JP2005051050A - Voice coil and manufacturing method thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a voice coil that makes magnetic field strength uniform and can be manufactured easily. <P>SOLUTION: In the voice coil; at least two of annular conductors 10-13 are concentrically formed at even intervals on an insulating substrate, slits 21-24 for cutting the annular conductors are provided in respective annular conductors 10-13, and connection conductors 14-18 for connecting adjacent annular conductors 10-13 are formed for composing spirally in the same direction. The spiral annular conductors 10-13 are concentrically formed at even intervals, thus making the magnetic field strength uniform. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a voice coil used for various electronic devices and a manufacturing method thereof.

  Conventional voice coils include those shown in FIGS. 8A and 8B.

  FIG. 8A is a perspective view showing the configuration of a conventional voice coil, and FIG. 8B is a cross-sectional view showing the configuration of the conventional voice coil. As shown in FIG. 8A, 1 is an insulating substrate, 2 is a coil pattern formed on both surfaces of the insulating substrate 1, and 3 is a coil pattern formed on both surfaces of the insulating substrate 1. Through holes 4 and 5 are external connection terminals provided on the side surface of the insulating substrate 1.

  As shown in FIG. 8B, in the cross section of the coil pattern 2 and the through hole 3, 6 is an original coil pattern or through hole land formed by a printed wiring technique, and 7 is the original coil pattern or through hole land 6. The original pattern is reinforced by the plating layer formed by electroplating on this and the plating layer 7 so that the thickness of the conductor is increased as a whole pattern.

For example, Patent Document 1 is known as prior art document information related to the invention of this application.
JP-A-7-142254

  However, in the above conventional configuration, only a method is disclosed, and there is no disclosure of specific dimensions and conditions. Generally, in the case of photoetching, the coil is caused by variations in etching solution, pressure, etching time, and the like. Since the dimension of the pattern varies, the resistance value of the entire voice coil also varies. In the production of these voice coils, the coil pattern is spiral, and when used as a voice coil, the magnetic field strength of the magnet is uniform in an annular shape along the circumference and relatively changes in the central direction. In many cases, in a spiral shape, the magnetic field strength is non-uniform depending on the location, and the characteristics differ depending on the positional deviation between the voice coils.

  It is an object of the present invention to provide a voice coil that can have a uniform magnetic field strength and can be easily manufactured.

  In order to achieve this object, the present invention has the following configuration.

  According to a first aspect of the present invention, at least two annular conductors are formed on an insulating substrate so as to be equidistant and concentric, and a slit for cutting the annular conductor is provided in each annular conductor. , A voice coil formed by connecting conductors connecting adjacent annular conductors to form spirals in the same direction, and magnetic field strength to form spiral annular conductors at equal intervals and concentricity Can be made uniform.

  The invention according to claim 2 is the voice coil according to claim 1, wherein the connecting conductors connecting adjacent annular conductors are formed so as to be evenly distributed in the annular direction. Are uniformly spaced and concentric, and the conductors connecting the annular conductors are evenly dispersed throughout, so that the magnetic field strength can be made more uniform.

  The invention described in claim 3 is the voice coil according to claim 1, wherein a conductor pattern for resistance value confirmation is provided on an insulating substrate, and the spiral annular conductors are equidistantly spaced and concentric. Since the magnetic field strength can be made uniform and the resistance value can be accurately estimated by the conductor pattern, a voice coil having a highly accurate resistance value can be realized.

  According to a fourth aspect of the present invention, at least two equally spaced and concentric annular conductors and at least two connecting conductors connecting the annular conductors are simultaneously formed on an insulating substrate; A method of manufacturing a voice coil comprising a step of forming a crossing slit in an annular conductor and a connecting conductor to form a spiral in the same direction so that the spiral annular conductors are equally spaced and concentric It can be easily manufactured by forming.

  According to the fifth aspect of the present invention, a conductor pattern for confirming the resistance value of the annular conductor is formed on the insulating substrate, and the annular conductor and the connecting conductor are formed based on the measurement result of the resistance value of the conductor pattern. A method for manufacturing a voice coil according to claim 4, wherein the method comprises a step of forming a transverse slit in the same direction and forming a spiral shape in the same direction. Can be adjusted.

  According to a sixth aspect of the present invention, a conductor layer is formed on an insulating substrate, and the conductor layer is etched to form an annular conductor, a connecting conductor, and a conductor pattern. This is a voice coil manufacturing method, and the resistance value can be accurately estimated by the conductor pattern, so that the resistance value can be adjusted with high accuracy.

