JP2005066488A - Work adsorption table and liquid drop ejection device provided with this, method for manufacturing electro-optical device, electro-optical device and electronic instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a work adsorption table exhibiting compositive function to a loaded work and a liquid drop ejection device provided with the same and others. <P>SOLUTION: The work adsorption table 152 of the liquid drop ejection device 1 for carrying out drawing on the flexible work W is provided with an adsorption table body 183; a valve/pipes part 553/572 for carrying out vacuum suction of the work W through an adsorption groove part 211 formed on a surface of the adsorption table body 183 and continued to a vacuum suction source 571; a support base 181 for supporting the adsorption table body 183; a lift up device 261 for lifting the work W between a set position where it is placed on the adsorption table body 183 and an upper conveying-in/conveying out position 131; and a pre-alignment device 262 arranged at a gap between the adsorption table body 183 and the support base 181 and setting the work W in the positioning state. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a work suction table of a liquid drop discharge apparatus for performing drawing by discharging a functional liquid onto a work while moving a flexible work with respect to a functional liquid drop discharge head into which the functional liquid has been introduced. The present invention relates to a droplet discharge device, an electro-optical device manufacturing method, an electro-optical device, and an electronic apparatus.

As a conventional workpiece suction table (suction stage), one that is incorporated in a die coater used in a color filter manufacturing process is known (see, for example, Patent Document 1). The suction stage includes a plurality of suction holes formed on the upper surface thereof, a chamber formed in the interior thereof and connected to the suction holes, a negative pressure source and a positive pressure source connected to the chamber, and penetrates the suction stage. A plurality of lift-up pins and a pair of cylinders for raising and lowering them are provided. The pair of cylinders are fixed to the lower surface of the suction stage, and a plurality of lift-up pins are divided into left and right parts so that they can be lifted up independently. In addition, a pair of slide legs that slide on the guide rail are provided on the lower surfaces of the left and right ends of the suction stage, and the suction stage reciprocates on the guide rail by a feed mechanism that is attached to the guide rail.
JP 9-192567 A

  In such a conventional workpiece suction table, the workpiece can be appropriately pulled away from the workpiece suction table by the lift-up pin. However, when positioning and setting the workpiece on the workpiece suction table (pre-alignment), positioning is separately performed. It is necessary to use a jig or the like, and there are problems that it takes time to work and makes the work complicated.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a work suction table that exhibits a composite function with respect to a work to be mounted, a droplet discharge device including the work suction table, a method for manufacturing an electro-optical device, an electro-optical device, and an electronic apparatus. .

  The workpiece suction table of the present invention is a workpiece suction of a droplet discharge device that performs drawing by discharging a functional liquid onto a workpiece while moving the flexible workpiece with respect to a functional droplet discharge head into which the functional liquid is introduced. In the table, vacuum suction and vacuum breakage of the workpiece are performed through the suction table body on which the workpiece is set directly, the suction groove portion formed on the surface of the suction table body and the suction hole portion connected to the suction groove portion, and the vacuum suction source Between the set position where the valve / pipe section that is connected, the support base that supports the suction table main body via a plurality of support members, and the workpiece in the suction-released state are placed on the suction table main body, and the carry-in / out position above it Is installed in the gap between the lift-up device that lifts and lowers, and the suction table body and the support base, and sets the workpiece on the suction table body in a positioned state A pre-alignment device that is characterized by comprising a.

  According to this configuration, when a workpiece is loaded, the workpiece is first placed on the surface of the suction table body by lowering the workpiece received at the loading / unloading position to the set position by the lift-up device. With the alignment device, the workpiece is set on the suction table body in a positioning state, and in this state, the valve and piping connected to the vacuum suction source are operated, so that the workpiece is set immovably and appropriately on the suction table body. Is done. On the other hand, when unloading the workpiece, first break the vacuum with the valve / pipe section to release the suction state of the workpiece with the suction table body, and then lift the workpiece from the set position to the loading / unloading position with the lift-up device. Let As described above, since the workpiece is set and separated by the lift-up device and the pre-alignment device arranged in the gap between the suction table main body and the support base, the work on the suction table main body is handled appropriately and properly. These operations can be easily performed, and these operations can be performed even when the work suction table itself is moving.

  In this case, the lift-up device is loosely inserted into a large number of through holes formed in the suction table main body, and is disposed in the gap between the large number of lift-up pins that push up the workpiece from below and the suction table main body and the support base. A pin support plate provided with a large number of lift-up pins, and a vertical movement mechanism for moving the workpiece up and down between the set position and the loading / unloading position via the pin support plate and the numerous lift-up pins. It is preferable.

  According to this configuration, a large number of lift-up pins can be moved up and down via the pin support plate by the vertical movement mechanism, which is particularly useful when handling a work having flexibility.

  In these cases, the pre-alignment apparatus positions at least a pair of X clamping pieces that position the workpiece placed on the suction table main body so as to clamp the workpiece in the X axis direction, and clamp the workpiece in the Y axis direction. At least a pair of Y holding pieces, at least a pair of X holding pieces moving mechanisms for moving each X holding piece from a standby position in the gap to a holding position for holding the workpiece, and each Y holding piece in the gap It is preferable to have at least a pair of Y clamping piece moving mechanisms that move between the standby position and the clamping position for clamping the workpiece.

  According to this configuration, the workpiece can be positioned (pre-aligned) with respect to the suction table body with a simple structure. Further, each X holding piece moving mechanism and each Y holding piece moving mechanism moves each X holding piece and each Y holding piece between the standby position and the holding position in the gap between the suction table main body and the support base, respectively. Therefore, the standby X holding piece and Y holding piece do not interfere with the functional liquid droplet ejection head and other peripheral devices.

  In these cases, the plurality of strut members are composed of a plurality of strut members that support the suction table body, and each strut member incorporates a height adjustment mechanism that minutely moves the suction table body vertically. It is preferable.

  According to this configuration, the suction table main body can be appropriately supported in a state where the apparatus space is secured on the support base, and the parallelism of the suction table main body with respect to the horizontal plane can be appropriately adjusted. Thereby, even if the workpiece | work from which thickness differs is introduce | transduced on an adsorption | suction table main body, the workpiece | work gap between functional droplet discharge heads can be maintained appropriately.

  In these cases, it is preferable to further include a static eliminator that neutralizes static electricity generated when the workpiece is pulled away from the set position toward the loading / unloading position by irradiating with ionized light for ionizing air. .

  Similarly, it is preferable to further include a static eliminator that neutralizes static electricity generated when the work is pulled away from the set position toward the loading / unloading position by blowing ionized air.

  According to these configurations, static electricity due to so-called peeling electrification can be eliminated by irradiation with ionized light or blown ionized air, and the functional droplet drawn on the workpiece is effectively prevented from being damaged by the static electricity. be able to. Further, the static elimination work by the static eliminator can be performed even when the work suction table itself is moving.

  In this case, the lift-up device is configured to be able to partially lift the workpiece with respect to the suction table body, and the static eliminator includes an ionizing light irradiation mechanism that irradiates ionizing light, an ionizing light irradiation mechanism, and a lift-up device. Control means for controlling the driving of the workpiece, and the control means lifts up another part in a state where a part of the workpiece is in contact with the suction table body, and then the space between the workpiece and the suction table body. It is preferable to irradiate with ionized light and lift up again so that the workpiece is pulled away from the suction table body in this irradiated state.

  Similarly, the lift-up device is configured to be able to partially lift the workpiece with respect to the suction table body, and the static eliminator includes an ionized air blow mechanism that blows ionized air, an ion air blow mechanism, and a lift-up device. Control means for controlling driving, and the control means lifts up another part in a state where a part of the work is in contact with the suction table body, and then in the space between the work and the suction table body. It is preferable to blow up ionized air and lift up again so that the workpiece is pulled away from the suction table body in this blown state.

  According to these configurations, the peeling area can be reduced and the generated electrostatic capacity can be reduced by lifting the other part in a state where a part of the workpiece is in contact with the suction table body. it can. In addition, after lifting up, the work is pulled away from the suction table body while irradiating the space between the work and the suction table body with ionized light or blowing ionized air. It can be carried out.

  In these cases, in order to align the functional liquid droplet ejection head, a head alignment camera that images the functional liquid droplet ejection head and the sub-carriage on which the functional liquid droplet ejection head is mounted is further provided. It is preferably supported by a bracket extending laterally from the support base.

  According to this configuration, the head alignment camera can be moved using the work suction table that is movable with respect to the functional liquid droplet ejection head, so there is no need to provide a moving mechanism dedicated to the head alignment camera. Including device configuration can be simplified. In particular, since the positional relationship between the functional liquid droplet ejection head and the work suction table is maintained with high accuracy, imaging with a head alignment camera can be performed with high accuracy.

  In these cases, a nozzle observation camera for imaging each nozzle of the functional liquid droplet ejection head is further provided, and the nozzle observation camera is supported by the support base and faces the camera opening formed in the suction table body from below. It is preferable.

  According to this configuration, since the movement of the nozzle observation camera can be performed using the work suction table movable with respect to the functional liquid droplet ejection head, there is no need to provide a movement mechanism dedicated to the nozzle observation camera, and the control system Including device configuration can be simplified. In particular, since the positional relationship between the functional liquid droplet ejection head and the work suction table is maintained with high accuracy, imaging with a nozzle observation camera can be performed with high accuracy. Moreover, since the nozzle observation camera faces the camera opening formed in the suction table body from below, the space on the support base can be effectively utilized.

  In these cases, the pre-alignment apparatus is driven by a plurality of air cylinders that share the compressed air source supported by the support base, and has a plurality of control valves and branch manifolds that control the driving of the plurality of air cylinders, The plurality of control valves and the branch manifold are preferably unitized and supported by a support base.

  The air pipe (air tube) that connects the compressed air source and the movable workpiece suction table is fixed on the compressed air source side and movable on the workpiece suction table side, and the handling becomes complicated. According to the above configuration, since the plurality of control valves and the branch manifold are unitized and supported by the support base, the number of the above-described routing pipes can be extremely reduced.

  In these cases, it is preferable to further include a pair of flushing units that are attached to both ends of the suction table body in the moving direction and receive the functional liquid droplets discarded by the functional liquid droplet ejection head.

  According to this configuration, the pair of flushing boxes enables frequent discard discharge by the functional liquid droplet discharge head during the drawing operation. Therefore, the functional liquid droplet ejection head (nozzles thereof) can always be kept in an optimum state without affecting the tact time of the workpiece processing (drawing).

  In this case, each flushing unit includes a flushing box that receives and discharges functional droplets, a use position in which the upper end surface of the flushing box is flush with the surface of the workpiece, and a standby position in which the flushing box is lowered from the use position. And a box lifting mechanism that lifts and lowers between them, and the box lifting mechanism is preferably fixed to the support base.

  According to this configuration, even if workpieces having different thicknesses are introduced, the height of the flushing box can be adjusted to an appropriate position, and the functional liquid for disposal discharge can be scattered outside the flushing box. Can be prevented as much as possible. Further, by lowering the flushing box from the use position to the standby position, the flushing box does not get in the way when the workpiece is loaded and unloaded.

  The droplet discharge device of the present invention is characterized by including the above-described workpiece suction table.

  According to this configuration, the workpiece can be positioned and separated while the workpiece suction table is moving, and the gap space of the workpiece suction table can be used effectively.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film-forming unit made of functional droplets is formed on a workpiece using the above-described droplet discharge device.

  In addition, an electro-optical device according to the present invention is characterized in that the above-described droplet discharge device is used to form a film forming portion using functional droplets on a workpiece.

  According to these configurations, the electro-optical device can be efficiently manufactured. As the electro-optical device (flat panel display), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  An electronic apparatus according to the present invention includes the above-described electro-optical device.

  In this case, the electronic apparatus corresponds to various electric products in addition to a mobile phone and a personal computer equipped with a so-called flat panel display.

  According to the work suction table of the present invention, it is possible to perform positioning and separation of the work while moving, and to perform a composite function with respect to the work to be mounted, as well as a gap space between the suction table body and the support base Can be used effectively.

  According to the droplet discharge device, the electro-optical device manufacturing method, the electro-optical device, and the electronic apparatus of the present invention, the electro-optical device can be efficiently manufactured and can be manufactured at low cost.

  Hereinafter, a droplet discharge device to which the present invention is applied will be described with reference to the accompanying drawings. This droplet discharge device is incorporated in a so-called flat display production line, and emits light that becomes a color filter of a liquid crystal display device or each pixel of an organic EL device by a droplet discharge method using a functional droplet discharge head. An element or the like is formed.

  As shown in FIGS. 1 to 4, the droplet discharge device 1 is configured by accommodating a discharge device main body 2 and a tank cabinet 3 provided therewith in a chamber device 4 into which inert gas or dry air is introduced. Has been. The discharge device main body 2 includes a large base 11 installed on the floor and a stone surface plate 12 placed on the base 11. As shown in these drawings, a drawing device 21 is widely arranged on the gantry 11 via a stone surface plate 12, and the drawing device 21 is placed on a machine base 13 removed from the stone surface plate 12. A maintenance device 22 is disposed so as to be attached. The discharge device body 2 includes a liquid supply / recovery device 23, and the tank cabinet 3 accommodates tanks of the liquid supply / recovery device 23 that stores the functional liquid supplied to the drawing device 21 (details). Will be described later). Further, the discharge device main body 2 controls the air supply device 24 for supplying compressed air (inert gas or dry air) to each device, the air suction device 25 for sucking and setting the workpiece W, and the respective devices. In addition to the control device 26, various auxiliary devices such as a work recognition camera 236 and a head recognition camera 225 are provided.

  In this droplet discharge device 1, while supplying the functional liquid from the liquid supply / recovery device 23, the functional liquid is discharged by the functional droplet discharge head 51 mounted on the drawing device 21 onto the work W sucked and set by the air suction device 25. In addition to performing drawing by discharging droplets, maintenance of the functional droplet discharge head 51 is appropriately performed by the maintenance device 22. As described above, the discharge device main body 2 is accommodated in the chamber device 4, and an inert gas into which most processes such as a drawing process for the workpiece W and a maintenance process for the functional liquid droplet discharge head 51 are introduced. Or in a dry air atmosphere (see FIG. 1).

  Here, each device of the droplet discharge device 1 will be briefly described. The drawing apparatus 21 includes a discharge means 31 for discharging functional liquid onto a work W set on a set table 141 (described later), and a work discharge for discharging or attaching (detaching) the work W to or from the set table 141. Means 32. The ejection means 31 is for a head unit 41 (subcarriage) having a functional liquid droplet ejection head 51, a main carriage 42 that detachably supports the head unit 41, and a workpiece W set on a set table 141 (described later). And an XY movement mechanism 43 that relatively moves the head unit 41.

  As shown in FIG. 5, the head unit 41 includes a head plate 52 on which the functional liquid droplet ejection head 51 is mounted via a head holding member (not shown), and a head support member 53 configured to be detachable from the main carriage 42. And. A joint unit 54 having a pipe joint 55 is disposed at the end of the head plate 52, and one end of the pipe joint 55 is a head side pipe member (not shown) from the functional liquid droplet ejection head 51 (pipe adapter 65). The other end is connected to a device-side piping member (not shown) from a functional liquid supply mechanism (not shown) that supplies the functional liquid to the functional liquid droplet ejection head 51.

  The head unit 41 includes a first head unit in which twelve functional liquid droplet ejection heads 51 and twelve pipe joints 55 are mounted on the head plate 52, and two functional liquid droplet ejection heads 51 and 2 on the head plate 52. Two types of second head units equipped with a plurality of pipe joints 55 are prepared, and the functional liquid droplet ejection heads 51 of the first head unit and the second head unit follow the same arrangement pattern, It is attached to the head plate 52 in a state inclined at a predetermined angle. The first head unit and the second head unit have the same mounting form with respect to the main carriage 42, and are configured to be interchangeable. However, the number and arrangement of the functional liquid droplet ejection heads 51 are not limited to those described above and are arbitrary. 5, 7 and 8 show the first head unit.

