JP2005055209A

JP2005055209A - Extra-precision movable carriage device

Info

Publication number: JP2005055209A
Application number: JP2003206369A
Authority: JP
Inventors: Tetsuya Ishikawa; 哲也石川
Original assignee: AINO SANGYO KK; EIKOH CO Ltd; KOSHIEN KINZOKU KK; Nippon Pillar Packing Co Ltd; Aiden KK
Current assignee: AINO SANGYO KK; EIKOH CO Ltd; KOSHIEN KINZOKU KK; Nippon Pillar Packing Co Ltd; Aiden KK
Priority date: 2003-08-06
Filing date: 2003-08-06
Publication date: 2005-03-03
Anticipated expiration: 2023-08-06
Also published as: JP4362326B2

Abstract

PROBLEM TO BE SOLVED: To provide an extra-precision movable carriage device 4 capable of improving greatly moving precision. SOLUTION: A movable frame 2 is supported to be relatively movable in the direction of X with a fixed frame 1 by a first and a second parallel beams 51, 52 comprising T-shaped beams. A movable body 3 having a movable carriage 4 is supported to be relatively movable in the direction of Y with the movable frame 2 by a third and a fourth parallel beams 61, 62 comprising the T-shaped beams. The movable carriage 4 is relatively and linearly displaced relative to the fixed frame 1 in the direction of X while elastically deforming the first and second parallel beams 51, 52 by applying pushing force or pulling force to the movable frame 2 in the direction of X. The movable carriage 4 is relatively and linearly displaced relative to the movable frame 2 in the direction of X while elastically deforming the third and fourth parallel beams 61, 62 by applying the pushing force or the pulling force to the movable body 3 in the direction of Y. COPYRIGHT: (C)2005,JPO&NCIPI

Description

【０００１】
【発明の属する技術分野】
本発明は、放射光施設・光学系、マイクロビーム関連部品、Ｘ線リソグラフィ、マイクロマシン製作、高分解顕微鏡ステージ等に使用される超精密移動台装置であって、移動台を２次元方向（Ｘ方向及びＹ方向）へ超精密に微動させうるように構成された超精密移動台装置に関するものである。
【０００２】
【従来の技術】
この種の超精密移動台装置としては、固定台にＸ方向に相対移動する第１ステージを支持する共に、第１ステージにＹ方向に相対移動する第２ステージを支持させて、第１ステージを固定台に対してＸ方向に移動させ且つ第２ステージを第２ステージに対してＹ方向に移動させることにより、第２ステージに設けた移動台を２次元方向に移動させるように構成したものが周知である。而して、かかる装置にあっては、各ステージを一定方向（Ｘ方向又はＹ方向）に直線運動可能にガイドしておくための手段として、一般に、各ステージの目的方向以外への移動をこれに接触する転動部材や摺動部材（クロスローラーガイド等）により規制するようにしたものが採用されている。
【０００３】
【発明が解決しようとする課題】
しかし、このようなガイド手段を使用した場合、転動部材や摺動部材の加工精度等の不可避的要因により、各ステージの移動精度を一定以上に高くすることができない。例えば、クロスローラーガイドを使用する場合、その精度はクロスローラの真円度に起因して、縦横の揺れを±１０秒程度に抑えるのが限度であり、放射光を用いた光学系等においては使用することができない。放射光を用いた光学系においては、縦横の揺れが共に±０．５μＲａｄ（約０．１秒）程度の精度が要求されている。なお、移動台の移動精度（各ステージの移動精度）を高めるために、移動補正をピエゾ素子を用いた電気的な制御により行うようにすることも提案されてはいるが、かかる制御手段を使用したものでは、高価であること及び使用上の制約が多いこと等の問題がある。
【０００４】
本発明は、このような点に鑑みてなされたもので、転動部材や摺動部材を全く使用せず且つ移動補正を行うための制御手段を必要としないガイド手段を採用することにより、移動精度の大幅な向上を図りうる超精密移動台装置を提供することを目的とするものである。
【０００５】
【課題を解決するための手段】
本発明は、装置設置面に固定される固定枠と、固定枠内に配置された可動枠と、可動枠内に配置された可動体と、可動体に設けられた移動台と、可動枠を固定枠に相対的にＸ方向に往復移動自在にガイドする第１ガイド手段と、可動体を可動枠に相対的にＹ方向に往復移動自在に支持する第２ガイド手段と、可動枠を固定枠に対して相対的にＸ方向に強制移動させる第１移動手段と、可動体を固定枠に対して相対的にＹ方向に強制移動させる第２移動手段と、を具備する超精密移動台装置であって、第１ガイド手段が、可動枠とこれにＹ方向において対向する固定枠部分たる第１固定枠部分とを連結する一対の第１平行梁と、可動枠とこれにＺ方向において対向する固定枠部分たる第２固定枠部分とを連結する一対の第２平行梁とで構成されており、第２ガイド手段が、可動体とこれにＸ方向において対向する可動枠部分たる第１可動枠部分とを連結する一対の第３平行梁と、可動体とこれにＺ方向において対向する可動枠部分たる第２可動枠部分とを連結する一対の第４平行梁とで構成されており、移動台が、第１移動手段により可動枠にＸ方向への押圧力又は引張力を作用させることによって第１及び第２平行梁を弾性変形しつつ固定枠に対してＸ方向に相対直線変位せしめられると共に、第２移動手段により可動体にＹ方向への押圧力又は引張力を作用させることによって第３及び第４平行梁を弾性変形しつつ可動枠に対してＸ方向に相対直線変位せしめられ、且つ上記押圧力又は引張力を解除することによって第１及び第２平行梁又は第３及び第４平行梁が変形前の状態に弾性復帰するように構成してあることを特徴とする超精密移動台装置を提案する。
【０００６】
而して、かかる超精密移動装置にあっては、各平行梁が（１）又は（２）のように構成される。
（１）各第１平行梁は、板面がＺ方向に平行するバネ板からなる一対のＴ字状梁であって、基端部が可動枠に連結されてＹ方向に延びる第１主梁とＸ方向に延びて両端部が第１固定枠部分に連結され且つ中央部が第１主梁の先端部に一体連結された第１ヒンジ梁とからなる一対の第１Ｔ字状梁で構成されており、各第２平行梁は、板面がＺ方向に平行するバネ板からなる一対のＴ字状梁であって、基端部が可動枠に連結されてＺ方向に延びる第２主梁とＸ方向に延びて両端部が第２固定枠部分に連結され且つ中央部が第２主梁の先端部に一体連結された第２ヒンジ梁とからなる一対の第２Ｔ字状梁で構成されており、各第３平行梁は、板面がＺ方向に平行するバネ板からなる一対のＴ字状梁であって、基端部が可動体に連結されてＸ方向に延びる第３主梁とＹ方向に延びて両端部が第１可動枠部分に連結され且つ中央部が第３主梁の先端部に一体連結された第３ヒンジ梁とからなる一対の第３Ｔ字状梁で構成されており、各第４平行梁は、板面がＺ方向に平行するバネ板からなる一対のＴ字状梁であって、基端部が可動体に連結されてＺ方向に延びる第４主梁とＹ方向に延びて両端部が第２可動枠部分に連結され且つ中央部が第４主梁の先端部に一体連結された第４ヒンジ梁とからなる一対の第４Ｔ字状梁で構成されている。
（２）各第１平行梁は、板面がＺ方向に平行するバネ板からなる一対のＨ字状梁であって、Ｙ方向に延びる第１主梁と、Ｘ方向に延びて両端部が第１固定枠部分に連結され且つ中央部が第１主梁の先端部に一体連結された第１ヒンジ梁と、Ｘ方向に延びて両端部が可動枠に連結され且つ中央部が第１主梁の基端部に一体連結された第１副ヒンジ梁とからなる一対の第１Ｈ字状梁で構成されており、各第２平行梁は、板面がＺ方向に平行するバネ板からなる一対のＨ字状梁であって、Ｚ方向に延びる第２主梁と、Ｘ方向に延びて両端部が第２固定枠部分に連結され且つ中央部が第２主梁の先端部に一体連結された第２ヒンジ梁と、Ｘ方向に延びて両端部が可動枠に連結され且つ中央部が第２主梁の基端部に一体連結された第２副ヒンジ梁とからなる一対の第２Ｈ字状梁で構成されており、各第３平行梁は、板面がＺ方向に平行するバネ板からなる一対のＨ字状梁であって、Ｘ方向に延びる第３主梁と、Ｙ方向に延びて両端部が第１可動枠部分に連結され且つ中央部が第３主梁の先端部に一体連結された第３ヒンジ梁と、Ｙ方向に延びて両端部が可動体に連結され且つ中央部が第３主梁の基端部に一体連結された第３副ヒンジ梁とからなる一対の第３Ｈ字状梁で構成されており、各第４平行梁は、板面がＺ方向に平行するバネ板からなる一対のＨ字状梁であって、Ｚ方向に延びる第４主梁と、Ｙ方向に延びて両端部が第２可動枠部分に連結され且つ中央部が第４主梁の先端部に一体連結された第４ヒンジ梁と、Ｙ方向に延びて両端部が可動体に連結され且つ中央部が第４主梁の基端部に一体連結された第４副ヒンジ梁とからなる一対の第４Ｈ字状梁で構成されている。
【０００７】
【発明の実施の形態】
以下、本発明の実施の形態を図１〜図１０及び図１１〜図２０に基づいて説明する。
【０００８】
図１〜図１０は第１の実施の形態を示しており、この実施の形態における本発明の超精密移動台装置（以下「第１装置Ｍ１」という）は、図１に示す如く、装置設置面に固定される固定枠１と、固定枠１内に配置された可動枠２と、可動枠２内に配置された可動体３と、可動体３に設けられた移動台４と、可動枠３を固定枠１に相対的にＸ方向に往復移動自在に支持する第１ガイド手段５と、可動体３を可動枠２に相対的にＹ方向に往復移動自在に支持する第２ガイド手段６と、可動枠２を固定枠１に対して相対的にＸ方向に強制移動させる第１移動手段７と、可動体３を固定枠１に対して相対的にＹ方向に強制移動させる第２移動手段８とを具備する。
