JP2004523748A - 運動量の釣り合いが取られたプローブケース - Google Patents

運動量の釣り合いが取られたプローブケース Download PDF

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Publication number
JP2004523748A
JP2004523748A JP2002557983A JP2002557983A JP2004523748A JP 2004523748 A JP2004523748 A JP 2004523748A JP 2002557983 A JP2002557983 A JP 2002557983A JP 2002557983 A JP2002557983 A JP 2002557983A JP 2004523748 A JP2004523748 A JP 2004523748A
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JP
Japan
Prior art keywords
actuator
assembly
probe
specimen
momentum
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002557983A
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English (en)
Japanese (ja)
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JP2004523748A5 (enExample
Inventor
ジェイムズ・アール・マシー
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Veeco Instruments Inc
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Veeco Instruments Inc
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Filing date
Publication date
Application filed by Veeco Instruments Inc filed Critical Veeco Instruments Inc
Publication of JP2004523748A publication Critical patent/JP2004523748A/ja
Publication of JP2004523748A5 publication Critical patent/JP2004523748A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • G01Q70/04—Probe holders with compensation for temperature or vibration induced errors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2002557983A 2001-01-19 2002-01-18 運動量の釣り合いが取られたプローブケース Pending JP2004523748A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/766,555 US6590208B2 (en) 2001-01-19 2001-01-19 Balanced momentum probe holder
PCT/US2002/002052 WO2002057749A1 (en) 2001-01-19 2002-01-18 Balanced momentum probe holder

Publications (2)

Publication Number Publication Date
JP2004523748A true JP2004523748A (ja) 2004-08-05
JP2004523748A5 JP2004523748A5 (enExample) 2005-12-22

Family

ID=25076798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002557983A Pending JP2004523748A (ja) 2001-01-19 2002-01-18 運動量の釣り合いが取られたプローブケース

Country Status (4)

Country Link
US (3) US6590208B2 (enExample)
EP (1) EP1362230A4 (enExample)
JP (1) JP2004523748A (enExample)
WO (1) WO2002057749A1 (enExample)

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* Cited by examiner, † Cited by third party
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JP2006105979A (ja) * 2004-09-30 2006-04-20 Lucent Technol Inc 原子間力顕微鏡

