JP2004317640A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2004317640A5 JP2004317640A5 JP2003108944A JP2003108944A JP2004317640A5 JP 2004317640 A5 JP2004317640 A5 JP 2004317640A5 JP 2003108944 A JP2003108944 A JP 2003108944A JP 2003108944 A JP2003108944 A JP 2003108944A JP 2004317640 A5 JP2004317640 A5 JP 2004317640A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- carbon atoms
- substituent
- halogen
- hydrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000004432 carbon atom Chemical group C* 0.000 description 12
- 150000001875 compounds Chemical class 0.000 description 3
- WTKZEGDFNFYCGP-UHFFFAOYSA-N Pyrazole Chemical compound C=1C=NNC=1 WTKZEGDFNFYCGP-UHFFFAOYSA-N 0.000 description 2
- 125000003172 aldehyde group Chemical group 0.000 description 2
- 125000003342 alkenyl group Chemical group 0.000 description 2
- 125000003545 alkoxy group Chemical group 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 125000003368 amide group Chemical group 0.000 description 2
- 125000004103 aminoalkyl group Chemical group 0.000 description 2
- 125000003710 aryl alkyl group Chemical group 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical group 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 125000002768 hydroxyalkyl group Chemical group 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
- 125000001424 substituent group Chemical group 0.000 description 2
- SDXAWLJRERMRKF-UHFFFAOYSA-N 3,5-dimethyl-1h-pyrazole Chemical compound CC=1C=C(C)NN=1 SDXAWLJRERMRKF-UHFFFAOYSA-N 0.000 description 1
- -1 Group Chemical group 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003108944A JP4411623B2 (ja) | 2003-04-14 | 2003-04-14 | レジスト剥離剤組成物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003108944A JP4411623B2 (ja) | 2003-04-14 | 2003-04-14 | レジスト剥離剤組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004317640A JP2004317640A (ja) | 2004-11-11 |
| JP2004317640A5 true JP2004317640A5 (enExample) | 2006-06-08 |
| JP4411623B2 JP4411623B2 (ja) | 2010-02-10 |
Family
ID=33470259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003108944A Expired - Lifetime JP4411623B2 (ja) | 2003-04-14 | 2003-04-14 | レジスト剥離剤組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4411623B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5047712B2 (ja) * | 2007-07-13 | 2012-10-10 | 東京応化工業株式会社 | 窒化チタン剥離液、及び窒化チタン被膜の剥離方法 |
| US8623236B2 (en) | 2007-07-13 | 2014-01-07 | Tokyo Ohka Kogyo Co., Ltd. | Titanium nitride-stripping liquid, and method for stripping titanium nitride coating film |
| JP5498768B2 (ja) * | 2009-12-02 | 2014-05-21 | 東京応化工業株式会社 | リソグラフィー用洗浄液及び配線形成方法 |
-
2003
- 2003-04-14 JP JP2003108944A patent/JP4411623B2/ja not_active Expired - Lifetime
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2005289914A5 (enExample) | ||
| JP2005523310A5 (enExample) | ||
| JP2007092033A5 (enExample) | ||
| JP2005504811A5 (ja) | 置換ペンタセン化合物、半導体デバイス及び物品 | |
| CA2204200A1 (en) | Phenyl alkyl ketone substituted by cyclic amine and a process for the preparation thereof | |
| JP2002508362A5 (ja) | １−置換−１−アミノメチル−シクロアルカン誘導体（＝ガバペンチン類縁体） | |
| JP2002543183A5 (enExample) | ||
| JP2007500753A5 (enExample) | ||
| JP2007126628A5 (enExample) | ||
| CA2700319A1 (en) | Carbonates for use in the preparation of derivatives of dioxan-2-alkyl carbamates | |
| JP2004524316A5 (enExample) | ||
| JP2005536519A5 (enExample) | ||
| JP2010508310A5 (enExample) | ||
| JP2004317641A5 (enExample) | ||
| JP2010534246A5 (enExample) | ||
| JP2004535380A5 (enExample) | ||
| JP2008501649A5 (enExample) | ||
| JP2005526149A5 (enExample) | ||
| JP2004317640A5 (enExample) | ||
| JP2006509753A5 (enExample) | ||
| JP2004527639A5 (enExample) | ||
| JP2010102318A5 (enExample) | ||
| JP2001310939A5 (enExample) | ||
| JP2004331662A5 (enExample) | ||
| JP2002529386A5 (enExample) |