JP2005028328A - Apparatus and method for cleaning plate-like member and apparatus for treating the member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for cleaning a plate-like member, which has high cleaning capacity without using an ultrasonic wave at the same time and narrowing the width of a nozzle opening so much and has the cleaning capacity higher than that of the conventional technique even when the ultrasonic wave is used at the same time and to provide a plate-like member cleaning method and an apparatus for treating the plate-like member at the speed higher than that of the conventional technique. <P>SOLUTION: This apparatus for cleaning the plate-like member is provided with a nozzle 1 for jetting the first cleaning liquid 11 in a screen-like state and a cleaning liquid scattering head 17 arranged apart from a passage of the liquid 11 to be jetted from the nozzle 1 for scattering the second cleaning liquid 12 on the passage of the liquid 11 in the section from the nozzle 1 to the position that the liquid 11 collides against the plate-like member 26. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

The present invention relates to a processing apparatus and processing method for components and the like in a manufacturing process. In particular, the present invention relates to a cleaning apparatus and a cleaning method for cleaning plate-like members such as glass substrates, liquid crystal panels, and IC wafers.

In a plate-shaped member cleaning apparatus, improvement of cleaning ability such as the diameter of a removable particle and the removal rate is one of important issues. As one of plate-like member cleaning devices, Japanese Patent Laid-Open No. 2001-935 discloses an apparatus for cleaning a substrate by injecting a cleaning liquid from a slit-shaped nozzle port, thereby improving the cleaning ability by using ultrasonic waves together. A cleaning device is disclosed.
JP 2001-935 A (paragraphs 0029-0056, FIG. 1-3)

In an apparatus for cleaning a plate-like member by spraying a cleaning liquid from a nozzle having a slit-like nozzle port, the cleaning ability can be improved by making the width of the nozzle port very small. In this case, there is an advantage that the amount of the cleaning liquid to be used can be reduced. However, the width of the nozzle port is very small on the order of μm, and it is difficult to manufacture the nozzle so that the width of the nozzle port is uniform over the entire nozzle port. In addition, if the width of the nozzle opening is reduced, the pressure of the cleaning liquid supplied to the nozzle must be increased, and a pump capable of generating high pressure is also required for the pump for supplying the cleaning liquid to the nozzle. There was a problem that there was.

In the method described in Japanese Patent Application Laid-Open No. 2001-935, there is a problem that only jetting the cleaning liquid from the nozzle does not have sufficient cleaning capability, and ultrasonic waves must be used in combination to improve the cleaning capability. there were.

The object of the present invention is to solve the above-mentioned problems, and is a plate having high cleaning ability without using ultrasonic waves or making the width of the nozzle opening very small. It is an object of the present invention to provide a member cleaning apparatus and a cleaning method. Also,
It is an object of the present invention to provide a plate-shaped member cleaning apparatus or cleaning method that has improved cleaning performance over conventional techniques even when ultrasonic waves are used in combination. Furthermore, it aims at providing the processing apparatus of the plate-shaped member which improved the processing capability from the prior art.

In order to achieve the above object, a plate-like member cleaning device according to the present invention is arranged apart from a nozzle for injecting a first cleaning liquid into a film and a passage for the first cleaning liquid injected from the nozzle. And a cleaning liquid spraying head for spraying the second cleaning liquid to the passage path in a section from the nozzle to the position where the first cleaning liquid should collide with the plate member. By adopting this configuration, it is possible to provide a plate-shaped member cleaning apparatus having a high cleaning capability without using ultrasonic waves or reducing the width of the nozzle opening very much.

Preferably in the said invention, the cover member formed between the said nozzle and the conveyance path | route of the said plate-shaped member is provided. The covering member is formed so as to cover the entire line where the combined cleaning liquid, which is a combination of the first cleaning liquid and the second cleaning liquid, collides with the plate-like member from above. Further preferably, the covering member is plate-shaped and includes a passage slit through which the first cleaning liquid or the combined cleaning liquid passes. By adopting this configuration, it is possible to suppress the diffusion and reattachment of mist generated from the combined cleaning liquid, and to improve the yield.

In the above invention, preferably, the distance between the covering member and the transport path of the plate-like member is 5 mm or less. By adopting this configuration, the effect of suppressing the diffusion and reattachment of the mist increases.

In the above invention, preferably, the first cleaning liquid is 10 m / s to 300 m / s.
It has a function of ejecting at a flow rate of s or less, and a function of discharging the second cleaning liquid at a flow rate of 10 m / s or less. By adopting this configuration, the cleaning ability can be improved.

Preferably, in the present invention, an ultrasonic application device is provided for applying ultrasonic waves to at least one of the first cleaning liquid, the second cleaning liquid, and the combined cleaning liquid. By adopting this configuration, it is possible to improve the cleaning ability as compared with a conventional cleaning apparatus using ultrasonic waves.