  The invention according to claim 7 forms a conductor layer on an insulating substrate, and forms an insulating layer on the conductor layer in a region excluding the annular conductor, the connecting conductor, and the conductor pattern, 5. An annular conductor made of metal, a connecting conductor, and a conductor pattern are formed by plating in a region excluding the insulating layer, and the insulating layer and a conductor layer under the insulating layer are removed to form. This is a method for manufacturing a voice coil, and the resistance value can be accurately estimated from the conductor pattern, so that the resistance value can be adjusted with high accuracy.

  In the invention according to claim 8, the annular conductor and the connecting conductor or conductor pattern are formed on the insulating substrate by plating using a mask excluding the area of the annular conductor, the connecting conductor and the conductor pattern. The method for manufacturing a voice coil according to claim 4, wherein the resistance value can be accurately estimated from the conductor pattern, so that the resistance value can be adjusted with high accuracy.

  Invention of Claim 9 is a manufacturing method of the voice coil of Claim 4 which provided the slit in the width direction of an annular conductor and a connection conductor, and controlled the resistance value of the annular conductor, The resistance value can be accurately estimated by the conductor pattern, and the resistance value can be adjusted with high accuracy by the slit.

  As described above, in the present invention, at least two annular conductors are formed on an insulating substrate so as to be equidistant and concentric, and each annular conductor is provided with a slit for cutting the annular conductor, and adjacent annular conductors are provided. This is a voice coil that is formed in a spiral shape in the same direction by forming a connection conductor that connects the conductors. Since the spiral annular conductors are formed at equal intervals and concentric, the magnetic field strength can be made uniform. .

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
FIGS. 1A and 1B are top views showing the configuration of the voice coil according to Embodiment 1 of the present invention.

  As shown in FIGS. 1A and 1B, 10 to 13 are annular conductors formed on the insulating substrate 28 at equal intervals and concentric, and 14 to 17 are adjacent annular conductors 10 to 13. Connection conductors 19 and 20 are electrode terminals for taking out to the outside, and 21 to 24 are slits for cutting the annular conductors 10 to 13 in the width direction.

  A plurality of annular conductors 10 to 13 formed in a rectangular shape on the insulating substrate 28 and arranged concentrically and at equal intervals, and a connection for connecting the electrode terminal 19 and the annular conductor 10 for taking out to the outside Conductor 14, connecting conductor 15 connecting adjacent annular conductors 10, 11, connecting conductor 16 connecting adjacent annular conductors 11, 12, connecting conductor connecting adjacent annular conductors 12, 13 17. A connecting conductor 18 is provided for connecting the electrode terminal 20 for taking out to the outside and the annular conductor 13. Note that one surface of an insulating substrate (not shown) may be electrically connected to the opposite surface by a through-hole penetrating through filling with a copper foil or conductive paste by plating.

  Next, as shown in FIG. 1B, for example, when a clockwise spiral voice coil is configured, a slit 21 for cutting the annular conductor 10 between the connecting conductors 14 and 15 in the width direction, the connecting conductor A slit 22 for cutting the annular conductor 11 between 15 and 16 in the width direction, a slit 23 for cutting the annular conductor 12 between the connection conductors 16 and 17 in the width direction, and between the connection conductors 17 and 18. A voice coil is formed by providing a slit 24 for cutting the annular conductor 13 in the width direction. Moreover, since they are concentric and have the same rotational direction, the magnetic field generated by energization is the same in each of the annular conductors 10 to 13 and functions as a coil.

  By forming the concentric and equally spaced annular conductors 10 to 13 with the above configuration, the magnetic field strength can be made uniform.

  In the first embodiment of the present invention, the circular conductors 10 to 13 are rectangular. However, the same effect can be obtained if an elliptical shape or a deformed shape thereof is circular as well as circular.

(Embodiment 2)
2A and 2B are top views showing the configuration of the voice coil according to the second embodiment of the present invention.

