JP2004326114A - 可変変調器アセンブリ - Google Patents
可変変調器アセンブリ Download PDFInfo
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- JP2004326114A JP2004326114A JP2004128204A JP2004128204A JP2004326114A JP 2004326114 A JP2004326114 A JP 2004326114A JP 2004128204 A JP2004128204 A JP 2004128204A JP 2004128204 A JP2004128204 A JP 2004128204A JP 2004326114 A JP2004326114 A JP 2004326114A
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- Prior art keywords
- electrode
- variable
- layer
- modulator assembly
- deformable
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-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
- G02B6/266—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting the optical element being an attenuator
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1828—Diffraction gratings having means for producing variable diffraction
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Communication System (AREA)
Abstract
【解決手段】
可変変調器アセンブリ10は、第1および第2の表面を有する活性層14を有する。可変形層16は、活性層14の第1の表面と機能的に接触し、複数の電極からなる電極構成体20は、活性層14の第2の表面と機能的に接触する。コントローラ22は、電極構成体22の中から選んだ電極に可変信号を選択的に印加する。可変信号を印加することによって可変形層16は、頂点と谷部とを有する変形した形状に再形成される。
【選択図】図1C
Description
Claims (7)
- 可変変調器アセンブリであって、
第1および第2の表面を有する活性層と、
前記活性層の前記第1の表面と機能的に接触する可変形層と、
前記活性層の前記第2の表面と機能的に接触する複数の電極からなる電極構成体と、
前記電極構成体の中から選んだ電極に対して可変信号を選択的に印加する構成のコントローラであって、前記可変信号を印加することによって前記可変形層を、変形した形状であって、頂点と谷部とを有する形状にに再形成し、前記頂点と前記谷部との間の距離を、印加する前記可変信号によって決定するコントローラと、
を有する可変変調器アセンブリ。 - 請求項1に記載の可変変調器アセンブリにおいて、
前記コントローラは、前記可変形面に届けられた光をアナログ制御することを特徴とする可変変調器アセンブリ。 - 請求項1に記載の可変変調器アセンブリにおいて、
前記電極構成体は、前記選んだ電極が作用された場合に、正弦波のレリーフパタンを生成するように設計されていることを特徴とする可変変調器アセンブリ。 - 請求項1に記載の可変変調器アセンブリにおいて、
前記電極構成体は、前記可変形層を第1の方向に変形させるように配置された複数の電極を有する第1の電極構成体をさらに有することを特徴とする可変変調器アセンブリ。 - 請求項4に記載の可変変調器アセンブリにおいて、
前記可変形層を第2の方向に変形させるように配置された複数の電極を有する第2の電極構成体を更に有することを特徴とする可変変調器アセンブリ。 - 光変調方法であって、
光源からの光を受光するように可変変調器アセンブリを配置し、この時、可変形層が前記光源の活性層の第1の表面と機能的に接触し、前記変形可能層の変形は、前記活性層の第2の表面に機能的に接触する電極構成体を選択的に作用することによって制御し、前記電極構成体の駆動はコントローラによって制御され、
前記コントローラから可変信号を生成し、
前記可変信号を前記電極構成体の中から選んだ電極に伝達し、この時、前記電極を駆動することによって、前記可変更層に、前記駆動された電極に相当するパターンに変形させる静電的帯電をさせる、光変調方法。 - 請求項6に記載の光変調方法において、
前記電極構成体および、前記電極構成体の中から選んだ電極に対して前記可変信号を伝達することにより、前記可変形層を、複数の頂点および谷部を有する正弦波のレリーフパターンに変形することを特徴とする光変調方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/423,752 US6930817B2 (en) | 2003-04-25 | 2003-04-25 | Configurable grating based on surface relief pattern for use as a variable optical attenuator |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004326114A true JP2004326114A (ja) | 2004-11-18 |
JP4597562B2 JP4597562B2 (ja) | 2010-12-15 |
Family
ID=32962470
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004128204A Expired - Fee Related JP4597562B2 (ja) | 2003-04-25 | 2004-04-23 | 可変変調器アセンブリ |
Country Status (4)
Country | Link |
---|---|
US (1) | US6930817B2 (ja) |
EP (1) | EP1471373B1 (ja) |
JP (1) | JP4597562B2 (ja) |
DE (1) | DE602004020140D1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009041568A1 (ja) * | 2007-09-28 | 2009-04-02 | Sumitomo Osaka Cement Co., Ltd. | 光素子 |
