JP2005003243A - Blowout air adjusting mechanism for fan filter unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a maintenance-free fan filter unit capable of adjusting a flow rate without causing the failure of expensive inverter and electric damper which need much labor-hour for maintenance as they are products being comparatively often failed, and the probability of failure is high as a number of products are used. <P>SOLUTION: In this fan filter unit 1 having a fan 2 at its upper part and a filter 3 at its lower part in a state of being surrounded by a casing 4, a blowout air adjusting mechanism constituting an outflow amount adjustable-air outflow part 15 for flowing out a part of the air on an upstream side of the filter, is mounted. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a blowout air volume adjusting mechanism of a fan filter unit (FFU).
[0002]
[Prior art]
For example, as shown in FIG. 4, the fan filter unit a is a device in which a fan b is enclosed in an upper portion and a filter c is enclosed in a lower portion by a casing d. A guide plate e for uniformly applying air to the surface is provided. For example, as shown in FIG. 5, a large number of such fan filter units a are installed vertically and horizontally on one surface of the ceiling g of the clean room f, and the air in the ceiling space h is passed through the filter c to be cleaned, so that the lower room It blows out to f. The air blown from the fan filter unit a into the room f descends vertically through the room f, flows into the underfloor space j through the grating floor i, returns to the ceiling space h through the reflux path k, and again becomes a fan. It passes through the filter unit a and is blown into the room f as clean air.
[0003]
At this time, it is important that the clean air blown out from the fan filter unit a flows vertically in the room f from above to below in a laminar flow state. For this purpose, the fan filter unit a It is necessary to make the blowing air volume for each unit installed on one surface of the ceiling g constant.
[0004]
As a method for adjusting the blown air volume of the fan filter unit as described above, a method is known in which the fan is configured to be inverter-controlled and the air volume is adjusted by electrically changing the rotational speed of the fan. (For example, refer to Patent Document 1.)
[0005]
[Patent Document 1]
JP-A-8-89747 (page 5)
[0006]
On the other hand, as another method for obtaining a laminar vertical flow as described above, a shutter is provided on the grating floor 8 to adjust the air flow.
[0007]
[Problems to be solved by the invention]
If the fan air flow rate of the fan filter unit is adjusted by inverter control, the cost of the inverter provided for each of the many fan filter units is very high, and it is necessary to install a filter to block noise from the inverter. If it occurs, there is a problem that it is more costly.
[0008]
Also, since inverters are products with relatively many failures, providing a large number of fan filter units increases the probability of failure and requires labor for maintenance. However, in common-sense semiconductor factories, etc., there are problems such as disagreement with adoption because it hinders operations.
[0009]
On the other hand, as another method for forming a laminar vertical flow, as described above, a shutter is provided on the grating floor and airflow adjustment is performed. If one point is adjusted, the other points may be affected. Thus, there is a problem that adjustment takes a lot of labor and time.
The present invention aims to solve such problems.
[0010]
[Means for Solving the Problems]
In order to solve the above-described problems, in the present invention, first, in the fan filter unit configured by surrounding the fan in the upper portion and the filter in the lower portion with the casing, the outflow that causes a part of the air on the upstream side of the filter to flow out. We propose a blower air volume adjustment mechanism for a fan filter unit that has an adjustable air flow outlet.
[0011]
According to a second aspect of the present invention, in the mechanism of the first aspect, it is proposed that the air outflow portion is provided with an opening in the upper part of the casing and a damper for adjusting the outflow amount in the opening.
[0012]
According to a third aspect of the present invention, in the mechanism of the first aspect, it is proposed that the air outflow portion is configured by providing an opening in a mounting portion of the fan with respect to the casing, and providing a damper for adjusting the outflow amount in the opening.
[0013]
According to a fourth aspect of the present invention, in the mechanism of the first aspect, it is proposed that the air outflow portion is configured by providing an opening in the casing near the filter portion and providing a damper for adjusting the outflow amount in the opening.
[0014]
According to claim 5, in the mechanism of claims 2 to 4, it is proposed that the damper is configured to change the opening area by closing the opening by manual operation of the slide plate.