  As shown in FIG. 2 (a), multiple annular conductors 10 to 13 are formed in a rectangular shape on the insulating substrate 28 and arranged concentrically and at equal intervals, and an electrode terminal 19 for taking out to the outside. , 20 and connecting conductors 14 to 18 that connect between the multiple annular conductors 10 to 13 and are distributed on the sides of the rectangular annular conductors 10 to 13, and the electrode terminals 19 connect the connecting conductors 14. The annular conductor 10 is connected to the annular conductor 11 via the connecting conductor 15, and the annular conductor 11 is connected to the annular conductor 12 via the connecting conductor 16. 12 is connected to an annular conductor 13 via a connecting conductor 17, and this annular conductor 13 is connected via a connecting conductor 18 to an electrode terminal 20 for taking out to the outside.

  Then, as shown in FIG. 2B, the annular conductor 10 is cut into the annular conductor 10 in the width direction so as to form a spiral voice coil in the same direction. Slits 22a and 22b for cutting the annular conductor 11 in the width direction, slits 23a and 23b for cutting the annular conductor 12 in the width direction in the annular conductor 12, and the annular conductor 13 in the width direction. Slits 24a and 24b for cutting are provided.

  With the above configuration, the concentric and equally spaced annular conductors 10 to 13 are formed, and the connecting conductors 14 to 18 are uniformly dispersed in the annular direction, so that the magnetic field strength can be made more uniform.

(Embodiment 3)
The third embodiment of the present invention will be described below with reference to FIGS. 3 (a) and 3 (b).

  The third embodiment will be described with respect to differences from the first embodiment.

  3 (a) and 3 (b) are top views showing the configuration of the voice coil according to the third embodiment of the present invention.

  As shown in FIG. 3A, the same annular conductors 10 to 13 as in FIG. 1A and electrode terminals 19 and 20 for taking out to the outside are provided. A resistance pattern confirmation conductor pattern 25 and electrode terminals 26 and 27 for external connection are provided at both ends of the conductor pattern 25.

  Then, the resistance value of the conductor pattern 25 for confirming the resistance value of the annular conductors 10 to 13 is measured using the electrode terminals 26 and 27, and the resistance value of the formed annular conductors 10 to 13 is predicted and calculated. The place which should be electrically disconnected is formed, and as shown in FIG. 3 (b), the connecting conductors 14 to 18 for connecting the annular conductors 10 to 13 are formed, and the same rotating direction is provided. The voice coil is formed. Further, the Q value can be changed by forming an annular conductor (not shown) that is not cut and providing a ring-shaped current loop.

  With the above configuration, the resistance value of the annular conductors 10 to 13 can be predicted with high accuracy by the conductor pattern 25 for resistance value confirmation, so that variations in the entire conductor resistance value as a voice coil can be reduced. Furthermore, the absolute accuracy with respect to the target value of the conductor resistance value can be improved.

(Embodiment 4)
4 (a) and 4 (b) are top views showing the configuration of the voice coil according to the fourth embodiment of the present invention. Hereinafter, differences from the second embodiment will be described.

  As shown in FIG. 4A, concentric annular conductors 11 to 13 formed in a rectangular shape, electrode terminals 19 and 20 for connection to the outside, and annular conductors 11 and 13 are connected. At least two connection conductors 16a, 16b, 17a, 17b, and 17c for connecting between the at least two connection conductors 15a, 15b, 18a, and 18b to be connected and the adjacent annular conductors 11 to 13, and for checking the resistance value The conductor pattern 25 and electrode terminals 26 and 27 for connecting to the outside provided at both ends of the conductor pattern 25 are configured.

  And as shown in FIG.4 (b), resistance value is measured with the conductor pattern 25 and the electrode terminals 26 and 27 for confirming the resistance value of the annular conductors 11-13, and the formed annular conductors 11-13 By calculating the resistance value, slits 22 to 24 are provided at the positions to be electrically cut, and unnecessary connection conductors are cut at the same time so that one voice coil having the same rotation direction is obtained. It is formed.

  With the above configuration, the resistance value of the annular conductors 11 to 13 can be predicted with high accuracy by the conductor pattern 25 for resistance value confirmation, so that the variation of the entire conductor resistance value as the voice coil can be reduced, and the resistance as the voice coil can be reduced. The absolute accuracy of the value with respect to the target value can be improved.

(Embodiment 5)
5 (a) to 5 (c) are cross-sectional views showing the manufacturing process of the voice coil in the fifth embodiment of the present invention.

  Hereinafter, the manufacturing method of the voice coil in Embodiment 5 of this invention is demonstrated.