Preferably, in the above invention, the ultrasonic wave application device is disposed on the opposite side to the side on which the combined cleaning liquid collides with the plate member. By adopting this configuration, the ultrasonic application device can be easily arranged.

In order to achieve the above object, a plate-like member cleaning method according to the present invention is a method for cleaning a plate-like member by spraying a first cleaning liquid from a nozzle into a film shape on the plate-like member. In the section from the nozzle to the position where the first cleaning liquid should collide with the plate-like member, a cleaning step is included in which cleaning is performed while spraying the second cleaning liquid onto the first cleaning liquid. By adopting this method, it is possible to provide a method for cleaning a plate-like member having a high cleaning ability without using ultrasonic waves or making the width of the nozzle opening very small.

Preferably, in the above invention, a cover member covers the entire line where the combined cleaning liquid obtained by joining the first cleaning liquid and the second cleaning liquid collides with the plate member on the side where the nozzle is disposed. The above washing process is performed. By adopting this method, diffusion of mist generated from the combined cleaning liquid can be suppressed, and the yield can be improved.

Preferably, in the above invention, the cleaning step is performed in a state where the distance between the covering member and the conveying path of the plate-like member is 5 mm or less. By adopting this method, the effect of suppressing the diffusion of the mist increases.

In the above invention, preferably, the first cleaning liquid is 10 m / s to 300 m / s.
The cleaning step is performed at a flow rate of s or less and the second cleaning liquid at a flow rate of 10 m / s or less. By adopting this method, the cleaning ability can be further improved.

Preferably, in the above invention, the cleaning step is performed while applying an ultrasonic wave to at least one of the first cleaning liquid, the second cleaning liquid, and the combined cleaning liquid. By adopting this method, the above-described cleaning ability can be further improved as compared with the conventional cleaning method using ultrasonic waves.

Preferably, in the above invention, the application of the ultrasonic wave is performed on the plate member.
It is performed from the side opposite to the side where the combined cleaning liquid collides with the plate member. By adopting this method, it is possible to easily apply ultrasonic waves to the combined cleaning liquid.

In order to achieve the above object, a processing apparatus for a plate-like member according to the present invention is separated from a nozzle for injecting a first processing liquid into a film and a passage path for the first processing liquid injected from the nozzle. And a processing liquid spraying head for spraying the second processing liquid to the passage path in a section from the nozzle to a position where the first processing liquid should collide with the plate-like member. By adopting this configuration, the processing speed can be improved and the processing time can be shortened as compared with the processing apparatus based on the conventional technique.

According to the present invention, by ejecting the second cleaning liquid to the first cleaning liquid ejected from the nozzle, it is possible to improve the cleaning performance by generating bubbles in the cleaning liquid, without using ultrasonic waves in combination. However, it is possible to provide a plate-shaped member cleaning apparatus and cleaning method having high cleaning ability. Further, even when ultrasonic waves are used in combination, it is possible to provide a plate member cleaning apparatus and cleaning method having a higher cleaning ability than the plate member cleaning apparatus according to the prior art. Furthermore, the processing apparatus of the plate-shaped member which improved the processing capability from the prior art can be provided.

(Embodiment 1)
With reference to FIGS. 1 to 5, a plate-shaped member cleaning apparatus and method according to Embodiment 1 of the present invention will be described. The “upper side” in the present specification does not indicate the upper side in the vertical direction (absolute upper side) but indicates the relative positional relationship when considered in the posture shown in the figure.

(Constitution)
FIG. 1 shows a schematic cross-sectional view of a cleaning device 50 in the present embodiment. Cleaning device 50
The rotating rollers 20 are arranged in the horizontal direction at substantially equal intervals inside the rotating roller 2.
0 rotates according to the control of the control unit 24. The plate member 26 is placed on the upper side of the rotating roller 20 and is conveyed in the direction of the arrow 30 as the rotating roller 20 rotates. The nozzle 1 is disposed on the upper side of the conveying path of the plate-like member 26, and the nozzle 1 is mounted so as to inject the cleaning liquid in a direction opposite to the conveying direction of the plate-like member 26. In this specification, the cleaning liquid ejected from the nozzle 1 is referred to as a “first cleaning liquid”. The first cleaning liquid is supplied to the nozzle 1 by the pump 23 through the cleaning liquid supply pipe 25. The first cleaning liquid is pressurized during supply and is ejected from the nozzle 1 at a high pressure. In the present embodiment, the first cleaning liquid 11 is ejected in the form of a film.

