JP2005024478A - Cleanliness measuring instrument, and cleanliness measuring method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve a problem wherein an error caused by "a lens aberration" is generated when converging lights by such a lens or the like as used in an area sensor camera for acquiring the lights collected by the lens or the like having two-dimensional spreading by a picture element unit, and a problem wherein measuring precision is limited as a linear image is focused as a curved image, as a specific example of the "lens aberration", the ratio between respective parts in an actual object is different from the ratio between respective parts in the focused image, or as likely, since generation of a phenomenon that an image focused in an imaging element inside a CCD camera is different from the actual object is well known generally. <P>SOLUTION: This cleanliness measuring instrument for acquiring information as to a deposit contained in a collected liquid collected after cleaning a cleaned object, by image processing is provided with a line sensor camera 15 as one example of an imaging means for photographing the deposit by scanning it. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a cleanliness measuring apparatus and a cleanliness measuring method for acquiring information on deposits contained in a collected liquid collected after washing an object to be cleaned by image processing.

Conventionally, the metal dust, glass powder and other deposits (hereinafter also referred to as “particles”) adhering to the surface of the object to be cleaned such as machined products (metal, resin, glass, etc.) are washed away with washing water. There are a cleanliness measuring device and a cleanliness measuring method for measuring information (eg, size, shape, number, etc.) on the deposits from the collected liquid.
As an example of such a conventional cleanliness measuring apparatus and cleanliness measuring method, there is one as shown in Patent Document 1 below.
The cleanliness measuring apparatus and the cleanliness measuring method disclosed in Patent Document 1 photograph a deposit using a CCD camera, and perform image processing on the photographed deposit, thereby performing the deposit processing. The degree of cleanliness of the machined product or the like is measured by measuring information related to the above.
In general, a CCD camera is an example of an area sensor camera, and its principle is that light collected by a lens is acquired in units of finely divided pixels.
In other words, conventionally, information on the deposit is obtained by obtaining an image of a subject (here, the deposit) in units of pixels using the area sensor camera.

JP-A-11-218531

However, there is a problem that the measurement accuracy is difficult to improve due to the characteristics peculiar to the area sensor camera as described below when acquiring information on the deposit using the area sensor camera.
As described above, the area sensor camera acquires light collected by a lens or the like having a two-dimensional extent in units of pixels.
It is known that when light is collected by such a lens or the like, an error due to “lens aberration” (also referred to as “distortion”) occurs.
It is widely known that a phenomenon in which the shape of an image formed on an image sensor in a CCD camera is different from the actual shape occurs, and the main cause is the “lens aberration”.
For example, as a specific example of the error due to the “lens aberration”, what is supposed to be a straight line is formed as a curved image, or the ratio of each part of the actual object of the subject to the ratio of each part of the imaged image is There are different problems.
Due to such an error, there is a limit to the measurement accuracy when information on the attached matter is measured based on an image photographed by an area sensor camera.
In addition, for example, particularly when a substantially circular lens is used, an error due to the aberration of the image of the outer edge portion (near the outer circumference) of the image formed on the image sensor is larger than the image of the center portion, etc. There is a problem.
In addition, for example, there is a problem that an image that should originally be expressed as a continuous straight line or curve is formed as a discontinuous pixel unit of the image sensor due to the aberration.
Therefore, conventionally, correction was performed using software for making the above discontinuities continuous, but since this correction work is performed in units of pixels, there is a problem that it takes a lot of time for the processing.

Furthermore, if the number of pixels of the area sensor camera is increased in order to improve the image quality, problems such as taking much longer time for the continuation process occur. Therefore, the number of pixels of the area sensor camera is easily increased. I couldn't.
Moreover, even if it is possible to use an area sensor camera with a high pixel count, such a high pixel count area sensor camera is expensive, which increases the production cost of the cleanliness measuring device. is there.
Furthermore, since the area sensor camera cannot sufficiently exhibit its performance when acquiring an image of a moving subject, it continuously conveys a plurality of deposits collected after cleaning a plurality of objects to be cleaned. It can be said that it is impossible to continuously photograph the deposit on the conveyor by placing it on and operating the conveyor.
That is, when an area sensor camera is used, it is impossible to accurately measure information on the deposit due to an error due to the aberration and a limitation on the number of pixels.
Therefore, the present invention has been made in view of the above circumstances, and an object of the present invention is to be able to acquire information on the deposit with higher accuracy without being limited by an error due to aberration or the number of pixels. A cleanliness measuring device and a cleanliness measuring method are provided.