JP2012215871A (ja) * | 2011-03-31 | 2012-11-08 | Samsung Electronics Co Ltd | 無メガネ方式の2次元/3次元ディスプレイ用レンチキュラーユニット |
KR20170091656A (ko) * | 2014-11-24 | 2017-08-09 | 에이에스엠엘 네델란즈 비.브이. | 방사선 빔 장치 |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI20010917A (fi) * | 2001-05-03 | 2002-11-04 | Nokia Corp | Sähköisesti uudelleen konfigurotuvia optisia laitteita ja menetelmä niiden muodostamiseksi |
US7054054B1 (en) * | 2004-12-20 | 2006-05-30 | Palo Alto Research Center Incorporated | Optical modulator with a traveling surface relief pattern |
NO326468B1 (no) * | 2005-12-06 | 2008-12-08 | Ignis Display As | Modulator med innstillbart diffraksjonsgitter (TDG) med total intern refleksjon (TIR), fremgangsmate for fremstilling av en elastomer for anvedelse deri samt anvendelse av elastomeren. |
NO327026B1 (no) * | 2005-12-06 | 2009-04-06 | Ignis Display As | Fremgangsmate for a oke overflateledningsevnen av en polymer anvendt i en modulator med innstillbart diffraksjonsgitter (TDG) |
WO2007084008A1 (en) * | 2006-01-17 | 2007-07-26 | Polight As | Method and arrangement for reducing artifacts in a tunable diffraction grating (tdg) optical component |
EP1816493A1 (en) * | 2006-02-07 | 2007-08-08 | ETH Zürich | Tunable diffraction grating |
JP2009539143A (ja) * | 2006-06-01 | 2009-11-12 | ライト レゾナンス テクノロジーズ リミテッド ライアビリティー カンパニー | 光フィルタ/モジュレータ及びフィルタ/モジュレータのアレイ |
WO2010015093A1 (en) | 2008-08-08 | 2010-02-11 | Optotune Ag | Electroactive optical device |
US8699141B2 (en) | 2009-03-13 | 2014-04-15 | Knowles Electronics, Llc | Lens assembly apparatus and method |
US8659835B2 (en) * | 2009-03-13 | 2014-02-25 | Optotune Ag | Lens systems and method |
EP2322957A1 (en) * | 2009-11-12 | 2011-05-18 | poLight AS | A method, device and system for reducing speckle contrast |
BR112013005408A8 (pt) * | 2010-09-09 | 2018-04-03 | Koninklijke Philips Nv | Acionador e método de fabricação do acionador |
US9081190B2 (en) | 2012-04-26 | 2015-07-14 | Qualcomm Mems Technologies, Inc. | Voltage controlled microlens sheet |
DE102012219655B4 (de) * | 2012-10-26 | 2018-10-25 | Albert-Ludwigs-Universität Freiburg | Optisches element und herstellung desselben |
FR3012255B1 (fr) * | 2013-10-17 | 2017-03-10 | Commissariat Energie Atomique | Procede de formation de rides par fusion d'une fondation sur laquelle repose une couche contrainte |
JP2018537144A (ja) * | 2015-09-30 | 2018-12-20 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 電気機械トランスデューサフォイルによる微分位相コントラスト撮像のための回折格子の合焦 |
CN107153229B (zh) * | 2017-06-27 | 2019-06-21 | 常州瑞丰特科技有限公司 | 电场诱导成型可调制液态光栅的制造方法 |
US20210057632A1 (en) * | 2018-01-12 | 2021-02-25 | President And Fellows Of Harvard College | Reconfigurable electrically controlled shape morphing dielectric elastomer device |
KR20190117039A (ko) | 2018-04-05 | 2019-10-16 | 삼성디스플레이 주식회사 | 표시 장치, 광학 부재 및 광학 부재 제조 방법 |
FR3097668B1 (fr) * | 2019-06-24 | 2021-07-02 | Commissariat Energie Atomique | Dispositif a surface tactile |
US12085740B2 (en) * | 2020-05-28 | 2024-09-10 | Apple Inc. | Tunable diffractive optics |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5090350A (ja) * | 1973-11-29 | 1975-07-19 | ||