  As shown in FIG. 6, the functional liquid droplet ejection head 51 has a so-called double structure, a functional liquid introduction part 61 having two connection needles 62, and a dual head substrate that is continuous with the functional liquid introduction part 61. 63, and a head main body 64 which is connected to the lower side of the functional liquid introducing portion 61 and has an in-head flow path filled with the functional liquid therein. Each connection needle 62 is connected to the head side piping member via a pipe adapter 65, and the functional liquid droplet ejection head 51 is supplied with a functional liquid from each connection needle 62. The head main body 64 is composed of a cavity 71 (piezoelectric element) and a nozzle plate 72 having a nozzle surface 73. On the lower surface of the nozzle surface 73, two rows of nozzle rows composed of a large number (180) of discharge nozzles 74 are formed. In the functional liquid droplet ejection head 51, the functional liquid is ejected from the ejection nozzle 74 by the pump action of the cavity 71.

  As shown in FIGS. 7 and 8, the main carriage 42 has a carriage body 81 that detachably supports a head unit 41 (first head unit and second head unit), a carriage body 81 suspended, and a Y axis. A suspension member 82 supported by the table 122. The suspension member 82 includes a head rotation mechanism 83 that rotates the head unit 41 in the θ-axis direction, and a head lift that moves the head unit 41 up and down. A mechanism 84 is incorporated. As shown in both drawings, the suspension member 82 is bridged between a pair of head fixing members 91 fixed to a bridge plate 241 (described later) of the Y-axis table 122 and the upper surfaces of the pair of head fixing members 91. The head support plate 92 is supported by the head support plate 92. The head lifting mechanism 84 is connected to the upper portion of the head rotation mechanism 83.

  The head rotation mechanism 83 is used for angle correction or the like in the horizontal plane of the head unit 41 with respect to the workpiece W, and includes a head rotation unit 101 fixed to the upper surface so as to support the carriage body 81 and an upper side. A head fixing portion 102 that is fixed to the head raising / lowering mechanism 84 and supports the head rotation portion 101 so as to be rotatable in the θ-axis direction, and a head rotation that can be rotated forward and backward to rotate the head rotation portion 101. And a motor 103. The head rotation motor 103 is a so-called direct motor (stepping motor) interposed between the head rotation unit 101 and the head fixing unit 102. When the head rotation motor 103 is driven, the head rotation unit 101 is It rotates around the θ axis. Thereby, the head unit 41 can be rotated via the carriage body 81, and the inclination angle of the head unit 41 (functional liquid droplet ejection head 51) in the horizontal plane can be freely changed. The θ-axis serving as the rotation axis of the head rotation mechanism 83 passes through the center of gravity of the head unit 41 so that the head unit 41 can be rotated in a stable state.

  An ejection correction camera 104 that captures a part of the set table 141 and detects a positional deviation with respect to a reference value of the set table 141 is fixed to the side of the head rotating unit 101. Based on this, the ejection timing of the functional liquid droplet ejection head 51 is corrected (see FIG. 7).

  The head lifting mechanism 84 is a gap between the nozzle surface 73 of the functional liquid droplet ejection head 51 mounted on the head unit 41 and the surface of the workpiece W set on a set table 141 (described later) of the XY movement mechanism 43, that is, For adjusting the work gap, the head unit 41 is moved up and down via a head rotation mechanism 83 and a carriage body 81 fixed to the lower part. As shown in FIGS. 7 and 8, the head elevating mechanism 84 includes a head elevating slider 111 that is supported by a pair of head fixing members 91 so as to elevate freely, and is interposed between the head fixing member 91 and the head elevating slider 111. The four head lifting guides 112 for guiding the head lifting and lowering slider 111 and the head lifting motor 113 (servo motor or stepping motor) fixed to the center of the upper surface of the head supporting plate 92 through the head supporting plate 92. ), A head lifting ball screw (not shown) that rotates forward and backward by the head lifting motor 113, and a head lifting block 115 that is screwed to the head lifting ball screw and fixed to the front of the head lifting slider 111. ing. Reference numeral 116 denotes a contact member that contacts the head lifting block 115 in order to restrict the lower limit position of the head lifting block 115, and the contact member 116 is screwed to the adjustment screw 117. .

  When the head lifting / lowering motor 113 is driven, the head lifting / lowering ball screw rotates, and the head lifting / lowering slider 111 moves up and down via the head lifting / lowering block 115 while being guided by the four head lifting / lowering guides 112. As a result, the head unit 41 supported by the head rotating mechanism 83 moves up and down via the head rotating mechanism 83 suspended from the head lifting slider 111 and the carriage body 81. In this case, the rotation axis of the head lifting motor 113 coincides with the θ axis of the head rotation mechanism 83, and the four sets of head lifting guide 112 and the head lifting block 115 are arranged symmetrically with respect to the θ axis. It is installed. Accordingly, the head lifting slider 111 can be prevented from shifting in the horizontal plane, and the head unit 41 can be lifted and lowered with high accuracy via the head lifting slider 111.

  The X / Y moving mechanism 43 is a so-called X / Y robot, and is arranged orthogonal to the X-axis table 121 and an X-axis table 121 that extends in the X-axis direction and moves the workpiece W in the X-axis direction. And a Y-axis table 122 (see FIG. 2 and the like). Note that the area on the near side of the Y-axis table 122 in the drawing is the work carry-in / out area 131 where the work W is carried in and out, and the area where the X-axis table 121 and the Y-axis table 122 intersect is drawn in the work W. This is an area 132. Although not shown, the chamber device 4 has a loading / unloading opening facing the workpiece loading / unloading area 131, and the workpiece W is loaded and unloaded from the loading / unloading opening by the transfer robot. It is like that.

  As shown in FIGS. 3, 9, and 10, the X-axis table 121 includes a set table 141 (work table) for setting a work W and an X-axis air slider that supports the set table 141 slidably in the X-axis direction. 142, a pair of left and right X-axis linear motors 143 that extend in the X-axis direction and move the workpiece W in the X-axis direction via the set table 141, and the X-axis linear motor 143, and are arranged in parallel with each other. 142, and a pair of X-axis guide rails 144 that guide the movement of 142. When the pair of X-axis linear motors 143 are driven (synchronized), the X-axis The air slider 142 moves in the X-axis direction, and the workpiece W set on the set table 141 moves in the X-axis direction. Further, an X-axis linear scale 145 is provided between the pair of X-axis guide rails 144. Based on the X-axis linear scale 145, the position of the set table 141 that moves the X-axis table 121 is accurately grasped, and the reference pulse for ejection timing of the functional liquid droplet ejection head 51 is obtained. A reference numeral 146 shown in the drawing is a belt-like stainless steel liquid-proof sheet stretched so as to cover each X-axis guide rail 144 from above, whereby the functional liquid adheres to the X-axis guide rail 144 and the like. Is prevented.

  As shown in FIG. 10, the set table 141 is obtained by superposing a suction table 152 that sucks and sets the workpiece W on the θ table 151 supported by the X-axis air slider 142. As shown in FIG. 11, the θ table 151 is detachably fixed to the lower surface of the suction table 152 and the θ table support portion 161 supported by the X-axis air slider 142, and is attached to the θ table support portion 161 with the θ axis. And a θ table rotating section 162 that can rotate in the direction. Further, between the θ table support portion 161 and the θ table rotation portion 162, there are many balls between the outer race 164 on the θ table support portion 161 side and the inner race 165 (annular ring) on the θ table rotation portion 162 side. A bearing-like member 163 is incorporated. A θ table driving unit 167 that rotates (rotates) the θ table rotating unit 162 is provided at the tip of an operating arm (not shown) whose radial direction extends outward from the θ table rotating unit 162.

  The θ table driving unit 167 includes an actuator 171 configured by a motor, a θ ball screw 172 connected to the actuator 171, and a θ slider 173 having a female screw (not shown) screwed to the θ ball screw 172. The operating arm is attached to the θ slider 173. The θ slider 173 has a rotation receiving portion 175 and a radial slide portion 176 that allow an angle change of the operating arm and a dimensional change in the extending direction accompanying the angle change, and advances and retreats with the forward and reverse rotation of the θ ball screw 172. The power is converted into a rotational movement of the operating arm. Accordingly, when the work W is set on the suction table 152 and then the actuator 171 is driven, the θ table rotating portion 162 is slightly rotated in the θ axis direction, and the work W in the θ axis direction is passed through the suction table 152. Can be finely adjusted (corrected).

  As shown in FIGS. 12 and 13, the suction table 152 includes a support base 181 that is detachably fixed to the θ table 151, a three-point support mechanism 182 that is erected on the support base 181, and a three-point support mechanism 182. And a table body 183 for sucking and setting the workpiece W. As shown in the figure, the suction table 152 incorporates a lift-up mechanism 261 (described later) and a pre-alignment mechanism 262 (described later) of the workpiece discharging means 32.

  The support base 181 is formed of a square plate-shaped stone material, and a pair of table transporting steel materials 184 used for carrying in and out of the suction table 152 are fixed to the lower surfaces of both left and right ends of the support base 181. . The support base 181 is fixed to the upper surface of the θ table rotation unit 162 so that the center of gravity of the suction table 152 substantially coincides with the rotation axis of the θ table 151 (that is, the θ axis). A three-point support mechanism 182 is disposed on the support base 181 so that the θ axis and the center of gravity of the table main body 183 coincide with each other. Three points of the three-point support mechanism 182 (three table support members 191 described later). ) Are positioned almost directly above the inner race 165 and at equal intervals in the circumferential direction. As shown in FIGS. 12 and 13, the support base 181 is provided with four sets of eight position restricting members 185 for restricting lateral blurring of the table main body 183 supported by the three-point support mechanism 182. . Although details will be described later, on the support base 181, a pre-discharge flushing unit 411 of the maintenance device 22, a lift-up mechanism 261 and a pre-alignment mechanism 262 of the work discharging means 32 are disposed. In addition, a suction piping section 572 (valve / pipe section) for sucking and setting the work W, an air piping section 553 (valve / pipe section) for supplying compressed air to each mechanism around the suction table 152 are installed. Yes.

  The three-point support mechanism 182 stably supports the table main body 183 by the three-point support, and includes three table support members 191 (support members) as shown in FIG. In the three table support members 191, the triangle connecting the table support members 191 is a substantially regular triangle, and the weight of the table body is applied to each table support member 191 substantially equally (that is, the center of gravity of the table body 183 The triangles formed when the table support members 191 are connected to each other are arranged so that their center of gravity coincides.

  Each table support member 191 has a columnar table support portion 192 in which a female screw for screwing the table main body 183 is screwed at the center of the upper surface, and a table height in which the table support portion 192 is fixed to the upper end in a flange form. An adjustment mechanism 193.

  The three table height adjusting mechanisms 193 corresponding to the three-point support can finely adjust each up and down to adjust the parallelism of the table body 183 (the set surface 183a) with respect to the horizontal plane with high accuracy. (Theoretically, it is only necessary to adjust two of the three-point support). Referring to FIG. 14, each table height adjusting mechanism 193 is supported by a case-like base frame 194 positioned and fixed to the support base 181 and is movable up and down (movable up and down) with respect to the base frame 194. A lifting block 195 on the table body 183 side, a back and forth block 196 on the support base 181 side which contacts the lower surface of the lifting block 195 and is supported so as to be able to advance and retreat in the X-axis direction with respect to the base frame 194, and rotate to the base frame 194 And a table height adjusting screw 197 that is supported freely and has a shaft portion screwed into an advance / retreat block 196.

  As shown in the figure, the advancing / retreating block 196 and the lifting / lowering block 195 have complementary contact surfaces, and the upper end surface (contact surface) of the advancing / retreating block 196 is slightly inclined with respect to the sliding direction. On the other hand, the lower end surface (contact surface) of the elevating block 195 is formed to be inclined at the same angle in the opposite direction to the advance / retreat block 196 with respect to the sliding direction of the advance / retreat block 196. Therefore, when the table height adjusting screw 197 is rotated forward and backward, the advance / retreat block 196 slides in the X-axis direction, and the elevating block 195 is raised and lowered by the cam action of the mutual contact surfaces.

  The contact surfaces of the advancing / retreating block 196 and the elevating block 195 are joined so that the cross-sectional shape perpendicular to the sliding direction is uneven, so that the blocks 195 and 196 do not laterally shake each other. Then, when the height adjustment is completed, the block fixing screw 200 is used for screwing so that the adjusted height does not go wrong. Specifically, the elevating block 195 and the base frame 194 are screwed with the two block fixing screws 200 in the same direction as the height adjusting screw 197, and the advance / retreat block 196 and the base frame 194 are fixed with the two block fixing screws 200. Then, it is screwed in a direction orthogonal to the height adjusting screw 197. In this case, screw holes 198 are formed in both side plates of the base frame 194, and a long hole 199 extending in the sliding direction is formed in the advance / retreat block 196. These holes are arranged in accordance with the slide position of the advance / retreat block 196. It can be screwed (see FIG. 14).

  The table main body 183 is a stone plate having a substantially square shape in plan view, which is made of stone and is formed into a thick plate shape. The length of one side of the table body 183 coincides with the length of the long side of the workpiece W, and is formed to have a minimum size for cost reduction. It is possible to set the work W. As shown in FIG. 15, the table body 183 has a total of 32 through holes 201 (insertion holes), 4 × 8 in total, for passing through a plurality of lift-up pins 271 of a lift-up mechanism 261 described later. Are formed, and three fixing holes 202 are formed in the three-point support mechanism 182 for screwing the table main body 183 with fixing screws (not shown). The fixing hole 202 has a counterbore 203 so that the head of the fixing screw does not protrude from the surface of the table main body 183.

  As shown in FIG. 15, an X-axis positioning mechanism 331 (to be described later) and a Y-axis positioning mechanism 361 (to be described later) of a pre-alignment mechanism 262, which will be described later, are released at the peripheral edge of the table main body 183 so as to cut into the table body 183. A total of six relief grooves 204 are formed, one at the front and the rear and two at the left and right. Further, a total of four contact grooves 205 are formed on the left and right end portions of the table main body 183 on the outer peripheral edge of the lower surface of the pair of left and right escape grooves 204b. The four sets of position restricting members 185 described above have a contact pin 186 with a spring at the tip, and the two sets of position restricting members 185 are positioned outside the escape groove 204a and The two sets are in contact with the front and rear end surfaces, and the remaining two sets are arranged to contact the front end surfaces 205a of the pair of left and right contact grooves 205. That is, the table main body 183 is subjected to position restriction in the horizontal plane by bringing the contact pins 186 of the four sets of position restriction members 185 into contact with the side end surfaces thereof. The two sets of position restricting members 185 are accommodated within the outline of the table main body 183 by the contact groove 205, and the remaining two sets of position restricting members 185 are a pair of flushing boxes (described later) attached to the table main body 183. ).

  Further, as shown in FIG. 15, on the surface (set surface 183a) of the table body 183, in addition to the 32 through holes 201, the 3 fixing holes 202, and the 6 escape grooves 204, they can escape. In addition, a plurality of suction grooves 211 (suction groove portions) for sucking the workpiece W are formed. The suction groove 211 has a main suction groove 212 for sucking the main part of the work W and a sub suction groove 213 for sucking the peripheral edge of the work W. The main suction groove 212 is composed of five annular suction grooves, and is patterned into a five-fold square (concentric) that increases from the center of the table body 183 toward the outside. The sub suction groove 213 includes a vertical suction groove 213 a extending in the X-axis direction and a horizontal suction groove 213 b extending in the Y-axis direction, and is formed outside the main suction groove 212. The vertical suction groove 213a is composed of two left and right suction grooves extending between the two right and left escape grooves 204b on the peripheral edge of the table body 183, and is used when the workpiece W is set horizontally. . On the other hand, the horizontal suction groove 213b is used when the workpiece W is set vertically, and is composed of four suction grooves formed so as to be divided by one escape groove 204a before and after the peripheral edge of the table body 183. Has been.