A cleaning liquid spraying head 17 is formed at a position apart above the passage path of the first cleaning liquid 11 so as to spray the cleaning liquid toward the passage path of the first cleaning liquid.
In the present specification, the cleaning liquid ejected from the cleaning liquid spraying head is referred to as a “second cleaning liquid”. The cleaning liquid spraying head 17 is arranged so that the second cleaning liquid 12 collides with the first cleaning liquid 11 in a section from when the first cleaning liquid 11 is ejected from the nozzle 1 to collide with the plate-like member 26. . In the present specification, the cleaning liquid in which the first cleaning liquid and the second cleaning liquid are combined is referred to as a combined cleaning liquid. That is, the combined cleaning liquid 1
4 serves to remove contaminants on the surface of the plate member 26. The plate-like member 26 is transported by the rotating roller 20 and at the same time, cleaning is performed by the collision of the combined cleaning liquid 14.

The plate-like member 26 cleaned with the combined cleaning liquid 14 is transported by the rotary roller 20, and the cleaning liquid is washed away by pure water sprayed from the pre-drying shower 21. The pre-drying shower 21 is arranged on the upper side and the lower side of the conveying path of the plate-like member 26, and the plate-like member 2.
The front and back sides of 6 are washed simultaneously.

The plate-like member 26 from which the cleaning liquid has been washed off is transported by the rotary roller 20 and is dried by applying compressed air sprayed from the air knife 22. Air knife 2
2 is arrange | positioned at the upper side and lower side of the conveyance path | route of the plate-shaped member 26, and the front and back of the plate-shaped member 26 are dried simultaneously. Thereafter, the plate-like member 26 is unloaded from the cleaning device 50 by a robot (not shown).

FIG. 2 shows a cross section of the nozzle 1 for injecting the high-pressure first cleaning liquid. Nozzle 1
Is formed with an injection port 9 so that the cleaning liquid can be injected from a narrow interval. The first cleaning liquid pressurized by the pump is stored in the liquid reservoir 16 and then passes through the injection port 9 to form a water film. Nozzle gap t which is the width of the injection port 9 in the present embodiment
The size of is 20 μm. The nozzle 1 is formed horizontally in a direction perpendicular to the paper surface of the sectional view of FIG. 2 (hereinafter, this direction is referred to as “longitudinal direction”), and the first cleaning liquid is ejected in a film shape. Is done.

FIG. 3 is a schematic cross-sectional view illustrating a state where the first cleaning liquid is ejected from the nozzle 1 to clean the plate-like member 26. The nozzle 1 is disposed in a direction in which the first cleaning liquid 11 is ejected so as to face the direction of the arrow 30 that is the traveling direction of the plate-like member 26. Further, the first cleaning liquid 11 is jetted obliquely with respect to the main surface of the plate-like member 26. The length of the nozzle 1 in the longitudinal direction is sufficiently long so that the first cleaning liquid 11 can be sprayed over the entire width direction of the plate-like member 26. The plate-shaped member cleaning apparatus in the present embodiment has a function of adjusting the flow rate of the first cleaning liquid. In the present embodiment, at least 10
In the range of m / s to 300 m / s, the flow rate of the first cleaning liquid can be adjusted.

FIG. 4 shows a front view of the cleaning liquid spraying head 17. The cleaning liquid spraying head 17 is the second
The shower port 5 for discharging the cleaning liquid 12, the connector 3 for supplying the second cleaning liquid 12, and the hollow pipe 4 that is hollow inside and communicates with the connector 3 and the shower port 5. The cleaning liquid spraying head 17 is formed in a horizontally long shape so that the second cleaning liquid can be sprayed over the entire first cleaning liquid. The plate-shaped member cleaning device in the present embodiment has a function of adjusting the flow rate of the second cleaning liquid.
In the present embodiment, it is formed so that the flow rate of the second cleaning liquid can be adjusted in the range of at least 2 m / s to 50 m / s.

The shower port 5 has a spray shower configuration. The shower ports 5 are formed at substantially equal intervals in the axial direction of the hollow pipe 4 and are discharged from the shower port 5.
The cleaning liquid 12 is sprayed in a substantially conical shape. The conical ejection angle α in the present embodiment is 60 °, but is not limited to this angle, and the shape to be dispersed is not limited to the conical shape. For example, in the present embodiment, the second cleaning liquid is sprayed in the form of a shower, but instead of such a shower port, the nozzle shown in FIG. A cleaning liquid may be jetted.

As shown in FIG. 3, the second cleaning liquid 12 sprayed from the cleaning liquid spraying head 17 is sprayed directly below in the vertical direction. The pump (not shown) for supplying the second cleaning liquid does not require a special pump such as a high-pressure pump used for supplying the first cleaning liquid, and is commercially available at a low price such as a spiral pump or a mechanical pump. A pump can be used.

(Action / Effect)
As shown in FIG. 3, the first cleaning liquid 11 ejected from the nozzle 1 merges with the second cleaning liquid 12 sprayed from the cleaning liquid spraying head 17 to become a combined cleaning liquid 14. The combined cleaning liquid 14 cleans the main surface of the plate member 26 by colliding with the plate member 26. By spraying the second cleaning liquid 12 on the first cleaning liquid 11, the flow of the first cleaning liquid 11 is appropriately disturbed, and bubbles 13 are formed inside the combined cleaning liquid 14.
Is generated in large numbers. The bubbles 13 move on the main surface of the plate-like member 26 at a high speed,
The removal performance of fine particles can be improved.

