JP2005031872A - Conveyance system and semiconductor manufacturing system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a conveyance technique for automatically conveying by all manufacturing apparatuses in a conveyance area where a person can not enter, eliminating manual conveyances, shortening conveyance time and reducing the personnel for conveyance. <P>SOLUTION: A conveyance system comprises a plurality of manufacturing apparatuses 1(1a, 1b); a conveyance vehicle 3 for conveying an object to be conveyed between the apparatuses 1; a conveyance controller 4 for controlling the drive of the vehicle 3; and an apparatus terminal 5 or a controller terminal 6, etc. for instructing to the controller 4 to drive the vehicle 3. Since the apparatus 1b being an off-line apparatus is not connected by on-line, the controller 4 recognizes operating conditions of the apparatus 1b by receiving the instruction from the terminal 5 or the terminal 6 to drive the vehicle 3 and automatically convey the object toward the apparatus 1b. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a transfer technique, and more particularly to a transfer system that realizes automatic transfer for a manufacturing apparatus that is not connected online to a host system, and a technique that is effective when applied to a semiconductor manufacturing system using the transfer system.
[0002]
[Prior art]
According to a study by the present inventor, the following techniques can be considered for the conventional transport system.
[0003]
For example, conventionally, an automatic transfer system in a manufacturing process requires that a manufacturing apparatus corresponding to a transfer destination or a transfer source is connected to a host system online. This host system grasps the operating state of the manufacturing apparatus and the state of the port of the manufacturing apparatus, and issues a transport instruction to the transport system.
[0004]
In this system, if there is a manufacturing device (offline device) that is not online-connected to the host system in the same area, automatic transfer cannot be performed for that device. It is necessary to carry out.
[0005]
In addition, about such a conveyance system, the technique etc. which are described in patent documents 1-3 are mentioned, for example. Japanese Patent Application Laid-Open No. 2004-228561 discloses a technique that enables unintended devices to be collected and arranged and a conveyance instruction can be made by manually inputting a device code. Patent Document 2 discloses a technique for controlling a transport vehicle based on an offline control instruction in an automatic warehouse. Furthermore, Patent Document 3 discloses a technique for switching between online processing and offline processing.
[0006]
[Patent Document 1]
Japanese Patent Laid-Open No. 9-6409
[Patent Document 2]
Japanese Patent Laid-Open No. 5-69905
[Patent Document 3]
Japanese Patent Laid-Open No. 9-181143
[Problems to be solved by the invention]
By the way, as a result of examination of the technology of the transport system as described above by the present inventors, the following has been clarified.
[0010]
For example, the above-described operation can be performed in an area where a conveyance vehicle and a person can be mixed (such as a conveyance area by a low-speed conveyance vehicle). As a result, people cannot be mixed and transportation to the offline device becomes impossible. Alternatively, if an attempt is made to manually transport an offline device, the automatic transport system must be stopped.
[0011]
As described above, the realization of a mixture of automatic conveyance and manual conveyance has an adverse effect on operation, and will become a major obstacle in the future as the reduction of the conveyance time and the increase in the conveyance speed are required. . For this reason, it is desired to realize an automatic transfer operation without stopping the operation in a manufacturing area where online devices and offline devices are mixed.
[0012]
In the technique disclosed in Patent Document 1, (1) offline devices must be gathered and arranged, so that a collective area for installing offline devices is required, and layout restrictions occur. (2) The product cannot be directly transferred to the off-line device, and it is necessary to transfer the product to the off-line device once via a delivery device such as a stocker. For this reason, an increase in transport time and in-process increase for the off-line apparatus is caused, leading to a decrease in production efficiency such as throughput and TAT.
[0013]
Furthermore, in the technique of the above-mentioned patent document 1, (3) an offline device that is being set up between online devices, or an offline device that is normally online but temporarily switched off-line and requires processing (QC check, experiment, etc.) For this reason, automatic transfer cannot be performed for devices that need to be temporarily switched off-line for processing. In the case of (3), in addition to temporarily transporting manually, in the case of a high-speed transport system that does not allow human access to the transport area, automatic transport to the on-line devices around the device continues. It becomes impossible to do.
[0014]
The technique of Patent Document 2 discloses that unmanned conveyance can be performed even when the automatic guided vehicle and the host system are offline, and the conveyance vehicle (on the source) It does not solve the problem of a mixture of online and offline devices.
