are at different positions, the folding lines 465a and 465b of the flexible substrate 60 and the folding lines 465c and 465d are substantially perpendicular to each other. Accordingly, the flexible substrate 60 can be prevented from being spring-backed without performing any special parts or processing on the flexible substrate 60.

(Fifth embodiment)
Next, an actuator according to a fifth embodiment of the present invention will be described. FIG. 13 is a rear view showing the configuration of the actuator in the fifth embodiment.

  In the first to fourth embodiments, the cylindrical driven part is rotationally driven by the driving unit 10, but in the fifth embodiment, the rod-like driven part is linearly driven. In the following description, the same components as those in the first to fourth embodiments are denoted by the same reference numerals, and the description thereof is omitted.

  The driven portion 20 ′ is held so as to be movable only in the direction indicated by the double-headed arrow 82 in FIG. 13 (x-axis direction in FIG. 13) by a linear guide (support member) (not shown). The driven portion 20 moves in the direction indicated by the double arrow 82 by the frictional force generated by the elliptical locus drawn by the tip member 3 and the pressing force acting from the tip member 3 to the driven portion 20 ′.

  In this case, the driven portion 20 'has no rotation axis and the rotation center is infinity. Although the pressure unit and the regulating unit (not shown) vary depending on the force acting on the base member 4, since the contact between the tip member 3 and the driven unit 20 ′ is always maintained, The center is close to infinity. Therefore, the plane 71a and the plane 71b are yz planes perpendicular to the moving direction of the driven part 20 ′, and the folding lines 565a and 565b of the flexible substrate 60 are lines parallel to the y-axis, and the plane 71a It is provided so that it is located in the vicinity, and it is bent in a staircase shape. Similarly, the folding lines 565c and 565d of the flexible substrate 60 are provided so as to be located in the vicinity of the flat surface 71b while being parallel to the y-axis, and are bent stepwise. In this way, by arranging the fold line, two effects can be obtained as in the first embodiment.

  That is, when the actuator 500 is swung by receiving the frictional force from the rotor 20, the actuator 500 rotates around infinity at the center of the swinging rotation. Therefore, the flexible substrate 60 can be oscillated and rotated in the drive unit 10 of the actuator 500 without being twisted by bending and extending and deforming the four folding lines 565a to 565d and the vicinity thereof in the flexible substrate 60.

  Therefore, when the center of the swing rotation of the drive unit 10 is at infinity, there are a plurality of planes passing through the center of the swing rotation of the drive unit 10, and the flexible substrate 60 connected to each piezoelectric element 1 and 2 is bent. Since the lines 565a, 565b, 565c, and 565d are in or near different planes 71a and 71b among the plurality of planes, the flexible substrate 60 can be used even when the center of swinging rotation of the drive unit 10 is at infinity. Without being twisted, it is possible to cope with the swinging rotation of the drive unit 10 by simply bending and stretching.

  Further, as shown in FIG. 13, the two planes 71a and 71b are provided so as to be substantially parallel to each other. That is, the folding of the folding lines 365c and 365d is substantially parallel to the folding of the folding lines 365a and 365b. Of course, these bent portions are not separate flexible substrates, but are integrated in the portion reaching the conduction portion 62, and are thus constrained to each other and do not return to the original shape. Therefore, when the driven portion 20 ′ of the actuator 500 is linearly driven, the bending lines 365 a and 365 b of the flexible substrate 60 and the bending lines 365 c and 365 d are arranged so as to be approximately parallel to the flexible substrate 60. Thus, the spring back of the flexible substrate 60 can be prevented without performing any special parts or processing.

(Sixth embodiment)
Next, an actuator according to a sixth embodiment of the present invention will be described. FIG. 14 is a front view showing a partial configuration of the actuator according to the sixth embodiment, FIG. 15 is a rear view of the actuator shown in FIG. 14, and FIG. 16 is an E− of the actuator shown in FIG. It is E line sectional drawing.

  In the first to fifth embodiments, the displacement element is a cylindrical piezoelectric element. However, the present invention is not particularly limited to this, and other piezoelectric elements having different principles and shapes, or other electromechanical conversion elements. Also good. Therefore, in the sixth embodiment, a case where a flat piezoelectric element is used as an example of another piezoelectric element and the entire actuator is thinned will be described. In the following description, the same components as those in the first to fifth embodiments are denoted by the same reference numerals, and the description thereof is omitted.

  The first piezoelectric element 1 ′ and the second piezoelectric element 2 ′ are flat piezoelectric elements. On the upper surface of the first piezoelectric element 1 ′ (the surface on the near side with respect to the paper surface of FIG. 14), a first electrode portion 1′a to which an electrode material is applied is formed, and the lower surface of the first piezoelectric element 1 ′ (see FIG. 14), a first electrode portion 1′b to which an electrode material is applied is formed, and the first electrode non-electrode electrode is not applied to the side surface of the first piezoelectric element 1 ′. Forming portions 1′c and 1′d are formed. Thus, when the electrode part of a piezoelectric element is arrange | positioned at the upper and lower surface side, it is necessary to set it as the shape where the electrode part by the side of the flexible substrate 60 opposes these.