  The problem to be solved by the present invention is as described above. Next, means for solving the problem will be described.

In Claim 1, in the cleanliness measuring apparatus which acquires the information about the deposit contained in the collection liquid collected after washing the to-be-washed object by image processing,
The apparatus is configured as a cleanliness measuring apparatus including an imaging unit that takes an image by scanning the attached matter.

  In Claim 2, it is comprised as a cleanliness measuring apparatus which comprises the weight measuring device for measuring the weight of the said deposit | attachment further.

  According to a third aspect of the present invention, the apparatus is configured as a cleanliness measuring device in which the information on the deposit includes the sharpness of the deposit.

  According to a fourth aspect of the present invention, the scanning is configured as a cleanliness measuring device that is performed by changing the position of either the imaging unit or the deposit.

In claim 5, in the cleanliness measuring method for acquiring information about the deposits contained in the collected liquid collected after washing the object to be cleaned by image processing,
An imaging step by an imaging means for imaging by scanning the attached matter;
A binarization step of binarizing the image after calculating an average luminance value of the image captured in the imaging step;
A diameter calculating step of calculating the diameter of the deposit based on the binarized image in the binarizing step;
It is comprised as a cleanliness measuring method characterized by comprising.

In the present invention, the pixel of the image binarized in the binarization step is further provided.
After recognizing pixels that are adjacent to each other and have the same information as a set,
The cleanliness measuring method includes a total number calculating step of calculating the total number of pixel sets recognized as the one set.

  Further, the present invention is configured as a cleanliness measuring method including a classification step of classifying the deposits based on a predetermined method.

  As effects of the present invention, the following effects can be obtained.

Since it comprised as shown in Claim 1, the cleanliness measuring apparatus of this invention catches a to-be-photographed object with a line | wire (line) while scanning, Therefore It is two-dimensionally like an area sensor camera, such as the conventional CCD camera ( Unlike in the case of capturing (in terms of surface), errors in principle due to lens aberration and the like are unlikely to occur.
Therefore, the cleanliness measuring apparatus of the present invention can acquire information (for example, size, shape, number, etc.) related to the deposit with higher accuracy than the conventional one.
Specifically, since an error in principle due to lens aberration or the like is unlikely to occur, an image that should originally be expressed as a continuous straight line or curve, which was a problem in the prior art, is captured due to lens aberration. It is possible to solve the problem of forming an image as a discontinuous pixel unit of the element.
That is, since the shape of the original deposit can be acquired more accurately as an image, information on the deposit such as the size, shape, and number can be acquired more accurately.
Furthermore, since it is possible to simplify the correction process using software for continuation of discontinuous straight lines or curves, which was necessary in the past, the measurement time for measuring cleanliness can be shortened. It becomes possible.
In addition, the imaging means of the present invention is suitable for photographing a moving subject as compared to a conventional area sensor camera such as a CCD camera, so that in the future, a plurality of deposits may be placed on a conveyor or the like. It is also possible to shoot continuously by operating.

  Since it comprised as shown in Claim 2, the cleanliness measuring device of this invention is the weight of a deposit | attachment in addition to a "size", a "shape", and a "number" with high precision compared with the conventional thing. Therefore, it is possible to acquire more information on the attached matter, and more detailed information on the attached matter can be measured.

  Since it comprised as shown in Claim 3, since the cleanliness measuring apparatus of this invention can measure the sharpness of a deposit | attachment, it is a user (user) who wants to measure especially the sharpness of a deposit | attachment. ) Can be met.

