JP2005027859A - Local fire extinguishing system of clean room - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a system locally extinguishing a fire only a site of fire break-out at the time of a fire in a clean room. <P>SOLUTION: The local fire extinguishing system of the clean room has an environment fire extinguishing unit 12 and a device fire extinguishing unit 14. The environment fire extinguishing unit 12 connects a movable type hose unit 34 to the gas pipe connecting port 33 of an inactive fire extinguishing gas pipe 16 for supplying an inactive fire extinguishing gas by detection of the fire in the clean room by super high sensitive sensor 36 to locally extinguishing the fire in the clean room. Whereas, the device fire extinguishing unit 14 releases the inactive fire extinguishing gas from a fire extinguishing nozzle 39 connected to the inactive fire extinguishing pipe 16 having an inactive fire extinguishing gas cylinder supplying source which is common to the above environment fire extinguishing unit 12 to locally extinguish device fire by detection of the fire in a manufacturing device by a heat sensor 40 placed inside the manufacturing device 37 arranged in the clean room. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a clean room fire extinguishing system, and more particularly, to a fire extinguishing system that performs local initial fire extinguishing around a fire point in a room.
[0002]
[Prior art]
A clean room used in a semiconductor manufacturing factory or the like is controlled to a cleanliness level in which dust in the air of the clean room is defined.
FIG. 5 shows an outline of the space configuration of the clean room. As shown in the figure, the clean room facility 1 has a clean room 2 in which a semiconductor production line (not shown) is installed, and a plurality of FFUs (fan filter units) 3 are arranged on the ceiling surface of the clean room 2. Has been. The FFU 3 sucks the air in the ceiling space 4 and removes dust contained in the air, and then downflows the clean air into the clean chamber 2 (the arrow indicates the air flow direction). The downflowed clean air is sucked into the underfloor chamber 6 from the grating surface 5 together with dust floating in the clean room 2. The air sucked into the underfloor chamber 6 is returned to the ceiling back space 4 through the return space 7. The air thus sent to the ceiling space 4 is purified again by the FFU 3 and downflowed into the clean room 2. Thereby, the inside of the clean room 2 is maintained at a high cleanliness. In order to maintain such a high cleanliness, the clean room has a wide space including the ceiling back space 4, the underfloor chamber 6, and the return space 7, in addition to the clean room 2 in which semiconductor manufacturing is performed, The floor height (from the floor to the ceiling) is a few dozen meters.
[0003]
Conventionally, when a fire occurs in the clean room, a fire extinguishing method as shown in Patent Document 1 and Patent Document 2 is known.
That is, according to Patent Document 1, using a gas fire extinguishing equipment such as an inert gas, carbon dioxide or halogen gas as a digestive agent, a fire is generated by releasing an inert fire extinguishing gas over the entire fire extinguishing target area (protective area) of the clean room. The fire is extinguished.
Moreover, in patent document 2, the fire which generate | occur | produces in the manufacturing apparatus etc. in a clean room is detected, and an inert fire extinguishing gas is discharge | released locally to the target manufacturing apparatus etc., and the apparatus fire is extinguished.
[0004]
[Patent Document 1] JP-A-8-173565 [Patent Document 2] JP-A-9-135919
[Problems to be solved by the invention]
However, in the case of a clean room having a wide space with a floor height of several tens of meters, the fire extinguishing method according to Patent Document 1 emits an inert fire extinguishing gas necessary for reducing the oxygen concentration in the entire protected area and extinguishes the fire. As a result, the amount of fire extinguishing gas required was enormous. Therefore, the storage space increases as the storage amount of the inert fire extinguishing gas cylinder increases. In addition, since the fire extinguishing area extends over the entire clean room, extensive repairs are required to restore the clean room after fire extinguishing to its normal function, and various manufacturing equipment installed inside is overhauled. It becomes indispensable, and the function as a clean room will be lost for a long time.
[0006]
In addition, in the case of extinguishing the apparatus as in Patent Document 2, gas piping is arranged in various manufacturing apparatuses to extinguish the apparatus. However, regarding environmental fires that occur around the manufacturing apparatus in the clean room, Patent Document 1 Thus, fire extinguishing is performed by arranging gas piping in each chamber. For this reason, since separate gas pipes are provided in each of the manufacturing apparatus and the clean room, the gas piping is complicated, and in addition, an inert fire extinguishing gas cylinder is required for each pipe. The storage space also increased, and there was a problem of increasing the initial investment amount of the clean room.
