JP2005051269A - 半導体処理装置 - Google Patents

半導体処理装置 Download PDF

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Publication number
JP2005051269A
JP2005051269A JP2004297773A JP2004297773A JP2005051269A JP 2005051269 A JP2005051269 A JP 2005051269A JP 2004297773 A JP2004297773 A JP 2004297773A JP 2004297773 A JP2004297773 A JP 2004297773A JP 2005051269 A JP2005051269 A JP 2005051269A
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Japan
Prior art keywords
processing
model formula
processing result
sensor data
semiconductor
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Pending
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JP2004297773A
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English (en)
Japanese (ja)
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JP2005051269A5 (enrdf_load_stackoverflow
Inventor
Junichi Tanaka
潤一 田中
Hiroyuki Kitsunai
浩之 橘内
Akira Kagoshima
昭 鹿子嶋
Daisuke Shiraishi
大輔 白石
Hideyuki Yamamoto
秀之 山本
Shiyouji Ikuhara
祥二 幾原
Toshio Masuda
俊夫 増田
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Hitachi Ltd
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Hitachi Ltd
Hitachi Industries Co Ltd
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Application filed by Hitachi Ltd, Hitachi Industries Co Ltd filed Critical Hitachi Ltd
Priority to JP2004297773A priority Critical patent/JP2005051269A/ja
Publication of JP2005051269A publication Critical patent/JP2005051269A/ja
Publication of JP2005051269A5 publication Critical patent/JP2005051269A5/ja
Pending legal-status Critical Current

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JP2004297773A 2004-10-12 2004-10-12 半導体処理装置 Pending JP2005051269A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004297773A JP2005051269A (ja) 2004-10-12 2004-10-12 半導体処理装置

Applications Claiming Priority (1)

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JP2004297773A JP2005051269A (ja) 2004-10-12 2004-10-12 半導体処理装置

Related Parent Applications (1)

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JP2001258116A Division JP3732768B2 (ja) 2001-08-28 2001-08-28 半導体処理装置

Related Child Applications (1)

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JP2008153133A Division JP4836994B2 (ja) 2008-06-11 2008-06-11 半導体処理装置

Publications (2)

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JP2005051269A true JP2005051269A (ja) 2005-02-24
JP2005051269A5 JP2005051269A5 (enrdf_load_stackoverflow) 2008-07-24

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007243015A (ja) * 2006-03-10 2007-09-20 Hitachi Kokusai Electric Inc 基板処理装置
JP2007242809A (ja) * 2006-03-07 2007-09-20 Toshiba Corp 半導体製造装置の制御方法、および半導体製造装置の制御システム
JP2009099960A (ja) * 2007-09-25 2009-05-07 Toshiba Corp 品質管理方法、半導体装置の製造方法及び品質管理システム
WO2014065269A1 (ja) * 2012-10-24 2014-05-01 東京エレクトロン株式会社 補正値算出装置、補正値算出方法及びコンピュータプログラム
CN109643671A (zh) * 2016-08-26 2019-04-16 应用材料公司 自我修复式半导体晶片处理
KR20190087940A (ko) * 2018-01-17 2019-07-25 가부시키가이샤 히다치 하이테크놀로지즈 플라스마 처리 장치
WO2024150704A1 (ja) * 2023-01-12 2024-07-18 東京エレクトロン株式会社 コンピュータプログラム、分析方法及び分析装置
JPWO2024176347A1 (enrdf_load_stackoverflow) * 2023-02-21 2024-08-29

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10125660A (ja) * 1996-08-29 1998-05-15 Fujitsu Ltd プラズマ処理装置、プロセスモニタ方法及び半導体装置の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10125660A (ja) * 1996-08-29 1998-05-15 Fujitsu Ltd プラズマ処理装置、プロセスモニタ方法及び半導体装置の製造方法

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007242809A (ja) * 2006-03-07 2007-09-20 Toshiba Corp 半導体製造装置の制御方法、および半導体製造装置の制御システム
JP2007243015A (ja) * 2006-03-10 2007-09-20 Hitachi Kokusai Electric Inc 基板処理装置
JP2009099960A (ja) * 2007-09-25 2009-05-07 Toshiba Corp 品質管理方法、半導体装置の製造方法及び品質管理システム
WO2014065269A1 (ja) * 2012-10-24 2014-05-01 東京エレクトロン株式会社 補正値算出装置、補正値算出方法及びコンピュータプログラム
JP5877908B2 (ja) * 2012-10-24 2016-03-08 東京エレクトロン株式会社 補正値算出装置、補正値算出方法及びコンピュータプログラム
CN109643671B (zh) * 2016-08-26 2023-06-06 应用材料公司 自我修复式半导体晶片处理
CN109643671A (zh) * 2016-08-26 2019-04-16 应用材料公司 自我修复式半导体晶片处理
KR20190087940A (ko) * 2018-01-17 2019-07-25 가부시키가이샤 히다치 하이테크놀로지즈 플라스마 처리 장치
KR102100210B1 (ko) * 2018-01-17 2020-04-14 주식회사 히타치하이테크 플라스마 처리 장치
US11289313B2 (en) 2018-01-17 2022-03-29 Hitachi High-Tech Corporation Plasma processing apparatus
WO2024150704A1 (ja) * 2023-01-12 2024-07-18 東京エレクトロン株式会社 コンピュータプログラム、分析方法及び分析装置
JPWO2024176347A1 (enrdf_load_stackoverflow) * 2023-02-21 2024-08-29
WO2024176347A1 (ja) * 2023-02-21 2024-08-29 株式会社日立ハイテク 異常検出装置及び異常検出方法
JP7625133B2 (ja) 2023-02-21 2025-01-31 株式会社日立ハイテク 異常検出装置及び異常検出方法

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