In order to confirm the effect of the present invention, an actual cleaning test was conducted. Alumina-boron-silicon glass is used as the plate member 26, and the conveyance speed of the plate member 26 is 32.
Cleaning was performed at 00 mm / min. This condition is common in all the following tests.

A comparative test of the removal ability of each particle was performed with and without the second cleaning liquid sprayed. First, a test was performed on a cleaning apparatus based on the conventional technique without spraying the second cleaning liquid. In the test, cleaning is performed by changing the flow rate of the first cleaning liquid, and the removal rate of particles having a size of 3 μm or more is obtained. First
The thickness of the cleaning liquid (the size of the nozzle gap) was 20 μm. When the angle formed between the main surface of the plate-like member and the first cleaning liquid is changed, the particle removal rate also changes. In this test, the inclination angle of the nozzle (the first cleaning liquid jet direction and the main part of the plate-like member is changed). The angle formed with the surface was 20 °. The results are shown in Table 1.

As the test results in Table 1 indicate, the faster the flow rate of the first cleaning liquid 11, the higher the particle removal rate. When the flow rate is increased to about 30 m / s, 6 out of 3 μm or more particles
0% of the particles could be removed. When the flow rate was 100 m / s, 90% of particles having a size of 3 μm or more could be removed from the plate member. Furthermore, when the flow rate was increased to 300 m / s, particles of 3 μm or more could be removed 100%. From these results, it is effective to increase the flow rate of the first cleaning liquid in order to remove particles of 3 μm or more from the plate-like member. However, in order to increase the flow rate of the first cleaning liquid,
As described above, it is necessary to provide a high-pressure pump capable of generating a pressure corresponding to an increase in the speed of the first cleaning liquid, or it is difficult to make the thickness of the first cleaning liquid very thin.

Table 2 below shows the test results of the removal rate when the second cleaning liquid is sprayed according to the present invention. In the test, similarly to the test without spraying the second cleaning liquid, the thickness of the first cleaning liquid was 20 μm, the nozzle inclination angle was 20 °, and the flow rate of the first cleaning liquid was changed. Further, the test was performed while changing the flow rate of the second cleaning liquid. The cleaning liquid spraying head used in the test is the cleaning liquid spraying head shown in FIG. 4 according to the present embodiment, and the second cleaning liquid is sprayed in a substantially conical shape. About the test result, the removal rate of the particle | grains 3 micrometers or more was calculated | required.

From the test results shown in Table 2, in order to obtain a removal rate of particles of 3 μm or more of 60%, in the conventional technique, the flow rate of the first cleaning liquid must be 30 m / s. Then, the same removal rate can be achieved when the flow rate of the first cleaning liquid is 10 m / s.

When attention is paid to the results when the flow rate of the first cleaning liquid is 30 m / s and 100 m / s, the removal rate of particles of 3 μm or more is improved regardless of the flow rate of the second cleaning liquid. For example, when the second cleaning liquid is not sprayed at a flow rate of 30 m / s of the first cleaning liquid, the removal rate of particles of 3 μm or more was 60%, whereas the result of spraying the second cleaning liquid In all the test results, the removal rate has achieved about 80% or more. Similarly, with respect to the test result at a flow rate of 100 m / s, a result in which the removal rate was improved by spraying the second cleaning liquid was obtained.

From the test results in Table 2, even when the second cleaning liquid is present, the removal rate is improved by increasing the flow rate of the first cleaning liquid. Also, if the flow rate of the second cleaning liquid is increased,
When the flow rate of the second cleaning liquid is in the range of 2 m / s to 10 m / s, a tendency to improve the removal rate is observed. On the other hand, the flow rate of the second cleaning liquid is changed from 10 m / s to 50 m / s.
However, the removal effect was almost the same. Therefore, the flow rate of the second cleaning liquid is 1
The effect is sufficiently exhibited even at 0 m / s or less. Because this flow rate is relatively slow,
A special pump such as a high-pressure pump is not required, and the second cleaning liquid can be supplied using an inexpensive spiral pump or mechanical pump.

Thus, the plate-shaped member cleaning apparatus according to the present embodiment can improve the particle removal rate by spraying the second cleaning liquid onto the first cleaning liquid.
Regarding the flow rate of each cleaning liquid, the first cleaning liquid is 10 m / s to 300 m / s.
As the flow rate of s or less, the flow rate of the second cleaning liquid is preferably 10 m / s or less.

