JP2005055301A - Testing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a testing device for transmitting a high-speed signal, concerning the testing device for testing an electronic device. <P>SOLUTION: This testing device is equipped with: a test head; a pattern generation part for generating a device test pattern for testing the electronic device and a test head test pattern for testing the test head; an optical communication means for converting the device test pattern generated by the pattern generation part into an optical communication signal, and supplying it to the test head; a means for supplying the test head test pattern generated by the pattern generation part to the test head; and a determination part for receiving an output signal from the electronic device and determining the quality of the electronic device. The test head has a storage part for storing the device test pattern and the test head test pattern, and a means for converting into an electric signal, the device test pattern converted into the optical communication signal received from the optical communication means. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a test apparatus for testing an electronic device. In particular, the present invention relates to a test apparatus capable of high-speed signal transmission.

  In the conventional test apparatus, a test pattern for testing an electronic device generated by the test apparatus main body is transmitted to a test head in contact with the electronic device, and the test pattern is supplied to the electronic device. Transmission of the test pattern from the test apparatus main body to the test head has been performed by electrical transmission.

  Since related patent documents and the like are not currently recognized, description thereof is omitted.

  With the recent increase in the speed of electronic devices, it is desired to increase the operation speed of test apparatuses that test electronic devices. However, in the conventional test apparatus, signal transmission to the test apparatus main body and the test head is performed by electrical transmission, and the speedup of signal transmission has almost reached the limit. In addition, in the conventional test apparatus, there is no means for testing whether the signal transmission is correctly performed in the signal transmission from the test apparatus main body to the test head. Therefore, when the electronic device is tested, the test pattern to be transmitted It was not possible to determine whether or not was transmitted accurately. For this reason, there are cases where the electronic device cannot be correctly tested.

  In order to solve the above-described problem, in the first embodiment of the present invention, a test apparatus for testing an electronic device, the test head being in contact with the electronic device and exchanging electrical signals with the electronic device, and the electronic device A pattern generator for generating a test head test pattern for testing a test head for receiving a device test pattern for testing a test head for receiving a device test pattern and supplying the device test pattern to an electronic device; An electro-optical conversion unit that converts a device test pattern into an optical communication signal, an optical communication unit that supplies the device test pattern converted into the optical communication signal to the test head, and a test generated by the pattern generation unit Diagnostic data transmission means for supplying a head test pattern to the test head, and a device test pattern A test unit that receives an output signal output from the electronic device and determines whether the electronic device is good or bad based on the device, the test head includes a device test pattern, a storage unit that stores the test head test pattern, and optical communication And a photoelectric conversion means for converting a device test pattern received from the means converted into an optical communication signal into an electrical signal.

  The apparatus further comprises a result transmission unit that supplies the test head test pattern and the device test pattern stored in the storage unit to the determination unit, and the determination unit is based on the test head test pattern and the device test pattern supplied by the result transmission unit. Thus, the quality of the test head may be determined. The storage unit stores the device test pattern as digital data of a plurality of bits, the pattern generation unit further generates a change signal for changing the device test pattern stored in the storage unit, and the diagnostic data transmission means The change signal may be supplied to the storage unit, and the storage unit may change and store digital data at an arbitrary address of the device test pattern based on the change signal.

  The device test pattern and the test head test pattern may be digital signals, and the test head may include a D / A converter that converts the device test pattern into an analog signal and supplies the analog signal to the electronic device. The test head has a plurality of D / A converters for supplying device test patterns to a plurality of input / output pins of the electronic device, and the device test patterns stored in the storage unit are converted into a plurality of D / A. You may further provide the selection part which selects which of converters supplies.

  The test head has a plurality of D / A converters for supplying a device test pattern to each of the plurality of input / output pins of the electronic device, and the device test pattern converted by the photoelectric conversion means is stored in the storage unit or A selection unit that selects which of the plurality of D / A converters is supplied may be further provided. The storage unit may supply the stored device test pattern to any of the plurality of D / A converters via the selection unit.

  The above summary of the invention does not enumerate all the necessary features of the present invention, and sub-combinations of these feature groups can also be the invention.

  The test apparatus according to the present invention can perform signal transmission between the test apparatus main body and the test head at high speed. Further, the test of the test head can be easily performed, and a highly reliable test can be performed in the test of the electronic device.

