JP2005091660A - Anamorphic optical system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an anamorphic optical system which has a high anamorphic ratio while keeping a high optical performance with the small number of lenses. <P>SOLUTION: An anamorphic optical system AP having different powers in directions perpendicular to each other has rotationally symmetrical lenses t1,... rotationally symmetrical about an optical axis AX and anamorphic lenses a1,... including surfaces having different curvatures in directions perpendicular to each other. When the direction in which the absolute value of the power is larger is denoted as a major axis direction and the direction in which the absolute value of the power is smaller is denoted as a minor axis direction, the anamorphic optical system satisfies 1.90<¾fXall/fym¾<20.00, wherein fXall is the focal length of the anamorphic optical system in the major axis direction and fsym is the focal length of a lens group consisting of only rotationally symmetrical lenses. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an anamorphic optical system, and more particularly to an inexpensive anamorphic optical system having high performance and a high anamorphic ratio, and an illumination optical system and an illumination apparatus having the anamorphic optical system.

Anamorphic optical systems are used in various fields, for example, for observing images with different vertical and horizontal magnifications, and for efficient illumination of rectangular object surfaces and optical element surfaces (for example, display element surfaces). ing. For this reason, there are various types of anamorphic optical systems that have been conventionally proposed (see, for example, Patent Documents 1 and 2), and anamorphic optical systems that include rotationally symmetric optical systems have also been proposed (for example, (See Patent Document 3).
JP-A-3-39922 JP-A-3-210515 Japanese Patent Laid-Open No. 11-6906

  Here, consider a case where a rectangular object surface is illuminated by an anamorphic optical system. The cross-sectional shape of the light beam when the light from the light source is collected by the ellipsoidal mirror is circular or elliptical. For this reason, if the light beam is cut out into a rectangular shape as it is, the rectangular object surface cannot be efficiently illuminated. In particular, the tendency becomes stronger if the aspect ratio of the rectangular shape is large. If the anamorphic optical system to be used has a reduction magnification (or an enlargement magnification lower than the same magnification) in the short side direction of the rectangular shape and a large enlargement magnification in the long side direction of the rectangular shape, the light from the circular light beam Utilization efficiency can be increased.

  However, in the conventional anamorphic optical systems proposed in Patent Documents 1 to 3, since the ratio of the aspect ratio (that is, the anamorphic ratio) is not so large, an object surface or an optical element having a very large aspect ratio. It cannot cope with surface illumination. Furthermore, when observing a distorted image with a large vertical / horizontal ratio as an original image without distortion, or conversely when observing with a large distortion of the vertical / horizontal ratio, the conventional anamorphic optics The system cannot handle it. Also, simply trying to increase the anamorphic ratio results in a significant decrease in performance with the same number of lenses, and conversely, when trying to realize a high-performance anamorphic optical system with a large anamorphic ratio, the number of lenses is extremely large. turn into. If the number of lenses increases, the anamorphic optical system becomes very expensive, and the overall length becomes larger, making it difficult to make the system compact.

  The present invention has been made in view of such circumstances, and an object thereof is to provide an anamorphic optical system having a large anamorphic ratio while maintaining high optical performance with a small number of lenses.

  In order to achieve the above object, an anamorphic optical system according to a first invention includes a rotationally symmetric lens rotationally symmetric with respect to an optical axis and an anamorphic lens including surfaces having different curvatures in directions perpendicular to each other. An anamorphic optical system having the above and different magnifications in directions perpendicular to each other, where the direction of large absolute value of the magnification is the major axis direction and the direction of small absolute value of the magnification is the minor axis direction, the following conditional expression It is characterized by satisfying (1).

1.90 <| fXall / fsym | <20.00… (1)
However,
fXall: Focal length in the long axis direction of the anamorphic optical system,
fsym: focal length of a lens group consisting only of all rotationally symmetric lenses,
It is.

  The anamorphic optical system of the second invention is characterized in that, in the first invention, the following conditional expression (2) is satisfied.

6.4 <| βlong / βshort | <30.0 (2)
However,
βlong: magnification in the long axis direction of the anamorphic optical system,
βshort: magnification in the minor axis direction of the anamorphic optical system,
It is.

  An anamorphic optical system according to a third aspect of the present invention has at least one rotationally symmetric lens that is rotationally symmetric with respect to the optical axis and one or more anamorphic lenses that include surfaces having different curvatures in directions perpendicular to each other, and directions perpendicular to each other. When the anamorphic optical system has different magnifications, the major axis direction is the direction where the absolute value of the magnification is larger, and the minor axis direction is the direction where the absolute value of the magnification is smaller.The following conditional expression (2) is satisfied: Features.

6.4 <| βlong / βshort | <30.0 (2)
However,
βlong: magnification in the long axis direction of the anamorphic optical system,
βshort: magnification in the minor axis direction of the anamorphic optical system,
It is.

  An anamorphic optical system according to a fourth invention is characterized in that, in the third invention, the following conditional expression (1) is satisfied.

1.90 <| fXall / fsym | <20.00… (1)
However,
fXall: Focal length in the long axis direction of the anamorphic optical system,
fsym: focal length of a lens group consisting only of all rotationally symmetric lenses,
It is.

  An illumination optical system according to a fifth aspect of the present invention is an illumination optical system that guides light from a light source to an irradiated surface, the ellipsoidal mirror disposed so that the light source is located in the vicinity of the first focal point, and the elliptical surface thereof. An optical integrator having an incident end face in the vicinity of the second focal point of the mirror, and an imaging optical system for forming an image of the exit end face of the optical integrator on the irradiated surface. It comprises an anamorphic optical system according to any one of the fourth inventions.

