JP2005070104A - Clamp device of ferrule and microinterferometer device equipped with the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enable an optical connector plug to be positioned to clamp equipment with sufficient repeatability by attaining equilibrium of forces acting on a ferrule and a plug member by inclining and moving a plug member to a ferrule, while pressurizing the tip part of the plug member in a direction perpendicular to the axis of the ferrule. <P>SOLUTION: A clamp equipment of a ferrule is configured so that a force which pressurizes a second key groove part 413 of the side of a plug member 410 by a pressure part 337 of the side of clamp equipment 300, a force repelled by a spring member which is elastically deformed by the decantation of the plug member 410 and a force which supports a ferrule 420 by a clamp putting hole 362 are balanced. Since these forces are balanced, backlash between the clamp member 410 and the clamp equipment 300 and backlash between the plug member 410 and the ferrule 420 are suppressed, and the positioning of axial directions among them is performed. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention uses a microscopic interferometer device (also referred to as an “interference microscope device”) to analyze the shape of the tip of the ferrule, etc., at a predetermined position in front of the objective lens. The present invention relates to a ferrule clamping device used for holding the optical fiber and a microscopic interferometer device provided with the clamping device.
[0002]
[Prior art]
A ferrule is a cylindrical part that holds and fixes one end of an optical fiber in an optical connector plug for connecting the optical fiber. After the optical fiber is inserted into the center of the outer diameter and fixed with an adhesive or the like, the ferrule is polished in a mirror-like shape, and the two ferrules are held together by abutting the end surfaces. The two configured optical fibers can be connected.
[0003]
Such ferrules include a vertically polished ferrule polished so that the tip surface is perpendicular to the ferrule axis, and the tip surface of the ferrule shaft to reduce the adverse effects of reflected light on the tip surface. An oblique polishing type ferrule polished so as to be inclined with respect to the surface is known. There is also known a PC (Physical Contact) type ferrule configured such that the tip surface is elastically deformed by a pressing force when the two ferrules are brought into contact with each other to improve the adhesion between the tip surfaces.
[0004]
In a general optical connector plug, the ferrule is housed in a cylindrical plug member. In addition, in an optical connector plug that accommodates an oblique polishing type ferrule, it is necessary that the inclination directions of the front end surfaces of both ferrules coincide with each other when connected to the counterpart optical connector plug. For this reason, in an optical connector plug containing a diagonally polished ferrule, a key portion for indicating a direction (key direction) serving as a reference for alignment when connecting to the counterpart optical connector plug is provided on the plug member. Generally, it is formed. The slant polishing ferrule is engaged with the plug member so that the inclination direction of the front end surface forms a predetermined angle with respect to the key direction and the rotation about the axis is restricted. In addition, a spring member that normally biases the ferrule in the axial direction is provided between the plug member and the ferrule in order to improve the adhesion with the counterpart ferrule.
[0005]
By the way, in order to reduce the optical loss due to the optical fiber connection, various individual standards with high accuracy on the order of μm are defined for the ferrule. For example, in an oblique polishing type ferrule, the angle deviation with respect to the reference value of the inclination angle (oblique polishing angle) of the tip surface, or the angle deviation with respect to the reference value between the key direction of the optical connector plug and the (polishing) inclination direction of the tip surface Standards for these are established.
[0006]
A microscopic interferometer device may be used to check whether the manufactured ferrule conforms to a defined standard. A microscopic interferometer device observes interference fringes obtained by causing object light carrying phase information such as the surface shape and refractive index distribution of a minute subject to interfere with reference light reflected from a predetermined reference plate. The phase information of the subject is obtained by measuring and analyzing the shape and change of the interference fringes.
[0007]
2. Description of the Related Art A clamp device for holding a ferrule to be inspected so as to have a predetermined inclination with respect to a microscopic interferometer device when performing a ferrule inspection using such a microscopic interferometer device is known. In this clamping device, the axis of the clamping device and the axis of the ferrule substantially coincide with each other when the ferrule is held. Is oriented in a predetermined direction (determined based on the key direction of the optical connector plug).
[0008]
That is, the conventional clamping device includes a clamp mechanism that can clamp the ferrule in a state in which the axis of the clamping device and the axis of the ferrule substantially coincide with each other, and the optical connector so that the inclined direction of the tip surface of the ferrule is directed to a predetermined direction. A rotation restricting portion that restricts rotation of the plug around the axis. This rotation restricting portion is usually configured to restrict the rotation of the optical connector plug about its axis by engaging with an engaging portion such as a keyway formed at the tip of the plug member holding the ferrule. Has been.
[0009]
[Problems to be solved by the invention]
In such a conventional clamping device, there is a problem that it is difficult to obtain reproducibility of positioning of the optical connector plug with respect to the clamping device, in particular, it is difficult to obtain reproducibility of positioning of the optical connector plug with respect to the clamping device in the direction around the axis. That is, in the conventional clamp device, the engaging portion formed on the plug member side and the rotation restricting portion on the clamp device side engage with each other, thereby positioning the optical connector plug with respect to the clamp device (more precisely, with respect to the clamp device). When the ferrule is clamped by the clamping mechanism on the clamping device side, the ferrule is positioned relative to the clamping device.
[0010]
However, there is a slight backlash between the rotation restricting portion on the clamp device side and the engaging portion on the plug member side due to the manufacturing tolerance. Strictly speaking, slight backlash occurs between the ferrule and the plug member due to manufacturing tolerances. Even if such a backlash is very small, it is likely to be reflected in the relative displacement between the clamping device and the optical connector plug in the direction around the axis.