  Hereinafter, the present invention will be described through embodiments of the invention. However, the following embodiments do not limit the invention according to the scope of claims, and all combinations of features described in the embodiments are included. It is not necessarily essential for the solution of the invention.

  FIG. 1 shows an example of the configuration of a test apparatus 100 according to the present invention. The test apparatus 100 includes a pattern generation unit 10, a test head 30, an optical communication unit 20, a diagnostic data transmission unit 70, and a determination unit 40. The test head 30 contacts the electronic device 50 and exchanges electrical signals with the electronic device 50. The pattern generation unit 10 generates a device test pattern for testing the electronic device 50, a test head test pattern for testing the test head 30, and a reference clock for controlling the operation of the test apparatus 100. The test apparatus 100 in this example has a function of testing the electronic device 50 and a function of testing the test head 30. Hereinafter, an operation in which the test apparatus 100 tests the electronic device 50 will be described.

  The optical communication unit 20 converts the device test pattern and the reference clock generated by the pattern generation unit 10 into an optical communication signal and supplies the signal to the test head 30. The optical communication unit 20 includes, as an example, an electro-optical conversion unit 22 that converts the device test pattern generated by the pattern generation unit 10 and the reference clock into an optical communication signal. The optical communication unit 20 supplies the device test pattern converted into the optical communication signal and the reference clock to the test head 30.

  The test head 30 converts the device test pattern converted from the optical communication signal received from the optical communication unit 20 into an electric signal and supplies the electric signal to the electronic device 50. Further, the test head 30 receives an output signal output from the electronic device 50 based on the supplied device test pattern, and supplies the output signal to the determination unit 40 via the optical communication unit 20. In this example, the test head 30 supplies the output signal converted to the optical communication signal to the optical communication means 20. The optical communication unit 20 includes a photoelectric conversion unit 24 that converts the output signal converted into the optical communication signal into an electrical signal. The photoelectric conversion means 24 supplies the determination unit 40 with the output signal converted into an electrical signal. The determination unit 40 determines the quality of the electronic device 50 based on the received output signal. For example, when a device test pattern is input to the electronic device 50, the determination unit 40 compares the expected value signal to be output by the electronic device 50 with the output signal, and determines whether the electronic device 50 is good or bad. It's okay. The pattern generation unit 10 may generate the expected value signal based on the generated device test pattern and supply the expected value signal to the determination unit 40.

  Next, an operation in which the test apparatus 100 tests the test head 30 will be described. The pattern generation unit 10 generates a test head test pattern for testing the test head 30. The diagnostic data transmission means 70 supplies the test head test pattern generated by the pattern generation unit 10 to the test head 30. The diagnostic data transmission unit 70 is, for example, a cable that electrically connects the pattern generation unit 10 and the test head 30 directly. The pattern generation unit 10 supplies a signal generated based on the generated test head test pattern to the test head 30 via the optical communication unit 20 as a device test pattern. For example, the pattern generation unit 10 may supply the same signal as the test head test pattern as a device test pattern to the test head. The test head 30 supplies the received test head test pattern and device test pattern to the determination unit 40. The determination unit 40 determines the quality of the test head 30 based on the test head test pattern and the device test pattern received from the test head 30. For example, the determination unit 40 detects a defect in the transmission path of the device test pattern in the optical communication unit 20 and the test head 30.

  FIG. 2 shows an example of a detailed configuration of the test apparatus 100 in this example. 2, components having the same reference numerals as those in FIG. 1 may have the same or similar functions and configurations as those described with reference to FIG. The test apparatus 100 includes a test apparatus main body 60, a test head 30, an optical communication unit 20, and a diagnostic data transmission unit 70.

  The test apparatus main body 60 includes a pattern generation unit 10, a reference clock generation unit 12, and a determination unit 40. The pattern generation unit 10 and the determination unit 40 may have the same functions as the pattern generation unit 10 and the determination unit 40 described with reference to FIG. The reference clock generation unit 12 generates a reference clock that controls the operation of the test apparatus 100. In this example, the reference clock generation unit 12 generates the reference clock. However, in another example, the pattern generation unit 10 may generate the reference clock as described with reference to FIG. In addition, the test apparatus 100 in this example includes a function of testing the electronic device 50 and a function of testing the test head 30 as with the test apparatus 100 described in relation to FIG. Hereinafter, a case where the test apparatus 100 tests the electronic device 50 will be described.

