JP4240981B2

JP4240981B2 - Ultra-precision moving platform equipment

Info

Publication number: JP4240981B2
Application number: JP2002289304A
Authority: JP
Inventors: 哲也石川
Original assignee: Aiden KK
Current assignee: Aiden KK
Priority date: 2002-10-01
Filing date: 2002-10-01
Publication date: 2009-03-18
Anticipated expiration: 2022-10-01
Also published as: JP2004122284A

Description

【０００１】
【発明の属する技術分野】
本発明は、放射光施設・光学系、マイクロビーム関連部品、Ｘ線リソグラフィ、マイクロマシン製作、高分解顕微鏡ステージ等に使用される超精密移動台装置に関するものである。
【０００２】
【従来の技術】
高精度光学ステージ等の超精密移動台装置にあっては、光学機器やウエハ等の部材を取付，載置，支持する移動台を一定方向に直線運動させるための移動台ガイド手段として、一般に、移動台の目的方向以外への移動をこれに接触する転動部材や摺動部材により規制するようにしたものが採用されており、具体的にはクロスローラーガイド等が使用されている。
【０００３】
【発明が解決しようとする課題】
しかし、このようなガイド手段を使用した場合、転動部材や摺動部材の加工精度等の不可避的要因により、移動台の移動精度を一定以上に高くすることができない。例えば、クロスローラーガイドを使用する場合、その精度はクロスローラの真円度に起因して、縦横の揺れを±１０秒程度に抑えるのが限度であり、放射光を用いた光学系等においては使用することができない。放射光を用いた光学系においては、縦横の揺れが共に±０．５μＲａｄ（約０．４秒）程度の精度が要求されている。なお、移動台の移動精度を高めるために、移動補正をピエゾ素子を用いた電気的な制御により行うようにすることも提案されてはいるが、かかる制御手段を使用したものでは、高価であること及び使用上の制約が多いこと等の問題がある。
【０００４】
本発明は、このような点に鑑みてなされたもので、転動部材や摺動部材を全く使用せず且つ移動補正を行うための制御手段を必要としない移動台ガイド手段により移動台をガイドさせることにより、移動精度の大幅な向上を図りうる超精密移動台装置を提供することを目的とするものである。
【０００５】
【課題を解決するための手段】
本発明は、移動台と、これを囲繞する固定枠と、移動台を固定枠に中立位置からＸ方向にのみ往復移動自在にガイドする移動台ガイド手段と、移動台をＸ方向に強制移動させる移動手段と、を具備する超精密移動台装置において、上記の目的を達成すべく、特に、移動台ガイド手段が、Ｘ−Ｙ面上において移動台をそのＹ方向における両側の第１固定枠部分に吊支する一対の第１平行梁で構成されており、各第１平行梁は、板面がＺ方向に平行するバネ板からなるＴ字状梁であって、基端部が移動台に連結されてＹ方向に延びる主梁部分とＸ方向に延びて両端部が第１固定枠部分に連結され且つ中央部が主梁部分の先端部に一体連結されたヒンジ梁部分とからなる一対のＴ字状梁で構成されており、移動台が、これに移動手段によりＸ方向への押圧力又は引張力を作用させることによって各Ｔ字状梁を弾性変形しつつ中立位置からＸ方向に直線運動せしめられると共に、上記押圧力又は引張力を解除することによって各Ｔ状梁が変形前の状態に弾性復帰して上記中立位置に自動復帰せしめられるように構成してあることを特徴とする超精密移動台装置を提案する。
【０００６】
かかる超精密移動台装置にあっては、各第１平行梁が、Ｙ方向に延びる主梁部分と、Ｘ方向に延びて両端部を第１固定枠部分に連結され且つ中央部を主梁部分の先端部に一体連結されたヒンジ梁部分と、Ｘ方向に延びて両端部を移動台に連結され且つ中央部を主梁部分の基端部に一体連結された副ヒンジ梁部分と、からなる一対のＨ字状梁で構成されていることが好ましい。また、移動台、固定枠及び各第１平行梁が一体構造物とされていることが好ましい。
【０００７】
さらに、移動台ガイド手段が、前記一対の第１平行梁とＸ−Ｚ面上において移動台をそのＺ方向における両側の第２固定枠部分に吊支する一対の第２平行梁とで構成されており、各第２平行梁は、板面がＹ方向に平行するバネ板からなるＴ字状梁であって、基端部が移動台に連結されてＺ方向に延びる主梁部分とＸ方向に延びて両端部が第２固定枠部分に連結され且つ中央部が主梁部分の先端部に一体連結されたヒンジ梁部分とからなる一対のＴ字状梁で構成されており、移動台が、これに移動手段によりＸ方向への押圧力又は引張力を作用させることによって第１及び第２平行梁を弾性変形しつつ中立位置からＸ方向に直線運動せしめられると共に、上記押圧力又は引張力を解除することによって第１及び第２平行梁が変形前の状態に弾性復帰して上記中立位置に自動復帰せしめられるように構成してあることがより好ましい。この場合、各第２平行梁の各主梁部分の基端部が移動台に一体連結されていることが好ましい。また、各第２平行梁は、Ｚ方向に延びる主梁部分と、Ｘ方向に延びて両端部を第２固定枠部分に連結され且つ中央部を主梁部分の先端部に一体連結されたヒンジ梁部分と、Ｘ方向に延びて両端部を移動台に連結され且つ中央部を主梁部分の基端部に一体連結された副ヒンジ梁部分と、からなる一対のＨ字状梁で構成されていることが好ましく、第１及び第２平行梁の何れもが上記したＨ字状梁で構成しておくことが特に好ましい。
【０００８】
【発明の実施の形態】
以下、本発明の実施の形態を図１〜図１３に基づいて説明する。なお、以下の説明において、前後とは図２，図５，図６，図７，図９，図１２，図１５，図１８における上下を、左右とは図２，図５，図６，図７，図９，図１２，図１５，図１８における左右を、また上下とは図３，図１０，図１１，図１３，図１６，図１７，図１９における上下を、夫々いうものとする。
【０００９】
図１〜図５は本発明の第１の実施の形態を示すものであり、この実施の形態における本発明の超精密移動台装置（以下「第１装置」という）１は、図１〜図３に示す如く、移動台４と、装置設置面上に固定された固定台５と、固定台５上に取り付けられた固定枠６と、移動台４を固定枠６にＸ方向（前後方向）にのみ往復移動自在にガイドする移動台ガイド手段７と、移動台４をＸ方向に強制移動させる移動手段８と、を具備する。
【００１０】
移動台４は、図１〜図３に示す如く、矩形体をなす本体部４ａとその前後端の中央部から突出する前後一対の矩形状部４ｂ，４ｂとからなる、厚み（Ｚ方向（上下方向）の厚み）を一定とする一体構造物である。
【００１１】
固定台５は、図３に示す如く、所定の装置設置面（この例では水平面）上に固定されており、上面開口状の枠体５ａとこれに嵌合保持された摺動支持体５ｂとからなる。摺動支持体５ｂは焼結炭化珪素製のもので、上面が研磨された水平な移動台保持面５ｃに構成されていて、移動台４をに前後摺動自在に載置保持しうるようになっている。