[0011]
That is, in the conventional clamping device, regarding the play that occurs between the clamp device and the plug member at the time when the ferrule is clamped by the clamp mechanism on the clamp device side, or the play that occurs between the ferrule and the plug member is suppressed. , Not much considered. For this reason, it is difficult to obtain highly accurate reproducibility with respect to positioning when mounting the optical connector plug on the clamp device, particularly positioning in the direction around the axis of the optical connector plug.
[0012]
The present invention has been made in view of such circumstances, and suppresses backlash generated between the clamp device and the plug member and backlash generated between the ferrule and the plug member, and the optical connector plug is attached to the clamp device. An object of the present invention is to provide a ferrule clamping device capable of obtaining highly accurate reproducibility with respect to the positioning of the optical connector plug, particularly in the direction around the axis of the optical connector plug, and a microscopic interferometer device equipped with such a clamping device. And
[0013]
[Means for Solving the Problems]
In order to solve the above problems, a first ferrule clamping device of the present invention includes a ferrule, a plug member engaged with the ferrule so as to restrict rotation of the ferrule about an axis, the plug member, and the ferrule. In a clamp device for holding an optical connector plug having a spring member that is interposed between and biasing the ferrule in a P direction parallel to the axis of the ferrule,
A clamp insertion hole for supporting the inserted ferrule;
In a state where the ferrule is supported by the clamp insertion hole, the tip of the plug member is pressed in the Q direction orthogonal to the P direction, and the plug member is pressed against the ferrule in the P direction and the Q direction. And a pressing part that tilts in a plane including
By the balance between the force by which the pressing portion presses the tip portion, the force by which the spring member that is elastically deformed by the tilting of the plug member, and the force by which the clamp insertion hole supports the ferrule, The connector plug is positioned with respect to the clamping device.
[0014]
Further, the second ferrule clamping device of the present invention is a clamp for holding an optical connector plug comprising a ferrule and a plug member engaged with the ferrule so as to restrict the rotation of the ferrule about its axis. In the device
A clamp insertion hole for supporting the inserted ferrule;
In a state where the ferrule is supported by the clamp insertion hole, the tip of the plug member is pressed in a Q direction perpendicular to the P direction parallel to the axis of the ferrule, and the plug member is pressed against the ferrule, A pressing portion that tilts in a plane including the P direction and the Q direction;
An elastic displacement portion that abuts against the tilting plug member and resists the tilting;
The force that the pressing part presses the tip part, the force that the elastic displacement part that elastically deforms due to the tilt of the plug member, and the force that the elastic displacement part repels between the plug member and the ferrule as the plug member tilts. The optical connector plug is positioned with respect to the clamp device by a balance between the acting interaction force and the force with which the clamp insertion hole supports the ferrule.
[0015]
Note that the above interaction force refers to the mutual interaction between the plug member and the ferrule at the portion where the plug member and the ferrule are in direct contact with each other or the portion in which the plug member and ferrule are in direct contact with each other. Means a force acting on the surface, for example, a vertical drag force or a frictional force.
[0016]
In the second ferrule clamping device of the present invention, the elastic displacement portion may be provided at a position substantially opposite to the pressing portion across the ferrule insertion hole.
[0017]
Further, the microscopic interferometer apparatus of the present invention is a microscopic interferometer apparatus for observing interference fringes obtained by causing object light carrying the phase information of a subject and reference light to interfere with each other. The ferrule clamping device is provided.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of a ferrule clamping device and a microscopic interferometer device according to the present invention will be described below with reference to the drawings. First, the overall configuration of the microscopic interferometer apparatus will be described with reference to FIG. FIG. 6 is a perspective view showing a part of the microscopic interferometer apparatus according to the embodiment of the present invention in a broken state.
[0019]
<Microscopic interferometer device>
The microscopic interferometer apparatus 1 shown in FIG. 6 includes a bottom plate 2, a front plate 3 (partially broken and shown), a rear plate 4, a partition plate 5 and a cover case 6 (partially broken and shown). In addition, a power supply unit 7, a control box 8, and an interferometer body unit 10 are provided.
[0020]
The interferometer main body 10 includes an objective lens unit 11, a piezo unit 12, a half mirror / light source unit 13, an imaging lens unit 14, a mirror box 15, and a CCD camera unit 16. Among these, the imaging lens unit 14, the mirror box 15, and the CCD camera unit 16 are attached to a fixed base 17 fixed to the partition plate 5, and the objective lens unit 11, the piezo unit 12, and the half mirror / light source unit. Reference numeral 13 denotes a focus table 18 (partially broken and shown).
[0021]
The focus table 18 includes two upper and lower guide shafts 19A and 19B (one-way) extending in parallel with each other between the front plate 3 and the fixed table 17 in the front-rear direction (the directions of arrows F and B in the figure). It is supported so as to be slidable in the front-rear direction. A coil spring 9 is arranged between the fixed base 17 and the focus base 18, and the focus base 18 is attached to the front (in the direction of arrow F in the figure) due to the elasticity of the coil spring 9. It is energized.