[0015]
Further, the technique disclosed in Patent Document 3 discloses an on-line / off-line transport method inside the equipment assuming transport inside the equipment, and does not solve the problem in transport between apparatuses.
[0016]
Accordingly, an object of the present invention is to enable automatic conveyance to all manufacturing apparatuses in a conveyance area where a person cannot enter, eliminate manual conveyance, reduce conveyance time, and reduce conveyance personnel. It is to provide a transfer technology.
[0017]
The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.
[0018]
[Means for Solving the Problems]
Of the inventions disclosed in the present application, the outline of typical ones will be briefly described as follows.
[0019]
The present invention relates to a control means for controlling the conveyance, a conveyance vehicle for conveying the object to be conveyed to a manufacturing apparatus (offline apparatus) not connected online to the control means, and an instruction to the control means for driving the conveyance vehicle. In the transport system having the instruction means, the control means receives the instruction from the instruction means and drives the transport vehicle, and the transport vehicle automatically transports the object to be transported to the offline device. Therefore, automatic conveyance is realized for the offline device, and no online connection is required between the conveyance vehicle and the offline device via the control means, and a conveyance instruction is issued to the conveyance system by the operation of the instruction means by a person. be able to.
[0020]
Furthermore, in the transport system of the present invention, the transport vehicle transports the transported body to a manufacturing apparatus (online apparatus) connected online to the control means under the control of the control means. Thus, the object to be conveyed is automatically conveyed without manual conveyance and without switching or stopping the system. Therefore, in an area where online devices and offline devices are mixed, automatic transfer to the online device and automatic transfer to the offline device can be mixed without stopping the transfer system.
[0021]
In addition, the present invention is applied to a semiconductor manufacturing system using the transfer system, and processes or inspects a transfer system having a control unit, a transfer vehicle, and an instruction unit, and a semiconductor wafer transferred and delivered by the transfer vehicle. And a plurality of manufacturing apparatuses that perform the above.
[0022]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Note that components having the same function are denoted by the same reference symbols throughout the drawings for describing the embodiments, and the repetitive description thereof will be omitted.
[0023]
First, with reference to FIG. 1, an example of the configuration of a transport system according to an embodiment of the present invention will be described. FIG. 1 shows a configuration diagram of a transport system.
[0024]
The transport system according to the present embodiment includes a plurality of manufacturing apparatuses 1, a track 2 that connects these manufacturing apparatuses 1, and a transport vehicle that drives along the track 2 and transports a transported object between the manufacturing apparatuses 1. 3, a transport controller 4 (control means: shown in FIG. 2) for controlling the driving of the transport vehicle 3, and an apparatus terminal 5 or a controller terminal 6 (instruction means for instructing the transport controller 4 to drive the transport vehicle 3. : Shown in FIG. 2).
[0025]
In the plurality of manufacturing apparatuses 1, an on-line apparatus manufacturing apparatus 1a and an off-line apparatus manufacturing apparatus 1b are mixedly arranged. The on-line apparatus manufacturing apparatus 1a is an apparatus connected online to a network of a system to be described later. On the other hand, the offline device manufacturing apparatus 1b is an apparatus that is not connected online. This online connection means that the devices, the controller, and the host system that are electrically connected through the network and that are connected through the network can communicate with each other.
[0026]
Next, an example of the configuration of a manufacturing system including the transport system according to the present embodiment will be described with reference to FIG. FIG. 2 shows a configuration diagram of a manufacturing system corresponding to the transfer system of FIG.
[0027]
The manufacturing system of the present embodiment includes a plurality of manufacturing apparatuses 1 described above, an equipment controller 7 that controls the operation of these manufacturing apparatuses 1, the above-described transport vehicle 3, and a transport that controls driving of the transport vehicle 3. The controller 4 includes a host system 8 that controls the entire system including the equipment controller 7 and the transport controller 4, and these are electrically connected through a network.
[0028]
In this manufacturing system, an apparatus terminal 5 for instructing the operation of each manufacturing apparatus 1 is arranged in the vicinity of the plurality of manufacturing apparatuses 1. Each of these device terminals 5 is electrically connected through a network and also has a function of instructing the transport controller 4 to drive the transport vehicle 3. Further, a controller terminal 6 that is electrically connected through a network is also arranged in the vicinity of the transport controller 4, and an instruction for driving the transport vehicle 3 can be issued from the controller terminal 6.