【００１２】
固定枠６は、図１〜図３に示す如く、移動台４を同心状に囲繞する矩形枠構造をなしており、固定台５の枠体５ａの上面に固着されている。
【００１３】
移動台ガイド手段７は、図１〜図３に示す如く、Ｘ−Ｙ面上において移動台４をそのＹ方向（左右方向）における両側の第１固定枠部分６ａ，６ａに吊支する一対の第１平行梁７ａ，７ａで構成されている。すなわち、移動台ガイド手段７は、移動台４とこれに左右方向において対向する固定枠６の左右部分６ａ，６ａとの対向面間を連結する左右一対の第１平行梁７ａ，７ａで構成されており、各第１平行梁７ａは次のような前後一対のＴ字状梁９，９で構成されている。
【００１４】
すなわち、各Ｔ字状梁９は、図１〜図３に示す如く、板面がＺ方向（上下方向）に平行するバネ板で構成されたもので、基端部９１ａが移動台４の矩形状部４ｂに一体連結されてＹ方向に延びる直線状の主梁部分９１とＸ方向に延びて両端部が第１固定枠部分６ａに一体連結され且つ中央部が主梁部分９１の先端部９１ｂに一体連結された直線状のヒンジ梁部分９２とからなる。主梁部分９１及びヒンジ梁部分９２の板幅（Ｚ方向における幅）は、移動台４の厚みと同一又は略同一とされている。この例では、３０ｍｍに設定されている。また、ヒンジ梁部分９２は、その弾性変形を容易ならしめるべく、板厚Ｔ_２を主梁部分９１の板厚Ｔ_１に比して小さく設定されている（図４参照）。この例では、Ｔ_１＝１ｍｍ，Ｔ_２＝０．２ｍｍに設定してある。但し、主梁梁部分９１の両端部９１ａ，９１ｂについては、移動台４の移動に伴う主梁部分９１の変位を容易ならしめるべく、図４に示す如く、その板厚Ｔ_３，Ｔ_４をヒンジ梁部分９２と同程度に設定してある。この例では、Ｔ_３＝Ｔ_４＝０．３ｍｍに設定してある。
【００１５】
ところで、左右の第１平行梁７ａ，７ａは左右対称形状をなすものであり、各第１平行梁７ａを構成する前後のＴ字状梁９，９は同一形状をなすものであるが、第１平行梁７ａ，７ａは、弾性限界の高い金属材（チタン等）や非金属材（ＦＲＰ，カーボン等）により移動台４及び固定枠６と一体形成（放電加工等による）されている。この例では、移動台４、固定枠６及び第１平行梁７ａ，７ａをＭＨ５１製の一体構造物に構成してある。各ヒンジ梁部分９２は、固定枠部分６ａに前後方向に延びる長孔６ｄを穿設することによって形成されているが、固定枠部分６ａの中央部であってヒンジ梁部分９２，９２間のランド部６ｅは、ヒンジ梁部分９２の塑性変形を防止するために移動台４方向に所定量突出されている。
【００１６】
移動手段８は、移動台４をこれにＸ方向への押圧力又は引張力を作用させることによってＸ方向（前方又は後方）に強制移動させるものであり、この例では、図２に示す如く、マイクロメータを使用している。すなわち、固定枠６における移動台４の前後対向部分６ｂ，６ｂに、移動台４の矩形状部４ｂ，４ｂに直対向する貫通孔６ｃ，６ｃを穿設して、この貫通孔６ｃから挿入させたマイクロメータ８のヘッドで矩形状部４ｂを押圧することによって、移動台４をＸ方向に強制移動させうるようになっている。
【００１７】
以上のように構成された第１装置１にあっては、マイクロメータ８により移動台４をＸ方向に押圧すると、図５に実線で示す如く、各第１平行梁７ａを構成する前後一対のＴ字状梁９が同一形態に弾性変形すると共に左右の第１平行梁７ａ，７ａが左右対称形態に弾性変形しつつ、移動台４を摺動支持体５ｂ上に水平保持させた状態でＸ方向に移動させることができる。すなわち、移動台４の移動に伴って、主梁部分９１が伸張，屈曲変形することなく基端部９１ａを中心として回動変位し、主梁部分９１の回動変位に伴う先端部９１ｂの変位を許容すべく先端部９１ｂに一体連結されたヒンジ梁部分９２が屈曲変形されることになる。
【００１８】
一方、この状態からマイクロメータ８による移動台４の押圧を中止すると、全Ｔ字状梁９…が、主梁部分９１…がＹ方向に平行する状態に弾性復帰して、移動台４を中立位置（図５に鎖線で示す位置）に自動復帰させる。
【００１９】
したがって、第１装置１によれば、移動台４のＸ方向への直線運動を高精度に行うことができ、移動台４の移動及び位置決めを正確に行うことができる。
【００２０】
ところで、第１平行梁７ａの構成は上記した第１の実施の形態に限定されるものではなく、弾性変形及び寿命の更なる向上を図るべく、図６及び図７に示す如く構成しておくことができる。
【００２１】
図６及び図７は第２の実施の形態を示すもので、この実施の形態における本発明に係る超精密移動台装置（以下「第２装置」という）２にあっては、各第１平行梁７ａを前後一対のＨ字状梁１０，１０で構成されている。なお、第２装置２の構成は、以下に述べる点を除いて、第１装置１と同一である。
【００２２】
すなわち、各Ｈ字状梁１０は、図６に示す如く、板面がＺ方向（上下方向）に平行するバネ板で構成されたもので、Ｙ方向に延びる主梁部分９１と、Ｘ方向に延びて両端部を第１固定枠部分６ａに一体連結され且つ中央部を主梁部分９１の先端部９１ｂに一体連結されたヒンジ梁部分９２と、Ｘ方向に延びて両端部を移動台４に連結され且つ中央部を主梁部分９１の基端部９１ａに一体連結された副ヒンジ梁部分９３とからなり、副ヒンジ梁部分９３を設けた点を除いて前記Ｔ字状梁９と同一形状をなすものである。副ヒンジ梁部分９３は、図６に示す如く、移動台４の矩形状部４ｂにおける主梁部分９１の連結部分に前後方向に延びる長孔４ｃを穿設することによって、移動台４に一体形成されている。なお、副ヒンジ梁部分９３の長さは、その機能上、ヒンジ梁部分９２より短くて足り、板厚はヒンジ梁部分９２の板厚Ｔ_２と同程度に設定される。
【００２３】
第２装置２にあっては、各主梁部分９１の基端部９１ａを中心とする回動変位が、図７に実線で示す如く、副ヒンジ梁部分９３の弾性変形によってより容易に行われることから、Ｔ字状梁９の如く基端部９１ａを移動台４に連結させた場合に比して、移動台４に伴う第１平行梁７ａ，７ａの弾性変形がより円滑に行われる。ところで、移動台４の中立位置（図７に鎖線で示す位置）からの移動量を大きくすると、主梁部分９１の端部連結点に最大応力が作用し、第１平行梁７ａが長期使用によって塑性変形する虞れがあるが、主梁部分９１の基端部９１ａを副ヒンジ梁部分９３を介して移動台４に連結しておくと、かかる虞れを回避して装置寿命を向上させることができる。なお、かかる塑性変形防止策としては、更に、図６に鎖線図示する如く、各ヒンジ梁部分９２の両端部近傍において固定枠６に小径孔（例えば、直径３ｍｍ程度の円形孔）６ｆ，６ｆを穿設して、当該ヒンジ梁部分９２の両端部を小さな梁構造としてその弾性変形をより円滑に行わしめるようにすること、又は第１固定枠部分６ａ，６ａのランド部６ｅ，６ｅに配設した伸縮部材１１により、固定枠６にランド部６ｅ，６ｅ間を広げる方向の予張力を付与させておくことも有効である。このような工夫は、第1装置１においても採用することが可能である。
