JP2005101369A - Package for housing optical semiconductor element and optical semiconductor device - Google Patents

Package for housing optical semiconductor element and optical semiconductor device Download PDF

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JP2005101369A
JP2005101369A JP2003334397A JP2003334397A JP2005101369A JP 2005101369 A JP2005101369 A JP 2005101369A JP 2003334397 A JP2003334397 A JP 2003334397A JP 2003334397 A JP2003334397 A JP 2003334397A JP 2005101369 A JP2005101369 A JP 2005101369A
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optical semiconductor
semiconductor element
plate member
leads
lead
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JP4172782B2 (en
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Satoshi Miura
聡 三浦
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Kyocera Corp
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Kyocera Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a package for housing optical semiconductor element that can secure the parallelism of the light receiving surface of an optical semiconductor element to a light-transmissive lid body. <P>SOLUTION: The package 3 for housing the optical semiconductor element 4 is provided with a lead frame 1 composed of a long plate member 1a provided with broad flat sections 1d for mounting the optical semiconductor element 4 at both ends and a plurality of through holes 1e formed at portions other than the flat sections 1d, hung leads 1f respectively extended outward from both end faces of the plate member 1a, a plurality of leads 1b extended outward at intervals from the side face of the plate member 1a, and a frame 1c coupled with the outer ends of the leads 1f and leads 1b. The package 3 is also provided with an insulating substrate 2 having a recessed section 3a for housing the optical semiconductor element 4 on its top surface. In the recessed section 3a, the plate member 1a is placed on the bottom face of the section 3a so that the flat sections 1d of the member 1a may be positioned at both ends of the bottom face, and the hung leads 1f and leads 1b are installed so that the leads 1f and 1b may be led out from the inside of the recessed section 3a through the recessed section 3a. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、ラインセンサー等の光半導体素子を収容するための光半導体素子収納用パッケージ、および光半導体素子収納用パッケージに光半導体素子を収容してなる光半導体装置に関するものである。   The present invention relates to an optical semiconductor element housing package for housing an optical semiconductor element such as a line sensor, and an optical semiconductor device in which the optical semiconductor element is housed in the optical semiconductor element housing package.

従来、ラインセンサー等の光半導体素子を収容するための光半導体素子収納用パッケージ(以下、単にパッケージともいう)は、一般に、上面に平板状の光半導体素子が載置される載置部が形成された長板状の板部材、板部材の両端面からそれぞれ外側に延びた吊りリード、板部材の側面から間隔をあけて外側に延びた複数のリード、および吊りリードおよび複数のリードの外側の端を一括的に結合したフレームから成るリードフレームと、上面に光半導体素子を収容するための凹部が形成され、板部材が凹部の底面に載置されるとともに吊りリードおよびリードが凹部の内側から凹部を貫通して外側に導出されるように設置された絶縁基体とを具備した構成である。   2. Description of the Related Art Conventionally, an optical semiconductor element housing package (hereinafter also simply referred to as a package) for accommodating an optical semiconductor element such as a line sensor is generally formed with a mounting portion on which a flat optical semiconductor element is mounted on an upper surface. A long plate-like plate member, a suspension lead extending outward from both end faces of the plate member, a plurality of leads extending outward from the side surface of the plate member, and a suspension lead and the outside of the plurality of leads A lead frame composed of a frame with the ends joined together and a recess for accommodating the optical semiconductor element are formed on the upper surface, the plate member is placed on the bottom surface of the recess, and the suspension lead and the lead are from the inside of the recess. And an insulating base installed so as to be led out through the recess.

そして、リードフレームの板部材の上に光半導体素子を載置するとともに樹脂接着剤,半田等を介して接着固定し、光半導体素子の電極をボンディングワイヤ等を介して凹部内に露出しているリードの内側の端部分に電気的に接続し、その後、絶縁基体の凹部の周囲の上面に透光性の蓋体を接合させ、光半導体素子を絶縁基体とリードフレームと蓋体とから成る容器内部に気密に封止することにより、光半導体装置として完成する。   Then, the optical semiconductor element is mounted on the plate member of the lead frame and is bonded and fixed via a resin adhesive, solder, etc., and the electrode of the optical semiconductor element is exposed in the recess via a bonding wire or the like. A container made of an insulating base, a lead frame, and a lid, which is electrically connected to the inner end portion of the lead, and then a light-transmitting lid is bonded to the upper surface around the recess of the insulating base. By sealing hermetically inside, an optical semiconductor device is completed.