[0015]
According to the present invention, it is possible to reduce the amount of blown-out air that passes through the filter and is blown downward by causing the air in the casing compressed by the fan to flow out from the air outflow portion that is configured on the upstream side of the filter. Therefore, by adjusting the outflow amount of air from the air outflow portion, the blowout air amount can be adjusted.
[0016]
In this way, the blown air volume can be adjusted and made constant for each of a large number of fan filter units installed on the entire ceiling of the clean room, and a laminar vertical flow can be formed.
[0017]
Since the fan filter unit is used in an extremely clean space, there is almost no clogging of the filter, a low static pressure fan is used, and the blowout air volume is hardly changed during use if it is initially set.
[0018]
Therefore, the air outflow part that can adjust the outflow amount can be configured to use a damper configured to change the opening area by closing the opening by manual operation of the slide plate. In this case, no maintenance is required. Thus, the cost is low.
[0019]
DETAILED DESCRIPTION OF THE INVENTION
Next, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a side view showing a first embodiment of a fan filter unit to which a blown air volume adjusting mechanism of the present invention is applied.
The fan filter unit 1 is configured by disposing a fan 2 in the upper part and a filter 3 in the lower part and surrounding it with a casing 4 in the same manner as the conventional one. The fan 2 supports an impeller 7 below the fan base 6 that supports the electric motor 5, and supports the fan base 6 on a support frame 8. The support frame 8 is mounted and fixed on the upper side of the support protrusion 9 provided on the upper portion of the casing 4, and an annular airtight member 10 is provided on the outer periphery of the fan base 6, and this is in contact with the upper surface of the casing 4. Yes. Further, a guide plate 11 is provided between the fan 2 and the filter 3 to uniformly apply air to the upstream surface of the filter 3. The fan filter unit 1 having such a configuration is installed by placing the casing 4 on the filter 3 side on a support frame 12 installed on the ceiling of the clean room.
[0020]
The above configuration of the fan filter unit 1 is the same as that of the prior art, but in the first embodiment of the present invention, an opening 13a is provided in the upper part of the casing 4, and a damper 14 for adjusting the outflow amount is provided in the opening 13a. An air outflow portion 15 is provided which can adjust the outflow amount. The damper 14 is configured to change the opening area by closing the opening 13a by manual operation of the slide plate 16.
[0021]
In the above configuration, the air in the casing 1 compressed by the fan 2 flows out from the air outflow portion 15 configured on the upstream side of the filter 3, thereby reducing the amount of blown air that is blown downward through the filter 3. Therefore, by adjusting the outflow amount of the air from the air outflow portion 15 with the damper 14, the blowout air amount can be adjusted.
[0022]
In this embodiment, the damper 14 can adjust the outflow amount by changing the opening area by sliding the slide plate 16 manually to close the opening 13.
[0023]
In this way, the blown air volume can be adjusted for each of a large number of fan filter units installed on the entire ceiling of the clean room, and can be made constant at a predetermined blown air volume, and a laminar vertical flow can be formed in the room.
[0024]
Since the fan filter unit 1 is used in a very clean space, the filter 3 is almost not clogged, and the fan 2 is also used with a low static pressure. If set, there is almost no change during use.
[0025]
Therefore, by using the damper 14 having a simple configuration with manual operation described above, the air outflow portion 15 is configured so that a failure does not occur like an inverter or an electric damper, and maintenance is not required. Low cost.
[0026]
Next, FIG. 2 is a side view showing a second embodiment of the fan filter unit to which the blown air volume adjusting mechanism of the present invention is applied.
In the second embodiment, only the configuration of the air outflow portion 15 is different from the configuration of the first embodiment shown in FIG. The description to be omitted is omitted.
That is, in the second embodiment, an opening (not shown) is provided in the mounting portion of the fan 2 with respect to the casing 4, in this case, the annular airtight member 10, and a damper for adjusting the outflow amount is provided in the opening. The air outflow part 15 which can adjust outflow amount is comprised. Similar to the first embodiment, this damper is configured to change the opening area by closing the opening by manual operation of a slide plate (not shown).
