JP2005053076A - Manufacturing method of multilayered substrate and hot press - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a multilayered substrate capable of shortening a heating time, and a hot press. <P>SOLUTION: A laminate 50, which is obtained by laminating an insulating layer and a conductor layer, is arranged between a pair of the hot press plates 20a and 20b of the hot press 10 and heated and pressed from both upper and under surfaces thereof by the hot press plates 20a and 20b to manufacture the multilayered substrate. At this time, the laminate 50 is heated and pressed in a state that an auxiliary plate 30, which is excellent in heat conductivity and has length not obstructing the pressure to the laminate 50 by the hot press plates 20a and 20b, is arranged to the side surface of the laminate 50 and first cushioning materials 40, which are excellent in heat conductivity and can be deformed upon the reception of the pressure from the hot press plates 20a and 20b, are arranged between the end surfaces of the auxiliary plate 30 and the hot press plates 20a and 20b. By this constitution, the heat of the hot press plates 20a and 20b is transmitted to the laminate 50 from the side surface thereof through the first cushioning materials 40 and the auxiliary plate 30 to shorten a heating time. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a method for producing a multilayer substrate obtained by heating and pressurizing a laminate formed by laminating an insulating layer and a conductor layer with a hot press, and a heat press for producing a multilayer substrate using the method. It is.

  2. Description of the Related Art Conventionally, there has been known a multilayer substrate in which an insulating layer and a conductor layer are laminated to form a laminated body, and the laminated body is heated and pressurized with a hot press. As a method for producing such a multilayer substrate, a method of forming a multilayer substrate by laminating and bonding a single-sided copper foil film on each of the upper and lower surfaces of the core substrate, and laminating resin films having conductor patterns at once And a method of forming a multilayer substrate. In either case, generally, a multilayer press substrate is formed by heating and pressurizing from the upper and lower surfaces of the laminate using a hot press machine, bonding the resins and bonding the metals together.

  At that time, only one laminate may be placed between the hot press plates of the hot press machine to perform heating and pressurization, but between the pair of hot press plates, a cushioning material, a release film, etc. By arranging a plurality of laminated bodies in the vertical direction, a plurality of multilayer substrates can be manufactured by one heating and pressurization, and the total manufacturing time can be reduced.

  However, since heat and pressure are applied from the upper and lower surfaces of the laminate by the hot press plate, the laminate at a position farther from the hot press plate requires more time for heat conduction. That is, the heating time is longer than when one laminate is heated.

  In view of the above problems, an object of the present invention is to provide a multilayer substrate manufacturing method and a hot press machine capable of shortening the heating time.

  In order to achieve the above object, the method for producing a multilayer substrate according to claim 1 includes a laminating step in which an insulating layer and a conductor layer are laminated to form a laminate, and the laminate is disposed between hot press plates. A heating / pressurizing step of heating / pressurizing the laminate from above and below by the hot press plate. And in the heating and pressurizing step, on the side surface side of the laminate, an auxiliary plate having excellent thermal conductivity while having a length that does not interfere with pressurization to the laminate by the hot press plate, and excellent in thermal conductivity Heat and pressure are applied in a state where the first shock-absorbing material that can be deformed by receiving pressure from the heat-pressing plate is disposed, and the heat of the heat-pressing plate is transferred to the side surface via the auxiliary plate and the first shock-absorbing material. Is transmitted to the laminate.

  Thus, according to the method for producing a multilayer substrate of the present invention, a laminated body using a hot press plate in a state in which the auxiliary plate having excellent thermal conductivity and the first buffer material are arranged on the side surface side of the laminated body. Therefore, the heat from the hot press plate is efficiently transmitted to the side surface of the laminate through the auxiliary plate and the first buffer material. Therefore, the heat conduction time to the laminated body can be shortened compared to the conventional case where the heat of the hot press plate is transmitted only from the upper and lower surfaces of the laminated body, so that the heating time can be shortened. That is, the manufacturing time of the multilayer substrate can be shortened.

  In addition, when the multilayer substrate is not manufactured in a vacuum, the auxiliary plate disposed on the side surface of the stacked body suppresses heat radiation from the stacked body, thereby reducing the heating time.

  As described in claim 2, in the heating / pressurizing step, a plurality of laminated bodies may be arranged between the hot press plates. One laminate may be disposed between the hot press plates. However, by arranging a plurality of stacked bodies, a plurality of multilayer substrates can be formed at once, and the manufacturing time of the multilayer substrates can be shortened. At that time, even if the laminate is located away from the hot press plate, the heat of the heat press is transmitted from the side surface to the laminate via the first cushioning material and the auxiliary plate. The heating time is shortened compared with the case where heat is not transferred from the side surface, and the manufacturing time of the multilayer substrate can be further shortened.

  The auxiliary plate may be made of a material having excellent thermal conductivity in order to transfer heat from the hot press plate to the side surface of the laminate. An example of such a material is a metal as described in claim 3.