The number and size of bubbles generated in the combined cleaning liquid can be changed by the flow rate and thickness of the first cleaning liquid and the flow rate of the second cleaning liquid. Moreover, the bubble generation state can also be changed by the angle at which the second cleaning liquid collides with the first cleaning liquid and the distance between the first cleaning liquid and the shower port. As shown in FIG. 5, the first cleaning liquid 1
The angle formed between the direction 35 of the surface on the nozzle 1 side of the outermost surface of the second cleaning liquid 12 and the direction 36 that is the ejection direction of the first cleaning liquid 11, which is the collision angle θ between the first cleaning liquid 12 and the second cleaning liquid 12. And When the collision angle θ is 90 °, the thickness of the first cleaning liquid 11 is 20 μm,
When the plate-like member is washed with the flow rate of the first cleaning liquid 11 being 30 m / s and the flow rate of the second cleaning liquid 12 being 5 m / s, bubbles generated inside the combined cleaning liquid have a diameter of 1 mm.
About 200 bubbles per cm ² were observed for 1 minute. About 30 large bubbles having a diameter of 5 mm or more were observed at the same time. Table 3 shows the results of measuring the number of bubbles contained in the combined cleaning liquid by changing the flow rates of the first cleaning liquid and the second cleaning liquid.

As shown in Table 3, when the flow rate of the first cleaning liquid was increased, the size of the bubbles was reduced, and the number of passing bubbles per unit time and unit area was increased. It was confirmed that when the speed of the second cleaning liquid was increased, the size of bubbles increased, and the number of passing bubbles per unit area per unit area decreased.

Although the above has mainly described the cleaning apparatus, the present invention can be applied to a cleaning method. That is, the same effect as the above can be obtained by performing the cleaning while spraying the second cleaning liquid on the first cleaning liquid sprayed in a film shape. Moreover, the effect similar to said effect can be acquired by making a 1st washing | cleaning liquid into 10 m / s or more and 300 m / s or less, and making the flow rate of a 2nd washing | cleaning liquid into 10 m / s or less.

(Embodiment 2)
With reference to FIGS. 6 to 8, a plate-shaped member cleaning apparatus and method according to the second embodiment of the present invention will be described.

(Constitution)
FIG. 6 shows a schematic cross-sectional view of the cleaning apparatus in the present embodiment. A plate-like member 26 is placed on the upper side of the rotation roller 20, and the rotation of the rotation roller 20 causes the plate-like member 26 to be transported, and the first cleaning liquid 11 and the cleaning liquid spraying head ejected from the nozzle 1. The combined cleaning liquid 14 joined with the second cleaning liquid 12 sprayed from 17
Thus, the plate-like member 26 is cleaned in the same manner as in the first embodiment.

In the present embodiment, a plate-like covering member 7 is provided between the conveying path of the plate-like member 26 and the nozzle 1. The main surface of the cover member 7 is disposed so as to be substantially parallel to the conveying path of the plate member 26 and is formed so as to cover the entire collision line between the combined cleaning liquid 14 and the plate member 26. Moreover, it forms so that the downstream side may also be covered from this collision line. A passage slit 8 that penetrates from the upper side to the lower side is formed in the cover member 7, and the cleaning liquid passes through the passage slit 8.

The second cleaning liquid 12 is formed so as to collide only with the first cleaning liquid 11 and not against the covering member 7. In the present embodiment, the second cleaning liquid 12 is sprayed before the first cleaning liquid 11 completely passes through the passage slit 8.

FIG. 7A is a plan view of the covering member 7, and VIIB-VIIB in FIG.
A cross-sectional view taken along the line is shown in FIG. The covering member 7 in the present embodiment is formed in a rectangular parallelepiped. Passing slits 8 are formed so as to penetrate from one main surface to the other main surface. The passage slit 8 is for allowing the flow of the cleaning liquid to pass without being obstructed, and is formed so that the cleaning liquid completely passes in a direction parallel to the longitudinal direction of the nozzle 1. That is, the length in the longitudinal direction of the passage slit 8 is formed to be longer than the length in the longitudinal direction of the injection port of the nozzle 1. The passage slit 8 is formed so that the width thereof is sufficiently larger than the thickness of the cleaning liquid, and is formed so as to penetrate obliquely in accordance with the inclination angle of the nozzle 1. In the present embodiment, the covering member is plate-shaped but not particularly plate-shaped,
For example, the shape may be a cube.

Since the configuration of the cleaning apparatus other than the above is the same as that of the first embodiment, description thereof will not be repeated here.

(Action / Effect)
In addition to the configuration of the cleaning device of the first embodiment, the plate member cleaning device in the present embodiment includes a cover member. At the same time that the combined cleaning liquid collides with the plate member for cleaning, bubbles present in the combined cleaning liquid are repelled and mist of the cleaning liquid is generated. The mist may drift in the air and re-attach to the part that has been cleaned. As a result, the plate-like member may be poorly cleaned due to adhesion of contaminants, and the yield may be reduced. The plate-shaped member cleaning device in the present embodiment is arranged by arranging a covering member,
The yield can be improved by suppressing the generation of mist and suppressing the mist drifting in the air and reattaching to the plate member.