  An illumination device according to a sixth aspect of the present invention includes an ellipsoidal mirror, a light source disposed near the first focal point of the ellipsoidal mirror, an optical integrator having an incident end surface near the second focal point of the ellipsoidal mirror, and an optical device thereof. An imaging optical system that forms an image of the exit end face of the integrator on the irradiated surface, and the imaging optical system comprises the anamorphic optical system according to any one of the first to fourth inventions. Features.

  According to the present invention, since it has a characteristic optical configuration having both a rotationally symmetric lens and an anamorphic lens, it realizes an inexpensive anamorphic optical system having a large anamorphic ratio while maintaining high optical performance with a small number of lenses. can do. If an illuminating optical system or an illuminating device is configured using the anamorphic optical system according to the present invention, it is possible to contribute to such lightness, compactness, low cost, high performance, and improvement of light utilization efficiency. .

  Hereinafter, an anamorphic optical system and the like embodying the present invention will be described with reference to the drawings. 1 to 4 show the lens configurations of the first to fourth embodiments of the anamorphic optical system in optical sections, respectively. 1 to 4, (A) shows the lens configuration in the major axis direction (that is, the direction in which the absolute value of the magnification is large), and (B) shows the lens configuration in the minor axis direction (that is, the direction in which the absolute value of the magnification is small). In the figure, AP is an anamorphic optical system having different magnifications in directions perpendicular to each other (that is, the major axis direction and the minor axis direction), and ti (i = 1, 2, 3,...) Rotates with respect to the optical axis AX. Symmetric i-th rotationally symmetric lens, aj (j = 1, 2, 3,...) Is a jth anamorphic lens including surfaces having different curvatures in directions perpendicular to each other, ST is a stop, SX is a long-axis direction stop, SY indicates a short-axis direction stop, respectively.

  The anamorphic optical system AP of the first embodiment (FIG. 1) includes, in order from the reduction side in the long axis direction, first to fourth rotationally symmetric lenses t1 to t4, first and second anamorphic lenses a1 and a2. And a long axis direction diaphragm SX, third to fifth anamorphic lenses a3 to a5, a short axis direction diaphragm SY, and sixth to tenth anamorphic lenses a6 to a10. The first rotationally symmetric lens t1 is a planoconvex lens having positive power, the second rotationally symmetric lens t2 is a planoconcave lens having negative power, and the third and fourth rotationally symmetric lenses t3 and t4 are planoconvex lenses having positive power. It is. The first anamorphic lens a1 is a cylindrical lens having negative power in the major axis direction, and the second to fourth anamorphic lenses a2 to a4 are cylindrical lenses having positive power in the major axis direction, and the fifth and sixth anamorphic lenses. a5 and a6 are cylindrical lenses having positive power in the minor axis direction, the seventh anamorphic lens a7 is a cylindrical lens having negative power in the minor axis direction, and the eighth to tenth anamorphic lenses a8 to a10 are in the minor axis direction. Is a cylindrical lens having positive power.

  The anamorphic optical system AP of the second embodiment (FIG. 2) includes, in order from the reduction side in the long axis direction, first to sixth rotationally symmetric lenses t1 to t6, a diaphragm ST, a first anamorphic lens a1, The lens includes a seventh rotationally symmetric lens t7 and second to eighth anamorphic lenses a2 to a8. The first rotationally symmetric lens t1 is a meniscus lens having negative power, the second rotationally symmetric lens t2 is a biconcave lens having negative power, and the third to sixth rotationally symmetric lenses t3 to t6 are planoconvex lenses having positive power. The seventh rotationally symmetric lens t7 is a meniscus lens having negative power. The first anamorphic lens a1 is a cylindrical lens having negative power in the minor axis direction, the second and third anamorphic lenses a2 and a3 are cylindrical lenses having positive power in the major axis direction, and the fourth to sixth anamorphic lenses. a4 to a6 are cylindrical lenses having positive power in the minor axis direction, the seventh anamorphic lens a7 is a cylindrical lens having positive power in the major axis direction, and the eighth anamorphic lens a8 has positive power in the minor axis direction. It is a cylindrical lens.

  The anamorphic optical system AP of the third embodiment (FIG. 3) includes, in order from the reduction side in the long axis direction, first to third rotationally symmetric lenses t1 to t3, a long axis direction stop SX, and fourth and fourth. It consists of five rotationally symmetric lenses t4 and t5, first to third anamorphic lenses a1 to a3, a short-axis direction stop SY, and fourth and fifth anamorphic lenses a4 and a5. The first rotationally symmetric lens t1 is a meniscus lens having positive power, the second rotationally symmetric lens t2 is a biconvex lens having positive power, the third rotationally symmetric lens t3 is a planoconvex lens having positive power, and the fourth The fifth rotationally symmetric lenses t4 and t5 are biconcave lenses having negative power. The first and second anamorphic lenses a1 and a2 are cylindrical lenses having positive power in the major axis direction, and the third and fourth anamorphic lenses a3 and a4 are cylindrical lenses having positive power in the minor axis direction. The anamorphic lens a5 is a cylindrical lens having positive power in the long axis direction.

  The anamorphic optical system AP of the fourth embodiment (FIG. 4) includes, in order from the reduction side in the long axis direction, first to third rotationally symmetric lenses t1 to t3, a long axis direction stop SX, and fourth and fourth. It consists of five rotationally symmetric lenses t4 and t5, first to third anamorphic lenses a1 to a3, a short-axis direction stop SY, and fourth and fifth anamorphic lenses a4 and a5. The first rotationally symmetric lens t1 is a meniscus lens having positive power, the second rotationally symmetric lens t2 is a biconvex lens having positive power, the third rotationally symmetric lens t3 is a planoconvex lens having positive power, and the fourth The fifth rotationally symmetric lenses t4 and t5 are biconcave lenses having negative power. The first and second anamorphic lenses a1 and a2 are cylindrical lenses having positive power in the major axis direction, and the third and fourth anamorphic lenses a3 and a4 are cylindrical lenses having positive power in the minor axis direction. The anamorphic lens a5 is a cylindrical lens having positive power in the long axis direction.