  In addition, the shape of the auxiliary plate is not particularly limited as long as the auxiliary plate is arranged on the side surface side of the laminated body with a length that does not interfere with the pressurization to the laminated body by the hot press plate. 4 is preferably provided in an annular shape along the side surface of the laminate. In this case, since the contact area between the auxiliary plate and the laminate increases, the heat transfer path from the hot press plate increases and the heating time can be further shortened.

  Further, the auxiliary plate may have heating means as described in claim 5 and may heat the laminate itself in the heating / pressurizing step. If the auxiliary plate has a heating means, not only can the heat of the hot press plate be transferred to the laminate, but it can also generate heat and heat the laminate. In this case, since the amount of heat transferred from the side surface to the laminate increases, the heating time can be further shortened.

  When the auxiliary plate is divided into a plurality of positions in the stacking direction, the first buffer material may be arranged between the auxiliary plates as described in claim 6. Moreover, irrespective of the presence or absence of the division | segmentation of an auxiliary | assistant board, as described in Claim 7, you may arrange | position between the end surface of an auxiliary | assistant board, and a hot press board. In any case, the first buffer material is deformed by receiving pressure from the hot press plate, and fills a gap between the auxiliary plates or between the end surface of the auxiliary plate and the hot press plate (the first buffer material is wide). Since the contact area is in contact with the auxiliary plate and the hot press plate), the heat transfer path is increased, and the heat from the hot press plate can be efficiently transferred to the side surface of the laminate.

  The first buffer material may be made of a material that is excellent in thermal conductivity and can be deformed by receiving pressure from a hot press plate. Examples of such a material include metal fibers as described in claim 8.

  In addition, the first cushioning material may be disposed separately from the auxiliary plate, but may be provided integrally as described in claim 9. The first cushioning material and auxiliary plate if they are made of a material that has excellent thermal conductivity and can be deformed by receiving pressure from the hot press plate so as not to interfere with pressurization to the laminate by the hot press plate Can be provided integrally. In this case, the number of parts can be reduced.

  As described in claim 10, in the heating / pressurizing step, a second cushioning material that is excellent in thermal conductivity and can be deformed in accordance with the unevenness of the side surface of the laminate is provided between the auxiliary plate and the laminate. It is preferable that heating and pressurization are performed in the arranged state.

  Concavities and convexities are formed on the side surfaces of the laminate due to misalignment or dimensional errors during lamination. Therefore, by arranging the second cushioning material that is excellent in thermal conductivity and can be deformed according to the unevenness of the side surface of the laminated body between the auxiliary plate and the side surface of the laminated body, Since the heat transfer path to is increased, the heating time can be shortened. In that case, as a material of the second buffer material, for example, as described in claim 11, a metal fiber can be used.

  Further, the second cushioning material may be disposed separately from the first cushioning material, but may be provided integrally as described in claim 12. The second cushioning material is disposed between the auxiliary plate and the laminated body, and is also disposed so as to wrap around between the end surface of the auxiliary plate and the hot press plate. In this case, the number of parts can be reduced.

  In addition, if the insulating layer and the conductor layer are a combination in which a multilayer substrate is formed by heating and pressing a hot press plate, the constituent materials and the forming method are not particularly limited. For example, the insulating layer may be a thermosetting resin or a resin sheet in which a glass cloth is impregnated with resin, heated and dried to form a B stage, and the conductor layer is formed by plating or conductive paste. It may be. Therefore, as described in claim 13, the insulating layer may be a resin film, and the conductor layer may be a conductor pattern provided on the surface of the resin film.

  At that time, as described in claim 14, in the heating and pressurizing step, the laminate is formed from the hot press plate while being deformed according to the unevenness of the laminate surface between at least one laminate surface and the hot press plate. Heating and pressurization may be performed in a state in which the third cushioning material that transmits the pressing force to the body is disposed.

  Even if the surface of the resin film constituting the laminate is uneven, the third buffer material is deformed according to the unevenness, so the pressure difference in each part of the resin film can be reduced, and the displacement of the conductor pattern as the conductor layer can be reduced. Can be prevented.

  The third cushioning material may be arranged separately from the first cushioning material, but may be provided integrally as described in claim 15. The third cushioning material is disposed between the laminate surface and the hot press plate, and is also disposed between the end surface of the auxiliary plate and the hot press plate. In this case, the number of parts can be reduced. Further, the first, second, and third cushioning materials may be provided integrally.

  In addition, a thermoplastic resin can be mention | raise | lifted as a resin film (structured laminated body) of Claims 13-15.

  Next, the hot press of the present invention will be described below. The hot press machine according to claim 17 is provided with a plurality of hot press plates, a laminate formed by laminating an insulating layer and a conductor layer is disposed between the hot press plates, and hot press is performed from above and below the laminate. This is a hot press machine for producing a multilayer substrate by heating and pressing with a plate. An auxiliary plate made of a material excellent in thermal conductivity while having a length that does not prevent pressurization of the laminated body by the hot pressed plate on the side surface side of the laminated body between the hot pressed plates, and heat conduction And a first cushioning material that is deformable by receiving pressure from a hot press plate while being excellent in performance.