【０００９】
固定枠１は所定の装置設置面（例えば水平面）上に固定されており、図１及び図２に示す如く、Ｙ方向に対向して平行する一対の第１固定枠部分１１，１１と、Ｚ方向に対向して平行する一対の第２固定枠部分１２，１２と、Ｘ方向に対向して平行する一対の第３固定枠部分１３，１３とからなる中空の一体構造物に構成されている。各第１及び第２固定枠部分１１，１２はＸ方向に長尺な矩形状をなしており、各第３固定枠部分１３は中心部から矩形状腕がＹ方向及びＺ方向に張り出す十字形状をなしている。第１固定枠部分１１，１１の両端部間及び第２固定枠部分１２，１２の両端部間は、夫々、第３固定枠部分１３，１３により連結されている。
【００１０】
可動枠２は、図１、図７及び図８に示す如く、Ｘ方向に所定範囲で移動可能な状態で固定枠１内に配置されており、図３に示す如く、Ｘ方向に対向して平行する一対の第１可動枠部分２１，２１と、Ｚ方向に対向して平行する一対の第２可動枠部分２２，２２と、Ｙ方向に対向して平行する一対の第３可動枠部分２３，２３と、Ｘ方向及びＹ方向に対向して平行する二対の第４可動枠部分２４，２４及び２４，２４と、Ｘ方向及びＺ方向に対向して平行する二対の第５可動枠部分２５，２５及び２５，２５と、Ｘ方向に対向して平行する一対の第６可動枠部分２６，２６とからなる中空構造物である。各第１及び第２可動枠部分２１，２２はＹ方向に長尺な矩形状をなしており、各第３可動枠部分２３は中心部から矩形状腕がＺ方向及びＸ方向に張り出す十字形状をなしている。両第２可動枠部分２２，２２の各端部間は、第３可動枠部分２３で連結されている。各第４可動枠部分２４は矩形状をなしており、Ｙ方向に対向する各一対の第４可動枠部分２４，２４は、第１可動枠部分２１のＹ方向両端部と両第３可動枠部分２３におけるＸ方向に延びる矩形腕の端部との間を当該中空構造物の内部側において連結している。各第５可動枠部分２５は矩形状をなしており、Ｚ方向に対向する各一対の第５可動枠部分２５，２５は、第６可動枠部分２６のＺ方向両端部に固着されている。すなわち、当該一対の第５可動枠部分２５，２５を第６可動枠部分２６を介して一体的に連結されている。この一体連結物２５，２５，２６は、Ｙ方向に対向する一対の第４可動枠部分２４，２４間に位置した状態で、第１可動枠部分２１の中央部に固着されている。なお、第２可動枠部分２２，２２と第３可動枠部分２３，２３とは、一体構造の矩形枠に構成されているが、その他の各可動枠部分２１，２４，２５，２６は各々独立した部材であり、これらの可動枠部分２１，２４，２５，２６相互間及び上記一体構造の矩形枠との間における連結ないし固着は、夫々、適宜の接着手段（例えば、接着剤又はビス等）により行われている。
【００１１】
可動体３は、図１、図９及び図１０に示す如く、Ｙ方向に所定範囲で移動可能な状態で可動枠２内に配置されており、図４に示す如く、Ｘ方向及びＹ方向に対向して平行する二対の第１可動体部分３１，３１及び３１，３１と、Ｘ方向に対向して平行する一対の第２可動体部分３２，３２と、Ｙ方向及びＺ方向に対向して平行する二対の第３可動体部分３３，３３及び３３，３３と、Ｙ方向に対向して平行する一対の第４可動体部分３４，３４とからなる矩形体構造物である。各可動体部分３１，３２，３３，３４は各々独立した矩形状部材であり、相互に次のように連結されている。すなわち、Ｙ方向に対向する各一対の第１可動体部分３１，３１は、第２可動体部分３２のＹ方向両端部に固着されている。Ｚ方向に対向する各一対の第３可動体部分３３，３３は、第４可動体部分３４のＺ方向両端部に固着されており、第４可動体部分３４を介して一体的に連結されている。第４可動体部分３４は、これに固着した第３可動体部分３３，３３を両第２可動体部分３２，３２間に位置させた状態で、両第２可動体部分３２，３２に固着されている。なお、各可動体部分３１，３２，３３，３４間の連結ないし固着は、適宜の接着手段（例えば、接着剤又はビス等）により行われる。
【００１２】
移動台４は、図１及び図５に示す如く、所定の被移動機器（例えば、光学機器やウエハ等の部材）を取付、載置又は支持するための矩形板４１と、その４隅部に設けた矩形状の支柱体４２…とからなる一体構造物であり、図１に示す如く、矩形板４１を固定枠１外に位置させた状態で可動体３に取り付けられている。すなわち、支柱体４２…を、図１に示す如く、第２固定枠部分１２をＹ方向において跨ぐと共に第２可動枠部分２２をＸ方向に跨いだ状態で、両第２可動体部分３２，３２に固着して、可動枠２が固定枠１に対してＹ方向に相対移動した場合及び可動体３が可動枠２に対してＸ方向に相対移動した場合において、各支柱体４２が第２固定枠部分１２及び第２可動枠部分２２に干渉することなく、移動台４を固定枠１に対してＸ方向及びＹ方向に所定範囲で移動できるようになっている。なお、各支柱体４２の第２可動体部分３２への固着手段としては接着剤等が使用される。
【００１３】
第１ガイド手段５は、図１、図７及び図８に示す如く、可動枠２とこれにＹ方向において対向する固定枠１の第１固定枠部分１１，１１とを連結する一対の第１平行梁５１，５１と、可動枠２とこれにＺ方向において対向する固定枠１の第２固定枠部分１２，１２とを連結する一対の第２平行梁５２，５２とで構成されている。
【００１４】
各第１平行梁５１は、板面がＺ方向に平行するバネ板からなる一対の第１Ｔ字状梁５１Ａ，５１Ａで構成されている。各第１Ｔ字状梁５１Ａは、図２に示す如く、基端部が可動枠２の第４可動枠部分２４に一体連結されてＹ方向に延びる第１主梁５１ａと、Ｘ方向に延びて両端部が固定枠１の第１固定枠部分１１に一体連結され且つ中央部が第１主梁５１ａの先端部に一体連結された第１ヒンジ梁５１ｂとからなる。
【００１５】
各第２平行梁５２は、板面がＺ方向に平行するバネ板からなる一対の第２Ｔ字状梁５２Ａ，５２Ａで構成されている。各第２Ｔ字状梁５２Ａは、図２に示す如く、基端部が可動枠２の第５可動枠部分２５に連結されてＺ方向に延びる第２主梁５２ａと、Ｘ方向に延びて両端部が固定枠１の第２固定枠部分１２に一体連結され且つ中央部が第２主梁５２ａの先端部に一体連結された第２ヒンジ梁５２ｂとからなる。
【００１６】
第２ガイド手段６は、図１、図９及び図１０に示す如く、可動体３とこれにＸ方向において対向する可動枠２の第１可動枠部分２１とを連結する一対の第３平行梁６１，６１と、可動体３とこれにＺ方向において対向する可動枠２の第２可動枠部分２２とを連結する一対の第４平行梁６２，６２とで構成されている。
【００１７】
各第３平行梁６１は、板面がＺ方向に平行するバネ板からなる一対の第３Ｔ字状梁６１Ａ，６１Ａで構成されている。各第３Ｔ字状梁６１Ａは、図３に示す如く、基端部が可動体３の第１可動体部分３１に一体連結されてＸ方向に延びる第３主梁６１ａと、Ｙ方向に延びて両端部が可動枠２の第１可動枠部分２１に一体連結され且つ中央部が第３主梁６１ａの先端部に一体連結された第３ヒンジ梁６１ｂとからなる。
【００１８】
各第４平行梁６２は、板面がＺ方向に平行するバネ板からなる一対の第４Ｔ字状梁６２Ａ，６２Ａで構成されている。各第４Ｔ字状梁６２Ａは、図３に示す如く、基端部が可動体３の第３可動体部分３３に一体連結されてＺ方向に延びる第４主梁６２ａと、Ｙ方向に延びて両端部が可動枠２の第２可動枠部分２２に一体連結され且つ中央部が第４主梁６２ａの先端部に一体連結された第４ヒンジ梁６２ｂとからなる。
【００１９】
各Ｔ状梁５１Ａ，５２Ａ，６１Ａ，６２Ａは同一形状且つ同一材質のものであって、同一の弾性変形能を有するものとされている。また、各ヒンジ梁５１ｂ，５２ｂ，６１ｂ，６２ｂは、その弾性変形を容易ならしめるべく、図６に示す如く、板厚Ｔ_４を主梁５１ａ，５２ａ，６１ａ，６２ａの板厚Ｔ_１に比して小さく設定されている（例えば、Ｔ_１＝１ｍｍ，Ｔ_４＝０．２ｍｍに設定される）。但し、各主梁５１ａ，５２ａ，６１ａ，６２ａの両端部については、可動枠２又は可動体３の移動に伴う主梁５１ａ，５２ａ，６１ａ，６２ａの変位を容易ならしめるべく、図６に示す如く、その板厚Ｔ_２，Ｔ_３をヒンジ梁５１ｂ，５２ｂ，６１ｂ，６２ｂの板厚Ｔ_４と同程度に設定されている（例えば、Ｔ_２＝Ｔ_３＝０．３ｍｍに設定される）。
【００２０】
ところで、各Ｔ字状梁５１Ａ，５２Ａ，６１Ａ，６２Ａは、弾性限界の高い金属材（チタン等）や非金属材（ＦＲＰ，カーボン等）により一体成形されることが好ましく、その連結部材である固定枠１、可動枠２及び可動体３とも一体成形されることが好ましい。しかし、各Ｔ字状梁５１Ａ，５２Ａ，６１Ａ，６２Ａと固定枠１、可動枠２及び可動体３とを一体成形することは実質的に不可能であることから、この例では、可動枠２内への可動体３の組み込み並びに固定枠１内への可動枠２及び可動体３の組み込みを容易ならしめるために、図２〜図４に示す如く、可動枠２及び可動体３を各Ｔ字状梁５１Ａ，５２Ａ，６１Ａ，６２Ａの連結部分とこれらの連結部分間を接続するための接続部分とに分割して、これらを各別に成形した上で、組み立てるように工夫している。すなわち、第１及び第２平行梁５１，５１及び５２，５２については、図２に示す如く、固定枠１とこれに連結される各第１及び第２Ｔ字状梁５１，５２と各主梁５１ａ，５２ａが各別に連結される可動枠部分（第４可動枠部分２４）とからなる一体構造物として、放電加工等により製作される。また、各第３平行６１については、図３及び図４に示す如く、第１可動枠部分２１とこれに連結される一対の第３Ｔ字状梁６１，６１とその各主梁６１ａが各別に連結される可動体部分（第１可動体部分３１）とからなる一体構造物として、放電加工等により製作される。また、第４平行梁６２，６２については、図３及び図４に示す如く、両第２可動枠部分２１，２１（第３可動枠部分２３，２３と一体構造をなす）とこれに連結される二対の第４Ｔ字状梁６２，６２及び６２，６２とその各主梁６２ａが各別に連結される可動体部分（第３可動体部分３３）とからなる一体構造物として、放電加工等により製作される。これらの一体構造物の構成材としては、ＭＨ５１が使用されている。而して、これらの一体構造物を、直接に又は前記接続部分（第６可動枠部分２６、第２可動体部分３２及び第４可動体部分３４）を介して間接的に連結することによって、図１に示す如く、第１装置Ｍ１を組み立てることができる。
【００２１】
第１移動手段７は、可動枠２（並びに当該可動枠２に各第３及び第４Ｔ字状梁６１Ａ，６２Ａにより支持された可動体３及び移動台４）をこれにＸ方向への押圧力又は引張力を作用させることによってＸ方向に強制移動させるものであり、周知のマイクロメータ，ステッピングモータ等のアクチュエータが使用される。この例では、図１〜図３に示す如く、可動枠２のＸ方向端部である第１可動枠部分２１にＸ方向に伸びる作動軸７１を固着すると共に、固定枠１の第３固定枠部分１３に作動軸７１の挿通孔７２を穿設して、この作動軸７１をマイクロメータ等によりＸ方向に進退移動させることによって、可動枠２を固定枠１に対してＸ方向に強制移動させうるようになっている。
