JP2004317146A5 - - Google Patents

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Publication number
JP2004317146A5
JP2004317146A5 JP2003107539A JP2003107539A JP2004317146A5 JP 2004317146 A5 JP2004317146 A5 JP 2004317146A5 JP 2003107539 A JP2003107539 A JP 2003107539A JP 2003107539 A JP2003107539 A JP 2003107539A JP 2004317146 A5 JP2004317146 A5 JP 2004317146A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2003107539A
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JP2004317146A (ja
JP4164399B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2003107539A priority Critical patent/JP4164399B2/ja
Priority claimed from JP2003107539A external-priority patent/JP4164399B2/ja
Priority to US10/822,046 priority patent/US7080563B2/en
Priority to EP04252143A priority patent/EP1467602A3/en
Publication of JP2004317146A publication Critical patent/JP2004317146A/ja
Publication of JP2004317146A5 publication Critical patent/JP2004317146A5/ja
Application granted granted Critical
Publication of JP4164399B2 publication Critical patent/JP4164399B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003107539A 2003-04-11 2003-04-11 Ｅｕｖ光源のガス流量計測装置および測定方法 Expired - Fee Related JP4164399B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2003107539A JP4164399B2 (ja) 2003-04-11 2003-04-11 Ｅｕｖ光源のガス流量計測装置および測定方法
US10/822,046 US7080563B2 (en) 2003-04-11 2004-04-09 Gas flow measurement apparatus and method for EVU light source
EP04252143A EP1467602A3 (en) 2003-04-11 2004-04-13 Gas flow measurement apparatus and method for EUV light source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003107539A JP4164399B2 (ja) 2003-04-11 2003-04-11 Ｅｕｖ光源のガス流量計測装置および測定方法

Publications (3)

Publication Number Publication Date
JP2004317146A JP2004317146A (ja) 2004-11-11
JP2004317146A5 true JP2004317146A5 (ja) 2006-06-15
JP4164399B2 JP4164399B2 (ja) 2008-10-15

Family

ID=32866788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003107539A Expired - Fee Related JP4164399B2 (ja) 2003-04-11 2003-04-11 Ｅｕｖ光源のガス流量計測装置および測定方法

Country Status (3)

Country Link
US (1) US7080563B2 (ja)
EP (1) EP1467602A3 (ja)
JP (1) JP4164399B2 (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7588699B2 (en) * 2001-11-02 2009-09-15 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Electrically conductive, optically transparent polymer/carbon nanotube composites and process for preparation thereof
DE102005015274B4 (de) * 2005-03-31 2012-02-23 Xtreme Technologies Gmbh Strahlungsquelle zur Erzeugung kurzwelliger Strahlung
US20070223842A1 (en) * 2006-03-22 2007-09-27 Azad Sabounjian Collapsible container
EP2959504B1 (en) 2013-02-25 2018-07-04 Kla-Tencor Corporation Method and system for gas flow mitigation of molecular contamination of optics
JP6751138B2 (ja) * 2016-04-27 2020-09-02 ギガフォトン株式会社 極端紫外光センサユニット及び極端紫外光生成装置
US10877190B2 (en) * 2018-08-17 2020-12-29 Taiwan Semiconductor Manufacturing Co., Ltd. Extreme ultraviolet radiation source
US10779387B2 (en) 2018-11-26 2020-09-15 Taiwan Semiconductor Manufacturing Co., Ltd. Extreme ultraviolet photolithography system and method
CN111385951B (zh) * 2018-12-29 2022-07-12 苏州瑞派宁科技有限公司 一种软x射线光源

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09320792A (ja) 1996-05-27 1997-12-12 Nikon Corp Ｘ線発生装置
JP2001511153A (ja) * 1997-02-04 2001-08-07 ブイ． コスバブ，ジョン 血管変性性疾患の予防および処置のための組成物および方法
US6232613B1 (en) * 1997-03-11 2001-05-15 University Of Central Florida Debris blocker/collector and emission enhancer for discharge sources
US6001868A (en) * 1997-05-30 1999-12-14 The Regents Of The University Of California Indole-3-carbinol (I3C) derivatives and methods
GB9716701D0 (en) * 1997-08-07 1997-10-15 Secr Defence Gas detection device and method
JP2002006096A (ja) * 2000-06-23 2002-01-09 Nikon Corp 電磁波発生装置、これを用いた半導体製造装置並びに半導体デバイスの製造方法

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