  Therefore, the first electrode is formed on the upper surface side (the front surface with respect to the paper surface of FIG. 14) of one end portion of the flexible substrate 60 which is bent in a U shape along the first piezoelectric element 1 ′ from the lower surface to the upper surface. The portion 61a is provided, and the second electrode portion 61b is provided on the lower surface side (the back surface with respect to the paper surface of FIG. 14). Further, the third electrode portion 61c is provided on the upper surface side of the other end portion of the flexible substrate 60 which is bent from the lower surface to the upper surface along the second piezoelectric element 2 ′, and the fourth electrode portion 61d is provided on the lower surface side. Is provided. The first electrode portion 61a of the flexible substrate 60 is bonded to face the first electrode portion 1′a of the first piezoelectric element 1 ′, and the second electrode portion 61b of the flexible substrate 60 is bonded to the first piezoelectric element 1 ′. The third electrode portion 61c of the flexible substrate 60 is bonded to face the second electrode portion 1′b and is bonded to the first electrode portion 2′a of the second piezoelectric element 2 ′. The fourth electrode portion 61d faces and is joined to the second electrode portion 2′b of the second piezoelectric element 2.

  As shown in FIG. 16, an intermediate portion 66a between the first electrode portion 61a and the second electrode portion 61b of the flexible substrate 60 is constant with the first piezoelectric element 1 as in the first to fifth embodiments. It is preferable to attach so as to maintain the above gap 67. This is because, depending on the bonding material used for the bonding portion 91 and the bonding portion 92, the bonding material flows into the gap 67 due to surface tension during attachment, and the first electrode portion 61a and the second electrode portion 61b are short-circuited. Because there is a risk of doing. However, by providing the gap 67 corresponding to the bonding material, it is possible to prevent in advance a problem that the first electrode portion 61a and the second electrode portion 61b are short-circuited.

  Further, when the electrode portions of the first piezoelectric element 1 ′ and the second piezoelectric element 2 ′ are arranged on the side surfaces, the flexible substrate 60 is folded along the folding lines 64a to 64d as in the first to fifth embodiments. What is necessary is just to bend in the shape of a letter.

  Further, the plane 71a and the plane 71b shown in FIG. 15 are planes that are perpendicular to the page and intersect each other substantially perpendicularly, and the intersection line coincides with the center of oscillation rotation 72 of the drive unit 10 of the actuator 600. To do. The folding lines 665a and 665b of the flexible substrate 60 are lines parallel to the plane 71a and are provided in the vicinity of the plane 71a. Similarly, the folding lines 665c and 665d of the flexible substrate 60 are provided so as to be parallel to the plane 71b and located in the vicinity of the plane 71b. In this way, by arranging the fold line, two effects can be obtained as in the first embodiment.

  Note that the shape of the flexible substrate 60 in the sixth embodiment may be applied to the flexible substrate 60 in the first to fifth embodiments, and the shape of the flexible substrate 60 in the first to fifth embodiments may be applied. You may apply to the flexible substrate in 6th Embodiment.

It is a partial perspective view which shows the structure of the actuator in 1st Embodiment. It is a perspective view which shows the structure except the pressing member of the actuator shown in FIG. FIG. 3 is a rear view of the actuator shown in FIG. 2. FIG. 4 is a cross-sectional view of the actuator shown in FIG. 3 taken along line AA. It is a figure for demonstrating another attachment method of a piezoelectric element and a flexible substrate. It is a B direction arrow directional view of the actuator shown in FIG. It is the expanded view which expand | deployed the flexible substrate shown to FIGS. It is a rear view which shows the structure of the actuator in 2nd Embodiment. It is a D direction arrow directional view of the actuator shown in FIG. It is a perspective view which shows the structure of the actuator in 3rd Embodiment. It is a rear view of the actuator shown in FIG. It is a rear view which shows the structure of the actuator in 4th Embodiment. It is a rear view which shows the structure of the actuator in 5th Embodiment. It is a front view which shows a partial structure of the actuator which is 6th Embodiment. It is a rear view of the actuator shown in FIG. FIG. 16 is a cross-sectional view of the actuator shown in FIG. 15 taken along the line EE. It is a figure for demonstrating the conventional actuator. It is the FF sectional view taken on the line of the conventional actuator shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 1st piezoelectric element 2 2nd piezoelectric element 3 Chip member 4 Base member 10 Drive part 20 Rotor 60 Flexible substrate 100 Actuator

Claims (4)

A plurality of displacement parts that generate a predetermined displacement, a combination part that is coupled to one end of each of the plurality of displacement parts, and combines the displacements of the plurality of displacement parts, and the other end of the plurality of displacement parts is fixed A drive unit composed of a fixed unit for
A driven unit that is driven by driving force transmitted by the combining unit;
A flexible board that electrically connects the displacement part and the outside;
The flexible substrate is bent by at least two folding lines in the vicinity of the connection portion with the displacement portion, and any of the folding lines is in a plane passing through the center of swinging rotation of the driving unit or in the vicinity thereof. An actuator characterized by. The plurality of displacement portions include a pair of piezoelectric elements,
The actuator according to claim 1, wherein bending lines of the flexible substrate connected to each piezoelectric element are not parallel to each other. The plurality of displacement portions include a pair of piezoelectric elements,
When the center of rocking rotation of the drive unit is at infinity, there are a plurality of planes, and the bending line of the flexible substrate connected to each piezoelectric element is in a different plane among the plurality of planes, or The actuator according to claim 1, wherein the actuator is in the vicinity.   The flexible substrate is connected to the piezoelectric element by bending at least two electrodes with respect to one piezoelectric element into a substantially U shape, and a gap is formed between the surface of the piezoelectric element other than the vicinity of the electrode and the piezoelectric element. The actuator according to claim 2, wherein the actuator is provided.

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