[0007]
In order to solve such a conventional problem, the present invention aims to reduce the amount of inert fire extinguishing gas stored and the storage space while taking advantage of the conventional fire extinguishing with inert gas, thereby reducing the initial investment amount of the clean room. The purpose is to provide a local fire extinguishing system for clean rooms.
[0008]
[Means for Solving the Problems]
In order to achieve the above object, a local fire extinguishing system for a clean room according to the present invention includes a detection means for identifying an area corresponding to a fire spot generated in a separated clean room, and an inert fire extinguishing gas supply port of the separated clean room. It is characterized by having a mobile fire extinguishing gas discharge means which can be connected to the inert fire extinguishing gas supply port close to the fire location based on the detection means, and can be locally extinguished. .
[0009]
Further, the mobile fire extinguishing gas discharge means is characterized in that it can be desorbed and transferred to the inert fire extinguishing gas supply port.
Further, a local fire extinguishing system for a clean room includes a device fire extinguishing unit that detects and extinguishes a fire inside a manufacturing apparatus installed in a clean room, an environmental fire extinguishing unit that detects a fire in a peripheral area of the manufacturing apparatus and locally extinguishes, and the apparatus A fire extinguishing unit and an inert fire extinguishing gas piping unit connected to the environmental fire extinguishing unit to control the supply of inert fire extinguishing gas, and an inert fire extinguishing gas cylinder connected to the inert fire extinguishing gas piping unit; The environmental fire extinguishing unit can share and enable local fire extinguishing.
[0010]
Further, the inert fire extinguishing gas piping unit is characterized by controlling the discharge amount of the inert fire extinguishing gas based on a detection signal from the apparatus fire extinguishing unit.
And the said inert fire extinguishing gas piping unit has the piping pressurization means which hold | maintains the inside of a gas pipe under fixed pressurization.
[0011]
[Action]
In the case of environmental fire extinguishing, the present invention thus configured identifies the location of the fire in the case of environmental fire extinguishing and artificially releases an inert fire extinguishing gas. It is set as the structure which controls and discharge | releases an inert fire extinguishing gas according to a manufacturing apparatus, and extinguishes a fire location locally. Accordingly, it is possible to limit the inert fire extinguishing gas necessary for fire extinguishing, and it is possible to save the exhaust fire extinguishing gas without wasting it. Moreover, since the local fire extinguishing system according to the present invention extinguishes with the minimum inert fire extinguishing gas, the restoration of the clean room after the fire extinguishing can be greatly shortened.
[0012]
Further, the present invention is configured such that a plurality of fire extinguishing equipment for environmental fire extinguishing and equipment fire extinguishing can be connected to a gas pipe for supplying an inert fire extinguishing gas, and an inert fire extinguishing gas cylinder serving as an inert fire extinguishing gas supply source is shared by both fire extinguishing. Therefore, local fire extinguishing can be performed, and the number of cylinders can be reduced and the storage space for the cylinders can be reduced. Therefore, the cost and size of the fire extinguishing equipment installed in the clean room can be reduced.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
An embodiment of a local fire extinguishing system for a clean room according to the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a configuration diagram showing a local fire extinguishing system for a clean room according to the present invention. FIG. 2 is a schematic diagram showing a local fire extinguishing system for a separated clean room. In addition, the space structure of a clean room attaches | subjects the same code | symbol to the same or equivalent part as FIG. 5, and abbreviate | omits description.