  Since this effect is the same as the effect described in claim 1, the description thereof is omitted.

  The auxiliary plate may be made of a material having excellent thermal conductivity in order to transfer heat from the hot press plate to the side surface of the laminate, and as such a material, for example, a metal is used as described in claim 18. be able to.

  Further, the shape of the auxiliary plate is not particularly limited as long as the auxiliary plate is arranged on the side surface of the laminated body with a length that does not hinder the pressurization to the laminated body by the hot press plate, but the shape is not particularly limited. It is preferable that it is provided annularly along the side surface of the laminate as described in. In this case, since the contact area between the auxiliary plate and the laminate increases, the heat transfer path from the hot press plate increases and the heating time can be further shortened.

  The auxiliary plate may have a heating means as described in claim 20. If the auxiliary plate itself has a heating means, not only can the heat of the hot press plate be transmitted to the laminated body, but it can also generate heat and heat the laminated body. In this case, since the amount of heat transferred from the side surface to the laminate increases, the heating time can be further shortened.

  When the auxiliary plate is divided in the stacking direction, the first buffer material may be arranged between the auxiliary plates as described in claim 21. Moreover, irrespective of the presence or absence of the division | segmentation of an auxiliary plate, as described in Claim 22, you may arrange | position between the end surface of an auxiliary plate and a hot press board. In any case, the first buffer material is deformed by receiving pressure from the hot press plate, and fills a gap between the auxiliary plates or between the end surface of the auxiliary plate and the hot press plate (the first buffer material is wide). Therefore, the heat transfer path is increased, and the heat from the hot press plate can be efficiently transferred to the side surface of the laminate.

  The first buffer material may be made of a material that has excellent thermal conductivity and can be deformed by receiving pressure from the hot press plate. Examples of such a material include metal fibers as described in claim 23.

  The first buffer material may be provided separately from the auxiliary plate, but may be provided integrally as described in claim 24. The first cushioning material and auxiliary plate if they are made of a material that has excellent thermal conductivity and can be deformed by receiving pressure from the hot press plate so as not to interfere with pressurization to the laminate by the hot press plate Can be provided integrally.

  As described in claim 25, it is preferable to provide a second cushioning material between the auxiliary plate and the laminate, which has excellent thermal conductivity and can be deformed in accordance with the irregularities on the side of the laminate.

  Concavities and convexities are formed on the side surfaces of the laminate due to misalignment or dimensional errors during lamination. Therefore, between the auxiliary plate and the side surface of the laminate, the second buffer material that is excellent in thermal conductivity and can be deformed according to the irregularities on the side surface of the laminate is provided from the auxiliary plate to the side surface of the laminate. Since the heat transfer path increases, the heating time can be shortened.

  As a material of such a second cushioning material, for example, a metal fiber can be used as described in claim 26.

Moreover, although the 2nd shock absorbing material and the 1st shock absorbing material may be provided separately, as described in Claim 27, you may provide integrally. In this case, the second cushioning material is disposed between the auxiliary plate and the laminated body, and is also disposed so as to wrap around between the end surface of the auxiliary plate and the hot press plate.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(First embodiment)
FIG. 1 is a cross-sectional view showing a schematic configuration of a hot press machine during heating and pressurization in the present embodiment. Therefore, in FIG. 1, the laminated body is arrange | positioned between the hot press plates of a hot press machine.

  As shown in FIG. 1, the hot press 10 includes a pair of hot press plates 20a and 20b, an auxiliary plate 30 disposed on the side of the laminate, and the auxiliary while being disposed on the side of the laminate. It is comprised by the 1st shock absorbing material 40 arrange | positioned between the end surface of the board 30, and hot press board 20a, 20b.

  The hot press plates 20a and 20b are arranged so as to sandwich the laminated body 50 from both upper and lower sides, and heat and pressurize the laminated body 50 from both upper and lower sides. In the present embodiment, five laminated bodies are positioned and arranged so as to overlap each other in the laminating direction between the pair of hot press plates 20a and 20b. The hot press plates 20a and 20b are made of a conductive metal such as titanium, for example, and generate heat when a current is applied. In addition, a heater is embedded in the hot press plates 20a and 20b and heated by the heater, or a fluid flow path is provided in the hot press plates 20a and 20b, and the fluid heated in the flow path The hot press plates 20a and 20b may be heated by flowing.

  The auxiliary plate 30 is made of a material having excellent thermal conductivity, and is made of a metal such as Al or Cu, for example. In addition, the auxiliary plate 30 is formed with a length that does not hinder pressurization of the stacked body 50 by the hot press plates 20 a and 20 b, and is disposed so as to contact the side surface of the stacked body 50. At this time, the shape of the auxiliary plate 30 is not particularly limited, but in the present embodiment, the auxiliary plate 30 is annularly provided along the side surface of the stacked body 50 so as to be in contact with the side surface of the stacked body 50. As described above, since the contact area between the auxiliary plate 30 and the side surface of the laminated body 50 is increased when the annular body is provided along the side surface of the laminated body 50, the heat transfer path from the hot press plates 20a and 20b is increased. The heating time can be shortened.

