JP2004333265A - Method and apparatus for continuously measuring temperature dependence characteristics of electric electronic component - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem where a plurality of units must be prepared if a material to be measured is measured under a plurality of temperature conditions or a measuring efficiency is intended to be raised though a heat transfer to a gas atmosphere is used as a method for heating the material to a predetermined temperature, an increase in size of an apparatus is required, and a product cost is raised by the introduction of an increasing in a measuring cost. <P>SOLUTION: A method for continuously measuring the temperature dependence characteristics of electric electronic component at different temperatures includes steps of bringing a heater or a cooler into contact with the electric electronic component and controlling the same. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method for measuring the temperature-dependent characteristics of electric characteristics of an electric / electronic component, and more particularly to a method and apparatus for continuously measuring characteristics in a plurality of temperature ranges.
[0002]
[Prior art]
Generally, when measuring electrical characteristics such as electrical resistance of electrical and electronic components, the measurement itself is performed in a short time, but it takes a long time to adjust the measurement conditions. In other words, when the temperature-dependent characteristics of the device under test are continuously measured in a state where the temperature is changing or at a plurality of temperatures, the time required to heat or cool the device under test to a predetermined temperature is increased by the measurement time. Dominates in
Therefore, when trying to increase the measurement efficiency by increasing the number of measurements per unit time, it is important how to efficiently heat or cool the object to be measured to a predetermined temperature.
[0003]
Conventionally, as means for increasing the measurement efficiency, (1) a method in which an object to be measured is inserted into a furnace at a measurement temperature and an electrical characteristic is measured when the object to be measured reaches the measurement temperature (for example, (See Patent Literature 1), (2) A method of measuring electrical characteristics after adjusting an object to be measured by directly blowing hot air at a predetermined temperature to the object to be measured (for example, Patent Document 2) Reference) has been proposed.
[0004]
[Patent Document 1]
JP-A-5-206244 [Patent Document 2]
JP-A-8-166423
[Problems to be solved by the invention]
In the above (1), the object to be measured is heated to the measurement temperature by heat transfer to the object to be measured using gas as the heating medium. That is, the gas is uniformly heated to a predetermined temperature in the furnace, and heat is transferred between the gas and the object until the entire object to be measured reaches a uniform predetermined temperature.
However, the heat transfer between the gas as the heating medium and the solid object to be measured has a problem that it takes a long time to heat to a predetermined temperature because the heat transfer coefficient between the two is small.
[0006]
When continuously measuring the temperature-dependent characteristics of a plurality of DUTs, the temperature-dependent characteristics are measured after the plurality of DUTs are placed in a furnace and heated as shown in (1).
However, when measuring the temperature-dependent characteristics of a plurality of different temperatures, it is necessary to prepare a furnace in which the temperature in the furnace is changed by the number of temperature conditions, and the apparatus becomes large-scale. And, when trying to increase the measurement quantity per unit time, there is a problem that the furnace to be used becomes large.
[0007]
According to the method of heating by directly spraying the heating medium of the predetermined temperature on the object to be measured as described in (2) above, it is possible to quickly and accurately heat to the measurement temperature.
However, in order to increase the measurement speed per unit time, it is necessary to increase the number of heating nozzles and the number of heating sources. Further, when trying to measure the temperature-dependent characteristics of different temperatures, it is necessary to prepare a necessary number of heating sources set to the temperature to be measured, so that the measurement device is inevitably increased in size.
[0008]
[Means for Solving the Problems]
The present invention has been made in view of the above-mentioned problems in the related art, and according to the present invention, an object to be measured can be quickly or accurately and uniformly heated or cooled to a predetermined temperature, and further, an increase in the size of the measuring apparatus can be prevented. SUMMARY OF THE INVENTION It is an object of the present invention to provide a method for continuously measuring the temperature-dependent characteristics of electric and electronic components and a continuous temperature-dependent characteristic measuring apparatus which can reduce the measurement cost.
