JP2005091195A - Inspection socket for electronic component - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection socket for electronic component for surely bringing a contact part into contact with an end face electrode, even if the end face electrode becomes small due to a simple constitution, and obtaining full contact amount for implementing an inspection and an evaluation. <P>SOLUTION: The inspection socket for electronic component has the end face through-hole electrodes 11a provided in a part or all the electrodes of an electronic component 11, an inspection stage 12 having a window 13 provided at a location corresponding to the end face through-hole electrode 11a, and the end-face through-hole contact part 14 provided protrudingly from the window 13 at an end. The end-face through-hole contact part 14 has at least three metering parts 14a, 14b, 14c which move independently. The metering part 14b, disposed at the center protrudes from the window 13 rather than the other metering parts 14a, 14c, and contacts the interior of a through-hole part of the end face through-hole electrode 11a. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an electronic component inspection socket used when performing characteristic inspection and characteristic evaluation of electronic components such as semiconductor elements and module components.

  Conventionally, in general, this type of inspection socket has a configuration as shown in FIGS.

  That is, in the figure, reference numeral 1 denotes an electronic component to be inspected and evaluated such as a semiconductor element or a module component, and 2 denotes a window portion 3 provided at a position corresponding to the end face electrode 1a provided on the electronic component 1. The inspection table.

  Reference numeral 4 denotes a contact portion provided so that one end thereof protrudes from the window portion 3, and is configured to be in press contact with the end face electrode 1 a of the electronic component 1. Reference numeral 5 denotes an inspection substrate provided with an electrode pattern 6 that comes into contact with the other end side of the contact portion 4 when the contact portion 4 is in press contact with the end face electrode 1 a of the electronic component 1. 5 is configured to be connected to an inspection circuit 8 provided on the back surface of the circuit 5.

  Reference numeral 9 denotes a cylindrical elastic body for enabling the contact portion 4 to be in press contact with the end face electrode 1a of the electronic component 1, and when the electronic component 1 is pressed against the inspection table 2, it is deformed and pressed by its restoring force. Is possible.

As prior art document information related to the invention of this application, for example, Patent Document 1 is known.
Japanese Patent Laid-Open No. 02-87492

  However, in the above-described conventional configuration, the smaller the electronic component to be inspected and evaluated, the smaller the end surface electrode provided on the electronic component. It is difficult to obtain the contact amount, and there is a limit to simply reducing the contact portion to match the end face electrode.

  The present invention is for solving the above-described problems, and even if the end face electrode is reduced in size with a simple configuration, the contact portion can be reliably brought into contact with the end face electrode and sufficient contact for inspection and evaluation can be performed. It aims at realizing the electronic component inspection socket which can obtain quantity.

  In order to achieve the above object, an electronic component inspection socket according to the present invention is an electronic component inspection socket having a plurality of contact portions that are electrically connected to respective electrodes of the electronic component. End face through-hole electrodes provided on all electrodes, an inspection table provided with a window at a position corresponding to the end face through-hole electrode, and an end face through-hole provided with one end protruding from the window And the end face through-hole contact portion has at least three independently movable meter reading portions, and the meter reading portion arranged at the center projects from the window portion more than the other meter reading portions. It is comprised so that it may contact in the through-hole part of the said end surface through-hole electrode, It is characterized by the above-mentioned.

  With this configuration, even if the end face electrode of the electronic component to be inspected and evaluated becomes small, the meter reading part arranged in the center can come into contact with the inside of the through-hole part. And a sufficient contact amount can be obtained. Further, since the meter reading part can move independently, even if dust or the like bites into one meter reading part, the necessary contact amount can be reliably obtained with the remaining meter reading parts.

  The electronic component inspection socket of the present invention is characterized in that the tip of the meter-reading portion disposed at the center of the end surface through-hole contact portion has a curved shape and the tip of the other meter-reading portion has a flat shape. As a result, the amount of contact in the through-hole portion by the meter-reading portion arranged in the center can be further increased, and damage to the through-hole portion at the time of contact can be further reduced. In addition, even if there is a slight misalignment in the horizontal direction, it can be self-corrected in a direction in which the center of the through-hole part and the center of the meter-reading part arranged at the center coincide with each other. Can be made more uniform.

  Furthermore, the electronic component inspection socket according to the present invention is characterized in that the tip of the meter-reading portion disposed in the center of the end surface through-hole contact portion has a taper portion toward the inside, whereby the vertical direction Even if there is a slight misalignment, it can be self-corrected in a direction parallel to the inspection table, so that the contact at each contact portion can be made more uniform.