  The first buffer material 40 is formed using a material that is excellent in thermal conductivity and can be deformed by receiving pressure from the hot press plates 20a and 20b. Examples of such a material include a metal processed into a fiber shape, and the fibrous metal formed into a plate shape as a nonwoven fabric, or a knitted fabric or a cloth as a woven fabric (for example, Nathlon (registered trademark) felt). ) Can be used. Further, the first buffer material 40 does not hinder the pressurization to the laminated body 50 by the hot press plates 20a and 20b when the laminated body 50 is heated and pressurized, and the first pressurizing material 20a, The thickness of the auxiliary plate 30 is such that the heat of the auxiliary plate 30 can be efficiently transferred (in the stacking direction), and the heat plate 20a, 20b and the end surface of the auxiliary plate 30 are disposed on the side surface side of the stacked body 50. Placed in.

  Next, the manufacturing method of a multilayer substrate is demonstrated using FIG.

  First, although not shown, a stacking process for forming the stacked body 50 is performed. If the laminated body 50 is formed by laminating an insulating layer and a conductor layer and becomes a multilayer substrate by heating and pressurization from the hot press plates 20a and 20b (so-called build-up multilayer substrate), its material configuration The forming method is not particularly limited. For example, the insulating layer may be a thermosetting resin or a thermoplastic resin. Further, a resin sheet in which a glass cloth is impregnated with a resin, heated and dried to form a B stage may be used. Further, the conductor layer may be a conductor foil bonded to a resin patterned by etching, or may be a conductor pattern formed by plating or conductive paste. In addition, a multilayer substrate can be formed by laminating and bonding single-sided copper foil films on each of the upper and lower surfaces of the core substrate, or a multilayer substrate can be formed by laminating resin films having conductor patterns at once. You may do it.

  In this embodiment, a resin film made of a thermoplastic resin is used as an insulating layer, and a conductive pattern formed by etching a conductive foil attached to one side of the resin film is used as a conductive layer. The laminated body 50 is formed by laminating a plurality of resin films. And a multilayer substrate is formed in a lump. The thermoplastic resin is not particularly limited, but in the present embodiment, a liquid crystal polymer (LCP) having a thickness of 25 to 100 μm is used. In addition, as the conductive foil used for the conductive pattern, for example, a low resistance metal foil containing at least one of Au, Ag, Cu, and Al can be used. In this embodiment, the Cu foil is inexpensive and has no fear of migration. Shall be used.

  After the laminated body 50 is formed, the laminated body 50 is positioned between the hot press plates 20a and 20b of the hot press 10. The number of the laminated bodies 50 arrange | positioned between the hot press boards 20a and 20b is not specifically limited, Only one may be arrange | positioned. In this embodiment, as shown in FIG. 1, the 3rd buffer material 60 and the laminated body 50 are laminated | stacked alternately, and the five laminated bodies 50 are arrange | positioned between a pair of hot press board 20a, 20b. In this way, when a plurality of stacked bodies 50 are arranged and a plurality of multilayer substrates are formed at once, the manufacturing time of the multilayer substrates can be shortened. In FIG. 1, a pallet 70 for transporting the laminated body 50 made of metal is disposed between the lower heat press plate 20 b and the first buffer material 40 and the third buffer material 60.

  Here, the third buffer material 60 is formed of a material that transmits the pressure of the hot press plates 20a and 20b to the laminate 50 while being deformed in accordance with the unevenness of the surface of the laminate 50 during heating and pressurization. Yes. For example, a metal such as stainless steel processed into a fiber shape and the fiber metal formed into a plate shape as a non-woven fabric, or a woven fabric made into a knit or cloth (for example, NASRON (registered trademark)) can be used. . Other than that, it has a resistance equal to or higher than the heating / pressurizing condition described later, and has a flexibility capable of elastically deforming into a shape that can buffer the shape difference between the pressing surface of the hot press plates 20a, 20b and the laminate 50. Other materials and configurations can be used. For example, a polytetrafluoroethylene film, a Kevlar (registered trademark) and a hypersheet (registered trademark) gasket obtained by specially processing a polytetrafluoroethylene resin, a film or fiberized resin, glass fiber, or the like can be used. In the present embodiment, a metal is processed into a fiber shape, and the fiber metal is formed into a plate shape (felt) as a nonwoven fabric.

  As a result, even if the laminated body 50 having a resin that flows during heating and pressurizing as a thermoplastic resin, such as a thermoplastic resin, is heated and pressurized by the hot press plates 20a and 20b, Since the three cushioning members 60 are deformed, pressure is applied almost uniformly to the various portions of the laminated body 50, and as a result, displacement of the conductor layer can be prevented.

  Next, a heating / pressurizing step of heating / pressing the laminated body 50 from the upper and lower surfaces using the hot press plates 20a, 20b is performed.

  First, before the hot press plates 20a and 20b enter the heating / pressurizing operation, the auxiliary plate 30 is disposed so as to be in contact with the side surface of the laminated body 50, and the side surface side of the laminated body 50 (in FIG. 1, the laminated body). 50 on the end surface of the auxiliary plate 30 facing the pressure application surface of the hot press plate 20a, 20b (the hot press plate 20b side is on the pallet 70). In the middle), the first buffer material 40 is disposed.