[0009]
According to a first aspect of the present invention, in the method for continuously measuring the temperature-dependent characteristics of the electric / electronic component at different temperatures, the temperature of the electric / electronic component is controlled by bringing a heating element or a cooling element into contact with the electric / electronic component. This is a method for continuously measuring the temperature-dependent characteristics of electric and electronic components.
[0010]
The invention according to claim 2 is characterized in that the electric / electronic component is pre-heated or pre-cooled before a heating or cooling body is brought into contact with the electric / electronic component. This is a method for continuously measuring characteristics.
[0011]
According to a third aspect of the present invention, there is provided a method for continuously measuring a temperature-dependent characteristic of an electric / electronic component according to the first or second aspect, wherein a buffer member is provided on a contact surface between the heating or cooling body and the electric / electronic component. It is.
[0012]
According to a fourth aspect of the present invention, there is provided a carrier for transporting electric and electronic components, a heating element or a cooling element for controlling the electric and electronic components to a predetermined temperature by contacting the transported electric and electronic components, and the predetermined temperature. A temperature-dependent characteristic measuring device for measuring the temperature-dependent characteristics of the electric and electronic components controlled by the electronic component.
[0013]
The invention according to claim 5, wherein the heating element or the cooling element is arranged in pairs for each control temperature, and the heating element or the cooling element forming the pair sandwiches the electric or electronic component, and 5. The apparatus according to claim 4, wherein the temperature is controlled.
[0014]
According to a sixth aspect of the present invention, there is provided the electric / electronic component according to the fourth or fifth aspect, wherein the carrier, the heating element or the cooling element, and the measuring instrument are arranged in a heat insulating container. This is a continuous measurement device for temperature-dependent characteristics.
[0015]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be specifically described with reference to FIGS.
FIG. 1 is a schematic side view of a system showing an embodiment of a measuring device for continuously measuring temperature-dependent characteristics according to the present invention.
In FIG. 1, a measuring device 1 is configured so as to be able to contact an object 2 with an object 2 interposed therebetween, and is arranged in a pair of a heating element 3 composed of an upper heating element 3a and a lower heating element 3b, and a front stage thereof. A pair of preheaters 4 is arranged in series with an upper preheater 4a and a lower preheater 4b whose temperature is set to the same or slightly lower than that of the heater 3 to be heated. The upper heating body 3a and the upper preheating body 4a move up and down, and the lower heating body 3b and the lower preheating body 4b are fixed. A temperature-dependent characteristic measuring probe 5 for measuring the electric characteristics of the device under test 2 is incorporated in the upper heating body 3a.
In FIG. 1, 6 is a device for controlling the temperature of the heating element 3, 7a is a transport jig for transporting an object to be measured, 7b is a device for controlling transport, 8 is a device for measuring temperature-dependent characteristics, and 9 is the entire measurement. Is a device for controlling the above.
[0016]
FIG. 2 is a configuration diagram of a heating heater used in the heating body 3 and the preheating body 4, and shows an example of a lower heating body 3b in a vertically moving heating body.
The lower heater 3b has a sheet-like heater 11a as a heating source, a buffer 11b on the upper surface of the sheet-like heater 11a, and a heater base 11c on the lower surface.
The cushioning member 11b has a function of avoiding poor contact with the sheet-shaped heater 11a when a large number of the DUTs 2 are measured when measuring a large number of DUTs 2. For example, silicon rubber can be used, and for example, bakelite can be used for the heater base material 11c. However, these materials are not limited at all, and in the case of the test object 2 which dislikes vibration during transportation, polytetrafluoroethylene is used. For example, a material having a low coefficient of friction, such as a low friction coefficient, can be used. In FIG. 2, 11d indicates a thermocouple for measuring the temperature of the heating body, and 11e indicates a heater wire for heating.
[0017]
FIG. 3A is an overall explanatory view of the heating body 3 and the preheating body 4 of the present invention, and FIGS. 3B and 3C show the heating body when heating the object 2 and measuring the temperature-dependent characteristics. 3 is an operation explanatory diagram of FIG.