  Since it comprised as shown in Claim 4, when the said scanning is performed by changing the position of any one of the said imaging means or the said deposit | attachment, an imaging means and the said deposit | attachment perform relative motion. Therefore, as a result, the imaging unit can easily scan the deposit.

Since the cleanliness measuring method of the present invention is configured as shown in the fifth aspect, the subject is captured by a line while scanning as in the case of the cleanliness measuring device. Unlike the case of capturing two-dimensionally (on the surface) like an area sensor camera, an error in principle due to lens aberration or the like is unlikely to occur.
Therefore, the cleanliness measuring method of the present invention can acquire information (for example, size, shape, number, etc.) relating to the deposit with higher accuracy than the conventional method.
Specifically, since an error in principle due to lens aberration or the like is unlikely to occur, an image that should originally be expressed as a continuous straight line or curve, which was a problem in the prior art, is captured due to lens aberration. It is possible to solve the problem of forming an image as a discontinuous pixel unit of the element.
That is, since the shape of the original deposit can be acquired more accurately as an image, information on the deposit such as the size, shape, and number can be acquired more accurately.
Furthermore, since it is possible to simplify the correction process using software for continuation of discontinuous straight lines or curves, which has been necessary in the past, the measurement time for measuring cleanliness can be shortened. It becomes possible.

  Since it comprised as shown in Claim 6, for example, if the deposit | attachment is displayed in black in the binarized image data, the black pixels will be considered as one set, and the total number of the set It is possible to easily calculate the total number of deposits (total number calculation step).

  Since it comprised as shown in Claim 7, it becomes possible to analyze in detail the deposit | attachment which adhered to the to-be-cleaned object by classifying the deposit | attachment.

Hereinafter, the best mode for carrying out the present invention will be described with reference to the accompanying drawings for understanding of the present invention. The following embodiments are examples embodying the present invention, and are not of a nature that limits the technical scope of the present invention.
1 is a front view of a cleanliness measuring apparatus according to the present invention, FIG. 2 is a plan view and a side view of the cleanliness measuring apparatus of FIG. 1, and FIG. 3 is an operation (work) procedure or operation relating to the cleanliness measuring apparatus of FIG. FIG. 4 is a flowchart showing the operation procedure or operation procedure for confirming the shape of the particle image with respect to the cleanliness measuring apparatus of FIG. 1, and FIG. 5 is a calculation process of the detected particles installed in the CPU 5 ′. FIG. 6 is a schematic diagram showing the relationship between the line sensor camera 15 and the deposits.

As shown in FIGS. 1 to 2, the cleanliness measuring device 1 is provided with a display (also referred to as a monitor) 3 on one side of a table 2, and an operation panel 4 is installed just below the display 3. A personal computer main body (PC main body) 5 is housed under the base 2 below the display 3.
2A is a plan view of the cleanliness measuring device, and FIG. 2B is a side view of the cleanliness measuring device.
A suction port 6 is opened at one corner of the base 2 opposite to the display 3, and a filter (also called filter paper) F can be set on the suction port 6.
And, on the suction port 6, deposits such as metal scraps and glass powder (hereinafter also referred to as “particles”) adhering to the surface of the object to be cleaned such as machined products (made of metal, resin, glass, etc.) A flask 7 as an injection container for a collected liquid (also referred to as a sampling liquid) collected after washing with washing water is erected with the lower end outlet 7a facing downward.
A cap 10 is detachably fitted to the inlet 7b at the upper end of the flask 7. A collection liquid receiving tank 17 is disposed below the base 2 of the suction port 6, and a suction pump (also referred to as a vacuum pump) 8 is installed below the collection tank 17, and the suction port 6 is connected to the suction port 6 via a tank (not shown). One end is connected. An opening / closing door 9 for taking out the tank is provided so that the collected liquid accumulated in the tank 17 can be discarded. Various operation buttons 4 a are arranged on the operation panel 4.