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JP4797150B2 (ja) * 2000-03-14 2011-10-19 オリンパス株式会社 走査機構およびこれを用いた機械走査型顕微鏡
US6590208B2 (en) * 2001-01-19 2003-07-08 Veeco Instruments Inc. Balanced momentum probe holder
US6642129B2 (en) * 2001-07-26 2003-11-04 The Board Of Trustees Of The University Of Illinois Parallel, individually addressable probes for nanolithography
US6813937B2 (en) * 2001-11-28 2004-11-09 General Nanotechnology Llc Method and apparatus for micromachines, microstructures, nanomachines and nanostructures
WO2003083876A2 (en) * 2002-03-27 2003-10-09 Nanoink, Inc. Method and apparatus for aligning patterns on a substrate
US7168301B2 (en) * 2002-07-02 2007-01-30 Veeco Instruments Inc. Method and apparatus of driving torsional resonance mode of a probe-based instrument
US6945099B1 (en) * 2002-07-02 2005-09-20 Veeco Instruments Inc. Torsional resonance mode probe-based instrument and method
US7155964B2 (en) 2002-07-02 2007-01-02 Veeco Instruments Inc. Method and apparatus for measuring electrical properties in torsional resonance mode
JP4596813B2 (ja) * 2004-04-21 2010-12-15 独立行政法人科学技術振興機構 量子線支援原子間力顕微法および量子線支援原子間力顕微鏡
JP2006126145A (ja) 2004-11-01 2006-05-18 Olympus Corp 走査型プローブ顕微鏡用走査機構および走査型プローブ顕微鏡
JP2006308363A (ja) * 2005-04-27 2006-11-09 Olympus Corp 走査機構
EP1755137A1 (en) 2005-08-18 2007-02-21 University of Teheran A method of forming a carbon nanotube emitter, carbon nanotube emitter with applications in nano-printing and use thereof
WO2007078979A2 (en) * 2005-12-28 2007-07-12 Karma Technology, Inc. Probe module with integrated actuator for a probe microscope
US8302456B2 (en) * 2006-02-23 2012-11-06 Asylum Research Corporation Active damping of high speed scanning probe microscope components
US7677146B2 (en) * 2006-05-10 2010-03-16 3M Innovative Properties Company Cutting tool using one or more machined tool tips in a continuous or interrupted cut fast tool servo
DE102006021945A1 (de) * 2006-05-11 2007-11-15 Robert Bosch Gmbh Piezoelektrischer Aktor und Injektor mit einem piezoelektrischen Aktor für eine Brennkraftmaschine
JP4378385B2 (ja) * 2006-05-17 2009-12-02 キヤノン株式会社 走査型プローブ装置における駆動ステージ、走査型プローブ装置
DE102007059977B4 (de) * 2006-12-12 2011-03-31 Concentris Gmbh Vorrichtung zum Betrieb eines mikromechanischen Federbalkens und Messanordnung mit einem solchen Federbalken
US7894871B2 (en) * 2006-12-29 2011-02-22 St. Jude Medical, Atrial Fibrillation Division, Inc. Filtering method for surface modeling
US7628100B2 (en) 2007-01-05 2009-12-08 3M Innovative Properties Company Cutting tool using one or more machined tool tips with diffractive features in a continuous or interrupted cut fast tool servo
US7770231B2 (en) * 2007-08-02 2010-08-03 Veeco Instruments, Inc. Fast-scanning SPM and method of operating same
US7669508B2 (en) * 2007-10-29 2010-03-02 3M Innovative Properties Company Cutting tool using one or more machined tool tips with diffractive features
US20090147361A1 (en) * 2007-12-07 2009-06-11 3M Innovative Properties Company Microreplicated films having diffractive features on macro-scale features
US9810817B2 (en) * 2008-04-02 2017-11-07 3M Innovative Properties Company Light directing film and method for making the same
JP2011519054A (ja) * 2008-04-02 2011-06-30 スリーエム イノベイティブ プロパティズ カンパニー 重ねられた機構を有する光学フィルムを製作するための方法及びシステム
KR101007816B1 (ko) 2008-06-16 2011-01-25 두산메카텍 주식회사 원자력 현미경용 캔틸레버의 고정체
US8955161B2 (en) 2008-11-13 2015-02-10 Bruker Nano, Inc. Peakforce photothermal-based detection of IR nanoabsorption
WO2010057052A2 (en) * 2008-11-13 2010-05-20 Veeco Instruments Inc. Method and apparatus of operating a scanning probe microscope
US8650660B2 (en) 2008-11-13 2014-02-11 Bruker Nano, Inc. Method and apparatus of using peak force tapping mode to measure physical properties of a sample
US8606426B2 (en) * 2009-10-23 2013-12-10 Academia Sinica Alignment and anti-drift mechanism
EP2491407A4 (en) * 2009-10-23 2014-03-26 ALIGNMENT AND DEPRESSION MECHANISM
US8342867B2 (en) * 2009-12-01 2013-01-01 Raytheon Company Free floating connector engagement and retention system and method for establishing a temporary electrical connection
KR101990916B1 (ko) 2009-12-01 2019-06-19 브루커 나노, 인코퍼레이션. 스캐닝 프로브 현미경을 작동하는 방법 및 장치
US8291510B2 (en) * 2010-09-27 2012-10-16 Agilent Technologies, Inc. Tandem piezoelectric actuator and single drive circuit for atomic force microscopy
US8370961B1 (en) * 2011-09-30 2013-02-05 Agilent Technologies, Inc. Providing a topographic signal of sample using atomic force microscope
US9383388B2 (en) 2014-04-21 2016-07-05 Oxford Instruments Asylum Research, Inc Automated atomic force microscope and the operation thereof
EP3500864A1 (en) 2016-08-22 2019-06-26 Bruker Nano, Inc. Infrared characterization of a sample using peak force tapping
JP7078560B2 (ja) * 2019-01-25 2022-05-31 ファナック株式会社 精密工作機械
NL2029303B1 (en) 2021-10-01 2023-04-12 Nearfield Instr B V Active dither balancing of motion stage for scanning probe microscopy

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US6073484A (en) * 1995-07-20 2000-06-13 Cornell Research Foundation, Inc. Microfabricated torsional cantilevers for sensitive force detection
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US6100523A (en) * 1997-10-29 2000-08-08 International Business Machines Corporation Micro goniometer for scanning microscopy
US6323483B1 (en) * 1999-09-20 2001-11-27 Veeco Instruments Inc. High bandwidth recoiless microactuator
US6590208B2 (en) * 2001-01-19 2003-07-08 Veeco Instruments Inc. Balanced momentum probe holder
US6612160B2 (en) * 2001-03-09 2003-09-02 Veeco Instruments, Inc. Apparatus and method for isolating and measuring movement in metrology apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006105979A (ja) * 2004-09-30 2006-04-20 Lucent Technol Inc 原子間力顕微鏡

Also Published As

Publication number Publication date
US6861649B2 (en) 2005-03-01
EP1362230A1 (en) 2003-11-19
US7219538B2 (en) 2007-05-22
EP1362230A4 (en) 2008-04-02
WO2002057749A1 (en) 2002-07-25
US20020096642A1 (en) 2002-07-25
US20060043286A1 (en) 2006-03-02
US20040069944A1 (en) 2004-04-15
US6590208B2 (en) 2003-07-08

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