この光半導体装置について、フレームを切断除去することによりリードを個々に独立させるとともに、リードの外側の端を外部電気回路基板の配線導体等の所定位置に半田等を介して電気的,機械的に接続することにより、光半導体装置の外部電気回路基板への実装が行われる。なお、フレームの切断除去の際、吊りリードのうち凹部の外側に出ている部分も切断除去される。   In this optical semiconductor device, the lead is individually separated by cutting and removing the frame, and the outer end of the lead is electrically and mechanically connected to a predetermined position such as a wiring conductor of the external electric circuit board via solder or the like. By connecting, the optical semiconductor device is mounted on the external electric circuit board. When the frame is cut and removed, the portion of the suspension lead that is outside the recess is also cut and removed.

そして、外部の光が、透光性蓋体を通って光半導体素子の上面に形成されている受光面で受光され、この受光された光が光半導体素子で電気信号に変換され、リードを介して外部電気回路に電気信号が供給される。   Then, external light is received by the light receiving surface formed on the upper surface of the optical semiconductor element through the translucent lid, and the received light is converted into an electrical signal by the optical semiconductor element, via the lead. Thus, an electric signal is supplied to the external electric circuit.

このような光半導体装置においては、光半導体素子の作動にともなって生じる熱を外部に放散させることが重要な課題となっている。すなわち、樹脂製の絶縁基体を具備するパッケージの場合、光半導体素子を板部材に載置する際の熱による絶縁基体の歪が大きく、絶縁基体の歪によって光半導体素子を載置している板部材に変形が生じ、光半導体素子が傾いてしまうという問題がある。特に、光半導体素子がラインセンサーのような細長い形状のものである場合、その長辺方向の変形が多発し、その変形が非常に大きなものとなる傾向がある。   In such an optical semiconductor device, it is an important issue to dissipate heat generated by the operation of the optical semiconductor element to the outside. That is, in the case of a package having a resin insulating substrate, the distortion of the insulating substrate due to heat when the optical semiconductor element is mounted on the plate member is large, and the plate on which the optical semiconductor element is mounted due to the distortion of the insulating substrate There is a problem that the member is deformed and the optical semiconductor element is inclined. In particular, when the optical semiconductor element has an elongated shape such as a line sensor, deformation in the long side direction frequently occurs, and the deformation tends to be very large.

また、ラインセンサー等の光半導体素子は細長い長方形状であるため、わずかでもリードフレームの板部材の上への載置位置がずれると、光半導体素子は傾いて透光性蓋体に対する平行度が劣化してしまい、受光面に外部の光を正確に受光させることができなくなり、ラインセンサーによる検知等に大きな誤差を生じ、正常な電気信号を出力することができなくなってしまう。   In addition, since the optical semiconductor element such as a line sensor has a long and narrow rectangular shape, if the mounting position of the lead frame on the plate member is slightly shifted, the optical semiconductor element is inclined and the parallelism with the translucent lid is increased. As a result, the external light cannot be accurately received on the light receiving surface, a large error occurs in detection by the line sensor, and a normal electric signal cannot be output.

このような課題に対して、例えば特許文献1,2では、アイランド(板部材)の平面形状が波型になされている固体撮像素子用キャビティケース(パッケージ)が提案されている。これらによれば、アイランドを波型にすることにより、絶縁基体に歪が生じたとしても、アイランドの波型部分が伸び縮みすることによりその歪を吸収することができ、アイランドが変形して傾くことを効果的に防止することができるというものである。
特開平7−161954号公報 特許第3186729号公報
In order to deal with such a problem, for example, Patent Documents 1 and 2 propose a cavity case (package) for a solid-state imaging device in which a planar shape of an island (plate member) is corrugated. According to these, even if the island is corrugated, even if distortion occurs in the insulating substrate, the corrugated portion of the island can be expanded and contracted to absorb the strain, and the island is deformed and tilted. This can be effectively prevented.
JP-A-7-161954 Japanese Patent No. 3186729

しかしながら、上記従来の固体撮像素子用キャビティケースでは、絶縁基体の伸縮については、アイランドの波型の部分で吸収することができるものの、熱により絶縁基体が長辺方向に凹状に変形すること等は、依然として十分に防止できないという問題があった。   However, in the conventional cavity case for a solid-state imaging device, the expansion and contraction of the insulating base can be absorbed by the corrugated portion of the island, but the insulating base is deformed into a concave shape in the long side direction by heat, etc. There was still a problem that could not be prevented sufficiently.

そのため、特に固体撮像素子(光半導体素子)が細長い形状のものである場合、その長手方向での光半導体素子の傾きを効果的に防止することは難しく、光半導体素子の受光面が透光性蓋体に対して傾いて正確な受光が妨げられるおそれがある。   For this reason, it is difficult to effectively prevent the inclination of the optical semiconductor element in the longitudinal direction, particularly when the solid-state imaging element (optical semiconductor element) has an elongated shape, and the light-receiving surface of the optical semiconductor element is translucent. There is a risk that accurate light reception may be hindered by tilting with respect to the lid.