US4494826A (en) * | 1979-12-31 | 1985-01-22 | Smith James L | Surface deformation image device |
JPS60253383A (ja) * | 1984-01-30 | 1985-12-14 | ニユ−ヨ−ク インステイテユ−ト オブ テクノロジイ | 変形可能な光変調器とその製造方法 |
JPS6336216A (ja) * | 1986-07-31 | 1988-02-16 | Fujitsu Ltd | 光量自動制御装置 |
JPH0445431A (ja) * | 1989-12-20 | 1992-02-14 | Philips Gloeilampenfab:Nv | 可同調光導波装置 |
US5124834A (en) * | 1989-11-16 | 1992-06-23 | General Electric Company | Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same |
US5459610A (en) * | 1992-04-28 | 1995-10-17 | The Board Of Trustees Of The Leland Stanford, Junior University | Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate |
JPH0821967A (ja) * | 1993-07-27 | 1996-01-23 | Texas Instr Inc <Ti> | 超小形モノリシック可変電気デバイスおよびそれを含む装置 |
JPH10505193A (ja) * | 1994-09-02 | 1998-05-19 | ラッド ダバジ | 反射型ライトバルブ変調器 |
US5867301A (en) * | 1996-04-22 | 1999-02-02 | Engle; Craig D. | Phase modulating device |
WO2002091024A2 (en) * | 2001-05-03 | 2002-11-14 | Nokia Corporation | Electrically reconfigurable optical devices |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4115747A (en) | 1976-12-27 | 1978-09-19 | Heihachi Sato | Optical modulator using a controllable diffraction grating |
US4327966A (en) | 1980-02-25 | 1982-05-04 | Bell Telephone Laboratories, Incorporated | Variable attenuator for laser radiation |
US4626920A (en) | 1984-01-30 | 1986-12-02 | New York Institute Of Technology | Solid state light modulator structure |
US5841579A (en) | 1995-06-07 | 1998-11-24 | Silicon Light Machines | Flat diffraction grating light valve |
US5661592A (en) | 1995-06-07 | 1997-08-26 | Silicon Light Machines | Method of making and an apparatus for a flat diffraction grating light valve |
US5699468A (en) | 1996-06-28 | 1997-12-16 | Jds Fitel Inc. | Bragg grating variable optical attenuator |
US6097859A (en) | 1998-02-12 | 2000-08-01 | The Regents Of The University Of California | Multi-wavelength cross-connect optical switch |
US6421179B1 (en) | 1997-05-02 | 2002-07-16 | Interscience, Inc. | Wavelength division multiplexing system and method using a reconfigurable diffraction grating |
US5999319A (en) | 1997-05-02 | 1999-12-07 | Interscience, Inc. | Reconfigurable compound diffraction grating |
GB2363014B (en) | 1999-06-30 | 2002-02-13 | Marconi Comm Ltd | Optical System |
US6307663B1 (en) | 2000-01-26 | 2001-10-23 | Eastman Kodak Company | Spatial light modulator with conformal grating device |
JP4471520B2 (ja) | 2000-09-22 | 2010-06-02 | 日本碍子株式会社 | 進行波形光変調器 |
US6778023B2 (en) | 2001-07-31 | 2004-08-17 | Nokia Corporation | Tunable filter and method of tuning a filter |
-
2003
- 2003-04-25 US US10/423,752 patent/US6930817B2/en not_active Expired - Fee Related
-
2004
- 2004-04-23 EP EP04009685A patent/EP1471373B1/en not_active Expired - Lifetime
- 2004-04-23 JP JP2004128204A patent/JP4597562B2/ja not_active Expired - Fee Related
- 2004-04-23 DE DE602004020140T patent/DE602004020140D1/de not_active Expired - Lifetime
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5090350A (ja) * | 1973-11-29 | 1975-07-19 | ||