  As shown in FIGS. 15 and 26, two suction holes 214 (individual suction holes) communicating with the suction piping (not shown) on the support base 181 are formed in each suction groove 212, 213a, 213b. Yes. The diameter of the suction hole 214 is formed to be slightly larger than the width of the suction groove 211 so that a sufficient suction force can be applied to the workpiece W through the suction groove 211 (in practice, , Suction groove 211: diameter 2 mm, suction hole 214: diameter 3 mm). When air suction is performed from the suction hole 214, a suction force can be applied to the work W from the suction hole 214 and the suction groove 211 substantially uniformly, and the table body 183 is maintained while maintaining the flatness of the work W. On the other hand, the workpiece W can be fixed by suction.

  The table main body 183 is provided with four set locations 216 for setting a small substrate for inspection, and the small substrate can be set at any arbitrary position. The four set locations 216 are provided in the vicinity of the four corners of the table main body 183, and four suction holes 217 for sucking and setting a small substrate are formed in each set location 216.

  In order to accurately perform the drawing process on the workpiece W, the flatness (flatness) of the table main body 183 (set surface 183a) is strictly adjusted. Specifically, when the suction table 152 is attached to the θ table 151 outside the apparatus, the table main body 183 is first screwed to the table support member 191 of the three-point support mechanism 182 fixed to the support base 181. Since the flatness of the set surface 183a slightly deviates due to this screwing, hand lapping (the surface of the set surface 183a is slightly shaved) is subsequently performed to obtain the flatness of the set surface 183a. Next, after this is carried into the apparatus and the support base 181 is fixed to the θ table rotating portion 162, the table height adjusting screw 197 of the table height adjusting mechanism 193 is used to compensate for the influence by fixing the support base 181. The height position of the table body 183 is finely adjusted. This makes it possible to obtain extremely high flatness on the set surface 183a.

  As shown in FIGS. 3 and 11, the X-axis air slider 142 is fixed to a slider body 221 that supports the set table 141, and a pair of X-axis guide rails 144 that are fixed to the lower portion of the slider body 221. And a guide part 222. Two shallow grooves 223 are formed on the upper surface of the slider body 221, and the liquid-proof sheet 146 is inserted into each shallow groove 223. The slider body 221 is provided with the head recognition camera 225 that faces the camera opening 226 formed in the table body 183 and has the lens facing upward (toward the functional liquid droplet ejection head 51). The head recognition camera 225 images the head unit 41, and finely adjusts the position of the functional liquid droplet ejection head 51 via the head unit 41 based on the imaging result. The head recognition camera 225 has an elevating mechanism that raises and lowers the camera body 225a to adjust the focal length, and the height position of the camera body 225a can be adjusted according to the height position of the head unit 41. Yes.

  By the way, since the workpiece W is made of glass, resin, or the like, if the temperature of the table main body 183 to be set is uneven, the workpiece W is influenced by the thermal expansion unevenly and adversely affects the drawing processing result. . Therefore, in the present embodiment, the table main body 183 is made of a stone material that hardly causes temperature unevenness and has a small thermal expansion coefficient, and the ratio of holes and grooves in the table main body 183 that causes temperature unevenness is reduced as much as possible. As a result, temperature unevenness on the surface of the table main body 183 can be reduced, the contact area of the work W with the table main body 183 can be increased, and distortion of the work W due to temperature unevenness of the table main body 183 can be prevented.

  Specifically, the diameters of the through hole 201 and the fixing hole 202 that come into contact when the workpiece W is set on the table body 183 are made as small as possible (through hole 201: 18 mm, fixing hole 202 (bore hole: 33 mm)). At the same time, the width of the suction groove 211 is made as thin as possible (suction groove 211: 2 mm), and as will be described in detail later, the number of lift-up pins 271 is reduced as much as possible to reduce the number of through holes 201. Thus, in this embodiment, 96.5% of the workpiece W is in contact with the stone portion (flat portion) of the table body 183. The workpiece W and the stone portion of the table body 183 The contact ratio can be set in consideration of the material (thermal expansion coefficient) of the workpiece W, the yield when the drawing process is performed on the workpiece W, etc., but is preferably at least 80% or more, more preferably It is effective to 0% or 95% or more.

  On the other hand, the table main body 183 and the support base 181 that supports the table main body 183 via the table height adjusting mechanism 193 are fixed to each other. The influence (thermal expansion) is very small. When the support base 181 is made of metal, the lower surface of the table height adjustment mechanism 193 is not fixed to the support base 181, or the table body 183 is not fixed to the upper surface of the table height adjustment mechanism 193. It is preferable to be in a state. Thereby, the table main body 183 is hardly affected by the heat of the support base 181 and the flatness of the table main body 183 can be maintained.

  However, even when the lower surface of the table height adjusting mechanism 193 is fixed to the support base 181 and the upper surface of the table main body 183 is fixed to the table height adjusting mechanism 193, the table main body is provided via the table height adjusting mechanism 193. It is possible to absorb the heat shrinkage difference and the thermal expansion difference between 183 and the support base 181. Specifically, screwing between the advancing / retreating block 196 and the elevating block 195 and screwing between the elevating block 195 and the base frame 194 are not performed, and the space between the elevating block 195 and the advancing / retreating block 196 is set in an unfixed state. That is, by allowing the advance / retreat block 196 to slide relative to the lifting block 195, the thermal influence in the X-axis direction between the table main body 183 and the support base 181 can be absorbed. In this case, a spring (not shown) for biasing the shaft portion of the table height adjusting screw 197 in the sliding direction of the advance / retreat block 196 is interposed between the base frame 194 and the table height adjusting screw 197. It is preferable to prevent the table height adjusting screw 197 from loosening. It should be noted that the thermal influence in the Y-axis direction is absorbed by the dimensional intersection of both contact surfaces of the advance / retreat block 196 and the elevation block 195 formed in the unevenness.

  As shown in FIGS. 16 to 18, the Y-axis table 122 is a pair of Y-axis supports that span the X-axis table 121 on the four columns 231 erected on the stone surface plate 12. Supported on member 232. The four struts 231 are arranged side by side in the front-rear and left-right directions, and are composed of block-shaped stones extending in the Y-axis direction on the two struts 231 aligned in the left-right direction (Y-axis direction). A pair of the Y-axis support members 232 is stretched over. A height adjustment plate 233 for adjusting the height of the Y-axis support member 232 made of stone is interposed between the upper end of each column 231 and the Y-axis support member 232 when the apparatus is assembled. . The height adjustment plate 233 is fixed to the upper end portion of the column 231 and supports the Y-axis support member 232 in an unfixed state. However, a pair of restricting pieces 234 are formed on both sides of the height adjustment plate 233 so as to sandwich the Y-axis support member 232 so as to restrict the lateral blur, thereby the unfixed Y-axis support member 232 is formed. The position is regulated. In addition, a connecting member 235 is connected between the two support columns 231 arranged in the front-rear direction (X-axis direction) slightly below the upper and lower intermediate positions. Note that the height adjustment plate 233 may be omitted depending on the actual situation.

  A pair of workpiece recognition cameras 236 for recognizing the alignment of the workpiece W are disposed on the pair of Y-axis support members 232 so as to face the drawing region 132 (see FIG. 16 to FIG. 16). FIG. 18). The pair of workpiece recognition cameras 236 have their lenses facing downward (the workpiece W side). Like the head recognition camera 225, the camera body (not shown) is adjusted to adjust the focal length corresponding to the thickness of the workpiece W. It has a camera lifting mechanism (not shown) that moves up and down. In addition, a slide mechanism (not shown) is provided between the Y-axis support member 232 and the workpiece recognition camera 236 to slide the workpiece recognition camera 236 in the Y-axis direction. Thus, the position of the workpiece recognition camera 236 can be adjusted. In addition, the Y-axis support member 232 at the rear of the figure is provided with a two-lens inspection camera 237 for correcting the position of the inspection small board set on the set table 141 (the set location 216). Yes.

  The Y-axis table 122 includes a bridge plate 241 inserted and fixed through the main carriage 42, a pair of Y-axis sliders (not shown) that support the bridge plate 241 by holding both ends, and extends in the Y-axis direction. A pair of Y-axis linear motors 243 that move the bridge plate 241 in the Y-axis direction via the Y-axis slider, and a pair of Y-axis guide rails that are arranged in parallel to the Y-axis linear motor 243 and guide the movement of the bridge plate 241 ( An LM guide (not shown) and a Y-axis linear scale (not shown) for detecting the movement position of the main carriage 42 (head unit 41) are provided (FIGS. 2, 4, 16 to 18). Etc.). When the pair of Y-axis linear motors 243 are driven, the pair of Y-axis sliders move in parallel in the Y-axis direction using the pair of Y-axis guide rails as guides, and the bridge plate 241 is moved in the Y-axis direction in a state where both ends are supported. .

  The bridge plate 241 has an opening (not shown) through which the main carriage 42 is inserted at a substantially intermediate position. When the head fixing member 91 of the main carriage 42 is screwed to the bridge plate 241 from the upper surface, the head rotation is performed. The moving mechanism 83 and the head unit 41 are supported in a state of protruding downward. A camera bridge plate 245 that is movable in the Y-axis direction independently of the bridge plate 241 is bridged on the pair of Y-axis support members 232 so as to be bridged with the bridge plate 241. A drawing observation camera 246 for confirming the result of the drawing processing performed on the workpiece W is mounted on the H.245 (see FIGS. 16 to 18). The drawing observation camera 246 also incorporates a lifting mechanism that lifts and lowers the camera body in accordance with the workpiece W.

  In the X-axis table 121 described above, the pair of X-axis linear motors 143, the pair of X-axis guide rails 144, and the X-axis linear scale 145 are directly installed on the stone surface plate 12 described above. On the other hand, each Y-axis support member 232 of the Y-axis table 122 is configured by a rectangular parallelepiped stone plate. On each Y-axis support member 232, a Y-axis linear motor 243, a Y-axis guide rail, and a Y-axis linear scale are provided. It is placed directly. In this way, the work W and the head unit 41 can be moved with high accuracy by installing the main parts of the X-axis table 121 and the Y-axis table 122 on a stone material that is easy to obtain flatness and has a low coefficient of thermal expansion. Thus, the drawing processing accuracy for the workpiece W can be made extremely high. In this case, the stone surface plate 12 may be fixed to the gantry 11 and the Y-axis support member 232 may be fixed to the column 231 (height adjustment plate 233). Similarly, it is preferable that the Y-axis support member 232 is also placed in a non-fixed state with respect to the column 231. Thereby, both can eliminate the influence of the thermal expansion of the gantry and the reinforcing plate.

  As shown in FIG. 3 etc., a pair of X-axis linear motor 143 is accommodated in a pair of X-axis accommodation box. In the X-axis storage box 251, an X-axis cable carrier (cable bear: registered trademark) that stores tubes and cables connected to the set table 141 and the like in parallel with the X-axis linear motor 143 is stored. The movable end of the cables is moved following the movement of the set table 141. Similarly, the Y-axis linear motor 243, the Y-axis guide rail, and the Y-axis slider, together with the Y-axis cable carrier (cable bear: registered trademark) containing the tubes and cables connected to the head unit 41 and the like, It is accommodated in a pair of Y-axis accommodation boxes 252 installed on the support member 232 (see FIG. 4 etc.).

  Each Y-axis storage box 252 is supported by a pair of brackets 247 that are fixed outward on the side surface of the Y-axis support member 232. As a result, the Y-axis support member 232 is formed to a minimum size in order to satisfy the function of supporting the Y-axis guide rail and the like and to reduce the cost. In addition, the code | symbol 255 in a figure is a pair of air blow mechanism spanned between the upper part of the support | pillar 231 of each group. Each air blow mechanism 255 blows air having the same temperature as that in the chamber device 4 onto the workpiece W moving in the X-axis direction from the blow head, and forces the solvent of the functional droplet (pixel) after drawing. Vaporize (film formation).

  Here, a series of operations of the ejection unit 31 during the drawing process will be described. First, the head unit 41 and the set table 141 are moved to the drawing area 132 by the XY movement mechanism 43. Then, as a preparation before discharging the functional liquid, the head recognizing head 51 is driven by the head recognition camera 225 while confirming the position of the functional liquid droplet discharge head 51, and the position of the head unit 41 in the θ-axis direction. Make corrections. Subsequently, after the set table 141 is moved to the work carry-in / out area 131 and the work W is set, the set table 141 is moved again to the drawing area 132. Then, the θ table 151 is driven based on the workpiece recognition camera 236 to correct the position of the workpiece W set on the set table 141 in the θ-axis direction. In the present embodiment, as the previous stage of the drawing process, the ejection timing of the functional liquid droplet ejection head 51 is corrected in advance by the ejection correction camera 104, and the work is moved by the head lifting mechanism 84 in accordance with the work W to be set. The gap is adjusted. However, with respect to the work gap, a gap detection sensor or the like for detecting the work gap may be provided, and the gap adjustment may be performed for each drawing process.

  Next, the XY movement mechanism 43 (X-axis table 121) moves the workpiece W in the main scanning (X-axis) direction. In synchronization with the forward movement of the workpiece W, the functional liquid droplet ejection head 51 is selectively driven, and the functional fluid is selectively ejected onto the workpiece W. When the workpiece W moves once, the XY movement mechanism 43 (Y-axis table 122) moves the head unit 41 in the sub-scanning (Y-axis) direction. Then, the work W is moved backward by the X / Y moving mechanism 43 and the functional liquid droplet ejection head 51 is selectively driven in synchronization therewith. When the backward movement of the work W is completed, the head unit 41 is sub-scanned by the X / Y moving mechanism 43. Then, by repeating the reciprocating motion of the workpiece W in the main scanning direction and the driving of the functional liquid droplet ejection head 51, the ejection means 31 performs drawing on the workpiece W with the functional liquid.

  In order to appropriately set the unprocessed workpiece W loaded into the workpiece loading / unloading area 131 on the set table 141 and to lift up the workpiece W on which the drawing process has been performed from the set table 141 appropriately. A lift-up mechanism 261 that separates and contacts the workpiece W with respect to the set table 141, a pre-alignment mechanism 262 that positions an unprocessed workpiece W placed on the set table 141 by the lift-up mechanism 261, Neutralizing means 263 for neutralizing the peeling charge generated on the workpiece W when the workpiece W is separated from the set table 141. In the state where the workpiece W is lifted up, the robot arm (not shown) of the transfer robot described above faces this from the lower side, and the workpiece W is carried in and out of the apparatus.

  The lift-up mechanism 261 is disposed on the support base 181 of the suction table 152, and causes the workpiece W to be brought into and out of contact with the suction table 152 via lift-up pins 271 that move up and down from the through holes 201 of the suction table 152. Is. As shown in FIG. 12, the lift-up mechanism 261 has four rows of lift-up pin rows 272 each having eight rows of lift-up pins 271 with the X-axis direction as the row direction. As shown in the figure, four lift-up pin rows 272 are arranged at equal intervals in the Y-axis direction, and the lift-up mechanism 261 has one lift-up pin row 272 located at both ends. A pair of first lift-up units 273 that moves up and down and a second lift-up unit 274 that lifts and lowers the lift-up pins in the two central rows simultaneously are configured.