本発明は、上記従来の問題に鑑みて完成されたものであり、その目的は、光半導体素子をパッケージの板部材に載置し固定する工程等において板部材を含むリードフレームおよび絶縁基体に熱が作用し、絶縁基体とリードフレームとの熱膨張係数の差に起因して生じた熱応力により絶縁基体に変形が生じたとしても、光半導体素子の受光面の透光性蓋体に対する平行度を確保することができ、光半導体素子の受光面に確実に正確な外光を受光させることが可能な光半導体素子収納用パッケージおよび光半導体装置を提供することである。   The present invention has been completed in view of the above-described conventional problems, and an object of the present invention is to heat a lead frame including a plate member and an insulating substrate in a process of mounting and fixing the optical semiconductor element on the plate member of the package. The parallelism of the light receiving surface of the optical semiconductor element with respect to the translucent lid even if the insulating substrate is deformed due to the thermal stress caused by the difference in thermal expansion coefficient between the insulating substrate and the lead frame. It is possible to provide an optical semiconductor element housing package and an optical semiconductor device that can ensure accurate external light on the light receiving surface of the optical semiconductor element.

本発明の光半導体素子収納用パッケージは、両端部に光半導体素子が載置される幅広の平坦部が設けられるとともに該平坦部以外の部位に複数の貫通孔が形成された長板状の板部材、該板部材の両端面からそれぞれ外側に延びた吊りリード、前記板部材の側面から間隔をあけて外側に延びた複数のリード、および前記吊りリードの外側の端と前記複数のリードの外側の端とを一括的に結合したフレームから成るリードフレームと、上面に前記光半導体素子を収容するための凹部が形成され、前記板部材が前記凹部の底面に前記平坦部が前記凹部の底面の両端部に位置するように載置されるとともに前記吊りリードおよび前記リードが前記凹部の内側から前記凹部を貫通して外側に導出されるように設置された絶縁基体とを具備していることを特徴とするものである。   The optical semiconductor element storage package of the present invention is a long plate-like plate in which wide flat portions on which optical semiconductor elements are placed are provided at both ends, and a plurality of through holes are formed in portions other than the flat portions. A member, a suspension lead extending outward from both end faces of the plate member, a plurality of leads extending outward from the side surface of the plate member, and an outer end of the suspension lead and the outside of the plurality of leads A lead frame composed of a frame in which the ends of the optical semiconductor element are joined together, and a concave portion for accommodating the optical semiconductor element is formed on the top surface, the plate member is on the bottom surface of the concave portion, and the flat portion is on the bottom surface of the concave portion. An insulating base that is placed so as to be positioned at both ends and is installed so that the suspension lead and the lead are led out from the inside of the recess through the recess. It is an butterfly.

また、本発明の光半導体素子収納用パッケージは、好ましくは、前記複数の貫通孔は、前記板部材の長手方向に並ぶように配列形成されていることを特徴とするものである。   Also, the optical semiconductor element housing package of the present invention is preferably characterized in that the plurality of through-holes are arranged so as to be aligned in the longitudinal direction of the plate member.

また、本発明の光半導体装置は、上記本発明の各構成の光半導体素子収納用パッケージと、前記板部材の前記載置部に載置されるとともに電極が前記リードに電気的に接続された光半導体素子と、前記絶縁基体の上面に前記凹部を塞ぐように取着された透光性蓋体とを具備していることを特徴とするものである。   The optical semiconductor device of the present invention is mounted on the optical semiconductor element housing package of each configuration of the present invention and the mounting portion of the plate member, and the electrode is electrically connected to the lead. It comprises an optical semiconductor element and a translucent lid attached to the upper surface of the insulating base so as to close the recess.

本発明の光半導体素子収納用パッケージによれば、板部材に複数の貫通孔が形成されていることから、絶縁基体に変形が生じたとしても、板部材のうち貫通孔が形成されている部位が伸び縮みすることによりその変形を吸収することができ、板部材が変形して傾くことを効果的に防止することができる。   According to the optical semiconductor element storage package of the present invention, since a plurality of through holes are formed in the plate member, even if deformation occurs in the insulating base, a portion of the plate member in which the through holes are formed The deformation of the plate member can be absorbed and the plate member can be effectively prevented from being deformed and tilted.