For example, the temperature of the first preheating body 4 is set to 60 ° C., the temperature of the first heating body 3 for performing measurement is set to 80 ° C., the temperature of the second preheating body 4 is set to 100 ° C., and the second heating for performing measurement is performed. Assuming that the temperature of the body 3 is 120 ° C., the electrical characteristics of the device under test 2 at 80 ° C. and 120 ° C. are measured.
[0018]
First, the heating element 3 and the preheating element 4 are set to the above-mentioned temperatures. Next, the device under test 2 is transported by the transport jig 7a from the entrance to the position of the heater 3 at 80 ° C. At this time, the device under test 2 is heated to around 80 ° C. by the preheating body 4 at 80 ° C. Next, the upper heating body 3a and the lower heating body 3b of the heating body 3 at 80 ° C. sandwich the object 2 to be measured, and the upper heating body 3a and the lower heating body 3b are brought into contact with the object 2 to be measured. Increase temperature to 80 ° C. In addition, the heating element 3 may operate alone or in series with the plurality of heating elements 3 and the preheating element 4 to come into contact with the DUT 2.
[0019]
After the temperature of the device under test 2 reaches 80 ° C., the temperature dependent probe 5 is brought into contact with the device under test 2 to measure the electrical characteristics of the device under test 2. Thereafter, the upper heating body 3a is moved to be separated from the object 2 to be measured. Next, the device under test 2 is moved to the next heating body at 120 ° C. by the transport jig 7a. The above operation is repeated to measure the temperature-dependent characteristics of the device under test 2 sequentially. The measurement of the temperature-dependent characteristics can be performed after the temperature reaches the measurement temperature or during heating or cooling until the temperature reaches the measurement temperature.
[0020]
By the way, disposing the preheating body 4 before or after the heating body 3 or around the heating body 3 means that the object 2 is preheated by the preheating body 4 before the object 2 is brought into contact with the heating body 3 and heated. The heating time of the body 3 to the measurement temperature can be shortened, and the number of measurements per unit time can be increased. In addition, it also has a function as a heat buffer, and has an effect of suppressing the thermal influence of the two measurement units on the DUT 2 and reducing the disturbance of the temperature of the DUT 2. The effect is large when the temperature of the preheater 4 is equal to or slightly lower than the temperature of the heater 3.
Here, an example in which the heating element 3 and the preheating element 4 move up and down is shown, but the opening and closing type may be used.
[0021]
FIGS. 4A and 4B are schematic diagrams of a heat inflow / outflow prevention mechanism according to the present invention.
When transporting the object 2, the measuring device 1 separates the heating element 3 from the object 2 and then transports the object 2, so that the temperature may fluctuate under the influence of the surrounding atmosphere. This causes a reduction in measurement efficiency. Thus, by attaching a cover 12a to the side surface of the heating element 3 or the preheating element 4 as shown in FIG. 4A, the inflow of ambient air and the outflow of internal air are prevented, and the temperature fluctuation is suppressed. If the cover is a labyrinth type 12b provided not only in one stage but also in a plurality of stages as shown in FIG. 4B, it is possible to further prevent the temperature fluctuation. Further, the entire heating body 3 and preheating body 4 of the measuring device 1 may be covered.
[0022]
5A to 5C show another embodiment different from the above embodiment.
In the above-described embodiment, the number of the preheating bodies 4 provided between the heating bodies 3 for measuring the temperature-dependent characteristics is one by one. However, as shown in FIG. In addition, two preheating bodies 4 of 100 ° C. and 120 ° C. may be provided, and as shown in FIG. 5B, when two preheating bodies 4 are provided between the heating bodies 3 of 80 ° C. and 120 ° C. A 120 ° C. preheater 4 may be provided at a stage subsequent to the 120 ° C. heater 3. Also, as shown in FIG. 5C, the temperature of the device under test 2 can be better controlled even if the preheating body 4 having a short overall length is provided between the heating bodies 3 at 80 ° C. and 120 ° C. In addition, the number and combination of the heating elements 3 for measuring the number of the preheating elements 4 and the temperature-dependent characteristics are not limited to the above-described embodiment, and may be increased or decreased.