[0022]
Further, the front plate 3 is provided with a focus adjustment screw 20 for moving the focus table 18 to adjust the focus of the interferometer body 10. The focus adjustment screw 20 is screwed into a screw hole (not shown) formed in the front plate 3 so as to be movable in the front-rear direction by rotating around its own axis, and rotates the screw shaft 21. And a knob portion 22 for the purpose. The tip end surface of the screw shaft portion 21 is in contact with a hemispherical convex portion 18 a provided on the front surface portion of the focus table 18. For this reason, the focus adjustment screw 20 moves the focus base 18 in the front-rear direction along the guide shafts 19A and 19B by rotating the knob portion 22 and changing the protruding length of the screw shaft portion 21 from the front plate 3. This makes it possible to adjust the focus.
[0023]
The interferometer body 10 having the above-described configuration divides light from a light source (not shown) with reference light into a minute subject (not shown) held at a predetermined position in front of the objective lens unit 11. The object light reflected and reflected from the subject is caused to interfere with the reference light, and the interference light passes through the imaging lens unit 14, and then an interference fringe is formed on a CCD (not shown). Then, by measuring and analyzing the shape and change of the obtained interference fringes, three-dimensional measurement and physical property measurement of the surface shape of the subject can be performed. The interferometer body 10 can be of various types such as a Milo type, a Michelson type, and a linique type.
[0024]
In addition, an inclination adjusting device 100 is disposed on the front plate 3. The inclination adjusting device 100 has an L-shaped first base member 110 fixed to the front plate 3 and an L-shape similar to the first base member 110, and faces the first base member 110. And a second base member 120 disposed. The second base member 120 is supported so as to be tiltable with respect to the first base member 110 around the fulcrum portion 130, and the fulcrum portion is supported by the first tilt adjustment screw 140 and the second tilt adjustment screw 150. By tilting around an axis extending in the substantially vertical direction from 130 and around an axis extending in the substantially horizontal direction from the fulcrum part 130, the tilt with respect to the first base member 110 can be adjusted biaxially.
[0025]
A clamp holder 200 is attached to the second base member 120 of the tilt adjusting device 100. The clamp holder 200 includes a front step portion 210, a rear step portion 220, and a connecting portion 230 that connects them, and the front step portion 210 is fixed to the second base member 120 by three mounting screws 240. Yes. The rear stage 220 of the clamp holder 200 is located on the front side of the objective lens unit 11, and a holding recess 221 is formed in the center thereof. One embodiment of the present invention is formed in the holding recess 221. The clamp apparatus 300 which concerns on a form is hold | maintained. In addition, the front plate 3 is provided with a power switch 30 for turning on / off the power source of the microscopic interferometer apparatus 1.
[0026]
<Ferrule clamping device (first embodiment)>
Next, a ferrule clamping device according to a first embodiment of the present invention will be described with reference to FIGS. 1 is a cross-sectional view of a clamping device according to a first embodiment of the present invention, FIG. 2 is a front view thereof, FIG. 3 is a perspective view from the front side, and FIG. 4 is a perspective view from the back side.
[0027]
<Configuration of optical connector plug>
A ferrule 420 shown in FIG. 1 is an oblique spherical polishing type ferrule in which one end of an optical fiber 430 is held at the center of the outer diameter of a ferrule body 421 made of, for example, zirconia ceramic. That is, the front end surface 422 of the ferrule 420 is polished into a convex spherical shape so as to be in close contact with the front end surface of a not-shown counterpart ferrule and has a predetermined inclination with respect to the axis (center axis) C of the ferrule 420. It is configured to intersect at an angle and a predetermined inclination direction. Note that the inclination angle θ according to JIS is defined as an angle formed between a plane that is in contact with the tip surface 422 on the axis C of the ferrule 420 and a plane that is orthogonal to the axis C. The inclination direction of the tip surface 422 is determined by the ferrule 420. The tangential plane that is in contact with the tip surface 422 on the axis C and the plane perpendicular to the tangential plane and the plane that includes the axis C extends.
[0028]
Further, a ferrule holder 425 including a flange portion 423 and a cylindrical portion 424 is attached to the rear end portion of the ferrule body 421. The ferrule 420 is accommodated in a cylindrical plug member 410 in a state where a spring member (coil spring) 426 is attached to the cylindrical portion 424, and is moved backward by a spring press ring 411 attached to the rear end portion of the plug member 410. The removal to the front is regulated by a stopper portion 414 formed in an annular shape along the circumferential direction of the inner surface of the plug member 410. Due to the elasticity of the spring member 426, the ferrule 420 is urged by a constant pressure toward the front in the P direction (leftward in FIG. 1) parallel to the axis C, and the front end surface 422 thereof is the front end surface of the counterpart ferrule (not shown). It is comprised so that it may be pressed with respect to.
[0029]
The plug member 410 constitutes an optical connector plug 400 (hereinafter sometimes abbreviated as “plug 400”) that is engaged with a mating plug (not shown) via a sleeve (not shown). A first key groove portion 412 and a second key groove portion 413 are provided at the upper end and the lower end of the tip, respectively. These first and second key groove portions 412 and 413 are used for alignment insertion guides and prevention of removal when the plug 400 is engaged with the mating plug. In the present embodiment, a plane including the central axis D (see FIG. 1) of the first key groove portion 412 and the axis C of the ferrule 420, a plane perpendicular to the front surface 422 of the ferrule 420 on the axis C, and An angle formed with the plane including the axis C is referred to as a ferrule key angle. With respect to the key angle of the ferrule, an allowable range of an error in angular deviation from a standard value is strictly defined by individual standards. The key angle defined by JIS is expressed with reference to the key provided outside the optical connector plug. In the present application, the key angle is 90 degrees around the axis C of the ferrule 420 with respect to the key in JIS. The first keyway 412 provided at the rotated position is used as a reference. Therefore, in the plug 400 of this embodiment, the design value of the key angle of the ferrule is set to 0 degree (90 degrees in JIS).