【００２４】
ところで、マイクロメータ等の移動手段８により移動台４を強制移動させる場合、移動台４にＸ方向の移動力が正確に付与されない可能性があり、移動台４をＸ−Ｙ面上でＴ字状梁９又はＨ字状梁１０で吊支するのみでは移動台４のＸ方向への移動精度が低下する虞れがある。かかる虞れがある場合には、移動台ガイド手段７を、図８〜図１３に示す如く、移動台４をＸ−Ｚ面上においても吊支する第２平行梁７ｂを更に具備するものに構成しておくことが好ましい。
【００２５】
図８〜図１３は第３の実施の形態を示すもので、この実施の形態における本発明に係る超精密移動台装置（以下「第３装置」という）３にあっては、移動台ガイド手段７を次のような第１及び第２平行梁７ａ，７ｂで構成してある。なお、第３装置３の構成は、以下に述べる点を除いて、第１又は第２装置１，２と同一である。
【００２６】
すなわち、第３装置３にあっては、図８〜図１１に示す如く、移動台４が、固定枠６内に配置された矩形体状の本体４１と、本体４１の左右両端面にボルト等により固着された左右一対の連結体４２，４２と、本体４１の上面にボルト等により固着されたコ状の支持体４３と、支持体４３の上面にボルト等により固着された機器取付体４４とからなり、固定枠６が、固定台５上にボルト等により固定されて左右方向に延びる前後一対の第３固定枠部分６１，６１と、第３固定枠部分６１，６１の両端部にボルト等により橋架状に連結されて前後方向に延びる左右一対の第１固定枠部分６２，６２と、第３固定枠部分６１，６１の中央部にボルト等により連結されて上下方向に延びる第４固定枠部分６３，６３と、第４固定枠部分６３，６３の上下端部に一体連結されて前後方向に延びる上下一対の第２固定枠部分６４，６４とからなり、移動台ガイド手段７が、各連結体４２とこれに対向する第１固定枠部分６２との間を連結する左右一対の第１平行梁７ａ，７ａと、本体４１とその上下の第２固定枠部分６４，６４との間を連結する上下一対の第２平行梁７ｂ，７ｂとからなる。
【００２７】
各第１平行梁７ａは、図９及び図１２に示す如く、連結体４２及び第１固定枠部分６２と一体形成されており、第２装置２におけると同様形状をなす前後一対のＨ字状梁１０，１０で構成される。すなわち、各Ｈ字状梁１０は、板面がＺ方向（上下方向）に平行するバネ板で構成されたもので、Ｙ方向に延びる主梁部分９１と、Ｘ方向に延びて両端部を第１固定枠部分６２に一体連結され且つ中央部を主梁部分９１の先端部９１ｂに一体連結されたヒンジ梁部分９２と、Ｘ方向に延びて両端部を連結体４２に連結され且つ中央部を主梁部分９１の基端部９１ａに一体連結された副ヒンジ梁部分９３とからなる。副ヒンジ梁部分９３は、連結体４２における主梁部分９１の連結部分に前後方向に延びる長孔４２ａを穿設することによって、連結体４２に一体形成されている。
【００２８】
第２平行梁７ｂ，７ｂは、図１０及び図１３に示す如く、Ｘ−Ｚ面上において移動台４をそのＺ方向における両側の第２固定枠部分６４，６４に吊支する。各第２平行梁７ｂは、板面がＹ方向に平行するバネ板からなる左右一対のＴ字状梁１２，１２からなる。各Ｔ字状梁１２は、基端部が移動台４の主体４１に一体連結されてＺ方向に延びる主梁部分９４とＸ方向に延びて両端部が第２固定枠部分６４に一体連結され且つ中央部が主梁部分９４の先端部に一体連結されたヒンジ梁部分９５とからなり、第１装置１におけるＴ字状梁９と同様形状をなすものである。第２平行梁７ｂ，７ｂと移動台４の主体４１並びに第２及び第４固定枠部分６３，６３及び６４，６４とは、一体形成された一体構造物に構成されている。
【００２９】
第３装置３にあっては、第３及び第４固定枠部分６１，６３に形成した貫通孔から挿通させたマイクロメータヘッド８により移動台４の本体４１をＸ方向に押圧すると、図１２に実線で示す如く、各Ｈ字状梁１０が第２装置２におけると同様の弾性変形を行ないつつ、移動台４がＸ−Ｙ面上でＸ方向に移動されると共に、図１３に実線で示す如く、各第２平行梁７ｂを構成する前後一対のＴ字状梁１２，１２が同一形態に弾性変形すると共に上下の第２平行梁７ｂ，７ｂが上下対称形態に弾性変形しつつ、移動台４がＸ−Ｚ面上でＸ方向に移動される。したがって、第１又は第２装置１，２によっては要求される高精度を得ることができないような条件においても、移動台４を適正に直線運動させることができる。なお、マイクロメータ８による移動台４の押圧を中止すると、第１及び第２平行梁７ａ，７ｂが弾性復帰して、移動台４を中立位置（図１２及び図１３に鎖線で示す位置）に自動復帰させる。
【００３０】
また、第３装置３のように移動台４を第１及び第２平行梁７ａ，７ｂで吊支させたものにおいて、移動台４を更に円滑且つ高精度に移動させるためには、図１４〜図１９に示す如く、第１及び第２平行梁７ａ，７ｂを共にＨ字状梁で構成しておくのが最適である。
【００３１】
図１４〜図１９は第４の実施の形態を示すもので、この実施の形態における本発明に係る超精密移動台装置（以下「第４装置」という）１４にあっては、移動台ガイド手段７を、第３装置３と同一構成をなす左右一対の第１平行梁７ａ，７ａと次のように構成された上下一対の第２平行梁７ｂ，７ｂとで構成してある。なお、第４装置１４の構成は、第２平行梁７ｂの構成を除いて、第３装置３と同一である。
【００３２】
第４装置１４にあっては、図１４〜図１８に示す如く、移動台４、固定枠６及び第１平行梁７ａが第３装置３と同一構成をなしているが、移動台４の本体４１とその上下の第２固定枠部分６４，６４との間を連結する上下一対の第２平行梁７ｂ，７ｂが次のように構成されている。
【００３３】
すなわち、各第２平行梁７ｂは、第３装置３におけると同様に連結体４２及び第１固定枠部分６２と一体形成されているが、第３装置３におけると異なって、上下一対のＨ字状梁１５，１５で構成されている。各Ｈ字状梁１５は、図１６及び図１９に示す如く、板面がＹ方向に平行するバネ板で構成されたもので、Ｚ方向に延びる主梁部分９４と、Ｘ方向に延びて両端部を第２固定枠部分６４に一体連結され且つ中央部を主梁部分９４の先端部に一体連結されたヒンジ梁部分９５と、Ｘ方向に延びて両端部を移動台４の本体４１に連結され且つ中央部を主梁部分９４の基端部に一体連結された副ヒンジ梁部分９６とからなる。副ヒンジ梁部分９６は、図１６に示す如く、本体４１における主梁部分９４の連結部分に前後方向に延びる長孔４１ａを穿設することによって、本体４１に一体形成されている。
【００３４】
第４装置１４にあっては、第３及び第４固定枠部分６１，６３に形成した貫通孔から挿通させたマイクロメータ８のヘッドにより移動台４の本体４１をＸ方向に押圧すると、図１８及び図１９に実線で示す如く、各第１平行梁７ａを構成する左右一対のＨ字状梁１０，１０及び各第２平行梁７ｂを構成する上下一対のＨ字状梁１５，１５が円滑に弾性変形しつつ、移動台４のＸ−Ｚ面上でのＸ方向への移動をより高精度に行うことができる。なお、マイクロメータ８による移動台４の押圧を中止すると、第１及び第２平行梁７ａ，７ｂが弾性復帰して、移動台４を中立位置（図１８及び図１９に鎖線で示す位置）に自動復帰させることは勿論である。
