JP2004354653A - Optical deflector - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain an optical deflector which is capable of distributing incident light into a plurality of portions and freely changing their optical deflection and which functions as an optical switch. <P>SOLUTION: The optical reflector is provided with: an optical waveguide 1 for input; an optical distributor 4 for distributing light made incident from the input optical waveguide 1 to a number of distribution ports 2 formed by disposing distribution port columns 3 each of which is formed by arranging, in a plurality of steps in the vertical direction, the plurality of distribution ports 2 arranged in the horizontal direction and outputting distributed light; an optical waveguide array 7 corresponding to a number of the distribution ports 2 of the optical distributor 4, formed by disposing optical waveguide columns 6 each of which is formed by arranging, in a plurality of steps in the vertical direction, a plurality of optical waveguides 5 in the horizontal direction; and phase shifters 8 added on the way of the optical waveguides 5 for each of optical waveguide columns 6 of respective steps of the optical waveguide array 7 and generating phase difference to light guided by the optical waveguides 5. Light emitted from the optical waveguide array 7 can be deflected at a desired angle and large scale planning can be easily performed. The optical reflector also has high reliability since no movable part is used. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an optical deflector as an optical path switching component for an optical signal used in the field of optical communication and optical signal processing.
[0002]
[Prior art]
Optical deflectors are used for optical equipment such as electrophotographic copiers, laser beam printers, bar code readers, etc., optical deflectors for optical disk tracking controllers, and display devices that scan laser beams and project images. Has been done. Also, despite the rapid spread of the Internet in recent years, the amount of information running through optical communication networks has continued to explode, but optical signals can be switched between optical fibers according to demand, An optical deflector is also used in an optical switch for switching an optical communication path to secure a detour in the event of a failure.
[0003]
Examples of the form of the optical switch include an optical waveguide type and a micro electro mechanical system (MEMS) mirror type. The optical waveguide type is a solid-state element formed by forming a Y-branch waveguide from a polymer material and performing switching using a thermo-optic effect or an electro-optic effect without a movable portion, and having reliability and operating speed. Has been improved. (For example, refer to Patent Document 1).
[0004]
Further, the MEMS mirror type uses a movable mirror to mechanically switch by an electrostatic, electromagnetic, piezoelectric, or thermal operating force, and can easily realize a large-scale optical switch. It has the advantage of being able to. (For example, see Patent Document 2).
[0005]
[Patent Document 1]
JP-A-9-304797
[Patent Document 2]
Japanese Patent Application Laid-Open No. 2002-162577
[Problems to be solved by the invention]
However, in the conventional optical waveguide type optical switch, in terms of increasing the size of the optical switch, the number of branch portions where loss occurs increases with the increase in scale, so that loss occurs every time light passes through the branch portion. There is a problem that it is difficult to increase the scale because the number increases in a cumulative manner.
[0008]
Further, the MEMS mirror type optical switch has a problem that dynamic deformation of the mirror cannot be ignored when driven at high speed. To solve this problem, the mirror should be thickened so that it does not deform.However, this increases the weight of the mirror and requires a large amount of power to drive it. It has been pointed out that the problem may be reduced.
[0009]
As described above, the conventional optical switch has a problem that it is difficult to realize optical switching that satisfies both high reliability and large scale.
[0010]
The present invention has been made in view of the above-mentioned problems in the conventional technology, and has as its object to realize high-speed operation as an optical switch, high reliability, and realization of a large-scale optical switch. To provide an optical deflector used for an optical switch.
[0011]
[Means for Solving the Problems]
In the first optical deflector of the present invention, the input optical waveguide and the light input from the input optical waveguide are arranged in a plurality of rows of distribution ports in which a plurality of distribution ports are arranged in a horizontal direction. An optical distributor that distributes and outputs to a large number of the distribution ports, and an optical waveguide array in which a plurality of optical waveguides are arranged in a horizontal direction corresponding to the multiple distribution ports of the optical distributor is vertically arranged in a plurality of stages. An optical waveguide array comprising a large number of the arranged optical waveguides, and a phase difference between light guided by the optical waveguides, which is added in the middle of the optical waveguide for each of the optical waveguide rows at each stage of the optical waveguide array. And a phase shifter that causes the phase shift.
