JP2004324939A - Clean room - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To maintain temperature control performance around equipment by preventing the occurrence of a turbulent flow near heating equipment in simple construction and avoiding resulting diffusion of pollutional particles and heat. <P>SOLUTION: This clean room 1 comprises a ceiling part 9 which has a fan filter unit 2 with a fan and a filter built therein and an air distributive ceiling member at the lower part of the fan filter unit 2, a floor part which has an air distributive grating 7, and a room in which the heating equipment 3 is installed. An opening 10 is provided in the ceiling member above the heating equipment 3. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a clean room.
[0002]
[Prior art]
Conventional clean rooms are equipped with a high-performance filter such as a HEPA filter or ULPA filter on the ceiling surface, blow air with adjusted temperature and humidity into the ceiling, blow air into the room with the pressure, and when passing through the filter Fine particles were collected and clean air was supplied. The air blown into the room passed through a grating installed on the floor and was returned to the air conditioner.
[0003]
Also, instead of the HEPA filter and ULPA filter provided on the ceiling, a fan / filter unit with a built-in fan and filter can be installed on the ceiling to supply clean air whose temperature and humidity have been adjusted from these units. Has been done. The air that flows under the floor is returned through a reflux space installed toward the ceiling.
[0004]
The purpose of such a clean room is to discharge contaminant particles generated in the clean room as quickly as possible by the piston flow of clean air. For this reason, in these clean rooms, air is usually flowed from the ceiling to the floor as described above.
[0005]
However, in a conventional clean room, when a production device or equipment that generates heat is installed in a room, a HEPA filter, an ULPA filter, or a fan / filter unit is installed above the heat-generating equipment, and the heat generation is performed. Clean air flows from the ceiling side toward the room as well as the part where the functional equipment is not installed, and clean air is supplied from the entire ceiling to the floor in the clean room.
[0006]
Generally, since the inside of a clean room is an annual cooling side, cool air is supplied. For this reason, near the surface of the heat-generating device, a rising airflow accompanying a rise in temperature and cold air supplied from the ceiling intermingle with each other to generate a turbulent state.
[0007]
When turbulence occurs near the surface of a heat-generating device, fine particles generated inside the device or its surface, or by a human operator, stay for a long time or diffuse to the periphery, resulting in a product or semi-finished product. Causes contamination and reduced yield.
[0008]
On the other hand, a clean room has been proposed in which suppression of turbulence in the airflow in a room due to heat generated by such a production apparatus or device is proposed (for example, Patent Document 1). In this clean room, a suction unit for sucking room air is provided in a filter unit provided above a production device or equipment in the room, and air is pressure-fed into the room to a filter unit in an upper portion around the production device or device. An air supply means is provided to suppress the turbulence of the airflow caused by the upward blowout airflow caused by the heat generated by the production apparatus or equipment.
[0009]
However, the clean room described in Patent Literature 1 requires a large amount of duct facilities and the like constituting air supply means and intake means, and the structure inside the ceiling becomes complicated.
[0010]
[Patent Document 1]
JP-A-8-247512
[0011]
[Problems to be solved by the invention]
The present invention has been made in consideration of the above-described conventional technology, and has a simple structure to prevent generation of turbulent flow near a heat-generating device, eliminate contaminant particles and diffusion of heat associated therewith, and simultaneously control temperature around the device. The purpose is to provide a clean room that can ensure the cleanliness.
[0012]
[Means for Solving the Problems]
In order to achieve the above object, according to the present invention, a fan / filter unit having a built-in fan and a filter in a ceiling portion, and a ceiling member through which air can flow under the fan / filter unit are provided. A clean room in which a heat-generating device is installed in the room, wherein an opening is provided in the ceiling member above the heat-generating device.
[0013]
According to this configuration, clean air having a slightly lower temperature is blown from the fan / filter unit provided on the ceiling around the heat-generating device, and is sucked toward the upper opening of the device in order from the side closer to the heat-generating device. As it moves away, it becomes sucked into the grating on the floor. On the other hand, near the surface of the heat-generating device, the temperature of the air rises to generate an upward airflow, which flows toward the upper opening. Due to the flow of air, the air flows neatly toward the opening provided at the top of the heat-generating device, preventing the diffusion of contaminating fine particles and heat. A space with a uniform distribution can be secured.