  As shown in FIG. 5A, 28 is an insulating substrate made of resin film such as imide-based polyimide or ethylene-based PET (polyethylene terephthalate), glass epoxy, etc. 29 is a conductor layer formed by adhesion or plating. , 30 is a dry film resist pattern.

  For example, a conductor layer 29 having a thickness of about 0.1 to 50 μm is formed on the surface of an insulating substrate 28 made of a polyimide film, and a predetermined annular conductor pattern is formed by a dry film resist 30 serving as an etching mask. The predetermined annular conductor pattern of the dry film resist 30 can be formed by a general method in which a dry film resist is laminated while being heated, exposed through a mask and developed. Here, the pattern of the annular conductor of the dry film resist 30 is a conductive connection that connects the adjacent annular conductors with a plurality of rectangular concentric and equally spaced rectangular conductors described in the first to third embodiments. And a conductor pattern for confirming the resistance value of the annular conductor.

  Then, as shown in FIG. 5B, a part of the conductor layer 29 exposed by the etching solution is removed. Here, in etching, an etching solution having a small lateral etching, that is, a side etching with respect to the etching in the thickness direction is preferable because a conductor width close to the annular conductor pattern of the dry film resist 30 is obtained. For example, an ammonia-based etching solution having a small specific gravity and a low viscosity is preferable.

  Note that the conductor width varies due to variations in the composition, temperature, time, and the like of the etching solution, and the target resistance value as a voice coil may not be achieved.

  Next, as shown in FIG. 5C, the dry film resist 30 is removed with a sodium hydroxide solution. Then, the resistance value of the conductor pattern is measured for confirmation of the resistance value of the annular conductor. Then, calculate the resistance value of the annular conductor pattern designed from this resistance value, and place the necessary place between the annular conductor and the connecting conductor connecting the adjacent annular conductors so as to obtain the desired resistance value. A slit is provided and cut by melting or sublimating the conductor layer 29 using a mechanical method using a cutter or a method using thermal energy such as laser or electron beam such as YAG or carbon dioxide. In this case, a laser or electron beam is preferable because fine processing can be easily performed.

  A voice coil having a predetermined resistance value can be obtained with high accuracy by the above manufacturing method.

(Embodiment 6)
6 (a) to 6 (d) are cross-sectional views showing the manufacturing process of the voice coil in the sixth embodiment of the present invention.

  Hereinafter, the manufacturing method of the voice coil of this invention is demonstrated.

  As shown in FIG. 6A, 28 is an insulating substrate made of a resin film such as imide-based polyimide or ethylene-based PET (polyethylene terephthalate) or glass epoxy, and 29 is a conductor layer formed by adhesion or plating. , 30 is a dry film resist pattern, and 31 is a plating layer.

  For example, a thin conductor layer 29 having a thickness of 5 μm or less is formed on the surface of an insulating substrate 28 made of a polyimide film by adhesion or plating, and a dry film resist 30 serving as a mask for the plating layer 31 is formed on the conductor layer 29. Form. The dry film resist 30 is desirably 1.2 times or more the thickness of the plating layer 31. This is for facilitating peeling and removal after the plating layer 31 is formed. Here, the pattern of the dry film resist 30 is a concentric and equally spaced annular conductor formed in a rectangular shape, a connecting conductor connecting adjacent annular conductors, and a resistance formed for measuring the resistance value of the annular conductor. It is an inverted pattern excluding the conductor pattern for value confirmation.

  Then, as shown in FIG. 6 (b), the thin conductor layer 29 is supplied with power, and the annular conductor of the plating layer 31, the connection conductor connecting the adjacent annular conductors by electroplating, and the annular conductor And a conductor pattern for confirming the resistance value. Here, when the thickness of the plating layer 31 is thick, the plating layer 31 grows in the lateral direction and presses the dry film resist 30, so that the dry film resist 30 is difficult to peel off. In the case of electroplating, a thin conductor layer 29 is necessary for feeding, but the thickness is relatively easy to control and the growth rate is fast. However, the thickness is partially increased depending on the width and shape of the annular conductor pattern. It is quite difficult to make them uniform. Therefore, a predetermined resistance value cannot be obtained as a voice coil.

  Next, as shown in FIG. 6C, the dry film resist 30 is removed with a sodium hydroxide solution. If the thickness of the dry film resist 30 is 1.2 times or more than that of the plating layer 31, the reaction proceeds from the side surfaces on both sides at the surface portion of the dry film resist 30, and the peeling proceeds easily.