[0029]
In the manufacturing system including such a transport system, as described above, the manufacturing apparatus 1a among the plurality of manufacturing apparatuses 1 is connected online, so that the operating state of the manufacturing apparatus 1a and the driving state of the transport vehicle 3 are Is recognized by the transfer controller 4 and the transfer controller 4 drives the transfer vehicle 3 in accordance with these states. Therefore, for the on-line manufacturing apparatus 1a, the transport vehicle 3 can automatically transport the transported object to the manufacturing apparatus 1a under the control of the transport controller 4.
[0030]
On the other hand, since the manufacturing apparatus 1b is not connected online, the transport controller 4 cannot directly recognize the operating state of the manufacturing apparatus 1b. Therefore, the transfer controller 4 receives an instruction from the apparatus terminal 5 or the controller terminal 6 and recognizes the operating state of the manufacturing apparatus 1b to drive the transfer vehicle 3. As described above, for the offline-connected manufacturing apparatus 1b, after receiving an instruction from the apparatus terminal 5 or the controller terminal 6, the transport vehicle 3 controls the transport apparatus 4 so that the transported vehicle 3 is transported to the manufacturing apparatus 1b. The method of automatically transporting is adopted.
[0031]
As a result, in a manufacturing system in which an on-line apparatus manufacturing apparatus 1a and an off-line apparatus manufacturing apparatus 1b are mixed, the system switching can be performed without manual transport for the on-line apparatus manufacturing apparatus 1a and the off-line apparatus manufacturing apparatus 1b. It is possible to automatically convey the object to be conveyed without stopping or stopping.
[0032]
The manufacturing system including such a transfer system is not limited to this, but is used, for example, in a semiconductor manufacturing system of a semiconductor manufacturing line.
[0033]
This semiconductor manufacturing system includes a transfer system including the transfer vehicle 3, the transfer controller 4, and the apparatus terminal 5 or the controller terminal 6 described above, and a semiconductor wafer (transferred object) that is transferred and delivered by the transfer vehicle 3. It has a plurality of manufacturing apparatuses 1 (1a, 1b) that perform processing or inspection.
[0034]
In such a semiconductor manufacturing line, although not particularly limited, each manufacturing apparatus 1 is divided into a group of apparatuses called bays and arranged in a clean room in units of bays. For this reason, the semiconductor wafer transfer system can be divided into intra-bay transfer, transfer between bays, or transfer across these.
[0035]
In these transports, for example, a transport vehicle called RGV (Rail Guided Vehicle) that automatically travels on a track, a transport vehicle called AGV (Automatic Guided Vehicle) that travels automatically on a trackless, or an overhead transport OHT ( A transport vehicle called “over-head hoist transport” is used.
[0036]
Each manufacturing apparatus 1 includes various processing apparatuses such as a heat treatment apparatus, an ion implantation apparatus, an etching apparatus, a film forming apparatus, a cleaning apparatus, a photoresist coating apparatus, and an exposure apparatus that perform each process on a semiconductor wafer. There are various inspection devices that perform later inspections. In addition, a stocker that temporarily transports semiconductor wafers in consideration of the processing waiting for the next device, etc. is also manufactured for efficient handling of these processing devices and inspection devices. Arranged as one of the devices 1.
[0037]
For example, FIG. 1 described above is supposed to be transported within a bay, and FIG. 3 described later is a diagram based on transport between bays.
[0038]
Next, with reference to FIG. 3, an example of the configuration of a transport system that assumes inter-bay transport will be described in the present embodiment. FIG. 3 shows a configuration diagram of a transfer system that assumes transfer between bays. However, in FIG. 3, one bay manufacturing apparatus is representatively shown, but in reality, each bay is a group of a plurality of manufacturing apparatuses as shown in FIG.
[0039]
As shown in FIG. 3, also in the transfer between bays, in the same way as the transfer in the bay described above, in the area between the bays, a transfer system having a track 2 and a transfer vehicle 3, etc., various processing devices and various inspection devices, Further, a manufacturing apparatus 1 (1a, 1b) including a stocker is disposed.
[0040]
Next, in the present embodiment, an example of an operation of intra-bay transport, inter-bay transport, or transport across these will be described. In the intra-bay transport, the transport between the bays, or the transport across the bays, the transport operation is the same except that the transport area is different within the bay, between the bays, or both areas.