  To construct an anamorphic optical system having a large anamorphic ratio (= | magnification in the major axis direction / magnification in the minor axis direction |) as a whole and a small number of lenses, a rotationally symmetric lens that is rotationally symmetric with respect to the optical axis is used. It is preferable to have a configuration in which at least one anamorphic lens including surfaces having different curvatures in directions perpendicular to each other is included. In that case, for example, as in the first embodiment, rotationally symmetric lens groups t1 to t4 composed of one or more rotationally symmetric lenses and anamorphic lens groups a1 to a10 composed of one or more anamorphic lenses are independent. As in the second embodiment, the rotationally symmetric lens groups t1 to t7 composed of one or more rotationally symmetric lenses and the anamorphic lens group a1 composed of one or more anamorphic lenses, as in the second embodiment. -A8 may be mixed.

  When configuring an anamorphic optical system, if all lenses are composed of only cylindrical lenses having power in either the major axis direction or the minor axis direction, it is equivalent to having two optical systems with different magnifications. The number of lenses will double. In addition, if a toroidal lens having power in both the long axis direction and the short axis direction is used, the number of lenses can be reduced. However, since individual toroidal lenses are difficult to manufacture and are expensive, it eventually becomes an expensive optical system. End up. Furthermore, it is necessary to make the lens intervals of the anamorphic optical systems having different magnifications equal, which is disadvantageous for image plane correction and distortion correction.

  Therefore, in order not to increase the cost even if the number of lenses of the anamorphic optical system is reduced, it is preferable to have a configuration having both a rotationally symmetric lens and an anamorphic lens. For example, as in each embodiment, it is preferable to have at least one rotationally symmetric lens ti that is rotationally symmetric with respect to the optical axis AX and one or more anamorphic lenses aj that include surfaces having different curvatures in directions perpendicular to each other. In this way, the number of lenses can be reduced more effectively than when only an anamorphic lens is used. In addition, the aberration correction can be easily performed because there is a degree of freedom in the configuration of the anamorphic lens portion even with respect to the occurrence of aberration due to the magnification in the minor axis direction and the major axis direction. The anamorphic lens is not limited to a cylindrical lens. A configuration including a toroidal lens as the anamorphic lens may be used, and even in this case, the same effect can be obtained.

  In an anamorphic optical system having both a rotationally symmetric lens and an anamorphic lens, a rotationally symmetric lens group (that is, a lens group that includes only all rotationally symmetric lenses) and an anamorphic lens group (that is, a lens group that includes only all anamorphic lenses). It is important to distribute power appropriately. By appropriately allocating the power of the rotationally symmetric lens group occupying the entire system and the power of the anamorphic lens group occupying the entire system, it is possible to realize a more compact and efficient anamorphic optical system with a small number of lenses. . In addition, by causing the rotationally symmetric lens group to share power common to both, it is possible to arrange power more efficiently than to bear power in each direction only in the long axis direction or only in the short axis direction.

  From the viewpoint of aberration correction, the aberration correction common to the major axis direction and the minor axis direction is performed by the rotationally symmetric lens group, and the remaining aberration and the aberration caused by the difference in magnification are analyzed by the anamorphic lens group. It is more efficient and preferable to perform the correction. If most of the aberrations common to both are performed by the rotationally symmetric lens group, it is not necessary to correct aberrations in the major axis direction and the minor axis direction by the anamorphic lens group. Therefore, the number of lenses can be reduced, and further the performance of the anamorphic optical system can be improved.

  Regarding the power distribution, it is desirable that the following conditional expression (1) is satisfied.

1.90 <| fXall / fsym | <20.00… (1)
However,
fXall: Focal length in the long axis direction of the anamorphic optical system,
fsym: focal length of a lens group consisting only of all rotationally symmetric lenses,
It is.

  Conditional expression (1) defines a preferable range of the ratio of the power (= 1 / fsym) of the rotationally symmetric lens group to the total system power (= 1 / fXall) in the major axis direction. If the power of the rotationally symmetric lens group becomes weaker than the lower limit of conditional expression (1), the number of rotationally symmetric lenses in the entire anamorphic optical system can be reduced, but there is a common power distribution in the major axis direction and minor axis direction. Therefore, the number of anamorphic lenses increases, and the anamorphic optical system becomes expensive. In addition, since aberration correction common to both directions becomes insufficient, the number of anamorphic lenses also increases, and the anamorphic optical system becomes expensive or difficult to downsize. Conversely, if the power of the rotationally symmetric lens group increases beyond the upper limit of conditional expression (1), aberration correction common to both directions becomes excessive, or new aberration occurs, and anamorphic lenses are used for the correction. This increases the number of the anamorphic optical systems, or makes it difficult to achieve high performance.

  It is more desirable to satisfy the following conditional expression (1a). Conditional expression (1a) defines a more preferable condition range based on the above viewpoints, etc., among the condition ranges defined by conditional expression (1).

    2.00 <| fXall / fsym | <10.00… (1a)

  Regarding the anamorphic ratio, it is desirable to satisfy the following conditional expression (2). In order to obtain a large anamorphic ratio while balancing the reduction in the number of lenses and the improvement in optical performance, it is more desirable to satisfy conditional expression (2) together with conditional expression (1).