  As shown in FIG. 19, each first lift-up unit 273 includes eight first lift-up pins 271a and first lift-up plates 281 (pins) that are erected at equal intervals in the X-axis direction. Support plate), a first lift-up mechanism 282 (vertical movement mechanism) for moving the first lift-up plate 281 up and down, and a first lift-up base plate 283 that supports the first lift-up mechanism 282. Yes. The first lift-up mechanism 282 includes a first lift-up motor 291 (servo motor) that moves the first lift-up plate 281 up and down, and a first lift-up ball (one) that rotates forward and backward by the first lift-up motor 291. A screw 292, a first female screw block 293 that is screwed to the first lift-up ball screw 292 and supports the first lift-up plate 281 so as to be movable up and down, and a pair of front and rear (2 A first lift-up guide 294 and a first lift position detection sensor 295 that detects the lift position of the first lift-up pin 271a.

  A first female screw block 293 is fixed in the middle in the longitudinal direction of the first lift-up plate 281. The first lift-up plate 281 has a first lift-up ball screw 292 that passes through the center of the first lift-up plate 281, and is spaced apart from the front and rear of the first lift-up ball screw 292. Has penetrated. The first lift-up ball screw 292 has a lower end portion located in the first belt box 297 and pivotally supported at the center position of the first lift-up base plate 283, and an upper end portion erected on the first lift-up base plate 283. The first ball screw support member 296 is pivotally supported, and in this state, is screwed into the first female screw block 293. The first lift-up motor 291 is supported on the output shaft in a downward posture so that the output shaft faces the first belt box 297. A first pulley 298 is fixed to each of the output shaft of the first lift-up motor 291 and the first lift-up ball screw 292, and the power of the first lift-up motor 291 is transmitted between the pulleys to the first lift-up ball 292. A first timing belt 299 that is transmitted to the screw 292 is suspended.

  When the first lift-up motor 291 is driven, the first lift-up ball screw 292 rotates forward and backward via the first timing belt 299, and the first lift-up plate 281 is moved up and down via the first female screw block 293. Thereby, the 1st lift up pin 271a raises / lowers. The first lift-up unit 273 is configured symmetrically around the first lift-up ball screw 292 so that the first lift-up plate 281 can be moved up and down stably.

  As shown in FIG. 19, the first lift position detection sensor 295 is attached to the first ball screw support member 296, and is disposed corresponding to the upper end position of the first lift-up pin 271a. A first upper limit position detection sensor 301 (photo interrupter) that detects an upper limit position of the lift-up plate 281 and a lower limit position of the first lift-up pin 271a are disposed corresponding to the lower end position of the first lift-up pin 271a. And a first lower limit position detection sensor 302 (photo interrupter) for detecting the position. A first origin sensor 303 (photo interrupter) corresponding to a state in which the first lift-up pin 271a hits the workpiece W is provided above the first lower limit position detection sensor 302. A first detection piece 304 (translucent plate) is fixed to the first lift-up plate 281, and the first detection piece 304 that moves up and down together with the first lift-up plate 281 is replaced with the first upper limit position detection sensor 301, By detecting the first origin sensor 303 and the first lower limit position detection sensor 302, the upper moving end position, the workpiece abutting position and the lower moving end position of the first lift up pin 271a are detected. In this case, the upper moving end position is a lift-up position for transferring the workpiece W, and the lower moving end position is a position where the first lift-up pin 271a is inserted into the through hole 201 of the table body 183.

  In the present embodiment, the first lift-up pin 271a starts to rise from the lower moving end position with respect to the work W placed (set) on the table main body 183. Ascend at low speed. After the first lift-up pin 271a hits the workpiece W and receives it, the first lift-up pin 271a rises to the upper moving end position at a high speed. Further, the lowering operation of the first lift-up pin 271a is performed by the reverse operation. As described above, since the workpiece W is raised at a low speed before and after the workpiece W is separated from the table main body 183, the impact at the time of abutment of the first lift-up pin 271a is suppressed, and peeling electrification is suppressed. Can do. Similarly, since the work W is lowered at a low speed when the work W is placed on the table main body 183, air (bubbles) is prevented from being caught between the work W and the table main body 183. be able to.

  As shown in FIG. 20, the second lift-up unit 274 includes sixteen second lift-up pins 271b, and a second lift-up plate 311 (pin support plate) in which the two lift-up pins 271b are bisected in two rows. A second lift-up mechanism 312 (vertical movement mechanism) for raising and lowering the second lift-up plate 311, a second lift-up base plate 313 that supports the second lift-up mechanism 312, and raising and lowering the second lift-up pins 271 b And a second lift position detection sensor 320 for detecting the position. As shown in the figure, the second lift-up mechanism 312 includes a second female screw block 310 that is screwed into the second lift-up ball screw 314 and supports the second lift-up plate 311 so that the second lift-up plate 311 can be raised and lowered. Although it is configured in substantially the same manner as the up unit 273, a pair of front and rear (two) second lift-up ball screws 314 and a pair of front and rear (four) second lift-up guides 315 are provided, A difference is that the pair of front and rear second ball screw support members 316 pivotally support the second lift-up plate 311. The second lift-up motor 317 is erected on the second lift-up base plate 313 so as to penetrate the second lift-up plate 311 and to face one second lift-up ball screw 314. The second lift-up motor 317 has its output shaft facing the second belt box 319. The output shaft of the second lift-up motor 317 and the pair of second lift-up ball screws 314 are respectively connected to pulleys. Is fixed. Then, as shown in FIG. 20, a second timing belt 318 is stretched between these three pulleys, and a pair of second lift-up ball screws 314 are formed by a single second lift-up motor 317. It rotates forward and reverse while synchronizing. Except for the second lift-up motor 317, the second lift-up mechanism 312 is configured symmetrically so that the second lift-up plate 311 can be lifted up stably.

  Similarly to the first lift-up mechanism 282, the second ball screw support member 316 that faces the second lift-up motor 317 includes a second upper limit position detection sensor (photo interrupter) and a second lower limit position detection sensor (photo). A second lift position detection sensor 320 made up of an interrupter and a second origin sensor (not shown) corresponding to a state in which the second lift-up pin 271b hits the workpiece W are provided. On the other hand, a second detection piece (not shown) is attached to the second lift-up plate 311. Through the second detection piece, the upper moving end position and the lower moving end position of the second lift up pin 271b. , And the origin position can be detected.

  Note that the upper limit position and the lower limit position of the first lift-up plate 281 and the second lift-up plate 311 are defined by the position of the tip of the lift-up pin 271 on each lift-up plate 281, 311. The upper limit positions of the plates 281 and 311 are the positions where the lift-up pins 271 protrude from the set surface 183a of the suction table 152 by about 50 mm (loading / unloading positions), and the lower-limit positions of the lift-up plates 281 and 311 are the lift-up pins 271. Is a position that is approximately 1 mm lower than the set surface 183 a of the suction table 152.

  The lift-up pin 271 includes a pin body 276 that contacts the workpiece W, a pin body 276 that fixes the pin body 276 at the tip, and a pin holder 277 that is screwed and fixed to the first lift-up plate 281 or the second lift-up plate 311. Have. The tip of the pin body 276, that is, the portion that comes into contact with the workpiece W is made of a peak material such as resin, and the pins other than the tip of the pin body 276 and the pin holder 277 are made of a rod material made of stainless steel or steel.

  Here, a series of operations of the lift-up mechanism 261 will be described. As described above, since the pair of first lift-up unit 273 and second lift-up unit 274 each have a lift-up motor, the pair of first lift-up plate 281 and second lift-up plate 311 are independent. Can be moved up and down. Therefore, by raising and lowering them at different timings, the workpiece W can be appropriately placed on the suction table 152 and the workpiece W can be lifted up from the suction table 152.

  When placing an unprocessed workpiece W loaded into the workpiece loading / unloading area 131 on the suction table 152, first, the pair of first lift-up plates 281 and second lift-up plates 311 are raised to the upper limit position. The work W is received by the lift-up pins 271 in all four rows on the suction table 152 facing the work carry-in / out area 131, that is, at the carry-in / out position. Next, only the second lift-up motor 317 is driven, and only the second lift-up pin 271b is lowered. As a result, the workpiece W is distorted by its own weight and warps in an arc shape. After a predetermined time has elapsed from the driving of the second lift-up motor 317, the first lift-up motors 291 of the pair of first lift-up units 273 are simultaneously driven while the second lift-up motor 317 is being driven, and the workpiece W is arcuated. It is lowered in a state of warping (upward warping state). That is, by lowering the second lift-up pin 271b prior to the first lift-up pin 271a, first, the central portion of the work W supported by the second lift-up pin 271b is brought into contact with the suction table 152, The left and right ends of the work W are brought into contact with the suction table 152 so as to follow this. As a result, the air between the work W and the suction table 152 escapes so as to be pushed out from the center of the work W toward both ends, so that no air remains between the work W and the suction table 152. The workpiece W can be placed on the suction table 152.

  In this case, it is preferable to perform air suction of the table body 183 in parallel with the lowering of the lift-up pins 271. More preferably, air suction is sequentially performed from the center of the set surface 183a toward the outside, such as air suction by the main suction groove 212 prior to air suction by the sub suction groove 213 described above. . Thereby, it is possible to effectively prevent air from remaining between the workpiece W and the suction table 152. A series of operations after the work W is supported on the lift-up pins 271 can be performed in parallel with the movement of the work W to the drawing area 132 for drawing processing.

  On the other hand, when lifting (peeling) the workpiece W after the drawing process from the suction table 152, first, the first lift-up motors 291 are simultaneously driven to raise the first lift-up pins 271a, so that both ends of the workpiece W are lifted. Lift up to push the part up. After a predetermined time has elapsed since the driving of the first lift-up motors 291, the second lift-up motors 317 are driven while the first lift-up motors 291 are driven. As a result, both end portions of the work W are lifted ahead of the central portion, and the work W is peeled off (separated) from the suction table 152 in a state of warping in an arc. Therefore, air can be gradually introduced from the end between the workpiece W and the table main body 183, and the workpiece W can be separated from the suction table 152 without applying an excessive force to the workpiece W. Moreover, peeling electrification can be suppressed. Then, after the workpiece W is completely peeled from the suction table 152, the first lift-up motors 291 until the pair of first lift-up pins 271a and the second lift-up plate 311 reach the upper moving end positions. And the second lift-up motor 317 is driven. Although details will be described later, when the workpiece W is pulled away from the suction table 152 by the lift-up mechanism 261, the static elimination means 263 is driven in synchronization to eliminate static electricity generated on the back surface of the workpiece W due to peeling charging.

  Further, as described above, at the moment when the workpiece W is separated from and attached to the suction table 152, the lifting speed of the lift-up pin 271 is suppressed, and the impact received by the workpiece W due to the separation and contact with the suction table 152 is reduced. That is, when the work W is placed on the suction table 152, the second lift-up plate 311 is first lowered at the speed Vd1, and when the work W contacts the suction table, it is lowered at the speed Vd2 (however, Vd1 > Vd2). On the other hand, when the work W is peeled off from the suction table 152, the first lift-up pin 271a is first raised at the speed Vu1, and after the work W is completely separated from the suction table, it is raised at the speed Vu2. (However, Vd1 <Vd2). As described above, by controlling the lifting speed when the workpiece W is moved to and away from the suction table 152, the cycle time required for lifting the workpiece W can be reduced. Moreover, the raising / lowering speed of the workpiece | work W and the curvature state when raising / lowering the workpiece | work W can be set individually in consideration of the material of the workpiece | work W, thickness, a shape, etc.

  Further, in this embodiment, all the lift-up pins 271 are configured to have the same length, and the lift-up pins 271 (of the second lift-up unit 274) that support the intermediate portion of the workpiece W and both side end portions thereof are provided. By changing the lift timing of the lift-up pins 271 to be supported (of the first lift-up unit 273), the workpiece W is supported in an arc shape when being attached to and detached from the suction table 152. The same effect can be obtained even if the lifting speed of the lift-up pin 271 that supports the intermediate portion of the workpiece W is lower than the lifting speed of the lift-up pin 271 that supports both side ends thereof. Alternatively, the lift-up pins 271 that contact the intermediate portion of the workpiece W may be formed short, and the lift-up pins 271 may be formed longer toward both side ends.

  When the work W is supported by the lift-up pins 271, the work W is bent between the lift-up pins 271 due to the weight of the work W. An allowable deflection amount is set in advance for the work W, and the distance (pitch) between the lift-up pin rows 272 and the lift-up pin rows 272 are set so that the number of lift-up pins 271 is minimized within a range satisfying the allowable deflection amount. A distance between lift-up pins 271 configuring one row is set. Thus, by setting the number of lift-up pins 271 of the lift-up mechanism 261 to an allowable minimum number, the number of through-holes 201 for penetrating the lift-up pins 271 is minimized.

  As shown in FIG. 12, the pre-alignment mechanism 262 performs positioning (pre-alignment) of the work W placed on the suction table 152 with respect to the table body 183 by the lift-up mechanism 261, and a pair of X clamping members 332. By sandwiching the front and rear ends of the workpiece W with the X axis positioning unit 321 for positioning the workpiece W in the front and rear direction (X axis direction), and by sandwiching the left and right ends of the workpiece W with two sets of Y clamping members 362, And a Y-axis positioning unit 322 that positions the workpiece W in the left-right direction (Y-axis direction).

  As shown in the figure, the X-axis positioning unit 321 is composed of a pair of X-axis positioning mechanisms 331 disposed on a support base 181 so as to face each other. An X clamping member 332 for clamping W, an X clamping member moving mechanism 333 that supports the X clamping member 332 so as to be movable in the X axis direction and the Z axis direction, and an X mechanism base that supports the X clamping member moving mechanism 333 334. The X mechanism base 334 is fixed along the peripheral edge of the support base 181 corresponding to the position of each escape groove 204a formed in the peripheral edge of the table main body 183, and the X clamping member 332 is usually the table main body. It is supported in a state of being under the 183 (standby position). The X clamping member 332 includes an X clamping piece 341 that contacts and clamps the workpiece W, and an X clamping piece holder 342 that holds the X clamping piece 341. In order to prevent the workpiece W from being damaged, the X clamping piece 341 is made of a relatively flexible material such as a resin.

  The X clamping member moving mechanism 333 is supported by the first X moving mechanism 351 placed and fixed on the X mechanism base 334, the second X moving mechanism 352 standing on the first X moving mechanism 351, and the second X moving mechanism 352. And a third X moving mechanism 353 that slidably supports the X holding piece 341 via the X holding piece holder 342, and these first to third X moving mechanisms 351, 352, and 353 are respectively X air A cylinder 354 and an X slider 355 slidably supported by the X air cylinder 354 are provided.

  As shown in FIG. 12, the X clamping member moving mechanism 333 is configured in a “U” shape in a side view by first to third X moving mechanisms 351, 352, and 353. More specifically, the first X air cylinder 354a of the first X movement mechanism 351 is fixed to the X mechanism base 334, and supports the first X slider 355a so as to be slidable in the X-axis direction. The first X slider 355a is provided with a second X air cylinder 354b of the second X moving mechanism 352. The second X air cylinder 354b supports the second X slider 355b so as to be slidable in the Z-axis direction (vertical direction). Yes. Further, the third X air cylinder 354c of the third X moving mechanism 353 is supported on the upper end portion of the second X slider 355b, and the third X slider 355c to which the X clamping piece holder 342 is fixed is supported on the third X air cylinder 354c. It is slidably supported in the X-axis direction.