[0014]
In a preferred configuration example, a hanging wall is provided on the periphery of the opening.
[0015]
According to this configuration, by providing a hood-shaped hanging wall around the ceiling opening, the supply air having a slightly low temperature blown out from the fan / filter unit is directed toward the floor as much as possible, and heat-generating equipment is provided. The mixed exhaust of the updraft generated from the air and the air in the clean room can be efficiently directed to the ceiling opening. Thus, the hanging wall separates the descending airflow from the fan / filter unit and the ascending airflow due to the heat generated from the heat-generating equipment, thereby preventing turbulence and rectifying the indoor airflow.
[0016]
In a preferred configuration example, a filter or a perforated plate covering the opening is provided.
[0017]
According to this configuration, by covering the opening with the filter or the perforated plate, the flow resistance of the air near the opening increases, and the clean air blown out from the fan / filter unit is short-circuited and sucked from the opening. And clean air can reliably reach the floor surface to normalize the room.
[0018]
In other words, simply opening an opening in the ceiling of a heat-generating device has low air flow resistance, so that the clean air blown out from the fan / filter unit is almost sucked through this opening, and Will not reach the grating. Therefore, a filter or a perforated plate having ventilation resistance is provided in the opening to adjust the amount of air sucked by the floor grating and the amount of air sucked by the ceiling opening.
[0019]
In a preferred configuration example, the suction / discharge direction of the fan / filter unit is reversible, and the fan / filter unit provided above the opening sucks air from the room toward the ceiling.
[0020]
According to this configuration, by changing the rotation direction of the fan of the fan / filter unit provided in the opening, the air is driven to flow from the room to the ceiling, and the ascending airflow due to the heat generated by the heat-generating device is reliably captured. Therefore, rectification of the airflow in the room can be achieved.
[0021]
That is, in the present invention, a fan / filter unit that can change the direction of air flow by simply changing the rotation direction is selected, the fan / filter unit is installed at the ceiling opening, and the rotation direction of the fan is changed to the surrounding fan.・ It can be operated in the opposite direction to the filter unit.
[0022]
With such an arrangement, the amount of exhaust air from the upper part of the heat-generating device can be easily set by appropriately selecting the number of rotations of the fan. Further, when the heat-generating device is relocated, a uniform clean room can be constructed simply by replacing the filter and making the rotation direction the same as the rotation direction of the peripheral fan / filter unit.
[0023]
BEST MODE FOR CARRYING OUT THE INVENTION
FIG. 1 is a schematic diagram illustrating the configuration of the present invention. FIG. 2 is a plan layout view. On the ceiling in the clean room 1, fan / filter units (FFU) 2 are installed at appropriate intervals. On the other hand, a heat-generating device 3 such as a production device that generates heat is installed in the clean room 1, and an opening 10 is formed in a ceiling surface 9 above the heat-generating device 3. Further, a hanging wall 5 having an appropriate length is provided in a rectangular hood shape inside the free air room at the ceiling opening. Various means for appropriate air volume adjustment are taken in the ceiling opening. It is, for example, a filter having an appropriate pressure loss, a suction type fan / filter unit, and a perforated plate with a flow rate adjusting function. In the illustrated example, these air amount adjusting means are omitted, and only a mere opening 10 is formed.
[0024]
The air with the adjusted temperature and humidity supplied to the ceiling is sucked into the fan / filter unit 2 and blown out from the discharge side of each fan / filter unit 2 into the clean room 1 through the ceiling surface 9. The slightly cooler air blown to a place away from the heat-generating equipment 3 forms a downflow and is sucked under the floor through the grating 7 provided on the floor. The slightly cooler clean air blown to a place close to the heat-generating equipment 3 rises in a layered manner with the rising airflow generated on the equipment surface and the air blown from the fan / filter unit 2 flowing to the ceiling through the ceiling opening surface. I do. As described above, the airflow flowing from the room to the ceiling through the opening 10 allows the contaminants generated from the surface of the heat-generating device 3 to be effectively sucked into the ceiling and removed through the opening 10 without scattering into the room.