[0030]
Further, the ferrule 420 is held by the plug member 410 via the ferrule holder 425, and the rotation about the axis C with respect to the plug member 410 causes the ferrule holder 425 and the plug member 410 to be engaged with each other. Is regulated by That is, a pair of key groove portions 427 (only one is shown in FIG. 1) extending in the axis C direction is formed on the flange portion 423 of the ferrule holder 425 at positions facing each other across the ferrule 420, and the plug member A pair of key portions 415 (indicated by phantom lines in FIG. 5) that engage with the pair of key groove portions 427 are formed on the inner surface of 410. When the key groove portion 427 on the flange portion 423 side and the key portion 415 on the plug member 410 side are engaged, the rotation of the ferrule 420 around the axis C with respect to the plug member 410 is restricted, and the key angle of the ferrule is predetermined. It is comprised so that the angle (0 degree) may be made.
[0031]
<Configuration of the clamping device according to the first embodiment>
On the other hand, as shown in FIGS. 1 and 2, the clamping device 300 includes a base 310 made of a circular plate-shaped member, and a substantially annular shape integrally formed with the base 310 on the front side periphery of the base 310. The clamp body 305 which consists of the edge part 320 and the displacement adjustment part 340, and the disk-shaped rotation control body 330 attached to the front surface of the said base part 310 via the screw 331 (refer FIG. 2, FIG. 3) are provided. Become.
[0032]
As shown in FIG. 2, the edge 320 of the clamp body 305 includes three screw holes 321 and a groove 322. The screw hole 321 is a screw for attaching the clamp device 300 to the clamp holder 200 (see FIG. 6), and the groove 322 is engaged with a pin (not shown) provided in the clamp holder 200. Thus, the clamp device 300 is provided so as to be aligned with the clamp holder 200 with high accuracy.
[0033]
As shown in FIG. 1, the base 310 has a notch 350 extending from one side surface (upper part in the drawing) to the other side surface (lower part in the drawing). Two portions facing each other across the notch 350, that is, a support portion 360 located on the front side of the base portion 310 (the rear side in the insertion direction of the ferrule 420), and a back surface side of the base portion 310 (the insertion direction of the ferrule 420) It is partially divided into a displacement part 370 located on the front side.
[0034]
The support 360 forms a cylindrical clamp port 361 that protrudes in the direction of the axis A of the clamp device 300 at the center of the front surface of the base 310, and an inner surface of the clamp port 361. And a fixed ferrule insertion hole 362 formed so as to extend in the direction. The ferrule insertion hole 362 has an inner diameter that is substantially the same as the outer diameter of the ferrule 420, and the support portion 360 connects the ferrule 420 inserted through the clamp port 361 with its axis C and the clamp device 300. The shaft A can be supported so as to overlap each other.
[0035]
The displacement portion 370 is separated from the one side of the base portion 310 by a predetermined distance in a direction substantially perpendicular to the axis A by a hollow portion 351 formed at a tip portion of the notch portion 350 extending beyond the axis A. A thin portion 373 is formed at the position, and the displacement portion 370 is formed to be displaceable in the axis A direction (the insertion direction of the ferrule 420) with the formation position of the thin portion 373 as a fulcrum. Further, the displacement part 370 protrudes from the front end of the ferrule insertion hole 362 in the insertion direction front side when the ferrule 420 is inserted into the ferrule insertion hole 362 (in FIG. And a pressing portion 371 for holding the ferrule 420 inserted into the ferrule insertion hole 362 by pressing in the direction substantially perpendicular to the insertion direction of the ferrule 420 in accordance with the displacement.
[0036]
The displacement adjustment unit 340 adjusts the displacement of the displacement unit 370. As shown in FIG. 1, the displacement adjustment unit 340 includes a screw hole 341 formed at the distal end of the displacement unit 370 so as to extend in the direction of the axis A. A screw insertion hole 342 formed so as to extend in the direction of the axis A in a portion facing the screw hole 341 of the support portion 360, and an adjustment screw 343 inserted from the screw insertion hole 342 toward the screw hole 341. It has.
[0037]
The adjustment screw 343 includes a screw portion 343a that is screwed into the screw hole 341, and a screw base portion 343b to which a lever member 344 for operating the adjustment screw 343 is attached. Further, as shown in FIG. 1, the adjustment screw 343 is attached to the base 310 via a rotation restricting body 330 (a screw insertion hole 332 for the adjusting screw 343 is formed in the rotation restricting body 330. In the screw insertion hole 342, a compression coil spring 345 for urging the displacement portion 370 outward is provided. The adjustment screw 343 is screwed into the screw hole 341 of the displacement portion 370 urged outward by the compression coil spring 345, and the adjustment screw 343 is rotated to rotate the displacement portion 370. Can be adjusted.
[0038]
The lever member 344 has a pin portion 344a that is inserted into a pin insertion hole 343c formed in the screw base portion 343b. After the pin portion 344a is inserted into the pin insertion hole 343c, the lever member 344 is formed at the top of the screw base portion 343b. The screw base 343b is fixed by a screw 346 that is screwed into the formed screw hole 343d. The lever member 344 is operated when the adjustment screw 343 is rotated to adjust the displacement of the displacement portion 370.