  As described above, according to the present invention, the contact portion can be reliably brought into contact with the end surface electrode even when the end surface electrode of the electronic component to be inspected and evaluated is reduced by a very simple configuration. It is possible to realize an electronic component inspection socket capable of obtaining a contact amount sufficient for performing inspection / evaluation.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is an exploded perspective view showing a configuration of an electronic component inspection socket according to an embodiment of the present invention, FIG. 2 is an enlarged view of a main part of the embodiment, and FIG. 3 is a sectional view of the embodiment.

  In FIG. 1, reference numeral 12 denotes an inspection table, which is configured to be detachably mountable on an electronic component 11 to be inspected and evaluated, such as a semiconductor element and a module component, and is attached to the electronic component 11 when mounted. A contact portion 14 made of a conductive member is formed so that one end thereof protrudes from the window portion 13 of the inspection table 12 so as to be electrically connected to the provided end surface electrode 11a. As the conductive member, a nickel base layer formed on beryllium copper and gold-plated so as to cover it is used.

  One end side of the contact portion 14 is provided in plural along the circumference of a cylindrical elastic body 19 made of silicon rubber or the like having a cylindrical restoring property, and is in press contact with the end surface electrode 11a of the electronic component 11. The pitch is formed so as to correspond to the pitch of the end surface electrodes 11 a provided in the electronic component 11.

  The inspection substrate 15 is an inspection substrate provided with an electrode pattern 16 that comes into contact with the other end side of the contact portion 14, and is configured to be connected to an inspection circuit 18 provided on the back side of the inspection substrate 15 through a through hole 17. Has been. As a result, the wiring distance between the inspection circuit 18 and the electronic component 11 can be shortened, which is suitable for the measurement of high-frequency components.

  The contact portion 14 has at least three independently movable contact portions, and is configured such that the contact portion 14 disposed in the center protrudes from the contact portions 14 on the other sides. With this configuration, even when the end face electrode 11a of the electronic component 11 to be inspected and evaluated becomes small, the tip of the contact portion 14 disposed in the center has a curved shape, and the other contact portions 14 have a flat tip. Since it is a shape and the contact part arranged in the center protrudes, the contact amount in the through hole part by the contact part 14 arranged in the center can be further increased, and into the through hole part at the time of contact Damage can be further reduced. Moreover, since the contact part 14 can move independently, even if dust etc. are bitten in one contact part 14, a required contact amount can be reliably obtained with the remaining contact part 14.

  Since the tip of the contact portion 14 arranged at the center is a taper portion inward, even if there is a slight displacement in the horizontal direction, the meter reading portions 14a, 14b, 14c arranged at the center and the center of the through hole portion. Since the self-correction can be performed in a direction that coincides with the center, contact at each contact portion can be made more uniform.

  The electronic component inspection socket according to the present invention has a very simple configuration, and even if the end surface electrode of the electronic component to be inspected and evaluated becomes small, the contact portion can be reliably brought into contact with the end surface electrode, and the inspection can be performed. A contact amount sufficient for evaluation can be obtained, and it is useful for an electronic component inspection socket used when performing characteristic inspection and characteristic evaluation of electronic components such as semiconductor elements and module components.

The disassembled perspective view which shows the structure of the electronic component test | inspection socket in one embodiment of this invention. Main part enlarged view of the same embodiment Cross-sectional view of the same embodiment An exploded perspective view showing a configuration of a conventional electronic component inspection socket Enlarged view of the main part of the conventional example Sectional view of the conventional example

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,11 Electronic component 2,12 Inspection stand 3,13 Window part 4,14 Contact part 5,15 Inspection board 6,16 Electrode pattern 7,17 Through hole 8,18 Inspection circuit 9,19 Cylindrical elastic body

Claims (3)

An electronic component inspection socket having a plurality of contact portions electrically connected to each electrode of the electronic component, wherein the end surface through-hole electrode is provided on a part or all of the electrodes of the electronic component, and the end surface through An inspection table provided with a window at a position corresponding to the hole electrode, and an end surface through-hole contact portion provided so that one end thereof protrudes from the window portion, the end surface through-hole contact portion is It has at least three independently movable meter reading portions, and the meter reading portion arranged in the center is configured to protrude from the window portion more than the other meter reading portions, and the through hole of the end surface through hole electrode An electronic component inspection socket, wherein the electronic component inspection socket is configured to contact the inside of the unit. 2. The electronic component inspection socket according to claim 1, wherein the tip of the meter-reading portion disposed at the center of the end surface through-hole contact portion has a curved shape, and the tip of another meter-reading portion has a flat shape. 3. The electronic component inspection socket according to claim 2, wherein the tip of the meter-reading portion disposed at the center of the end surface through-hole contact portion has a taper portion inward.

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