[0012]
Further, the second optical deflector of the present invention is the first optical deflector of the present invention, wherein the light emitted from each of the optical waveguides is condensed on the emission end side of the optical waveguide array to form a two-dimensional light. A light condensing means for outputting in a target or three-dimensional arrangement is arranged.
[0013]
In a third optical deflector of the present invention, in the first or second optical deflector of the present invention, the phase shifter is individually added to each of the optical waveguides in the optical waveguide row. It is a feature.
[0014]
A fourth optical deflector according to the present invention is characterized in that, in any one of the first to third optical deflectors according to the present invention, the phase shifter is a thermo-optical phase shifter.
[0015]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described in detail with reference to the drawings.
[0016]
In the first optical deflector of the present invention, the input optical waveguide and the light input from the input optical waveguide are arranged in a plurality of rows of distribution ports in which a plurality of distribution ports are arranged in a horizontal direction. An optical distributor that distributes and outputs to a large number of the distribution ports, and an optical waveguide array in which a plurality of optical waveguides are arranged in a horizontal direction corresponding to the multiple distribution ports of the optical distributor are vertically arranged in a plurality of stages. An optical waveguide array comprising a large number of the optical waveguides, and a phase added to the optical waveguide for each optical waveguide row at each stage of the optical waveguide array, which causes a phase difference in light guided by the optical waveguides. And a shifter.
[0017]
That is, as shown in an exploded perspective view of an example of the embodiment in FIG. 1, an input optical waveguide 1 and a plurality of distribution ports 2 are arranged in a horizontal direction with respect to light input from the input optical waveguide 1. An optical distributor 4 for distributing and outputting the distribution port array 3 to a number of distribution ports 2 arranged in a plurality of stages vertically, and a plurality of light guides in the horizontal direction corresponding to the plurality of distribution ports 2 of the optical distributor 4. An optical waveguide array 7 composed of a large number of optical waveguides 5 in which an optical waveguide array 6 in which the waveguides 5 are arranged is arranged in a plurality of stages vertically, and in the middle of the optical waveguide 5 for each optical waveguide array 6 in each stage of the optical waveguide array 7. And a phase shifter 8 for generating a phase difference in the light guided by the optical waveguides 5.
[0018]
As the input optical waveguide 1, a channel optical waveguide having a rectangular core or an optical fiber may be used. Further, a plurality of these channel optical waveguides and optical fibers may be arranged as necessary.
[0019]
The light distributor 4 receives, for example, the light propagating through the input optical waveguide 1 and spreads the light in a three-dimensional space having no waveguide structure, thereby outputting the light to a number of distribution ports 2. Further, the light distributor 4 combines a two-dimensionally limited slab optical waveguide array to distribute the light input from the input optical waveguide 1 to a number of distribution ports 2. Is also good.
[0020]
The optical waveguide array 7 uses a plurality of optical waveguides 6 in which a plurality of optical waveguides 5 are arranged in a lateral direction and is arranged in a plurality of stages vertically using optical waveguides 5 made of a polymer material, a quartz material, or the like. 5.
[0021]
The phase shifter 8 includes a first phase shifter 8a for aligning phases when light input from the input optical waveguide 1 is distributed by the optical distributor 4 and a phase difference occurs between the distributed lights. And a second phase shifter 8b for sequentially generating a constant phase difference with respect to an adjacent one of the optical waveguides 5 constituting the optical waveguide array 6, and an optical waveguide array 7. And a third phase shifter 8c for sequentially generating a constant phase difference with respect to an adjacent one of the optical waveguide rows 6 in each stage.
[0022]
As such a phase shifter 8 (8a, 8b, 8c), in the case of a phase shifter utilizing a thermo-optic effect, the first phase shifter 8a for aligning phases is an optical waveguide of the optical waveguide array 7. It is formed by providing a heater made of a thin-film metal on the column 6, and generates heat by applying a voltage to the heater, thereby changing the refractive index of the heated optical waveguide 5. Considering the phase difference of the light output from the distributor 4 and incident on the optical waveguide array 7, the optical waveguide 5 on which the light having the advanced phase propagates and the optical waveguide 5 on which the delayed light propagates are placed on the optical waveguide 5. Each of the formed heaters has a shape in which the length in the propagation direction of the optical waveguide 5 is changed, and the refractive index of the optical waveguide 5 in a portion corresponding to the length is changed, so that the light after propagation is changed. Rank It may be to match the.