A cleaning test was performed using the cleaning device in the present embodiment. In the test, the thickness of the first cleaning liquid was 20 μm, and the inclination angle of the nozzle 1 was 20 °.
The cleaning test was repeated by changing the flow rate of the first cleaning solution and the flow rate of the second cleaning solution.
In the determination of the result, the removal rate of particles of 3 μm or more was measured. The results of this cleaning test are shown in Table 4.

Changing the flow rate of the first cleaning liquid within a range of 30 m / s to 100 m / s,
As a result of changing the flow rate of the second cleaning liquid within the range of 2 m / s to 50 m / s,
In all the combinations of flow rates, better results were obtained than the test results of Embodiment 1 (see Table 2) in which no covering member was arranged. For example, when the flow rate of the first cleaning liquid is 30 m / s and the flow rate of the second cleaning liquid is 5 m / s, the removal rate of particles of 3 μm or more when the covering member is not arranged is 85%. On the other hand, the removal rate of particles of 3 μm or more in the case where the covering member is arranged was 98%.

Next, the test was performed by changing the distance between the conveying path of the plate-like member and the covering member.
As shown in FIG. 8, the distance d between the surface through which the upper surface of the plate-shaped member 26 passes and the lower surface of the cover member 7 among the transport paths of the plate-shaped member 26 is determined between the transport path of the plate-shaped member and the cover member. The distance. The flow rate of the first cleaning solution is 30 m / s, and the flow rate of the second cleaning solution is 10 m.
The test was repeated while changing the distance d between the plate-like member 26 and the covering member 7 under a constant / s condition. The test was performed with the thickness of the first cleaning solution being 20 μm and the nozzle tilt angle being 20 °. The test result was evaluated by the removal rate of particles of 3 μm or more. The results are shown in Table 5.

The test was performed while changing the distance d between the conveying path of the plate-like member 26 and the covering member 7 within a range of 1 mm or more and 10 mm or less. As a result, the removal rate was higher when the distance between the plate-like member and the covering member was shorter. In particular, the removal rate of 95% or more is achieved at 5 mm or less, and the distance between the conveying path of the plate-like member and the covering member is preferably 5 mm or less. Furthermore, a removal capability can be improved by making the distance between a plate-shaped member and a covering member 1 mm or less.

Thus, by disposing the covering member, it is possible to prevent the generated mist from diffusing and reattaching, thereby improving the yield.

In the present embodiment, the cover member is formed with a passage slit so as to allow the cleaning liquid to pass through. However, when the inclination angle of the nozzle is small enough to cover the upper side of the plate member, a flat plate having no passage slit is provided. A shaped covering member may be used.

Although the above has mainly described the cleaning apparatus, the present invention can be applied to a cleaning method. That is, the same effect as that of the above-described apparatus can be obtained by performing the cleaning so that the entire line where the combined cleaning liquid collides with the plate-like member is covered with the covering member on the side where the nozzle is disposed. . Moreover, the effect similar to the effect of said apparatus can be acquired by making distance of a covering member and the conveyance path | route of a plate-shaped member into 5 mm or less.

Since the operations and effects of the cleaning apparatus other than those described above are the same as those in the first embodiment, description thereof will not be repeated here.

(Embodiment 3)
(Constitution)
With reference to FIG. 9, a plate-shaped member cleaning apparatus and cleaning method according to Embodiment 3 of the present invention will be described. FIG. 9 is a schematic cross-sectional view of the cleaning apparatus in the present embodiment. A plate-like member 26 is placed on the rotating roller 20, and the rotating roller 20 rotates to carry the plate-like member 26, and from the first cleaning liquid 11 and the cleaning liquid spraying head 17 ejected from the nozzle 1. As in the second embodiment, the plate-like member 26 is cleaned with the combined cleaning liquid 14 that has joined the sprayed second cleaning liquid 12. The plate-shaped cover member 7 is arranged so as to be substantially parallel to the conveying path of the plate-shaped member 26, and the cleaning liquid passes through the passage slit 8 formed in the cover member 7 and collides with the plate-shaped member 26. This is the same as in the second embodiment.

In the plate-shaped member cleaning apparatus according to the present embodiment, the ultrasonic wave application device 6 is disposed immediately below the conveyance path of the plate-shaped member 26. That is, the ultrasonic application device 6 is disposed on the opposite side to the side where the combined cleaning liquid 14 collides with respect to the plate-like member 26 to be cleaned. In the present embodiment, the ultrasonic wave application device 6 includes the combined cleaning solution 14 and the plate-like member 2.
6 is arranged downstream of the position where it collides with 6 and arranged to apply ultrasonic waves to the combined cleaning liquid 14.