  When positioning the workpiece W, the pair of X clamping member moving mechanisms 333 are simultaneously driven in the order of the first X moving mechanism 351, the second X moving mechanism 352, and the third X moving mechanism 353, thereby releasing the X clamping member 332 and releasing the groove 204a. The X sandwiching member 332 is moved in a “U” shape so as to face the surface. That is, first, the X clamping member 332 is slid in the direction away from the suction table 152 by the first X moving mechanism 351, and then the predetermined height (about the height of the set surface 183a) by the second X moving mechanism 352. Then, the X clamping member 332 is moved up and further moved by the third X moving mechanism 353 so that the X clamping member 332 abuts against the workpiece W (a clamping position). However, as described above, the workpiece W can be placed horizontally as well as vertically. In the case of the portrait placement, the workpiece W can be moved to the workpiece W only by moving the X clamping member 332 by a relatively short distance in the X-axis direction. Since it can be made to abut, the movement in the X-axis direction may be performed only by the first X-axis movement mechanism (or the third X-axis movement mechanism). As a result, the pair of X clamping pieces 341 are brought into contact with the front and rear end surfaces of the workpiece W so that the X clamping pieces 341 clamp the front and rear ends of the workpiece W, and the workpiece W is positioned in the longitudinal direction. After the positioning of the workpiece W is completed, the X clamping member 332 is moved in the reverse procedure to the positioning, and the X clamping member 332 is moved again below the table main body 183 (standby position). Note that the X clamping member 332 is normally housed under the table main body 183, and the X clamping member 332 becomes an obstacle when a workpiece W is placed on the suction table 152 or when a drawing process is performed. There is no.

  Of the pair of X-axis positioning mechanisms 331, one X-axis positioning mechanism 331 (the rear side in the drawing in the present embodiment) serves as a receiver for the other X-axis positioning mechanism 331 (positioning reference in the X-axis direction). Two X springs 356 for biasing the X clamping piece 341 in the clamping direction are interposed between the X clamping piece 341 and the X clamping piece holder 342 of the receiving side X-axis positioning mechanism 331. . Therefore, the contact force when the pair of X clamping pieces 341 are contacted with the workpiece W can be absorbed by the two X springs 356, and an excessive force can be prevented from being applied to the workpiece W.

  As shown in FIG. 12, the Y-axis positioning unit 322 is composed of two sets of front and rear (four) Y-axis positioning mechanisms 361, each having two relief grooves formed on the left and right sides of the peripheral portion of the table main body 183. 204b is disposed on the support base 181 so as to correspond to 204b. Each Y-axis positioning mechanism 361 is configured in substantially the same manner as the X-axis positioning mechanism 331, and a table is provided so that the Y clamping member 362 for clamping the workpiece W and the Y clamping member 362 do not protrude from the set surface 183a. A Y-clamping member moving mechanism 363 (Y-clamping piece moving mechanism) that supports the Y-clamping member 362 under the main body 183 (standby position) and is movable in the Y-axis direction and the Z-axis direction; And a Y mechanism base 364 that supports the member moving mechanism 363.

  The Y clamping member 362 includes a columnar Y clamping pin 371 (Y clamping piece) that abuts against the workpiece W, and a Y clamping plate 372 on which the Y clamping pin 371 is erected. The workpiece contact portion 371a of the Y clamping pin 371 is made of a relatively flexible material such as resin, like the X clamping piece 341. As with the X-axis positioning mechanism 331, one of the Y-axis positioning mechanisms 361 (the right side in the figure in the present embodiment) is the other (positioning reference in the Y-axis direction) and receives the two Y-axis on the receiving side. The positioning mechanism 361 is provided with an escape mechanism 374 having two Y springs 373 interposed between the Y clamping pin 371 and the Y clamping plate 372 and biasing the Y clamping pin 371 in the clamping direction. .

  The Y clamping member moving mechanism 363 is erected on the first Y moving mechanism 381 placed and fixed on the Y mechanism base 364, the second Y moving mechanism 382 supported by the first Y moving mechanism 381, and the second Y moving mechanism 382. , And a third Y moving mechanism 383 that supports the Y clamping plate 372. The first Y air cylinder 384a of the first Y moving mechanism 381 is fixed to the Y mechanism base 364, and supports the first Y slider 385a to be slidable in the Y-axis direction. The first Y slider 385a supports a second Y air cylinder 384b that slidably supports the second Y slider 385b of the second Y moving mechanism 382 in the Y-axis direction, and the second Y slider 385b supports the second Y slider 385b of the third Y moving mechanism 383. A 3Y air cylinder 384c is erected. The third Y air cylinder 384c supports a third Y slider 385c so as to be slidable in the Z-axis direction, and a Y clamping plate 372 is supported on the upper end surface of the third Y slider 385c.

  When positioning the workpiece W, the four Y clamping member moving mechanisms 363 are driven at the same time, and each Y clamping member 362 (Y clamping pin 371) is allowed to escape and face the groove 204b in the same manner as the X clamping member moving mechanism 333. As shown in FIG. In this case, the first Y moving mechanism 381, the third Y moving mechanism 383, and the second Y moving mechanism 382 may be driven in this order. As a result, the workpiece contact portions 371a (side surfaces) of the four Y clamping pins 371 contact the left and right end surfaces of the workpiece W, and the workpiece W is positioned in the left-right direction (Y-axis direction). In addition, since the workpiece | work contact part 371a is circular in cross section, the workpiece | work W contact | abuts to the side surface of each workpiece | work contact part 371a with a point. For this reason, the two right and two left Y clamping pins 371 can be brought into contact with each other with high accuracy, and the workpiece W can be positioned with high accuracy. Note that, similarly to the X clamping member moving mechanism 333, the Y-axis direction may be moved only by the first Y-axis moving mechanism 381 (or the second Y-axis moving mechanism 382) according to the vertical / horizontal placement of the workpiece W. Good.

  Since the pre-alignment mechanism 262 is incorporated in the suction table 152, the pre-alignment operation can be performed while moving the work W to the drawing area, and the work W is set on the suction table 152 and the work W is drawn. By making the movement to the area overlap, the drawing processing time per work can be reduced.

  The static elimination means 263 removes the static electricity peeled off and charged on the back surface of the workpiece W by soft X-ray irradiation when the workpiece W is pulled away from the suction table 152 by the lift-up mechanism 261. It comprises an electrostatic removal device 391. As shown in FIGS. 16 and 17, the pair of static eliminators 391 are fixed to a pair of left and right columns 231 disposed on the near side among the four columns 231 erected on the stone surface plate 12. In this configuration, the work W on the suction table 152 facing the drawing area 132 is irradiated with soft X-rays from both the left and right sides (from a direction orthogonal to the moving direction of the work W). Thus, since the static elimination means 263 has the two static elimination apparatuses 391, static elimination can be performed efficiently and reliably. In addition to the device that irradiates the soft X-ray, the electrostatic removal device 391 may be an ion blowing type device (for example, an ionizer) that blows ionized air that neutralizes static electricity (electrically) to the workpiece W. Is possible. In addition, the static elimination method of the workpiece | work W using said electrostatic removal apparatus 391 is mentioned later.

  Next, the maintenance device 22 will be described. The maintenance device 22 is intended to maintain (or recover) the function of the functional liquid droplet ejection head 51, and as shown in FIGS. 21 and 22, a flushing unit 401, a suction unit 402, a wiping unit 403, and the like. A discharge inspection unit 404 and a weight measurement unit 405 are provided. As shown in both figures, except for the discharge inspection unit 404, each unit of the maintenance device 22 is disposed on the above-described machine base 13 on a moving table 406 configured to be slidable in the X-axis direction. . The area where the moving area of the moving table 406 and the head unit 41 in the Y-axis direction is a maintenance area 407. When performing maintenance of the functional liquid droplet ejection head 51, the head unit 41 is moved to the maintenance area 407. The moving table 406 is appropriately moved, and a unit for maintenance of the functional liquid droplet ejection head 51 is caused to face the maintenance area 407. Each unit on the moving table 406 is arranged in consideration of the use frequency of each unit and the maintenance procedure. Each unit is configured to correspond to the first head unit. As described above, the second head unit is equipped with the functional liquid droplet ejection head 51 according to the arrangement pattern of the first head unit. Therefore, these units can be used in combination with the first head unit.

  The flushing unit 401 is for receiving the functional liquid ejected by the flushing operation, that is, the preliminary ejection (discarding ejection) of the functional liquid droplet ejection head 51, and immediately before the functional liquid is ejected to the workpiece W during the drawing process. And the pre-discharge flushing unit 411 for receiving the pre-discharge flushing functional liquid and the periodic flushing periodically performed when the discharge of the functional liquid to the work W is temporarily stopped, such as when the work W is replaced. A regular flushing unit 412 for receiving the functional fluid.

  As shown in FIG. 12, the pre-discharge flushing unit 411 is disposed so that the front and rear of the suction table 152 (table body 183) are sandwiched, and a pair of pre-discharge flushing boxes 415 for receiving the pre-discharge flushing functional liquid and a pair And a pair of box elevating mechanisms 416 that support the pre-discharge flushing box 415 so as to be movable up and down. The pre-discharge flushing box 415 is formed in an elongated box shape having a rectangular shape in plan view, is configured such that the length of the long side thereof coincides with the length of one side of the table body 183, and is attached to the table body 183. . In the pre-discharge flushing box 415, an absorbent material 417 for absorbing the functional liquid is laid. Each box elevating mechanism 416 has a pair of box elevating cylinders 418 (air cylinders) supported on the peripheral edge of the support base 181 so as to project from the table body 183, and each pre-discharge flushing box 415 includes a pair. Both boxes are supported by (two) box lifting cylinders 418. Thus, since the pair of pre-discharge flushing boxes 415 are arranged so as to sandwich the table main body 183, when the work W is reciprocated in the X-axis direction, the functional liquid droplet discharge head 51 immediately before facing the work W. The pre-discharge flushing can be performed sequentially on the flushing box. That is, it is not necessary to move the head unit 41 only for pre-discharge flushing.

  The pair of box elevating mechanisms 416 support the upper end surfaces of the pair of pre-discharge flushing boxes 415 at a position (standby position) where the upper end surfaces of the pair of pre-discharge flushing boxes 415 are lower than the height of the set surface 183a of the suction table 152. On the other hand, when performing the drawing process, that is, when receiving pre-discharge flushing, the pair of box elevating mechanisms 416 raises the pre-discharge flushing box 415 so that the upper end surfaces thereof coincide with the height of the surface of the set work W. I support this in the state. Accordingly, the pre-discharge flushing functional liquid can be received by the pre-discharge flushing box 415 without splashing outside. In consideration of the expansion of the absorbent 423 and the like, the position of the upper end surface of the pre-discharge flushing box 415 at the time of ascent can be set slightly lower than the workpiece W.

  The regular flushing unit 412 is disposed facing the maintenance area 407, and as shown in FIGS. 21 and 22, supports a regular flushing box 421 and a box-shaped regular flushing box 421 that receives the functional liquid for regular flushing. A box stand 422. The regular flushing box 421 is configured to be sufficiently large so that the 12 functional liquid droplet ejection heads 51 mounted on the first head unit can be flushed at the same time. In the present embodiment, the functional liquid absorbers 423 are laid in two rows in the regular flushing box 421 corresponding to the twelve divided functional liquid droplet ejection heads 51 of the first head unit. However, the absorbent material 423 may be laid on the entire regular flushing box 421. The box stand 422 supports the regular flushing box 421 so that the upper end surface of the regular flushing box 421 is at the same height as the surface of the set workpiece W. Also in this case, like the pre-discharge flushing box 415, the upper end surface of the regular flushing box 421 may be supported at a position slightly lower than the workpiece W (front surface).

  As shown in FIGS. 21 and 22, the suction unit 402 performs suction of the functional liquid droplet ejection head 51 in order to prevent (resolve) nozzle clogging of the functional liquid droplet ejection head 51, and A cap unit 425 having a cap 426 in close contact with the nozzle surface 73 of the discharge head 51 and a suction means (not shown) for sucking the functional liquid droplet discharge head 51 through the close cap 426 are provided. The cap unit 425 is also configured corresponding to the first head unit, and the cap unit 425 has the same pattern as the arrangement pattern of the twelve functional liquid droplet ejection heads 51 mounted on the first head unit. Twelve caps 426 are arranged on the base 427. Although not shown, the suction means has a single ejector that applies a suction force to the functional liquid droplet ejection head 51 and a suction tube that connects the twelve caps 426 and the ejector. A reuse tank 531 of a functional liquid recovery system 483 described later is interposed between the suction tube cap 426 and the ejector, and an open / close valve (not shown) is provided between the ejector and the reuse tank 531. It is installed.

  The wiping unit 403 uses a wiping sheet to wipe away the nozzle surface 73 of each functional liquid droplet ejection head 51 that has been contaminated by the functional liquid adhering to the functional liquid droplet ejection head 51 by suction (cleaning) or the like. A sheet supply unit 431 and a wiping unit 432 configured independently are provided. The sheet supply unit 431 and the wiping unit 432 are arranged side by side in the X-axis direction on the moving table 406 with the wiping unit 432 positioned on the suction unit side, and are arranged on the head unit 41 in the maintenance area 407. The wiping unit 432 moves together with the sheet supply unit 431 to one side in the X axis direction by the movement of the moving table 406 and wipes the nozzle surfaces 73 of all twelve functional liquid droplet ejection heads 51 in the head unit 41. To do.

  The wiping unit 432 includes an elevating frame 434 that is supported by an air cylinder so as to be movable up and down between a pair of stands 433 erected on both sides in the Y-axis direction, and a pressing roller 435 that is rotatably supported by both ends on the elevating frame 434. And a cleaning liquid discharge head 51 for supplying a cleaning liquid made of a functional liquid solvent to a wiping sheet (not shown) fed to the pressing roller 435 (see FIGS. 21 and 22). In this case, the pressing roller 435 is constituted by a free rotating roller having a peripheral surface as an elastic body.

  As shown in FIG. 23, the sheet supply unit 431 includes an upper supply reel 440 and a lower take-up reel 441 that are detachably supported by a pair of frames 439 erected on both sides in the Y-axis direction, and a take-up reel. And a winding motor 442 for winding and rotating 441. Further, a sub-frame 443 is fixed to the upper part of both frames, and a speed detection roller 444 is supported on the sub-frame 443 so as to be positioned ahead of the supply reel 440. Further, a cleaning liquid pan 445 for receiving the dropped cleaning liquid is disposed below these components.

  A roll-shaped wiping sheet (not shown) is inserted into the feeding reel 440, and the wiping sheet fed from the feeding reel 440 is sent to the wiping unit 432 through the speed detection roller 444. A timing belt 446 is stretched between the take-up reel 441 and the take-up motor 442, and the take-up reel 441 is rotated by the take-up motor 442 to take up the wiping sheet. In this case, the power source and the power transmission system such as the winding motor 442 and the timing belt 446 are located on the side opposite to the drawing device 21, and the wiping sheet can be arranged as close to the drawing device 21 as possible. It is like that.

  The feeding reel 440 is braked and rotated so as to resist the winding motor 442 by a torque limiter 447 provided at the shaft end thereof. The speed detection roller 444 is a grip roller composed of two upper and lower rollers 444 a and 444 b that freely rotate, and the winding motor 442 is controlled by a speed detector 448 provided at the shaft end thereof. That is, the feeding reel 440 feeds the wiping sheet in a stretched state, and the take-up reel 441 winds the wiping sheet so that no slack occurs. In addition, an optical sheet detector 449 is disposed below the sheet traveling path portion between the feeding reel 440 and the speed detection roller 444, and the end of the wiping sheet fed from the feeding reel 440 has passed. When detected by the sheet detector 449, an exchange command for the supply reel 440 and the take-up reel 441 is issued.

  As shown in FIGS. 23 and 24, the supply reel 440 has a hollow reel shaft main body 450, a pair of left and right flanges 451R and 451L provided at both ends of the reel shaft main body 450, and a torque limiter 447 on the right side in the drawing. The right reel short shaft 452 and the left reel short shaft 453 extending to the outside of the left flange in the drawing are provided, and the right reel short shaft 452 and the left reel short shaft 453 are respectively connected via bearings. The pair of frames 439 are pivotally supported. A cylindrical joint 454 is interposed between the right reel short shaft 452 and the right flange 451R. A right shaft pin 456 having a tapered head passes through the right flange 451R, and a pin tip of the right shaft pin 456 is formed to have the same diameter as the right reel short shaft 452, A cylindrical member 455 that fits into the joint 454 is fixed. On the other hand, a left shaft pin 457 that is fitted and locked to the shaft center portion of the left reel short shaft 453 passes through the left flange 451L. The reel shaft main body 450 is sandwiched between the flanges 451R and 451L via the right shaft pin 456 and the left shaft pin 457. In other words, the both ends (both ends) of the reel shaft main body 450 are clamped by both heads of the right shaft pin 456 and the left shaft pin 457. In this case, the right flange 451R is fixed to the right reel short shaft 452 via the cylindrical joint 454, while the left flange 451L is fixed to the left reel short shaft 453.

