JP2004307991A - Copper plating hardness maintaining agent and copper plating method, and gravure plate and lens die using the method - Google Patents

Copper plating hardness maintaining agent and copper plating method, and gravure plate and lens die using the method Download PDF

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JP2004307991A
JP2004307991A JP2003360401A JP2003360401A JP2004307991A JP 2004307991 A JP2004307991 A JP 2004307991A JP 2003360401 A JP2003360401 A JP 2003360401A JP 2003360401 A JP2003360401 A JP 2003360401A JP 2004307991 A JP2004307991 A JP 2004307991A
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copper plating
hardness
plating
ppm
lens
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JP4534460B2 (en
Inventor
Hideo Abe
秀夫 阿部
Kimie Nakamura
喜美枝 中村
Kazuo Matsunaga
和夫 松永
Tatsuo Ito
竜男 伊藤
Hiromi Shimazaki
広美 島崎
Masao Mogi
雅男 茂木
Toru Watanabe
徹 渡辺
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Toppan Inc
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Toppan Printing Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a copper plating hardness maintaining agent which can form a copper plating film having excellent hardness, brightness, and leveling property, excellent machinability, and good working stability, and can maintain the hardness of the plating film without degradation for a long period of time, and to provide a method for copper plating, and a gravure plate and lens die made by using the copper plating method. <P>SOLUTION: The copper plating method comprises using a plating liquid of 20 to 80 ppm in the concentration of a nitrogen-containing polymeric compound as the copper plating hardness maintaining agent and forming the copper plating layer on the surface by energizing an object to be plated. The gravure plate and the lens die are formed by using such copper plating method. Also, the concentration of the nitrogen-containing polymeric compound is preferably 60 to 80 ppm. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、銅めっき技術に関し、さらに詳細には、硬度、光沢性、レベリング性に優れるとともに、切削性に優れ加工安定性の良い銅めっき被膜層を形成することが可能な、めっき皮膜の硬度を長期間に渡り低下させることなく維持することができる銅めっき硬度維持剤及び銅めっきする方法並びにその銅めっき方法を用いて作製されるグラビア版及びレンズ金型に関する。   The present invention relates to a copper plating technology, and more particularly, to a hardness of a plating film which is excellent in hardness, glossiness, leveling property, and which can form a copper plating film layer having excellent machinability and excellent processing stability. The present invention relates to a copper plating hardness maintenance agent and a copper plating method capable of maintaining the copper plating temperature for a long time without lowering, and a gravure plate and a lens mold produced by using the copper plating method.

光沢のある銅めっき皮膜を得るため、銅めっき添加剤として、たとえば有機チオ化合物、酸素含有高分子化合物、有機酸アミド類などの有機化合物を組合わせて添加することが行なわれている。これらの添加剤は電解により消耗され、流した電気量に比例して補充することが一般に行われている。   In order to obtain a bright copper plating film, a combination of organic compounds such as organic thio compounds, oxygen-containing polymer compounds, and organic acid amides has been added as a copper plating additive. These additives are consumed by electrolysis and are generally replenished in proportion to the amount of electricity passed.

下記に、特許文献1を示す。
特開平6−173097号公報 たとえば、スルホールを有するプリント基板の銅めっきを良好な均一電着性を実現し、めっき液の寿命を長期に安定させるために添加剤濃度の測定はCVS法(Cyclic Voltammetric Stripping)により行なわれている例がある。(特許文献1参照) グラビア版の作製においては、鉄製シリンダーの芯上にニッケルめっきまたはシアン化銅めっきを着けてその上層に硫酸銅めっきによるめっきを電着させている。その後、銅めっきを研磨して平面を出し、剥離処理して更に彫刻またはエッチングを行う加工する層を添加剤含有の硫酸銅めっき浴から電解により着けている。この加工面の銅めっきはダイヤモンド針による切削性を良好にするため種々の添加剤を加えるのが一般的である。
Patent Literature 1 is shown below.
For example, in order to realize good uniform electrodeposition of copper plating on a printed circuit board having through holes and stabilize the life of a plating solution for a long period of time, the additive concentration is measured by the CVS method (Cyclic Voltammetric). Stripping). (See Patent Document 1) In the production of the gravure plate, nickel plating or copper cyanide plating is applied on the core of an iron cylinder, and copper sulfate plating is electrodeposited thereon. Thereafter, the copper plating is polished to expose a flat surface, and a layer to be subjected to a peeling treatment and further engraving or etching is electrolytically applied from a copper sulfate plating bath containing an additive. In general, various additives are added to the copper plating on the processed surface in order to improve the machinability with a diamond needle.

従来、この硫酸銅めっきの添加剤として硬度維持剤としてチオ尿素誘導体、染料などの有機化合物の添加が行なわれていた。   Conventionally, an organic compound such as a thiourea derivative or a dye has been added as a hardness maintaining agent as an additive for the copper sulfate plating.

染料系有機化合物を長年使用しているとめっき槽内に分解物の蓄積が多く見られ、安定して維持管理するのが難しい。またこれを適正量添加させているにもかかわらず、硬度が保管により著しく低下するのが見られる。   When a dye-based organic compound has been used for many years, a large amount of decomposed products is accumulated in a plating tank, and it is difficult to stably maintain the composition. In addition, it is seen that the hardness is remarkably reduced by storage, although an appropriate amount is added.

銅めっきを行う場合、硬度維持剤の他に表面光沢を出すために光沢剤、焼けなどを防止するために抑制剤、レベリング性を良好にするためレベリング剤を添加してめっきしている。硬度維持剤としてチオ尿素系有機化合物誘導体を使用する場合、これを単独または光沢剤、抑制剤、レベリング剤と併用して使用する場合がある。しかしながら、単独で用いる場合、チオ尿素系有機化合物誘導体ではめっき液中の性状が明確に分かっておらず、分析による維持管理が困難であった。また、染料系有機化合物を長年添加して使用しているとめっき槽内に分解物の蓄積が見られ、安定して維持管理することが難しく、できるだけ分解物が発生しない添加剤が望まれていた。   In the case of performing copper plating, in addition to a hardness maintaining agent, a plating agent is added by adding a brightening agent for providing surface gloss, an inhibitor for preventing burning, and a leveling agent for improving leveling properties. When a thiourea-based organic compound derivative is used as a hardness maintaining agent, it may be used alone or in combination with a brightener, an inhibitor, and a leveling agent. However, when used alone, the properties of the thiourea-based organic compound derivative in the plating solution are not clearly understood, and it has been difficult to maintain by analysis. In addition, when a dye-based organic compound is added and used for many years, decomposition products are accumulated in the plating tank, and it is difficult to maintain and maintain the composition stably, and an additive that does not generate decomposition products as much as possible is desired. Was.