【００２２】
第２移動手段８は、可動体３（及び当該可動体３に固着された移動台４）をこれにＹ方向への押圧力又は引張力を作用させることによってＹ方向に強制移動させるものであり、周知のマイクロメータ等のアクチュエータが使用される。この例では、図１〜図５に示す如く、可動体３のＹ方向端部である第４可動体部分３４にＹ方向に伸びる作動軸８１を固着すると共に、第１固定枠部分１１及び第３可動枠部分２３に作動軸８１の挿通孔８２，８３を穿設して、この作動軸８１をマイクロメータ等によりＹ方向に進退移動させることによって、可動体３を固定枠１及び可動枠２に対してＹ方向に強制移動させうるようになっている。なお、作動軸８１（及びこれを進退移動させる手段）は、固定枠１に対して、第１移動手段７による可動枠２の移動に伴ってＸ方向にスライドしうるようになっており、第１固定枠部分１１に形成される形成される挿通孔８２は、第１移動手段７による可動枠２のＸ方向への移動範囲に相当する長さの長孔とされている。
【００２３】
以上のように構成された第１装置Ｍ１にあっては、第１移動手段７により作動軸７１を介して可動枠２をＸ方向に押圧（又は引張）すると、図７に実線で示す如く、各第１平行梁５１を構成する一対の第１Ｔ字状梁５１Ａ，５１Ａが同一形態に弾性変形すると共に両第１平行梁５１，５１が可動枠２に対して対称形態に弾性変形し、同時に、図８に実線で示す如く、各第２平行梁５２を構成する一対の第２Ｔ字状梁５２Ａ，５２Ａが同一形態に弾性変形すると共に両第２平行梁５２，５２が可動枠２に対して対称形態に弾性変形しつつ、可動枠２がＸ−Ｙ面上でＸ方向に移動される。すなわち、可動枠２の移動に伴って、各第１及び第２主梁５１ａ，５２ａが伸張，屈曲変形することなく主梁基端部を中心として回動変位し、各第１及び第２主梁５１ａ，５２ａの回動変位に伴う主梁先端部の変位を許容すべく、当該主梁先端部に一体連結された各第１及び第２ヒンジ梁５１ｂ，５２ｂが屈曲変形されることになる。かかる可動枠２の移動によって、可動枠２に第３及び第４平行梁６１，６２及び可動体２を介して固定支持された移動台４は、Ｘ―Ｙ面上でＸ方向に可動枠２の移動量と同一量だけ移動されることになる。
【００２４】
このとき、可動枠２が各第１及び第２平行梁５１，５２によりＸ−Ｙ面及びＸ−Ｚ面の両面において支持されていることから、可動枠２のＸ−Ｙ面上における移動が高精度に行われる。また、可動体３及びこれに固着された移動台４がＸ方向には変形しない各第３及び第４平行梁６１，６２を介して可動枠２に支持されていることから、可動枠２の移動によって可動体３及び移動台４がＸ方向に変位することがない。その結果、移動台４の固定枠１に対するＸ方向への移動が高精度に行われる。
【００２５】
そして、この状態から第２移動手段８により作動軸８１を介して可動体３をＹ方向に押圧（又は引張）すると、図９に実線で示す如く、各第３平行梁６１を構成する一対の第３Ｔ字状梁６１Ａ，６１Ａが同一形態に弾性変形すると共に両第３平行梁６１，６１が可動体３に対して対称形態に弾性変形し、同時に、図１０に実線で示す如く、各第４平行梁６２を構成する一対の第４Ｔ字状梁６２Ａ，６２Ａが同一形態に弾性変形すると共に両第４平行梁６２，６２が可動体３に対して対称形態に弾性変形しつつ、可動体３が可動枠２及び固定枠１に対してＸ―Ｙ面上でＹ方向に移動される。すなわち、可動体３の移動に伴って、各第３及び第４梁６１ａ，６２ａが伸張，屈曲変形することなく主梁基端部を中心として回動変位し、各第３及び第４主梁６１ａ，６２ａの回動変位に伴う主梁先端部の変位を許容すべく、当該主梁先端部に一体連結された各第３及び第４ヒンジ梁６１ｂ，６２ｂが屈曲変形されることになる。かかる可動体３の移動によって、可動枠２に設けられた移動台４は、Ｘ―Ｙ面上でＹ方向に可動体３の移動量と同一量だけ移動されることになる。
【００２６】
このとき、可動体３（及び移動台４）が各第３及び第４平行梁６１，６２によりＸ−Ｙ面及びＸ−Ｚ面の両面において支持されていることから、可動体３のＸ−Ｙ面上における移動が高精度に行われる。また、可動体３を支持する可動枠２がＹ方向には変形しない各第１及び第２平行梁５１，５２を介して固定枠１に支持されていることから、可動体３の移動によって可動枠２がＹ方向に変位することがない。その結果、移動台４の固定枠１に対するＹ方向への移動が高精度に行われる。
【００２７】
したがって、第１装置Ｍ１によれば、可動枠２を固定枠１に対してＸ方向に移動させると共に可動体３を可動枠２に対してＹ方向に移動させることにより、移動台４を固定枠１に対してＸ方向及びＹ方向の２元方向に高精度に移動させることできる。
【００２８】
そして、第１移動手段７による可動枠２への押圧力（又は引張力）を解除すると、全ての第１及び第２Ｔ字状梁５１Ａ…，５２Ａ…が、図７及び図８に鎖線で示す如く、Ｙ方向に平行する状態に弾性復帰して、可動枠２（及び移動台４）をＸ方向における中立位置に自動復帰せしめられる。また、第２移動手段８による可動体３への押圧力（又は引張力）を解除すると、全ての第３及び第４Ｔ字状梁６１Ａ…，６２Ａ…が、図９及び図１０に鎖線で示す如く、Ｘ方向に平行する状態に弾性復帰して、可動体３及び移動台４をＹ方向における中立位置に自動復帰せしめられる。
【００２９】
したがって、第１装置Ｍ１によれば、移動台４のＸ方向及びＹ方向への２元移動を高精度に行うことができ、移動台４の移動及び位置決めを正確に行うことができる。
【００３０】
図１０〜図２０は第２の実施の形態を示すもので、この実施の形態における本発明に係る超精密移動台装置（以下「第２装置」という）Ｍ２にあっては、各平行梁５１，５２，６１，６２が各々一対のＨ字状梁で構成されている。なお、第２装置Ｍ２の構成は、以下に述べる点を除いて、第１装置Ｍ１と同一であるから、第１装置Ｍ１の各構成部材と同一の構成部材については、図１０〜図２０に同一の符号を付して、その詳細な説明は省略する。
【００３１】
各第１平行梁５１は、板面がＺ方向に平行するバネ板からなる一対の第１Ｈ字状梁５１Ｂ，５１Ｂで構成されている。各第１Ｈ字状梁５１Ｂは、図１１及び図１２に示す如く、Ｙ方向に延びる第１主梁５１ａと、Ｘ方向に延びて両端部が固定枠１の第１固定枠部分１１に一体連結され且つ中央部が第１主梁５１ａの先端部に一体連結された第１ヒンジ梁５１ｂと、Ｘ方向に延びて両端部が可動枠２の第４可動枠部分２４に一体連結され且つ中央部が第１主梁５１ａの基端部に一体連結された第１副ヒンジ梁５１ｃとからなる。第１副ヒンジ梁５１ｃは、第４可動枠部分２４における主梁５１ａの連結部分にＺ方向に貫通し且つＸ方向に延びる長孔２４ａを穿設することによって、当該第４可動枠部分２４に一体形成されている。
【００３２】
各第２平行梁５２は、板面がＺ方向に平行するバネ板からなる一対の第２Ｈ字状梁５２Ｂ，５２Ｂで構成されている。各第２Ｈ字状梁５２Ｂは、図１１及び図１２に示す如く、Ｚ方向に延びる第２主梁５２ａと、Ｘ方向に延びて両端部が固定枠１の第２固定枠部分１２に一体連結され且つ中央部が第２主梁５２ａの先端部に一体連結された第２ヒンジ梁５２ｂと、Ｘ方向に延びて両端部が可動枠２の第５可動枠部分２５に一体連結され且つ中央部が第２主梁５２ａの基端部に一体連結された第２副ヒンジ梁５２ｃとからなる。第２副ヒンジ梁５２ｃは、第５可動枠部分２５における主梁５２ａの連結部分にＹ方向に貫通し且つＸ方向に延びる長孔２５ａを穿設することによって、第５可動枠部分２４に一体形成されている。
【００３３】
各第３平行梁６１は、板面がＺ方向に平行するバネ板からなる一対の第３Ｈ字状梁６１Ｂ，６１Ｂで構成されている。各第３Ｈ字状梁６１Ｂは、図１３及び図１４に示す如く、Ｘ方向に延びる第３主梁６１ａと、Ｙ方向に延びて両端部が可動枠２の第１可動枠部分２１に一体連結され且つ中央部が第３主梁６１ａの先端部に一体連結された第３ヒンジ梁６１ｂと、Ｙ方向に延びて両端部が可動体３の第１可動体部分３１に一体連結され且つ中央部が第３主梁６１ａの基端部に一体連結された第３副ヒンジ梁６１ｃとからなる。第３副ヒンジ梁６１ｃは、可動体３の第１可動体部分３１における主梁６１ａの連結部分にＺ方向に貫通し且つＹ方向に延びる長孔３１ａを穿設することによって、第１可動体部分３１に一体形成されている。
【００３４】
各第４平行梁６２は、板面がＺ方向に平行するバネ板からなる一対の第４Ｈ字状梁６２Ｂ，６２Ｂで構成されている。各第４Ｈ字状梁６２Ｂは、図１３及び図１４に示す如く、Ｚ方向に延びる第４主梁６２ａと、Ｙ方向に延びて両端部が可動枠２の第２可動枠部分２２に連結され且つ中央部が第４主梁６２ａの先端部に一体連結された第４ヒンジ梁６２ｂと、Ｙ方向に延びて両端部が可動体３の第３可動体部分３３に一体連結され且つ中央部が第４主梁６２ａの基端部に一体連結された第４副ヒンジ梁６２ｃとからなる。第４副ヒンジ梁６２ｃは、第３可動体部分３３における主梁６２ａの連結部分にＸ方向に貫通し且つＹ方向に延びる長孔３３ａを穿設することによって、第３可動体部分３３に一体形成されている。
【００３５】
なお、可動体３は、第１装置Ｍ１と同様に、図１４に示す如く組み立てられ、図１５に示す如く移動台４が固着されるものであるが、第４副ヒンジ梁６２ｃの変形が第２可動体部分３２によって阻害されないように、第４副ヒンジ梁６２ｃが形成される第３可動体部分３３と第２可動体部分３２との間には若干の隙間が形成されている。
【００３６】
各Ｈ状梁５１Ｂ，５２Ｂ，６１Ｂ，６２Ｂは同一形状且つ同一材質のものであって、同一の弾性変形能を有するものとされている。また、各ヒンジ梁５１ｂ，５２ｂ，６１ｂ，６２ｂは、その弾性変形を容易ならしめるべく、図１６に示す如く、板厚Ｔ_４を主梁５１ａ，５２ａ，６１ａ，６２ａの板厚Ｔ_１に比して小さく設定されている（例えば、Ｔ_１＝１ｍｍ，Ｔ_２＝０．２ｍｍに設定される）。但し、各主梁５１ａ，５２ａ，６１ａ，６２ａの両端部については、可動枠２又は可動体３の移動に伴う主梁５１ａ，５２ａ，６１ａ，６２ａの変位を容易ならしめるべく、図１６に示す如く、その板厚Ｔ_２，Ｔ_３をヒンジ梁５１ｂ，５２ｂ，６１ｂ，６２ｂの板厚Ｔ_４と同程度に設定されている（例えば、Ｔ_２＝Ｔ_３＝０．３ｍｍに設定される）。副ヒンジ梁５１ｃ，５２ｃ，６１ｃ，６２ｃの長さは、その機能上、ヒンジ梁５１ｂ，５２ｂ，６１ｂ，６２ｂより短くて足り、板厚はヒンジ梁５１ｂ，５２ｂ，６１ｂ，６２ｂの板厚Ｔ_４と同程度に設定される。
【００３７】