[0014]
Fires that break out in a clean room can be broadly classified into environmental fires that occur from the interior of the manufacturing equipment and equipment fires that occur from the manufacturing equipment. In the present embodiment, in the case of an environmental fire, the environmental fire is extinguished by dividing the clean room and extinguishing the fire part locally. That is, the clean room is separated from areas A to E as shown in FIG. Each of these areas has the aforementioned clean air circulation path. Therefore, a detection means for detecting a fire is installed in the air circulation path so that the fire can be detected and the location of the fire can be specified. In addition, a plurality of inert fire extinguishing gas supply ports mainly composed of an inert gas are installed in the clean room of each area. As a result, in the event of a fire, the worker identifies in which area the fire has occurred using the fire detection means, and moves the mobile fire extinguishing gas discharge means to the inert fire extinguishing gas supply port close to the relevant fire location. Can be connected and fire extinguisher locally. On the other hand, the apparatus fire is configured to extinguish the apparatus provided with a fire extinguishing facility inside the manufacturing apparatus.
[0015]
Here, the local fire extinguishing system of a clean room is demonstrated using FIG. The local fire extinguishing system includes an inert fire extinguishing gas piping unit 10 for supplying an inert fire extinguishing gas cylinder filled with an inert fire extinguishing gas whose main component is an inert gas, and a clean room 2 in a clean room which is branched into a plurality of pipe ends. It comprises an environmental fire extinguishing unit 12 that performs fire extinguishing inside, and an apparatus fire extinguishing unit 14 that extinguishes a manufacturing apparatus disposed in the clean room 2.
[0016]
The inert fire extinguishing gas piping unit 10 is an inert gas supply system that supplies inert fire extinguishing gas from a gas cylinder, which is a supply source of inert fire extinguishing gas, to an inert fire extinguishing gas connection port installed in a necessary place by dividing a clean room. A fire extinguishing gas pipe 16 is provided. The inert fire extinguishing gas pipe 16 is connected to a pipe pressurizing cylinder 18 via a pressure reducing valve 20a in the inert fire extinguishing gas pipe 16a, and the inside of the gas pipe is always kept under a constant pressure. This constant pressurization is to keep the inside of the inert fire extinguishing gas pipe 16 clean when the fire extinguishing system is not used.
[0017]
The inert fire extinguishing gas is stored in an inert fire extinguishing gas cylinder 22 connected to the end of the inert fire extinguishing gas pipe 16b. In the present embodiment, six inert fire extinguishing gas cylinders 22 are connected to the inert fire extinguishing gas pipe 16b via the pressure reducing valve 20b.
[0018]
A start switch 24 is connected to each inert fire extinguishing gas cylinder 22. In this case, in response to a signal from a control panel 26 described later in the event of a fire, the necessary number of inert fire extinguishing gas cylinders 22 are automatically opened to release the inert fire extinguishing gas into the inert fire extinguishing gas pipe 16. .
[0019]
The control panel 26 controls the number of the inert fire extinguishing gas cylinders 22 necessary for fire extinguishing. This receives a detection signal from the pressure detection means in the pipe installed in the inert fire extinguishing gas pipe 16 described later, and sends a start signal of the number of gas cylinders necessary for fire fighting to the start switch 24 based on this detection signal. It is.
[0020]
The environmental fire extinguishing units 12a and 12b are units that extinguish a fire that has occurred in the clean room 2 of the clean room from a location around the manufacturing apparatus. The environmental fire extinguishing unit 12 is provided for each area having a clean air circulation path by dividing a clean room as shown in FIG. In each of the divided areas A to E, a plurality of floor embedded boxes 30 serving as an inert gas supply port connected to the inert fire extinguishing gas pipe 16 are dotted.
[0021]
As shown in FIG. 3, the floor-embedded box 30 is openable and has a manual valve (environmental fire extinguishing valve) 32, an in-pipe pressure sensor 28, and a gas pipe connection port 33. The manual valve 32 normally closes the inert fire extinguishing gas pipe 16d and keeps the inside of the pipe under a constant pressure.
[0022]
As shown in FIG. 3, the mobile hose unit 34 that can be connected to the gas pipe connection port 33 and serves as a mobile fire extinguishing gas discharge means has a winding hose 34 a that is a fire extinguishing equipment mounted on a transport motorcycle. Move to the area quickly. A diffusion nozzle 34b is attached to the end of the winding hose 34a. A joint portion 34 c that can be connected to the gas pipe connection port 33 is installed at the other end portion. The in-pipe pressure sensor 28 provided in the floor-embedded box 30 detects a pressure increase in the gas pipe when the joint part 34c of the hose unit 34 is connected to the gas pipe connection port 33, and the control A pressure detection signal is sent to the panel 26.
