JP2005029830A5 - - Google Patents
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- Publication number
- JP2005029830A5 JP2005029830A5 JP2003195406A JP2003195406A JP2005029830A5 JP 2005029830 A5 JP2005029830 A5 JP 2005029830A5 JP 2003195406 A JP2003195406 A JP 2003195406A JP 2003195406 A JP2003195406 A JP 2003195406A JP 2005029830 A5 JP2005029830 A5 JP 2005029830A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- porous body
- plating
- plated
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 description 70
- 238000007747 plating Methods 0.000 description 28
- 238000000034 method Methods 0.000 description 8
- 230000002093 peripheral effect Effects 0.000 description 6
- 239000003566 sealing material Substances 0.000 description 4
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003195406A JP2005029830A (ja) | 2003-07-10 | 2003-07-10 | めっき装置及びめっき方法 |
| US10/886,716 US20050061659A1 (en) | 2003-07-10 | 2004-07-09 | Plating apparatus and plating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003195406A JP2005029830A (ja) | 2003-07-10 | 2003-07-10 | めっき装置及びめっき方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005029830A JP2005029830A (ja) | 2005-02-03 |
| JP2005029830A5 true JP2005029830A5 (https=) | 2006-08-17 |
Family
ID=34206233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003195406A Pending JP2005029830A (ja) | 2003-07-10 | 2003-07-10 | めっき装置及びめっき方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US20050061659A1 (https=) |
| JP (1) | JP2005029830A (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050051437A1 (en) * | 2003-09-04 | 2005-03-10 | Keiichi Kurashina | Plating apparatus and plating method |
| TWI422798B (zh) * | 2006-10-06 | 2014-01-11 | 荏原製作所股份有限公司 | 加工終點檢測方法、研磨方法及研磨裝置 |
| US9293305B2 (en) * | 2011-10-31 | 2016-03-22 | Lam Research Corporation | Mixed acid cleaning assemblies |
| US9805946B2 (en) * | 2013-08-30 | 2017-10-31 | Taiwan Semiconductor Manufacturing Company Limited | Photoresist removal |
| KR20250046803A (ko) | 2023-09-27 | 2025-04-03 | 고등기술연구원연구조합 | 담배폐기물을 이용한 아세트산 추출공정에서 발생하는 촤를 활용한 활성탄소 제조방법 |
| KR102899375B1 (ko) * | 2024-03-28 | 2025-12-12 | 가부시키가이샤 에바라 세이사꾸쇼 | 검출 장치 및 검출 방법 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6416647B1 (en) * | 1998-04-21 | 2002-07-09 | Applied Materials, Inc. | Electro-chemical deposition cell for face-up processing of single semiconductor substrates |
| US6176992B1 (en) * | 1998-11-03 | 2001-01-23 | Nutool, Inc. | Method and apparatus for electro-chemical mechanical deposition |
| US6534116B2 (en) * | 2000-08-10 | 2003-03-18 | Nutool, Inc. | Plating method and apparatus that creates a differential between additive disposed on a top surface and a cavity surface of a workpiece using an external influence |
| JP2000232078A (ja) * | 1999-02-10 | 2000-08-22 | Toshiba Corp | メッキ方法及びメッキ装置 |
| US6632335B2 (en) * | 1999-12-24 | 2003-10-14 | Ebara Corporation | Plating apparatus |
| US6811680B2 (en) * | 2001-03-14 | 2004-11-02 | Applied Materials Inc. | Planarization of substrates using electrochemical mechanical polishing |
| US20050023149A1 (en) * | 2003-06-05 | 2005-02-03 | Tsutomu Nakada | Plating apparatus, plating method and substrate processing apparatus |
-
2003
- 2003-07-10 JP JP2003195406A patent/JP2005029830A/ja active Pending
-
2004
- 2004-07-09 US US10/886,716 patent/US20050061659A1/en not_active Abandoned
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