A storage case 11 having an opening (not shown) with an opening / closing door 11a in the lower portion is installed near the center of the table 2 and a weight measuring device for measuring the weight of the deposit in the storage case 11. (In this example, an electronic balance) 12 is provided.
A cylindrical mounting table (also referred to as a weighing pan) 13 of a trapezoidal (circular in this example) filter F is installed on the weight measuring device 12.
A heater 14 as a dryer is incorporated in the vicinity of the upper surface (also referred to as a weighing pan) 13 a of the mounting table 13, and the filter F mounted on the weighing pan 13 a on the upper surface of the mounting table 13 is moved by the heater 14. Heat to dry.
When the filter F is dried, the weight is measured by the weight measuring device 12.

In the storage case 11, the line sensor camera 15 is disposed downward above the mounting table 13.
The line sensor camera 15 is also referred to as a “line scan camera”, and is an example of an imaging unit that captures an image by scanning a deposit that is a subject.
Further, the line sensor camera 15 is suspended from a scanning unit 16a of a scanning mechanism (also referred to as an xy table motor) 16 that scans in the horizontal direction (x direction) and the vertical direction (y direction) of the table 2. By providing a pulse motor (not shown) in the scanning unit 16a, the scanning unit 16a moves (scans) through the pulse motor so as to cover the filter F on the mounting table 13 as a whole. It becomes possible to do.

In addition, since the line sensor camera 15 captures the subject as a line while scanning, unlike a conventional area sensor camera such as a CCD camera, the line sensor camera 15 performs lens aberration and the like. The principle error due to is difficult to occur.
Therefore, it is possible to acquire information (for example, size, shape, number, etc.) related to the deposit with higher accuracy based on the image captured by the line sensor camera 15.
Specifically, since an error in principle due to lens aberration or the like is unlikely to occur, an image that should originally be expressed as a continuous straight line or curve, which was a problem in the prior art, is captured due to lens aberration. It is possible to solve the problem of forming an image as a discontinuous pixel unit of the element.
That is, since the shape of the original deposit can be acquired more accurately as an image, information on the deposit such as the size, shape, and number can be acquired more accurately.
Furthermore, since it is possible to simplify the correction process using software for continuation of discontinuous straight lines or curves, which was necessary in the past, the measurement time for measuring cleanliness can be shortened. It becomes possible.
Further, the line sensor 15 is suitable for photographing a moving subject as compared with an area sensor camera such as a CCD camera. Therefore, the line sensor 15 is continuously operated by placing a plurality of deposits on a conveyor or the like in the future. It is also possible to take pictures.

Further, in the above description, the configuration for scanning the deposit by changing the position of the line sensor camera 15 is described. As a result, the line sensor camera 15 may relatively scan the deposit.
That is, when the position of the line sensor camera 15 is changed as shown schematically in the plan view of the line sensor camera 15 and the deposit 100 in FIG. By moving the camera 15 in the direction of the solid line arrow, it is possible to scan the deposit. That is, the scanning unit 16a is moved in the direction of the solid line arrow.
On the other hand, when changing the position of the deposit 100 side, for example, the mounting table 13 that supports the weighing pan 13a on which the deposit 100 is placed is moved in the direction of the dotted arrow.
As a result, similarly to the case where the line sensor camera 15 moves in the direction of the solid line arrow, the line sensor camera 15 can relatively scan the deposit, and the line sensor camera 15 can move the deposit. Can be taken.
Of course, the line sensor camera 15 and the mounting table 13 may be operated together.
As a configuration for moving the mounting table 13 in the direction of the dotted arrow, for example, a wheel using a stepping motor or the like as a driving source is provided at the lower part of the mounting table 13, and a rail or the like is further provided on the table 2. The wheel may move on the rail.

The image (image) of the deposit on the filter F photographed by the line sensor camera 15 is a memory (not shown) built in the PC main body 5 as the image is operated by the user as will be described later. Is remembered.
The stored images can be displayed on the display 3 and viewed. However, in the PC main body 5, the maximum diameter and area are detected as the size of each deposit and are attached to one side of the display 3. Displayed along with the kimono image.
In this example, in addition to the scanning control of the scanning mechanism 16 of the line sensor camera 15 on the PC main body 5, after detecting the size (maximum diameter) of all the deposits, they are displayed side by side in descending order of numerical values. Arithmetic processing means (software: FIG. 5), which will be described later, is installed to automatically calculate and display the number of deposits for a predetermined size (maximum diameter) or more.