各Ｈ字状梁５１Ｂ，５２Ｂ，６１Ｂ，６２Ｂは、弾性限界の高い金属材（チタン等）や非金属材（ＦＲＰ，カーボン等）により、その連結部材と、一体形成（放電加工等による）されている。この例では、前記Ｔ字状梁５１Ａ，５２Ａ，６１Ａ，６２Ａと同様に、可動枠２内への可動体３の組み込み並びに固定枠１内への可動枠２及び可動体３の組み込みを容易ならしめるために、図１２〜図１４に示す如く、可動枠２及び可動体３を各Ｈ字状梁５１Ｂ，５２Ｂ，６１Ｂ，６２Ｂの連結部分とこれらの連結部分間を接続するための接続部分とに分割して、これらを各別に成形した上で、組み立てるように工夫している。すなわち、第１及び第２平行梁５１，５１及び５２，５２については、図１２に示す如く、固定枠１とこれに連結される各第１及び第２Ｔ字状梁５１，５２と各副ヒンジ梁５１ｃ，５２ｃが各別に連結される可動枠部分（第４可動枠部分２４）とからなる一体構造物として、放電加工等により製作される。また、各第３平行６１については、図１３及び図１４に示す如く、第１可動枠部分２１とこれに連結される一対の第３Ｔ字状梁６１，６１とその各副ヒンジ梁６１ｃが各別に連結される可動体部分（第１可動体部分３１）とからなる一体構造物として、放電加工等により製作される。また、第４平行梁６２，６２については、図１３及び図１４に示す如く、両第２可動枠部分２１，２１（第３可動枠部分２３，２３と一体構造をなす）とこれに連結される二対の第４Ｔ字状梁６２，６２及び６２，６２とその各副ヒンジ梁６２ｃが各別に連結される可動体部分（第３可動体部分３３）とからなる一体構造物として、放電加工等により製作される。これらの一体構造物の構成材としては、ＭＨ５１が使用されている。而して、これらの一体構造物を、直接に又は前記接続部分（第６可動枠部分２６、第２可動体部分３２及び第４可動体部分３４）を介して間接的に連結することによって、図１１に示す如く、第２装置Ｍ２を組み立てることができる。
【００３８】
このようなＨ字状梁５１，５２，６１，６２によれば、主梁５１ａ，５２ａ，６１ａ，６２ａの基端部を中心とする回動変位が、図１７〜図２０に実線で示す如く、副ヒンジ梁５１ｃ，５２ｃ，６１ｃ，６２ｃの弾性変形によってより容易に行われることから、Ｔ字状梁５１Ａ，５２Ａ，６１Ａ，６２Ａによる場合に比して、梁の弾性変形がより円滑に行われる。また、可動枠２のＸ方向における中立位置（図１７及び図１８に鎖線で示す位置）からの移動量又は可動体３のＹ方向における中立位置（図１９及び図２０に鎖線で示す位置）からの移動量を大きくすると、主梁５１ａ，５２ａ，６１ａ，６２ａの端部連結点に最大応力が作用し、平行梁５１，５２，６１，６２が長期使用によって塑性変形する虞れがあるが、主梁５１ａ，５２ａ，６１ａ，６２ａの基端部を副ヒンジ梁５１ｃ，５２ｃ，６１ｃ，６２ｃを介して可動枠２又は可動体３に連結しておくと、かかる虞れを回避して装置寿命を向上させることができる。
【００３９】
なお、本発明は上記した各実施の形態に限定されるものでなく、本発明の基本原理を逸脱しない範囲において適宜に改良，変更することができる。例えば、主梁及びヒンジ梁は直線状のものとせず、湾曲状ないし屈曲状のものとすることができる。また、Ｔ字状梁又はＨ字状梁は独立部材に構成して、Ｔ字状梁における主梁の基端部若しくはヒンジ梁の両端部又はＨ字状梁におけるヒンジ梁若しくは副ヒンジ梁の両端部を固定枠等に固着する（例えば、接着剤による接着やはんだ付け等）ようにすることも可能である。また、移動手段７，８の構成も任意であり、例えば、ワイヤー，微小径（例えば１ｍｍ以下）のロッド，帯板等の自由度の高い作動部材を、第１移動手段７においては可動枠２に、また第２移動手段８においては可動体３に、夫々連結して、これらの作動部材に引張力を与えることにより、可動枠２を固定枠１に対してＸ方向に強制移動させうると共に可動体３を固定枠１及び可動枠２に対してＹ方向に強制移動させうるように構成しておくことができる。
【００４０】
【発明の効果】
本発明の超精密移動台装置は、可動枠の固定枠への支持及び可動体の可動枠への支持を平行梁により行うと共に、平行梁を変形容易なＴ字状梁又はＨ字状梁で構成したものであるから、可動部材をこれに接触（転接，摺接）する部材によってガイドさせるようにした従来装置に比して、Ｘ−Ｙ面上での移動台の移動精度やその信頼性を大幅に向上させることができ、微動装置としての実用的価値が極めて大きいものである。
【図面の簡単な説明】
【図１】第１装置を示す斜視図である。
【図２】第１装置の固定枠を示す斜視図である。
【図３】第１装置の可動枠を示す斜視図である。
【図４】第１装置の可動体を示す斜視図である。
【図５】第１装置の可動体及び移動台を示す斜視図である。
【図６】第１装置の要部（Ｔ字状梁）を示す平面図である。
【図７】第１装置における可動枠の移動状態及び第１平行梁の変形状態を示す概略平面図である。
【図８】第１装置における可動枠の移動状態及び第２平行梁の変形状態を示す概略側面図である。
【図９】第１装置における可動体の移動状態及び第３平行梁の変形状態を示す概略平面図である。
【図１０】第１装置における可動体の移動状態及び第４平行梁の変形状態を示す概略正面図である。
【図１１】第２装置を示す斜視図である。
【図１２】第２装置の固定枠を示す斜視図である。
【図１３】第２装置の可動枠を示す斜視図である。
【図１４】第２装置の可動体を示す斜視図である。
【図１５】第２装置の可動体及び移動台を示す斜視図である。
【図１６】第２装置の要部（Ｈ字状梁）を示す平面図である。
【図１７】第２装置における可動枠の移動状態及び第１平行梁の変形状態を示す概略平面図である。
【図１８】第２装置における可動枠の移動状態及び第２平行梁の変形状態を示す概略側面図である。
【図１９】第２装置における可動体の移動状態及び第３平行梁の変形状態を示す概略平面図である。
【図２０】第２装置における可動体の移動状態及び第４平行梁の変形状態を示す概略正面図である。
【符号の説明】
Ｍ１…第１装置（超精密移動台装置）、Ｍ２…第２装置（超精密移動台装置）、１…固定枠、２…可動枠、３…可動体、４…移動台、５…第１ガイド手段、６…第２ガイド手段、７…第１移動手段、８…第２移動手段、１１…第１固定枠部分、１２…第２固定枠部分、１３…第３可動枠部分、２１…第１可動枠部分、２２…第２可動枠部分、２３…第３可動枠部分、２４…第４可動枠部分、２５…第５可動枠部分、３１…第１可動体部分、３２…第２可動体部分、３３…第３可動体部分、３４…第４可動体部分、５１…第１平行梁、５１Ａ…第１Ｔ字状梁、５１Ｂ…第１Ｈ字状梁、５１ａ，５２ａ，６１ａ，６２ａ…主梁、５１ｂ，５２ｂ，６１ｂ，６２ｂ…ヒンジ梁、５１ｃ，５２ｃ，６１ｃ，６２ｃ…副ヒンジ梁、５２…第２平行梁、５２Ａ…第２Ｔ字状梁、５２Ｂ…第２Ｈ字状梁、６１…第３平行梁、６１Ａ…第３Ｔ字状梁、６１Ｂ…第３Ｈ字状梁、６２…第４平行梁、６２Ａ…第４Ｔ字状梁、６２Ｂ…第４Ｈ字状梁。[0001]
BACKGROUND OF THE INVENTION
The present invention is an ultra-precise moving table apparatus used for synchrotron radiation facilities / optical systems, microbeam-related parts, X-ray lithography, micromachine fabrication, high resolution microscope stage, etc. And a Y-direction).
[0002]
[Prior art]
In this type of ultra-precise moving table apparatus, the first stage is supported by supporting the first stage relatively moving in the X direction on the fixed table, and supporting the second stage relatively moving in the Y direction on the first stage. What is configured to move the movable stage provided in the second stage in the two-dimensional direction by moving in the X direction with respect to the fixed base and moving the second stage in the Y direction with respect to the second stage. It is well known. Thus, in such an apparatus, as a means for guiding each stage so as to be linearly movable in a certain direction (X direction or Y direction), generally, the movement of each stage in a direction other than the target direction is performed. What is regulated by a rolling member or a sliding member (cross roller guide or the like) in contact with is used.
[0003]
[Problems to be solved by the invention]
However, when such a guide means is used, the moving accuracy of each stage cannot be increased beyond a certain level due to inevitable factors such as the processing accuracy of the rolling member and the sliding member. For example, when using a cross roller guide, the accuracy of the cross roller is limited to the roundness of the cross roller, and the limit is to suppress vertical and horizontal fluctuations to about ± 10 seconds. In an optical system using radiated light, etc. Cannot be used. In an optical system using synchrotron radiation, both vertical and horizontal fluctuations are required to have an accuracy of about ± 0.5 μRad (about 0.1 second). In order to improve the movement accuracy of the moving table (movement accuracy of each stage), it has been proposed to perform movement correction by electrical control using a piezo element, but such control means is used. However, there are problems such as high cost and many restrictions on use.