  The pattern generation unit 10 generates a test pattern for testing the electronic device 50 and supplies the generated device test pattern to the test head 30 via the optical communication unit 20. Further, the reference clock generation unit 12 supplies the generated reference clock to the test head 30 via the optical communication unit 20.

  The optical communication unit 20 converts the device test pattern generated by the pattern generation unit 10 and the reference clock generated by the reference clock generation unit 12 into an optical communication signal and supplies the signal to the test head 30. The optical communication unit 20 includes an electro-optical conversion unit 22 that converts the device test pattern generated by the pattern generation unit 10 and the reference clock generated by the reference clock generation unit 12 into an optical communication signal. As an example, the electro-optical conversion means 22 includes a light-emitting diode or a semiconductor laser that converts a received device test pattern and a reference clock into an optical communication signal, and an optical fiber cable that transmits the optical communication signal. The electro-optical conversion means 22 preferably includes a modulation unit that modulates the received device test pattern and the reference clock based on the characteristics of the light-emitting diode or semiconductor laser and the optical fiber cable.

  The test head 30 receives the device test pattern and the reference clock converted into the optical communication signal, and supplies the received device test pattern to the electronic device 50. As an example, the test head 30 includes a photoelectric conversion unit 32, a storage unit 34, a D / A converter 38, an A / D converter 42, and a photoelectric conversion unit 36. The photoelectric conversion means 32 converts the device test pattern and the reference clock converted into the optical communication signal into an electric signal. As an example, the photoelectric conversion means 32 includes a photodiode that detects an optical communication signal and converts it into an electrical signal, and a demodulator that demodulates the electrical signal converted by the photodiode. The photoelectric conversion means 32 supplies the converted device test pattern to the storage unit 34. The storage unit 34 is a register, for example, and stores the received device test pattern as a plurality of bits of digital data. Then, the storage unit 34 supplies the stored device test pattern to the D / A converter 38. The D / A converter 38 converts the device test pattern into an analog signal and supplies the analog signal to the electronic device 50. The storage unit 34 and the D / A converter 38 receive the reference clock from the photoelectric conversion means 32 and perform their respective operations based on the received reference clock.

  The A / D converter 42 receives an output signal output from the electronic device 50 based on the device test pattern, and converts the received output signal into a digital signal. The A / D converter 42 receives the reference clock from the photoelectric conversion means 32, and operates based on the received reference clock. The A / D converter 42 supplies the output signal converted into the digital signal to the electro-optical conversion means 36. The electro-optical conversion means 36 converts the received digital signal into an optical communication signal and supplies it to the optical communication means 20. The electro-optical conversion unit 36 may have the same or similar function and configuration as the electro-optical conversion unit 22.

  The optical communication unit 20 includes an optical fiber cable for receiving an output signal converted into an optical communication signal from the electro-optical conversion unit 36, and a photoelectric conversion unit 24 for converting the received output signal into an electric signal. . The photoelectric conversion means 24 may have the same or similar function and configuration as the photoelectric conversion means 32. The photoelectric conversion means 24 supplies the determination unit 40 with the output signal converted into an electrical signal.

  The determination unit 40 determines the quality of the electronic device 50 based on the received output signal. As described with reference to FIG. 1, the determination unit 40 may determine pass / fail of the electronic device 50 based on the reference value signal generated by the pattern generation unit and the output signal. According to the test apparatus 100 described in this example, signal transmission between the test apparatus main body 60 and the test head 30 can be performed at high speed by performing the signal transmission between the optical communication means 20. In addition, since the optical communication unit 20 is extremely less affected by electrical interference, it is possible to perform signal transmission with high accuracy.

  Next, the case where the test apparatus 100 in this example tests the test head 30 will be described. The pattern generation unit 10 generates a test head test pattern for testing the test head 30 and supplies the test head test pattern to the storage unit 34 via the diagnostic data transmission unit 70. The diagnostic data transmission unit 70 may have the same or similar function and configuration as the diagnostic data transmission unit 70 described with reference to FIG. 1, the pattern generation unit 10 supplies a signal based on the test head test pattern to the storage unit 34 through the optical communication unit 20 as a device test pattern. .

  The storage unit 34 supplies the stored test head test pattern and device test pattern to the determination unit 40. The test apparatus 100 preferably further includes a result transmission means for supplying the test head test pattern and the device test pattern stored in the storage unit 34 to the determination unit 40. In this example, the result transmission means is determined using an electro-optic conversion means 36, an opto-electric conversion means 24, and an optical fiber cable that transmits signals between the electro-optic conversion means 36 and the opto-electric conversion means 24. A test head test pattern and a device test pattern are supplied to the unit 40.