  Then, in a state where the auxiliary plate 30 and the first buffer material 40 are disposed, heating and pressurization are performed from above and below the laminated body 50 by the hot press plates 20a and 20b. At this time, the heat of the hot press plates 20a and 20b is transmitted to the upper and lower surfaces of the laminate 50 via the third buffer material 60, and the pressure from the hot press plates 20a and 20b is applied to various portions of the laminate 50. Applied evenly.

  At the same time, in the present embodiment, the first buffer member 40 receives pressure from the hot press plates 20a and 20b and is located between the hot press plates 20a and 20b and the end face of the auxiliary plate 30 (lower hot press plate). 20b is deformed by the pallet 70) and contacts the hot press plates 20a, 20b and the auxiliary plate 30 with a wide contact area (fills the gap between the hot press plates 20a, 20b and the end face of the auxiliary plate 30). Therefore, the heat from the hot press plates 20 a and 20 b is efficiently transmitted to the laminated body 50 also from the side surface via the first buffer material 40 and the auxiliary plate 30.

  And the thermoplastic resin which comprises the laminated body 50 is softened, resin is adhere | attached, and between the interlayer connection materials in the via hole previously formed in the resin film, or the conductor pattern which is an interlayer connection material and a conductor layer, And a multilayer substrate is formed through a cooling process after heating and pressurization. In the present embodiment, the heating / pressurizing conditions applied to the laminate 50 by the hot press plates 20a, 20b are, for example, a temperature in a range of 200 to 350 ° C., and a pressure of 0.1 to It is a value in the range of 10 MPa. In addition, the multilayer substrate is managed so as to be cooled with a predetermined temperature gradient by a hot press.

  Thus, according to the manufacturing method of the multilayer substrate in the present embodiment, the heat of the hot press plates 20a and 20b can be transmitted to the laminated body 50 also from the side surface side of the laminated body 50, so that the heating time is shortened. Can do. That is, the manufacturing time of the multilayer substrate can be shortened.

  Further, in the case of manufacturing a multilayer substrate without evacuation, the auxiliary plate 30 disposed on the side surface of the multilayer body 50 suppresses heat radiation from the multilayer body 50, which also shortens the heating time. The

  In addition, as shown in the present embodiment, when the plurality of laminated bodies 50 are hot-pressed in a lump, the heat of the hot-pressed plates 20a and 20b is also on the side of the laminated body 50 located far from the hot-pressed plates 20a and 20b. Since it is transmitted from the side, the temperature difference (temperature unevenness) between the laminated bodies 50 arranged in plurality can be reduced. That is, it is suitable for manufacturing a plurality of multilayer substrates at once, and the quality of the manufactured multilayer substrates can be stabilized.

  In the present embodiment, an example in which the first buffer material 40 is disposed between the end face of the auxiliary plate 30 and the hot press plates 20a and 20b is shown. However, as shown in FIG. 2, when the auxiliary plate 30 is divided in the stacking direction, the first buffer material 40 may be disposed between the auxiliary plates 30. FIG. 2 is a cross-sectional view showing a modification of the present embodiment and corresponds to FIG. Also in this case, the first cushioning material 40 is deformed between the auxiliary plates 30 under pressure from the hot press plates 20a and 20b, and comes into contact with the auxiliary plates 30 with a wide contact area (fills the gap between the auxiliary plates 30). ). Therefore, the heat from the hot press plates 20a and 20b is efficiently transmitted to the laminate 50 also from the side surface via the auxiliary plate 30 and the first buffer material 40. In addition, you may arrange | position the 1st shock absorbing material 40 between the end surface of the auxiliary | assistant board 30, and the hot press board 20a, 20b with between the auxiliary | assistant boards 30. FIG.

  Moreover, in this embodiment, the auxiliary plate 30 and the 1st shock absorbing material 40 showed the example provided separately separately. However, as shown in FIG. 3, the first cushioning material 40 may be provided integrally with the auxiliary plate 30. For example, the auxiliary plate 30 may be formed of a material that can be deformed when subjected to pressure from the hot press plates 20a and 20b and extended to the position where the first buffer material 40 is disposed. As such a material, for example, a metal such as stainless steel is processed into a fiber shape, the fiber metal is formed into a plate shape as a nonwoven fabric, or a knitted fabric or a cloth as a woven fabric (for example, Naslon (registered trademark) )) Can be used. In this case, not only can the number of parts be reduced, but the length (stacking direction) of the auxiliary plate 30 can be easily adjusted by the amount of the first cushioning material 40 being a part of the auxiliary plate 30. FIG. 3 is a cross-sectional view showing a modification of the present embodiment, and corresponds to FIG.