US4494826A (en) * | 1979-12-31 | 1985-01-22 | Smith James L | Surface deformation image device |
JPS60253383A (ja) * | 1984-01-30 | 1985-12-14 | ニユ−ヨ−ク インステイテユ−ト オブ テクノロジイ | 変形可能な光変調器とその製造方法 |
JPS6336216A (ja) * | 1986-07-31 | 1988-02-16 | Fujitsu Ltd | 光量自動制御装置 |
US5124834A (en) * | 1989-11-16 | 1992-06-23 | General Electric Company | Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same |
JPH0445431A (ja) * | 1989-12-20 | 1992-02-14 | Philips Gloeilampenfab:Nv | 可同調光導波装置 |
US5459610A (en) * | 1992-04-28 | 1995-10-17 | The Board Of Trustees Of The Leland Stanford, Junior University | Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate |
JPH0821967A (ja) * | 1993-07-27 | 1996-01-23 | Texas Instr Inc <Ti> | 超小形モノリシック可変電気デバイスおよびそれを含む装置 |
JPH10505193A (ja) * | 1994-09-02 | 1998-05-19 | ラッド ダバジ | 反射型ライトバルブ変調器 |
US5867301A (en) * | 1996-04-22 | 1999-02-02 | Engle; Craig D. | Phase modulating device |
WO2002091024A2 (en) * | 2001-05-03 | 2002-11-14 | Nokia Corporation | Electrically reconfigurable optical devices |
Non-Patent Citations (4)
Title |
---|
JPN6009049751, W. Brinker, R. Gerhard−Multhaupt, W. −D. Molzow, R. Tepe, "Deformation behavior of thin viscoelastic layers used in an active−matrix−addressed spatial light mo", Proceedings of the SPIE, 19880922, Vol. 1018, p. 79 − 85 * |
JPN6009049754, N. K. Sheridon, "The Ruticon Family of Erasable Image Recording Devices", IEEE Transactions on Electron Devices, 197209, Vol. 19, No. 9, p. 1003 − 1010 * |
JPN6009049755, H. Kuck, W. Doleschal, A. Gehner, W. Grundke, R. Melcher, J. Paufler, R. Seltmann and G. Zimmer, "Deformable micromirror devices as phase−modulating high−resolution light valves", Sensors and Actuators A: Physical, 199606, Vol. 54, p. 536 − 541 * |
JPN6009049757, Nicholas K. Sheridon and Michael A. Berkovitz, "THE OPTICAL PROCESSING CAPABILITIES OF THE RUTICON", SPIE, 19770927, Vol. 128, p. 244 − 252 * |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009041568A1 (ja) * | 2007-09-28 | 2009-04-02 | Sumitomo Osaka Cement Co., Ltd. | 光素子 |
JP2009086335A (ja) * | 2007-09-28 | 2009-04-23 | Sumitomo Osaka Cement Co Ltd | 光素子 |
US8315496B2 (en) | 2007-09-28 | 2012-11-20 | Sumitomo Osaka Cement Co., Ltd. | Optical element |
JP2012215871A (ja) * | 2011-03-31 | 2012-11-08 | Samsung Electronics Co Ltd | 無メガネ方式の2次元/3次元ディスプレイ用レンチキュラーユニット |
US9377629B2 (en) | 2011-03-31 | 2016-06-28 | Samsung Display Co., Ltd. | Lenticular unit for two-dimensional/three-dimensional auto-stereoscopic display |
KR101813614B1 (ko) * | 2011-03-31 | 2018-01-02 | 삼성디스플레이 주식회사 | 2차원/3차원 무안경식 디스플레이 용 렌티큘러 장치 |
KR20170091656A (ko) * | 2014-11-24 | 2017-08-09 | 에이에스엠엘 네델란즈 비.브이. | 방사선 빔 장치 |
KR102492088B1 (ko) | 2014-11-24 | 2023-01-27 | 에이에스엠엘 네델란즈 비.브이. | 방사선 빔 장치 |
Also Published As
Publication number | Publication date |
---|---|
JP4597562B2 (ja) | 2010-12-15 |
EP1471373B1 (en) | 2009-03-25 |
DE602004020140D1 (de) | 2009-05-07 |
US20040212869A1 (en) | 2004-10-28 |
EP1471373A3 (en) | 2004-12-15 |
EP1471373A2 (en) | 2004-10-27 |
US6930817B2 (en) | 2005-08-16 |
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