グラビア版、これを利用したレンズ金型、または平型板を切削して作製するフレネル金型は切削性を良好にするため硬化剤を添加して、ビッカース硬度Hv190〜220範囲
に保っている。硬度を上げるために、硬化剤としてチオ尿素誘導体が単独で添加される場合もある。
A gravure plate, a lens mold using the gravure plate, or a Fresnel mold prepared by cutting a flat plate is added with a hardening agent to improve machinability, and is maintained in a Vickers hardness Hv 190 to 220. In order to increase the hardness, a thiourea derivative may be added alone as a curing agent.

しかしながら、硬化剤を光沢剤、抑制剤、レベリング剤と併用してめっき液中に添加する場合、CVS法では他の成分の影響を無くすことができず、これらの成分の分析管理ができない。ハルセルなどの目視試験でのみ可能であるが、数値管理によるきめ細かい管理ができなかった。   However, when a curing agent is added to a plating solution in combination with a brightener, an inhibitor, and a leveling agent, the CVS method cannot eliminate the influence of other components and cannot analyze and control these components. Although it was possible only with a visual test such as Hull cell, it was not possible to perform detailed management by numerical management.

下記に、特許文献2を示す。
特開2000−146586号公報 そこで、たとえばめっき液中のイオウ化合物濃度をICP発光分析装置を用いて、20〜60mg/Lに維持管理してめっきすると、良好な銅めっき層が得られる例がある。(特許文献2) しかしながら、特に銅めっき方法を用いてグラビア版やレンズ金型を作製する場合、めっき液中のイオウ化合物濃度の管理だけでは不十分であって、グラビア版の硬度が経時変化を起こしたり、スタイラス針の欠損が発生したり、めっき後の加工が安定しなかった。レンズ金型を切削する場合、レンチキュラーレンズの形状が設計値と異なるなど良好に切削できない場合が生じた。さらに、フレネルレンズ金型作製においては、添加剤管理が適正に添加されていないとバリ発生とか、バイトの切削途中での欠損等の不具合が発生するという問題があった。
Patent Document 2 is shown below.
JP, 2000-146586, A There is an example in which a good copper plating layer is obtained, for example, when the concentration of a sulfur compound in a plating solution is controlled and maintained at 20 to 60 mg / L using an ICP emission spectrometer. . (Patent Document 2) However, in particular, when producing a gravure plate or a lens mold using a copper plating method, it is not sufficient to control only the sulfur compound concentration in the plating solution, and the hardness of the gravure plate changes with time. This caused the stylus needle to be broken, and the processing after plating was not stable. When cutting the lens mold, there were cases where the lenticular lens could not be cut well because the shape of the lenticular lens was different from the design value. Further, in the manufacture of the Fresnel lens mold, there is a problem that, if the additive management is not properly added, burrs are generated and defects such as breakage during cutting of the cutting tool are generated.

本発明は、上記の課題を解決するためになされたものであって、硬度維持剤添加量により硬度が変化するが、これの分解物の蓄積ができるだけ少なく安定して使用でき、ある一定量添加すると銅めっき皮膜硬度が数年変化を起こさず、グラビア版用シリンダーを彫刻機で加工しグラビア版を作製する場合スタイラス針の欠損の起こり難い、またはフレネルレンズ金型においては金型山部のダレの起こらない銅物性皮膜にすることができる硬度維持剤及び硬度、光沢性、レベリング性に優れるとともに、切削性に優れ加工安定性の良い銅めっき被膜層を形成することが可能な銅めっき方法並びにその方法を用いて作製されるグラビア版及びレンズ金型を提供することを目的とする。   The present invention has been made in order to solve the above-mentioned problems, and although the hardness changes depending on the amount of the hardness maintenance agent added, the decomposition products thereof can be used as little as possible and can be used stably. Then, the hardness of the copper plating film does not change for several years, and when the gravure plate is manufactured by processing the gravure plate cylinder with an engraving machine, it is difficult for the stylus needle to be broken, or in the Fresnel lens mold, the tip of the mold hill is dripped. A copper plating method capable of forming a copper plating film layer having excellent hardness, glossiness, leveling property, and excellent machinability and excellent processing stability; An object of the present invention is to provide a gravure plate and a lens mold manufactured by using the method.

発明者等は、有機イオウ化合物濃度管理だけでは十分ではなく、硬化剤になりうる有機窒素含有高分子化合物からなる硬度維持剤の濃度に着目してこれを適正に管理し、硬度、光沢性、レベリング性を良好にして加工安定性の良い銅めっき皮膜を形成できることを発見し、本発明に至ったものである。   The inventors are not enough to manage the concentration of the organic sulfur compound alone, but pay attention to the concentration of a hardness maintenance agent composed of an organic nitrogen-containing polymer compound that can serve as a curing agent, and appropriately manage the concentration, and determine the hardness, gloss, The present inventors have discovered that a copper plating film having good leveling property and good processing stability can be formed, and the present invention has been accomplished.

すなわち、請求項1に係る発明は、電解銅めっきにおいて、めっきされた皮膜硬度を長期間にわたり低下することがなく維持できるめっき液中に添加する有機高分子化合物からなることを特徴とする銅めっき硬度維持剤である。   That is, the invention according to claim 1 is a copper plating comprising, in electrolytic copper plating, an organic polymer compound added to a plating solution capable of maintaining a plated film hardness without decreasing over a long period of time. It is a hardness maintenance agent.

また、請求項2に係る発明は、前記有機高分子化合物が、構造式中に窒素原子を含むことを特徴とする請求項1記載の銅めっき硬度維持剤である。   The invention according to claim 2 is the copper plating hardness maintenance agent according to claim 1, wherein the organic polymer compound contains a nitrogen atom in a structural formula.

また、請求項3に係る発明は、前記有機高分子化合物濃度が、20〜80ppmであるめっき液を用いて、被めっき対象物に通電することにより表面に銅めっき層を形成するこ
とを特徴とする銅めっき方法である。
Further, the invention according to claim 3 is characterized in that a copper plating layer is formed on the surface by applying a current to an object to be plated using a plating solution having a concentration of the organic polymer compound of 20 to 80 ppm. Copper plating method.

また、請求項4に係る発明は、前記有機高分子化合物濃度が、60〜80ppmであることを特徴とする請求項3に記載の銅めっき方法である。   The invention according to claim 4 is the copper plating method according to claim 3, wherein the concentration of the organic polymer compound is 60 to 80 ppm.

