JP2004304376A - Chip piezoelectric vibrator - Google Patents

Chip piezoelectric vibrator Download PDF

Info

Publication number
JP2004304376A
JP2004304376A JP2003092985A JP2003092985A JP2004304376A JP 2004304376 A JP2004304376 A JP 2004304376A JP 2003092985 A JP2003092985 A JP 2003092985A JP 2003092985 A JP2003092985 A JP 2003092985A JP 2004304376 A JP2004304376 A JP 2004304376A
Authority
JP
Japan
Prior art keywords
container
piezoelectric vibrator
piezoelectric
chip
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003092985A
Other languages
Japanese (ja)
Other versions
JP4364537B2 (en
Inventor
Terumoto Honda
晃基 本田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Crystal Device Corp
Original Assignee
Kyocera Crystal Device Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Crystal Device Corp filed Critical Kyocera Crystal Device Corp
Priority to JP2003092985A priority Critical patent/JP4364537B2/en
Publication of JP2004304376A publication Critical patent/JP2004304376A/en
Application granted granted Critical
Publication of JP4364537B2 publication Critical patent/JP4364537B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem that there is the possibility of increasing the danger of airtight leakage by the stress caused by the difference of the coefficient of thermal expansions by heating at the time of sealing and reflowing to a mother substrate, since a chip piezoelectric vibrator in the conventional technology uses a piezoelectric diaphragm as a portion of a member constituting the external shape of a piezoelectric vibrator and hermetic sealing is performed in two places of both surfaces of the piezoelectric diaphragm to increase the man-hours and there are differences in the quality of the materials between the piezoelectric diaphragm and an insulating plate. <P>SOLUTION: In this chip piezoelectric vibrator, a first container in which a recess having a level difference is formed, an external connection electrode is formed on the external surface of both end edge parts in the length direction, and an internal connection pad is electrically connected to the external connection electrode respectively, and constituted of an insulating material, and a second container of the same shape in the configuration and the same material as those of the first container are joined together at the top of recess walls of the first and second containers. The piezoelectric diaphragm is mounted on the space made by the recesses of the first and second container. The space is hermetically sealed to form the chip piezoelectric vibrator. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