[0041]
For example, the transport vehicle 3 receives a cassette (hereinafter referred to as a wafer cassette) in which semiconductor wafers stored in the stocker (a lot unit or a plurality of lots) are stored from the stocker and travels on the track 2. The semiconductor wafer is moved to a first processing apparatus that performs a predetermined process on the semiconductor wafer, and the semiconductor wafer is transferred to the first port of the first processing apparatus. In the first processing apparatus, a predetermined process is performed on the semiconductor wafer, and when the process is completed, the wafer cassette is moved to the second port.
[0042]
Further, the transfer vehicle 3 receives the wafer cassette from the second port of the first processing apparatus, travels on the track 2, and moves to the second processing apparatus that performs predetermined processing on the semiconductor wafer. 2 Pass the wafer cassette to the first port of the processing apparatus. In the second processing apparatus, a predetermined process is performed on the semiconductor wafer, and when the processing is completed, the wafer cassette is moved to the second port.
[0043]
At this time, if the processing on the semiconductor wafer is not completed in the second processing apparatus, the wafer cassette received from the second port of the first processing apparatus is temporarily stored in the stocker. When the processing is completed in the second processing apparatus, the semiconductor wafer is received from the stocker as described above, the wafer cassette is transferred to the first port of the second processing apparatus, and the second processing apparatus performs a predetermined process. .
[0044]
Similarly, in the various processing devices such as the third processing device, the fourth processing device,..., The processing device is transferred to the next processing device, from the processing device to the next processing device via the stocker, or described later. The predetermined processing is sequentially performed on the semiconductor wafers via the inspection apparatus, and finally the wafer cassette that has been processed is delivered to a stocker that stores the processed semiconductor wafer cassette.
[0045]
Further, in various inspection apparatuses for semiconductor wafers for which predetermined processing has been completed or semiconductor wafers for which final processing has been completed, in the same manner as the transfer to the various processing apparatuses described above, the transport vehicle 3 and the various inspection apparatuses Wafer cassettes are delivered and various inspections are performed.
[0046]
Next, an example of an automatic conveyance operation for the offline device manufacturing apparatus 1b will be described.
[0047]
For example, in a system using a high-speed RGV, human access to a transport area during operation of the RGV is not allowed to ensure safety. If there is even one offline device in this transport area, conventionally, when transporting the transported object by manual transport, it is necessary to stop the operation of the RGV and allow a person to enter the transport area. Or it is necessary to limit the operation range of RGV to the front of an offline apparatus, and to stop all the automatic conveyance with respect to the subsequent apparatus (an online apparatus is included).
[0048]
Therefore, in the present embodiment, as shown in FIG. 1, when automatic conveyance is performed with respect to the offline device manufacturing apparatus 1b in the central portion of the conveyance area, conveyance is realized by the following procedure, for example.
[0049]
(1) An operator uses the apparatus terminal 5 of the nearest manufacturing apparatus 1 connected to the network or the controller terminal 6 of the transfer controller 4 to the host system 8 or the transfer controller 4, for example, from a stocker to an offline apparatus. An instruction to transfer the wafer cassette to the first port of the manufacturing apparatus 1b is issued.
[0050]
(2) The host system 4 or the transfer controller 4 that has received an instruction from the operator transfers the wafer cassette from the stocker to the first port of the manufacturing apparatus 1b of the offline device to the transfer vehicle 3 (RGV or the like). Issue a transport instruction.
[0051]
(3) Upon receipt of the instruction, the transport vehicle receives the wafer cassette from the online stocker and starts transport toward the first port of the manufacturing apparatus 1b of the offline apparatus.
[0052]
(4) The transport vehicle 3 that has arrived at the first port of the off-line apparatus manufacturing apparatus 1b confirms the delivery of the wafer cassette through the communication means installed at the first port (for example, a semiconductor wafer having a diameter of 300 mm). In the production line, communication conforming to the SEMI-E84 standard is common).
[0053]
(5) The transfer vehicle 3 that has completed the transfer of the wafer cassette and has normally completed communication with the first port reports the transfer completion to the transfer controller 4 connected online. The transfer controller 4 reports the transfer completion to the host system 8.
[0054]
(6) When an error occurs in communication with the first port (communication is not possible, the port is not ready), the transport vehicle 3 can send an error message online to the transport controller 4.
[0055]
In such a semiconductor manufacturing system, since the host system 8 cannot grasp the state of the offline-connected manufacturing apparatus 1b and the state of the port, the operator can use the apparatus terminal 5 of the manufacturing apparatus 1 and the controller terminal 6 of the transfer controller 4. Thus, by confirming the state of the offline-connected manufacturing apparatus 1b and the state of the port, it is possible to issue a transport instruction from the terminals 5 and 6 to the transport vehicle 3. Thereby, the conveyance similar to the manufacturing apparatus 1a of online connection is realizable.