また、請求項5に係る発明は、前記窒素含有高分子化合物濃度を維持管理して、被めっき対象物表面にめっき層を形成することを特徴とする請求項3または4に記載の銅めっき方法である。   The invention according to claim 5 is the copper plating method according to claim 3 or 4, wherein the concentration of the nitrogen-containing polymer compound is maintained and a plating layer is formed on the surface of the object to be plated. It is.

また、請求項6に係る発明は、請求項3ないし5のいずれか1項に記載の銅めっき方法を用いてなることを特徴とするグラビア版である。   The invention according to claim 6 is a gravure plate characterized by using the copper plating method according to any one of claims 3 to 5.

また、請求項7に係る発明は、 請求項3ないし5のいずれか1項に記載の銅めっき方法を用いて金属板上に銅切削層を設け、該切削層にレンズパターン形状と逆形状の型を切削形成してなることを特徴とするレンズ金型である。   According to a seventh aspect of the present invention, a copper cutting layer is provided on a metal plate using the copper plating method according to any one of the third to fifth aspects, and the cutting layer has a shape opposite to the lens pattern shape. A lens mold formed by cutting a mold.

また、請求項8に係る発明は、前記レンズパターンが、レンチキュラーレンズ、フレネルレンズ、マイクロレンズ、もしくはプリズムレンズのいずれかのパターンであることを特徴とする請求項7記載のレンズ金型である。   The invention according to claim 8 is the lens mold according to claim 7, wherein the lens pattern is any one of a lenticular lens, a Fresnel lens, a micro lens, and a prism lens.

また、請求項9に係る発明は、前記レンズ金型の表面に、極薄のクロムめっき、無電解ニッケルめっき、もしくは電解ニッケルめっきのいずれかのめっきを施したことを特徴とする請求項7又は8記載のレンズ金型である。   The invention according to claim 9 is characterized in that the surface of the lens mold is plated with any one of ultra-thin chromium plating, electroless nickel plating, or electrolytic nickel plating. 9. A lens mold according to item 8.

本発明により、銅めっき硬度維持剤が非染料系化合物であるために長期間使用しても分解物の蓄積が少なく、所定量添加すれば長期間硬度低下することもなく所望硬度の銅皮膜が得られるようになり、安定して良好なグラビア版またはフレネルレンズ金型が作製できる。硬度維持剤としての窒素含有高分子化合物濃度が20〜80ppm、より好ましくは60〜80ppmの範囲のめっき液を用いてその濃度を管理することで、硬度、光沢性、レベリング性に優れるとともに、切削性に優れ加工安定性の良い銅めっき被膜層を形成することが可能な銅めっき方法を提供することが可能となった。   According to the present invention, the copper plating hardness maintenance agent is a non-dye-based compound, the accumulation of decomposition products is small even when used for a long time, and a copper film having a desired hardness can be obtained without a long-term decrease in hardness when a predetermined amount is added. As a result, a good gravure plate or Fresnel lens mold can be stably manufactured. By controlling the concentration of the nitrogen-containing polymer compound as a hardness maintenance agent using a plating solution having a concentration of 20 to 80 ppm, more preferably 60 to 80 ppm, it is excellent in hardness, glossiness, leveling property and cutting. It has become possible to provide a copper plating method capable of forming a copper plating film layer having excellent workability and excellent processing stability.

また、切削性に優れ加工安定性の良い銅めっき被膜層が得られることから、切削工具の寿命も延ばすことができるようになり製版工程の原価低減に貢献することができる。   In addition, since a copper plating layer having excellent machinability and good processing stability can be obtained, the life of the cutting tool can be extended, which can contribute to the cost reduction of the plate making process.

また、本発明の方法を用いることで、高精度のグラビア版及びレンズ金型を提供できる。   Further, by using the method of the present invention, a highly accurate gravure plate and lens mold can be provided.

まず、硬度維持剤を光沢剤,抑制剤,レベリング剤と共存させて添加する場合の銅めっき方法について説明する。めっき液組成は硫酸銅を150〜270g/L望ましくは200〜240g/L、硫酸を40〜100g/L望ましくは40〜80g/L、塩素イオンを50〜150ppm望ましくは80〜120ppmを含まれる液にグラビア版用シリンダーをアルカリ脱脂、酸による活性化を行い、めっき槽でめっきを行う。塩素イオンの供給は塩酸,塩化ナトリウムなどの塩素含有化合物の何れでも良い。   First, a copper plating method in the case where a hardness maintenance agent is added in the presence of a brightener, an inhibitor, and a leveling agent will be described. A plating solution containing 150 to 270 g / L of copper sulfate, preferably 200 to 240 g / L, 40 to 100 g / L of sulfuric acid, preferably 40 to 80 g / L, and 50 to 150 ppm, preferably 80 to 120 ppm of chloride ion. Then, the gravure plate cylinder is alkali-degreased, activated with an acid, and plated in a plating tank. The supply of chlorine ions may be any of chlorine-containing compounds such as hydrochloric acid and sodium chloride.

本発明で用いられる硬度維持剤としては、たとえばポリ(ビニルアミン)、ポリ(ビニルカルバゾール)、ポリ(エチレンイミン)、ポリ(4−ビニルピリジン)、ポリ(ビニルピロリドン)、ポリ(オクタメチレンアミノトリアゾール)、ポリ(アリルアミン)などの窒素を含む有機高分子化合物を用いることができる。   Examples of the hardness maintaining agent used in the present invention include poly (vinylamine), poly (vinylcarbazole), poly (ethyleneimine), poly (4-vinylpyridine), poly (vinylpyrrolidone), and poly (octamethyleneaminotriazole). And organic polymer compounds containing nitrogen such as poly (allylamine).