6.4 <| βlong / βshort | <30.0 (2)
However,
βlong: magnification in the long axis direction of the anamorphic optical system,
βshort: magnification in the minor axis direction of the anamorphic optical system,
It is.

  Conditional expression (2) defines a preferable range of the anamorphic ratio in order to achieve both a reduction in the number of lenses, an improvement in optical performance, and an increase in the anamorphic ratio. When the anamorphic ratio is reduced beyond the lower limit of conditional expression (2), the merit of the anamorphic optical system is reduced. For example, it becomes impossible to deal with illumination of an object surface or an optical element surface (for example, a display element surface) having a very large aspect ratio. In addition, when observing an image with a large ratio of vertical and horizontal size as a distortion-free image, it is not possible to cope with a case where the image is observed with a large distortion of the vertical and horizontal size. . If the anamorphic ratio increases beyond the upper limit of conditional expression (2), it becomes difficult to correct aberrations, and the anamorphic optical system becomes large due to the correction. In addition, the number of lenses increases dramatically, and the anamorphic optical system becomes expensive.

  It is more desirable to satisfy the following conditional expression (2a). Conditional expression (2a) defines a more preferable condition range based on the above viewpoints, etc., among the condition ranges defined by conditional expression (2).

    10.0 <| βlong / βshort | <20.0… (2a)

  FIG. 9 shows a schematic optical configuration of the illumination optical system provided with the first embodiment (FIG. 1) as the anamorphic optical system AP in the minor axis direction. This illumination optical system is an illumination optical system that guides light from the light source 1 to the irradiated surface IM, and an ellipsoidal mirror 2 disposed so that the light source 1 is positioned in the vicinity of the first focal point F1, and its ellipsoidal surface. An optical integrator 3 having an incident end face 3a in the vicinity of the second focal point F2 of the mirror 2, and an anamorphic optical system AP for forming an image of the exit end face 3b of the optical integrator 3 on the irradiated surface IM; The main part of the lighting device is configured in a state including the light source 1.

  The ellipsoidal mirror 2 functioning as a condensing optical system has a rotating ellipsoidal reflecting surface having two focal points F1 and F2, and the light source 1 located at the first focal point F1 on the side close to the ellipsoidal mirror 2. The secondary light source is formed at the position of the second focal point F2. As the light source 1, various types such as a halogen lamp, a mercury lamp, and a laser light source can be used, and the light source 1 is not limited to a specific light source. A rotary parabolic mirror, a spherical mirror, or the like may be used instead of the ellipsoidal mirror 2, but in that case, in order to collect the light from the light source, a condensing optical system is combined with a condensing lens or the like. Must be configured.

  Since the incident end face 3a of the optical integrator 3 is positioned near the second focal point F2 of the elliptical mirror 2, the light emitted from the elliptical mirror 2 forms an image near the incident end face 3a of the optical integrator 3. . The optical integrator 3 shown in FIG. 9 is a hollow rod type optical integrator (so-called optical integrator rod) in which four plane mirrors are bonded together, and the light incident from the incident end surface 3a is reflected on the side surface (that is, the inner wall surface). The light is mixed by being repeatedly reflected, and the spatial energy distribution of light is made uniform and emitted from the emission end face 3b. Since the emission end surface 3b and the irradiated surface IM are in a conjugate relationship with respect to the anamorphic optical system AP, the uniform light intensity distribution state at the position of the emission end surface 3b is transferred to the irradiated surface IM by the anamorphic optical system AP. . Therefore, the light flux in which the light intensity distribution on the exit end surface 3b is made uniform by the mixing effect illuminates the illuminated surface IM efficiently and uniformly. Note that the irradiated surface IM includes an object surface, an optical element surface (for example, a display element surface), and the like, but is not limited thereto, and all objects requiring illumination are targeted.

  The shape of a general optical integrator is a rectangular parallelepiped from the viewpoint of ease of processing and ensuring uniformity. Therefore, both the incident end face shape and the exit end face shape of the optical integrator are often rectangular. However, in the case of the illumination optical system shown in FIG. 9, in consideration of the fact that the cross-sectional shape of the light beam in the vicinity of the second focal point F2 is almost circular, the incident end face 3a of the optical integrator 3 is made to improve the light utilization efficiency. The square is larger than the beam cross section. The shape of the exit end face 3b is also a square like the entrance end face 3a from the viewpoint of ease of processing, ensuring uniformity, etc., but is not limited to this. This is because, in this illumination optical system, it is not necessary to adapt the shape of the exit end surface 3b to the shape of the illuminated surface IM that requires illumination. In general, the shape of the illuminated surface that requires illumination is various. For example, the shape of the display element surface may be square or rectangular. The same applies to the case of illuminating a group of pixels constituting the display element surface, and the area requiring the illumination may be a square or a rectangle. In any case, the aspect ratio of the area that needs to be illuminated varies, and if the shape of the area is not similar to the shape of the exit surface of the optical integrator, the light utilization efficiency is normal for illumination using a rotationally symmetric optical system. Will be very low.

  In the illumination optical system shown in FIG. 9, the incompatibility between the shape of the area requiring illumination and the shape of the exit end face of the optical integrator is eliminated by using the anamorphic optical system AP. That is, the light utilization efficiency is improved by bringing the light beam emitted from the square emission end face 3b closer to the shape of the area that requires illumination of the illuminated surface IM by the anamorphic optical system AP. Since there is no change in the configuration in which the exit end surface 3b of the optical integrator 3 forms an image on the irradiated surface IM, the uniformity of the light intensity distribution is also maintained. Thus, if an illumination optical system and an illumination device are configured using an anamorphic optical system, it is possible to contribute to such light weight and compactness, low cost, high performance, and improvement of light utilization efficiency. This is particularly effective when the shape of the area requiring illumination is a rectangle having a large aspect ratio.