[0023]
The second phase shifter 8b can control the phase of light propagating through the optical waveguide 5 by the length of the heater on the optical waveguide 5 through which the light propagates, as described above. Two types of heaters are opposed to each other, and one of the two heaters is selected according to the direction in which a phase difference is to be made with respect to light propagating through the optical waveguide 5 from one end of the optical waveguide array 6 to the other end. If this is selected, a phase difference can be sequentially applied to the light propagating through the optical waveguide 5 from one end of the optical waveguide row 6 to the other end. The second phase shifter 8b is configured such that heaters having the same length are individually added on the optical waveguide 5 so that a desired phase difference is obtained for light traveling from one end to the other end of the optical waveguide array 6. Alternatively, the voltage applied to the heater on each optical waveguide 5 may be sequentially changed.
[0024]
Then, the third phase shifter 8 c is provided between the upper optical waveguide array 6 and the lower optical waveguide array 6 in the optical waveguide array 7 for each optical waveguide array 6 at each stage of the optical waveguide array 7. , A set of rectangular heaters in which the length of the optical waveguide 5 in the propagation direction is sequentially increased and a set of rectangular heaters in which the length is sequentially shortened are added, and light propagating through the optical waveguide array 6 at each stage is added. By applying an applied voltage to one of these sets of heaters in accordance with the direction in which the phase difference is to be provided, it is possible to sequentially provide a phase difference in the vertical direction for each optical waveguide array 6. Further, the third phase shifter 8c adds a rectangular heater having the same shape to each stage in the middle of the optical waveguide 5 for each stage of the optical waveguide array 6 in each stage of the optical waveguide array 7. The voltage applied to the third phase shifter 8c of each stage may be sequentially changed according to the direction in which the phase difference of the light propagating in the optical waveguide array 6 is to be provided.
[0025]
Such a phase shifter 8 (8a, 8b, 8c) may be a mode in which a semiconductor phase shifter array using SOA or an electro-optic phase shifter array using LN or PLZT is mounted. May be appropriately selected according to the conditions.
[0026]
According to the first optical deflector of the present invention having such a configuration, first, the light input from the input optical waveguide 1 is distributed to a number of distribution ports 2 by the optical distributor 4, and the distributed light is distributed. When a phase difference occurs between the light beams, the phases are aligned between the distributed lights using the first phase shifter 8a. Next, the second phase shifter 8b configures the optical waveguide array 7 to sequentially generate a constant phase difference with respect to adjacent ones of the optical waveguides 5 constituting the optical waveguide array 6. The same procedure is performed for each of the optical waveguide arrays 6 in each stage. This makes it possible to freely deflect light in the X direction (the left-right direction in which a plurality of optical waveguides 5 are arranged in each optical waveguide array 6) by utilizing the property that light propagates perpendicularly to the equiphase plane. . Next, the third phase shifter 8 c sequentially generates a constant phase difference with respect to the vertically adjacent ones of the optical waveguide arrays 6 of each stage constituting the optical waveguide array 7, Utilizing the property that light propagates perpendicular to the equal phase plane, light can be freely deflected in the Y direction (up and down directions in which the optical waveguide rows 6 are arranged in a plurality of stages).
[0027]
In this manner, the effect of the second phase shifter 8b on the deflection in the X direction of the optical waveguide array 7 configured by vertically arranging the optical waveguide rows 6 in which the optical waveguides 5 are arranged in the X direction. And the effect of deflection in the Y direction by the third phase shifter 8c, the light emitted from the optical waveguide array 7 can be deflected at a desired angle with respect to the XY plane. A large-scale optical switch can be easily realized. Further, since the movable portion is not used for the operation of the optical switch, long-term reliability with respect to the number of times of the switch can be increased.
[0028]
The second optical deflector of the present invention is the two-dimensional optical deflector according to the first optical deflector of the present invention described above, in which the light emitted from each optical waveguide is condensed on the emission end side of the optical waveguide array. A light condensing means for outputting in a target or three-dimensional arrangement is arranged.
[0029]
As such a condensing means, for example, a quartz or resin lens can be used.