[0004]
The present invention has been made in view of the above points, and by adopting a guide means that does not use any rolling member or sliding member and does not require a control means for performing movement correction, the present invention can be moved. It is an object of the present invention to provide an ultra-precise moving table apparatus capable of greatly improving accuracy.
[0005]
[Means for Solving the Problems]
The present invention includes a fixed frame fixed to the apparatus installation surface, a movable frame disposed in the fixed frame, a movable body disposed in the movable frame, a moving table provided in the movable body, and a movable frame. First guide means for reciprocally guiding the fixed frame in the X direction, second guide means for supporting the movable body reciprocally movable in the Y direction relative to the movable frame, and the movable frame as the fixed frame A first moving means forcibly moving relative to the X direction and a second moving means for forcibly moving the movable body relative to the fixed frame in the Y direction. The first guide means opposes the pair of first parallel beams that connect the movable frame and the first fixed frame portion, which is the fixed frame portion facing the movable frame in the Y direction, and the movable frame and the first parallel beam in the Z direction. It is composed of a pair of second parallel beams that connect the second fixed frame part as the fixed frame part. The second guide means includes a pair of third parallel beams that connect the movable body and the first movable frame portion that is the movable frame portion facing the movable body in the X direction, the movable body, and the movable body facing the movable body in the Z direction. It is comprised by a pair of 4th parallel beam which connects the 2nd movable frame part which is a frame part, and a moving stand applies the pressing force or tensile force to an X direction to a movable frame by a 1st moving means. By causing the first and second parallel beams to be elastically deformed and linearly displaced relative to the fixed frame in the X direction, and by applying a pressing force or tensile force in the Y direction to the movable body by the second moving means. The third and fourth parallel beams are elastically deformed and are linearly displaced in the X direction relative to the movable frame, and the first and second parallel beams or the third and second are released by releasing the pressing force or tensile force. 4 Parallel beams are in the state before deformation Suggest ultra-precision moving table device, characterized in that is arranged to sexual restored.
[0006]
Thus, in such an ultra-precision moving device, each parallel beam is configured as (1) or (2).
(1) Each first parallel beam is a pair of T-shaped beams made of spring plates whose plate surfaces are parallel to the Z direction, and the first main beam is connected to the movable frame and extends in the Y direction. And a pair of first T-shaped beams comprising a first hinge beam extending in the X direction and having both ends connected to the first fixed frame portion and the central portion integrally connected to the tip of the first main beam. Each of the second parallel beams is a pair of T-shaped beams made of spring plates whose plate surfaces are parallel to the Z direction, and a second main beam extending in the Z direction with a base end portion connected to the movable frame. And a pair of second T-shaped beams comprising a second hinge beam extending in the X direction and having both ends connected to the second fixed frame portion and the central portion integrally connected to the tip of the second main beam. Each of the third parallel beams is a pair of T-shaped beams made of spring plates whose plate surfaces are parallel to the Z direction, and their base ends are connected to the movable body and extend in the X direction. A pair of third T-shaped beams comprising a third main beam and a third hinge beam extending in the Y direction and having both ends connected to the first movable frame portion and the central portion integrally connected to the tip of the third main beam. Each fourth parallel beam is a pair of T-shaped beams made of spring plates whose plate surfaces are parallel to the Z direction, and the base ends are connected to the movable body in the Z direction. A pair of fourth T-shaped members comprising a fourth main beam extending and a fourth hinge beam extending in the Y direction and having both ends connected to the second movable frame portion and the center connected integrally to the tip of the fourth main beam. It is made up of shaped beams.
(2) Each first parallel beam is a pair of H-shaped beams made of spring plates whose plate surfaces are parallel to the Z direction, the first main beam extending in the Y direction, and both ends of the first parallel beam extending in the X direction. A first hinge beam connected to the first fixed frame portion and having a central portion integrally connected to the distal end portion of the first main beam, and extending in the X direction and having both ends connected to the movable frame and the central portion being the first main beam It consists of a pair of first H-shaped beams consisting of a first sub hinge beam integrally connected to the base end of each beam, and each second parallel beam is made of a spring plate whose plate surface is parallel to the Z direction. A pair of H-shaped beams, a second main beam extending in the Z direction, extending in the X direction, both ends are connected to the second fixed frame portion, and the central portion is integrally connected to the tip of the second main beam And a second sub hinge beam extending in the X direction and having both ends connected to the movable frame and the central portion integrally connected to the base end of the second main beam. Each of the third parallel beams is a pair of H-shaped beams made of spring plates whose plate surfaces are parallel to the Z direction, and each of the third main beams extends in the X direction. A beam, a third hinge beam extending in the Y direction and having both ends connected to the first movable frame portion and a central portion integrally connected to the tip of the third main beam, and both ends extending in the Y direction are movable Each of the fourth parallel beams is composed of a pair of third H-shaped beams which are connected to the body and have a third sub-hinge beam whose central portion is integrally connected to the base end portion of the third main beam. A pair of H-shaped beams comprising spring plates whose surfaces are parallel to the Z direction, a fourth main beam extending in the Z direction, and extending in the Y direction, both ends thereof being connected to the second movable frame portion and the center portion Is a fourth hinge beam integrally connected to the distal end portion of the fourth main beam, and extends in the Y direction so that both end portions are connected to the movable body and the central portion is the base end portion of the fourth main beam. The fourth and a pair of the 4H-shaped beams consisting of a sub-hinge beam which is bodily connected.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 to 10 and FIGS.
[0008]
1 to 10 show a first embodiment, and an ultra-precise moving table apparatus (hereinafter referred to as “first apparatus M1”) according to the present embodiment is installed as shown in FIG. A fixed frame 1 fixed to the surface, a movable frame 2 disposed in the fixed frame 1, a movable body 3 disposed in the movable frame 2, a movable table 4 provided in the movable body 3, a movable frame The first guide means 5 that supports the movable body 3 so as to be reciprocally movable in the X direction relative to the fixed frame 1 and the second guide means 6 that supports the movable body 3 so as to be reciprocally movable relative to the movable frame 2 in the Y direction. A first moving means 7 forcibly moving the movable frame 2 relative to the fixed frame 1 in the X direction; and a second movement forcibly moving the movable body 3 relative to the fixed frame 1 in the Y direction. Means 8.
[0009]
The fixed frame 1 is fixed on a predetermined device installation surface (for example, a horizontal plane), and as shown in FIGS. 1 and 2, a pair of first fixed frame portions 11, 11 that are parallel to each other in the Y direction, and Z And a pair of second fixed frame portions 12 and 12 parallel to each other in the direction and a pair of third fixed frame portions 13 and 13 parallel to each other in the X direction. . Each of the first and second fixed frame portions 11 and 12 has a rectangular shape elongated in the X direction, and each third fixed frame portion 13 has a cross shape in which a rectangular arm projects from the center portion in the Y direction and the Z direction. It has a shape. The both ends of the first fixed frame portions 11 and 11 and the both ends of the second fixed frame portions 12 and 12 are connected by third fixed frame portions 13 and 13, respectively.
[0010]
The movable frame 2 is disposed in the fixed frame 1 so as to be movable within a predetermined range in the X direction as shown in FIGS. 1, 7 and 8, and is opposed to the X direction as shown in FIG. A pair of parallel first movable frame portions 21 and 21, a pair of second movable frame portions 22 and 22 facing and parallel to the Z direction, and a pair of third movable frame portions 23 facing and parallel to the Y direction. , 23, two pairs of fourth movable frame portions 24, 24 and 24, 24 facing and parallel to the X direction and the Y direction, and two pairs of fifth movable frames facing and parallel to the X direction and the Z direction. This is a hollow structure composed of portions 25, 25 and 25, 25 and a pair of sixth movable frame portions 26, 26 facing and parallel to the X direction. Each of the first and second movable frame portions 21 and 22 has a rectangular shape that is long in the Y direction, and each third movable frame portion 23 is a cross in which a rectangular arm projects from the center in the Z direction and the X direction. It has a shape. The end portions of both the second movable frame portions 22 and 22 are connected by a third movable frame portion 23. Each fourth movable frame portion 24 has a rectangular shape, and each pair of fourth movable frame portions 24, 24 facing each other in the Y direction includes both ends in the Y direction of the first movable frame portion 21 and both third movable frames. The portion 23 is connected to the end of the rectangular arm extending in the X direction on the inner side of the hollow structure. Each fifth movable frame portion 25 has a rectangular shape, and each pair of fifth movable frame portions 25 and 25 facing each other in the Z direction is fixed to both ends of the sixth movable frame portion 26 in the Z direction. That is, the pair of fifth movable frame portions 25 and 25 are integrally connected via the sixth movable frame portion 26. The integrally connected objects 25, 25, 26 are fixed to the central portion of the first movable frame portion 21 in a state of being positioned between the pair of fourth movable frame portions 24, 24 facing in the Y direction. The second movable frame portions 22 and 22 and the third movable frame portions 23 and 23 are configured as an integral rectangular frame, but the other movable frame portions 21, 24, 25, and 26 are independent of each other. Each of these movable frame parts 21, 24, 25, 26 and the above-mentioned rectangular frame of the integral structure is connected or fixed to each other by appropriate bonding means (for example, an adhesive or a screw). It is done by.
[0011]
As shown in FIGS. 1, 9 and 10, the movable body 3 is disposed in the movable frame 2 so as to be movable within a predetermined range in the Y direction. As shown in FIG. 4, the movable body 3 is arranged in the X direction and the Y direction. Two pairs of first movable body portions 31, 31 and 31, 31 facing and parallel to each other and a pair of second movable body portions 32 and 32 facing and parallel to each other in the X direction are opposed to each other in the Y direction and the Z direction. And a pair of third movable body portions 33, 33 and 33, 33 which are parallel to each other and a pair of fourth movable body portions 34, 34 which are parallel to each other in the Y direction. Each movable body portion 31, 32, 33, 34 is an independent rectangular member and is connected to each other as follows. That is, each pair of first movable body portions 31, 31 facing each other in the Y direction is fixed to both ends of the second movable body portion 32 in the Y direction. Each pair of third movable body portions 33, 33 facing each other in the Z direction is fixed to both ends of the fourth movable body portion 34 in the Z direction, and is integrally connected via the fourth movable body portion 34. Yes. The fourth movable body portion 34 is fixed to the second movable body portions 32 and 32 in a state where the third movable body portions 33 and 33 fixed to the fourth movable body portion 34 are positioned between the second movable body portions 32 and 32. ing. In addition, connection or fixation between the movable body portions 31, 32, 33, and 34 is performed by an appropriate bonding means (for example, an adhesive or a screw).