  Hereinafter, the anamorphic optical system embodying the present invention will be described more specifically with reference to construction data and the like. Examples 1 to 4 listed here are numerical examples corresponding to the first to fourth embodiments, respectively, and are lens configuration diagrams showing the first to fourth embodiments (FIGS. 1 to 4). 4) shows the lens configurations of the corresponding Examples 1 to 4, respectively.

  In the construction data of each example, the lens configuration data in the major axis direction corresponding to (A) in each lens configuration diagram and the lens configuration data in the minor axis direction corresponding to (B) in each lens configuration diagram are given. ing. In each construction data, ri (i = 1,2,3, ...) is the radius of curvature (mm) of the i-th surface counting from the object side, di (i = 1,2,3, ...) Indicates the i-th axis top surface distance (mm) counted from the object side, and Ni (i = 1,2,3, ...), νi (i = 1,2,3, ...) is The refractive index (Nd) and Abbe number (νd) for the d-line of the i-th lens counted from the object side are shown. Table 1 shows the magnification β, numerical aperture NA, object distance S1 {that is, the distance from the first surface (r1) to the object (mm)}, and the design wavelength λ (nm) together with other data. The data corresponding to the parameters defined in each conditional expression are shown for each example.

  5 to 8 are aberration diagrams corresponding to Examples 1 to 4. FIG. 5 to 8, (A) to (C) are aberration diagrams in the major axis direction, (D) to (F) are aberration diagrams in the minor axis direction, and (A) and (D) are spherical aberration diagrams. , (B) and (E) are astigmatism diagrams, and (C) and (F) are distortion diagrams {NA: numerical aperture, Y ′: maximum image height (mm)}. In the spherical aberration diagram, the solid line represents the spherical aberration amount (mm) with respect to the design wavelength λ, and the broken line SC represents the sine condition unsatisfactory amount (mm). In the astigmatism diagram, the broken line DM represents the meridional surface, and the solid line DS represents each astigmatism (mm) with respect to the d-line on the sagittal surface. In the distortion diagram, the solid line represents the distortion (%) with respect to the d-line.

<< Long axis direction data of Example 1 >>
β = -6.6, NA = 0.085, S1 = -1.5, λ = 435.84
[Curve radius] [Axis spacing] [Refractive index] [Abbe number]
r1 = ∞
d1 = 9.900 N1 = 1.52667 ν1 = 64.20 (t1)
r2 = -18.088
d2 = 0.300
r3 = ∞
d3 = 3.000 N2 = 1.52667 ν2 = 64.20 (t2)
r4 = 62.016
d4 = 2.633
r5 = ∞
d5 = 11.400 N3 = 1.52667 ν3 = 64.20 (t3)
r6 = -25.840
d6 = 0.300
r7 = ∞
d7 = 13.000 N4 = 1.52667 ν4 = 64.20 (t4)
r8 = -36.176
d8 = 11.183
r9 = ∞
d9 = 3.000 N5 = 1.52667 ν5 = 64.20 (a1)
r10 = 51.680
d10 = 2.865
r11 = ∞
d11 = 6.000 N6 = 1.52667 ν6 = 64.20 (a2)
r12 = -77.520
d12 = 7.178
r13 = ∞ (SX)
d13 = 0.500
r14 = ∞
d14 = 5.000 N7 = 1.52667 ν7 = 64.20 (a3)
r15 = -103.360
d15 = 29.363
r16 = ∞
d16 = 6.000 N8 = 1.52667 ν8 = 64.20 (a4)
r17 = -77.520
d17 = 78.749
r18 = ∞
d18 = 6.000 N9 = 1.52667 ν9 = 64.20 (a5)
r19 = ∞
d19 = 0.300
r20 = ∞ (SY)
d20 = 0.300
r21 = ∞
d21 = 6.000 N10 = 1.52667 ν10 = 64.20 (a6)
r22 = ∞
d22 = 12.172
r23 = ∞
d23 = 3.000 N11 = 1.52667 ν11 = 64.20 (a7)
r24 = ∞
d24 = 49.527
r25 = ∞
d25 = 4.000 N12 = 1.52667 ν12 = 64.20 (a8)
r26 = ∞
d26 = 14.525
r27 = ∞
d27 = 8.000 N13 = 1.52667 ν13 = 64.20 (a9)
r28 = ∞
d28 = 0.300
r29 = ∞
d29 = 8.000 N14 = 1.52667 ν14 = 64.20 (a10)
r30 = ∞