  The determination unit 40 determines pass / fail of the test head 30 based on the test head test pattern and the device test pattern, similarly to the determination unit 40 described with reference to FIG. In the determination unit 40, the quality of the optical communication means 20 and the photoelectric conversion means 32 can be determined by comparing the test head test pattern with the device test pattern. As described above, according to the test apparatus 100 in this example, the quality of the test head 30 can be easily determined, and the reliability of the test of the electronic device 50 can be improved.

  Further, in this example, the test apparatus 100 includes a set of D / A converters and A / D converters, but in another example, the test apparatus 100 includes a plurality of sets of D / A converters, and An A / D converter may be provided. In this case, the test apparatus 100 may include a plurality of sets of D / A converters and a plurality of optical communication means 20 corresponding to each of the A / D converters. Hereinafter, the test apparatus 100 including a plurality of sets of D / A converters 38 and A / D converters 42 will be described.

  FIG. 3 shows a part of the configuration of the test head 30. FIG. 3A shows an example of a part of the configuration of the test head 30 that supplies a device test pattern to the electronic device 50. The test head 30 includes photoelectric conversion means 32, a storage unit 34, a selection unit 44, and a plurality of D / A converters 38. The photoelectric conversion means 32 and the storage unit 34 may have the same or similar functions and configurations as the photoelectric conversion means 32 and the storage unit 34 described with reference to FIG. The selection unit 44 selects which of the N D / A converters 38 (where N is an arbitrary integer) to be supplied with the device test pattern stored in the storage unit 34. It is preferable that a signal for selecting any of the plurality of D / A converters 38 is given to the selection unit 44. Further, the pattern generation unit 10 may add data indicating any of the plurality of D / A converters 38 to the device test pattern and supply the data to the test head 30. The plurality of D / A converters 38 supply the received device test patterns to the plurality of input / output pins of the electronic device 50, respectively.

  The test head 30 has a plurality of A / D converters 42 (see FIG. 2) corresponding to the plurality of D / A converters 38, respectively. The plurality of A / D converters receive an output signal output from the electronic device, convert the received output signal into a digital signal, and supply the digital signal to the electro-optical conversion unit 36 (see FIG. 2). The plurality of A / D converters 42 and the electro-optical conversion means 36 may have functions and configurations similar to those of the A / D converter 42 and the electro-optical conversion means 36 described with reference to FIG.

  FIG. 3B shows another example of a part of the configuration of the test head 30 that supplies a device test pattern to the electronic device 50. The test head 30 includes a photoelectric conversion unit 32, a selection unit 44, a storage unit 34, a plurality of D / A converters 38, a plurality of A / D converters 42 (see FIG. 2), and an electro-optical conversion unit 36 (see FIG. 2). ). The photoelectric conversion means 32, the plurality of D / A converters 38, the plurality of A / D converters 42, and the electric light conversion means 36 are the same as the photoelectric conversion means 32, the plurality of Ds described in connection with FIG. The A / D converter 38, the plurality of A / D converters 42, and the electro-optical converter 36 have the same or similar functions and configurations.

  The selection unit 44 receives the device test pattern converted by the photoelectric conversion means 32 and selects whether the device test pattern is supplied to the storage unit 34 or the plurality of D / A converters 38. The selection unit 44 selects whether to supply a signal to the storage unit 34 or to read a signal stored in the storage unit 34.

  Further, the pattern generation unit 10 described with reference to FIGS. 1 and 2 further generates a change signal for changing the device test pattern stored in the storage unit 34, and the diagnostic data transmission unit 70 A signal is supplied to the storage unit 34, and the storage unit 34 may change and store digital data at an arbitrary address of the device test pattern based on the change signal. When a part of the device test pattern stored in the storage unit 34 is changed to supply a device test pattern whose waveform changes slightly to the electronic device 50, the pattern generation unit 10 passes the optical communication unit 20. Without newly supplying a device test pattern to the storage unit 34, it is possible to supply a device test pattern whose waveform changes slightly to the electronic device 50. That is, the device test pattern stored in the storage unit 34 is changed, and the selection unit 44 reads out the device test pattern stored in the storage unit 34 and supplies the device test pattern to an arbitrary D / A converter 38. A device test pattern with a waveform that changes by 50 can be supplied.