【００３５】
本発明は上記した各実施の形態に限定されるものでなく、本発明の基本原理を逸脱しない範囲において適宜に改良，変更することができる。例えば、主梁部分９１，９４及びヒンジ梁部分９２，９３，９５は直線状のものとせず、湾曲状ないし屈曲状のものとすることができる。また、左右対称をなす第１装置１におけるＴ字状梁９，９及び上下対称をなす第３装置３におけるＴ字状梁１２，１２は、夫々、一体連結されたＨ字状梁に構成して、そのＨ字状梁の中央部を移動台４に固着する（例えば、ボルトにより固定すると共にはんだ付けを行うことにより固着する）ようにすることも可能である。また、移動台４を吊支する平行梁７ａ，７ｂの数も、必要に応じて増加させることが可能である。
【００３６】
【発明の効果】
本発明の超精密移動台装置は、移動台を平行梁によりＸ−Ｙ平面上又はＸ−Ｙ平面及びＸ−Ｚ平面上で吊支させると共に、平行梁を変形容易なＴ字状梁又はＨ字状梁で構成したものであるから、移動台をこれに接触（転接，摺接）する部材によってガイドさせるようにした従来装置に比して、移動台のＸ方向への移動精度，信頼性を大幅に向上させることができ、移動台を平行梁で吊支させただけの簡単な構造のものであることとも相俟って、実用的価値極めて大なるものである。
【図面の簡単な説明】
【図１】第１装置の斜視図である。
【図２】第１装置の平面図である。
【図３】図２のＩＩＩ−ＩＩＩ線に沿う縦断側面図である。
【図４】図２の要部を拡大して示す詳細図である。
【図５】第１装置における移動台の移動状態を示す図２対応の作用説明図である。
【図６】第２装置を示す図２相当の平面図である。
【図７】第２装置における移動台の移動状態を示す図６対応の作用説明図である。
【図８】第３装置の斜視図である。
【図９】第３装置の一部切欠平面図（断面は図１０のＩＸ−ＩＸ線に沿う）である。
【図１０】図９のＸ−Ｘ線に沿う縦断側面図である。
【図１１】図９のＸＩ−ＸＩ線に沿う縦断正面図である。
【図１２】第３装置における移動台の移動状態を示す図９対応の作用説明図である。
【図１３】第３装置における移動台の移動状態を示す図１０対応の作用説明図である。
【図１４】第４装置の斜視図である。
【図１５】第４装置の一部切欠平面図（断面は図１６のＸＶ−ＸＶ線に沿う）である。
【図１６】図１５のＸＶＩ−ＸＶＩ線に沿う縦断側面図である。
【図１７】図１５のＸＩＩ−ＸＩＩ線に沿う縦断正面図である。
【図１８】第４装置における移動台の移動状態を示す図１５対応の作用説明図である。
【図１９】第４装置における移動台の移動状態を示す図１６対応の作用説明図である。
【符号の説明】
１，２，３，１４…超精密移動台装置、４…移動台、６…固定枠、６ａ，６２…第１固定枠部分、７…移動台ガイド手段、７ａ…第１平行梁、７ｂ…第２平行梁、８…移動手段、９，１２…Ｔ字状梁、１０，１５…Ｈ字状梁、６４…第２固定枠部分、９１，９４…主梁部分、９１ａ…基端部、９１ｂ…先端部、９２，９５…ヒンジ梁部分、９３，９６…副ヒンジ梁部分。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an ultra-precise moving table apparatus used for synchrotron radiation facilities / optical systems, microbeam-related components, X-ray lithography, micromachine fabrication, high resolution microscope stage, and the like.
[0002]
[Prior art]
In ultra-precision moving stage devices such as high-precision optical stages, as a moving table guide means for linearly moving a moving table for mounting, mounting, and supporting members such as optical equipment and wafers in a certain direction, A moving table that is restricted from moving in a direction other than the intended direction by a rolling member or a sliding member that contacts the moving table is used. Specifically, a cross roller guide or the like is used.
[0003]
[Problems to be solved by the invention]
However, when such a guide means is used, the moving accuracy of the moving table cannot be increased beyond a certain level due to inevitable factors such as the processing accuracy of the rolling member and the sliding member. For example, when using a cross roller guide, the accuracy of the cross roller is limited to the roundness of the cross roller, and the limit is to suppress vertical and horizontal fluctuations to about ± 10 seconds. In an optical system using radiated light, etc. Cannot be used. In an optical system using synchrotron radiation, both vertical and horizontal fluctuations are required to have an accuracy of about ± 0.5 μRad (about 0.4 seconds). In order to increase the movement accuracy of the moving table, it has been proposed to perform movement correction by electrical control using a piezo element, but using such control means is expensive. And there are many restrictions on use.