[0027]
Therefore, also in this configuration, the air in the casing 1 compressed by the fan 2 flows out from the air outflow portion 15 configured on the upstream side of the filter 3, and the amount of blown air is adjusted by adjusting the outflow amount with the damper 14. Can be adjusted.
[0028]
Next, FIG. 3 is a side view showing a third embodiment of a fan filter unit to which the blowing air volume adjusting mechanism of the present invention is applied.
Also in the third embodiment, since only the configuration of the air outflow portion 15 is different from the configurations of the first and second embodiments shown in FIGS. 1 and 2, the corresponding elements are the same. A duplicate description will be omitted.
That is, in the third embodiment, an opening 13 is provided in the casing 1 in the vicinity of the filter 3 portion, and a damper 14 for adjusting the outflow amount is provided in the opening 13 to form an air outflow portion 15 capable of adjusting the outflow amount. is doing. The damper 14 is configured to change the opening area by closing the opening 13a by manual operation of the slide plate 16 as in the first embodiment.
[0029]
Therefore, also in this configuration, the air in the casing 1 compressed by the fan 2 flows out from the air outflow portion 15 configured on the upstream side of the filter 3, and the amount of blown air is adjusted by adjusting the outflow amount with the damper 14. Can be adjusted.
[0030]
【The invention's effect】
As described above, according to the present invention, in the fan filter unit, the air in the casing compressed by the fan is caused to flow out from the air outflow portion configured on the upstream side of the filter, and the amount of blown air is adjusted by the damper. Therefore, the following effects can be obtained.
a. By constructing the air outflow part using a damper with a simple configuration of manual operation, a fan filter unit that can adjust the flow rate and maintain maintenance-free like an inverter or electric damper is not generated. Can be provided.
b. The cost can be greatly reduced as compared with an inverter conventionally provided for adjusting the air volume.
[Brief description of the drawings]
FIG. 1 is a side view showing a first embodiment of a fan filter unit to which a blown air volume adjusting mechanism of the present invention is applied.
FIG. 2 is a side view showing a second embodiment of a fan filter unit to which the blown air volume adjusting mechanism of the present invention is applied.
FIG. 3 is a side view showing a third embodiment of a fan filter unit to which the blown air volume adjusting mechanism of the present invention is applied.
FIG. 4 is a side view of a conventional fan filter unit.
FIG. 5 is an explanatory diagram showing the installation and use status of a fan filter unit in a clean room.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Fan filter unit 2 Fan 3 Filter 4 Casing 5 Electric motor 6 Fan base 7 Impeller 8 Support frame 9 Support protrusion 10 Airtight member 11 Guide plate 12 Support frame 13 Opening 14 Damper 15 Air outflow part 16 Slide plate a Fan filter unit b Fan c Filter d Casing e Guide plate f Clean room (indoor)
g Ceiling h Ceiling space i Grating floor j Underfloor space k Return path

Claims (5)

A fan filter unit comprising an upper part surrounded by a fan and a lower part surrounded by a casing. The fan filter unit comprises an air outflow part capable of adjusting an outflow amount for outflowing part of the air upstream of the filter. Blowing air volume adjustment mechanism The blowout air volume adjustment mechanism for a fan filter unit according to claim 1, wherein the air outflow portion is configured by providing an opening in the upper part of the casing and providing a damper for adjusting the outflow amount in the opening. The blowout air volume adjusting mechanism for a fan filter unit according to claim 1, wherein the air outflow section is configured by providing an opening in a fan mounting section with respect to the casing and providing an opening for adjusting an outflow amount damper. The blowout air volume adjustment mechanism for a fan filter unit according to claim 1, wherein the air outflow portion is configured by providing an opening in the casing near the filter portion and providing a damper for adjusting the outflow amount in the opening. The air volume adjusting mechanism for a fan filter unit according to any one of claims 2 to 4, wherein the damper is configured to change the opening area by closing the opening by manual operation of the slide plate.

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