JP2005086469A5 - - Google Patents
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- JP2005086469A5 JP2005086469A5 JP2003316248A JP2003316248A JP2005086469A5 JP 2005086469 A5 JP2005086469 A5 JP 2005086469A5 JP 2003316248 A JP2003316248 A JP 2003316248A JP 2003316248 A JP2003316248 A JP 2003316248A JP 2005086469 A5 JP2005086469 A5 JP 2005086469A5
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- voltage
- filter device
- frequency band
- transducer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Claims (3)
直流電圧が印加される可動構造体である振動子と、
前記振動子に振動を励起するための入力電極と、
前記振動子に励起された振動を検出するための出力電極と、
前記振動子への印加電圧の値を可変させる電圧調整手段と
を備えることを特徴とするフィルタ装置。 A filter device that transmits or blocks a signal in a specific frequency band,
A vibrator that is a movable structure to which a DC voltage is applied;
An input electrode for exciting vibration in the vibrator;
An output electrode for detecting vibration excited by the vibrator;
And a voltage adjusting unit that varies a value of a voltage applied to the vibrator.
直流電圧が印加される可動構造体である少なくとも一つの振動子と、前記振動子に振動を励起するための入力電極と、前記振動子に励起された振動を検出するための出力電極とを有してなる振動子群を複数備え、
各振動子群は、それぞれが異なる中心周波数に対応したものであり、
前記各振動子群が対応する中心周波数から特定される周波数帯域の信号を透過または遮断するように前記各振動子群が電気的に接続されており、
前記各振動子群のうち、少なくとも一つの振動子群には、当該振動子群における振動子への印加電圧の値を可変させる電圧調整手段が設けられている
ことを特徴とするフィルタ装置。 A filter device that transmits or blocks a signal in a specific frequency band,
At least one vibrator that is a movable structure to which a DC voltage is applied, an input electrode for exciting vibration to the vibrator, and an output electrode for detecting vibration excited by the vibrator A plurality of vibrator groups,
Each transducer group corresponds to a different center frequency,
Each transducer group is electrically connected so as to transmit or block signals in a frequency band specified from the corresponding center frequency of each transducer group,
A filter device characterized in that at least one of the transducer groups is provided with voltage adjusting means for varying a value of a voltage applied to the transducer in the transducer group.
可動構造体である振動子と、A vibrator that is a movable structure;
前記振動子に振動を励起するための下部電極と、A lower electrode for exciting vibration in the vibrator;
印加電圧の値を可変させる電圧調整手段とVoltage adjusting means for varying the value of the applied voltage;
を備えることを特徴とするフィルタ装置。A filter device comprising:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003316248A JP4442167B2 (en) | 2003-09-09 | 2003-09-09 | Filter device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003316248A JP4442167B2 (en) | 2003-09-09 | 2003-09-09 | Filter device |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005086469A JP2005086469A (en) | 2005-03-31 |
JP2005086469A5 true JP2005086469A5 (en) | 2006-06-29 |
JP4442167B2 JP4442167B2 (en) | 2010-03-31 |
Family
ID=34416206
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003316248A Expired - Fee Related JP4442167B2 (en) | 2003-09-09 | 2003-09-09 | Filter device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4442167B2 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007174438A (en) | 2005-12-23 | 2007-07-05 | Toshiba Corp | Filter circuit and radio communication system with filter |
CN101168434B (en) * | 2006-10-24 | 2011-06-15 | 精工爱普生株式会社 | MEMS device |
JP2008132583A (en) * | 2006-10-24 | 2008-06-12 | Seiko Epson Corp | Mems device |
JP5505596B2 (en) * | 2008-06-18 | 2014-05-28 | セイコーエプソン株式会社 | Resonant circuit, oscillation circuit, filter circuit, and electronic device |
JP5169518B2 (en) * | 2008-06-18 | 2013-03-27 | セイコーエプソン株式会社 | RESONANT CIRCUIT, ITS MANUFACTURING METHOD, AND ELECTRONIC DEVICE |
JP2012195829A (en) | 2011-03-17 | 2012-10-11 | Seiko Epson Corp | Oscillation circuit |
JP2012222718A (en) | 2011-04-13 | 2012-11-12 | Seiko Epson Corp | Oscillator |
-
2003
- 2003-09-09 JP JP2003316248A patent/JP4442167B2/en not_active Expired - Fee Related
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