硬度維持剤以外の添加剤について、光沢剤として、たとえばビス(2−スルホプロピル)ジサルファイド(2ナトリウム塩)、ビス(3−スルホプロピル)ジサルファイド(2ナトリウム塩)、ビス(4−スルホブチル)ジサルファイド(2ナトリウム塩)、ビス(p−スルホフェニル)ジサルファイド(2ナトリウム塩)、チオ尿素、S―(2−エチルアミド)−チオプロパン酸ナトリウム、S―(4−ブチルアミド)−チオプロパン酸ナトリウム、S―(3−プロピルアミド)−チオプロパン酸ナトリウム、S―(3−プロピルアミド)−チオベンゼンー4−酸ナトリウム、3−(ベンゾチアゾリルー2−チオ)プロピルスルホン酸ナトリウム、等のチオ尿素およびこの有機チオ化合物誘導体を用いることができる。抑制剤として、たとえばポリエチレングリコール、ポリプロピレングリコール、ポリエチレンーポリプロピレングリコールなどの酸化エチレン、酸化プロピレンとそれらの共重合体またはブロック共重合体、ポリビニールアルコール、カルボキスセルロース、ステアリン酸―ポリエチレングリコールエーテル、ステアリルアルコールーポリエチレングリコールエーテル、ノニルフェノールーポリエチレングリコールエーテル、オクチルフェノールーポリエチレングリコールエーテル、等の酸素含有有機高分子化合物を用いることができる。レベリング剤として、たとえばアセトアミド、プロピルアミド、アクリルアミド、メタアクリルアミド、N,N―ジメチルアクリルアミド、N,N―ジエチルアクリルアミド、N,N−ジメチルメタアクリルアミド、N,N−ジメチルアセトアミド、N,N−ジエチルアセトアミド、N,N―ジフェニルアクリルアミド、ポリ(アクリルアミド)、等の有機酸アミド類を用いることができる。   With respect to additives other than the hardness maintaining agent, as a brightener, for example, bis (2-sulfopropyl) disulfide (disodium salt), bis (3-sulfopropyl) disulfide (disodium salt), bis (4-sulfobutyl) Disulfide (disodium salt), bis (p-sulfophenyl) disulfide (disodium salt), thiourea, sodium S- (2-ethylamido) -thiopropanoate, sodium S- (4-butylamido) -thiopropanoate, Thiourea such as sodium S- (3-propylamido) -thiopropanoate, sodium S- (3-propylamido) -thiobenzene-4-acid, sodium 3- (benzothiazolyl-2-thio) propylsulfonate, and the like; Organic thio compound derivatives can be used. As an inhibitor, for example, ethylene oxide such as polyethylene glycol, polypropylene glycol and polyethylene-polypropylene glycol, propylene oxide and their copolymers or block copolymers, polyvinyl alcohol, carboxyl cellulose, stearic acid-polyethylene glycol ether, stearyl Oxygen-containing organic high molecular compounds such as alcohol-polyethylene glycol ether, nonylphenol-polyethylene glycol ether, and octylphenol-polyethylene glycol ether can be used. As a leveling agent, for example, acetamido, propylamide, acrylamide, methacrylamide, N, N-dimethylacrylamide, N, N-diethylacrylamide, N, N-dimethylmethacrylamide, N, N-dimethylacetamide, N, N-diethylacetamide , N, N-diphenylacrylamide, poly (acrylamide), and other organic acid amides can be used.

被めっき対象物はグラビア版シリンダー、レンチキュラー用金型、フレネルレンズ成形金型、マイクロレンズ成形金型の何れでもにも適応が可能である。めっき条件はグラビア版シリンダー、レンチキュラー用金型、マイクロレンズ成形金型は陰極電流密度Dk=20〜30A/dm2で行なわれ、フレネルレンズ金型用のめっきは陰極電流密度Dk=3〜8A/dm2で行なうのが良い。特に平板状の金属板にめっきする場合は電着応力により歪みが発生するため、このような低い電流密度でめっきを行なった方が良い。めっき温度は25〜45℃の範囲であればいずれでも良いが、高電流密度でめっきを行なう場合は温度を高くした方が表面の焼けの発生を押さえることができる。 The object to be plated can be applied to any of a gravure plate cylinder, a lenticular mold, a Fresnel lens mold, and a microlens mold. The plating conditions are as follows: the gravure plate cylinder, the lenticular mold, and the microlens molding mold are performed at a cathode current density Dk = 20 to 30 A / dm 2 , and the plating for the Fresnel lens mold is performed at the cathode current density Dk = 3 to 8 A / dm 2 is recommended. In particular, when plating on a flat metal plate, distortion occurs due to electrodeposition stress. Therefore, it is better to perform plating at such a low current density. The plating temperature may be any range as long as it is in the range of 25 to 45 ° C., but when plating is performed at a high current density, the higher the temperature, the more the occurrence of surface burning can be suppressed.

何れの被めっき対象物に銅めっきを電着させた後、表面を砥石で研磨し最終的にはバフで研磨して下地を作製する。何れもダイヤモンド製の切削工具を用いて所望のパターンに切削を行なう。この切削を行なう場合、被切削物の硬度管理が重要であり、これを一定範囲に収めないとバリなどの発生があり、形状が設計値を異なることさえ発生する。グラビア用シリンダーではヘリオ彫刻機で作製する場合、硬度が低いとセルにバリが発生しやすく形状が所望のものが得られず、望むグラデーションカーブを描く版の作製が困難である。レンチキュラー金型またはフレネル用金型の作製においては、切削条件として周速、切込み深さなどが重要であり、また素材である銅めっきの硬度を所定の範囲で管理する必要がある。硬度としてビッカース硬度を測定し、硬度範囲はHv180〜240望ましくはHv190〜210程度の範囲に収めると良い。   After electrodeposition of copper plating on any of the objects to be plated, the surface is polished with a grindstone and finally polished with a buff to produce a base. In each case, cutting is performed in a desired pattern using a diamond cutting tool. When performing this cutting, it is important to control the hardness of the object to be cut. If the hardness is not kept within a certain range, burrs or the like may occur, and even the shape may differ from the designed value. When the gravure cylinder is manufactured by a helio engraving machine, if the hardness is low, burrs are likely to be generated in the cell, and a desired shape cannot be obtained, and it is difficult to manufacture a plate having a desired gradation curve. In manufacturing a lenticular mold or a Fresnel mold, peripheral speed, cutting depth and the like are important as cutting conditions, and it is necessary to control the hardness of copper plating as a material within a predetermined range. The Vickers hardness is measured as the hardness, and the hardness range is set to a range of Hv 180 to 240, preferably Hv 190 to 210.