[0023]
In the above embodiment, the case where the object to be measured is heated is described. However, the same applies to the case where the object to be cooled is cooled. The pre-cooled body usually has the same effect as the measured temperature, or the temperature is set slightly higher.
[0024]
Furthermore, the measuring device according to the present invention directly heats or cools the object to be measured, as compared with the conventional measuring device that heats by convection, so that the heating efficiency or the cooling efficiency can be remarkably increased. The total length can be significantly shortened to about 1/6 compared to the measuring device.
[0025]
【The invention's effect】
As described above, according to the method for continuously measuring the temperature-dependent characteristics of an electric / electronic component according to the present invention, the object to be measured can be quickly or accurately and uniformly heated or cooled to a predetermined temperature, and Facilitates measurement of temperature-dependent characteristics at multiple temperatures. Further, the device for continuously measuring the temperature-dependent characteristics of electric and electronic components according to the present invention has the effect of reducing the measurement cost by shortening the measurement time and preventing the measurement device from increasing in size. It has a remarkable effect. [Brief description of the drawings]
FIG. 1 is a schematic side view of a system of a measuring device for continuously measuring a temperature-dependent characteristic.
FIG. 2 is a configuration diagram of a lower heating body according to the present invention.
FIG. 3A is an explanatory diagram relating to heating of the measuring apparatus 1.
FIG. 3B is a diagram illustrating a state of the heating body when the object to be measured is transported.
(C) is a diagram showing the state of the heating element when measuring the heating and temperature-dependent characteristics of the device under test.
FIG. 4A is a schematic view of a cover-type heat inflow / outflow prevention mechanism.
(B) It is a schematic diagram of a labyrinth type heat inflow / outflow prevention mechanism.
FIG. 5 is an explanatory view of another embodiment of the heating element according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Temperature-dependent characteristic continuous measuring device 2 Device under test 3 Heating body 3a Upper heating body 3b Lower heating body 4 Preheating body 4a Upper preheating body 4b Lower preheating body 5 Temperature-dependent characteristic measuring probe 6 Temperature controller 7a Transport jig 7b Transport control Device 8 Temperature-dependent characteristic measuring device 9 Measurement control device 10 Buffer material 11a Sheet-shaped heater 11b Silicon rubber 11c Heating base material 11d Thermocouple 11e Heater wire 12a Heat-blocking cover 12b Heat-blocking labyrinth

Claims (6)

A method for continuously measuring the temperature-dependent characteristics of an electric / electronic component at different temperatures, wherein the temperature of the electric / electronic component is controlled by bringing a heating element or a cooling element into contact with the electric / electronic component. A method for continuously measuring the temperature-dependent characteristics of components. The method for continuously measuring the temperature-dependent characteristics of an electric / electronic component according to claim 1, wherein the electric / electronic component is preheated or precooled before a heating element or a cooling element is brought into contact with the electric / electronic component. 3. The method according to claim 1, wherein a buffer member is provided on a contact surface between the heating element or the cooling element and the electric / electronic component. A carrier for transporting electrical and electronic components, a heating element or a cooling body for bringing the electrical and electronic components into contact with the transported electrical and electronic components to control the electrical and electronic components to a predetermined temperature, and the electrical and electronic components controlled to the predetermined temperature A temperature-dependent characteristic measuring device for measuring the temperature-dependent characteristics of electrical and electronic components. The heating element or the cooling element is arranged in pairs for each control temperature, and the heating element or the cooling element forming the pair controls the temperature of the electric / electronic component with the electric / electronic component interposed therebetween. The apparatus for continuously measuring temperature-dependent characteristics of electric and electronic components according to claim 4. The temperature-dependent characteristic continuous measurement apparatus for an electric / electronic component according to claim 4, wherein the carrier, the heating element or the cooling element, and the measuring tool are arranged in a heat insulating container.

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