  In this example, the test apparatus 100 was provided with a plurality of sets of D / A converters 38 and A / D converters 42, and a set of photoelectric conversion means 32 and electrical / optical conversion means 36, but in other examples, The test apparatus 100 may include a plurality of sets of D / A converters and a plurality of sets of photoelectric conversion units 32 and electro-optical conversion units 36 respectively corresponding to the A / D converters. In this case, the test apparatus 100 preferably includes a plurality of optical fiber cables respectively corresponding to the plurality of sets of the photoelectric conversion means 32 and the photoelectric conversion means 36. In general, the signal transmission speed by the series of electro-optic conversion, optical fiber cable, and opto-electric conversion is capable of high-speed transmission of about 2 Gbps (gigabit per second) per series, and there are also several phase shifts in the case of multi-series. 10 ps (picosecond) and very small. Therefore, even when the sampling rate in the D / A converter 38 and the A / D converter 42 is increased, a sufficient signal transmission speed can be obtained between the test apparatus main body 60 and the test head 30. it can. Therefore, an increase in the number of signals transmitted in parallel between the test apparatus main body 60 and the test head 30 can be suppressed, and an increase in the number of signal transmission cables can be suppressed.

  As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above-described embodiment. It is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

It is a figure which shows an example of a structure of the test apparatus 100 which concerns on this invention. It is a figure which shows an example of the detailed structure of the test apparatus 100 in this example. 2 is a diagram showing a part of the configuration of a test head 30. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Pattern generation part, 12 ... Reference clock generation part, 20 ... Optical communication means, 22 ... Electric light conversion means, 24 ... Photoelectric conversion means, 30 ... Test head, 32: photoelectric conversion means, 34: storage section, 36: electric light conversion means, 38: D / A converter, 40: determination section, 42: A / D converter, 44 ... Selection unit, 50 ... Electronic device, 60 ... Test apparatus body, 70 ... Diagnostic data transmission means, 100 ... Test apparatus

Claims (7)

A test apparatus for testing an electronic device,
A test head that contacts the electronic device and exchanges electrical signals with the electronic device;
A pattern generation unit that generates a test head test pattern for testing the test head that receives the device test pattern and supplies the device test pattern to the electronic device, and a device test pattern for testing the electronic device; ,
Light having electro-optical conversion means for converting the device test pattern generated by the pattern generation unit into an optical communication signal, and supplying the device test pattern converted into the optical communication signal to the test head Communication means;
Diagnostic data transmission means for supplying the test head test pattern generated by the pattern generation unit to the test head;
A determination unit that receives an output signal output from the electronic device based on the device test pattern and determines whether the electronic device is good or bad;
The test head is
A storage unit for storing the device test pattern and the test head test pattern;
A test apparatus comprising: a photoelectric conversion means for converting the device test pattern received from the optical communication means and converted into the optical communication signal into an electrical signal. The test head test pattern stored in the storage unit and the device test pattern are further provided to the determination unit, further comprising a result transmission unit,
The test apparatus according to claim 1, wherein the determination unit determines pass / fail of the test head based on the test head test pattern and the device test pattern supplied by the result transmission unit. The storage unit stores the device test pattern as digital data of a plurality of bits,
The pattern generation unit further generates a change signal for changing the device test pattern stored in the storage unit,
The diagnostic data transmission means supplies the change signal to the storage unit,
The test apparatus according to claim 1, wherein the storage unit changes and stores digital data at an arbitrary address of the device test pattern based on the change signal. The device test pattern and the test head test pattern are digital signals,
The test apparatus according to claim 1, wherein the test head includes a D / A converter that converts the device test pattern into an analog signal and supplies the analog signal to the electronic device. The test head includes a plurality of the D / A converters that supply the device test pattern to a plurality of input / output pins of the electronic device,
The test apparatus according to claim 4, further comprising a selection unit that selects which of the plurality of D / A converters to supply the device test pattern stored in the storage unit. The test head includes a plurality of the D / A converters that supply the device test pattern to a plurality of input / output pins of the electronic device,
5. The apparatus according to claim 4, further comprising a selection unit that selects which of the storage unit and the plurality of D / A converters to supply the device test pattern converted by the photoelectric conversion unit. Testing equipment.   The test apparatus according to claim 6, wherein the storage unit supplies the stored device test pattern to any of the plurality of D / A converters via the selection unit.

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