  Moreover, in this embodiment, the example in which the 1st shock absorbing material 40 and the 3rd shock absorbing material 60 were provided independently was shown. However, as shown in FIG. 4, the third cushioning material 60 may be provided integrally with the first cushioning material 40. Of the third buffer material 60, only the third buffer material 60 disposed between the laminated body 50 and the hot press plates 20a and 20b is made of, for example, a material having excellent thermal conductivity and the first buffer material. What is necessary is just to extend and provide to the arrangement position of the material 40. FIG. As such a material, for example, a metal such as stainless steel is processed into a fiber shape, the fiber metal is formed into a plate shape as a nonwoven fabric, or a knitted fabric or a cloth as a woven fabric (for example, Naslon (registered trademark) )) Can be used. In this case, the number of parts can be reduced. FIG. 4 is a cross-sectional view showing a modification of the present embodiment, and corresponds to FIG.

(Second Embodiment)
Next, a second embodiment of the present invention will be described with reference to FIG. FIG. 5 is a cross-sectional view showing a schematic configuration of the hot press 10 at the time of heating and pressurization in the present embodiment. FIG. 5 corresponds to FIG.

  The manufacturing method of the multilayer substrate in the second embodiment and the heat press machine 10 that manufactures the multilayer substrate using the method are often in common with those according to the first embodiment. Detailed explanation is omitted, and different parts are explained mainly.

  The second embodiment is different from the first embodiment in that the hot press 10 includes a second cushioning material.

  As shown in FIG. 5, in the present embodiment, the hot press 10 includes a second cushioning material 80, and the second cushioning material 80 is disposed between the auxiliary plate 30 and the laminated body 50. Heating and pressurization are performed.

  The second buffer material 80 is excellent in thermal conductivity and is formed using a material that can be deformed in accordance with the unevenness on the side surface of the stacked body 50. As such a material, for example, like the first buffer material 40, a metal is cut into a fiber shape, and the fiber metal is formed into a plate shape as a nonwoven fabric, or a knitted fabric or a cloth as a woven fabric ( For example, Naslon (registered trademark) can be used. Further, the shape of the second cushioning material 80 is not particularly limited, but in the present embodiment, like the auxiliary plate 30, the second cushioning material 80 is provided in a ring shape along the side surface of the stacked body 50, and is long in the stacking direction. The length is substantially equal to that of the auxiliary plate 30.

  In the heating / pressurizing step, the second buffer material 80 is disposed on the side surface of the laminated body 50, and the auxiliary plate 30 is disposed in that state. Usually, the side surface of the laminated body 50 is uneven due to a positional deviation or dimensional error during lamination. Therefore, as shown in the first embodiment, even if the auxiliary plate 30 is disposed on the side surface of the laminated body 50, a partial gap is generated between the auxiliary plate 30 and the side surface of the laminated body 50. However, in the present embodiment, the auxiliary plate 30 is disposed so as to be in contact with the second buffer material 80, and the second buffer material 80 is disposed between the auxiliary plate 30 and the side surface of the stack 50. Deforms to match the surface irregularities of Therefore, in a state where the auxiliary plate 30 is disposed, the second cushioning material 80 comes into contact with the side surfaces of the auxiliary plate 30 and the laminated body 50 with a wide contact area. As described above, the second cushioning material 80 that has excellent thermal conductivity and can be deformed in accordance with the unevenness of the side surface of the laminated body 50 is disposed between the auxiliary plate 30 and the side surface of the laminated body 50, thereby assisting. Since the heat transfer path from the plate 30 to the side surface of the laminate 50 is increased, the heating time (manufacturing time) can be further shortened.

  In the present embodiment, an example in which the first cushioning material 40 and the second cushioning material 80 are disposed separately and independently has been shown. However, as shown in FIG. 6, the second cushioning material 80 may be provided integrally with the first cushioning material 40. FIG. 6 is a cross-sectional view showing a modification of the present embodiment, and corresponds to FIG. For example, the second cushioning material 80 is provided by using a material that can be deformed by receiving pressure from the hot press plates 20a and 20b and extending to the position where the first cushioning material 40 is disposed as shown in FIG. It ’s fine. In this case, the second cushioning material 80 is disposed between the auxiliary plate 30 and the laminated body 50 and is also disposed so as to wrap around between the end surface of the auxiliary plate 30 and the hot press plates 20a and 20b. . As such a material, for example, a metal is processed into a fibrous shape, and the fibrous metal is formed into a plate shape as a nonwoven fabric, or a woven fabric is knit or cloth (for example, NASRON (registered trademark)). Can be used. In this case, the number of parts can be reduced. 6 may be provided so as to cover the entire periphery of the auxiliary plate 30 (so as to wrap around the auxiliary plate 30). For example, the entire periphery of the auxiliary plate 30 can be covered by winding the tape-like second cushioning material 80 around the auxiliary plate 30.

(Third embodiment)
Next, a third embodiment of the present invention will be described with reference to FIG. FIG. 7 is a cross-sectional view illustrating a schematic configuration of the hot press 10 according to the present embodiment. FIG. 7 corresponds to FIG.

  The manufacturing method of the multilayer substrate in the third embodiment and the heat press machine 10 that manufactures the multilayer substrate using the method are often in common with those according to the first embodiment. Detailed explanation is omitted, and different parts are explained mainly.

