JP2005079130A5 - - Google Patents

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Publication number
JP2005079130A5
JP2005079130A5 JP2003304255A JP2003304255A JP2005079130A5 JP 2005079130 A5 JP2005079130 A5 JP 2005079130A5 JP 2003304255 A JP2003304255 A JP 2003304255A JP 2003304255 A JP2003304255 A JP 2003304255A JP 2005079130 A5 JP2005079130 A5 JP 2005079130A5
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JP
Japan
Prior art keywords
wiring layer
film wiring
atomic
thin
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2003304255A
Other languages
English (en)
Japanese (ja)
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JP2005079130A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2003304255A priority Critical patent/JP2005079130A/ja
Priority claimed from JP2003304255A external-priority patent/JP2005079130A/ja
Publication of JP2005079130A publication Critical patent/JP2005079130A/ja
Publication of JP2005079130A5 publication Critical patent/JP2005079130A5/ja
Withdrawn legal-status Critical Current

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JP2003304255A 2003-08-28 2003-08-28 薄膜配線層 Withdrawn JP2005079130A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003304255A JP2005079130A (ja) 2003-08-28 2003-08-28 薄膜配線層

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003304255A JP2005079130A (ja) 2003-08-28 2003-08-28 薄膜配線層

Publications (2)

Publication Number Publication Date
JP2005079130A JP2005079130A (ja) 2005-03-24
JP2005079130A5 true JP2005079130A5 (https=) 2006-08-24

Family

ID=34407993

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003304255A Withdrawn JP2005079130A (ja) 2003-08-28 2003-08-28 薄膜配線層

Country Status (1)

Country Link
JP (1) JP2005079130A (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4655281B2 (ja) * 2005-03-29 2011-03-23 日立金属株式会社 薄膜配線層
TWI332720B (en) 2005-07-29 2010-11-01 Kyocera Corp Organic electrolum9iniscence element and its fabrication method
JP6016083B2 (ja) 2011-08-19 2016-10-26 日立金属株式会社 電子部品用積層配線膜および被覆層形成用スパッタリングターゲット材
JP6361957B2 (ja) 2013-03-22 2018-07-25 日立金属株式会社 電子部品用積層配線膜および被覆層形成用スパッタリングターゲット材
WO2015001627A1 (ja) * 2013-07-03 2015-01-08 パイオニア株式会社 光学装置及び有機ｅｌ装置
JP6369750B2 (ja) * 2013-09-10 2018-08-08 日立金属株式会社 積層配線膜およびその製造方法ならびにＮｉ合金スパッタリングターゲット材
JP6681019B2 (ja) * 2015-02-25 2020-04-15 日立金属株式会社 電子部品用積層配線膜および被覆層形成用スパッタリングターゲット材

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