JP2005076792A - 磁気軸受装置 - Google Patents

磁気軸受装置 Download PDF

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Publication number
JP2005076792A
JP2005076792A JP2003309497A JP2003309497A JP2005076792A JP 2005076792 A JP2005076792 A JP 2005076792A JP 2003309497 A JP2003309497 A JP 2003309497A JP 2003309497 A JP2003309497 A JP 2003309497A JP 2005076792 A JP2005076792 A JP 2005076792A
Authority
JP
Japan
Prior art keywords
magnetic pole
magnetic
coil
radial
axial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003309497A
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English (en)
Japanese (ja)
Other versions
JP2005076792A5 (enrdf_load_stackoverflow
Inventor
Toshiaki Kawashima
敏明 川島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
BOC Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Edwards Japan Ltd filed Critical BOC Edwards Japan Ltd
Priority to JP2003309497A priority Critical patent/JP2005076792A/ja
Publication of JP2005076792A publication Critical patent/JP2005076792A/ja
Publication of JP2005076792A5 publication Critical patent/JP2005076792A5/ja
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0459—Details of the magnetic circuit
    • F16C32/0461—Details of the magnetic circuit of stationary parts of the magnetic circuit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0444—Details of devices to control the actuation of the electromagnets
    • F16C32/0446—Determination of the actual position of the moving member, e.g. details of sensors
    • F16C32/0448—Determination of the actual position of the moving member, e.g. details of sensors by using the electromagnet itself as sensor, e.g. sensorless magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
JP2003309497A 2003-09-02 2003-09-02 磁気軸受装置 Pending JP2005076792A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003309497A JP2005076792A (ja) 2003-09-02 2003-09-02 磁気軸受装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003309497A JP2005076792A (ja) 2003-09-02 2003-09-02 磁気軸受装置

Publications (2)

Publication Number Publication Date
JP2005076792A true JP2005076792A (ja) 2005-03-24
JP2005076792A5 JP2005076792A5 (enrdf_load_stackoverflow) 2006-10-12

Family

ID=34411617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003309497A Pending JP2005076792A (ja) 2003-09-02 2003-09-02 磁気軸受装置

Country Status (1)

Country Link
JP (1) JP2005076792A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005032675A1 (de) * 2005-07-13 2007-01-25 Renk Ag Aktives Magnetlager mit integrierter Wegsensorik
CN101975221A (zh) * 2010-10-26 2011-02-16 中国人民解放军国防科学技术大学 垂直线圈内转子混合磁轴承及其组合结构
EP2887022A1 (en) * 2013-12-20 2015-06-24 Skf Magnetic Mechatronics Rotor sensor target for magnetic bearings
US9506475B2 (en) 2012-01-06 2016-11-29 Shimadzu Corporation Sensorless magnetic levitation vacuum pump and sensorless magnetic levitation device
WO2017006844A1 (ja) * 2015-07-07 2017-01-12 エドワーズ株式会社 電磁石ユニット、磁気軸受装置及び真空ポンプ
CN107387561A (zh) * 2017-08-29 2017-11-24 南京磁谷科技有限公司 一种倾斜磁极磁轴承的座椅式磁极安装结构
JP2018132166A (ja) * 2017-02-17 2018-08-23 株式会社島津製作所 磁気軸受装置および真空ポンプ

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005032675A1 (de) * 2005-07-13 2007-01-25 Renk Ag Aktives Magnetlager mit integrierter Wegsensorik
CN101975221A (zh) * 2010-10-26 2011-02-16 中国人民解放军国防科学技术大学 垂直线圈内转子混合磁轴承及其组合结构
US9506475B2 (en) 2012-01-06 2016-11-29 Shimadzu Corporation Sensorless magnetic levitation vacuum pump and sensorless magnetic levitation device
US9841294B2 (en) 2013-12-20 2017-12-12 Skf Magnetic Mechatronics Rotor sensor target for magnetic bearings
EP2887022A1 (en) * 2013-12-20 2015-06-24 Skf Magnetic Mechatronics Rotor sensor target for magnetic bearings
CN104729393A (zh) * 2013-12-20 2015-06-24 Skf磁性机械技术公司 用于磁性轴承的转子传感器靶
CN107683376B (zh) * 2015-07-07 2020-08-11 埃地沃兹日本有限公司 电磁铁单元、磁轴承装置及真空泵
JP2017020520A (ja) * 2015-07-07 2017-01-26 エドワーズ株式会社 電磁石ユニット、磁気軸受装置及び真空ポンプ
CN107683376A (zh) * 2015-07-07 2018-02-09 埃地沃兹日本有限公司 电磁铁单元、磁轴承装置及真空泵
KR20180026667A (ko) * 2015-07-07 2018-03-13 에드워즈 가부시키가이샤 전자석 유닛, 자기 베어링 장치 및 진공 펌프
WO2017006844A1 (ja) * 2015-07-07 2017-01-12 エドワーズ株式会社 電磁石ユニット、磁気軸受装置及び真空ポンプ
US11028853B2 (en) * 2015-07-07 2021-06-08 Edwards Japan Limited Electromagnetic unit, magnetic bearing device, and vacuum pump
KR102596222B1 (ko) * 2015-07-07 2023-11-01 에드워즈 가부시키가이샤 전자석 유닛, 자기 베어링 장치 및 진공 펌프
JP2018132166A (ja) * 2017-02-17 2018-08-23 株式会社島津製作所 磁気軸受装置および真空ポンプ
US10683893B2 (en) 2017-02-17 2020-06-16 Shimadzu Corporation Magnetic bearing device and vacuum pump
JP7003418B2 (ja) 2017-02-17 2022-01-20 株式会社島津製作所 磁気軸受装置および真空ポンプ
CN107387561A (zh) * 2017-08-29 2017-11-24 南京磁谷科技有限公司 一种倾斜磁极磁轴承的座椅式磁极安装结构

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