[0004]
The present invention has been made in view of the above points, and guides the moving table by moving table guide means that does not use any rolling members or sliding members and does not require a control means for correcting movement. Accordingly, an object of the present invention is to provide an ultra-precise moving table apparatus capable of greatly improving moving accuracy.
[0005]
[Means for Solving the Problems]
The present invention includes a moving table, a fixed frame surrounding the moving table, moving table guide means for guiding the moving table to and from the neutral position so as to be reciprocally movable only in the X direction, and forcibly moving the moving table in the X direction. In order to achieve the above-mentioned object, in particular, in the ultra-precise moving table apparatus comprising the moving means, the moving table guide means includes a first fixed frame portion on both sides in the Y direction on the XY plane. Each of the first parallel beams is a T-shaped beam made of a spring plate whose plate surface is parallel to the Z direction, and a base end portion of the first parallel beam is a moving table. A pair of main beam portions connected to each other and extending in the Y direction, and a pair of hinge beams extending in the X direction and having both end portions connected to the first fixed frame portion and the central portion integrally connected to the distal end portion of the main beam portion. It is composed of T-shaped beams, and the moving table is moved in the X direction by moving means. Each T-shaped beam is linearly moved in the X direction from the neutral position while elastically deforming each T-shaped beam by applying a pressing force or a tensile force, and each T-shaped beam is deformed by releasing the above-mentioned pressing force or tensile force. An ultra-precise moving table apparatus is proposed, which is configured to be elastically returned to the above state and automatically returned to the neutral position.
[0006]
In such an ultra-precise moving table device, each first parallel beam has a main beam portion extending in the Y direction, and both ends are connected to the first fixed frame portion extending in the X direction, and the central portion is the main beam portion. A hinge beam portion integrally connected to the distal end portion, and a sub hinge beam portion extending in the X direction and having both end portions connected to the movable base and the central portion integrally connected to the base end portion of the main beam portion. It is preferable to be composed of a pair of H-shaped beams. Moreover, it is preferable that the movable stand, the fixed frame, and each first parallel beam are integrated structures.
[0007]
Further, the moving table guide means includes the pair of first parallel beams and a pair of second parallel beams that suspend and support the moving table on the second fixed frame portions on both sides in the Z direction on the XZ plane. Each of the second parallel beams is a T-shaped beam composed of a spring plate whose plate surface is parallel to the Y direction, and a base beam portion that is connected to the moving base and extends in the Z direction and the X direction. And a pair of T-shaped beams having both ends connected to the second fixed frame portion and a central portion integrally connected to the distal end portion of the main beam portion. By applying a pressing force or tensile force in the X direction by the moving means to the first and second parallel beams, the first and second parallel beams can be linearly moved from the neutral position in the X direction while being elastically deformed. The first and second parallel beams are elastic in the state before deformation by releasing And more preferably it is configured to be brought automatically return to the neutral position ascribes. In this case, it is preferable that the base end portion of each main beam portion of each second parallel beam is integrally connected to the moving table. Each of the second parallel beams has a main beam portion extending in the Z direction, a hinge extending in the X direction and having both end portions connected to the second fixed frame portion and a central portion integrally connected to the distal end portion of the main beam portion. It is composed of a pair of H-shaped beams consisting of a beam portion and a sub-hinge beam portion that extends in the X direction and has both ends connected to a moving base and a central portion integrally connected to the base end of the main beam portion. It is preferable that both the first and second parallel beams are made of the above H-shaped beam.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to FIGS. In the following description, the front and rear are the top and bottom in FIGS. 2, 5, 6, 6, 7, 12, 15, and 18, and the left and right are FIGS. 7, 9, 12, 15, and 18, and the top and bottom means the top and bottom in FIGS. 3, 10, 11, 13, 16, 17, and 19, respectively. .
[0009]
1 to 5 show a first embodiment of the present invention, and an ultra-precise moving table apparatus (hereinafter referred to as "first apparatus") 1 of the present invention in this embodiment is shown in FIGS. 3, the movable table 4, the fixed table 5 fixed on the apparatus installation surface, the fixed frame 6 attached on the fixed table 5, and the movable table 4 to the fixed frame 6 in the X direction (front-rear direction). And a moving table guide means 7 that guides the moving table 4 in a reciprocating manner only, and a moving means 8 that forcibly moves the moving table 4 in the X direction.
[0010]
As shown in FIGS. 1 to 3, the movable table 4 includes a main body portion 4 a that forms a rectangular body and a pair of front and rear rectangular portions 4 b and 4 b that protrude from the central portion of the front and rear ends thereof. It is a monolithic structure with a constant thickness).
[0011]
As shown in FIG. 3, the fixed base 5 is fixed on a predetermined apparatus installation surface (in this example, a horizontal surface), and includes a frame body 5a having an opening on the upper surface and a sliding support body 5b fitted and held thereon. Consists of. The sliding support 5b is made of sintered silicon carbide, and is formed on a horizontal moving stand holding surface 5c whose upper surface is polished so that the moving stand 4 can be placed and held slidably back and forth. It has become.
[0012]
As shown in FIGS. 1 to 3, the fixed frame 6 has a rectangular frame structure that concentrically surrounds the movable table 4, and is fixed to the upper surface of the frame 5 a of the fixed table 5.
[0013]
As shown in FIGS. 1 to 3, the movable table guide means 7 is a pair of suspension units that suspend the movable table 4 on the first fixed frame portions 6a and 6a on both sides in the Y direction (left and right direction) on the XY plane. It consists of first parallel beams 7a, 7a. That is, the movable table guide means 7 is composed of a pair of left and right first parallel beams 7a and 7a that connect the opposed surfaces of the movable table 4 and the left and right portions 6a and 6a of the fixed frame 6 that are opposed to the movable table 4 in the left and right direction. Each first parallel beam 7a is composed of a pair of front and rear T-shaped beams 9 and 9 as follows.
[0014]
That is, as shown in FIGS. 1 to 3, each T-shaped beam 9 is configured by a spring plate whose plate surface is parallel to the Z direction (vertical direction), and the base end portion 91 a is a rectangular shape of the movable table 4. A straight main beam portion 91 that is integrally connected to the shape portion 4b and extends in the Y direction, and both ends of the linear main beam portion 91a are integrally connected to the first fixed frame portion 6a and the center portion is the distal end portion 91b of the main beam portion 91. And a linear hinge beam portion 92 integrally connected to each other. The plate width (width in the Z direction) of the main beam portion 91 and the hinge beam portion 92 is the same as or substantially the same as the thickness of the movable table 4. In this example, it is set to 30 mm. Further, the hinge beam portion 92, the order makes it an elastic deformation easily, is set smaller than the thickness T ₂ in the thickness T ₁ of the main beam portion 91 (see FIG. 4). In this example, T ₁ = 1 mm and T ₂ = 0.2 mm are set. However, as shown in FIG. 4, the thicknesses T ₃ and T ₄ of the both end portions 91a and 91b of the main beam portion 91 are set to be easy to displace the main beam portion 91 as the moving table 4 moves. It is set to the same level as the hinge beam portion 92. In this example, T ₃ = T ₄ = 0.3 mm is set.