[0030]
That is, in the example of the embodiment shown in the perspective view in FIG. 2, the light emitted from each of the optical waveguides 5 is collected on the emission end side of the optical waveguide array 7 in the first optical deflector of the present invention. A lens 9 is disposed as a light condensing means for outputting a two-dimensional or three-dimensional arrangement. Further, in another example of the embodiment shown in FIG. 3 in a perspective view similar to FIG. 2, the optical waveguide array 7 in the first optical deflector of the present invention is extended to the emission end side, and the extended portion is formed. The light-condensing function phase shifter 10 is arranged as a light-condensing means for condensing the light emitted from each optical waveguide 5 and outputting the light in a two-dimensional or three-dimensional arrangement. Note that, in FIGS. 2 and 3, an arrow indicated by L indicates a partial state of the emitted light.
[0031]
According to such a second optical deflector of the present invention, the outgoing light deflected at a desired angle by the first optical deflector of the present invention is condensed by the condensing means, and the desired two-dimensional light is deflected. Alternatively, output can be performed in a three-dimensional arrangement. For example, as shown in FIG. 4, a perspective view similar to FIG. 2 shows still another example of the embodiment, the tip of the lens 9 in the example shown in FIG. By arranging an output optical waveguide array 11 in which a plurality of output optical waveguides 12 are assembled in an array in a desired arrangement, light input to the input optical waveguide 1 is transmitted to the desired output optical waveguide 12. It can be used as an optical switch element that can guide light to the optical switch.
[0032]
Further, by integrating such a second optical deflector of the present invention vertically and horizontally in a plurality of rows and a plurality of stages, an M × N optical switch element (M-row × N-stage matrix-like optical switch element: M and N represent two or more natural numbers).
[0033]
Next, according to the third optical deflector of the present invention, in the above-described first or second optical deflector of the present invention, a phase shifter is individually added to each optical waveguide in the optical waveguide row. Is what it is.
[0034]
That is, as shown in FIG. 5 in an exploded perspective view similar to FIG. 1, an example of the embodiment is such that a phase shifter 8d for each optical waveguide is individually added to each optical waveguide 5 of the optical waveguide array 6 as a phase shifter. Is what it is.
[0035]
As the phase shifter 8d for each optical waveguide, the same as the above-described first to third phase shifters 8a to 8c may be used. However, in the case of the phase shifter utilizing the thermo-optic effect, the heater is connected to the light guide. By individually arranging them along the waveguides 5 and individually applying voltages to the heaters, the phases of light propagating in the corresponding optical waveguides 5 can be individually controlled. The temperature of the optical waveguide 5 may be controlled by individually controlling the voltage so that the phase of the light propagating through the optical waveguide 5 sequentially causes a phase difference from one end to the other end. Needless to say, the lengths of the optical waveguide-specific phase shifters 8d may be the same or different.
[0036]
According to such a third optical deflector of the present invention, the phase shifter 8d for each optical waveguide is individually added to each of the optical waveguides 5 of the optical waveguide array 6, so that the phase of the guided light is increased. Can be individually controlled for each of the optical waveguides 5, so that the light output from the output end of the optical waveguide array 7 can be deflected at a desired angle for each of the optical waveguides 5, and the light can be collected. Since light can be output in a desired two-dimensional or three-dimensional arrangement, for example, the output optical waveguide array 11 shown in FIG. 4 is arranged so as to face the emission end of the optical waveguide array 7. Thereby, it can be used as an optical switch element that can guide light input to the input optical waveguide 1 to a desired output optical waveguide 12.
[0037]
Further, by integrating such a third optical deflector of the present invention vertically and horizontally in a plurality of rows and a plurality of stages, it can be used as an M × N optical switch element.
[0038]
Next, in a fourth optical deflector of the present invention, in any one of the first to third optical deflectors of the present invention described above, the phase shifter is a thermo-optic phase shifter.
[0039]
According to such a fourth optical deflector of the present invention, since the phase shifter 8 is a thermo-optic phase shifter, when the material forming the optical waveguide 5 of the optical waveguide array 7 is a polymer material, Since a sufficiently good phase shift can be performed on the light propagating through the optical waveguide 5 and the thermo-optic effect is at least one order of magnitude larger than that of the quartz-based material, an optical deflector smaller than the quartz-based material is manufactured. can do. In addition, since a polymer-based material can be easily formed into a thick film by a spin coating method, it is difficult to form a film using a quartz-based material by a forming method such as a CVD method. It is suitable for forming a phase shifter 8 in a structure in which a plurality of optical waveguide arrays 6 are stacked like an optical waveguide array 7 in an optical deflector. Therefore, as the phase shifter 8, it is preferable to use a thermo-optic phase shifter having excellent response using the optical waveguide 5 made of a polymer material.
