JP2005064385A5 - - Google Patents

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Publication number
JP2005064385A5
JP2005064385A5 JP2003295419A JP2003295419A JP2005064385A5 JP 2005064385 A5 JP2005064385 A5 JP 2005064385A5 JP 2003295419 A JP2003295419 A JP 2003295419A JP 2003295419 A JP2003295419 A JP 2003295419A JP 2005064385 A5 JP2005064385 A5 JP 2005064385A5
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JP
Japan
Prior art keywords
disposed
waveguide
color filter
microlens
digital camera
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Granted
Application number
JP2003295419A
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Japanese (ja)
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JP4618765B2 (en
JP2005064385A (en
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Priority to JP2003295419A priority Critical patent/JP4618765B2/en
Priority claimed from JP2003295419A external-priority patent/JP4618765B2/en
Publication of JP2005064385A publication Critical patent/JP2005064385A/en
Publication of JP2005064385A5 publication Critical patent/JP2005064385A5/ja
Application granted granted Critical
Publication of JP4618765B2 publication Critical patent/JP4618765B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Claims (3)

半導体基板に設けられた複数の光電変換部と、
前記各光電変換部上に配された導波路と、
隣接する前記導波路の間に配された複数の配線層と、
前記複数の配線層の層間に配された層間膜と、
前記導波路の上方に前記導波路に対応して配されたマイクロレンズと、を有し、
前記導波路は、カラーフィルタと、該カラーフィルタを囲うように配された空気層とを有し、該空気層は前記カラーフィルタと、前記配線層及び前記層間膜との間に配されていることを特徴とする撮像素子。 A plurality of photoelectric conversion units provided on a semiconductor substrate ;
A waveguide disposed on each photoelectric converter;
A plurality of wiring layers disposed between the adjacent waveguides;
An interlayer film disposed between the plurality of wiring layers;
A microlens disposed in correspondence with the waveguide above the waveguide ;
The waveguide includes a color filter and an air layer disposed so as to surround the color filter, and the air layer is disposed between the color filter, the wiring layer, and the interlayer film. An image sensor characterized by the above. 前記カラーフィルタが配される前記導波路の開口は、前記光電変換部から前記マイクロレンズへ向かって大きくなっていることを特徴とする、請求項１に記載の撮像素子。 The imaging device according to claim 1 , wherein an opening of the waveguide in which the color filter is arranged is increased from the photoelectric conversion unit toward the microlens . 撮像レンズで結像した被写体像を撮像素子で光電変換することによって画像信号を得るデジタルカメラであって、
前記撮像素子として請求項１または２に記載の撮像素子を備えていることを特徴とするデジタルカメラ。 A digital camera that obtains an image signal by photoelectrically converting a subject image formed by an imaging lens with an imaging device,
A digital camera comprising the image pickup device according to claim 1 or 2 as the image pickup device.
JP2003295419A 2003-08-19 2003-08-19 Image sensor and digital camera equipped with the image sensor Expired - Fee Related JP4618765B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003295419A JP4618765B2 (en) 2003-08-19 2003-08-19 Image sensor and digital camera equipped with the image sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003295419A JP4618765B2 (en) 2003-08-19 2003-08-19 Image sensor and digital camera equipped with the image sensor

Publications (3)

Publication Number Publication Date
JP2005064385A JP2005064385A (en) 2005-03-10
JP2005064385A5 true JP2005064385A5 (en) 2006-09-28
JP4618765B2 JP4618765B2 (en) 2011-01-26

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ID=34371680

Family Applications (1)

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JP2003295419A Expired - Fee Related JP4618765B2 (en) 2003-08-19 2003-08-19 Image sensor and digital camera equipped with the image sensor

Country Status (1)

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JP (1) JP4618765B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5188011B2 (en) * 2005-03-15 2013-04-24 キヤノン株式会社 Image sensor
JP2007201266A (en) * 2006-01-27 2007-08-09 Fujifilm Corp Micro-lens, its process for fabrication, solid imaging element using the micro-lens, and its process for fabrication
JP2008010544A (en) * 2006-06-28 2008-01-17 Renesas Technology Corp Solid-state image pickup element
JP2009300268A (en) * 2008-06-13 2009-12-24 Nippon Hoso Kyokai <Nhk> Three-dimensional information detection device
US9532033B2 (en) 2010-11-29 2016-12-27 Nikon Corporation Image sensor and imaging device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2869280B2 (en) * 1993-01-27 1999-03-10 シャープ株式会社 Solid-state imaging device and method of manufacturing the same
JPH0745805A (en) * 1993-07-29 1995-02-14 Olympus Optical Co Ltd Solid-stage image pickup device
JPH08321914A (en) * 1995-05-24 1996-12-03 Sharp Corp Image senser
JPH10335618A (en) * 1997-05-20 1998-12-18 Hewlett Packard Co <Hp> Photo sensor array
JPH11284159A (en) * 1998-03-30 1999-10-15 Sharp Corp Waveguide type image sensor
JPH11354766A (en) * 1998-06-10 1999-12-24 Matsushita Electron Corp Solid state image sensor
JP4445604B2 (en) * 1999-07-07 2010-04-07 オリンパス株式会社 Solid-state imaging device and method for manufacturing solid-state imaging device
JP3672085B2 (en) * 2000-10-11 2005-07-13 シャープ株式会社 Solid-state imaging device and manufacturing method thereof
JP4923357B2 (en) * 2001-08-15 2012-04-25 ソニー株式会社 Method for manufacturing solid-state imaging device
JP2003209241A (en) * 2002-01-15 2003-07-25 Fuji Film Microdevices Co Ltd Solid-state imaging device

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