これらの添加剤の管理方法とし、従来から有るCVS(Cyclic Voltammetric Stripping)法では切削に用いる硬化剤を含むめっき液中の添加剤は分析管理することが困難とされ、ハルセル試験により目視試験の結果で管理してきた。一方、プリント配線基板などに用いられている添加剤は光沢剤、抑制剤、レベリング剤から構成されており、硬化剤が含まれていないためCVS法で容易に分析管理が行なわれている。本発明の銅めっき方法はハルセル試験によらず、窒素含有高分子化合物、有機イオウ化合物を分析機器を用いて分析管理することができることを特徴とする。すなわち、窒素含有高分子化合物は高速液体クロマトグラフ分析装置(HPLC)を用いて、有機イオウ化合物はキャピラリー電気泳動/質量分析装置(CE/MS)を用いて分析管理することが可能になった。   As a method of managing these additives, it is considered difficult to analyze and control additives in a plating solution containing a hardening agent used for cutting by a conventional CVS (Cyclic Voltammetric Stripping) method. Has been managed. On the other hand, additives used for printed wiring boards and the like are composed of a brightener, a suppressant, and a leveling agent, and since they do not contain a curing agent, they are easily analyzed and managed by the CVS method. The copper plating method of the present invention is characterized in that a nitrogen-containing polymer compound and an organic sulfur compound can be analyzed and managed using an analytical instrument without using a Hull cell test. That is, it has become possible to analyze and control nitrogen-containing polymer compounds using a high-performance liquid chromatograph (HPLC) and organic sulfur compounds using a capillary electrophoresis / mass spectrometer (CE / MS).

グラビア版シリンダーは、彫刻後表面の酸化防止と硬度上昇のためクロムめっきを行なう。レンチキュラー金型、フレネル金型、マイクロレンズ金型は切削後、同様な目的のため無電解ニッケルめっきまたは電解ニッケルめっきを数μm以下のめっき厚でレンズパターン表面へ形成させる。   The gravure cylinder is plated with chromium after engraving to prevent oxidation and increase the hardness of the surface. After cutting the lenticular mold, Fresnel mold and microlens mold, electroless nickel plating or electrolytic nickel plating is formed on the lens pattern surface with a plating thickness of several μm or less for the same purpose.

以下に本発明の実施例を更に詳しく説明する。しかし、本発明は以下の実施例に限定されるものではない。
<実施例1>
硫酸銅濃度210g/L、硫酸濃度60g/L、塩素イオン濃度90ppmの溶液に、S―(2−エチルアミド)−チオプロパン酸ナトリウムを60ppm、ポリエチレングリコール50〜250ppm、ポリ(アクリルアミド)50〜150ppm、ポリ(ビニルアミン)50ppmを添加し、浴温度を35℃に保ちグラビア版シリンダーをめっきした。光沢剤はキヤピラリ電気泳動装置を用いて分析し、減少量の補充を行ない初期添加量±10ppmの範囲で補充管理するようにした。以上の方法によりめっきされた層のビッカース硬度はHv210であった。
Hereinafter, examples of the present invention will be described in more detail. However, the present invention is not limited to the following examples.
<Example 1>
In a solution having a copper sulfate concentration of 210 g / L, a sulfuric acid concentration of 60 g / L, and a chloride ion concentration of 90 ppm, sodium S- (2-ethylamide) -thiopropanoate is 60 ppm, polyethylene glycol is 50 to 250 ppm, poly (acrylamide) is 50 to 150 ppm, and poly (acrylamide) is 50 to 150 ppm. (Vinylamine) 50 ppm was added, the bath temperature was kept at 35 ° C., and the gravure plate cylinder was plated. The brightener was analyzed using a capillary electrophoresis apparatus, and the reduced amount was replenished, and the replenishment was controlled within the range of the initial addition amount ± 10 ppm. The Vickers hardness of the layer plated by the above method was Hv210.

次に得られたグラビア版シリンダーをヘリオ彫刻機で彫ると、良好なセル形状が形成され、切削途中でスタイラス針の欠損が起こることなく良好なグラビア版を作製することができた。添加剤を管理して数百本のグラビア版を作製すると、スタイラス針の欠損が
ほとんど起こらずにヘリオ切削工程での損版率が0.1〜0.3%と押さえることができた。
<実施例2>
硫酸銅濃度210g/L、硫酸濃度60g/L、塩素イオン濃度90ppmの溶液に、S―(2−エチルアミド)−チオプロパン酸ナトリウムを60ppm、ポリエチレングリコール50〜250ppm、ポリ(アクリルアミド)50〜150ppm、ポリ(ビニルアミン)50ppmを添加し、浴温度を35℃に保ちフレネルレンズ金型用真鍮板にめっきした。光沢剤はCE/MS装置を用いて分析し、めっき時間が長いため途中において減少量の補充を行い初期添加量±10ppmの範囲で補充管理するようにした。以上の方法によりめっきされた層のビッカース硬度はHv210であった。
Next, when the obtained gravure plate cylinder was carved with a helio engraving machine, a good cell shape was formed, and a good gravure plate could be produced without a stylus needle being lost during cutting. When hundreds of gravure plates were produced by controlling the additives, the loss of the stylus needle hardly occurred, and the plate loss ratio in the helio-cutting process could be suppressed to 0.1 to 0.3%.
<Example 2>
In a solution having a copper sulfate concentration of 210 g / L, a sulfuric acid concentration of 60 g / L, and a chloride ion concentration of 90 ppm, sodium S- (2-ethylamide) -thiopropanoate is 60 ppm, polyethylene glycol is 50 to 250 ppm, poly (acrylamide) is 50 to 150 ppm, and poly (acrylamide) is 50 to 150 ppm. (Vinylamine) 50 ppm was added, and the bath temperature was kept at 35 ° C. to plate the brass plate for the Fresnel lens mold. The brightener was analyzed using a CE / MS apparatus, and the plating time was long, so a reduced amount was replenished on the way, and the replenishment was controlled within the range of the initial addition amount ± 10 ppm. The Vickers hardness of the layer plated by the above method was Hv210.

次に、得られたフレネルレンズ用めっき板を立型旋盤で切削すると、良好なフレネルレンズ形状が形成され、切削途中で専用バイトの欠損が起こることなく良好なフレネルレンズ金型を作製することができた。表面光沢も良好でフレネル金型山部分のダレが無く均一な切削ができるようになった。   Next, when the obtained plating plate for Fresnel lens is cut with a vertical lathe, a good Fresnel lens shape is formed, and a good Fresnel lens mold can be produced without causing a breakage of a special cutting tool during cutting. did it. The surface gloss was also good, and there was no sagging at the Fresnel mold crests, enabling uniform cutting.