<< Short Axis Data of Example 1 >>
β = -1.3, NA = 0.43, S1 = -1.5, λ = 435.84
[Curve radius] [Axis spacing] [Refractive index] [Abbe number]
r1 = ∞
d1 = 9.900 N1 = 1.52667 ν1 = 64.20 (t1)
r2 = -18.088
d2 = 0.300
r3 = ∞
d3 = 3.000 N2 = 1.52667 ν2 = 64.20 (t2)
r4 = 62.016
d4 = 2.633
r5 = ∞
d5 = 11.400 N3 = 1.52667 ν3 = 64.20 (t3)
r6 = -25.840
d6 = 0.300
r7 = ∞
d7 = 13.000 N4 = 1.52667 ν4 = 64.20 (t4)
r8 = -36.176
d8 = 11.183
r9 = ∞
d9 = 3.000 N5 = 1.52667 ν5 = 64.20 (a1)
r10 = ∞
d10 = 2.865
r11 = ∞
d11 = 6.000 N6 = 1.52667 ν6 = 64.20 (a2)
r12 = ∞
d12 = 7.178
r13 = ∞ (SX)
d13 = 0.500
r14 = ∞
d14 = 5.000 N7 = 1.52667 ν7 = 64.20 (a3)
r15 = ∞
d15 = 29.363
r16 = ∞
d16 = 6.000 N8 = 1.52667 ν8 = 64.20 (a4)
r17 = ∞
d17 = 78.749
r18 = ∞
d18 = 6.000 N9 = 1.52667 ν9 = 64.20 (a5)
r19 = -77.520
d19 = 0.300
r20 = ∞ (SY)
d20 = 0.300
r21 = 77.520
d21 = 6.000 N10 = 1.52667 ν10 = 64.20 (a6)
r22 = ∞
d22 = 12.172
r23 = -51.680
d23 = 3.000 N11 = 1.52667 ν11 = 64.20 (a7)
r24 = ∞
d24 = 49.527
r25 = 155.040
d25 = 4.000 N12 = 1.52667 ν12 = 64.20 (a8)
r26 = ∞
d26 = 14.525
r27 = 51.680
d27 = 8.000 N13 = 1.52667 ν13 = 64.20 (a9)
r28 = ∞
d28 = 0.300
r29 = 51.680
d29 = 8.000 N14 = 1.52667 ν14 = 64.20 (a10)
r30 = ∞

<< Long-axis direction data of Example 2 >>
β = -6.6, NA = 0.03, S1 = -1.5, λ = 435.84
[Curve radius] [Axis spacing] [Refractive index] [Abbe number]
r1 = -15.631
d1 = 2.430 N1 = 1.79149 ν1 = 27.51 (t1)
r2 = -452.227
d2 = 4.010
r3 = -42.111
d3 = 2.000 N2 = 1.70011 ν2 = 32.10 (t2)
r4 = 19.316
d4 = 0.861
r5 = ∞
d5 = 6.700 N3 = 1.52667 ν3 = 64.20 (t3)
r6 = -12.980
d6 = 0.647
r7 = ∞
d7 = 5.600 N4 = 1.52667 ν4 = 64.20 (t4)
r8 = -15.570
d8 = 3.703
r9 = ∞
d9 = 3.400 N5 = 1.52667 ν5 = 64.20 (t5)
r10 = -36.330
d10 = 0.300
r11 = ∞
d11 = 3.200 N6 = 1.52667 ν6 = 64.20 (t6)
r12 = -41.520
d12 = 0.300
r13 = ∞ (ST)
d13 = 0.500
r14 = ∞
d14 = 2.300 N7 = 1.52667 ν7 = 64.20 (a1)
r15 = ∞
d15 = 17.668
r16 = 452.227
d16 = 2.430 N8 = 1.79149 ν8 = 27.51 (t7)
r17 = 15.631
d17 = 2.920
r18 = ∞
d18 = 6.000 N9 = 1.52667 ν9 = 64.20 (a2)
r19 = -77.520
d19 = 1.036
r20 = 51.680
d20 = 8.000 N10 = 1.52667 ν10 = 64.20 (a3)
r21 = ∞
d21 = 5.632
r22 = ∞
d22 = 7.000 N11 = 1.52667 ν11 = 64.20 (a4)
r23 = ∞
d23 = 0.300
r24 = ∞
d24 = 8.000 N12 = 1.52667 ν12 = 64.20 (a5)
r25 = ∞
d25 = 37.369
r26 = ∞
d26 = 8.000 N13 = 1.52667 ν13 = 64.20 (a6)
r27 = ∞
d27 = 2.680
r28 = 51.680
d28 = 8.000 N14 = 1.52667 ν14 = 64.20 (a7)
r29 = ∞
d29 = 17.837
r30 = ∞
d30 = 8.000 N15 = 1.52667 ν15 = 64.20 (a8)
r31 = ∞

<< Short Axis Data of Example 2 >>
β = -1.0, NA = 0.021, S1 = -1.5, λ = 435.84
[Curve radius] [Axis spacing] [Refractive index] [Abbe number]
r1 = -15.631
d1 = 2.430 N1 = 1.79149 ν1 = 27.51 (t1)
r2 = -452.227
d2 = 4.010
r3 = -42.111
d3 = 2.000 N2 = 1.70011 ν2 = 32.10 (t2)
r4 = 19.316
d4 = 0.861
r5 = ∞
d5 = 6.700 N3 = 1.52667 ν3 = 64.20 (t3)
r6 = -12.980
d6 = 0.647
r7 = ∞
d7 = 5.600 N4 = 1.52667 ν4 = 64.20 (t4)
r8 = -15.570
d8 = 3.703
r9 = ∞
d9 = 3.400 N5 = 1.52667 ν5 = 64.20 (t5)
r10 = -36.330
d10 = 0.300
r11 = ∞
d11 = 3.200 N6 = 1.52667 ν6 = 64.20 (t6)
r12 = -41.520
d12 = 0.300
r13 = ∞ (ST)
d13 = 0.500
r14 = ∞
d14 = 2.300 N7 = 1.52667 ν7 = 64.20 (a1)
r15 = 12.980
d15 = 17.668
r16 = 452.227
d16 = 2.430 N8 = 1.79149 ν8 = 27.51 (t7)
r17 = 15.631
d17 = 2.920
r18 = ∞
d18 = 6.000 N9 = 1.52667 ν9 = 64.20 (a2)
r19 = ∞
d19 = 1.036
r20 = ∞
d20 = 8.000 N10 = 1.52667 ν10 = 64.20 (a3)
r21 = ∞
d21 = 5.632
r22 = ∞
d22 = 7.000 N11 = 1.52667 ν11 = 64.20 (a4)
r23 = -25.950
d23 = 0.300
r24 = ∞
d24 = 8.000 N12 = 1.52667 ν12 = 64.20 (a5)
r25 = -51.680
d25 = 37.369
r26 = 103.360
d26 = 8.000 N13 = 1.52667 ν13 = 64.20 (a6)
r27 = ∞
d27 = 2.680
r28 = ∞
d28 = 8.000 N14 = 1.52667 ν14 = 64.20 (a7)
r29 = ∞
d29 = 17.837
r30 = 51.680
d30 = 8.000 N15 = 1.52667 ν15 = 64.20 (a8)
r31 = ∞