Next, a scanning procedure for the cleanliness measuring apparatus 1 configured as described above will be described with reference to the drawings.

  As shown in FIG. 3, when the software is started by turning on the main switch 4a of the operation panel 4 of the PC main body 5, the following operation (work) procedure or operation procedure is sequentially displayed on the display 3. The

(Step S10)
When the software starts, the filter paper (filter F) is measured on the display 3. The message “Put on the weighing pan (13a) and press the OK button (on the operation panel 4)” is displayed.

(Step S20)
The display 3 is measuring the filter paper weight. Please wait for a while.
[During this time, after the filter paper is dried by the heater 14, the weight of the filter paper is measured by the weight measuring device 12. ]
(Step S30)
Display 3 has finished measuring the filter paper weight. It is displayed that the filter paper is set in the flask (the lower end outlet 7a (suction port 6) of 7 and the sampling solution is injected).

(Step S40)
When the sampling liquid has been injected, the display 3 indicates that the OK button (4a) (on the operation panel 4) should be pressed.

(Step S50)
Display 3 is filtering. Please wait for a while.

(Step S60)
Display 3 has been filtered. The message “Load filter paper on the weighing pan (13a) and press the OK button (4a) on the operation panel 4” is displayed.

(Step S70)
Display 3 is measuring. Please wait for a while.

  Processing during this measurement will be described.

After the filter paper is dried by the heater 14, the weight of the filter paper is measured by the weight measuring device 12.
Thereafter, the adhering object is photographed by scanning the line sensor camera 15 with the scanning mechanism 16 (imaging process).
The image data photographed in the photographing process is stored in, for example, a rewritable RAM provided in the PC main body 5 described later.
After the photographing step, an average luminance value of an image photographed by the line sensor camera 15 is calculated, and a binarization process is performed to divide the image into two colors such as “white” or “black” (binarization step). ).
In the binarization step, for example, a CPU 5 ′ described later may perform the image data stored in the RAM.
Subsequently, the diameter of the deposit is calculated based on the image data binarized in the binarization step (diameter calculation step).
The diameter mentioned here includes the meaning of a general circle, and the maximum diameter (the distance between the end portions farthest from each other on the deposit) and the minimum diameter (the closest to each other on the deposit) as described above. It also includes the meaning of the distance between the end portions, and means the overall size of the deposit.
In this diameter calculation step, for example, the following processing may be specifically performed.

The CPU 5 ′ recognizes pixels adjacent to each other and having the same information as one set regarding the image data binarized in the binarization step.
That is, for example, in the binarized image data, if adjacent pixels have the same information such as “black”, the pixels having the information of “black” are regarded as one set. Do what you consider.
By this processing, for example, if the deposit is displayed in black in the binarized image data, the black pixels are regarded as one set, and the CPU 5 ′ determines the diameter of the set as the number of pixels. It is possible to easily calculate the diameter and the total number of the deposits (total number calculation step) by calculating the total number of the aggregates.

Further, the CPU 5 ′ may classify the diameter of the deposit calculated in the above based on a predetermined method (classification step).
Here, specific examples of the predetermined method include the following cases.
For example, a rule (method) classified in stages for each diameter is predetermined by the user of the cleanliness measuring device, and the predetermined method is the RAM of the PC main body 5 of the cleanliness measuring device or the like. It is possible to set and store in advance.
In this case, the CPU 5 'determines whether the measured size of the diameter of the attached matter is included in the above classification, and classifies the attached matter by storing the determination result in a RAM or the like. good.
By classifying in this way, it becomes possible to analyze in detail the adhered matter that has adhered to the object to be cleaned.