[0015]
By the way, the left and right first parallel beams 7a and 7a have a symmetrical shape, and the front and rear T-shaped beams 9 and 9 constituting each first parallel beam 7a have the same shape. The parallel beams 7a and 7a are integrally formed with the movable table 4 and the fixed frame 6 (by electric discharge machining or the like) with a metal material (titanium or the like) or a non-metal material (FRP or carbon or the like) having a high elastic limit. In this example, the movable table 4, the fixed frame 6, and the first parallel beams 7a and 7a are configured as an integral structure made of MH51. Each hinge beam portion 92 is formed by drilling a long hole 6d extending in the front-rear direction in the fixed frame portion 6a. The hinge beam portion 92 is a central portion of the fixed frame portion 6a and a land between the hinge beam portions 92 and 92. The portion 6e protrudes by a predetermined amount in the direction of the movable table 4 in order to prevent plastic deformation of the hinge beam portion 92.
[0016]
The moving means 8 forcibly moves the moving table 4 in the X direction (forward or backward) by applying a pressing force or tensile force in the X direction to the moving table 4, and in this example, as shown in FIG. A micrometer is used. That is, through-holes 6c and 6c directly facing the rectangular portions 4b and 4b of the moving table 4 are formed in the front and rear facing portions 6b and 6b of the moving table 4 in the fixed frame 6, and inserted through the through-holes 6c. The movable table 4 can be forcibly moved in the X direction by pressing the rectangular portion 4 b with the head of the micrometer 8.
[0017]
In the first apparatus 1 configured as described above, when the movable table 4 is pressed in the X direction by the micrometer 8, a pair of front and rear constituting each first parallel beam 7a as shown by a solid line in FIG. While the T-shaped beam 9 is elastically deformed to the same shape and the left and right first parallel beams 7a and 7a are elastically deformed to the left-right symmetrical shape, the movable table 4 is horizontally held on the sliding support 5b. Can be moved in the direction. That is, with the movement of the movable table 4, the main beam portion 91 is rotated and displaced around the base end portion 91 a without being stretched or bent, and the displacement of the distal end portion 91 b due to the rotation displacement of the main beam portion 91 is performed. Therefore, the hinge beam portion 92 integrally connected to the distal end portion 91b is bent and deformed.
[0018]
On the other hand, when the pressing of the movable table 4 by the micrometer 8 is stopped from this state, all the T-shaped beams 9... Elastically return to a state in which the main beam portions 91. It is automatically returned to the position (the position indicated by the chain line in FIG. 5).
[0019]
Therefore, according to the 1st apparatus 1, the linear motion to the X direction of the mobile stand 4 can be performed with high precision, and the movement and positioning of the mobile stand 4 can be performed correctly.
[0020]
By the way, the configuration of the first parallel beam 7a is not limited to the first embodiment described above, and is configured as shown in FIGS. 6 and 7 in order to further improve the elastic deformation and the life. be able to.
[0021]
6 and 7 show a second embodiment. In the ultra-precision moving platform apparatus (hereinafter referred to as “second apparatus”) 2 according to the present invention in this embodiment, each first parallel is shown. The beam 7a is composed of a pair of front and rear H-shaped beams 10 and 10. The configuration of the second device 2 is the same as that of the first device 1 except as described below.
[0022]
That is, as shown in FIG. 6, each H-shaped beam 10 is composed of a spring plate whose plate surface is parallel to the Z direction (vertical direction), and has a main beam portion 91 extending in the Y direction and an X direction. A hinge beam portion 92 that extends and has both ends integrally connected to the first fixed frame portion 6a and a central portion that is integrally connected to the distal end portion 91b of the main beam portion 91, and extends in the X direction to both ends of the movable base 4 It consists of a sub hinge beam portion 93 that is connected and has a central portion integrally connected to the base end portion 91a of the main beam portion 91, and has the same shape as the T-shaped beam 9 except that the sub hinge beam portion 93 is provided. It is what makes. As shown in FIG. 6, the sub hinge beam portion 93 is integrally formed with the moving table 4 by drilling a long hole 4 c extending in the front-rear direction in the connecting portion of the main beam portion 91 in the rectangular portion 4 b of the moving table 4. Has been. Note that the length of the sub hinge beam portion 93 is shorter than the hinge beam portion 92 in function, and the plate thickness is set to be approximately the same as the plate thickness T ₂ of the hinge beam portion 92.
[0023]
In the second device 2, the rotational displacement about the base end portion 91 a of each main beam portion 91 is more easily performed by elastic deformation of the sub hinge beam portion 93 as shown by the solid line in FIG. 7. Therefore, the elastic deformation of the first parallel beams 7 a and 7 a accompanying the moving table 4 is performed more smoothly than when the base end portion 91 a is connected to the moving table 4 as in the T-shaped beam 9. By the way, when the amount of movement from the neutral position of the moving table 4 (position indicated by the chain line in FIG. 7) is increased, the maximum stress acts on the end connection point of the main beam portion 91, and the first parallel beam 7a is used for a long time. Although there is a possibility of plastic deformation, if the base end portion 91a of the main beam portion 91 is connected to the moving base 4 via the sub hinge beam portion 93, such a possibility is avoided and the life of the apparatus is improved. Can do. As a measure for preventing such plastic deformation, as shown in FIG. 6, a small-diameter hole (for example, a circular hole having a diameter of about 3 mm) 6f, 6f is formed in the fixed frame 6 in the vicinity of both ends of each hinge beam portion 92. By drilling, both ends of the hinge beam portion 92 have a small beam structure so that the elastic deformation can be performed more smoothly, or disposed on the land portions 6e and 6e of the first fixed frame portions 6a and 6a. It is also effective to apply a pretension to the fixed frame 6 in the direction in which the space between the land portions 6e, 6e is widened by the stretchable member 11. Such a device can also be adopted in the first device 1.
[0024]
By the way, when the moving table 4 is forcibly moved by the moving means 8 such as a micrometer, there is a possibility that the moving force in the X direction is not accurately applied to the moving table 4, and the moving table 4 is T-shaped on the XY plane. If only the beam 9 or the H-shaped beam 10 is used for suspension, there is a possibility that the movement accuracy of the movable table 4 in the X direction is lowered. If there is such a possibility, the moving table guide means 7 is further provided with a second parallel beam 7b for supporting the moving table 4 on the XZ plane as shown in FIGS. It is preferable to configure.
[0025]
FIGS. 8 to 13 show a third embodiment. In the ultra-precise moving table apparatus (hereinafter referred to as “third apparatus”) 3 according to the present invention in this embodiment, moving table guide means is shown. 7 is composed of the following first and second parallel beams 7a and 7b. The configuration of the third device 3 is the same as that of the first or second device 1 or 2 except as described below.