以下に、本発明の比較例について説明する。
<比較例1>
めっき液組成は実施例1と同様にして、S―(2−エチルアミド)−チオプロパン酸ナトリウムを60ppm、ポリエチレングリコール50〜250ppm、ポリ(アクリルアミド)50〜150ppm、ポリ(ビニルアミン)10ppmを添加し、浴温度を35℃に保ちグラビア版シリンダーをめっきした。得られた銅めっき層は光沢良好でレベリング性も良好であったが、ビッカース硬度がHv170であった。得られたグラビア版シリンダーをヘリオ彫刻機で彫ると、セル形状の変形が見られバリが発生しやすく、グラビア版として使用できような品質ではなかった。
<比較例2>
めっき液組成は実施例1と同様にして、S―(2−エチルアミド)−チオプロパン酸ナトリウムを15ppm、ポリエチレングリコール50〜250ppm、ポリ(アクリルアミド)50〜150ppm、ポリ(ビニルアミン)200ppmを添加し、浴温度を35℃に保ちグラビア版シリンダーをめっきした。得られた銅めっき層の光沢は良好であったが、ビッカース硬度はHv250であった。得られたグラビア版シリンダーをヘリオ彫刻機で彫ると、セル形状は良好であったが、セル内にスジが目立ちスタイラス針が切削途中で欠損が起こる場合が見られた。
Hereinafter, a comparative example of the present invention will be described.
<Comparative Example 1>
The composition of the plating solution was the same as in Example 1, and 60 ppm of sodium S- (2-ethylamido) -thiopropanoate, 50 to 250 ppm of polyethylene glycol, 50 to 150 ppm of poly (acrylamide), and 10 ppm of poly (vinylamine) were added. The temperature was kept at 35 ° C., and the gravure plate cylinder was plated. The obtained copper plating layer had good gloss and good leveling property, but had a Vickers hardness of Hv170. When the obtained gravure plate cylinder was carved with a helio engraving machine, cell shape deformation was observed and burrs were easily generated, and the quality was not such that it could be used as a gravure plate.
<Comparative Example 2>
The composition of the plating solution was the same as in Example 1, and 15 ppm of sodium S- (2-ethylamido) -thiopropanoate, 50 to 250 ppm of polyethylene glycol, 50 to 150 ppm of poly (acrylamide), and 200 ppm of poly (vinylamine) were added. The temperature was kept at 35 ° C., and the gravure plate cylinder was plated. The gloss of the obtained copper plating layer was good, but the Vickers hardness was Hv250. When the obtained gravure plate cylinder was engraved with a helio engraving machine, the cell shape was good, but streaks were conspicuous in the cell and the stylus needle was sometimes broken during cutting.

次に、以上の実施例とは別に、硬化剤となる窒素含有高分子化合物として、窒素含有水溶性ポリマー(以下窒素含有ポリマー)を単独に添加し、この添加量を変えた場合の銅めっき硬度の経時変化を起こす機構を考察した。
<実験1>
まず、めっき液組成として、次のように作成した。
Next, apart from the above examples, a nitrogen-containing high-molecular compound serving as a curing agent was separately added with a nitrogen-containing water-soluble polymer (hereinafter referred to as a nitrogen-containing polymer), and the copper plating hardness when the addition amount was changed. The mechanism that causes the time-dependent change of the temperature was considered.
<Experiment 1>
First, a plating solution composition was prepared as follows.

・硫酸銅・5水塩 0.9M
・硫酸 0.6M
を基本浴として、この液に更に
・塩素イオン 120ppm
・SPS(Bis(3−sulfopropyl)disulfide disodium salt) 50ppm
・PEG(polyethylene glycohol) 200ppm
を添加し、これに窒素含有ポリマーを5,15,20,40,60,80,100ppmになるようにそれぞれ添加したものをめっき液として用いた。
・ Copper sulfate ・ pentahydrate 0.9M
・ Sulfuric acid 0.6M
Is used as a basic bath.
-SPS (Bis (3-sulfopropyl) disulfide disodium salt) 50ppm
・ PEG (polyethylene glycol) 200ppm
Was added thereto, and a nitrogen-containing polymer was added thereto at 5, 15, 20, 40, 60, 80, and 100 ppm, respectively, and used as a plating solution.

次に、各めっき液でめっきを行い、室温で放置してビッカース硬度を測定した。   Next, plating was performed with each plating solution, and left at room temperature to measure Vickers hardness.

更に、銅めっき硬度の経時変化の機構を考察する為、銅めっき皮膜中の硫黄元素、炭素元素、水素元素の分析を行った。   Further, in order to consider the mechanism of the temporal change of the copper plating hardness, the sulfur element, the carbon element, and the hydrogen element in the copper plating film were analyzed.

図1に、硬度維持剤としての窒素含有ポリマー添加量の違いによる銅めっき硬度の経時変化を示す。図面上、ppmがmg/L表記になっているが、これは同じ意味である。これによると、窒素含有ポリマーの添加量が20ppmであると、めっき後約30日で急速な低下が見られ、ビッカース硬度も180より下がってしまった。これが40ppmでは、めっき後、徐々に硬度が低下していることが判り、40日後でもビッカース硬度が180以上を維持している。また、60ppm以上の添加量では、測定期間内での硬度低下がほとんど見られず、ビッカース硬度も220〜240を維持している。   FIG. 1 shows the change with time of the copper plating hardness due to the difference in the amount of the nitrogen-containing polymer added as a hardness maintenance agent. In the drawings, ppm is expressed in mg / L, which has the same meaning. According to this, when the addition amount of the nitrogen-containing polymer was 20 ppm, a rapid decrease was observed about 30 days after plating, and the Vickers hardness also fell below 180. At 40 ppm, it can be seen that the hardness is gradually reduced after plating, and the Vickers hardness is maintained at 180 or more even after 40 days. Further, with the addition amount of 60 ppm or more, almost no decrease in hardness is observed within the measurement period, and the Vickers hardness is maintained at 220 to 240.

また、銅めっき皮膜を燃焼法によって元素分析を行った。その結果を図2に示す。図面上、ppmがmg/L表記になっているが、これは同じ意味である。窒素含有ポリマー添加量が0〜60ppmの添加までは、窒素含有ポリマー添加量の増大に伴って、硫黄原子、炭素原子の皮膜中の含有率は増大するが、窒素含有ポリマー添加量が60ppmを越えた領域では、これらの元素の増加傾向が若干鈍っている。一方、水素原子はこの窒素含有ポリマーの添加量が0〜100ppmの添加までは、窒素含有ポリマー添加量の増大に伴って、含有率は増大するが、その後は増加が鈍っている。
<実験2>
次に、硬度維持剤としての窒素含有ポリマーの添加量を5,10,20ppmとした以外は、実験1と同一の組成のめっき液を用意した。そして、各めっき液でめっきを行い、室温で放置してビッカース硬度を測定した。
The copper plating film was subjected to elemental analysis by a combustion method. The result is shown in FIG. In the drawings, ppm is expressed in mg / L, which has the same meaning. Up to the addition of the nitrogen-containing polymer at 0 to 60 ppm, the content of sulfur atoms and carbon atoms in the film increases with the increase of the nitrogen-containing polymer, but the nitrogen-containing polymer addition exceeds 60 ppm. In the region, the increasing tendency of these elements is slightly reduced. On the other hand, the content of hydrogen atoms increases with an increase in the amount of the nitrogen-containing polymer up to the addition of the nitrogen-containing polymer of 0 to 100 ppm, but thereafter, the increase slows down.
<Experiment 2>
Next, a plating solution having the same composition as in Experiment 1 was prepared except that the addition amount of the nitrogen-containing polymer as a hardness maintenance agent was set to 5, 10, and 20 ppm. Then, plating was performed with each plating solution, and the mixture was left at room temperature to measure Vickers hardness.