Moreover, you may include the sharpness of this deposit | attachment in the information regarding a deposit | attachment.
The sharpness here is calculated by, for example, the magnification (ratio) of the length in the major axis direction and the length in the minor axis direction based on the size of the deposit measured by the number of pixels in the above. May be. In addition, the sharpness may be determined by pattern recognition or the like.
Thus, by calculating the sharpness of the deposit, it is possible to meet the demand of the user (user) who wants to measure especially the sharpness of the deposit.

(Step S80)
For example, the measurement result is displayed on the display 3 as follows.
Measurement is complete. The total weight of particles (attachments) is 12 mg. The maximum diameter of the largest particle = 1.0 mm * area = 1.9 [square millimeter]. Do you want to save the measurement data? Displayed when selected with the yes / no button. (Assuming the yes button is pressed.)

(Step S90 → S100)
Display 3 is saving data. Please wait for a while.

(Step S110 → S120)
Do you check the shape of the particles on the display 3? Displayed when selected with the yes / no button. (Assuming the yes button is pressed.)

(Step S130)
Since the image of the particles (attachment) and the maximum diameter displayed on the display 3 by the line sensor camera 15 are displayed, the shape of the attachment can be confirmed. The operation procedure for confirming the shape of the particle image will be described in detail below.

(Step S210 → S220)
As shown in FIG. 4, since it is requested to select whether or not to confirm the particle shape with an image in step S120, whether or not to monitor the image is selected with a yes / no button. (Assuming the yes button is pressed.)
(Step S230)
The display 3 displays that the particle to be viewed is selected on the above measurement data by a mouse operation, and clicks whether it is stored (filed) or newly input.

(Step S240)
The display 3 displays a yes / no button as to whether or not to end. (Assuming the no button was pressed)
(Steps S250 → S260 → S270)
When the file is selected from among the file and the input, the filed image is displayed. When the file is not filed, when the input is selected, the line sensor camera 15 moves the scanning mechanism 16 to the position of the selected particle. The line sensor camera 15 displays an image being shot (in this state, the image is not stored in the memory). The particle image projected by the line sensor camera 15 can be enlarged or returned to its original size. In addition, based on particle measurement data, the particle size is set to a maximum diameter of 0. If it is set to ○ mm (for example, 0.1mm) or more, the number corresponding to the set particle is displayed, the number of particles for each maximum diameter is displayed, and the relationship between the maximum diameter and the number is graphed. Can be displayed, and the displayed contents can be printed.

  FIG. 5 is a flowchart showing an embodiment of the detection particle calculation processing means (software) installed in the CPU 5 '.

  As shown in FIG. 4, this flowchart relates to detection of the maximum particle, calculation of the maximum diameter, and calculation of the total particle weight.

(1)
The weight A of only the filter F measured by the electronic balance 12 is stored in the memory.

(2)
Next, the total weight B of the filter F and the particles (attachments) measured by the electronic balance 12 is stored in the memory.

(3)
The weights A and B are sent to the CPU 5 ′ as weight data, and B−A = total particle weight C is calculated and displayed on the display 3.

(4)
The line sensor camera 15 is moved by the operation of the xy table motor, and the particles on the filter F are sequentially photographed in a line.

(5)
The particles thus photographed are taken into the CPU 5 ′ as image information in the order of photographing.

(6)
The image information of each particle captured by the CPU 5 ′ is converted into discrimination data based on a discrimination criterion composed of the color tone and outline of the particle set in advance according to the object to be cleaned.

(7)
The image data of each particle is analyzed into pixels (dots), and the number of pixels is read. At this time, the number of pixels arranged in a straight line is read in all directions, and the maximum number of pixels among them is calculated as the maximum diameter of each particle. In this example, the number of pixels constituting each particle is further increased. Is also calculated, and this is calculated as the area of the particle and is processed for each particle. In the present example, the maximum particle diameter is calculated by 0.03 mm × maximum number of pixels, and the area is calculated by (0.03 mm) 2 × number of pixels.