また、長板状の板部材の両端部に光半導体素子が載置される幅広の平坦部を設けるとともに、平坦部が凹部の底面の両端部に位置するようにして板部材を凹部に載置したことから、絶縁基体が凹状に反って変形したとしても、その変形の影響を受けにくい凹部の両端の平坦な部分に光半導体素子が載置されていることになり、光半導体素子の受光面を水平にして外光を正確に受光させることができる。   Also, wide flat portions on which the optical semiconductor elements are placed are provided at both ends of the long plate-like plate member, and the plate members are placed in the concave portions so that the flat portions are located at both ends of the bottom surface of the concave portion. Therefore, even if the insulating substrate is warped and deformed, the optical semiconductor element is placed on the flat portions at both ends of the concave part that is not easily affected by the deformation. It is possible to receive external light accurately by leveling.

また、本発明の光半導体素子収納用パッケージは、好ましくは、複数の貫通孔は、板部材の長手方向に並ぶように配列形成されていることから、長板状の板部材の歪が大きくなりやすい長手方向に沿って、効果的にその歪を吸収し防止するための貫通孔が配列されることになり、より一層効果的に板部材の変形を防止することができ、光半導体素子の受光精度、長期信頼性をより優れたものとすることができる。   In the optical semiconductor element housing package of the present invention, preferably, the plurality of through holes are arranged so as to be aligned in the longitudinal direction of the plate member, so that the distortion of the long plate-like plate member is increased. Through-holes for effectively absorbing and preventing the strain are arranged along the easy longitudinal direction, so that the deformation of the plate member can be prevented more effectively, and the optical semiconductor element can receive light. Accuracy and long-term reliability can be further improved.

また本発明の光半導体装置は、上記本発明の各構成の光半導体素子収納用パッケージと、板部材の載置部に載置されるとともに電極がリードに電気的に接続された光半導体素子と、絶縁基体の上面に凹部を塞ぐように取着された透光性蓋体とを具備していることから、熱応力に起因する歪によるパッケージの長辺方向の凹状の変形に対して、光半導体素子が傾くという問題を防止できる。その結果、光半導体素子を凹部内に傾くことなく収容し載置することができ、光半導体素子の受光精度、長期信頼性に優れたものを提供することができる。   Further, an optical semiconductor device of the present invention includes an optical semiconductor element housing package having each configuration of the present invention, an optical semiconductor element mounted on a mounting portion of a plate member, and an electrode electrically connected to a lead. Since the upper surface of the insulating base is provided with a translucent lid attached so as to close the concave portion, the light is prevented from being deformed in the long side direction of the package due to distortion caused by thermal stress. The problem that the semiconductor element is inclined can be prevented. As a result, the optical semiconductor element can be accommodated and placed without inclining in the recess, and the optical semiconductor element having excellent light receiving accuracy and long-term reliability can be provided.

本発明の半導体素子収納用パッケージおよび半導体装置を添付図面に基づき詳細に説明する。図1は本発明のパッケージおよび光半導体装置の実施の形態の1例を示し、1はリードフレーム、2は絶縁基体である。これらのリードフレーム1、絶縁基体2により主にパッケージ3が構成される。また、このパッケージ3に光半導体素子4を収容することにより光半導体装置が構成される。   A semiconductor element housing package and a semiconductor device according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 shows an example of an embodiment of a package and an optical semiconductor device according to the present invention, where 1 is a lead frame and 2 is an insulating substrate. The lead frame 1 and the insulating base 2 mainly constitute a package 3. Further, an optical semiconductor device is configured by accommodating the optical semiconductor element 4 in the package 3.

本発明のリードフレーム1は、両端部に光半導体素子4が載置される幅広の平坦部1dが設けられるとともに平坦部1d以外の部位に複数の貫通孔1eが形成された長板状の板部材1aと、板部材1aの両端面からそれぞれ外側に延びた吊りリード1fと、板部材1aの側面から間隔をあけて外側に延びた複数のリード1bと、吊りリード1fの外側の端と複数のリード1bの外側の端とを一括的に結合したフレーム1cとから構成されている。   The lead frame 1 of the present invention is a long plate-like plate in which wide flat portions 1d on which optical semiconductor elements 4 are placed are provided at both ends, and a plurality of through holes 1e are formed in portions other than the flat portions 1d. Member 1a, suspension leads 1f extending outward from both end surfaces of the plate member 1a, a plurality of leads 1b extending outward from the side surfaces of the plate member 1a, an outer end and a plurality of suspension leads 1f The frame 1c is formed by collectively connecting the outer ends of the leads 1b.