Here, a plurality of the floor-embedded boxes 30 can be installed, for example, in a clean room with an interval of 15 meters on the basis of the maximum length of the winding hose 34a.
[0023]
On the other hand, the detection of fire in environmental fire extinguishing is detected using an ultra-sensitive sensor 36 which is a smoke detecting means. This super-sensitive sensor 36 is installed in a return space 7 where smoke is most easily detected when a fire occurs in a convection path in a clean room, and a plurality of small holes are formed in a tubular suction tube 35 as shown in FIG. By forming and sucking the inside of the tube, a light scattering type sensor is installed to detect smoke particles flowing in through this small hole. When the ultra-sensitive sensor 36 detects smoke particles, it sends a smoke detection signal to a central monitoring unit 38 (not shown). In addition, since the super-sensitive sensor 36 is arranged for each convection path of the divided area, the central monitoring unit 38 can identify the location where the fire has occurred in the area based on the detection signal. .
[0024]
According to such an environmental fire extinguishing configuration, when a fire occurs, the worker who has confirmed the fire detection signal by the central monitoring unit 38 identifies the fire occurrence point in the area, and the mobile hose unit 34 is located at the fire occurrence point. Transport. After the transportation, the joint part 34c is connected to the gas pipe connection port 33 of the floor-embedded box 30 closest to the fire occurrence point, and the fire is extinguished with the diffusion nozzle 34b facing the fire source. After the fire is extinguished, the release of the inert fire extinguishing gas can be stopped by the operator manually closing the diffusion nozzle 34b.
[0025]
In this embodiment, the environmental fire extinguishing units 12a and 12b have been described at two places. However, the connection place of the inert fire extinguishing gas supply port is not limited to this, and a plurality of places are provided at the required places of the clean room as shown in FIG. be able to. Since the movable hose unit 34 that can be connected to the supply port can be manually attached / detached / transferred, the mobile hose unit 34 can be moved to the connection port close to the location where the fire occurred to quickly extinguish the local fire in the clean room.
[0026]
Next, the apparatus fire extinguishing unit 14 will be described. In a manufacturing apparatus 37 that can be installed in a clean room and can be a source of fire, a fire extinguishing nozzle 39 and a heat sensor 40 are installed in the apparatus. The fire-extinguishing nozzle 39 is connected to the end of the inert fire-extinguishing gas pipe 16c, and discharges an inactive fire-extinguishing gas when a device fire occurs to extinguish the fire. The thermal sensor 40 senses the temperature in the manufacturing apparatus, and sends a fire occurrence signal to a later-described electromagnetic valve 42 when a fire in the manufacturing apparatus is detected.
[0027]
In addition, the inert fire extinguishing gas pipe 16c is provided with an electromagnetic valve 42 and then an emergency closing valve 44 from the end side connected to the manufacturing apparatus 37. The electromagnetic valve 42 normally closes the inert fire extinguishing gas pipe 16c and holds the inside of the inert fire extinguishing gas pipe 16 under a constant pressure. In the case of a fire, the solenoid valve 42 detects a fire occurrence signal of the heat sensor 40 and opens the inert fire extinguishing gas pipe 16c.
[0028]
An in-pipe pressure sensor 28 is provided between the manufacturing apparatus 37 for the inert fire extinguishing gas pipe 16 c and the electromagnetic valve 42. Normally, the electromagnetic valve 42 of the inert fire extinguishing gas pipe 16c is held under a constant pressure, and the manufacturing apparatus side is not pressurized with the electromagnetic valve 42 as a boundary. When a device fire occurs, the in-pipe pressure sensor 28 detects an increase in pressure in the pipe when the electromagnetic valve 42 is opened, and sends a pressure detection signal to the control panel 26.
[0029]
The emergency closing valve 44 forcibly closes the inert fire extinguishing gas pipe 16c. This is because inert fire extinguishing gas is released by controlling the supply amount necessary for equipment fire extinguishing. For example, fire in the manufacturing equipment is extinguished at the initial stage, and surplus inert fire extinguishing gas is still released. If it is, the inert fire extinguishing gas pipe 16c is artificially closed to stop the release of the inert fire extinguishing gas.
