JP2005047194A5 - - Google Patents

Description

According to the first aspect of the present invention, in the diamond scriber, in the vicinity of the tip of the triangular pyramid having the toe and / or the heel of the diamond grain as a vertex, along the ridge line connecting the toe and the heel , the left and right intervals are left. The diamond scriber is characterized in that a concave surface cut by opening and a convex ridge in the center are formed.

As shown in FIG. 2 (a) and 2 (b), both side portions of the triangular pyramid has an apex toe 1f of the diamond grains 1 1 g, a 1h along the edge 1i connecting toe 1f and heel, the ridge line 1i A sharp convex ridge can be formed in the center of the vicinity of the tip of the triangular pyramid with the toe 1f as the apex by scraping away the left and right sides and forming a concave surface . Specific ridge shapes are respectively formed on the toes 1b at the four corners of the horizontal plane 1a, as shown in the partially enlarged perspective view of the inside A of the round frame in FIG. For sapphire wafer scribing, it is preferable to scrape both side portions 1g and 1h of the triangular pyramid so that the ridge width L1 is about 8 μm and the ridge height H is about 5 μm.

The sapphire wafer was repeatedly scribed using the diamond scriber shown in FIGS. 1 and 2, and when the good scribe line could not be drawn, the size of the worn part of the blade edge was measured. As shown in FIGS. 3 (a) and 3 (b), the dimensions of the worn portion 1j of the cutting edge that has reached the use limit of the hatched portion are shown below.
Width L1: 8.0μm
Length L2: 18μm
Length L3: 19.16μm
Height h : 2.97 μm

Since the cutting edge of the diamond scriber shown in the examples is processed into a ridge shape, a thin scribe line with a width of 8.0 μm or less can be drawn until the height h is worn by 2.97 μm. In other words, a thin scribe line having a width of 8.0 μm or less can be repeatedly drawn, and the life of the diamond scriber can be lengthened.

The sapphire wafer was repeatedly scribed using a normal diamond scriber that was not ridged, and when the good scribe line could not be drawn, the dimension of the worn part of the blade edge was measured. As shown in FIGS. 4 (a) and 4 (b), the dimensions of the worn portion 11j of the cutting edge that has reached the use limit of the hatched portion are shown below.
L1: 8.5μm
Length L2: 9μm
Length L3: 9.58μm
Height h : 1.49 μm

In the diamond scriber shown in the comparative example, the cutting edge is not processed into a ridge shape and remains a triangular pyramid. Therefore, when the wear portion 11j is scribed until the height h reaches 1.49 μm, the cutting edge becomes a triangular pyramid due to wear. It spreads to both sides of the, and it becomes impossible to draw a thin scribe line with a width of 8.5 μm or less.

As described above, when comparing the height h of the worn portion of the comparative example to the height h of the wear part of the embodiment, towards the diamond scriber shown in the Examples is a longer life to reach the usage limit as diamond scriber It can be seen that a good scribe line can be maintained for a long time.

It is an enlarged view when the diamond grain provided in the diamond scriber is seen from three directions . (a) is the enlarged view of the A section of FIG. 1, and is a conceptual diagram which shows the shape of the blade edge processed into the ridge shape. FIG. 2B is a side view of FIG. (c) is a partially enlarged perspective view showing a ridge shape formed at four corners of a horizontal plane. (a) is the enlarged view of the A section of FIG. 1, and is the conceptual diagram which shows the wear amount of the blade edge processed into the ridge shape by hatching . FIG. 3B is a side view of FIG. (a) is the enlarged view of the A section of FIG. 1, and is the conceptual diagram which shows the abrasion amount of the conventional blade edge | tip by hatching . FIG. 4B is a side view of FIG.

1 Diamond grain 1a Horizontal surface 1b, 1f, 11f Tow 1c Delta surface 1d Heel 1g, 1h Triangular pyramid both sides 1e, 1i, 11j Edge line 1j, 11j Wear part
L Ridge width
H Ridge height

Claims (3)

In diamond scriber
Diamond grains toe and / or heel triangular pyramid near the tip of the vertices, along the edge connecting the toe and the heel, and concave sides were cut at intervals of left and right, leaving the ridge, a central A diamond scriber characterized in that a convex ridge is formed. 2. The diamond scriber according to claim 1, wherein the ridge has a width in the range of 5 μm to 15 μm. The diamond scriber according to claim 1 or 2, wherein the height of the ridge is 2 µm or more.

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