[0026]
That is, in the third device 3, as shown in FIGS. 8 to 11, the movable table 4 includes a rectangular main body 41 disposed in the fixed frame 6, bolts and the like on both left and right end surfaces of the main body 41. A pair of left and right coupling bodies 42, 42 fixed by the above, a U-shaped support body 43 fixed to the upper surface of the main body 41 by a bolt or the like, and a device attachment body 44 fixed to the upper surface of the support body 43 by a bolt or the like. The fixed frame 6 is fixed to the fixed base 5 with bolts or the like and extends in the left-right direction, and a pair of front and rear third fixed frame portions 61 and 61, and bolts or the like at both ends of the third fixed frame portions 61 and 61. A pair of left and right first fixed frame portions 62, 62 that are connected in a bridge shape and extend in the front-rear direction, and a fourth fixed frame that is connected to the center of the third fixed frame portions 61, 61 with a bolt or the like and extends in the vertical direction. The portions 63 and 63 and the fourth fixed frame portions 63 and 63 The movable table guide means 7 includes a pair of upper and lower second fixed frame portions 64 and 64 that are integrally connected to the lower end portion and extend in the front-rear direction. It consists of a pair of left and right first parallel beams 7a, 7a that connect between them, and a pair of upper and lower second parallel beams 7b, 7b that connect between the main body 41 and the upper and lower second fixed frame portions 64, 64 thereof.
[0027]
As shown in FIGS. 9 and 12, each first parallel beam 7a is integrally formed with the connecting body 42 and the first fixed frame portion 62, and has a pair of front and rear H-shapes similar to those in the second device 2. It is composed of beams 10 and 10. That is, each H-shaped beam 10 is composed of a spring plate whose plate surface is parallel to the Z direction (up and down direction), and has a main beam portion 91 extending in the Y direction and both ends at the ends extending in the X direction. 1 A hinge beam portion 92 integrally connected to the fixed frame portion 62 and having a central portion integrally connected to the distal end portion 91b of the main beam portion 91, and extending in the X direction and having both ends connected to the connecting body 42 and a central portion thereof. It consists of a sub hinge beam portion 93 integrally connected to the base end portion 91 a of the main beam portion 91. The sub hinge beam portion 93 is integrally formed with the connecting body 42 by making a long hole 42 a extending in the front-rear direction in the connecting portion of the main beam portion 91 in the connecting body 42.
[0028]
As shown in FIGS. 10 and 13, the second parallel beams 7 b and 7 b suspend the movable table 4 on the second fixed frame portions 64 and 64 on both sides in the Z direction on the XZ plane. Each of the second parallel beams 7b includes a pair of left and right T-shaped beams 12 and 12 each having a spring plate whose plate surface is parallel to the Y direction. Each T-shaped beam 12 has a base end portion integrally connected to the main body 41 of the movable table 4 and a main beam portion 94 extending in the Z direction, and both end portions integrally connected to the second fixed frame portion 64. In addition, the central portion is composed of a hinge beam portion 95 integrally connected to the distal end portion of the main beam portion 94, and has the same shape as the T-shaped beam 9 in the first device 1. The second parallel beams 7b, 7b, the main body 41 of the movable table 4, and the second and fourth fixed frame portions 63, 63 and 64, 64 are configured as an integrally formed structure.
[0029]
In the third device 3, when the main body 41 of the movable table 4 is pressed in the X direction by the micrometer head 8 inserted through the through holes formed in the third and fourth fixed frame portions 61 and 63, FIG. As indicated by the solid line, each of the H-shaped beams 10 is elastically deformed in the same manner as in the second device 2, and the movable table 4 is moved in the X direction on the XY plane, and is indicated by the solid line in FIG. As described above, the pair of front and rear T-shaped beams 12 and 12 constituting each second parallel beam 7b are elastically deformed in the same form, and the upper and lower second parallel beams 7b and 7b are elastically deformed in a vertically symmetrical form, 4 is moved in the X direction on the XZ plane. Therefore, the movable table 4 can be properly linearly moved even under conditions where the high accuracy required by the first or second device 1 or 2 cannot be obtained. When the pressing of the moving table 4 by the micrometer 8 is stopped, the first and second parallel beams 7a and 7b are elastically returned to bring the moving table 4 to the neutral position (the position indicated by the chain line in FIGS. 12 and 13). Automatically return.
[0030]
Further, in the case where the moving table 4 is suspended by the first and second parallel beams 7a and 7b as in the third device 3, in order to move the moving table 4 more smoothly and with high accuracy, FIG. As shown in FIG. 19, it is optimal that both the first and second parallel beams 7a and 7b are composed of H-shaped beams.
[0031]
FIGS. 14 to 19 show a fourth embodiment. In the ultra-precise moving table apparatus (hereinafter referred to as “fourth apparatus”) 14 according to the present invention in this embodiment, moving table guide means is shown. 7 includes a pair of left and right first parallel beams 7a and 7a having the same configuration as that of the third device 3, and a pair of upper and lower second parallel beams 7b and 7b configured as follows. The configuration of the fourth device 14 is the same as that of the third device 3 except for the configuration of the second parallel beam 7b.
[0032]
In the fourth device 14, as shown in FIGS. 14 to 18, the movable table 4, the fixed frame 6 and the first parallel beam 7 a have the same configuration as that of the third device 3, but the main body of the movable table 4. A pair of upper and lower second parallel beams 7b and 7b that connect 41 and the upper and lower second fixed frame portions 64 and 64 are configured as follows.
[0033]
That is, each second parallel beam 7b is integrally formed with the connecting body 42 and the first fixed frame portion 62 as in the third device 3, but unlike in the third device 3, a pair of upper and lower H-shapes. It is comprised by the shaped beams 15 and 15. FIG. As shown in FIGS. 16 and 19, each H-shaped beam 15 is composed of a spring plate whose plate surface is parallel to the Y direction, and has a main beam portion 94 extending in the Z direction and both ends extending in the X direction. The hinge beam portion 95 is integrally connected to the second fixed frame portion 64 and the central portion is integrally connected to the distal end portion of the main beam portion 94, and both ends are connected to the main body 41 of the movable table 4 in the X direction. And a sub hinge beam portion 96 having a central portion integrally connected to a base end portion of the main beam portion 94. As shown in FIG. 16, the sub hinge beam portion 96 is integrally formed with the main body 41 by making a long hole 41 a extending in the front-rear direction in a connecting portion of the main beam portion 94 in the main body 41.