[0030]
In the configuration of the apparatus fire extinguishing unit 14, a plurality of manufacturing apparatuses 37 installed in the clean room can be installed by branching the inert fire extinguishing gas pipe 16. Further, the control panel 26 that detects the detection signal of the thermal sensor 40 in the manufacturing apparatus in which the fire has occurred sets the amount of inert fire extinguishing gas necessary for extinguishing each manufacturing apparatus 37 based on the detection signal in advance. In addition, it is possible to control the amount of inert fire extinguishing gas necessary for extinguishing the apparatus. In addition, although this embodiment demonstrated the fire extinguishing of the manufacturing apparatus, the object of an apparatus fire extinguishing is not restricted to this, For example, it can apply also to the machine, apparatus, installation, etc. which are arrange | positioned in a clean room.
[0031]
In addition, since the inert fire extinguishing gas used for the environmental fire fighting unit 12 and the apparatus fire fighting unit 14 shares the same inert fire extinguishing gas cylinder 22 via the inert fire extinguishing gas pipe 16, each fire extinguishing equipment has not been used so far. The number of cylinders can be reduced as compared with the configuration in which active fire extinguishing gas cylinders are provided. Accordingly, the storage space for the cylinder can be reduced.
[0032]
The fire extinguishing method of the local fire extinguishing system of the clean room configured as described above will be described with reference to the flowchart shown in FIG. 4 for each of the environmental fire extinguishing and the apparatus fire extinguishing.
Explain the environmental fire extinguishing of fire that occurred in the area around the manufacturing equipment in the clean room. The fire in the clean room is detected by the ultrasensitive sensor 36 provided in the return space 7 of the air circulation path (step 101). The detection signal is sent to the central monitoring unit 38, and the worker identifies the location of the fire in the area based on the notification displayed by the central monitoring unit 38 (step 102). The worker transports the mobile hose unit 34 waiting near the location of the fire to the site of occurrence (step 103). The joint part 34c of the hose unit 34 is connected to the floor embedding box 30 installed on the floor surface in the room closest to the fire occurrence location, and the environmental fire extinguishing valve (manual valve 32) is opened (step 104). Along with the valve opening, the in-pipe pressure sensor 28 detects an increase in pressure (step 105). Based on the detection signal from the in-pipe pressure sensor 28, the control panel 26 instructs the start switch 24 to execute an all cylinder start command (step 106). The start switch 24 opens the valve of the all inert fire extinguishing gas cylinder 22 (step 107). An operator directs the diffusion nozzle 34b of the hose unit 34 toward the source of the fire and releases an inert fire extinguishing gas to extinguish the fire (step 108). After the fire extinguishing is confirmed, the release of the inert fire extinguishing gas is stopped by closing the diffusion nozzle 34b. Even if the inert fire extinguishing gas remains in the cylinder, the inert fire extinguishing gas cylinder 22 can be used again by filling it.
[0033]
Next, apparatus fire extinguishing will be described. The fire generated inside the manufacturing apparatus installed in the clean room is detected by the heat sensor 40 installed in the manufacturing apparatus (step 109). The solenoid valve 42 of the inert fire extinguishing gas pipe connected to the manufacturing apparatus is opened by the fire detection signal of the thermal sensor 40 (step 110). Along with the valve opening, the in-pipe pressure sensor 28 detects an increase in pressure inside the inert fire extinguishing gas pipe 16 (step 111). The control panel 26 that has received the pressure detection signal from the in-pipe pressure sensor 28 identifies the corresponding manufacturing apparatus 37 in the clean room based on the detection signal (step 112). The control panel 26 instructs the start switch 24 for start signals corresponding to the number of cylinders necessary for extinguishing fires designated in advance in the manufacturing apparatus 37 (step 113). The valve of the corresponding inert fire extinguishing gas cylinder 22 is opened from the start switch 24 (step 114). Simultaneously with the opening of the valve, the inert fire extinguishing gas is discharged from the fire extinguishing nozzle 39 installed in the production apparatus 37 through the inert fire extinguishing gas pipe 16 and extinguished (step 115). After confirming that the manufacturing device 37 is extinguished, the emergency shutoff valve 44 is manually closed to stop the release of the inert fire extinguishing gas. Normally, the inert fire extinguishing gas filled in the gas cylinder is released until it becomes empty.