[0025]
The hanging wall 5 provided around the ceiling opening facilitates the flow of the air blown out from the fan / filter unit 2 toward the floor, and serves to suppress the mixing of the updraft and the downdraft. I have. In addition, by providing the hood-shaped hanging wall 5, when a contaminant is generated from the surface of the heat-generating device 3, the contaminant can be more effectively discharged outside the room together with the ascending airflow.
[0026]
FIG. 3 shows a simulation result of the temperature distribution when the surface temperature of the exothermic device 3 is 40 ° C. and the temperature of the air blown out from the fan / filter unit 2 is 23 ° C. The area a is 25.987 ° C., the area b is 23.3459 ° C., the area c is 23.2625 ° C., the area d is 23.1431 ° C., and the area e is 23.0279 ° C. It can be seen that a very uniform temperature is obtained except for the exothermic device 3 and its extreme surroundings.
[0027]
FIG. 4 is a side view of the clean room according to the embodiment of the present invention, and FIG. 5 is a top view thereof.
[0028]
In this embodiment, a filter 6 having an appropriate pressure loss is attached to the opening 10 and the amount of rising air sucked into the ceiling through the opening 10 and the amount of descending air flowing below the floor through the grating 7 are adjusted.
[0029]
A ceiling member 4 forming a ceiling surface 9 is provided above the clean room 1, and a fan / filter unit 2 (FFU) having a built-in fan and filter is installed at an appropriate interval in a space above the ceiling member 4. Clean air whose temperature and humidity have been adjusted is supplied from the FFU 2 into the clean room 1 as a descending airflow. The floor of the clean room 1 is a grating 7 through which air can flow, and the clean air passing therethrough is returned from the pit under the floor to the space above the ceiling member 4 through a return air flow path provided outside the room, and is returned from the FFU 2 to the space again. It is supplied to the clean room 1 as clean air.
[0030]
A heat-generating device 3 is installed in the clean room 1, and an opening 10 is provided in a ceiling member 4 above the heat-generating device 3. A hanging wall 5 having an appropriate length is provided on the periphery of the opening 10 on the indoor side of the opening 10 in the clean room. A filter 6 is provided in the opening of the ceiling member 4. The filter 6 has an appropriate pressure loss and is, for example, a filter such as a HEPA filter or an ULPA filter.
[0031]
Instead of the filter 6, a perforated plate having an appropriate pressure loss may be mounted. By providing such a perforated plate at the opening 10, the amount of rising air sucked into the ceiling through the opening 10 and the amount of descending air flowing below the floor through the grating 7 can be adjusted as in the case of the filter. The other configurations, functions and effects are the same as those in the example of FIG.
[0032]
FIG. 6 is a configuration diagram of a clean room according to another embodiment of the present invention.
[0033]
In this example, as a fan / filter unit (FFU), a reversible FFU 8 capable of reversing the suction / discharge direction by changing the rotation direction of the fan is provided above the opening 10 to suck room air from the opening 10 and discharge the air into the ceiling. I do. The FFU 2 other than the upper part of the opening 10 sucks the air in the ceiling and discharges the air into the lower room. When the exothermic device 3 is relocated, the FFU 8 is driven to rotate in the reverse direction, and the air in the ceiling is sucked and discharged into the lower room as in the other FFUs 2 to form a down flow.
[0034]
Note that the FFU 2 is also an FFU capable of reversible operation. This makes it possible to cope with a case where the position of the heat-generating device 3 is changed. The FFU 8 can adjust the air volume by changing the rotation speed by inverter control or the like. By changing the amount of air blown from the opening 10, the amount of air flowing under the floor through the grating 7 can be adjusted. In this case, the opening 10 may be left as it is, or the filter 6 or a perforated plate may be attached.