  As shown in FIG. 24, the cylindrical joint 454 includes a right joint piece 454R and a left joint piece 454L that are engaged with each other in a meshing manner, and the right joint piece 454R has a shaft end of the right reel short shaft 452. And a cylindrical member 455 fixed to the right shaft pin 456 is fitted to the left joint piece 454L. The shaft end of the right reel short shaft 452 is pressed and fixed to the right joint piece 454R by a right urea screw 458 screwed so as to pass through the right joint piece 454R, and the column member 455 has a left joint. The left joint piece 454L is pressed and fixed by a left urea screw 459 screwed so as to pass through the piece 454L. The cylindrical joint 454 functions as a universal joint by the two urea screws 458 and 459.

  The right reel short shaft 452 has a sufficient length. For example, the right urea screw 458 is loosened, and the right flange 451R (right shaft pin 456) is moved to the right via the cylindrical joint 454. Then, the right end portion of the reel shaft main body 450 is separated from the head of the right shaft pin 456. In other words, the reel shaft main body 450 is detached from both flanges by the reversing operation. In this case, the movable range L2 of the cylindrical joint 454 is larger than the insertion depth L1 of the right shaft pin 456 into the reel shaft main body 450 (small opening). Note that guide pins 456a and 457a protrude upward at both heads of the right shaft pin 456 and the left shaft pin 457, and a pair of long lengths that are fitted to the guide pins at both ends of the reel shaft body 450. The hole is formed so as to cut. This guides the mounting of the reel shaft main body 450 and prevents the reel shaft main body 450 mounted when the wiping sheet is fed out from rotating idly.

  Further, by fixing the reel shaft main body 450 to the right flange 451R and loosening the left urea screw 459 together with the right urea screw 458, the reel shaft main body 450, the right shaft pin 456, the right flange 451R, and the column member It is also possible to remove 455 as a unit. In this case, the movable range L2 of the cylindrical joint 454 is made larger than the insertion depth L3 of the columnar member 455 in the cylindrical joint 454.

  The wiping sheet rolls around the reel shaft main body 450 and is carried from the outside. Since the reel shaft main body 450 is detachable in the radial direction via the cylindrical joint 454 in this way, It is not necessary to provide a space for attaching / detaching the sheet in the left-right direction (Y-axis direction), and the wiping sheet can be easily replaced. Further, since the cylindrical joint 454 for attachment / detachment is not a simple cylindrical body but a meshing type joint, rotation blurring of the feeding reel 440 itself can be prevented. In addition, it is preferable that the take-up reel 441 is also a detachable type like the supply reel 440.

  The discharge inspection unit 404 captures the functional liquid droplets from the functional liquid droplet ejection head 51 by imaging the functional liquid droplets that are actually ejected from the functional liquid droplet ejection head 51 in order to prevent drawing defects on the workpiece W. It is inspected whether or not the liquid is properly discharged. As shown in FIGS. 9 and 10, the discharge inspection unit 404 is disposed on the stone surface plate 12 that faces the movement region of the head unit 41 in the Y-axis direction and is detached from the X-axis table 121. A functional liquid receiver 461 that receives the functional liquid ejected for the inspection, an imaging unit 462 that captures the functional liquid droplet that is ejected to the functional liquid receiver 461, and irradiates the functional liquid droplet that is imaged with light. And an illumination unit 463. Note that the imaging result of the imaging unit 462 is transmitted to the control device 26 for image recognition. Based on this image recognition, whether each ejection nozzle 74 of each functional liquid droplet ejection head 51 is normally ejecting functional liquid. It is determined whether or not (no nozzle clogging).

  As shown in FIGS. 21 and 22, the weight measuring unit 405 detects the ejection failure of the functional liquid droplet ejection head 51 by measuring the weight of the functional liquid droplet ejected from the functional liquid droplet ejection head 51. 12 receiving containers 472 that receive the functional liquid for detection, a receiving tray 471 on which the 12 receiving containers 472 are placed together with the 12 functional liquid droplet discharging heads 51, and discharged. And an electronic balance (not shown) for measuring the weight of each receiving container 472 containing the functional liquid. The tray 471 also has a configuration corresponding to the first head unit, and twelve receptacles 472 are placed on the tray 471 according to the arrangement pattern of the functional liquid droplet ejection heads 51 of the first head unit. Twelve shallow grooves (not shown) are formed.

  Next, the liquid supply / recovery device 23 will be described. The liquid supply / recovery device 23 includes a functional liquid supply system 481 that supplies a functional liquid to the head unit 41 (each functional liquid droplet ejection head 51), a waste liquid recovery system 482 that recovers the waste liquid from the flushing unit 401 of the maintenance device 22. A functional liquid recovery system 483 for recovering the functional liquid sucked by the suction unit 402 and the functional liquid discharged to the suction unit 402; and a cleaning liquid supply system 484 for supplying the wiping unit 403 with a solvent of the functional material for cleaning. It is configured. Two cleaning liquid tanks 541 of the cleaning liquid supply system 484 are arranged in the upper stage of the tank cabinet 3 described above, three main tanks 501 of the functional liquid supply system 481 are arranged in the middle stage, and three functional liquid collection systems 483 are arranged in the lower stage. A single reuse tank 531 and a small waste liquid tank 521 of a waste liquid recovery system 482 are provided (see FIG. 4).

  The functional liquid supply system 481 mainly uses the first head unit, and uses the first functional liquid supply system 491 corresponding to the case where the drawing process is performed on a large amount of workpieces W, and mainly uses the second head unit. A second functional liquid supply system 492 corresponding to the case where the drawing process is performed on the workpiece W. The first functional liquid supply system 491 stores three main tanks 501 that store a large amount (3 L) of functional liquid, and stores the functional liquid sent from the corresponding main tank 501, and each functional liquid droplet ejection head. And three sub tanks 502 that supply the functional liquid to 51, and a first liquid supply pipe section 503 that forms a liquid supply flow path from the main tank 501 through the sub tank 502 to the functional liquid droplet ejection head 51. Yes.

  The main tank 501 pressure-feeds the functional liquid to the corresponding sub tank 502 via the first liquid supply piping unit 503 by compressed air introduced from the air supply device 24. The three sub tanks 502 are arranged side by side on the bridge plate 241 and move in the Y-axis direction together with the head unit 41 (see FIGS. 1 to 4 and the like). In order to maintain the water head difference between the functional liquid droplet ejection head 51 and the sub tank 502 at a predetermined value, the pressure in each sub tank 502 is controlled. Thus, the functional liquid is prevented from dripping from the discharge nozzle 74 of the functional liquid droplet discharge head 51, and the functional liquid droplets are accurately discharged by the pump action of the piezoelectric element. Although not shown, the first liquid supply piping unit 503 is connected to three common liquid supply tubes that connect the main tank 501 and the sub tank 502 and four to each sub tank 502. Twelve individual liquid supply tubes that connect the discharge head 51 and three open / close valves for opening and closing each common liquid supply tube are provided. On the bridge plate 241, a head side valve unit 507 having 12 head side opening / closing valves 508 for opening and closing 12 individual liquid supply tubes 505 is disposed.

  The second functional liquid supply system 492 includes functional liquid packs 511 (or small ink tanks) that store functional liquids, three pack mounting members 512 that mount the functional liquid packs one by one, and three pack mounting members. A pack support member 513 that supports 512, and a second liquid supply piping section (not shown) for connecting the functional liquid pack and the functional liquid droplet ejection head 51 to supply the functional liquid. The pack support member 513 is fixed to a column 231 erected on the right rear side. A pack lifting / lowering mechanism 515 for moving the pack supporting member 513 up and down is interposed between the pack supporting member 513 and the column 231. By adjusting the adjustment screw 516 of the pack lifting / lowering mechanism 515, The height position can be adjusted. As a result, the height of the functional liquid pack 511 (liquid level) can be adjusted slightly lower than the nozzle surface 73 of the functional liquid droplet ejection head 51, and therefore the water head between the functional liquid pack 511 and the functional liquid droplet ejection head 51. The difference can be adjusted to a predetermined value.

  The waste liquid recovery system 482 is for recovering the functional liquid received by the flushing boxes 415 and 421 of the flushing unit 401 and the functional liquid receiver 461 of the discharge inspection unit 404, and a waste liquid tank 521 for storing the recovered functional liquid. And waste liquid tubes (not shown) that are connected to both flushing boxes 415 and 421 and a discharge port (not shown) of the functional liquid receiver 461 and guide the functional liquid discharged to the waste liquid tank 521. Yes. The waste liquid tube is provided with a waste liquid pump (not shown), and the functional liquid is collected in the waste liquid tank 521 via the waste liquid pump.

  The functional liquid collection system 483 is for individually collecting the functional liquid sucked through the cap 426 of the suction unit 402 for each main tank 501, and three reuse tanks 531 for storing the collected functional liquid. have. As described above, the reuse tank 531 is provided between the cap 426 and the ejector, and stores the functional liquid sucked by the ejector.

  The cleaning liquid supply system 484 is for supplying the cleaning liquid dropped onto the wiping sheet (not shown) of the wiping unit 403 to the cleaning liquid head 436. The cleaning liquid tank 541 stores the cleaning liquid, the cleaning liquid tank 541, and the cleaning liquid head. 436 and a cleaning liquid supply tube (not shown). The cleaning liquid tank 541 is connected to the air supply device 24, and the cleaning liquid is pressurized and fed from the cleaning liquid tank 541 by introducing compressed air from the air supply device 24 to the cleaning liquid tank 541. The cleaning liquid uses a functional liquid solvent with relatively high volatility so that the functional liquid adhering to the nozzle surface 73 of the functional liquid droplet ejection head 51 can be efficiently removed.

  Next, the air supply device 24 will be described. The air supply device 24 is for supplying compressed air to each part. The air supply device 24 mainly supplies a first air supply unit 551 for supplying compressed air to each device mounted on the gantry 11, and mainly to the machine base 13. And a second air supply unit (not shown) for supplying compressed air to the placed maintenance device 22. Although not shown in the drawings, both air supply units include an air pump 550 (compressor) for compressing air, a regulator for maintaining the compressed air from the air pump 550 at a constant pressure according to the supply destination, the air pump 550 and each part. And an air pipe portion 553 for connecting the pipes to each other. The air piping portion 553 includes an air supply side piping portion 554 including an air supply tube 555 and an air opening / closing valve 556 for opening and closing the air supply tube 555, and an exhaust side piping portion 557 having an air recovery tube 558 for collecting the supplied (supplied) air. And is composed of.

  In the present embodiment, in order to simplify the configuration of the air piping portion 553, each device (or mechanism) that receives the supply of compressed air is intensively arranged. The air piping portion 553 disposed on the suction table 152 will be described as an example. As shown in FIGS. 12 and 25, the support base 181 of the suction table 152 has a pre-alignment mechanism 262 having an air cylinder and a pre-discharge flushing unit 411, and a plurality of individual air supplies connected to each of these air cylinders. A tube 561, a plurality of individual air collection tubes 562 connected to each air cylinder, a common air supply tube (not shown) connected to the air pump, and a plurality of individual air supply tubes 561 are connected together. The air manifolds 563 (branch manifolds) for joining the individual air collection tubes 562 and exhausting them together are disposed. The support base 181 is provided with two air manifolds 563 so that the air cylinders provided on the support base 181 are substantially divided into right and left to supply air. A plurality of air opening / closing valves 556 (electromagnetic valves: control valves) are provided in the air manifold 563, and each air opening / closing valve 556 is connected to a corresponding individual air supply tube 561 and individual air recovery tube 562. Yes.

  In this way, since a plurality of air cylinders are centrally arranged on the support base 181, the air supply tube 555 and the air recovery tube 558 are connected to the support base 181 from the outside by using the air manifold 563 that branches and merges. The number of air piping portions 553 (the number of air supply tubes and the number of air recovery tubes) to be provided can be reduced, and the routing of the air piping portions 553 can be simplified. In this embodiment, the suction table 152 is configured to move in the X-axis direction. However, by reducing the number of air piping portions 553 connected to the support base 181 from the outside, the air piping portion with respect to the movement of the suction table 152 is used. The influence of 553 can be suppressed, and the suction table 152 can be moved with high accuracy. In addition, two air manifolds 563 are arranged on the support base 181 in point symmetry with respect to the center (center of gravity) of the suction table 152, and the suction pipe 152 is connected to the suction table 152 by an air piping portion 553 connected from the outside. An uneven force is prevented from being applied, and the suction table 152 can be moved stably.

  In this embodiment, the head recognition camera 225 is supported by the X-axis air slider 142, but may be supported by the support base 181. In this case, the head recognition camera 225 is supported by a bracket (not shown) fixed to the support base 181 and extending laterally from the support base 181, and the camera body 225 a of the head recognition camera 225 is exposed to the camera opening 226 of the table body 183. I will. Further, a nozzle observation camera (not shown) having substantially the same configuration as the head recognition camera 225 may be disposed on the support base 181. The nozzle observation camera is for observing nozzle clogging of the functional liquid droplet ejection head 51, and the lens is exposed from an opening formed in the table main body 183 and images each ejection nozzle 74. In these cases, if an elevating mechanism for elevating and lowering the camera body is formed of an air cylinder, compressed air can be supplied to the elevating mechanism via the air manifold 563.

  Next, the air suction device 25 includes a vacuum pump 571 that performs air suction, and a suction pipe portion 572 that pipe-connects the suction hole 214 of the suction table 152 and the vacuum pump 571. The workpiece W placed on the suction table 152 is fixedly sucked and set. As shown in FIG. 26, the suction piping section 572 includes three individual air suction tubes 573 that communicate with the main suction groove 212, the vertical suction groove 213a of the sub suction groove 213, and the suction holes 214 of the lateral suction groove 213b, respectively. And three suction opening / closing valves 574 for opening and closing each individual air suction tube 573, and an air suction manifold 575 for connecting the three individual air suction tubes 573 to the vacuum pump 571, Air suction is performed in accordance with the set direction of the workpiece W. Each individual air suction tube 573 is provided with a pressure sensor 576 for detecting the suction pressure of the workpiece W.

  When the work W is placed horizontally, the individual air suction tube 573 connected to the suction hole 214 of the horizontal suction groove 213b is closed by the suction opening / closing valve 574, and when the work W is placed vertically, it is connected to the suction hole 214 of the vertical suction groove 213a. The individual air suction tube 573 is closed. That is, air suction is performed only from the sub suction groove 213 that contacts the workpiece W. When releasing the suction set of the workpiece W, the vacuum break is performed by supplying compressed air from the air supply device 24 (first air supply unit 551) via each individual air suction tube 573. Each air suction tube 573 is connected to an air supply tube 555 provided with a switching on-off valve 577.

  The control device 26 is composed of a personal computer or the like. Although not shown, the control device 26 has a storage area that can be temporarily stored, has a RAM used as a work area for control processing, and various storage areas, and stores a control program and various data. Based on a program stored in the hard disk, a CPU that performs arithmetic processing on various data, and a bus that interconnects these, while correlating the entire droplet discharge device 1 with each other, It has overall control.