[0012]
As shown in FIGS. 1 and 5, the movable table 4 has a rectangular plate 41 for mounting, mounting or supporting a predetermined device to be moved (for example, a member such as an optical device or a wafer), and four corners thereof. As shown in FIG. 1, the rectangular plate 41 is attached to the movable body 3 in a state where the rectangular plate 41 is positioned outside the fixed frame 1. That is, as shown in FIG. 1, both the second movable body portions 32, 32 straddle the second fixed frame portion 12 in the Y direction and the second movable frame portion 22 in the X direction. When the movable frame 2 moves relative to the fixed frame 1 in the Y direction and when the movable body 3 moves relative to the movable frame 2 in the X direction, each support column 42 is second fixed. The movable table 4 can be moved in a predetermined range in the X direction and the Y direction with respect to the fixed frame 1 without interfering with the frame portion 12 and the second movable frame portion 22. Note that an adhesive or the like is used as a means for fixing each support body 42 to the second movable body portion 32.
[0013]
As shown in FIGS. 1, 7, and 8, the first guide means 5 is a pair of first guides that connect the movable frame 2 and the first fixed frame portions 11, 11 of the fixed frame 1 facing the movable frame 2 in the Y direction. The parallel beams 51 and 51 are composed of a pair of second parallel beams 52 and 52 that connect the movable frame 2 and the second fixed frame portions 12 and 12 of the fixed frame 1 facing the movable frame 2 in the Z direction.
[0014]
Each of the first parallel beams 51 is composed of a pair of first T-shaped beams 51A and 51A made of spring plates whose plate surfaces are parallel to the Z direction. As shown in FIG. 2, each first T-shaped beam 51A has a base end portion integrally connected to the fourth movable frame portion 24 of the movable frame 2 and a first main beam 51a extending in the Y direction, and extending in the X direction. The first hinge beam 51b is integrally connected to the first fixed frame portion 11 of the fixed frame 1 at both ends and the central portion is integrally connected to the tip of the first main beam 51a.
[0015]
Each of the second parallel beams 52 is composed of a pair of second T-shaped beams 52A and 52A made of spring plates whose plate surfaces are parallel to the Z direction. As shown in FIG. 2, each second T-shaped beam 52 A has a base end portion connected to the fifth movable frame portion 25 of the movable frame 2 and a second main beam 52 a extending in the Z direction, and both ends extending in the X direction. The second hinge beam 52b is integrally connected to the second fixed frame portion 12 of the fixed frame 1 and the central portion is integrally connected to the distal end portion of the second main beam 52a.
[0016]
As shown in FIGS. 1, 9 and 10, the second guide means 6 is a pair of third parallel beams that connect the movable body 3 and the first movable frame portion 21 of the movable frame 2 facing the movable body 3 in the X direction. 61 and 61, and a pair of 4th parallel beams 62 and 62 which connect movable body 3 and the 2nd movable frame part 22 of movable frame 2 which counters this in the Z direction.
[0017]
Each of the third parallel beams 61 is composed of a pair of third T-shaped beams 61A and 61A made of spring plates whose plate surfaces are parallel to the Z direction. As shown in FIG. 3, each third T-shaped beam 61 A has a base end portion integrally connected to the first movable body portion 31 of the movable body 3 and a third main beam 61 a extending in the X direction, and extending in the Y direction. Both ends are integrally connected to the first movable frame portion 21 of the movable frame 2, and the central portion is composed of a third hinge beam 61 b integrally connected to the distal end portion of the third main beam 61 a.
[0018]
Each of the fourth parallel beams 62 is composed of a pair of fourth T-shaped beams 62A and 62A made of spring plates whose plate surfaces are parallel to the Z direction. As shown in FIG. 3, each fourth T-shaped beam 62 A has a base end portion integrally connected to the third movable body portion 33 of the movable body 3 and a fourth main beam 62 a extending in the Z direction, and extending in the Y direction. Both end portions are integrally connected to the second movable frame portion 22 of the movable frame 2 and the center portion is composed of a fourth hinge beam 62b integrally connected to the tip end portion of the fourth main beam 62a.
[0019]
Each of the T-shaped beams 51A, 52A, 61A, 62A has the same shape and the same material, and has the same elastic deformability. Each hinge beam 51b, 52b, 61b, 62b has a thickness T as shown in FIG. 6 in order to facilitate its elastic deformation. ₄ The plate thickness T of the main beams 51a, 52a, 61a, 62a ₁ (For example, T ₁ = 1mm, T ₄ = 0.2 mm). However, the end portions of the main beams 51a, 52a, 61a, 62a are shown in FIG. 6 in order to facilitate the displacement of the main beams 51a, 52a, 61a, 62a accompanying the movement of the movable frame 2 or the movable body 3. The thickness T ₂ , T ₃ The thickness T of the hinge beams 51b, 52b, 61b, 62b ₄ (For example, T ₂ = T ₃ = 0.3 mm).
[0020]
By the way, each of the T-shaped beams 51A, 52A, 61A, and 62A is preferably integrally formed of a metal material (such as titanium) or a non-metal material (such as FRP or carbon) having a high elastic limit, and is a connecting member thereof. It is preferable that the fixed frame 1, the movable frame 2, and the movable body 3 are integrally formed. However, it is substantially impossible to integrally form the T-shaped beams 51A, 52A, 61A, 62A and the fixed frame 1, the movable frame 2, and the movable body 3. Therefore, in this example, the movable frame 2 In order to facilitate the incorporation of the movable body 3 into the interior and the movable frame 2 and the movable body 3 into the fixed frame 1, the movable frame 2 and the movable body 3 are attached to each T as shown in FIGS. The connecting portions of the character beams 51A, 52A, 61A and 62A are divided into connecting portions for connecting the connecting portions, and these are separately formed and devised to be assembled. That is, for the first and second parallel beams 51, 51 and 52, 52, as shown in FIG. 2, the fixed frame 1, the first and second T-shaped beams 51, 52 connected to the fixed frame 1, and the main beams. As an integral structure composed of a movable frame portion (fourth movable frame portion 24) to which 51a and 52a are separately connected, it is manufactured by electric discharge machining or the like. For each third parallel 61, as shown in FIGS. 3 and 4, the first movable frame portion 21, a pair of third T-shaped beams 61, 61 connected thereto, and their main beams 61a are separately provided. As an integral structure composed of a movable body portion (first movable body portion 31) to be connected, it is manufactured by electric discharge machining or the like. Further, as shown in FIGS. 3 and 4, the fourth parallel beams 62 and 62 are connected to both the second movable frame portions 21 and 21 (integrated with the third movable frame portions 23 and 23) and the second movable frame portions 21 and 21. As an integral structure composed of two pairs of fourth T-shaped beams 62, 62 and 62, 62 and the movable body portions (third movable body portions 33) to which the main beams 62a are separately connected, electric discharge machining, etc. It is manufactured by. MH51 is used as a constituent material of these integrated structures. Thus, by connecting these integrated structures directly or indirectly via the connecting portions (the sixth movable frame portion 26, the second movable body portion 32, and the fourth movable body portion 34), As shown in FIG. 1, the first device M1 can be assembled.
[0021]
The first moving means 7 pushes the movable frame 2 (and the movable body 3 and the movable table 4 supported on the movable frame 2 by the third and fourth T-shaped beams 61A and 62A) to the X direction. Alternatively, it is forcibly moved in the X direction by applying a tensile force, and a known actuator such as a micrometer or a stepping motor is used. In this example, as shown in FIGS. 1 to 3, the operating shaft 71 extending in the X direction is fixed to the first movable frame portion 21 which is the end portion of the movable frame 2 in the X direction, and the third fixed frame of the fixed frame 1 is fixed. The insertion hole 72 of the operating shaft 71 is formed in the portion 13 and the operating shaft 71 is moved forward and backward in the X direction by a micrometer or the like, so that the movable frame 2 is forcibly moved in the X direction with respect to the fixed frame 1. It has become possible.
[0022]
The second moving means 8 forcibly moves the movable body 3 (and the movable table 4 fixed to the movable body 3) in the Y direction by applying a pressing force or a tensile force in the Y direction to the movable body 3. A known actuator such as a micrometer is used. In this example, as shown in FIGS. 1 to 5, an operating shaft 81 extending in the Y direction is fixed to a fourth movable body portion 34 that is an end portion of the movable body 3 in the Y direction, and the first fixed frame portion 11 and the 3 Inserting holes 82 and 83 of the operating shaft 81 in the movable frame portion 23 and moving the operating shaft 81 forward and backward in the Y direction with a micrometer or the like, the movable body 3 is fixed to the fixed frame 1 and the movable frame 2. Can be forcibly moved in the Y direction. The operating shaft 81 (and the means for moving it back and forth) can slide in the X direction with respect to the fixed frame 1 as the movable frame 2 is moved by the first moving means 7. The insertion hole 82 formed in the first fixed frame portion 11 is a long hole having a length corresponding to the moving range of the movable frame 2 in the X direction by the first moving means 7.
[0023]
In the first apparatus M1 configured as described above, when the movable frame 2 is pressed (or pulled) in the X direction via the operating shaft 71 by the first moving means 7, as shown by a solid line in FIG. A pair of first T-shaped beams 51A and 51A constituting each first parallel beam 51 are elastically deformed into the same form, and both the first parallel beams 51 and 51 are elastically deformed into a symmetrical form with respect to the movable frame 2, and at the same time. 8, a pair of second T-shaped beams 52A and 52A constituting each second parallel beam 52 are elastically deformed in the same form and both the second parallel beams 52 and 52 are moved with respect to the movable frame 2 as indicated by a solid line in FIG. The movable frame 2 is moved in the X direction on the XY plane while being elastically deformed into a symmetrical form. That is, with the movement of the movable frame 2, the first and second main beams 51a and 52a are rotated and displaced around the main beam base end without extending and bending, and the first and second main beams 51a. , 52a, the first and second hinge beams 51b, 52b integrally connected to the main beam front end are bent and deformed to allow displacement of the main beam front end due to the rotational displacement of the main beam. Due to the movement of the movable frame 2, the movable table 4 fixedly supported by the movable frame 2 via the third and fourth parallel beams 61 and 62 and the movable body 2 moves the movable frame 2 in the X direction on the XY plane. The amount of movement is the same as the amount of movement.
[0024]
At this time, since the movable frame 2 is supported on both the XY plane and the XZ plane by the first and second parallel beams 51, 52, the movable frame 2 is moved on the XY plane. Performed with high accuracy. Further, since the movable body 3 and the movable table 4 fixed to the movable body 3 are supported by the movable frame 2 via the third and fourth parallel beams 61 and 62 that do not deform in the X direction, The movable body 3 and the movable table 4 are not displaced in the X direction by the movement. As a result, the movement of the movable table 4 in the X direction with respect to the fixed frame 1 is performed with high accuracy.