[0040]
When the phase shifter 8 is a semiconductor phase shifter array using SOA or an electro-optic phase shifter array using LN or PLZT, these need to be separately mounted on the optical waveguide array 6 or the optical waveguide 5. On the other hand, when a thermo-optic phase shifter is used as the phase shifter 8, it can be formed by a simpler process without requiring a mounting process, and can be monolithically integrated with the optical waveguide array 6 or the optical waveguide 5. But it is advantageous.
[0041]
Such a thermo-optic phase shifter may be formed by using, for example, a heater, and heats the desired optical waveguide array 6 or the optical waveguide 5 by supplying electric power to the heater by electric wiring. By lowering the refractive index, it can function as a thermo-optic phase shifter. Further, by irradiating laser light, infrared light, or the like from outside the optical waveguide array 7 to a predetermined position of each optical waveguide array 6 or a predetermined position of the optical waveguide 5 or a heater formed corresponding thereto, the heater is activated. It may function as a thermo-optic phase shifter by heating or by directly heating the optical waveguide 5.
[0042]
It should be noted that the present invention is not limited to the above-described embodiments, and various changes and improvements may be made without departing from the spirit of the present invention. For example, in the above-described example, the phase shifters 8 are arranged in the order of the first, second, and third phase shifters 8a, 8b, and 8c from the input end side to the output end side of the optical waveguide array 7. May change. Further, the first phase shifter 8a and the second phase shifter 8b or the first phase shifter 8a and the third phase shifter 8c may be formed in an integrated shape. In this case, the control is performed. The number of phase shifters can be reduced, and the power consumption can be reduced.
[0043]
【The invention's effect】
As described above, according to the first optical deflector of the present invention, an input optical waveguide and a distribution port array in which a plurality of distribution ports are arranged in a horizontal direction are used for distributing light input from the input optical waveguide. An optical distributor for distributing and outputting to a plurality of the distribution ports arranged in a plurality of stages vertically, and an optical waveguide array in which a plurality of optical waveguides are arranged in a horizontal direction corresponding to the plurality of distribution ports of the optical distributor And an optical waveguide array composed of a large number of the optical waveguides arranged in a plurality of stages above and below, and each of the optical waveguide arrays in each stage of the optical waveguide array is guided by the optical waveguides added in the middle of the optical waveguide. By providing a phase shifter for generating a phase difference in light, the light input from the input optical waveguide is distributed by the optical distributor, and the phase is aligned when a phase difference occurs between the distributed lights. Phase difference using the first phase shifter for The second phase shifter sequentially generates a constant phase difference with respect to the adjacent ones of the optical waveguides forming the optical waveguide row, which means that each stage constituting the optical waveguide array has The same is performed for each of the optical waveguide arrays, and the light can be freely deflected in the X direction (the left and right direction in which a plurality of optical waveguides are arranged) by utilizing the property that the light propagates perpendicularly to the equal phase plane. Next, the third phase shifter sequentially generates a constant phase difference with respect to the adjacent one of the optical waveguide arrays of each stage constituting the optical waveguide array, so that the light has the same phase. Light can be freely deflected in the Y direction (vertical direction in which the optical waveguide array is arranged in a plurality of stages) by utilizing the property of propagating perpendicularly to the light, so that the light emitted from the optical waveguide array can be directed at a desired angle. Can be deflected by Yellow, large-scale can also be easily performed. In addition, long-term reliability with respect to the number of switches can be increased because no movable portion is used.
[0044]
According to the second optical deflector of the present invention, in the first optical deflector of the present invention, the light emitted from each of the optical waveguides is condensed on the emission end side of the optical waveguide array to form a two-dimensional light. The light deflected by the first optical deflector to converge the light deflected at a desired angle by arranging the light converging means for outputting the light in a three-dimensional or three-dimensional arrangement. It can be used as an optical switch element that can output light to a desired arrangement, and can output light input to the input optical waveguide to a desired arrangement. Also, by integrating vertically and horizontally in a plurality of rows and a plurality of stages, it can be used as an M × N optical switch element.