  In addition, the etching rate is moderately slow compared with ammonia-based, iron chloride-based, and copper chloride-based etching solutions, so that the thin conductive layer 29 having a thickness of 5 μm or less can be etched at an appropriate etching rate and even with a fine pattern. Etching is performed with an etching solution of a mixed solution of sulfuric acid and hydrogen oxide having a low viscosity and specific gravity, and the thin conductor layer 29 exposed by peeling off the dry film resist 30 is etched as shown in FIG. And the resistance value of the conductor pattern for resistance value confirmation of a cyclic | annular conductor can be measured with high precision. Then, the resistance value of the annular conductor is calculated from the measured resistance value, and the necessary place of the annular conductor is determined by a mechanical method using a cutter, a laser such as YAG or carbon dioxide, or an electron beam so as to obtain a predetermined resistance value. The conductor layer 29 is melted or sublimated by a method using thermal energy such as to provide an electrical slit for cutting. In this case, a laser or electron beam is preferable because fine processing can be easily performed.

  While monitoring the resistance value between the electrode terminals 19 and 20 of the annular conductor, a desired resistance value can be obtained with high accuracy by cutting a part of the annular conductor or providing a slit in a part of the annular conductor. A voice coil can be obtained.

(Embodiment 7)
7 (a) to 7 (d) are cross-sectional views showing the manufacturing steps of the voice coil in the seventh embodiment of the present invention.

  Hereinafter, the manufacturing method of the voice coil of this invention is demonstrated.

  As shown in FIG. 7A, 28 is an insulating substrate made of resin film such as imide-based polyimide or ethylene-based PET (polyethylene terephthalate), glass epoxy, etc. 29 is a conductor layer formed by adhesion or plating , 30 is a dry film resist pattern, 32 is an electroless plating nucleus for growth, and 33 is an electroless plating layer.

  As shown in FIG. 7A, for example, palladium that becomes the core 32 of the electroless plating is adhered to the surface of the insulating substrate 28 made of, for example, a polyimide film in a later step. This is a palladium treatment generally known for electroless plating, and the palladium does not need to have an amount enough to form a layer on the surface.

  Next, as shown in FIG. 7B, a pattern of an annular conductor or the like by the dry film resist 30 is formed. Here, the pattern of the dry film resist 30 is a multiple annular conductor in which a plurality of annular conductors formed in the rectangular annular shape described in the first to third embodiments are concentrically arranged, and the resistance of the annular conductor. In order to measure the value, the conductor pattern for measuring the resistance value is provided so as to be reversed with these patterns.

  Then, as shown in FIG. 7 (c), a connection conductor for connecting multiple annular conductors and adjacent annular conductors by electroless plating, and a resistance value measurement for measuring the resistance value of the annular conductor. The electroless copper plating layer 33 with the conductor pattern is formed. In this electroless plating, it grows only on the area where palladium is attached, that is, on the core 32 of the electroless plating, and therefore does not adhere at all to the area masked with the dry film resist 30. In electroless plating, compared to electroplating, the growth rate is uniform depending on the width of the plating area, so the variation in thickness due to location is small, and plating growth is reversed with the pattern of the dry film resist 30 and dimensional accuracy is good. Therefore, fine pattern formation is possible up to the resolution limit of the mask, that is, the resolution limit of the dry film resist 30. However, the plating thickness is controlled by temperature and time, and in particular, the temperature greatly affects the growth rate, so that the overall thickness varies, resulting in variations between different insulating substrates.

  Next, as shown in FIG. 7 (d), the dry film resist 30 is removed with a sodium hydroxide solution and immersed in dilute hydrochloric acid or the like that selectively dissolves palladium adhering to the exposed surface of the insulating substrate 28. To remove. Then, the resistance value is measured by a four-probe or the like that can measure the resistance value of the resistance value measuring conductor pattern formed for measuring the resistance value of the annular conductor described in the third embodiment with high accuracy. Then, as described in the third embodiment, the annular conductor formed by the electroless plating layer 33 so as to calculate the resistance value of the annular conductor pattern designed from this resistance value and form the desired resistance value; Melting or sublimating copper foil at the required place with the connecting conductors connecting the adjacent annular conductors by a mechanical method using a cutter or a thermal energy method such as laser or electron beam such as YAG or carbon dioxide Disconnect by. In this case, a laser or electron beam is preferable because fine processing can be easily performed.