<< Long-axis data of Example 3 >>
β = -7.3, NA = 0.025, S1 = -28.174, λ = 436
[Curve radius] [Axis spacing] [Refractive index] [Abbe number]
r1 = -34.868
d1 = 5.800 N1 = 1.76502 ν1 = 44.78 (t1)
r2 = -22.674
d2 = 0.300
r3 = 37.278
d3 = 6.470 N2 = 1.50036 ν2 = 83.58 (t2)
r4 = -50.107
d4 = 3.461
r5 = 15.570
d5 = 5.600 N3 = 1.52665 ν3 = 64.20 (t3)
r6 = ∞
d6 = 2.071
r7 = ∞ (SX)
d7 = 0.822
r8 = -42.111
d8 = 2.000 N4 = 1.70006 ν4 = 32.10 (t4)
r9 = 19.316
d9 = 13.451
r10 = -42.111
d10 = 2.000 N5 = 1.70006 ν5 = 32.10 (t5)
r11 = 19.316
d11 = 19.225
r12 = ∞
d12 = 7.000 N6 = 1.52665 ν6 = 64.20 (a1)
r13 = -25.950
d13 = 65.706
r14 = 155.040
d14 = 4.000 N7 = 1.52665 ν7 = 64.20 (a2)
r15 = ∞
d15 = 44.038
r16 = ∞
d16 = 5.000 N8 = 1.52665 ν8 = 64.20 (a3)
r17 = ∞
d17 = 182.653
r18 = ∞ (SY)
d18 = 70.024
r19 = ∞
d19 = 6.000 N9 = 1.52665 ν9 = 64.20 (a4)
r20 = ∞
d20 = 5.903
r21 = 129.200
d21 = 4.500 N10 = 1.52665 ν10 = 64.20 (a5)
r22 = ∞

<< Short Axis Data of Example 3 >>
β = -0.5, NA = 0.025, S1 = -28.174, λ = 436
[Curve radius] [Axis spacing] [Refractive index] [Abbe number]
r1 = -34.868
d1 = 5.800 N1 = 1.76502 ν1 = 44.78 (t1)
r2 = -22.674
d2 = 0.300
r3 = 37.278
d3 = 6.470 N2 = 1.50036 ν2 = 83.58 (t2)
r4 = -50.107
d4 = 3.461
r5 = 15.570
d5 = 5.600 N3 = 1.52665 ν3 = 64.20 (t3)
r6 = ∞
d6 = 2.071
r7 = ∞ (SX)
d7 = 0.822
r8 = -42.111
d8 = 2.000 N4 = 1.70006 ν4 = 32.10 (t4)
r9 = 19.316
d9 = 13.451
r10 = -42.111
d10 = 2.000 N5 = 1.70006 ν5 = 32.10 (t5)
r11 = 19.316
d11 = 19.225
r12 = ∞
d12 = 7.000 N6 = 1.52665 ν6 = 64.20 (a1)
r13 = ∞
d13 = 65.706
r14 = ∞
d14 = 4.000 N7 = 1.52665 ν7 = 64.20 (a2)
r15 = ∞
d15 = 44.038
r16 = ∞
d16 = 5.000 N8 = 1.52665 ν8 = 64.20 (a3)
r17 = -77.850
d17 = 182.653
r18 = ∞ (SY)
d18 = 70.024
r19 = 31.140
d19 = 6.000 N9 = 1.52665 ν9 = 64.20 (a4)
r20 = ∞
d20 = 5.903
r21 = ∞
d21 = 4.500 N10 = 1.52665 ν10 = 64.20 (a5)
r22 = ∞

<< Long-axis data of Example 4 >>
β = -7.3, NA = 0.025, S1 = -24.105, λ = 436
[Curve radius] [Axis spacing] [Refractive index] [Abbe number]
r1 = -34.868
d1 = 5.800 N1 = 1.76502 ν1 = 44.78 (t1)
r2 = -22.674
d2 = 3.479
r3 = 37.278
d3 = 6.470 N2 = 1.50036 ν2 = 83.58 (t2)
r4 = -50.107
d4 = 0.650
r5 = 15.570
d5 = 5.600 N3 = 1.52665 ν3 = 64.20 (t3)
r6 = ∞
d6 = 2.475
r7 = ∞ (SX)
d7 = 1.155
r8 = -42.111
d8 = 2.000 N4 = 1.70006 ν4 = 32.10 (t4)
r9 = 19.316
d9 = 7.358
r10 = -42.111
d10 = 2.000 N5 = 1.70006 ν5 = 32.10 (t5)
r11 = 19.316
d11 = 18.032
r12 = ∞
d12 = 7.000 N6 = 1.52665 ν6 = 64.20 (a1)
r13 = -25.950
d13 = 1.161
r14 = 103.360
d14 = 5.000 N7 = 1.52665 ν7 = 64.20 (a2)
r15 = ∞
d15 = 105.837
r16 = ∞
d16 = 5.000 N8 = 1.52665 ν8 = 64.20 (a3)
r17 = ∞
d17 = 152.871
r18 = ∞ (SY)
d18 = 71.725
r19 = ∞
d19 = 6.000 N9 = 1.52665 ν9 = 64.20 (a4)
r20 = ∞
d20 = 6.390
r21 = 103.360
d21 = 5.000 N10 = 1.52665 ν10 = 64.20 (a5)
r22 = ∞