リードフレーム1は、鉄−ニッケル−コバルト合金や鉄−ニッケル合金,銅合金等の金属から成り、板部材1a,リード1b,フレーム1c,平坦部1dおよび吊りリード1fは同じ材料で形成される。このリードフレーム1は、例えば、板部材1a,リード1b,フレーム1c,平坦部1dおよび吊りリード1fが鉄−ニッケル−コバルト合金からなる場合、鉄−ニッケル−コバルト合金板に打抜き加工やエッチング加工等の金属加工を施すことにより、所定の形状に形成することができる。   The lead frame 1 is made of a metal such as an iron-nickel-cobalt alloy, an iron-nickel alloy, or a copper alloy, and the plate member 1a, the lead 1b, the frame 1c, the flat portion 1d, and the suspension lead 1f are formed of the same material. For example, when the plate member 1a, the lead 1b, the frame 1c, the flat portion 1d, and the suspension lead 1f are made of an iron-nickel-cobalt alloy, the lead frame 1 is punched or etched into an iron-nickel-cobalt alloy plate. By performing this metal processing, it can be formed into a predetermined shape.

絶縁基体2は、樹脂製のものであり、上面に光半導体素子4を収容するための凹部が形成されている。この絶縁基体2にリードフレーム1を、凹部3aの底面に板部材1aが位置するとともに平坦部1dが凹部3aの底面の両端部に位置するようにして載置し、リードフレーム1のリード1bおよび吊りリード1fが凹部3aの内側から凹部3aを貫通して外側に導出されるようにして設置することにより、パッケージ3が構成される。   The insulating base 2 is made of resin, and has a recess for accommodating the optical semiconductor element 4 on the upper surface. The lead frame 1 is placed on the insulating base 2 such that the plate member 1a is positioned on the bottom surface of the recess 3a and the flat portions 1d are positioned on both ends of the bottom surface of the recess 3a. The package 3 is configured by installing the suspension lead 1f so as to penetrate the recess 3a from the inside of the recess 3a and be led out to the outside.

絶縁基体2は、エポキシ樹脂,ガラスエポキシ樹脂,ポリイミド等の樹脂材料によって形成される。絶縁基体1は、例えば、エポキシ樹脂からなる場合、未硬化のエポキシ樹脂を所定の絶縁基体1の形状に成形できる金型を用いて、トランスファーモールド法やインジェクションモールド法等により成形することにより形成される。この場合、平板状の基板部と四角枠状の枠部とを別々に成形し、その後、基板部の上面の外周部に枠部を接合することにより凹部を形成するようにしてもよく、基板部に凹部が一体に形成されるような金型を用いて一体的に成形してもよい。   The insulating substrate 2 is formed of a resin material such as an epoxy resin, a glass epoxy resin, or polyimide. For example, when the insulating substrate 1 is made of an epoxy resin, the insulating substrate 1 is formed by molding by a transfer molding method, an injection molding method, or the like using a mold that can mold an uncured epoxy resin into the shape of the predetermined insulating substrate 1. The In this case, the flat substrate portion and the square frame portion may be separately formed, and then the recess may be formed by joining the frame portion to the outer peripheral portion of the upper surface of the substrate portion. You may shape | mold integrally using the metal mold | die in which a recessed part is integrally formed in a part.

なお、リード1bおよび吊りリード1fが凹部3aの内側から凹部3aを貫通した構造とするには、例えば、絶縁基体1の凹部3aとなる部位に板状部1aを位置させるとともに、凹部3aを取り囲む枠状の部位の内側から外側に貫通するようにしてリード1bおよび吊りリード1fを位置させて、リードフレーム1を絶縁基体2を形成する金型内にセットしておき、その後、金型内に絶縁基体1となる未硬化の樹脂を充填し成型する方法等の方法を用いることができる。   In order to make the lead 1b and the suspension lead 1f penetrate the concave portion 3a from the inside of the concave portion 3a, for example, the plate-like portion 1a is positioned at a portion to be the concave portion 3a of the insulating base 1, and the concave portion 3a is surrounded. The lead 1b and the suspension lead 1f are positioned so as to penetrate from the inside to the outside of the frame-shaped part, and the lead frame 1 is set in a mold for forming the insulating base 2, and then in the mold A method such as a method of filling and molding an uncured resin to be the insulating substrate 1 can be used.