(8)
The particles are arranged in order from the largest based on the maximum diameter of each particle, and the order, maximum diameter, and area are simultaneously displayed on the display 3. If the order of particles (for example, No. 2) is selected with the cursor on the keyboard, an image of the particles of that order is also displayed on the display 3.

  Although illustration is omitted, the user can input the allowable maximum diameter and allowable total weight of adhering matter (particles) and the allowable number exceeding the predetermined diameter from the keyboard of the PC main body 5 to the CPU 5 ′. Includes whether or not the maximum diameter in the particle exceeds the allowable maximum diameter, and whether or not the total weight of the particle exceeds the allowable total weight, or in addition, the number of particles having a predetermined diameter or more in the particle is allowed. Whether or not the number exceeds the number can be compared with the data of each particle displayed on the display 3 described above, and the pass / fail determination of the cleaning degree can be automatically made immediately. In this case, the flow charter is provided with a means to compare each particle data measured against multiple types of pass / fail data arbitrarily input by the user, and passes if all the pass / fail data is cleared. If at least one pass / fail data is not cleared, it may be displayed on the display 3 as a failure.

  Although one embodiment of the cleanliness measuring device of the present invention has been described above, the present invention can be implemented or used as follows.

(A)
Preliminary cleanliness data (for example, ◯ or less particles having a maximum diameter of 0.00 mm or less) is input to the PC body 5 of the cleanliness measuring apparatus 1 of the present invention, and the standard cleanliness is obtained. It is possible to immediately determine whether or not

(B)
For example, after a processed part is cleaned by a cleaning apparatus dedicated to the part, the cleaned part is carefully cleaned, and the cleaning water after the cleaning is collected and measured with the cleanliness measuring apparatus 1 of the present invention. It can also be determined whether or not the cleaning state has been reached.

The front view of the cleanliness measuring device concerning the present invention. The top view and side view of the cleanliness measuring apparatus of FIG. The flowchart which shows the operation (work) procedure or operation | movement procedure regarding the cleanliness measuring apparatus of FIG. The flowchart which shows the operation procedure or operation | movement procedure about confirmation of the shape by the image of the particle | grain regarding the cleanliness measuring apparatus of FIG. The flowchart which shows one Example of the calculation processing means (software) of the detection particle installed in CPU5 '. The schematic diagram which showed the relationship between the line sensor camera 15 and a deposit | attachment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Cleanliness measuring device 3 Display 4 Operation panel 4a Various buttons on operation panel 4 5 PC main body 5 'CPU
7 Flask 12 Weighing instrument (electronic balance)
13 Mounting table 13a Weighing pan 14 Heater 15 Line sensor camera (line scan camera)
F filter

Claims (7)

In a cleanliness measuring device that acquires information about deposits contained in a collected liquid collected after washing an object to be cleaned by image processing,
An apparatus for measuring cleanliness, comprising imaging means for photographing by scanning the attached matter.   The cleanliness measuring device according to claim 1, further comprising a weight measuring device for measuring the weight of the deposit.   The cleanliness measuring apparatus according to claim 1, wherein the information about the deposit includes the sharpness of the deposit.   The cleanliness measuring apparatus according to any one of claims 1 to 3, wherein the scanning is performed by changing a position of either the imaging unit or the deposit. In the cleanliness measurement method for acquiring information about deposits contained in the collected liquid collected after washing the object to be cleaned by image processing,
An imaging step by an imaging means for imaging by scanning the attached matter;
A binarization step of binarizing the image after calculating an average luminance value of the image captured in the imaging step;
A diameter calculating step of calculating the diameter of the deposit based on the binarized image in the binarizing step;
A cleanliness measuring method comprising: Furthermore, regarding the pixels of the image binarized in the binarization step,
After recognizing pixels that are adjacent to each other and have the same information as a set,
The cleanliness measuring method according to claim 5, further comprising a total number calculating step of calculating a total number of pixel sets recognized as the one set.   Furthermore, the cleanliness measuring method in any one of Claim 5 or Claim 6 provided with the classification | category process which classifies a deposit | attachment based on a predetermined method.

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