[0056]
Therefore, according to the present embodiment, the following effects can be obtained as a transfer system, a manufacturing system including the transfer system, and a semiconductor manufacturing system using the transfer system.
[0057]
(1) It is not necessary to perform online connection for all the manufacturing apparatuses 1 in the same transfer area. As a result, it is not necessary to perform online connection for all the manufacturing apparatuses 1 in the same transfer area, and the automatic transfer system can be operated even in a state where offline-connected manufacturing apparatuses 1b are mixed. For example, in the initial stage of factory startup, the period for applying automatic conveyance can be greatly shortened.
[0058]
(2) For the purpose of checking the state of the manufacturing apparatus 1 or performing an experiment, it is possible to continue the automatic transfer of the transported object even to the offline-connected manufacturing apparatus 1b that needs to be temporarily switched off and processed. it can. As a result, in the manufacturing area where the online-connected manufacturing apparatuses 1a are concentrated, automatic conveyance of the transported object can be continued even for the offline-connected manufacturing apparatus 1b.
[0059]
(3) It is possible to construct a line in which an on-line manufacturing apparatus 1a and an off-line manufacturing apparatus 1b are mixed. As a result, restrictions on the layout in which the offline-connected manufacturing apparatuses 1b are concentrated can be eliminated, so that it is possible to improve the space efficiency of the clean room, reduce the service cost, and improve the work efficiency.
[0060]
(4) Since the transported object can be automatically transported to the manufacturing apparatus 1b that is temporarily off-line, the transport time including the surrounding manufacturing apparatus 1 can be shortened and the throughput can be improved. As a result, it becomes possible to automatically convey all the manufacturing apparatuses 1 in a conveyance area where no person can enter, and it is possible to eliminate manual conveyance, shorten the conveyance time, and reduce the number of conveyance personnel.
[0061]
(5) Manual transfer of the transfer target by a person is eliminated, and line operation by fully automatic transfer becomes possible. As a result, since there is no need for manual conveyance, it is possible to eliminate restrictions on the safety function and conveyance capacity of the conveyance system based on the mixture of people and conveyance vehicles 3, and the operation of the high-speed conveyance system can be performed. It becomes easy.
[0062]
As mentioned above, the invention made by the present inventor has been specifically described based on the embodiment. However, the invention is not limited to the embodiment, and various modifications can be made without departing from the scope of the invention. Needless to say.
[0063]
For example, in the transport system of the present embodiment, the following modifications or application examples are conceivable.
[0064]
(1) The present invention can also be applied to a line premised on an operation mode in which a conveyance system and people are mixed. For example, in the case of overhead transport OHT, an online connection manufacturing apparatus is generally an automatic transport of OHT, and an offline connection manufacturing apparatus generally takes the form of transport by humans. Therefore, it is possible to apply the automatic conveyance to the above, so that the effect of suppressing the conveyance personnel and shortening the conveyance time can be obtained.
[0065]
(2) The present invention can also be applied to a transport system that transports not only one bay but also a plurality of bays in a wide area.
[0066]
(3) The present invention can be applied not only when the processing apparatus is offline, but also when the inspection apparatus or stocker is offline.
[0067]
(4) The present invention can be applied not only to intrabay transportation and interbay transportation but also to floor transportation.
[0068]
In the above description, the case where the invention made mainly by the present inventor is applied to a transport system used in a semiconductor manufacturing system of a semiconductor manufacturing line which is a technical field to which the present invention belongs has been described, but the present invention is not limited to this. The present invention can also be applied to a conveyance system other than a semiconductor production line, for example, a production line for liquid crystal displays.
[0069]
In particular, in various production lines, it is suitable to be applied to the following transport system.
[0070]
(1) A high-speed automatic transfer system (RGV, AGV, etc.) that does not allow entry of people into the transfer area.
[0071]
(2) In-bay transport system (OHT etc.) covering a wide area. In particular, in a transport system such as an OHT that is operated so that a person can enter, manual transport can be reduced by enabling automatic transport to as many manufacturing apparatuses as possible.
[0072]
(3) Automatic transfer system in production and production lines with high automation rate. Temporarily, it is effective in the line where it is difficult to secure the transport personnel.