この場合、リード1bは、凹部3aを貫通する必要があり、また外側の端部分が外部電気回路基板の電気回路等に接続されるため、板部材1aの側面から間隔をあけて外側に延びるようにして取着されている。この構成により、多数のリード1bを、隣接するリード1b間の電気絶縁性を確保して形成することができるとともに、リード1bの外側の端部分を外部電気回路基板等に接続する際の位置合わせが容易になる。また、例えば、上記基板部分と枠部分との間に貫通するようにしてリード1bを位置決めして接合することによりリード1bが凹部3aを貫通するようにする際、リード1bの位置決めを容易に行なうことができる。また、基板部分と枠部分との接合面積が広い部分でリード1bが貫通するため、絶縁基体2の強度がリード1bの介在により劣化することを効果的に防止することもできる。   In this case, the lead 1b needs to pass through the recess 3a, and since the outer end portion is connected to an electric circuit or the like of the external electric circuit board, the lead 1b extends outward from the side surface of the plate member 1a. Has been attached. With this configuration, a large number of leads 1b can be formed while ensuring electrical insulation between adjacent leads 1b, and alignment when connecting the outer end portion of the lead 1b to an external electric circuit board or the like. Becomes easier. Further, for example, when the lead 1b penetrates the recess 3a by positioning and joining the lead 1b so as to penetrate between the substrate portion and the frame portion, the lead 1b is easily positioned. be able to. In addition, since the lead 1b penetrates at a portion where the bonding area between the substrate portion and the frame portion is large, it is possible to effectively prevent the strength of the insulating base 2 from deteriorating due to the presence of the lead 1b.

リードフレーム1のリード1bは、凹部3a内に収納される光半導体素子4の電極にボンディングワイヤ5等を介して電気的に接続され、光半導体素子4を外部電気回路に接続する機能をなす。なお、リード1bの形状は、形成が容易であることから断面が四角形の棒状(長板状、直方体状)である。   The lead 1b of the lead frame 1 is electrically connected to the electrode of the optical semiconductor element 4 accommodated in the recess 3a via a bonding wire 5 or the like, and functions to connect the optical semiconductor element 4 to an external electric circuit. The shape of the lead 1b is a rod shape (long plate shape, rectangular parallelepiped shape) having a square cross section because it is easy to form.

リードフレーム1のフレーム1cは、複数のリード1bの外側の端を一括的に結合することにより、リード1bを外部電気回路に接続するまでの間、リード1bが取り扱い等にともなって誤って曲がるようなことを防止する等の機能をなし、パッケージ3(光半導体装置)の取り扱いを容易なものとしている。   The frame 1c of the lead frame 1 is connected to the outer ends of the plurality of leads 1b in a lump so that the lead 1b bends in error during handling until the lead 1b is connected to an external electric circuit. In other words, the package 3 (optical semiconductor device) can be easily handled.

このパッケージ3において、リードフレーム1の板部材1aは、ラインセンサー等の細長い長方形状の光半導体素子4を載置するためのスペースを確保するのに適した長板状であり、その上面に光半導体素子4が位置し、必要に応じて樹脂等を介して光半導体素子4に接着される。   In this package 3, the plate member 1 a of the lead frame 1 is a long plate shape suitable for securing a space for placing an elongated rectangular optical semiconductor element 4 such as a line sensor. The semiconductor element 4 is located and bonded to the optical semiconductor element 4 through resin or the like as necessary.

板状部1aの両端面からそれぞれ外側に延びるようにして吊りリード1fが形成されている。吊りリード1fは板状部1aと反対側の外側の端部分がフレーム1cに結合され、これにより吊りリード1fを介して板状部1aがフレーム1cに結合される。このように吊りリード1fを介して板状部1aをフレーム1cに結合するとともにリード1bをフレーム1cに結合してリードフレーム1を形成することにより、板状部1aやリード1b,吊りリード1f等を絶縁基体1を形成するための金型内にセットする際等の取り扱いが容易なものとなり、パッケージ3の生産性を優れたものとすることができる。   Hanging leads 1f are formed so as to extend outward from both end faces of the plate-like portion 1a. The suspension lead 1f is coupled to the frame 1c at the outer end opposite to the plate-shaped portion 1a, whereby the plate-shaped portion 1a is coupled to the frame 1c via the suspension lead 1f. In this way, the plate-like portion 1a, the lead 1b, the suspension lead 1f, etc. are formed by joining the plate-like portion 1a to the frame 1c via the suspension lead 1f and forming the lead frame 1 by joining the lead 1b to the frame 1c. Can be handled easily when set in a mold for forming the insulating substrate 1, and the productivity of the package 3 can be improved.

また、本発明のパッケージ3において、板部材1aは両端部に幅広の平坦部1dが設けられている。この平坦部1dの上面に光半導体素子4が載置される。平坦部1dは、光半導体素子4を傾かせることなく安定して載置するために幅広とされている。この場合、平坦部1dの幅は、板部材1aの幅の1.5〜3倍が好ましい。3倍以上では、パッケージ3の小型化の妨げになる傾向があり、1.5倍未満では、光半導体素子4を安定して載置することが難しくなる傾向がある。   In the package 3 of the present invention, the plate member 1a is provided with wide flat portions 1d at both ends. The optical semiconductor element 4 is placed on the upper surface of the flat portion 1d. The flat portion 1d is wide in order to stably place the optical semiconductor element 4 without tilting. In this case, the width of the flat portion 1d is preferably 1.5 to 3 times the width of the plate member 1a. If it is 3 times or more, the package 3 tends to be reduced in size, and if it is less than 1.5 times, it is difficult to stably place the optical semiconductor element 4.