[0045]
According to the third optical deflector of the present invention, in the first or second optical deflector of the present invention, a phase shifter is individually added to each optical waveguide in the optical waveguide row, A phase shifter for each optical waveguide is individually added to each optical waveguide in the optical waveguide array, and the phase of guided light can be individually controlled for each optical waveguide. The emitted light can be deflected at a desired angle for each optical waveguide, and the light can be condensed and output in a desired two-dimensional or three-dimensional arrangement. Then, for example, by arranging an output optical waveguide array so as to face the emission end of the optical waveguide array, an optical switch capable of guiding light input to the input optical waveguide to a desired output optical waveguide. It can be used as an element. Also, by integrating vertically and horizontally in a plurality of rows and a plurality of stages, it can be used as an M × N optical switch element.
[0046]
According to the fourth optical deflector of the present invention, in any one of the first to third optical deflectors of the present invention, the phase shifter is a thermo-optic phase shifter. When the material forming is a polymer material, a sufficiently good phase shift can be performed on the light propagating through the optical waveguide, and the thermo-optic effect is one order or more larger than that of the quartz material. An optical deflector smaller than a quartz-based material can be manufactured. In addition, since a polymer-based material can be easily formed into a thick film by a spin coating method, it is difficult to form a film using a quartz-based material by a forming method such as a CVD method. It is suitable for forming a phase shifter in a structure in which a plurality of optical waveguide rows are stacked like an optical waveguide array in an optical deflector. Therefore, as the phase shifter 8, it is preferable to use a thermo-optic phase shifter having excellent response using the optical waveguide 5 made of a polymer material.
[0047]
When the phase shifter is a semiconductor phase shifter array using SOA or an electro-optic phase shifter array using LN or PLZT, these need to be separately mounted on an optical waveguide row or an optical waveguide. When a thermo-optic phase shifter is used as the phase shifter, it can be formed by a simpler process without the need for a mounting process, and is advantageous in that it can be monolithically integrated with the optical waveguide array or the optical waveguide.
[0048]
As described above, according to the present invention, there is provided an optical deflector used for an optical switch, which can be operated at a high speed as an optical switch, has high reliability, and can realize a large-scale optical switch. I was able to.
[Brief description of the drawings]
FIG. 1 is an exploded perspective view showing an example of an embodiment of a first optical deflector of the present invention.
FIG. 2 is a perspective view showing an example of an embodiment of a second optical deflector of the present invention.
FIG. 3 is a perspective view showing another example of the embodiment of the second optical deflector of the present invention.
FIG. 4 is a perspective view showing still another example of the embodiment of the second optical deflector of the present invention.
FIG. 5 is an exploded perspective view showing an example of an embodiment of a third optical deflector of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Input optical waveguide 2 ... Distribution port 3 ... Distribution port array 4 ... Optical distributor 5 ... Optical waveguide 6 ... Optical waveguide array 7 ... Optical waveguide array 8. ..Phase shifter 8a ... First phase shifter 8b ... Second phase shifter 8c ... Third phase shifter 8d ... Phase shifter 9 for each optical waveguide 9 ... Lens (light collecting means)
10 ... Condenser function phase shifter (condenser)
11 ... Output optical waveguide array 12 ... Output optical waveguide

Claims (4)

An optical waveguide for input and light input from the optical waveguide for input are distributed and output to a large number of the above-described distribution ports in which a plurality of distribution ports arranged in a horizontal direction are arranged in a plurality of stages vertically. An optical waveguide comprising an optical distributor and a plurality of optical waveguides corresponding to a plurality of the distribution ports of the optical distributor, and a plurality of optical waveguides in which a plurality of optical waveguides are arranged in a horizontal direction in a vertical direction. An array, and a phase shifter added to the middle of the optical waveguide for each of the optical waveguide rows in each stage of the optical waveguide array, which causes a phase difference in light guided by the optical waveguides. Characteristic optical deflector. A light condensing means for condensing light emitted from each of the optical waveguides and outputting the light in a two-dimensional or three-dimensional arrangement is arranged on an emission end side of the optical waveguide array. Item 2. The optical deflector according to Item 1. 3. The optical deflector according to claim 1, wherein the phase shifter is individually added to each of the optical waveguides in the optical waveguide row. 4. The optical deflector according to claim 1, wherein the phase shifter is a thermo-optic phase shifter.

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