[0073]
(4) Automatic transfer system in advanced production lines or development prototype lines where new products and processes are frequently launched. This is effective for lines that require frequent offline operation due to equipment replacement and experiments.
[0074]
(5) Automatic transfer system for production lines that are more automated than semiconductors, such as LCD factories.
[0075]
【The invention's effect】
Of the inventions disclosed in the present application, effects obtained by typical ones will be briefly described as follows.
[0076]
(1) By realizing automatic conveyance with respect to a manufacturing apparatus that is not online-connected to the control means for controlling conveyance, automatic conveyance can be performed for all the manufacturing apparatuses in a conveyance area where a person cannot enter. Therefore, it is possible to eliminate manual conveyance, shorten the conveyance time, and reduce the number of conveyance personnel.
[0077]
(2) By realizing automatic transfer for a manufacturing device that is not connected online to a control means for controlling transfer, it is possible to eliminate restrictions on layout in which offline devices are arranged in a concentrated manner. It is possible to improve, reduce utility costs, and improve work efficiency.
[0078]
(3) By realizing automatic conveyance for a manufacturing apparatus that is not online-connected to the control means for controlling the conveyance, it is not necessary to perform online connection for all the manufacturing apparatuses in the same conveyance area. The operation of the automatic conveyance system can be started even in a state where the manufacturing apparatuses are mixed, and for example, it is possible to greatly reduce the period for applying automatic conveyance at the initial stage of factory startup.
[0079]
(4) By implementing automatic transfer for a manufacturing device that is not online-connected to the control means for controlling the transfer, in the manufacturing area where online-connected manufacturing devices are concentrated, the device status is checked and tested. For example, it is possible to continue the automatic conveyance of an object to be conveyed even for an offline apparatus that needs to be temporarily switched to offline for processing.
[0080]
(5) By realizing automatic conveyance for a manufacturing apparatus that is not online-connected to a control means for controlling conveyance, there is no need for manual conveyance, and therefore a conveyance system that presupposes a mixture of people and conveyance vehicles. Therefore, it is possible to eliminate the restrictions on the safety functions and the restrictions on the conveyance capacity, and it is possible to easily realize the operation of the high-speed conveyance system.
[0081]
(6) According to the above (1) to (5), in the semiconductor manufacturing line and other various manufacturing lines, it becomes possible to shorten the transport time of the manufacturing line and reduce the load on the transport personnel.
[0082]
(7) With the above (1) to (5), it is possible to obtain the effects of shortening the TAT and improving the throughput of the entire production line in the semiconductor production line and other various production lines.
[Brief description of the drawings]
FIG. 1 is a configuration diagram showing a transport system (transport in a bay) according to an embodiment of the present invention.
FIG. 2 is a configuration diagram showing a manufacturing system including a transfer system according to an embodiment of the present invention.
FIG. 3 is a configuration diagram showing a transport system that assumes transport between bays in an embodiment of the present invention.
[Explanation of symbols]
1, 1a, 1b Manufacturing device 2 Track 3 Transport vehicle 4 Transport controller 5 Device terminal 6 Controller terminal 7 Equipment controller 8 Host system

Claims (7)

Control means for controlling the conveyance;
A transport vehicle for transporting a transported body to a first manufacturing apparatus not connected online to the control means;
An instruction means for instructing the control means to drive the transport vehicle,
The control means receives an instruction from the instruction means to drive the conveyance vehicle, and the conveyance vehicle automatically conveys the object to be conveyed to the first manufacturing apparatus. . The transport system according to claim 1,
The transport vehicle transports the transported body to a second manufacturing apparatus connected online to the control means under the control of the control means.
A transport system for automatically transporting the object to be transported to the first manufacturing apparatus and the second manufacturing apparatus without manual transport and without switching or stopping the system. . The transport system according to claim 2, wherein
The transport system, wherein the transport vehicle is an RGV. The transport system according to claim 2, wherein
The transport system, wherein the transport vehicle is an AGV. The transport system according to claim 2, wherein
The transport system is characterized in that the transport vehicle is an OHT. A semiconductor manufacturing system using the transfer system according to any one of claims 1 to 5,
The transport system having the control means, the transport vehicle, and the instruction means;
A semiconductor manufacturing system comprising: a plurality of manufacturing apparatuses for processing or inspecting a semiconductor wafer transferred and delivered by the transfer vehicle. The semiconductor manufacturing system according to claim 6,
The plurality of manufacturing apparatuses include a processing apparatus, an inspection apparatus, and a stocker.

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