  The third embodiment is different from the first embodiment in that the auxiliary plate 30 has a heating unit.

  As shown in FIG. 7, the hot press 10 according to the present embodiment includes a heating unit 90 on the auxiliary plate 30. And the laminated body 50 is heated by the said heating means 90 from a side surface side with own heat.

  The heating means 90 is not particularly limited as long as it generates heat. Heat may be generated by energizing the auxiliary plate 30 itself, or a heater or the like may be installed. Alternatively, heat may be generated by passing a fluid through the auxiliary plate 30 and heating the fluid. In the present embodiment, the heating means 90 includes a heater that performs heating in conjunction with the hot press plates 20a and 20b.

  Therefore, since the auxiliary plate 30 has the heating means 90, not only can the heat of the hot press plates 20 a and 20 b be transmitted to the laminated body 50, but the self-generated heat can heat the laminated body 50. In this case, the amount of heat transferred from the side surface to the stacked body 50 increases, so that the heating time (manufacturing time) can be further shortened.

  7 shows an example in which the heating unit 90 is provided in the vicinity of the center of the auxiliary plate 30, the formation position of the heating unit 90 is not particularly limited. However, as the number of laminated bodies 50 arranged between the hot press plates 20a and 20b increases, heat is transmitted to the laminated body 50 located far from the hot press plates 20a and 20b even if the auxiliary plate 30 is provided. As shown in FIG. 6, if the heating means 90 is formed at a location far from the hot press plates 20a and 20b, it is effective for shortening the heating time.

  The preferred embodiments of the present invention have been described above. However, the present invention is not limited to the above-described embodiments, and various modifications can be made.

  In this embodiment, the hot press machine 10 showed the example provided with a pair of hot press board 20a, 20b. However, the hot press machine 10 is not limited to a pair because it only needs to include a plurality of hot press plates.

  Moreover, in this embodiment, the example which all arrange | positions the same 3rd buffer material 60 between the laminated bodies 50 and between the laminated bodies 50 and the hot press boards 20a and 20b was shown. However, the third buffer material 60 may be disposed only between the laminate 50 and the hot press plates 20a and 20b. In that case, a material having a buffer effect different from that of the third buffer material 60 may be disposed between the stacked bodies 50. Further, it is not always necessary to dispose the third cushioning material 60 between the laminates 50 and between the laminate 50 and the heat press plates 20a and 20b. The third cushioning member 60 is made of polyimide or the like regardless of the presence or absence of the third cushioning member 60. A release sheet, a mirror plate made of SUS, or the like may be disposed between the stacked bodies 50 and between the stacked body 50 and the hot press plates 20a and 20b.

  Moreover, in this Embodiment, the example in which the 1st shock absorbing material 40 and the 2nd shock absorbing material 80 and the 1st shock absorbing material 40 and the 3rd shock absorbing material 60 were provided integrally was shown. However, as shown in FIG. 8, the 1st shock absorbing material 40, the 2nd shock absorbing material 80, and the 3rd shock absorbing material 60 may be provided integrally. FIG. 8 is a cross-sectional view showing another modification, and corresponds to FIG. For example, in the state where the first buffer material 40 is made of one large metal fiber and is arranged so as to wrap the side surface from the upper surface of the laminated body 50, the peripheral portion of the first buffer material 40 is shown in FIG. Thus, if it arrange | positions between the hot press board 20b and the auxiliary | assistant board 30, the 1st shock absorbing material 40 can serve as the 2nd shock absorbing material 80 and the 3rd shock absorbing material 60. FIG. In this case, the number of parts can be further reduced.

It is sectional drawing which shows schematic structure of the hot press machine at the time of the heating and pressurization in the 1st Embodiment of this invention. It is sectional drawing which shows the modification of 1st Embodiment. It is sectional drawing which shows the modification of 1st Embodiment. It is sectional drawing which shows the modification of 1st Embodiment. It is sectional drawing which shows schematic structure of the hot press machine at the time of the heating and pressurization in 2nd Embodiment. It is sectional drawing which shows the modification of 2nd Embodiment. It is sectional drawing which shows schematic structure of the hot press machine at the time of the heating and pressurization in 3rd Embodiment. It is sectional drawing which shows the other modification.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Hot press machine 20a, 20b ... Hot press board 30 ... Auxiliary board 40 ... 1st buffer material 50 ... Laminated body 60 ... 3rd buffer material 80 ... Second buffer material 90... Heating means

Claims (27)