この測定に関連しては、それぞれの銅めっきに対して、FIB(Focuced Io
n Beam System,収束イオンビーム装置)によって結晶面をエッチングし、SIM(Scanning Ion Microscope,走査イオン顕微鏡)により結晶組織を観察した。
In connection with this measurement, FIB (Focused Io)
The crystal plane was etched by an n beam system (a focused ion beam device), and the crystal structure was observed by a SIM (Scanning Ion Microscope, a scanning ion microscope).

この時の銅めっき硬度の経時変化を図3に示す。図面上、ppmがmg/L表記になっているが、これは同じ意味である。また、図3に示した窒素含有ポリマーの添加量が20ppmの時の結晶組織のSIM像を図4に示した。図4の撮影条件は、いずれも倍率が7500倍で行った。   FIG. 3 shows the change with time of the copper plating hardness at this time. In the drawings, ppm is expressed in mg / L, which has the same meaning. FIG. 4 shows a SIM image of the crystal structure when the amount of the nitrogen-containing polymer shown in FIG. 3 was 20 ppm. The photographing conditions in FIG. 4 were all set at a magnification of 7500 times.

その結果、窒素含有ポリマー添加量20ppmにおいては、めっき後30日までは、ビッカース硬度が240近辺を維持しており、その時の結晶粒径は0.3〜0.5μmと小さいが、これが30日を越えると、ビッカース硬度が急激に落ち込んで180を割り込むようになった。そこで、36日時点のSIM像を見ると、急激に粒径の増大が見られ約4〜10μm以上に成長していることが判った。これらの結果から、硬度低下の原因は結晶粒径の粗大化にあることが示唆された。   As a result, at a nitrogen-containing polymer addition amount of 20 ppm, the Vickers hardness is maintained at around 240 until 30 days after plating, and the crystal grain size at that time is as small as 0.3 to 0.5 μm. , The Vickers hardness dropped sharply and fell below 180. Then, looking at the SIM image on the 36th day, it was found that the particle size was rapidly increased and it was growing to about 4 to 10 μm or more. From these results, it was suggested that the cause of the decrease in hardness was the coarsening of the crystal grain size.

以上の実験1及び実験2の結果を見ると、銅めっき皮膜の硬度は窒素含有ポリマー添加量が60ppmより少ない添加では経時により低下するが、60ppm以上では硬度の経時変化が見られず、また、硫黄元素と炭素元素のめっき膜中の含有率の増加が鈍るといった現象を示している。これらのことから、銅めっき硬度は、これらの硫黄元素と炭素原子が結晶粒界に偏析し、ピン止め効果により結晶成長を抑制しているものと推察される。従って、銅めっき硬度の経時による低下(時効軟化現象)機構は、水素元素と炭素原子の含有量が不十分なために、結晶成長が進んでしまうことによるものと推察される。このことより、窒素含有ポリマーが60ppm以上の添加では硬度の経時変化が見られない。   Looking at the results of Experiments 1 and 2 above, the hardness of the copper plating film decreases with time when the amount of the nitrogen-containing polymer added is less than 60 ppm, but the hardness does not change with time at 60 ppm or more. This shows a phenomenon that the increase in the content of the sulfur element and the carbon element in the plating film becomes slow. From these facts, it is inferred that the copper plating hardness is such that these sulfur elements and carbon atoms are segregated at the crystal grain boundaries, and the crystal growth is suppressed by the pinning effect. Therefore, it is presumed that the mechanism of the decrease in copper plating hardness over time (aging softening phenomenon) is due to the fact that crystal growth proceeds because the contents of the hydrogen element and the carbon atom are insufficient. From this, there is no change in hardness with time when the nitrogen-containing polymer is added at 60 ppm or more.

以上、ビッカース硬度の観点から、窒素含有ポリマーの分量を論じてきたが、この窒素含有ポリマーが60ppm以上であると経時変化が無くなることがわかったが、実験1での窒素含有ポリマーを100ppm入れためっき液での銅めっき皮膜は、脆くなる傾向が出ていた。従って、窒素含有ポリマーは60〜80ppmが好ましい値であることがわかった。また、30日程度の短期間であれば、20〜60ppmの濃度でも、必要な銅めっき硬度が保てることがわかった。   As described above, the amount of the nitrogen-containing polymer has been discussed from the viewpoint of Vickers hardness. It has been found that when the nitrogen-containing polymer is 60 ppm or more, there is no change with time. However, 100 ppm of the nitrogen-containing polymer in Experiment 1 was added. The copper plating film with the plating solution tended to be brittle. Therefore, it was found that the preferred value of the nitrogen-containing polymer was 60 to 80 ppm. In addition, it was found that the required copper plating hardness can be maintained at a concentration of 20 to 60 ppm in a short period of about 30 days.

窒素含有ポリマー添加量の違いによる銅めっき硬度の経時変化を示すグラフである。4 is a graph showing a change over time in copper plating hardness depending on the amount of a nitrogen-containing polymer added. 窒素含有ポリマー添加量の違いによる銅めっき皮膜中の硫黄元素、炭素元素、水素元素の含有率を示すグラフである。3 is a graph showing the content of sulfur, carbon, and hydrogen elements in a copper plating film depending on the amount of a nitrogen-containing polymer added. 窒素含有ポリマー添加量の違いによる銅めっき硬度の経時変化を示す別のグラフである。4 is another graph showing a change with time of the copper plating hardness depending on the difference in the amount of the nitrogen-containing polymer added. 図3の銅めっき組織のSIM像を示す図である。FIG. 4 is a view showing a SIM image of the copper plating structure of FIG. 3.