[0025]
Then, when the movable body 3 is pressed (or pulled) in the Y direction by the second moving means 8 via the operating shaft 81 from this state, a pair of third parallel beams 61 constituting each third parallel beam 61 is formed as shown by a solid line in FIG. The third T-shaped beams 61A and 61A are elastically deformed in the same form and the third parallel beams 61 and 61 are elastically deformed in a symmetrical form with respect to the movable body 3, and at the same time, as shown by the solid line in FIG. The pair of fourth T-shaped beams 62A and 62A constituting the four parallel beams 62 are elastically deformed in the same form, and both the fourth parallel beams 62 and 62 are elastically deformed in a symmetrical form with respect to the movable body 3, while the movable body 3 is moved in the Y direction on the XY plane with respect to the movable frame 2 and the fixed frame 1. That is, as the movable body 3 moves, the third and fourth beams 61a and 62a are rotationally displaced about the main beam base end without extending and bending, and the third and fourth main beams 61a, The third and fourth hinge beams 61b and 62b integrally connected to the main beam front end are bent and deformed to allow the displacement of the main beam front end due to the rotational displacement of 62a. By such movement of the movable body 3, the movable table 4 provided on the movable frame 2 is moved by the same amount as the movement amount of the movable body 3 in the Y direction on the XY plane.
[0026]
At this time, since the movable body 3 (and the movable table 4) is supported on both the XY plane and the XZ plane by the third and fourth parallel beams 61 and 62, the X- Movement on the Y plane is performed with high accuracy. Further, since the movable frame 2 that supports the movable body 3 is supported by the fixed frame 1 via the first and second parallel beams 51 and 52 that do not deform in the Y direction, the movable frame 3 can be moved by the movement of the movable body 3. The frame 2 is not displaced in the Y direction. As a result, the movement of the movable table 4 in the Y direction with respect to the fixed frame 1 is performed with high accuracy.
[0027]
Therefore, according to the first device M1, the movable base 4 is moved in the X direction with respect to the fixed frame 1, and the movable body 3 is moved in the Y direction with respect to the movable frame 2, thereby moving the movable table 4 to the fixed frame. 1 can be moved with high accuracy in the binary direction of the X direction and the Y direction.
[0028]
When the pressing force (or tensile force) applied to the movable frame 2 by the first moving means 7 is released, all the first and second T-shaped beams 51A, 52A,... Are shown by chain lines in FIGS. As described above, the movable frame 2 (and the movable table 4) is automatically returned to the neutral position in the X direction by elastically returning to the state parallel to the Y direction. When the pressing force (or tensile force) applied to the movable body 3 by the second moving means 8 is released, all the third and fourth T-shaped beams 61A, 62A,... Are shown by chain lines in FIGS. As described above, the movable body 3 and the movable table 4 are automatically returned to the neutral position in the Y direction by elastically returning to a state parallel to the X direction.
[0029]
Therefore, according to the first device M1, the two-way movement of the movable table 4 in the X direction and the Y direction can be performed with high accuracy, and the movable table 4 can be accurately moved and positioned.
[0030]
10 to 20 show a second embodiment. In the ultra-precision moving table apparatus (hereinafter referred to as “second apparatus”) M2 according to the present invention in this embodiment, each parallel beam 51 is shown. , 52, 61, 62 are each composed of a pair of H-shaped beams. Since the configuration of the second device M2 is the same as that of the first device M1 except for the points described below, the same components as those of the first device M1 are shown in FIGS. The same reference numerals are given and detailed description thereof is omitted.
[0031]
Each first parallel beam 51 is composed of a pair of first H-shaped beams 51B and 51B made of spring plates whose plate surfaces are parallel to the Z direction. As shown in FIGS. 11 and 12, each first H-shaped beam 51 B is integrally connected to the first main beam 51 a extending in the Y direction and the first fixed frame portion 11 of the fixed frame 1 at both ends extending in the X direction. The first hinge beam 51b integrally connected to the tip of the first main beam 51a, and the both ends of the first hinge beam 51b extending in the X direction are integrally connected to the fourth movable frame portion 24 of the movable frame 2 and the central portion. Comprises a first sub hinge beam 51c integrally connected to the proximal end portion of the first main beam 51a. The first sub hinge beam 51c is formed in the fourth movable frame portion 24 by forming a long hole 24a penetrating in the Z direction and extending in the X direction in the connecting portion of the main beam 51a in the fourth movable frame portion 24. It is integrally formed.
[0032]
Each of the second parallel beams 52 is composed of a pair of second H-shaped beams 52B and 52B made of spring plates whose plate surfaces are parallel to the Z direction. As shown in FIGS. 11 and 12, each second H-shaped beam 52 B is integrally connected to the second main beam 52 a extending in the Z direction and the second fixed frame portion 12 of the fixed frame 1 at both ends extending in the X direction. And a second hinge beam 52b whose central portion is integrally connected to the tip of the second main beam 52a, and both ends thereof are integrally connected to the fifth movable frame portion 25 of the movable frame 2 and extend in the X direction. Comprises a second sub hinge beam 52c integrally connected to the proximal end portion of the second main beam 52a. The second sub hinge beam 52c is integrated with the fifth movable frame portion 24 by forming a long hole 25a extending in the Y direction and extending in the X direction in the connecting portion of the main beam 52a in the fifth movable frame portion 25. Is formed.
[0033]
Each third parallel beam 61 is composed of a pair of third H-shaped beams 61B and 61B made of spring plates whose plate surfaces are parallel to the Z direction. As shown in FIGS. 13 and 14, each third H-shaped beam 61 B is integrally connected to the third main beam 61 a extending in the X direction and the first movable frame portion 21 of the movable frame 2 at both ends extending in the Y direction. And a third hinge beam 61b whose central portion is integrally connected to the distal end portion of the third main beam 61a, and both ends extending in the Y direction are integrally connected to the first movable body portion 31 of the movable body 3 and the central portion. Comprises a third sub hinge beam 61c integrally connected to the base end of the third main beam 61a. The third sub hinge beam 61c is formed by forming a long hole 31a penetrating in the Z direction and extending in the Y direction in the connecting portion of the main beam 61a in the first movable body portion 31 of the movable body 3. The portion 31 is integrally formed.
[0034]
Each of the fourth parallel beams 62 is composed of a pair of fourth H-shaped beams 62B and 62B made of spring plates whose plate surfaces are parallel to the Z direction. Each of the fourth H-shaped beams 62B is connected to the fourth main beam 62a extending in the Z direction and the second movable frame portion 22 of the movable frame 2 at both ends as shown in FIGS. In addition, the fourth hinge beam 62b whose central portion is integrally connected to the distal end portion of the fourth main beam 62a, and the both ends thereof are integrally connected to the third movable body portion 33 of the movable body 3 and the central portion is extended in the Y direction. The fourth sub hinge beam 62c is integrally connected to the base end portion of the fourth main beam 62a. The fourth sub hinge beam 62c is integrated with the third movable body portion 33 by forming a long hole 33a penetrating in the X direction and extending in the Y direction in the connecting portion of the main beam 62a in the third movable body portion 33. Is formed.
[0035]
The movable body 3 is assembled as shown in FIG. 14 and the movable table 4 is fixed as shown in FIG. 15 as in the first device M1, but the deformation of the fourth sub hinge beam 62c is the first. A slight gap is formed between the third movable body portion 33 and the second movable body portion 32 where the fourth sub hinge beam 62c is formed so that the second movable body portion 32 is not obstructed.
[0036]
Each of the H-shaped beams 51B, 52B, 61B, and 62B has the same shape and the same material, and has the same elastic deformability. Further, each of the hinge beams 51b, 52b, 61b, and 62b has a plate thickness T as shown in FIG. 16 in order to facilitate its elastic deformation. ₄ The plate thickness T of the main beams 51a, 52a, 61a, 62a ₁ (For example, T ₁ = 1mm, T ₂ = 0.2 mm). However, the end portions of each main beam 51a, 52a, 61a, 62a are shown in FIG. 16 in order to facilitate the displacement of the main beams 51a, 52a, 61a, 62a accompanying the movement of the movable frame 2 or the movable body 3. The thickness T ₂ , T ₃ The thickness T of the hinge beams 51b, 52b, 61b, 62b ₄ (For example, T ₂ = T ₃ = 0.3 mm). The length of the sub hinge beams 51c, 52c, 61c, and 62c is shorter than the length of the hinge beams 51b, 52b, 61b, and 62b. ₄ Is set to the same level.
[0037]
Each of the H-shaped beams 51B, 52B, 61B, and 62B is integrally formed (by electric discharge machining or the like) with its connecting member using a metal material (titanium or the like) or a non-metal material (FRP or carbon or the like) having a high elastic limit. ing. In this example, as in the case of the T-shaped beams 51A, 52A, 61A, and 62A, it is easy to incorporate the movable body 3 into the movable frame 2 and the movable frame 2 and the movable body 3 into the fixed frame 1. 12 to 14, the movable frame 2 and the movable body 3 are connected to the connecting portions of the H-shaped beams 51B, 52B, 61B, and 62B and the connecting portions for connecting the connecting portions. It has been devised so that it can be assembled after being divided into two parts. That is, for the first and second parallel beams 51, 51 and 52, 52, as shown in FIG. 12, the fixed frame 1, the first and second T-shaped beams 51, 52 connected to the fixed frame 1, and the sub-hinges. The beam 51c, 52c is manufactured by electric discharge machining or the like as an integral structure including a movable frame portion (fourth movable frame portion 24) to which the beams 51c and 52c are separately connected. Further, for each third parallel 61, as shown in FIGS. 13 and 14, the first movable frame portion 21, a pair of third T-shaped beams 61, 61 connected thereto, and the sub hinge beams 61c thereof are respectively It is manufactured by electric discharge machining or the like as an integral structure composed of a movable body portion (first movable body portion 31) separately connected. Further, as shown in FIGS. 13 and 14, the fourth parallel beams 62 and 62 are connected to both the second movable frame portions 21 and 21 (integrated with the third movable frame portions 23 and 23) and the second movable frame portions 21 and 21, respectively. As an integral structure composed of two pairs of fourth T-shaped beams 62, 62 and 62, 62 and movable body portions (third movable body portion 33) to which the sub-hinge beams 62c are individually connected, electric discharge machining Etc. MH51 is used as a constituent material of these integrated structures. Thus, by connecting these integral structures directly or indirectly via the connecting portions (the sixth movable frame portion 26, the second movable body portion 32, and the fourth movable body portion 34), As shown in FIG. 11, the second device M2 can be assembled.
[0038]
According to such H-shaped beams 51, 52, 61, and 62, the rotational displacement about the base ends of the main beams 51a, 52a, 61a, and 62a is as shown by the solid lines in FIGS. Since the auxiliary hinge beams 51c, 52c, 61c, and 62c are more easily deformed by elastic deformation, the elastic deformation of the beams is performed more smoothly than in the case of the T-shaped beams 51A, 52A, 61A, and 62A. Is called. Further, the amount of movement from the neutral position in the X direction of the movable frame 2 (the position indicated by the chain line in FIGS. 17 and 18) or the neutral position in the Y direction of the movable body 3 (the position indicated by the chain line in FIGS. 19 and 20). If the movement amount of the main beam 51a is increased, the maximum stress acts on the end connection points of the main beams 51a, 52a, 61a, 62a, and the parallel beams 51, 52, 61, 62 may be plastically deformed by long-term use. If the base ends of the main beams 51a, 52a, 61a, 62a are connected to the movable frame 2 or the movable body 3 via the sub-hinge beams 51c, 52c, 61c, 62c, such a risk can be avoided and the life of the apparatus can be avoided. Can be improved.