Since other configurations are the same as those in the second embodiment, description thereof will not be repeated here.

(Action / Effect)
The ultrasonic waves oscillated from the ultrasonic application device 6 can propagate through the plate-like member 26 and lift fine particles attached to the surface of the plate-like member 26. The lifted fine particles are caused to flow along the flow of the combined cleaning liquid 14 and the plate-like member 26 is cleaned.

A test for confirming the effect of the cleaning apparatus in the present embodiment was performed. First
The flow rate of the cleaning liquid is 30 m / s or 10 m / s, and the flow rate of the second cleaning liquid is 1.
The test was performed with and without the application of ultrasonic waves under the condition of constant 0 m / s, and the distance between the conveying path of the plate-like member and the covering member was constant 5 mm. The ultrasonic frequency was 1 MHz ± 100 kHz, the thickness of the first cleaning liquid was 20 μm, the nozzle inclination angle was 20 °, and the test results were evaluated based on the removal rate of particles of 3 μm or more. The results are shown in Table 6.

When the flow rate of the first cleaning liquid is 30 m / s or 10 m / s,
A result that the cleaning ability is improved by applying ultrasonic waves from the back surface of the plate-like member is obtained. Thus, the cleaning ability can be further improved by using ultrasonic waves together.

In the present embodiment, the ultrasonic wave application device is arranged on the side opposite to the surface on which the combined cleaning liquid collides with the plate-like member. By adopting this configuration, the ultrasonic wave application device can be easily arranged. For example, in FIG. 9, it is difficult to arrange the ultrasonic wave application device above the plate member, but the device can be easily arranged below the plate member.

Further, in the present embodiment, the ultrasonic waves are applied to the combined cleaning liquid via the plate-like member, but the cleaning ability is improved regardless of the ultrasonic waves applied to any cleaning liquid.
For example, ultrasonic waves may be applied to the first cleaning liquid before colliding with the second cleaning liquid.

Although the above has mainly described the cleaning apparatus, the present invention can be applied to a cleaning method. That is, by performing the cleaning while applying ultrasonic waves to at least one of the first cleaning liquid, the second cleaning liquid, and the combined cleaning liquid, it is possible to obtain the same effect as the above apparatus. Moreover, the effect similar to said apparatus can be acquired by applying an ultrasonic wave with respect to a plate-shaped member from the opposite side to the side where a confluent cleaning liquid collides with a plate-shaped member.

Since other operations and effects are the same as those in the first or second embodiment, description thereof will not be repeated here.

In the above embodiment, in most tests, the angle between the plate-like member and the cleaning liquid (nozzle inclination angle) is 20 °, but the angle is not limited to this. Regardless of the angle formed by the plate member and the cleaning liquid, the particle removal performance is improved by using the apparatus and method of the present invention. In addition, if the angle formed by the plate member and the cleaning liquid is too small, the plate member may slip on the rotating roller.
If the angle formed by the plate member and the cleaning liquid is too large, the plate member may be damaged. Therefore, this angle is preferably adjusted as appropriate depending on the strength of the plate-like member and the conveying method. As cleaning water used for cleaning, ultrapure water, alkali-reduced hydrogen water, degassed ultrapure water, nitrogen-saturated ultrapure water, or the like can be used.

Further, in all the above embodiments, the description has been made by taking up the removal of the pollutant. However, the present invention is not limited to the removal of the pollutant, and the plate-like member for removing foreign substances other than the pollutant is described. It can also be applied to processing. Examples of the treatment of the plate-like member include peeling and etching in addition to removal of contaminants such as removal of organic film-like contaminants and removal of ionic contaminants. For example, it can be applied to resist stripping, metal etching or glass etching.

These plate-shaped member processing apparatuses have substantially the same configuration as the plate-shaped member cleaning apparatus described above, and a nozzle for injecting the first processing liquid into a film shape and a second processing liquid into the first processing liquid. A processing liquid spraying head for spraying the processing liquid; When an amine alkaline organic solvent, acetone or ether solvent is used as the treatment liquid in this apparatus,
The peeling treatment can be performed, and the etching treatment can be performed by using hydrofluoric acid, nitric acid, acetic acid, or the like as the treatment liquid. When the processing apparatus according to the present invention is used for processing plate-like members such as resist peeling and etching, the processing speed is improved as compared with the processing apparatus based on the conventional technique, and the processing can be performed in a short time.

In addition, the said embodiment disclosed this time is an illustration in all the points, Comprising: It is not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and includes all modifications within the scope and meaning equivalent to the terms of the claims.