また、平坦部1dは、絶縁基体1の凹部3aの底面の両端部に位置するようにして載置される。これは、絶縁基体1が中央部から凹状に沿って変形したときに、その変形の影響を受けずに光半導体素子4の受光面を透光性蓋体に対して水平にし、外部から入射してくる光を光半導体素子4の上面(受光面)の受光部で正確に受光させるためである。   The flat portion 1d is placed so as to be positioned at both ends of the bottom surface of the recess 3a of the insulating base 1. This is because when the insulating substrate 1 is deformed along the concave shape from the central portion, the light receiving surface of the optical semiconductor element 4 is made horizontal with respect to the translucent lid without being affected by the deformation, and is incident from the outside. This is because the incoming light is accurately received by the light receiving portion on the upper surface (light receiving surface) of the optical semiconductor element 4.

そして、光半導体素子4の両端部を、凹部3aの底面の両端部に位置する平坦部1dに載置するとともに、光半導体素子4の電極をボンディングワイヤ5等を介して電気的に接続し、透光性蓋体(図示せず)で凹部3aを封止することにより、光半導体装置が構成される。   Then, both ends of the optical semiconductor element 4 are placed on the flat portions 1d located at both ends of the bottom surface of the recess 3a, and the electrodes of the optical semiconductor element 4 are electrically connected via bonding wires 5 or the like, The optical semiconductor device is configured by sealing the recess 3a with a translucent lid (not shown).

また本発明の板部材1aは、平坦部1dを除く部位に複数の貫通孔1eが形成されている。この構成により、熱により絶縁基体1に歪が生じたとしても、その歪を貫通孔1eの周囲で板部材1aが伸縮することにより効果的に吸収することができ、板部材1aの変形を効果的に防止し、光半導体素子4および光半導体装置の受光精度および長期信頼性を優れたものとすることができる。   In the plate member 1a of the present invention, a plurality of through holes 1e are formed at portions other than the flat portion 1d. With this configuration, even if the insulating base 1 is distorted by heat, the distortion can be effectively absorbed by the expansion and contraction of the plate member 1a around the through hole 1e, and the deformation of the plate member 1a is effective. Therefore, the light receiving accuracy and long-term reliability of the optical semiconductor element 4 and the optical semiconductor device can be made excellent.

この場合、貫通孔1eは板部材1aの長手方向に並ぶように配列形成されていることが好ましい。これにより、長板状の板部材1aの歪が大きくなりやすい長手方向に沿って、効果的にその歪を吸収し防止するための貫通孔1eが並んで配列されることになり、より一層効果的に板部材1aの変形を防止することができ、光半導体素子4および光半導体装置の受光精度、長期信頼性をより優れたものとすることができる。   In this case, it is preferable that the through holes 1e are arranged so as to be aligned in the longitudinal direction of the plate member 1a. Thereby, the through-holes 1e for effectively absorbing and preventing the distortion are arranged side by side along the longitudinal direction in which the distortion of the long plate-like plate member 1a is likely to increase, and the effect is further improved. In particular, the deformation of the plate member 1a can be prevented, and the light receiving accuracy and long-term reliability of the optical semiconductor element 4 and the optical semiconductor device can be further improved.

この貫通孔1eは、板部材1aの幅の30〜70%の直径であることが好ましい。貫通孔1eの直径が板部材1aの幅の30%未満では、熱による樹脂製の絶縁基体2の伸縮により、板部材(アイランド部)1aが歪むおそれがあり、70%を超えると、板部材1aの機械的強度が劣化してたわんだり変形しやすくなり、光半導体素子4を載置することが難しくなる傾向がある。   The through hole 1e preferably has a diameter of 30 to 70% of the width of the plate member 1a. If the diameter of the through-hole 1e is less than 30% of the width of the plate member 1a, the plate member (island part) 1a may be distorted due to expansion and contraction of the resin insulating base 2 due to heat. There is a tendency that the mechanical strength of 1a deteriorates and is easily bent and deformed, and it becomes difficult to place the optical semiconductor element 4.

また、貫通孔1eは、その隣接間隔を0.2〜0.7mmの範囲とすることが好ましい。隣接間隔が0.2mm未満では、板部材1aの機械的強度が劣化してたわんだり変形しやすくなる傾向があり、0.7mmを超えると、熱による樹脂製の絶縁基体2の伸縮により板部材1aが歪む傾向がある。   Moreover, it is preferable that the through-hole 1e sets the adjacent space | interval to the range of 0.2-0.7 mm. If the adjacent interval is less than 0.2 mm, the mechanical strength of the plate member 1a tends to deteriorate and tends to bend or deform, and if it exceeds 0.7 mm, the plate member is stretched due to expansion and contraction of the insulating base 2 made of resin. 1a tends to be distorted.