[0035]
【The invention's effect】
As described above, in the present invention, clean air having a slightly lower temperature is blown out of the fan / filter unit provided on the ceiling around the heat-generating device, and the open air at the upper part of the device in order from the side closer to the heat-generating device. , And as it moves away, it becomes sucked into the grating on the floor. On the other hand, near the surface of the heat-generating device, the temperature of the air rises to generate an upward airflow, which flows toward the upper opening. Due to the flow of air, the air flows neatly toward the opening provided at the top of the heat-generating device, preventing the diffusion of contaminating fine particles and heat. A space with a uniform distribution can be secured.
[0036]
In addition, by providing a hood-shaped hanging wall around the ceiling opening, air with a slightly lower temperature is blown from the fan / filter unit and directed toward the floor as much as possible, and the rise generated by the heat-generating equipment The mixed exhaust of the airflow and the air in the clean room can be efficiently directed to the ceiling opening. Thus, the hanging wall separates the descending airflow from the fan / filter unit and the ascending airflow due to the heat generated from the heat-generating equipment, thereby preventing turbulence and rectifying the indoor airflow.
[0037]
In addition, by covering the opening with a filter or a perforated plate, the flow resistance of the air near the opening increases, and the clean air blown out from the fan / filter unit does not reach the floor surface and is short-circuited from this opening and sucked. Can be prevented.
[0038]
In other words, simply opening an opening in the ceiling of a heat-generating device has low air flow resistance, so that the clean air blown out from the fan / filter unit is almost sucked through this opening, and Will not reach the grating. Therefore, a filter or a perforated plate having ventilation resistance is provided in the opening to adjust the amount of air sucked by the floor grating and the amount of air sucked by the ceiling opening.
[0039]
In addition, by changing the rotation direction of the fan of the fan / filter unit provided in the opening, the air is driven so that air flows from the room to the ceiling. Can be rectified.
[0040]
That is, in the present invention, a fan / filter unit that can change the direction of air flow by simply changing the rotation direction is selected, the fan / filter unit is installed at the ceiling opening, and the rotation direction of the fan is changed to the surrounding fan.・ It can be operated in the opposite direction to the filter unit.
[0041]
With such an arrangement, the amount of exhaust air from the upper part of the heat-generating device can be easily set by appropriately selecting the number of rotations of the fan. Further, when the heat-generating device is relocated, a uniform clean room can be constructed simply by replacing the filter and making the rotation direction the same as the rotation direction of the peripheral fan / filter unit.
[Brief description of the drawings]
FIG. 1 is a schematic diagram illustrating a configuration of the present invention.
FIG. 2 is a plan layout view of FIG. 1;
FIG. 3 is a schematic diagram showing a simulation result of a temperature distribution when the surface temperature of the heat-generating device is 40 ° C. and the temperature of air blown out from a fan / filter unit is 23 ° C.
FIG. 4 is a side view of the clean room according to the embodiment of the present invention.
FIG. 5 is a top view of FIG. 4. FIG. 6 is a configuration diagram of a clean room according to another embodiment of the present invention.
[Explanation of symbols]
1: clean room, 2: fan / filter unit (FFU),
3: heat-generating equipment, 4: ceiling member, 5: hanging wall, 6: filter,
7: Grating, 8: Reversible FFU, 9: Ceiling surface, 10: Opening.

Claims (4)

A fan / filter unit with a built-in fan and filter on the ceiling,
A ceiling member through which air can flow at a lower portion of the fan / filter unit,
Having a grating on the floor where air can flow,
In a clean room where exothermic equipment is installed indoors,
A clean room, wherein an opening is provided in the ceiling member above the heat-generating device. The clean room according to claim 1, wherein a hanging wall is provided on a periphery of the opening. The clean room according to claim 1, further comprising a filter or a perforated plate covering the opening. The suction / discharge direction of the fan / filter unit is reversible, and the fan / filter unit provided above the opening sucks air from a room in a ceiling direction. A clean room as described in.

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