[0039]
As shown in FIG. 2, stopper members 380 </ b> A and 380 </ b> B for restricting the rotation range of the lever member 344 are provided on the edge portion 320. The stopper member 380A is for restricting the rotation of the lever member 344 in the clockwise direction in the drawing, and the stopper member 380B is for restricting the rotation of the lever member 344 in the counterclockwise direction in the drawing. It is. The lever member 344 rotates between these two stopper members 380A and 380B (in this embodiment, the rotation angle range is 90 degrees), and the position where the lever member 344 contacts the stopper member 380A is The clamp position for holding the ferrule 420, and the position where the lever member 344 contacts the stopper member 380B is the clamp release position for releasing the holding of the ferrule 420. Further, as shown in FIG. 1, the stopper members 380A and 380B (only the stopper member 380A is shown in FIG. 1) have a screw portion 381 that is screwed into the screw hole 323 formed in the edge portion 320, and the screws The portion 381 is fixed to the edge 320 by being screwed into the screw hole 323.
[0040]
Further, as shown in FIG. 2, two cylindrical engagement pins 390 and 391 serving as clamp body side alignment references are opposed to each other across the axis A of the clamp device 300 on the front surface of the base portion 310. In the position, each is provided so as to extend in the direction of the axis A. The distance from the axis A to each of the two engagement pins 390 and 391 is set to be longer than the distance from the engagement convex part 336 and the pressing part 337 of the rotation restricting part 333 described later to the axis A.
[0041]
On the other hand, the rotation restricting body 330 is provided with two engagement holes 334 and 335 serving as a rotation restricting body side alignment reference. The engagement hole 334 has a round hole shape, and its inner diameter is formed to be approximately the same as the outer diameter of the engagement pin 390. On the other hand, the engagement hole 335 is a long hole extending in the radial direction of the shaft A, and its short diameter (the length in the circumferential direction of the shaft A) is substantially the same as the outer diameter of the engagement pin 391. The major axis (the length in the radial direction of the shaft A) is slightly larger than the outer diameter of the engagement pin 391. When the rotation restricting body 330 is attached to the clamp body 305, the engagement holes 334 and 335 are aligned and engaged with the engagement pins 390 and 391, respectively. Therefore, it is configured to be positioned with high accuracy.
[0042]
Furthermore, a rotation restricting portion 333 for restricting the rotation of the plug member 410 held by the clamp device 300 is formed at the center of the rotation restricting body 330. The overall shape of the rotation restricting portion 333 is formed to be slightly larger than the outer cross-sectional shape of the plug member 410 to such an extent that the manufacturing tolerance of the plug member 410 can be allowed. For this reason, in a state where only the plug member 410 is mounted on the rotation restricting portion 333, a minute backlash within the tolerance is generated between the plug member 410 and the plug member 410. In order to suppress this play, the rotation restricting portion 333 causes the second key groove portion 413 of the plug member 410 (see FIG. 1) to be orthogonal to the P direction when the ferrule 420 is inserted into the ferrule insertion hole 362. And a pressing portion 337 that presses upward in the Q direction and tilts the plug member 410 with respect to the ferrule 420 in a plane including the P direction and the Q direction.
[0043]
Specifically, in FIG. 5, the distance from the axis A of the clamping device 300 to the pressing portion 337 is set to be shorter than the distance from the axis C of the ferrule 420 to the second key groove portion 413. A corner portion of the portion 337 facing the plug 400 is formed to be a downward inclined surface toward the plug 400. Thus, when the ferrule 420 is inserted into the ferrule insertion hole 362, the pressing portion 337 presses the second key groove portion 413 of the plug member 410 upward while pressing the ferrule 420 against the ferrule 420. Thus, the plug member 410 is tilted along the paper surface. In more detail, in FIG. 2, both end portions in the left-right direction of the pressing portion 337 are formed so as to protrude slightly above the center portion in the left-right direction, and the pressing portion 337 presses the second key groove portion 413. By this force, a moment around the axis A is generated in the plug member 410.
[0044]
In the rotation restricting portion 333, an engaging convex portion 336 is provided at a position opposite to the pressing portion 337 with the ferrule insertion hole 362 interposed therebetween. As will be described later, in the clamping device 300 according to the first embodiment, the force by which the pressing portion 337 presses the plug member 410, the force by which the spring member 426 is repelled by the tilting of the plug member 410, and the clamp insertion hole 362 The plug 400 is positioned with respect to the clamping device 300 by balancing with the force that supports the ferrule 420. The engagement convex portion 336 normally does not engage with the plug 400 side, and when the plug 400 is largely displaced due to some strong force acting on the plug 400, the engagement convex portion 336 engages with the first key groove portion 412 to It is configured to have a function as a stopper for preventing 400 or more displacements.
[0045]
Also, as shown in FIG. 4, various holes are formed on the back surface of the base portion 310 of the clamping device 300. The hole 311 is a through hole through which the screw 331 for fixing the rotation restricting portion 333 to the base 310 is inserted, and the hole 312 includes the engagement pins 390 and 391 for positioning the rotation restricting body 330. It is a through hole to be inserted. Both of the holes 311 and 312 penetrate from the front side to the back side of the base 310 for the convenience of processing. The screw 331 and the tip of the engaging pin 390 inserted through these holes 311 and 312 are formed in the notch 350. It has only reached the position before this.