[0039]
It should be noted that the present invention is not limited to the above-described embodiments, and can be appropriately improved and changed without departing from the basic principle of the present invention. For example, the main beam and the hinge beam are not linear but can be curved or bent. In addition, the T-shaped beam or the H-shaped beam is formed as an independent member, and the base end portion of the main beam or both ends of the hinge beam in the T-shaped beam, or both ends of the hinge beam or the sub hinge beam in the H-shaped beam. It is also possible to fix the part to a fixed frame or the like (for example, bonding with an adhesive or soldering). Further, the configuration of the moving means 7 and 8 is also arbitrary. For example, an operating member having a high degree of freedom such as a wire, a rod having a minute diameter (for example, 1 mm or less), a band plate, or the like is used. In addition, the second moving means 8 can be forcibly moved in the X direction with respect to the fixed frame 1 by being connected to the movable body 3 and applying a tensile force to these operating members. The movable body 3 can be configured to be forcibly moved in the Y direction with respect to the fixed frame 1 and the movable frame 2.
[0040]
【The invention's effect】
The ultra-precise moving table apparatus of the present invention supports the movable frame to the fixed frame and supports the movable body to the movable frame by parallel beams, and the parallel beams are easily deformed with T-shaped beams or H-shaped beams. Compared to the conventional device in which the movable member is guided by a member that makes contact (rolling or sliding) with the movable member, the moving accuracy of the movable table on the XY plane and its reliability are compared. Therefore, the practical value as a fine movement device is extremely large.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a first device.
FIG. 2 is a perspective view showing a fixed frame of the first device.
FIG. 3 is a perspective view showing a movable frame of the first device.
FIG. 4 is a perspective view showing a movable body of the first device.
FIG. 5 is a perspective view showing a movable body and a moving table of the first device.
FIG. 6 is a plan view showing a main part (T-shaped beam) of the first device.
FIG. 7 is a schematic plan view showing a moving state of the movable frame and a deformed state of the first parallel beam in the first device.
FIG. 8 is a schematic side view showing a moving state of the movable frame and a deformed state of the second parallel beam in the first device.
FIG. 9 is a schematic plan view showing a moving state of the movable body and a deformed state of the third parallel beam in the first device.
FIG. 10 is a schematic front view showing a moving state of a movable body and a deformed state of a fourth parallel beam in the first device.
FIG. 11 is a perspective view showing a second device.
FIG. 12 is a perspective view showing a fixed frame of the second device.
FIG. 13 is a perspective view showing a movable frame of the second device.
FIG. 14 is a perspective view showing a movable body of the second device.
FIG. 15 is a perspective view showing a movable body and a moving table of the second device.
FIG. 16 is a plan view showing a main part (H-shaped beam) of the second device.
FIG. 17 is a schematic plan view showing a moving state of the movable frame and a deformed state of the first parallel beam in the second device.
FIG. 18 is a schematic side view showing a moving state of the movable frame and a deformed state of the second parallel beam in the second device.
FIG. 19 is a schematic plan view showing the moving state of the movable body and the deformed state of the third parallel beam in the second device.
FIG. 20 is a schematic front view showing a moving state of the movable body and a deformed state of the fourth parallel beam in the second device.
[Explanation of symbols]
M1 ... first device (ultra-precision moving table device), M2 ... second device (ultra-precision moving table device), 1 ... fixed frame, 2 ... movable frame, 3 ... movable body, 4 ... moving table, 5 ... first Guide means, 6 ... 2nd guide means, 7 ... 1st moving means, 8 ... 2nd moving means, 11 ... 1st fixed frame part, 12 ... 2nd fixed frame part, 13 ... 3rd movable frame part, 21 ... 1st movable frame part, 22 ... 2nd movable frame part, 23 ... 3rd movable frame part, 24 ... 4th movable frame part, 25 ... 5th movable frame part, 31 ... 1st movable body part, 32 ... 2nd Movable body part, 33 ... third movable body part, 34 ... fourth movable body part, 51 ... first parallel beam, 51A ... first T-shaped beam, 51B ... first H-shaped beam, 51a, 52a, 61a, 62a ... Main beam, 51b, 52b, 61b, 62b ... Hinge beam, 51c, 52c, 61c, 62c ... Sub hinge beam, 52 ... Second parallel beam, 5 A ... 2nd T-shaped beam, 52B ... 2nd H-shaped beam, 61 ... 3rd parallel beam, 61A ... 3rd T-shaped beam, 61B ... 3rd H-shaped beam, 62 ... 4th parallel beam, 62A ... 4th T Shaped beam, 62B ... 4th H-shaped beam.

Claims

A fixed frame fixed to the apparatus installation surface, a movable frame arranged in the fixed frame, a movable body arranged in the movable frame, a moving table provided in the movable body, and the movable frame relative to the fixed frame First guide means for reciprocally supporting in the X direction, second guide means for supporting the movable body reciprocally in the Y direction relative to the movable frame, and relative to the fixed frame. A first moving means for forcibly moving in the X direction and a second moving means for forcibly moving the movable body in the Y direction relative to the fixed frame,
The first guide means includes a pair of first parallel beams that connect the movable frame and a first fixed frame portion that is a fixed frame portion that opposes the movable frame in the Y direction, a movable frame, and a fixed frame portion that opposes the movable frame in the Z direction. It is composed of a pair of second parallel beams that connect the second fixed frame portion.
The second guide means includes a pair of third parallel beams that connect the movable body and a first movable frame portion that is a movable frame portion facing the movable body in the X direction, a movable body, and a movable frame portion facing the movable body in the Z direction. It is composed of a pair of fourth parallel beams that connect the second movable frame portion.
Each first parallel beam is a pair of T-shaped beams made of spring plates whose plate surfaces are parallel to the Z direction, the first main beam extending in the Y direction with the base end connected to the movable frame, and the X direction. And a pair of first T-shaped beams consisting of a first hinge beam having both ends connected to the first fixed frame portion and a central portion integrally connected to the tip of the first main beam,
Each of the second parallel beams is a pair of T-shaped beams made of spring plates whose plate surfaces are parallel to the Z direction, and a second main beam extending in the Z direction with a proximal end connected to the movable frame and the X direction. And a pair of second T-shaped beams consisting of a second hinge beam having both ends connected to the second fixed frame portion and a central portion integrally connected to the tip of the second main beam,
Each third parallel beam is a pair of T-shaped beams made of spring plates whose plate surfaces are parallel to the Z direction, and a third main beam extending in the X direction with a base end connected to the movable body and the Y direction. And a pair of third T-shaped beams comprising both ends connected to the first movable frame portion and a third hinge beam integrally connected to the tip of the third main beam.
Each of the fourth parallel beams is a pair of T-shaped beams made of spring plates whose plate surfaces are parallel to the Z direction, and a fourth main beam extending in the Z direction with a base end connected to the movable body and the Y direction. And a pair of fourth T-shaped beams comprising a fourth hinge beam having both ends connected to the second movable frame portion and a central portion integrally connected to the tip of the fourth main beam,
The moving table causes the first and second parallel beams to be displaced relative to the fixed frame in the X direction while elastically deforming the first and second parallel beams by applying a pressing force or tensile force in the X direction to the movable frame by the first moving means. In addition, by applying a pressing force or a tensile force in the Y direction to the movable body by the second moving means, the third and fourth parallel beams are relatively linearly displaced in the X direction with respect to the movable frame while elastically deforming the third and fourth parallel beams. And the first and second parallel beams or the third and fourth parallel beams are elastically returned to the state before deformation by releasing the pressing force or tensile force. Mobile stand device.

A fixed frame fixed to the apparatus installation surface, a movable frame arranged in the fixed frame, a movable body arranged in the movable frame, a moving table provided in the movable body, and the movable frame relative to the fixed frame First guide means for reciprocally supporting in the X direction, second guide means for supporting the movable body reciprocally in the Y direction relative to the movable frame, and relative to the fixed frame. A first moving means for forcibly moving in the X direction and a second moving means for forcibly moving the movable body in the Y direction relative to the fixed frame,
The first guide means includes a pair of first parallel beams that connect the movable frame and a first fixed frame portion that is a fixed frame portion that opposes the movable frame in the Y direction, a movable frame, and a fixed frame portion that opposes the movable frame in the Z direction. It is composed of a pair of second parallel beams that connect the second fixed frame portion.
The second guide means includes a pair of third parallel beams that connect the movable body and a first movable frame portion that is a movable frame portion facing the movable body in the X direction, a movable body, and a movable frame portion facing the movable body in the Z direction. It is composed of a pair of fourth parallel beams that connect the second movable frame portion.
Each first parallel beam is a pair of H-shaped beams made of spring plates whose plate surfaces are parallel to the Z direction. The first main beam extends in the Y direction, and both ends are fixed in the X direction. A first hinge beam coupled to the frame portion and having a central portion integrally coupled to a tip portion of the first main beam, and extending in the X direction and having both end portions coupled to the movable frame and the central portion serving as a base of the first main beam; It is composed of a pair of first H-shaped beams consisting of a first sub hinge beam integrally connected to the end,
Each of the second parallel beams is a pair of H-shaped beams made of spring plates whose plate surfaces are parallel to the Z direction, the second main beam extending in the Z direction, and both ends of the second fixed beam are fixed in the X direction. A second hinge beam connected to the frame portion and having a central portion integrally connected to a tip portion of the second main beam; and extending in the X direction and having both end portions connected to the movable frame and the central portion being a base of the second main beam. It is composed of a pair of second H-shaped beams consisting of a second sub hinge beam integrally connected to the end,
Each third parallel beam is a pair of H-shaped beams made of spring plates whose plate surfaces are parallel to the Z direction. The third main beam extends in the X direction, and both ends are first movable in the Y direction. A third hinge beam connected to the frame portion and having a central portion integrally connected to a tip portion of the third main beam, and extending in the Y direction, both ends thereof being connected to the movable body, and the central portion being a base of the third main beam; It consists of a pair of 3rd H-shaped beams consisting of a 3rd sub hinge beam integrally connected to the end,
Each fourth parallel beam is a pair of H-shaped beams made of spring plates whose plate surfaces are parallel to the Z direction, the fourth main beam extending in the Z direction, and both ends of the fourth movable beam extending in the Y direction are second movable. A fourth hinge beam connected to the frame portion and having a central portion integrally connected to a tip portion of the fourth main beam, and extending in the Y direction, both ends thereof being connected to the movable body, and the central portion being a base of the fourth main beam; It is composed of a pair of 4th H-shaped beams consisting of a 4th sub hinge beam integrally connected to the end,
The moving table causes the first and second parallel beams to be displaced relative to the fixed frame in the X direction while elastically deforming the first and second parallel beams by applying a pressing force or tensile force in the X direction to the movable frame by the first moving means. In addition, by applying a pressing force or a tensile force in the Y direction to the movable body by the second moving means, the third and fourth parallel beams are relatively linearly displaced in the X direction with respect to the movable frame while elastically deforming the third and fourth parallel beams. And the first and second parallel beams or the third and fourth parallel beams are elastically returned to the state before deformation by releasing the pressing force or tensile force. Mobile stand device.