  For example, when the workpiece W that has been subjected to the drawing process is lifted from the suction table 152 in order to effectively remove the peeling charge generated on the workpiece W, the control device 26 includes the lift-up mechanism 261, the X-axis table 121, and The static elimination means 263 is driven in synchronization. A method for removing static electricity when lifting the workpiece W from the suction table 152 will be specifically described. Prior to lifting the workpiece W from the suction table 152, first, the X-axis table 121 is driven to move the suction table 152 to the workpiece carry-in / out area 131. Then, the driving of the air suction device 25 is stopped, and the open / close valve 506 is opened, the air supply tube 555 is communicated with each individual air suction tube 573, and the suction set of the workpiece W is released. (The order here does not matter)

  Next, the pair of electrostatic eliminators 391 are driven to perform soft X-ray irradiation. The pair of first lift-up mechanisms 282 of the lift-up mechanism 261 are driven in synchronization with the soft X-ray irradiation, and the workpiece W is gradually lifted from both left and right ends. And while the center part of the workpiece | work W is contacting the set surface 183a of the adsorption | suction table 152, the height of both right-and-left both ends is predetermined height (the height which the air layer to ionize becomes sufficient, and is 5 cm here) ), The X-axis table 121 is driven in this state, and the workpiece W is moved forward toward the drawing area 132. In this case, the optical axis by the pair of static eliminators 391 and the X-axis direction are orthogonal. As a result, the air layer between the suction table 152 and the warped workpiece W is ionized, and static electricity on the back surface (and the set surface 183a) of the workpiece W can be eliminated. In this case, the moving speed of the work W is set to a lower speed than the moving speed during the drawing process so that both ends of the work W are sufficiently neutralized by the ionized air.

  After the forward movement of the workpiece W is completed and the static elimination at both ends of the workpiece is completed, the X-axis table 121 is driven to move the workpiece W backward while irradiating soft X-rays, and the centers of the left and right sides of the workpiece W are moved. It faces a pair of electrostatic eliminators 391. Subsequently, the second lift-up mechanism 312 is driven, and the center portion of the workpiece W is pulled away from the suction table 152. Then, after the workpiece W is completely peeled off from the suction table 152, the driving of the pair of electrostatic removal devices 391 is stopped. As described above, in the series of operations for peeling the workpiece W from the suction table 152, the configuration in which the soft X-rays are always irradiated makes it possible to effectively remove static electricity from the workpiece W.

  Further, in this embodiment, the static elimination work is performed with the workpiece W lifted only at the left and right ends, but the workpiece W is lifted up due to the material of the workpiece W and the lift-up method of the workpiece W. If the amount of charge at that time is small, the static elimination work may be started from a state where the entire workpiece W is lifted. For example, following the driving of the pair of first lift-up mechanisms 282, the second lift-up mechanism 312 is driven to completely separate the workpiece W from the suction table 152. Then, the X-axis table 121 is driven so that the workpiece W is reciprocated so that the workpiece W faces the pair of electrostatic eliminators 391 that emit soft X-rays, and the entire workpiece W is neutralized. To do.

  As a matter of course, this static elimination means 263 can also be used when the work W is placed on the suction table 152. In this case, after placing the workpiece W on the suction table 152, the pair of electrostatic removal devices 391 are driven, and the X-axis table 121 is further driven. Thereby, static electricity on the surface of the workpiece W is neutralized. Therefore, by performing the static elimination of the work W as a preparation for the drawing process, it is possible to suppress the influence of static electricity of the work W during the drawing process.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 27 is a flowchart showing the manufacturing process of the color filter, and FIG. 28 is a schematic cross-sectional view of the color filter 600 (filter base body 600A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S11), a black matrix 602 is formed on a substrate (W) 601 as shown in FIG. The black matrix 602 is formed of metal chromium, a laminate of metal chromium and chromium oxide, or resin black. In order to form the black matrix 602 made of a metal thin film, a sputtering method, a vapor deposition method, or the like can be used. Further, when forming the black matrix 602 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in a bank formation step (S12), a bank 603 is formed in a state of being superimposed on the black matrix 602. That is, first, as shown in FIG. 28B, a resist layer 604 made of a negative transparent photosensitive resin is formed so as to cover the substrate 601 and the black matrix 602. Then, an exposure process is performed with the upper surface covered with a mask film 605 formed in a matrix pattern shape.
Further, as shown in FIG. 28C, the resist layer 604 is patterned by etching an unexposed portion of the resist layer 604 to form a bank 603. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 603 and the black matrix 602 below the bank 603 serve as partition wall portions 607b that partition each pixel region 607a, and in the subsequent colored layer formation step, the functional liquid droplet ejection head 51 uses colored layers (film forming portions) 608R, 608G, When forming 608B, the landing area of the functional droplet is defined.

The filter substrate 600A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material of the bank 603, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 601 is lyophilic (hydrophilic), the droplets into each pixel region 607a surrounded by the bank 603 (partition wall portion 607b) in the colored layer forming step described later. The landing position accuracy is improved.

  Next, in the colored layer forming step (S13), as shown in FIG. 28 (d), the functional liquid droplets are ejected by the functional liquid droplet ejection head 51, and each pixel area 607a surrounded by the partition wall portion 607b is formed. Make it land. In this case, the functional liquid droplet ejection head 51 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating) to form three colored layers 608R, 608G, and 608B. If the colored layers 608R, 608G, and 608B are formed, the process proceeds to the protective film forming step (S14), and as shown in FIG. 28 (e), the substrate 601, the partition wall portion 607b, and the colored layers 608R, 608G, and 608B are moved. A protective film 609 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 601 where the colored layers 608R, 608G, and 608B are formed, the protective film 609 is formed through a drying process.
Then, after forming the protective film 609, the color filter 600 proceeds to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 29 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 600 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 620, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 600 is the same as that shown in FIG. 28, the corresponding parts are denoted by the same reference numerals and description thereof is omitted.

The liquid crystal device 620 is roughly constituted by a color filter 600, a counter substrate 621 made of a glass substrate, and a liquid crystal layer 622 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them. The filter 600 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are disposed on the outer surfaces of the counter substrate 621 and the color filter 600 (surfaces opposite to the liquid crystal layer 622 side), and the polarizing plates positioned on the counter substrate 621 side are also provided. A backlight is disposed outside.

On the protective film 609 of the color filter 600 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 623 elongated in the left-right direction in FIG. 29 are formed at predetermined intervals. The color of the first electrode 623 A first alignment film 624 is formed so as to cover the surface opposite to the filter 600 side.
On the other hand, a plurality of strip-shaped second electrodes 626 elongated in a direction orthogonal to the first electrode 623 of the color filter 600 are formed on the surface of the counter substrate 621 facing the color filter 600 at a predetermined interval. A second alignment film 627 is formed so as to cover the surface of the two electrodes 626 on the liquid crystal layer 622 side. The first electrode 623 and the second electrode 626 are made of a transparent conductive material such as ITO.

The spacer 628 provided in the liquid crystal layer 622 is a member for keeping the thickness (cell gap) of the liquid crystal layer 622 constant. The sealing material 629 is a member for preventing the liquid crystal composition in the liquid crystal layer 622 from leaking to the outside. Note that one end portion of the first electrode 623 extends to the outside of the sealing material 629 as a lead-out wiring 623a.
A portion where the first electrode 623 and the second electrode 626 intersect with each other is a pixel, and the color layers 608R, 608G, and 608B of the color filter 600 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 623 and application of the first alignment film 624 are performed on the color filter 600 to create a portion on the color filter 600 side. Patterning of the electrode 626 and application of the second alignment film 627 are performed to create a portion on the counter substrate 621 side. Thereafter, a spacer 628 and a sealing material 629 are formed in the portion on the counter substrate 621 side, and the portion on the color filter 600 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 622 is injected from the inlet of the sealing material 629, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, the spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 600 side is bonded to the portion on the counter substrate 621 side, the sealing material The liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 629. Further, the printing of the sealing material 629 can be performed by the functional liquid droplet ejection head 51. Furthermore, the first and second alignment films 624 and 627 can be applied by the functional liquid droplet ejection head 51.

FIG. 30 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 600 manufactured in the present embodiment.
The liquid crystal device 630 is significantly different from the liquid crystal device 620 in that the color filter 600 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 630 is generally configured by sandwiching a liquid crystal layer 632 made of STN liquid crystal between a color filter 600 and a counter substrate 631 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 631 and the color filter 600, respectively.

On the protective film 609 of the color filter 600 (on the liquid crystal layer 632 side), a plurality of strip-shaped first electrodes 633 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 633 is formed. A first alignment film 634 is formed so as to cover the surface on the layer 632 side.
A plurality of strip-shaped second electrodes 636 extending in a direction orthogonal to the first electrode 633 on the color filter 600 side are formed on the surface of the counter substrate 631 facing the color filter 600 at a predetermined interval. A second alignment film 637 is formed so as to cover the surface of the second electrode 636 on the liquid crystal layer 632 side.

The liquid crystal layer 632 is provided with a spacer 638 for keeping the thickness of the liquid crystal layer 632 constant, and a sealing material 639 for preventing the liquid crystal composition in the liquid crystal layer 632 from leaking to the outside. Yes.
Similarly to the liquid crystal device 620 described above, a portion where the first electrode 633 and the second electrode 636 intersect with each other is a pixel, and the colored layers 608R, 608G, and 608B of the color filter 600 are located in the portion that becomes the pixel. Is configured to do.

FIG. 31 shows a third example in which a liquid crystal device is configured using a color filter 600 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 650, the color filter 600 is arranged on the upper side (observer side) in the drawing.

The liquid crystal device 650 includes a color filter 600, a counter substrate 651 disposed so as to face the color filter 600, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 600. The polarizing plate 655 is generally configured by a polarizing plate 655 and a polarizing plate (not shown) disposed on the lower surface side of the counter substrate 651.
A liquid crystal driving electrode 656 is formed on the surface of the protective film 609 of the color filter 600 (the surface on the counter substrate 651 side). The electrode 656 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 660 described later is formed. An alignment film 657 is provided so as to cover the surface of the electrode 656 opposite to the pixel electrode 660.

  An insulating layer 658 is formed on the surface of the counter substrate 651 facing the color filter 600, and the scanning lines 661 and the signal lines 662 are formed on the insulating layer 658 so as to be orthogonal to each other. A pixel electrode 660 is formed in a region surrounded by the scanning lines 661 and the signal lines 662. Note that in an actual liquid crystal device, an alignment film is provided over the pixel electrode 660, but the illustration is omitted.

  In addition, a thin film transistor 663 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 660 and the scanning line 661 and the signal line 662. . The thin film transistor 663 is turned on / off by application of a signal to the scanning line 661 and the signal line 662 so that energization control to the pixel electrode 660 can be performed.

  The liquid crystal devices 620, 630, and 650 of the above examples have a transmissive configuration, but a reflective layer or a semi-transmissive reflective layer is provided to form a reflective liquid crystal device or a transflective liquid crystal device. You can also

  Next, FIG. 32 is a cross-sectional view of a main part of a display region of an organic EL device (hereinafter simply referred to as a display device 700).

The display device 700 is schematically configured with a circuit element portion 702, a light emitting element portion 703, and a cathode 704 laminated on a substrate (W) 701.
In this display device 700, light emitted from the light emitting element portion 703 to the substrate 701 side is transmitted through the circuit element portion 702 and the substrate 701 and emitted to the observer side, and the light emitting element portion 703 is opposite to the substrate 701. After the light emitted to the side is reflected by the cathode 704, the light passes through the circuit element portion 702 and the substrate 701 and is emitted to the observer side.

  A base protective film 706 made of a silicon oxide film is formed between the circuit element portion 702 and the substrate 701, and an island-like semiconductor film 707 made of polycrystalline silicon is formed on the base protective film 706 (on the light emitting element portion 703 side). Is formed. In the left and right regions of the semiconductor film 707, a source region 707a and a drain region 707b are formed by high concentration cation implantation, respectively. A central portion where no cation is implanted is a channel region 707c.

  In the circuit element portion 702, a transparent gate insulating film 708 covering the base protective film 706 and the semiconductor film 707 is formed, and a position corresponding to the channel region 707c of the semiconductor film 707 on the gate insulating film 708 is formed. For example, a gate electrode 709 made of Al, Mo, Ta, Ti, W or the like is formed. A transparent first interlayer insulating film 711 a and second interlayer insulating film 711 b are formed on the gate electrode 709 and the gate insulating film 708. Further, contact holes 712a and 712b are formed through the first and second interlayer insulating films 711a and 711b and communicating with the source region 707a and the drain region 707b of the semiconductor film 707, respectively.

A transparent pixel electrode 713 made of ITO or the like is patterned and formed on the second interlayer insulating film 711b in a predetermined shape, and the pixel electrode 713 is connected to the source region 707a through the contact hole 712a. .
A power line 714 is disposed on the first interlayer insulating film 711a, and the power line 714 is connected to the drain region 707b through the contact hole 712b.

  Thus, the driving thin film transistors 715 connected to the pixel electrodes 713 are formed in the circuit element portion 702, respectively.

The light emitting element portion 703 includes a functional layer 717 stacked on each of the plurality of pixel electrodes 713, and a bank portion 718 provided between each pixel electrode 713 and the functional layer 717 to partition each functional layer 717. It is roughly structured.
The pixel electrode 713, the functional layer 717, and the cathode 704 provided on the functional layer 717 constitute a light emitting element. Note that the pixel electrode 713 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 718 is formed between the pixel electrodes 713.

The bank part 718 is laminated on the inorganic bank layer 718a (first bank layer) 718a (first bank layer) formed of an inorganic material such as SiO, SiO ₂ or TiO ₂ , and is made of an acrylic resin, a polyimide resin or the like. It is composed of an organic bank layer 718b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank portion 718 is formed on the peripheral edge of the pixel electrode 713.
Between each bank portion 718, an opening 719 that gradually expands upward with respect to the pixel electrode 713 is formed.

The functional layer 717 includes a hole injection / transport layer 717a formed on the pixel electrode 713 in a stacked state in the opening 719 and a light emitting layer 717b formed on the hole injection / transport layer 717a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 717b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 717a has a function of transporting holes from the pixel electrode 713 side and injecting them into the light emitting layer 717b. The hole injection / transport layer 717a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 717b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material insoluble in the hole injection / transport layer 717a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 717b. By using the light emitting layer 717b, the light emitting layer 717b can be formed without re-dissolving the hole injection / transport layer 717a.

  The light emitting layer 717b is configured such that holes injected from the hole injection / transport layer 717a and electrons injected from the cathode 704 are recombined in the light emitting layer to emit light.

  The cathode 704 is formed so as to cover the entire surface of the light emitting element portion 703, and plays a role of flowing current to the functional layer 717 in a pair with the pixel electrode 713. Note that a sealing member (not shown) is disposed on the cathode 704.

Next, a manufacturing process of the display device 700 will be described with reference to FIGS.
As shown in FIG. 33, the display device 700 includes a bank part forming step (S21), a surface treatment step (S22), a hole injection / transport layer forming step (S23), a light emitting layer forming step (S24), It is manufactured through an electrode formation step (S25). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S21), as shown in FIG. 34, an inorganic bank layer 718a is formed on the second interlayer insulating film 711b. The inorganic bank layer 718a is formed by forming an inorganic film at a formation position and then patterning the inorganic film using a photolithography technique or the like. At this time, a part of the inorganic bank layer 718 a is formed so as to overlap with the peripheral edge of the pixel electrode 713.
When the inorganic bank layer 718a is formed, an organic bank layer 718b is formed on the inorganic bank layer 718a as shown in FIG. This organic bank layer 718b is also formed by patterning using a photolithography technique or the like, similarly to the inorganic bank layer 718a.
In this way, the bank portion 718 is formed. Accordingly, an opening 719 that opens upward with respect to the pixel electrode 713 is formed between the bank portions 718. The opening 719 defines a pixel region.