[0046]
In addition, an observation hole 372 for observing the tip of the ferrule 420 is formed at the center of the back surface of the base 310. As shown in FIG. 1, the observation hole 372 is provided so as to be located on the axis A, and is formed to be slightly larger than the ferrule insertion hole 362.
[0047]
<Operation of the clamping device according to the first embodiment>
The clamp device 300 holds the optical connector plug 400 as follows. FIG. 5 is a view for explaining the operation of the clamp device 300, and schematically shows a state in which the clamp device 300 holds the optical connector plug 400. FIG.
[0048]
First, the lever member 344 is operated to a position where it comes into contact with the stopper member 380B, that is, a clamp release position (see FIG. 2). At this time, the displacement portion 370 is maintained in a non-displaced state, that is, in a state where the interval between the cutout portions 350 is constant over the entire length (see FIG. 1).
[0049]
Next, the ferrule 420 is inserted into the ferrule insertion hole 362 from the clamp port 361 of the clamp device 300. At the time of this insertion, as shown in FIG. 5, the pressing portion 337 of the rotation restricting portion 333 (see FIG. 1) presses the second key groove portion 413 of the plug member 410 upward in the Q direction in the drawing, and the ferrule The plug member 410 is tilted with respect to 420 along the paper surface. As the plug member 410 tilts, the following force acts on the optical connector 400.
[0050]
That is, the repulsive force of the spring member 426 that elastically deforms between the ferrule 420 and the plug member 410 due to the tilt of the plug member 410 acts between the plug member 410, the ferrule 420, and the spring member 426. Also, a force acts on the contact portion between the plug member 410 and the ferrule 420. For example, in the contact portion between the key portion 415 on the plug member 410 side and the key groove portion 427 on the ferrule 420 side, or on the contact portion between the stopper portion 414 on the plug member 410 side and the flange portion 423 on the ferrule 420 side, Forces such as normal drag and friction force interact with each other. Further, a force that the ferrule insertion hole 362 supports the ferrule 420 is applied.
[0051]
In the clamping device 300 according to the first embodiment, the pressing member 337 on the clamping device 300 side presses the second key groove 413 on the plug member 410 side, and the spring member 426 that is elastically deformed by the tilt of the plug member 410. Is configured such that the force of repelling the force and the force of the clamp insertion hole 362 supporting the ferrule 420 are balanced. When these forces are balanced, the backlash between the plug member 410 and the clamping device 300 is suppressed, and the positioning between the plug member 410 and the ferrule 420 is performed between them. The backlash is suppressed and positioning in the direction around the axis between them is performed. For this reason, it is possible to obtain highly accurate reproducibility with respect to positioning when mounting the optical connector plug 400 to the clamp device 300, particularly positioning of the optical connector plug 400 in the direction around the axis.
[0052]
After positioning the optical connector plug 400 with respect to the clamp device 300, the lever member 344 shown in FIGS. 1 and 2 is operated to a position where it abuts against the stopper member 380A, that is, the clamp position. At this time, the screw portion 343a of the adjustment screw 343 rotates clockwise, and the rotation portion causes the displacement portion 370 screwed with the screw portion 343a to resist the urging force of the compression coil spring 345, while The thin wall portion 373 is displaced in a direction approaching the support portion 360 with the fulcrum as a fulcrum. Due to this displacement, the pressing portion 371 of the displacement portion 370 presses the tip portion of the ferrule 420 protruding from the front end of the ferrule insertion hole 362 in the direction substantially perpendicular to the insertion direction of the ferrule 420, The ferrule 420 inserted into the ferrule insertion hole 362 is held so as not to be removed.
[0053]
When releasing the holding of the ferrule 420, the lever member 344 is operated to the clamp release position. At this time, the screw part 343a of the adjustment screw 343 rotates counterclockwise, and the rotation part causes the displacement part 370 screwed with the screw part 343a to move away from the support part 360 with the thin part 373 as a fulcrum. It is displaced to. Due to this displacement, the interval between the cutout portions 350 returns to a constant state over the entire length thereof, and the pressing of the ferrule 420 by the pressing portion 371 of the displacement portion 370 is released, and the ferrule 420 is inserted through the ferrule 420. It can be removed from the hole 362.
[0054]
<Ferrule clamping device (second embodiment)>
Next, a ferrule clamping device according to a second embodiment of the present invention will be described with reference to FIGS. FIG. 7 is a front view of a clamp device 300A according to the second embodiment of the present invention, and FIG. 8 is a diagram for explaining the operation thereof, and schematically shows a state in which the clamp device 300A holds the optical connector plug 400. ing. In the ferrule clamping device 300A according to the second embodiment, the same reference numerals used in FIG. 1 to FIG. 6 are used for portions common to the ferrule clamping device 300 according to the first embodiment. It will also be used in FIG. 8 and its detailed description is omitted.
[0055]
<Configuration of Clamping Device According to Second Embodiment>
The clamp device 300A according to the second embodiment shown in FIGS. 7 and 8 differs from the clamp device 300 according to the first embodiment in that the rotation restricting body 330A is configured as follows. Yes. That is, in the rotation restricting body 330A, as shown in FIG. 7, in the rotation restricting portion 333, a groove portion 338 formed in a substantially L shape is formed at a position opposite to the pressing portion 337 across the ferrule insertion hole 362. A substantially L-shaped elastic displacement portion 339 extending along the groove portion 338 is provided in the groove portion. The elastic displacement portion 339 is formed integrally with the rotation restricting body 330A. When the tip portion 339a is pressed upward in the drawing, the arm portion 339b extending in the horizontal direction in the drawing is elastically deformed so as to bend upward. It is supposed to be. The configuration other than the groove portion 338 and the elastic displacement portion 339 is the same as that of the clamp device 300 according to the first embodiment.