なお、本発明は上述の発明の実施の形態に限定されるものではなく、本発明の要旨を逸脱しない範囲内であれば種々の変更は可能である。   The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the present invention.

(a)は本発明の光半導体素子収納用パッケージの実施の形態の例を示す平面図、(b)は(a)の光半導体素子収納用パッケージの断面図である。(A) is a top view which shows the example of embodiment of the optical semiconductor element accommodation package of this invention, (b) is sectional drawing of the optical semiconductor element accommodation package of (a).

符号の説明Explanation of symbols

1・・・リードフレーム
2・・・絶縁基体
3・・・光半導体素子収納用パッケージ
4・・・光半導体素子
DESCRIPTION OF SYMBOLS 1 ... Lead frame 2 ... Insulating base | substrate 3 ... Package for optical semiconductor element accommodation 4 ... Optical semiconductor element

Claims (3)

両端部に光半導体素子が載置される幅広の平坦部が設けられるとともに該平坦部以外の部位に複数の貫通孔が形成された長板状の板部材、該板部材の両端面からそれぞれ外側に延びた吊りリード、前記板部材の側面から間隔をあけて外側に延びた複数のリード、および前記吊りリードの外側の端と前記複数のリードの外側の端とを一括的に結合したフレームから成るリードフレームと、上面に前記光半導体素子を収容するための凹部が形成され、前記板部材が前記凹部の底面に前記平坦部が前記凹部の底面の両端部に位置するように載置されるとともに前記吊りリードおよび前記リードが前記凹部の内側から前記凹部を貫通して外側に導出されるように設置された絶縁基体とを具備していることを特徴とする光半導体素子収納用パッケージ。 A long plate-like plate member in which a wide flat portion on which the optical semiconductor element is placed is provided at both ends and a plurality of through holes are formed in portions other than the flat portion, respectively, from the both end surfaces of the plate member. A suspension lead extending from the side of the plate member, and a plurality of leads extending outward from the side surface of the plate member, and a frame in which the outer ends of the suspension leads and the outer ends of the plurality of leads are joined together. And a recess for accommodating the optical semiconductor element is formed on the top surface, and the plate member is placed on the bottom surface of the recess so that the flat portions are positioned at both ends of the bottom surface of the recess. And a package for housing an optical semiconductor element, wherein the suspension lead and an insulating base installed so that the lead penetrates the recess from the inside of the recess and is led out to the outside. 前記複数の貫通孔は、前記板部材の長手方向に並ぶように配列形成されていることを特徴とする請求項1記載の光半導体素子収納用パッケージ。 2. The optical semiconductor element housing package according to claim 1, wherein the plurality of through holes are arranged so as to be aligned in the longitudinal direction of the plate member. 請求項1または請求項2記載の光半導体素子収納用パッケージと、前記平坦部に長手方向の両端部が載置されるとともに電極が前記リードに電気的に接続された長板状の光半導体素子と、前記絶縁基体の上面に前記凹部を塞ぐように取着された透光性蓋体とを具備していることを特徴とする光半導体装置。 The optical semiconductor element housing package according to claim 1 or 2, and a long-plate-shaped optical semiconductor element in which both ends in the longitudinal direction are placed on the flat portion and electrodes are electrically connected to the leads. And a translucent lid attached to the upper surface of the insulating base so as to close the concave portion.
JP2003334397A 2003-09-25 2003-09-25 Optical semiconductor element storage package and optical semiconductor device Expired - Fee Related JP4172782B2 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007069602A (en) * 2005-08-08 2007-03-22 Sumitomo Chemical Co Ltd Case for housing solid-state image pickup device, its manufacturing method and solid-state image pickup device
JP2009054678A (en) * 2007-08-24 2009-03-12 Mitsui Chemicals Inc Hollow package, and semiconductor device
JP2014072829A (en) * 2012-10-01 2014-04-21 Nikon Corp Container for hollow package and manufacturing method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007069602A (en) * 2005-08-08 2007-03-22 Sumitomo Chemical Co Ltd Case for housing solid-state image pickup device, its manufacturing method and solid-state image pickup device
JP2009054678A (en) * 2007-08-24 2009-03-12 Mitsui Chemicals Inc Hollow package, and semiconductor device
JP2014072829A (en) * 2012-10-01 2014-04-21 Nikon Corp Container for hollow package and manufacturing method thereof

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