Claims (9)

電解銅めっきにおいて、めっきされた皮膜硬度を長期間にわたり低下することがなく維持できるめっき液中に添加する有機高分子化合物からなることを特徴とする銅めっき硬度維持剤。   In copper electroplating, a copper plating hardness maintenance agent comprising an organic polymer compound added to a plating solution capable of maintaining a plated film hardness without decreasing over a long period of time. 前記有機高分子化合物が、構造式中に窒素原子を含むことを特徴とする請求項1記載の銅めっき硬度維持剤。   The copper plating hardness maintenance agent according to claim 1, wherein the organic polymer compound contains a nitrogen atom in a structural formula. 前記有機高分子化合物濃度が、20〜80ppmであるめっき液を用いて、被めっき対象物に通電することにより表面に銅めっき層を形成することを特徴とする銅めっき方法。   A copper plating method, wherein a copper plating layer is formed on a surface of an object to be plated by applying a current to the object to be plated using a plating solution having an organic polymer compound concentration of 20 to 80 ppm. 前記有機高分子化合物濃度が、60〜80ppmであることを特徴とする請求項3に記載の銅めっき方法。   The copper plating method according to claim 3, wherein the concentration of the organic polymer compound is 60 to 80 ppm. 前記窒素含有化合物濃度を維持管理して、被めっき対象物表面にめっき層を形成することを特徴とする請求項3または4に記載の銅めっき方法。   The copper plating method according to claim 3, wherein a concentration of the nitrogen-containing compound is maintained and a plating layer is formed on the surface of the object to be plated. 請求項3ないし5のいずれか1項に記載の銅めっき方法を用いてなることを特徴とするグラビア版。   A gravure plate obtained by using the copper plating method according to claim 3. 請求項3ないし5のいずれか1項に記載の銅めっき方法を用いて金属板上に銅切削層を設け、該切削層にレンズパターン形状と逆形状の型を切削形成してなることを特徴とするレンズ金型。   A copper cutting layer is provided on a metal plate by using the copper plating method according to any one of claims 3 to 5, and a die having a shape opposite to a lens pattern shape is cut and formed on the cutting layer. And lens mold. 前記レンズパターンが、レンチキュラーレンズ、フレネルレンズ、マイクロレンズ、もしくはプリズムレンズのいずれかのパターンであることを特徴とする請求項7記載のレンズ金型。   The lens mold according to claim 7, wherein the lens pattern is any one of a lenticular lens, a Fresnel lens, a micro lens, and a prism lens. 前記レンズ金型の表面に、極薄のクロムめっき、無電解ニッケルめっき、もしくは電解ニッケルめっきのいずれかのめっきを施したことを特徴とする請求項7又は8記載のレンズ金型。   9. The lens mold according to claim 7, wherein the surface of the lens mold is plated with any one of ultra-thin chromium plating, electroless nickel plating, and electrolytic nickel plating.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006094755A1 (en) 2005-03-11 2006-09-14 Atotech Deutschland Gmbh Polyvinylammonium compound, method of manufacturing same, acidic solution containing said compound and method of electrolytically depositing a copper deposit
JP2011524934A (en) * 2008-06-19 2011-09-08 ビーエーエスエフ コーティングス ゲゼルシャフト ミット ベシュレンクテル ハフツング Electrodeposition composition and method
CN109371437A (en) * 2018-12-04 2019-02-22 东莞市同欣表面处理科技有限公司 A kind of intaglio plate acid electroplating hard copper additive and preparation method thereof

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5662193A (en) * 1979-10-29 1981-05-27 Furukawa Electric Co Ltd:The Printing roll
JPS57114685A (en) * 1981-01-07 1982-07-16 Kuraray Co Ltd Brightener for plating bath
JPS58136794A (en) * 1982-02-10 1983-08-13 Nippon Mining Co Ltd Acidic copper plating solution
JP2001038739A (en) * 1999-08-03 2001-02-13 Kyowa Sangyo Kk Method for treating metal surface
JP2001049490A (en) * 1999-08-03 2001-02-20 Ebara Corp Method and device for plating substrate
JP2001073182A (en) * 1999-07-15 2001-03-21 Boc Group Inc:The Improved acidic copper electroplating solution
JP2002115090A (en) * 2000-09-27 2002-04-19 Samsung Electronics Co Ltd Electrolytic solution for copper plating and electroplating method for copper wiring of semiconductor device using the same
JP2002146586A (en) * 2000-11-09 2002-05-22 Mitsubishi Rayon Co Ltd Copper electrodeposition process, and method for manufacturing lens mold

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5662193A (en) * 1979-10-29 1981-05-27 Furukawa Electric Co Ltd:The Printing roll
JPS57114685A (en) * 1981-01-07 1982-07-16 Kuraray Co Ltd Brightener for plating bath
JPS58136794A (en) * 1982-02-10 1983-08-13 Nippon Mining Co Ltd Acidic copper plating solution
JP2001073182A (en) * 1999-07-15 2001-03-21 Boc Group Inc:The Improved acidic copper electroplating solution
JP2001038739A (en) * 1999-08-03 2001-02-13 Kyowa Sangyo Kk Method for treating metal surface
JP2001049490A (en) * 1999-08-03 2001-02-20 Ebara Corp Method and device for plating substrate
JP2002115090A (en) * 2000-09-27 2002-04-19 Samsung Electronics Co Ltd Electrolytic solution for copper plating and electroplating method for copper wiring of semiconductor device using the same
JP2002146586A (en) * 2000-11-09 2002-05-22 Mitsubishi Rayon Co Ltd Copper electrodeposition process, and method for manufacturing lens mold

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006094755A1 (en) 2005-03-11 2006-09-14 Atotech Deutschland Gmbh Polyvinylammonium compound, method of manufacturing same, acidic solution containing said compound and method of electrolytically depositing a copper deposit
JP2008533224A (en) * 2005-03-11 2008-08-21 アトーテヒ ドイッチュラント ゲゼルシャフト ミット ベシュレンクテル ハフツング Polyvinylammonium compound, method for producing polyvinylammonium compound, acidic solution containing polyvinylammonium compound and method for electrolytically depositing copper plating
US8114263B2 (en) 2005-03-11 2012-02-14 Atotech Deutschland Gmbh Polyvinylammonium compound, method of manufacturing same, acidic solution containing said compound and method of electrolytically depositing a copper deposit
JP2011524934A (en) * 2008-06-19 2011-09-08 ビーエーエスエフ コーティングス ゲゼルシャフト ミット ベシュレンクテル ハフツング Electrodeposition composition and method
CN109371437A (en) * 2018-12-04 2019-02-22 东莞市同欣表面处理科技有限公司 A kind of intaglio plate acid electroplating hard copper additive and preparation method thereof

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