JP2005086469A5 - - Google Patents

Download PDF

Info

Publication number
JP2005086469A5
JP2005086469A5 JP2003316248A JP2003316248A JP2005086469A5 JP 2005086469 A5 JP2005086469 A5 JP 2005086469A5 JP 2003316248 A JP2003316248 A JP 2003316248A JP 2003316248 A JP2003316248 A JP 2003316248A JP 2005086469 A5 JP2005086469 A5 JP 2005086469A5
Authority
JP
Japan
Prior art keywords
vibrator
voltage
filter device
frequency band
transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003316248A
Other languages
Japanese (ja)
Other versions
JP2005086469A (en
JP4442167B2 (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2003316248A priority Critical patent/JP4442167B2/en
Priority claimed from JP2003316248A external-priority patent/JP4442167B2/en
Publication of JP2005086469A publication Critical patent/JP2005086469A/en
Publication of JP2005086469A5 publication Critical patent/JP2005086469A5/ja
Application granted granted Critical
Publication of JP4442167B2 publication Critical patent/JP4442167B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Claims (3)

特定周波数帯域の信号を透過または遮断するフィルタ装置であって、
直流電圧が印加される可動構造体である振動子と、
前記振動子に振動を励起するための入力電極と、
前記振動子に励起された振動を検出するための出力電極と、
前記振動子への印加電圧の値を可変させる電圧調整手段と
を備えることを特徴とするフィルタ装置。
A filter device that transmits or blocks a signal in a specific frequency band,
A vibrator that is a movable structure to which a DC voltage is applied;
An input electrode for exciting vibration in the vibrator;
An output electrode for detecting vibration excited by the vibrator;
And a voltage adjusting unit that varies a value of a voltage applied to the vibrator.
特定周波数帯域の信号を透過または遮断するフィルタ装置であって、
直流電圧が印加される可動構造体である少なくとも一つの振動子と、前記振動子に振動を励起するための入力電極と、前記振動子に励起された振動を検出するための出力電極とを有してなる振動子群を複数備え、
各振動子群は、それぞれが異なる中心周波数に対応したものであり、
前記各振動子群が対応する中心周波数から特定される周波数帯域の信号を透過または遮断するように前記各振動子群が電気的に接続されており、
前記各振動子群のうち、少なくとも一つの振動子群には、当該振動子群における振動子への印加電圧の値を可変させる電圧調整手段が設けられている
ことを特徴とするフィルタ装置。
A filter device that transmits or blocks a signal in a specific frequency band,
At least one vibrator that is a movable structure to which a DC voltage is applied, an input electrode for exciting vibration to the vibrator, and an output electrode for detecting vibration excited by the vibrator A plurality of vibrator groups,
Each transducer group corresponds to a different center frequency,
Each transducer group is electrically connected so as to transmit or block signals in a frequency band specified from the corresponding center frequency of each transducer group,
A filter device characterized in that at least one of the transducer groups is provided with voltage adjusting means for varying a value of a voltage applied to the transducer in the transducer group.
特定周波数帯域の信号を透過または遮断するフィルタ装置であって、A filter device that transmits or blocks a signal in a specific frequency band,
可動構造体である振動子と、A vibrator that is a movable structure;
前記振動子に振動を励起するための下部電極と、A lower electrode for exciting vibration in the vibrator;
印加電圧の値を可変させる電圧調整手段とVoltage adjusting means for varying the value of the applied voltage;
を備えることを特徴とするフィルタ装置。A filter device comprising:
JP2003316248A 2003-09-09 2003-09-09 Filter device Expired - Fee Related JP4442167B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003316248A JP4442167B2 (en) 2003-09-09 2003-09-09 Filter device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003316248A JP4442167B2 (en) 2003-09-09 2003-09-09 Filter device

Publications (3)

Publication Number Publication Date
JP2005086469A JP2005086469A (en) 2005-03-31
JP2005086469A5 true JP2005086469A5 (en) 2006-06-29
JP4442167B2 JP4442167B2 (en) 2010-03-31

Family

ID=34416206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003316248A Expired - Fee Related JP4442167B2 (en) 2003-09-09 2003-09-09 Filter device

Country Status (1)

Country Link
JP (1) JP4442167B2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007174438A (en) 2005-12-23 2007-07-05 Toshiba Corp Filter circuit and radio communication system with filter
CN101168434B (en) * 2006-10-24 2011-06-15 精工爱普生株式会社 MEMS device
JP2008132583A (en) * 2006-10-24 2008-06-12 Seiko Epson Corp Mems device
JP5505596B2 (en) * 2008-06-18 2014-05-28 セイコーエプソン株式会社 Resonant circuit, oscillation circuit, filter circuit, and electronic device
JP5169518B2 (en) * 2008-06-18 2013-03-27 セイコーエプソン株式会社 RESONANT CIRCUIT, ITS MANUFACTURING METHOD, AND ELECTRONIC DEVICE
JP2012195829A (en) 2011-03-17 2012-10-11 Seiko Epson Corp Oscillation circuit
JP2012222718A (en) 2011-04-13 2012-11-12 Seiko Epson Corp Oscillator

Similar Documents

Publication Publication Date Title
US20100086151A1 (en) Piezoelectric Speaker
JP2007515073A5 (en)
DE60123842D1 (en) DEVICE FOR IMPROVING THE ABSORPTION THROUGH THE SKIN
TW200738036A (en) Acoustic light-emitting device
WO2005025076A3 (en) Tactile transducers and method of operating
TW200613735A (en) Method for calibrating accelerometer sensitivity
FI20116113A (en) Lateral connected bulk wave filter with improved pass band characteristics
WO2006098743A3 (en) Internal electrostatic transduction structures for bulk-mode micromechanical resonators
JP2009225503A5 (en)
EP1427247A3 (en) Baffle vibrating reducing
JP2005086469A5 (en)
WO2005114138A8 (en) Measurements of density and viscoelasticity with a single acoustic wave sensor
JP2010112888A5 (en)
JP2006184260A5 (en)
WO2004057912A3 (en) Acoustic actuators
DE602004021276D1 (en) ACOUSTIC WAVE FILTER AND COMMUNICATION UNIT
TW200420170A (en) Speaker unit and sound output device
WO2000057000B1 (en) Internal vibrator with a measuring system
CN206210845U (en) A kind of piezoelectric sensing device
TW200509728A (en) Panel-shaped acoustic wave generator
DE60007018D1 (en) Compact seismic vibrator and method for its use in seismic monitoring and prospecting
CN201477865U (en) Capacitance type sensor for a musical percussion instrument
KR100856345B1 (en) Portable beauty apparatus using supersonic for skin
EP1851853A4 (en) Idt electroded piezoelectric diaphragms
CN109935223B (en) Ultra-small-size low-frequency transmitting transducer