[0034]
【The invention's effect】
As described above, according to the present invention, in order to limit the inert fire extinguishing gas by limiting the discharge range of the inert fire extinguishing gas by limiting the discharge range of the inert fire extinguishing gas, the amount of the inert fire extinguishing gas is reduced. Can be reduced. Therefore, the restoration of the clean room after fire extinguishing can be greatly shortened.
[0035]
Moreover, environmental fire extinguishing and equipment fire extinguishing are branched by inert fire extinguishing gas piping, and the inert fire extinguishing gas supply source is shared, so the number of inert fire extinguishing gas cylinders can be reduced and the storage space for inert fire extinguishing gas cylinders is also small. can do. In addition, the cost and size of the fire extinguishing equipment can be reduced.
[Brief description of the drawings]
FIG. 1 is a diagram showing a configuration of a local fire extinguishing system for a clean room according to an embodiment of the present invention.
FIG. 2 is a schematic view showing a local fire extinguishing system of a separated clean room.
FIG. 3 is a diagram showing an outline of a hose unit according to an embodiment of the present invention.
FIG. 4 is a flowchart illustrating a fire extinguishing method according to an embodiment of the present invention.
FIG. 5 is a diagram illustrating an outline of a space configuration of a clean room.
[Explanation of symbols]
1 .... clean room facilities, 2 .... clean room, 3 .... FFU (fan filter unit), 4 ....... ceiling space, 5 .... grating surface, 6 .... underfloor chamber, 7 .... ... Return space, 10 ......... Inert fire extinguishing gas piping unit, 12, 12a, 12b ......... Environmental fire extinguishing unit, 14 ......... Device fire extinguishing unit, 16 ......... Inert fire extinguishing gas pipe, 18 ......... Piping Pressurization cylinders, 20a, 20b ......... pressure reducing valves, 22 ......... inert fire extinguishing gas cylinders, 24 ...... start switches, 26 ......... control panels, 28 ......... pressure sensors in piping, 30 ......... floors Embedded box, 32 ......... Manual valve (fire extinguishing valve for environment), 33 ......... Gas pipe connection port, 34 ......... Moving hose unit, 35 ......... Suction tube, 36 ...... Ultra-sensitive detection Equipment, 37 ... manufacturing equipment, 38 ... Central monitoring unit, 39 ......... extinguishing nozzle, 40 ......... thermal sensor, 42 ......... solenoid valve, 44 ......... emergency closing valve.

Claims (5)

Detection means for identifying the area corresponding to the fire spot that occurred in the sorted clean room;
A plurality of inert fire extinguishing gas supply ports are scattered at the important points of the separated clean room,
Mobile fire extinguishing gas discharge means connectable to the inert fire extinguishing gas supply port close to the fire spot based on the detection means,
A local fire extinguishing system for a clean room characterized by enabling local fire extinguishing. The mobile fire extinguishing gas discharge means is
The local fire extinguishing system for a clean room according to claim 1, wherein the inert fire extinguishing gas supply port is removable and transportable. A fire extinguishing unit that detects and extinguishes fire inside the manufacturing equipment installed in the clean room;
An environmental fire extinguishing unit that detects and locally extinguishes fire in the surrounding area of the manufacturing apparatus; and an inert fire extinguishing gas piping unit that is connected to the apparatus fire extinguishing unit and connected to the environmental fire extinguishing unit to control supply of inert fire extinguishing gas. And
A local fire extinguishing system for a clean room, wherein the apparatus fire extinguishing unit and the environmental fire extinguishing unit share an inert fire extinguishing gas cylinder connected to the inert fire extinguishing gas piping unit. The inert fire extinguishing gas piping unit is
The local fire extinguishing system for a clean room according to claim 3, wherein the discharge amount of the inert fire extinguishing gas is controlled based on a detection signal from the apparatus fire extinguishing unit. The inert fire extinguishing gas piping unit is
4. The local fire extinguishing system for a clean room according to claim 3, further comprising piping pressurizing means for holding the inside of the gas pipe under constant pressure.

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