[0056]
<Operation of the clamping device according to the second embodiment>
The clamp device 300A positions the optical connector plug 400 as follows. That is, when the ferrule 420 is inserted into the ferrule insertion hole 362 from the clamp port 361 of the clamp device 300A, the pressing portion 337 of the rotation restricting portion 333 (see FIG. 7) is moved to the first position of the plug member 410 as shown in FIG. The second key groove portion 413 is pressed upward in the Q direction in the drawing, and the plug member 410 is tilted along the paper surface with respect to the ferrule 420. As the plug member 410 tilts, the following force acts on the optical connector 400.
[0057]
That is, due to the tilting of the plug member 410, the distal end portion 339a abuts on the first key groove portion 412 of the plug member 410, and a repulsive force of the elastic displacement portion 339 due to elastic deformation of the arm portion 339b acts. . Further, due to the tilting of the plug member 410, a force acts between the plug member 410 and the ferrule 420. For example, the contact part between the key part 415 on the plug member 410 side and the key groove part 427 on the ferrule 420 side, the contact part between the stopper part 414 on the plug member 410 side and the flange part 423 on the ferrule 420 side, etc. Forces such as vertical drag and frictional force interact with each other at the portion where they directly abut. In addition, an indirect force acts between the plug member 410 and the ferrule 420 via the spring member 426. Further, a force that the ferrule insertion hole 362 supports the ferrule 420 is applied.
[0058]
In the clamp device 300A according to the second embodiment, the elastic displacement portion that is elastically deformed by the force by which the pressing portion 337 on the clamping device 300A side presses the second key groove portion 413 on the plug member 410 side and the tilt of the plug member 410. The force that repels 339, the force that interacts between the plug member 410 and the ferrule 420, and the force that the clamp insertion hole 362 supports the ferrule 420 are balanced. When these forces are balanced, the backlash between the plug member 410 and the clamp device 300A is suppressed, and the positioning between the plug member 410 and the ferrule 420 is performed between the plug member 410 and the ferrule 420. The backlash is suppressed and positioning in the direction around the axis between them is performed. For this reason, it is possible to obtain highly accurate reproducibility with respect to positioning when mounting the optical connector plug 400 to the clamp device 300A, particularly positioning of the optical connector plug 400 in the direction around the axis.
[0059]
The clamping device 300A according to the second embodiment can be applied to the optical connector plug 400 that does not include the spring member 426. The operation of the clamping device 300A after the optical connector plug 400 is positioned with respect to the clamping device 300A is the same as that of the clamping device 300 according to the first embodiment, and the description thereof is omitted.
[0060]
As mentioned above, although embodiment of this invention was described, this invention is not restricted to embodiment mentioned above, A change of a various aspect is possible. For example, in the second embodiment, the elastic displacement portion 339 is formed integrally with the rotation restricting body 330A and the arm portion 339b is elastically deformed. However, it is separate from the rotation restricting body 330A. The formed member may be urged by a spring member and brought into contact with the plug member 410, and the plug member 410 may be prevented from tilting by a force repelling the spring member. The elastic displacement portion 339 is not limited to the position opposite to the pressing portion 337 across the ferrule insertion hole 362 but can be provided at any position that can resist the tilting of the plug member 410.
[0061]
In the above embodiment, the clamp body 305 and the rotation restricting bodies 330 and 330A are separate from each other. However, the rotation restricting bodies 330 and 330A are not provided, and the pressing portion 337 and the elastic displacement portion 339 are connected to the clamp body 305. You may make it form in.
[0062]
In the above embodiment, the ferrule to be measured and the reference ferrule are both oblique spherical polishing ferrules. These ferrules include an oblique flat polishing ferrule and a vertical polishing die (the tip surface is It may be a flat or spherical ferrule.
[0063]
Further, in the above embodiment, the ferrule is made of zirconia ceramic, but the ferrule may be made of other materials such as stainless steel or plastic. Various types of optical fibers such as a single mode type and a multimode type can be used for the optical fiber held by the ferrule at its axial center.
[0064]
【The invention's effect】
As described above in detail, according to the clamping device of the first ferrule of the present invention, the pressing portion on the clamping device side presses the distal end portion of the plug member, and the plug member tilts by this force. The balance between the force that the spring member that elastically deforms repels and the force that the clamp insertion hole supports the ferrule causes the play between the clamp device and the plug member, or between the ferrule and the plug member. The play can be suppressed, and high-precision reproducibility can be obtained with respect to positioning when mounting the optical connector plug to the clamp device, particularly positioning in the direction around the axis of the optical connector plug.
[0065]
According to the second ferrule clamping device of the present invention, the pressing portion on the clamping device side presses the distal end portion of the plug member, and the elastic displacement that abuts against the plug member tilted by this force and elastically deforms. The clamping device and the plug member by balancing the force of repulsion of the part, the force acting between the plug member and the ferrule as the plug member tilts, and the force of the clamp insertion hole supporting the ferrule. It is possible to suppress the play occurring between the ferrule and the plug member, and the positioning when mounting the optical connector plug to the clamp device, especially the positioning of the optical connector plug in the direction around the axis, is highly accurate. Reproducibility can be obtained.