It is a schematic sectional drawing of the washing | cleaning apparatus of the plate-shaped member in Embodiment 1 based on this invention. It is a schematic sectional drawing of the nozzle in Embodiment 1 based on this invention. It is a schematic sectional drawing of the principal part of the washing | cleaning apparatus in Embodiment 1 based on this invention. It is a front view of the washing | cleaning liquid dispersion | spreading head in Embodiment 1 based on this invention. It is explanatory drawing of the angle which a 1st cleaning liquid and a 2nd cleaning liquid make. It is a schematic sectional drawing of the principal part of the washing | cleaning apparatus in Embodiment 2 based on this invention. It is explanatory drawing of the covering member in Embodiment 2 based on this invention, (a) is a top view, (b) is arrow sectional drawing regarding the VIIB-VIIB line | wire in (a). It is explanatory drawing of the distance of the conveyance path | route of a plate-shaped member, and a covering member. It is sectional drawing of the principal part of the washing | cleaning apparatus of the plate-shaped member in Embodiment 3 based on this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Nozzle, 3 Connector, 4 Hollow pipe, 5 Shower port, 6 Ultrasonic application apparatus, 7 Cover member, 8 Passing slit, 9 Injection port, 11 1st washing | cleaning liquid,
12 second cleaning liquid, 13 bubbles, 14 combined cleaning liquid, 16 sump, 17 cleaning liquid spraying head, 20 rotating roller, 21 pre-drying shower, 22 air knife, 23 pump, 24 control unit, 25 cleaning liquid supply pipe, 26 plate member , 30
Arrow, 35, 36 direction, 50 Cleaning device, d distance, t Nozzle gap, θ
Collision angle, α ejection angle.

Claims (14)

A nozzle for injecting the first cleaning liquid into a film;
Arranged away from the passage route of the first cleaning liquid sprayed from the nozzle,
A plate-shaped member cleaning apparatus comprising: a cleaning liquid spraying head for spraying a second cleaning liquid to the passage path in a section from the nozzle to a position where the first cleaning liquid should collide with the plate-shaped member. A cover member formed between the nozzle and the conveying path of the plate-like member;
2. The cover member is formed so as to cover the entire line where the combined cleaning liquid, in which the first cleaning liquid and the second cleaning liquid merge, collides with the plate-shaped member, from above.
The plate-shaped member cleaning apparatus according to 1. The said covering member is plate shape, The washing | cleaning apparatus of the plate-shaped member of Claim 2 containing the passage slit for the said 1st washing | cleaning liquid or the said joint washing | cleaning liquid to pass through. The distance between the covering member and the conveying path of the plate-like member is 5 m
The plate-shaped member cleaning device according to claim 2, wherein the cleaning device is m or less. The plate according to claim 1, which has a function of ejecting the first cleaning liquid at a flow rate of 10 m / s or more and 300 m / s or less and a function of discharging the second cleaning liquid at a flow rate of 10 m / s or less. -Like member cleaning device. The plate-shaped member cleaning apparatus according to claim 1, further comprising an ultrasonic wave application device for applying ultrasonic waves to at least one of the first cleaning liquid, the second cleaning liquid, and the combined cleaning liquid. The said ultrasonic application apparatus is a washing | cleaning apparatus of the plate-shaped member of Claim 6 arrange | positioned with respect to the said plate-shaped member on the opposite side to the side where the said confluent cleaning liquid collides. A cleaning method for cleaning the plate-like member by spraying a first cleaning liquid from the nozzle in a film form on the plate-like member,
In the section from the nozzle to the position where the first cleaning liquid should collide with the plate-shaped member, the plate-shaped member is cleaned, including a cleaning step of performing the cleaning while spraying the second cleaning liquid to the first cleaning liquid. Method. The first cleaning liquid and the second on the side where the nozzle is disposed
The plate-shaped member cleaning method according to claim 8, wherein the cleaning step is performed so that the entire line in which the combined cleaning liquid of the cleaning liquids collides with the plate-shaped member is covered with a covering member. The distance between the covering member and the conveying path of the plate member is 5 mm.
The plate-shaped member cleaning method according to claim 9, wherein the cleaning step is performed in the following state. The plate-like member according to claim 8, wherein the cleaning step is performed with the first cleaning liquid at a flow rate of 10 m / s or more and 300 m / s or less and the second cleaning liquid at a flow rate of 10 m / s or less. Cleaning method. The plate member cleaning method according to claim 8, wherein the cleaning step is performed while applying an ultrasonic wave to at least one of the first cleaning liquid, the second cleaning liquid, and the combined cleaning liquid. The plate member cleaning method according to claim 12, wherein the ultrasonic wave is applied to the plate member from a side opposite to a side where the combined cleaning liquid collides with the plate member. A nozzle for injecting the first treatment liquid into a film;
Arranged away from the passage path of the first treatment liquid ejected from the nozzle,
A plate-like member process comprising: a treatment liquid spraying head for spraying a second treatment liquid to the passage path in a section from the nozzle to a position where the first treatment liquid should collide with the plate-like member. apparatus.

Images