  In this case, while monitoring the resistance value between the one electrode 19 and the other electrode 20 of the annular conductor, the annular conductor and the connecting conductor connecting them are cut or a part of the annular conductor is cut. A planar coil having a desired resistance value can be obtained with higher accuracy by using a laser or electron beam to narrow the width or reduce the thickness.

  In the voice coil and the manufacturing method thereof according to the present invention, at least two annular conductors are formed on an insulating substrate so as to be equidistant and concentric, and a slit for cutting the annular conductor is provided in each annular conductor. , A voice coil formed by connecting conductors connecting adjacent annular conductors to form spirals in the same direction, and magnetic field strength to form spiral annular conductors at equal intervals and concentricity Can be made uniform.

(A), (b) Top view showing the voice coil of the present invention (A), (b) Top view which shows the voice coil in Embodiment 2 of this invention. (A), (b) Top view which shows the voice coil in Embodiment 3 of this invention. (A), (b) The top view which shows the voice coil in Embodiment 4 of this invention. Sectional drawing for demonstrating the manufacturing method of the voice coil of Embodiment 5 of this invention. Sectional drawing for demonstrating the manufacturing method of the voice coil of Embodiment 6 of this invention. Sectional drawing for demonstrating the manufacturing method of the voice coil of Embodiment 7 of this invention. (A) The perspective view which shows the structure of the conventional voice coil, (b) Sectional drawing which shows the structure of the conventional voice coil

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Ring conductor 11 Ring conductor 12 Ring conductor 13 Ring conductor 14 Connection conductor 15 Connection conductor 16 Connection conductor 16a Connection conductor 16b Connection conductor 17 Connection conductor 17a Connection conductor 17b Connection conductor 17c Connection Conductor 18 Connection conductor 18a Connection conductor 18b Connection conductor 19 Electrode terminal 20 Electrode terminal 21 Slit 21a Slit 21b Slit 22 Slit 22a Slit 22b Slit 23 Slit 23a Slit 23b Slit 24 Slit 24a Slit 24b Slit 25 Electrode pattern 26 Electrode Terminal 27 Electrode terminal 28 Insulating substrate 29 Conductor layer 30 Dry film resist 31 Electroplating layer 32 Core of electroless plating 33 Electroless plating layer

Claims (9)

A conductive connection for connecting adjacent annular conductors by forming at least two annular conductors on an insulating substrate so as to be concentric and equidistant, and providing each annular conductor with a slit for cutting the annular conductor. A voice coil that forms a body and forms a spiral in the same direction. The voice coil according to claim 1, wherein the connection conductors connecting adjacent annular conductors are formed so as to be evenly distributed in the annular direction. The voice coil according to claim 1, wherein a conductor pattern for resistance value confirmation is provided on an insulating substrate. A step of simultaneously forming at least two annular conductors that are concentric and concentric on an insulating substrate and at least two connecting conductors connecting the annular conductors; and the annular conductor and the connecting conductor. A method of manufacturing a voice coil comprising a step of forming a crossing slit to form a spiral in the same direction. A conductor pattern for confirming the resistance value of the annular conductor is formed on the insulating substrate, and a slit is provided across the annular conductor and the connecting conductor based on the measurement result of the resistance value of the conductor pattern. The method for manufacturing a voice coil according to claim 4, comprising a step of forming a spiral shape in the direction. 5. The method of manufacturing a voice coil according to claim 4, wherein a conductor layer is formed on the insulating substrate, and the conductor layer is etched to form a ring conductor, a connection conductor, and a conductor pattern. A conductor layer is formed on the insulating substrate, an insulating layer is formed on the conductor layer in a region excluding the annular conductor, the connecting conductor, and the conductor pattern, and plating is performed on the region excluding the insulating layer by plating. 5. The method of manufacturing a voice coil according to claim 4, wherein a ring conductor made of metal, a connecting conductor, and a conductor pattern are formed, and the insulating layer and the conductor layer under the insulating layer are removed. 5. The voice coil according to claim 4, wherein the annular conductor and the connection conductor or the conductor pattern are formed on the insulating substrate by plating using a mask excluding the areas of the annular conductor, the connection conductor, and the conductor pattern. Manufacturing method. The voice coil manufacturing method according to claim 4, wherein a slit is provided in a width direction of the annular conductor and the connecting conductor to control a resistance value of the annular conductor.

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