[0066]
Further, according to the microscopic interferometer device of the present invention, the optical connector plug can be attached to the clamp device with high accuracy and good reproducibility, so that the ferrule measurement analysis can be performed with high reproducibility and high accuracy. It becomes possible.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing a configuration of a ferrule clamping device according to a first embodiment of the present invention. FIG. 2 is a front view of the clamping device shown in FIG. 1. FIG. 3 is an external perspective view of the clamping device shown in FIG. Figure (front side)
4 is an external perspective view (back side) of the clamp device shown in FIG. 1. FIG.
5 is a diagram showing the operation of the clamp device shown in FIG. 1. FIG. 6 is a perspective view showing the configuration of a microscopic interferometer device according to an embodiment of the invention. FIG. 7 is a diagram showing a second embodiment of the invention. FIG. 8 is a front view showing the configuration of the ferrule clamping device. FIG. 8 is a diagram showing the operation of the clamping device shown in FIG.
DESCRIPTION OF SYMBOLS 1 Microscopic interferometer apparatus 2 Bottom plate 3 Front plate 4 Rear plate 5 Partition plate 6 Cover case 7 Power supply unit 8 Control box 9 Coil spring 10 Interferometer body unit 11 Objective lens unit 12 Piezo unit 13 Half mirror / light source unit 14 Imaging lens unit 15 Mirror box 16 CCD camera unit 17 Fixed base 18 Focus base 18a Convex parts 19A, 19B Guide shaft 20 Focus adjustment screw 21 Screw shaft part 22 Knob part 30 Power switch 100 Tilt adjustment device 110 First base member 120 Second base The member 130 The fulcrum part 140 The first inclination adjusting screw 150 The second inclination adjusting screw 200 The clamp holder 210 The front stage part 220 The rear stage part 221 The holding recessed part 230 The connecting part 240 The mounting screw 300 The clamp device (first embodiment)
300A Clamp device (second embodiment)
305 Clamp body 310 Base part 311, 312 Hole part 320 Edge part 321 Screw hole 322 Groove part 323 Screw hole 330, 330A Rotation restriction body 331 Screw 332 Screw insertion hole 333 Rotation restriction part 334, 335 Engagement hole 336 Engagement convex part 337 Press Portion 338 groove portion 339 elastic displacement portion 339a tip portion 339b arm portion 340 displacement adjustment portion 341 screw hole 342 screw insertion hole 343 adjustment screw 343a screw portion 343b screw base portion 343c pin insertion hole 343d screw hole 344 lever member 344a pin portion 345 compression coil spring 346 Screw 350 Notch 351 Cavity 360 Supporting part 361 Clamp port 362 Ferrule insertion hole 370 Displacement part 371 Pressing part 372 Observation hole 373 Thin part 380A, 380B Stopper member 381 Screw part 390, 391 Engaging pin 400 Optical connector Plug (plug)
410 Plug member 411 Spring retainer ring 412 First key groove portion 413 Second key groove portion 414 Stopper portion 415 Key portion 420 Ferrule 421 Ferrule main body 422 Ferrule distal end surface 423 Hook portion 424 Cylindrical portion 425 Ferrule holder 426 Spring member 427 Key Groove 430 Optical fiber A Clamping device axis C Ferrule axes F, B, P, Q Direction of arrow θ Indicates the angle of inclination of the ferrule tip

Claims (4)

A ferrule, a plug member engaged with the ferrule so as to restrict rotation of the ferrule about the axis, and a P direction parallel to the ferrule axis interposed between the plug member and the ferrule In a clamp device for holding an optical connector plug having a spring member biased to
A clamp insertion hole for supporting the inserted ferrule;
In a state where the ferrule is supported by the clamp insertion hole, the tip of the plug member is pressed in the Q direction orthogonal to the P direction, and the plug member is pressed against the ferrule in the P direction and the Q direction. And a pressing part that tilts in a plane including
By the balance between the force by which the pressing portion presses the tip portion, the force by which the spring member that is elastically deformed by the tilting of the plug member, and the force by which the clamp insertion hole supports the ferrule, A ferrule clamping device, wherein a connector plug is positioned with respect to the clamping device. In a clamp device that holds an optical connector plug that includes a ferrule and a plug member that engages with the ferrule so as to restrict rotation of the ferrule about its axis.
A clamp insertion hole for supporting the inserted ferrule;
In a state where the ferrule is supported by the clamp insertion hole, the tip of the plug member is pressed in a Q direction perpendicular to the P direction parallel to the axis of the ferrule, and the plug member is pressed against the ferrule, A pressing portion that tilts in a plane including the P direction and the Q direction;
An elastic displacement portion that abuts against the tilting plug member and resists the tilting;
The force that the pressing part presses the tip part, the force that the elastic displacement part that elastically deforms due to the tilt of the plug member, and the force that the elastic displacement part repels between the plug member and the ferrule as the plug member tilts. A ferrule clamping device, wherein the optical connector plug is positioned with respect to the clamping device by balancing a working interaction force and a force by which the clamp insertion hole supports the ferrule. 3. The ferrule clamping device according to claim 2, wherein the elastic displacement portion is provided at a position substantially opposite to the pressing portion with the ferrule insertion hole interposed therebetween. In a microscopic interferometer device for observing interference fringes obtained by causing object light carrying reference information of an object to interfere with reference light,
A microscopic interferometer device comprising the ferrule clamping device according to any one of claims 1 to 3.

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