[0034]
In the fourth device 14, when the main body 41 of the movable table 4 is pressed in the X direction by the head of the micrometer 8 inserted through the through holes formed in the third and fourth fixed frame portions 61 and 63, FIG. As shown by solid lines in FIG. 19, the pair of left and right H-shaped beams 10 and 10 constituting each first parallel beam 7a and the pair of upper and lower H-shaped beams 15 and 15 constituting each second parallel beam 7b are smooth. It is possible to move the moving base 4 in the X direction on the XZ plane with higher accuracy while being elastically deformed. When the pressing of the moving table 4 by the micrometer 8 is stopped, the first and second parallel beams 7a and 7b are elastically restored to bring the moving table 4 to the neutral position (the position indicated by the chain line in FIGS. 18 and 19). Of course, it is possible to automatically return.
[0035]
The present invention is not limited to the above-described embodiments, and can be appropriately improved and changed without departing from the basic principle of the present invention. For example, the main beam portions 91, 94 and the hinge beam portions 92, 93, 95 are not linear but can be curved or bent. In addition, the T-shaped beams 9 and 9 in the first device 1 that is symmetric and the T-shaped beams 12 and 12 in the third device 3 that are vertically symmetric are each configured as an integrally connected H-shaped beam. Thus, it is also possible to fix the central portion of the H-shaped beam to the moving table 4 (for example, fixing by fixing with bolts and soldering). In addition, the number of parallel beams 7a and 7b that support the movable table 4 can be increased as necessary.
[0036]
【The invention's effect】
The ultra-precise moving table apparatus of the present invention suspends a moving table on an XY plane or an XY plane and an XZ plane by parallel beams, and makes the parallel beams easily deformable T-shaped beams or H Because it is composed of letter-shaped beams, the moving table is moved in the X direction with higher accuracy and reliability compared to conventional devices in which the moving table is guided by a member that contacts (rolling or sliding) the moving table. Combined with the simple structure in which the movable table is simply suspended by parallel beams, the practical value is extremely large.
[Brief description of the drawings]
FIG. 1 is a perspective view of a first device.
FIG. 2 is a plan view of the first device.
FIG. 3 is a longitudinal side view taken along line III-III in FIG. 2;
4 is an enlarged detailed view showing a main part of FIG. 2. FIG.
FIG. 5 is an operation explanatory diagram corresponding to FIG. 2 and illustrating a moving state of the moving table in the first device.
FIG. 6 is a plan view corresponding to FIG. 2 showing a second device.
FIG. 7 is an operation explanatory diagram corresponding to FIG. 6 and illustrating a moving state of the moving table in the second device.
FIG. 8 is a perspective view of a third device.
FIG. 9 is a partially cutaway plan view of the third device (the cross section is taken along the line IX-IX in FIG. 10).
10 is a longitudinal side view taken along line XX of FIG.
11 is a longitudinal sectional front view taken along line XI-XI in FIG.
FIG. 12 is an operation explanatory diagram corresponding to FIG. 9 and illustrating a moving state of the moving table in the third device.
13 is an operation explanatory diagram corresponding to FIG. 10 and illustrating a moving state of the moving table in the third device.
FIG. 14 is a perspective view of a fourth device.
15 is a partially cutaway plan view of the fourth device (the cross section is along the line XV-XV in FIG. 16).
16 is a longitudinal side view taken along line XVI-XVI in FIG.
17 is a longitudinal sectional front view taken along line XII-XII in FIG.
18 is an operation explanatory diagram corresponding to FIG. 15 and illustrating a moving state of the moving table in the fourth device.
FIG. 19 is an operation explanatory diagram corresponding to FIG. 16 and illustrating a moving state of the moving table in the fourth device.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1, 2, 3, 14 ... Super precision moving stand apparatus, 4 ... Moving stand, 6 ... Fixed frame, 6a, 62 ... 1st fixed frame part, 7 ... Moving stand guide means, 7a ... 1st parallel beam, 7b ... Second parallel beam, 8 ... moving means, 9, 12 ... T-shaped beam, 10, 15 ... H-shaped beam, 64 ... second fixed frame portion, 91, 94 ... main beam portion, 91a ... proximal end portion, 91b ... tip, 92, 95 ... hinge beam portion, 93, 96 ... sub hinge beam portion.

Claims

A moving table, a fixed frame surrounding the moving table, moving table guide means for guiding the moving table to and from the neutral position so as to reciprocate only in the X direction, moving means for forcibly moving the moving table in the X direction, In the ultra-precise moving table device comprising:
The moving table guide means includes a pair of first parallel beams that suspend the moving table on the first fixed frame portions on both sides in the Y direction on the XY plane and the moving table on the XZ plane in the Z direction. It is composed of a pair of second parallel beams suspended from the second fixed frame portions on both sides ,
Each of the first parallel beams is a T-shaped beam made of a spring plate whose plate surface is parallel to the Z direction, and a base end portion is connected to the moving base and extends in the Y direction and a main beam portion extending in the X direction. Both ends are connected to the first fixed frame part and the center part is composed of a pair of T-shaped beams consisting of a hinge beam part integrally connected to the tip of the main beam part,
Each of the second parallel beams is a T-shaped beam made of a spring plate whose plate surface is parallel to the Y direction, and a base end portion is connected to the moving table and extends in the Z direction and extends in the X direction. Both ends are connected to the second fixed frame part and the center part is composed of a pair of T-shaped beams consisting of a hinge beam part integrally connected to the tip part of the main beam part,
The moving table is caused to linearly move in the X direction from the neutral position while elastically deforming the first and second parallel beams by applying a pressing force or a tensile force in the X direction by the moving means. Alternatively, an ultra-precision moving platform apparatus configured such that by releasing the tensile force, the first and second parallel beams are elastically returned to the state before deformation and automatically returned to the neutral position.

Each first parallel beam is an H-shaped beam composed of a spring plate whose plate surface is parallel to the Z direction, and a main beam portion extending in the Y direction, and both end portions extending to the X direction as first fixing frame portions. A hinge beam portion that is connected and has a central portion integrally connected to a distal end portion of the main beam portion, and extends in the X direction, and both end portions are connected to a moving base, and a central portion is integrally connected to a base end portion of the main beam portion. 2. The ultra-precise moving table apparatus according to claim 1, comprising a pair of H-shaped beams including a sub-hinge beam portion.

The ultra-precise moving table apparatus according to claim 1 or 2, wherein the moving table, the fixed frame, and each first parallel beam are integrated.

Proximal end of the main beam portion of each of the second parallel beams, characterized that you have been integrally connected to the moving base, ultra-precision moving table apparatus according to any one of claims 1-3.

Each of the second parallel beams is an H-shaped beam composed of a spring plate whose plate surface is parallel to the Y direction. The main beam portion extends in the Z direction, and both ends are extended to the second fixed frame portion in the X direction. The hinge beam portion is connected and the central portion is integrally connected to the distal end portion of the main beam portion, and the both ends are connected to the moving base extending in the X direction, and the central portion is integrally connected to the base end portion of the main beam portion. The ultra-precision moving stand apparatus according to any one of claims 1 to 3, comprising a pair of H-shaped beams including a sub hinge beam portion .