<< Short Axis Data of Example 4 >>
β = -0.5, NA = 0.025, S1 = -24.105, λ = 436
[Curve radius] [Axis spacing] [Refractive index] [Abbe number]
r1 = -34.868
d1 = 5.800 N1 = 1.76502 ν1 = 44.78 (t1)
r2 = -22.674
d2 = 3.479
r3 = 37.278
d3 = 6.470 N2 = 1.50036 ν2 = 83.58 (t2)
r4 = -50.107
d4 = 0.650
r5 = 15.570
d5 = 5.600 N3 = 1.52665 ν3 = 64.20 (t3)
r6 = ∞
d6 = 2.475
r7 = ∞ (SX)
d7 = 1.155
r8 = -42.111
d8 = 2.000 N4 = 1.70006 ν4 = 32.10 (t4)
r9 = 19.316
d9 = 7.358
r10 = -42.111
d10 = 2.000 N5 = 1.70006 ν5 = 32.10 (t5)
r11 = 19.316
d11 = 18.032
r12 = ∞
d12 = 7.000 N6 = 1.52665 ν6 = 64.20 (a1)
r13 = ∞
d13 = 1.161
r14 = ∞
d14 = 5.000 N7 = 1.52665 ν7 = 64.20 (a2)
r15 = ∞
d15 = 105.837
r16 = ∞
d16 = 5.000 N8 = 1.52665 ν8 = 64.20 (a3)
r17 = -67.470
d17 = 152.871
r18 = ∞ (SY)
d18 = 71.725
r19 = 31.140
d19 = 6.000 N9 = 1.52665 ν9 = 64.20 (a4)
r20 = ∞
d20 = 6.390
r21 = ∞
d21 = 5.000 N10 = 1.52665 ν10 = 64.20 (a5)
r22 = ∞

The lens block diagram of 1st Embodiment (Example 1). The lens block diagram of 2nd Embodiment (Example 2). The lens block diagram of 3rd Embodiment (Example 3). The lens block diagram of 4th Embodiment (Example 4). FIG. 6 is an aberration diagram of Example 1. FIG. 6 is an aberration diagram of Example 2. FIG. 6 is an aberration diagram of Example 3. FIG. 6 is an aberration diagram of Example 4. The optical block diagram which shows embodiment of the illumination optical system carrying an anamorphic optical system (Example 1) about a short-axis direction.

Explanation of symbols

AP Anamorphic optical system (imaging optical system)
ti i th rotationally symmetric lens aj j anamorphic lens ST stop SX long axis direction stop SY short axis direction stop 1 light source 2 ellipsoidal mirror F1 first focus F2 second focus 3 optical integrator 3a incident end surface 3b exit end surface IM irradiated surface AX optical axis

Claims (6)

An anamorphic optical system having at least one rotationally symmetric lens that is rotationally symmetric with respect to an optical axis and one or more anamorphic lenses that include surfaces having different curvatures in directions perpendicular to each other, and having different magnifications in directions perpendicular to each other. An anamorphic optical system characterized by satisfying the following conditional expression (1) when the direction in which the absolute value of magnification is the major axis direction and the direction in which the absolute value of magnification is the minor axis direction:
1.90 <| fXall / fsym | <20.00… (1)
However,
fXall: Focal length in the long axis direction of the anamorphic optical system,
fsym: focal length of a lens group consisting only of all rotationally symmetric lenses,
It is. The anamorphic optical system according to claim 1, wherein the following conditional expression (2) is satisfied:
6.4 <| βlong / βshort | <30.0 (2)
However,
βlong: magnification in the long axis direction of the anamorphic optical system,
βshort: magnification in the minor axis direction of the anamorphic optical system,
It is. An anamorphic optical system having at least one rotationally symmetric lens that is rotationally symmetric with respect to an optical axis and one or more anamorphic lenses that include surfaces having different curvatures in directions perpendicular to each other, and having different magnifications in directions perpendicular to each other. An anamorphic optical system characterized by satisfying the following conditional expression (2) when a direction in which the absolute value of magnification is a major axis direction and a direction in which the absolute value of magnification is a minor axis direction:
6.4 <| βlong / βshort | <30.0 (2)
However,
βlong: magnification in the long axis direction of the anamorphic optical system,
βshort: magnification in the minor axis direction of the anamorphic optical system,
It is. The anamorphic optical system according to claim 3, wherein the following conditional expression (1) is satisfied:
1.90 <| fXall / fsym | <20.00… (1)
However,
fXall: Focal length in the long axis direction of the anamorphic optical system,
fsym: focal length of a lens group consisting only of all rotationally symmetric lenses,
It is.   An illumination optical system that guides light from a light source to a surface to be irradiated, the ellipsoidal mirror disposed so that the light source is positioned near the first focal point, and an incident end surface near the second focal point of the elliptical mirror An anamorphic according to any one of claims 1 to 4, further comprising: an optical integrator having an optical integrator, and an imaging optical system that forms an image of an exit end face of the optical integrator on an irradiated surface. An illumination optical system comprising an optical system.   An ellipsoidal mirror, a light source disposed near the first focal point of the ellipsoidal mirror, an optical integrator having an incident end surface near the second focal point of the ellipsoidal mirror, and an image of the exit end surface of the optical integrator are irradiated. An illuminating device comprising: an imaging optical system formed on a surface, wherein the imaging optical system comprises the anamorphic optical system according to claim 1.

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