In the surface treatment step (S22), a lyophilic process and a lyophobic process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 718aa of the inorganic bank layer 718a and the electrode surface 713a of the pixel electrode 713. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 713.
In addition, the lyophobic treatment is performed on the wall surface 718s of the organic bank layer 718b and the upper surface 718t of the organic bank layer 718b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane. )
By performing this surface treatment process, when the functional layer 717 is formed using the functional liquid droplet ejection head 51, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functioning liquid droplets from overflowing from the opening 719.

  The display device base 700A is obtained through the above steps. The display device base 700A is placed on the set table 141 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S23) and light emitting layer forming step (S24) are performed. .

  As shown in FIG. 36, in the hole injection / transport layer forming step (S23), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 51 to each opening 719 that is a pixel region. Discharge inside. Then, as shown in FIG. 37, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 717a on the pixel electrode (electrode surface 713a) 713.

Next, the light emitting layer forming step (S24) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 717a, a hole injection / transport layer 717a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 717a has a low affinity for the nonpolar solvent, the hole injection / transport layer 717a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 717a. There is a possibility that the injection / transport layer 717a and the light emitting layer 717b cannot be adhered to each other or the light emitting layer 717b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 717a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform a surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in forming the light emitting layer or a similar solvent is applied on the hole injection / transport layer 717a, and this is applied. This is done by drying.
By performing such a treatment, the surface of the hole injection / transport layer 717a is easily adapted to the nonpolar solvent, and in the subsequent process, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 717a.

  Next, as shown in FIG. 38, the second composition containing the light emitting layer forming material corresponding to any one of the colors (blue (B) in the example of FIG. 38) is used as a functional droplet as a pixel region ( A predetermined amount is driven into the opening 719). The second composition driven into the pixel region spreads on the hole injection / transport layer 717a and fills the opening 719. Even if the second composition deviates from the pixel region and lands on the upper surface 718t of the bank portion 718, the upper composition 718t is subjected to the liquid repellent treatment as described above, and thus the second composition An object is easy to roll into the opening 719.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 39, the hole injection / transport layer 717a A light emitting layer 717b is formed thereon. In the case of this figure, a light emitting layer 717b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 51, as shown in FIG. 40, the same steps as in the case of the light emitting layer 717b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 717b corresponding to green (G)) is formed. Note that the order in which the light-emitting layers 717b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. Further, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 717, that is, the hole injection / transport layer 717 a and the light emitting layer 717 b are formed on the pixel electrode 713. And it transfers to a counter electrode formation process (S25).

In the counter electrode formation step (S25), as shown in FIG. 41, a cathode 704 (counter electrode) is formed on the entire surface of the light emitting layer 717b and the organic bank layer 718b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 704 is configured, for example, by laminating a calcium layer and an aluminum layer.
On top of the cathode 704, an Al film and an Ag film as electrodes, and a protective layer such as SiO ₂ and SiN for preventing oxidation thereof are appropriately provided.

  After forming the cathode 704 in this way, the display device 700 is obtained by performing other processing such as sealing processing and wiring processing for sealing the upper portion of the cathode 704 with a sealing member.

Next, FIG. 42 is an exploded perspective view of a main part of a plasma display device (PDP device: hereinafter simply referred to as a display device 800). In the figure, the display device 800 is shown with a part thereof cut away.
The display device 800 includes a first substrate 801, a second substrate 802, and a discharge display portion 803 formed between the first substrate 801 and the second substrate 802, which are disposed to face each other. The discharge display unit 803 includes a plurality of discharge chambers 805. Among the plurality of discharge chambers 805, the three discharge chambers 805 of the red discharge chamber 805R, the green discharge chamber 805G, and the blue discharge chamber 805B are arranged to form one pixel.

Address electrodes 806 are formed in stripes at predetermined intervals on the upper surface of the first substrate 801, and a dielectric layer 807 is formed so as to cover the address electrodes 806 and the upper surface of the first substrate 801. On the dielectric layer 807, partition walls 808 are provided so as to be positioned between the address electrodes 806 and along the address electrodes 806. The partition 808 includes one extending on both sides in the width direction of the address electrode 806 as shown, and one not shown extending in a direction orthogonal to the address electrode 806.
A region partitioned by the partition 808 is a discharge chamber 805.

  A phosphor 809 is disposed in the discharge chamber 805. The phosphor 809 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 809R is located at the bottom of the red discharge chamber 805R, and the green discharge chamber 805G. A green phosphor 809G and a blue phosphor 809B are disposed at the bottom and the blue discharge chamber 805B, respectively.

On the lower surface of the second substrate 802 in the figure, a plurality of display electrodes 811 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 806. A dielectric layer 812 and a protective film 813 made of MgO or the like are formed so as to cover them.
The first substrate 801 and the second substrate 802 are bonded so that the address electrodes 806 and the display electrodes 811 face each other in a state of being orthogonal to each other. The address electrode 806 and the display electrode 811 are connected to an AC power source (not shown).
When the electrodes 806 and 811 are energized, the phosphor 809 emits light in the discharge display portion 803, and color display is possible.

In the present embodiment, the address electrode 806, the display electrode 811, and the phosphor 809 can be formed using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 806 in the first substrate 801 will be exemplified.
In this case, the following process is performed with the first substrate 801 placed on the set table 141 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 51. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 806 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 806 has been exemplified in the above, the display electrode 811 and the phosphor 809 can also be formed through the above steps.
In the case of forming the display electrode 811, as in the case of the address electrode 806, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 809, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 51, and corresponding. Land in the color discharge chamber 805.

Next, FIG. 43 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 900). In the figure, a part of the display device 900 is shown as a cross section.
The display device 900 is schematically configured to include a first substrate 901 and a second substrate 902 that are arranged to face each other, and a field emission display portion 903 formed therebetween. The field emission display unit 903 includes a plurality of electron emission units 905 arranged in a matrix.

  A first element electrode 906a and a second element electrode 906b constituting the cathode electrode 906 are formed on the upper surface of the first substrate 901 so as to be orthogonal to each other. In addition, a conductive film 907 having a gap 908 is formed in a portion partitioned by the first element electrode 906a and the second element electrode 906b. In other words, the first element electrode 906a, the second element electrode 906b, and the conductive film 907 constitute a plurality of electron emission portions 905. The conductive film 907 is made of, for example, palladium oxide (PdO), and the gap 908 is formed by forming after forming the conductive film 907.

  An anode electrode 909 facing the cathode electrode 906 is formed on the lower surface of the second substrate 902. A lattice-shaped bank portion 911 is formed on the lower surface of the anode electrode 909, and a phosphor 913 is disposed in each downward opening 912 surrounded by the bank portion 911 so as to correspond to the electron emission portion 905. Yes. The phosphor 913 emits fluorescence of any color of red (R), green (G), and blue (B), and each opening 912 has a red phosphor 913R, a green phosphor 913G, and a blue color. The phosphors 913B are arranged in the predetermined pattern described above.

  The first substrate 901 and the second substrate 902 configured as described above are bonded together with a minute gap. In this display device 900, electrons that jump out of the first element electrode 906a or the second element electrode 906b, which are cathodes, via the conductive film (gap 908) 907 are transferred to the phosphor 913 formed on the anode electrode 909 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 906a, the second element electrode 906b, the conductive film 907, and the anode electrode 909 can be formed using the droplet discharge device 1 and each color. The phosphors 913R, 913G, and 913B can be formed using the droplet discharge device 1.

  The first element electrode 906a, the second element electrode 906b, and the conductive film 907 have the planar shape shown in FIG. 44 (a). When these are formed, as shown in FIG. 44 (b). In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 906a, the second element electrode 906b, and the conductive film 907 are previously formed. Next, the first element electrode 906a and the second element electrode 906b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 907 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 907, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 901 and the second substrate 902 and a lyophobic process on the bank portions 911 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

It is an external appearance perspective view of the whole droplet discharge device concerning this embodiment. It is a top view of the droplet discharge device concerning this embodiment. It is a front view of the droplet discharge device concerning this embodiment. It is a right view of the droplet discharge device concerning this embodiment. (First) It is a top view of a head unit. 4A and 4B are explanatory views of a functional liquid droplet ejection head, in which FIG. 3A is an external perspective view of the functional liquid droplet ejection head, and FIG. 2B is a cross-sectional view when the functional liquid droplet ejection head is attached to a head plate. FIG. 4 is an external perspective view when a head unit is mounted on a main carriage. FIG. 4 is a right side view when the head unit is mounted on the main carriage. It is an external appearance perspective view around an X-axis table. It is a right side view around the X-axis table. It is explanatory drawing of (theta) table, (a) is a top view when the X-axis air slider supports the θ table support part, (b) is when the X-axis air slider supports the θ table support part FIG. 4C is an external perspective view when the θ table is supported on the X-axis air slider. It is explanatory drawing around an adsorption | suction table, and is an external appearance perspective view of the adsorption | suction table except a table main body. It is explanatory drawing of a suction table. It is explanatory drawing of the table height adjustment mechanism of a 3 point | piece support mechanism, (a) is a top view of a table height adjustment mechanism, (b) is a front view of a table height adjustment mechanism, (c) is a table. It is a side view of a height adjustment mechanism. It is a top view of the table main body of a suction table. It is an external appearance perspective view around a Y-axis table. It is a side view around a Y-axis table. It is a rear view around the Y-axis table. It is explanatory drawing of a 1st lift up unit, (a) And (b) is an external appearance perspective view of a 1st lift up unit, (c) is sectional drawing of a 1st lift up unit. It is explanatory drawing of a 2nd lift up unit, (a) is an external appearance perspective view of a 2nd lift up unit, (b) is sectional drawing of a 2nd lift up unit. It is an external perspective view around the machine base. It is a top view around the machine base. It is an external perspective view of the sheet supply unit of the wiping unit. 4A and 4B are explanatory views of a feeding reel of the sheet supply unit, in which FIG. 4A is a plan view of the feeding reel, and FIG. It is explanatory drawing of the air piping part arrange | positioned at the adsorption | suction table. It is explanatory drawing of an air suction device, (a) is the systematic diagram which showed the suction piping part typically, (b) shows the relationship between the suction hole and suction groove of a suction table, and an individual air suction tube. It is a figure. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Droplet discharge device 26 Control apparatus 41 Head unit 51 Function droplet discharge head 131 Work carrying in / out area 152 Suction table 181 Support base 183 Table main body 191 Table support member 193 Table height adjustment mechanism 201 Through-hole 212 Main suction groove 214 Suction Hole 225 Head recognition camera 261 Lift-up mechanism 262 Pre-alignment mechanism 263 Static elimination means 271 Lift-up pin 281 First lift-up plate 282 First lift-up mechanism 311 Second lift-up plate 312 Second lift-up mechanism 322 X Holding member 333 X Holding member moving mechanism 354 X air cylinder 362 Y holding member 363 Y holding member moving mechanism 384 Y air cylinder 411 Pre-discharge flushing unit 416 Box lifting mechanism 55 Air piping 556 air-off valve 563 air manifold 571 vacuum pump 572 suction pipe portion W Work

Claims (17)

In the work adsorption table of the liquid drop ejection device that draws by drawing the functional liquid onto the work while moving the flexible work to the functional liquid drop ejection head introduced with the functional liquid,
A suction table body on which the workpiece is directly set;
Vacuum suction and vacuum breakage of the workpiece through a suction groove formed on the surface of the suction table body and a suction hole connected to the suction groove, and a valve / pipe part connected to a vacuum suction source;
A support base for supporting the suction table body via a plurality of support members;
A lift-up device that raises and lowers the workpiece in the suction release state between a set position on the suction table body and a carry-in / carry-out position above it;
A workpiece suction table, comprising: a pre-alignment device disposed in a gap between the suction table main body and the support base and setting the workpiece on the suction table main body in a positioned state. The lift-up device is loosely inserted into a large number of through-holes formed in the suction table main body so as to freely move in and out, and a large number of lift-up pins that push up the workpiece from below,
A pin support plate that is disposed in a gap between the suction table body and the support base and has the multiple lift-up pins erected;
2. A vertical movement mechanism for moving the workpiece up and down between the set position and the loading / unloading position via the pin support plate and the plurality of lift-up pins. Workpiece adsorption table described in 1. The pre-alignment device includes at least a pair of X clamping pieces for positioning the workpiece placed on the suction table main body so as to be clamped in the X-axis direction;
At least a pair of Y clamping pieces for positioning the workpiece so as to be clamped in the Y-axis direction;
At least a pair of X clamping piece moving mechanisms for moving each X clamping piece from a standby position in the gap to a clamping position for clamping the workpiece;
The at least one pair of Y clamping piece moving mechanisms for moving each Y clamping piece from a standby position in the gap to a clamping position for clamping the workpiece. Workpiece adsorption table described in 1. The plurality of support members are composed of a plurality of support members that support the suction table body,
The work suction table according to any one of claims 1 to 3, wherein a height adjusting mechanism for moving the suction table main body in a vertical direction is incorporated in each of the support members.   A static eliminating device is further provided that neutralizes static electricity generated when the workpiece is pulled away from the set position toward the loading / unloading position by irradiating ionized light for ionizing air during lift-up. The work suction table according to claim 1. The lift-up device is configured to be capable of partially lifting the workpiece with respect to the suction table body.
The static eliminator includes an ionized light irradiation mechanism that irradiates the ionized light,
Control means for controlling the drive of the ionizing light irradiation mechanism and the lift-up device,
The control means lifts the other part in a state where a part of the work is in contact with the suction table body, and then irradiates the space between the work and the suction table body with ionized light. 6. The workpiece suction table according to claim 5, wherein the workpiece is lifted up again so as to be separated from the suction table main body in an irradiation state.   The apparatus further comprises a static eliminator that neutralizes static electricity generated when the work is pulled away from the set position toward the loading / unloading position by blowing ionized air during lift-up. The workpiece suction table according to any one of 4. The lift-up device is configured to be capable of partially lifting the workpiece with respect to the suction table body.
The static eliminator includes an ionized air blow mechanism that blows the ionized air,
Control means for controlling the driving of the ion air blow mechanism and the lift-up device,
The control means lifts the other part in a state where a part of the work is in contact with the suction table body, and then blows ionized air into the space between the work and the suction table body. The workpiece suction table according to claim 7, wherein the workpiece suction table is lifted up again so as to be separated from the suction table main body in a blown state. A head alignment camera that images the functional liquid droplet ejection head and a sub-carriage on which the functional liquid droplet ejection head is mounted in order to align the functional liquid droplet ejection head;
The work suction table according to claim 1, wherein the head alignment camera is supported by a bracket extending laterally from the support base. A nozzle observation camera for imaging each nozzle of the functional liquid droplet ejection head,
The workpiece suction table according to claim 1, wherein the nozzle observation camera is supported by the support base and faces a camera opening formed in the suction table body from below. The pre-alignment apparatus is driven by a plurality of air cylinders sharing a compressed air source supported by the support base, and has a plurality of control valves and branch manifolds for controlling the driving of the plurality of air cylinders,
The work suction table according to claim 1, wherein the plurality of control valves and the branch manifold are unitized and supported by the support base.   12. A pair of flushing units attached to both ends of the suction table main body in the moving direction, and receiving a function liquid discarding discharge by the function liquid droplet discharge head, further comprising: The workpiece adsorption table described. Each of the flushing units includes a flushing box that receives and discharges the functional liquid droplets, a use position where the upper end surface of the flushing box is flush with the surface of the workpiece, and a standby position where the flushing box is lowered from the use position. And a box lifting mechanism that lifts and lowers between,
The work suction table according to claim 12, wherein the box lifting mechanism is fixed to a support base.   A droplet discharge device comprising the workpiece suction table according to claim 1.   15. A method for manufacturing an electro-optical device, wherein the droplet discharge device according to claim 14 is used to form a film forming portion with functional droplets on the workpiece.   An electro-optical device using the droplet discharge device according to claim 14, wherein a film forming portion using functional droplets is formed on the workpiece. An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 15 or the electro-optical device according to claim 16.

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