A laminating step in which a laminated body is formed by laminating an insulating layer and a conductor layer, and the laminated body is disposed between hot press plates, and heating / pressing is performed by heating and pressurizing the laminated body from above and below both surfaces by the hot press plate. A method for producing a multilayer substrate comprising a pressing step,
In the heating / pressurizing step, on the side surface side of the laminate, an auxiliary plate having excellent thermal conductivity while having a length that does not hinder pressurization of the laminate by the hot press plate, and thermal conductivity Heat and pressure are applied in a state where the first buffer material that is excellent and can be deformed by receiving pressure from the hot press plate is disposed, and the heat of the hot press plate is transferred to the auxiliary plate and the first buffer. A method for producing a multilayer substrate, wherein the multilayer substrate is transmitted to a side surface of the laminate through a material. The method for producing a multilayer substrate according to claim 1, wherein in the heating / pressurizing step, a plurality of the laminated bodies are arranged between the hot press plates. The method for manufacturing a multilayer substrate according to claim 1, wherein the auxiliary plate is made of metal. The said auxiliary | assistant board is cyclically | annularly provided along the side surface of the said laminated body, The manufacturing method of the multilayer substrate of any one of Claims 1-3 characterized by the above-mentioned. The said auxiliary | assistant board has a heating means, The said laminated body itself is heated in the said heating and pressurization process, The manufacturing method of the multilayer substrate of any one of Claims 1-4 characterized by the above-mentioned. The said auxiliary | assistant board is divided | segmented into the lamination direction, A said 1st shock absorbing material is arrange | positioned between the said auxiliary | assistant boards, The manufacturing of the multilayer substrate of any one of Claims 1-5 characterized by the above-mentioned. Method. The method for manufacturing a multilayer substrate according to claim 1, wherein the first buffer material is disposed between an end face of the auxiliary plate and the hot press plate. The method for manufacturing a multilayer substrate according to claim 1, wherein the first buffer material is made of a metal fiber. The method for manufacturing a multilayer substrate according to claim 1, wherein the first buffer material is provided integrally with the auxiliary plate. In the heating / pressurizing step, a second cushioning material that is excellent in thermal conductivity and deformable in accordance with the irregularities on the side surface of the laminate is disposed between the auxiliary plate and the laminate. Heating and pressurizing are performed, The manufacturing method of the multilayer substrate of any one of Claims 1-9 characterized by the above-mentioned. The method for manufacturing a multilayer substrate according to claim 10, wherein the second buffer material is made of a metal fiber. The second cushioning material is provided integrally with the first cushioning material, and the second cushioning material is disposed between the auxiliary plate and the laminate, and the end surface of the auxiliary plate and the heat The method for producing a multilayer substrate according to claim 10 or 11, wherein the multilayer substrate is disposed so as to wrap around between the press plates. The method for manufacturing a multilayer substrate according to claim 1, wherein the insulating layer is a resin film, and the conductor layer is a conductor pattern provided on a surface of the resin film. In the heating / pressurizing step, a pressing force is transmitted from the hot press plate to the laminate while being deformed according to the unevenness of the laminate surface between at least one of the laminate surface and the hot press plate. The method for manufacturing a multilayer substrate according to claim 13, wherein heating and pressurization are performed in a state where the third cushioning material is arranged. The third cushioning material is provided integrally with the first cushioning material, and the third cushioning material is disposed between the surface of the laminate and the hot press plate, and an end surface of the auxiliary plate. The method for manufacturing a multilayer board according to claim 14, wherein the multilayer board is also disposed between the hot press plate. The method for manufacturing a multilayer substrate according to claim 13, wherein the resin film is made of a thermoplastic resin. A multilayer board comprising a plurality of hot press plates, a laminate formed by laminating an insulating layer and a conductor layer between the hot press plates, and being heated and pressed by the hot press plates from the upper and lower surfaces of the laminate. A heat press machine for manufacturing,
An auxiliary plate made of a material excellent in thermal conductivity while having a length that does not prevent pressurization to the laminate by the hot press plate on the side surface side of the laminate, between the hot press plates, A heat press machine comprising: a first cushioning material that is excellent in thermal conductivity and is deformable by receiving pressure from the hot press plate. The hot press according to claim 14, wherein the auxiliary plate is made of metal. The hot press according to claim 14 or 15, wherein the auxiliary plate is provided in an annular shape along a side surface of the laminate. The hot press according to any one of claims 17 to 19, wherein the auxiliary plate has a heating means. The said auxiliary | assistant board is divided | segmented into the lamination direction, A said 1st shock absorbing material is a side surface of the said laminated body, and is arrange | positioned between the said auxiliary | assistant boards, The any one of Claims 17-20 characterized by the above-mentioned. The heat press machine according to item. The said 1st shock absorbing material is a side surface of the said laminated body, Comprising: It arrange | positions between the end surface of the said auxiliary | assistant board, and the said heat press board, The any one of Claims 17-21 characterized by the above-mentioned. Heat press machine. The hot press machine according to any one of claims 17 to 22, wherein the first buffer material is made of a metal fiber. The hot press machine according to any one of claims 17 to 23, wherein the first cushioning material is provided integrally with the auxiliary plate. 25. A second cushioning material that is excellent in thermal conductivity and deformable in accordance with the irregularities on the side surface of the laminated body, is provided between the auxiliary plate and the laminated body. The heat press machine according to item. The hot press machine according to claim 25, wherein the second buffer material is made of a metal fiber. 27. The hot press according to claim 25 or claim 26, wherein the second cushioning material is provided integrally with the first cushioning material.

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