【0001】
【発明の属する技術分野】この発明は、圧電振動子に関し、特に小型のチップ型圧電振動子に関するものである。
【0002】
【従来技術】近年、電子機器に搭載される圧電振動子や圧電発振器等の電子部品における小型化の要求が強く、その大きさも長さ寸法で2mm以下の超小型のチップ形状が望まれている。それに伴い各種形状の圧電振動子が発明考案されている。
【0003】
図3は、従来技術として開示されているチップ型圧電振動子の一例を示す図である。即ち、圧電振動子30は、両主面上に励振電極が形成された圧電振動板31の両面に、励振電極部分に空洞を形成するような圧電振動板31と同形状の絶縁板32及び33が配置され、圧電基板31に各々が固着されて圧電振動子30の外形を構成している。
【0004】
圧電振動板31の励振電極からは、圧電振動板縁部まで引き出し電極が形成されており、この引き出し電極は圧電振動子30の外表面に形成された外部接続電極34及び35と電気的に接続され、これによりチップ型の圧電振動子が形成されている。
【0005】
又、他の形状のチップ型圧電振動子としては、筒状のケース内に圧電振動板を搭載し、筒の両端に外部接続端子を嵌め合い、圧電振動板主面上に形成した電極と外部接続端子とを電気的に接続して成るチップ型圧電振動子も開示されている。
【0006】
前記のような圧電振動子については、以下のような文献が開示されている。
【0007】
【特許文献1】
特開平06−140868号公報
【特許文献2】
特開平06−132768号公報
【0008】
尚、出願人は前記した先行技術文献情報で特定される先行技術文献以外には、本発明に関連する先行技術文献を、本件出願時までに発見するに至らなかった。
【0009】
【発明が解決しようとする課題】圧電振動子の小型化が進み、圧電振動子の最大外形寸法が2〜3mm以下となるにつれ、圧電振動子における諸特性や信頼性を維持若しくは向上させながら、且つマザー基板へのマウントが簡易であることが必要とされる。
【0010】
しかし、従来技術のような構造の圧電振動子では、圧電振動板を圧電振動子の外形形状を構成する部材の一部として使用しているので、気密封止を行う部分が圧電振動板両面の2カ所になり工数が増加する。又、圧電振動板と絶縁板とでは材質が異なることから、封止時やマザー基板へのリフロー時の加熱による熱膨張率の違いによって生じる応力により、気密漏れの危険性が高くなり、部品としての信頼性の低下を招くおそれがある。又、圧電振動板が部品の表面に露出している構造のため、圧電振動板に直接外部より衝撃が加わりやすく、圧電振動板自体にクラックなどが入りやすい。
【0011】
更に、筒型のチップ型圧電振動子では、外形が円筒形のため、マザー基板の任意の場所に安定に配置することが簡易にはできない構造である。又、筒型のチップ型圧電振動子においても、筒内を気密封止する部分が筒両端の2カ所になり工数が増加する。又、筒体と両端の電極部とでは材質が異なることから、封止時やマザー基板へのリフロー時の加熱による熱膨張率の違いによって封止材周辺に生じる応力により封止材又はその周辺の構造体に亀裂が生じ、気密漏れが発生する危険性が高くなり、部品としての信頼性の低下を招くおそれがある。又、圧電振動子を構成する部品点数も多いことから、製造管理が煩雑になり、又製造コストも高くなる。
【0012】
【課題を解決するための手段】この発明は前記従来技術の課題を鑑みて成されたものであり、内部に圧電振動板を収納する空間として、圧電振動板と固着導通する接続パッドが形成された段差部を有する凹部が形成され、長さ方向の両端縁部の外表面上に外部接続電極が形成され、前記接続パッドとこの外部接続電極とが各々電気的に接続している、絶縁性物質で構成された第1の容器と、この第1の容器と同形状構成及び同材質の第2の容器とを、この第1の容器及び第2の容器の凹部壁頂部で接合し、接合により形成された第1の容器及び第2の容器の凹部による空間に圧電振動板を搭載し、該空間を気密封止して形成したことを特徴とするチップ型圧電振動子である。
【0013】
又、該第1の容器及び該第2の容器の高さ寸法が、圧電振動子の幅寸法の1/2であることを特徴とする前記記載のチップ型圧電振動子でもある。
【0014】
このような構造のチップ型圧電振動子にすることにより、気密封止を行う箇所を1カ所にすることができ、且つ、その1カ所の封止箇所で相対する構造体を同一の形状構成及び材質にすることができ、熱膨張率の違いにより封止箇所に加わる応力を最大限に小さくすることができる。又、圧電振動子の外形形状を立方体にし、且つ高さ寸法と幅寸法をほぼ同じにすることで、長さ方向のすべての側面を用いてマザー基板への搭載ができる作用を成す。
【0015】
【発明の実施の形態】以下に、この発明の実施形態について図面に基づいて説明する。図1は、この発明におけるチップ型圧電振動子の部分分解構成図である。図2は、図1の分解部品を組み立て線分A1−A2で切断した断面図である。尚、図1乃至2において、説明を明りょうにするため構造体の一部を図示せず、また寸法も一部誇張して図示している。
【0016】
即ち、図1及び図2に例示したチップ型圧電振動子10は、第1の容器11と第2の容器12とから外形形状が構成されている。まず、第1の容器11は、セラミックスより形成され、内部に表裏主面上に励振電極を形成した圧電振動板13を収納する空間として、圧電振動板13と固着導通する接続パッド(図示せず)が形成された段差部14を有する凹部15が形成されている。第1の容器11の長さ方向の両端縁部の外表面上には外部接続電極16及び17が形成され、前記接続パッドとこの外部接続電極16及び17とが近傍のパッド−電極間で各々電気的に接続している。
【0017】
第2の容器12は、第1の容器11と同一の形状構成で且つ材質も同一である。即ち、セラミックスより形成され、内部に表裏主面上に励振電極を形成した圧電振動板13を収納する空間として、圧電振動板13と固着導通する接続パッド(図示せず)が形成された段差部18を有する凹部19が形成されている。第2の容器12の長さ方向の両端縁部の外表面上には外部接続電極20及び21が形成され、前記接続パッドとこの外部接続電極20及び21とが近傍のパッド−電極間で各々電気的に接続している。
【0018】
前述した第1の容器11及び第2の容器12を、それぞれの凹部15及び19の壁頂部を、凹部15及び19で形成される空間22に圧電振動板13を搭載した状態で接合し、空間22内を気密封止する。本実施例では、第1の容器11の壁頂部に、封止材の一つである低融点ガラス23を全周に塗布し、その後内部に圧電振動板を搭載した状態で第2の容器12を被せ、全体を加熱することで低融点ガラスを溶融し、第1の容器11と第2の容器12とを接合することで、圧電振動板13及び空間22を気密封止している。
【0019】
このように、第1の容器11と第2の容器12とを接合するだけの構造のため、気密漏れが最も発生しやすい封止箇所数を最低数の1カ所にすることができ、気密漏れが発生する確率を低下させている。又、封止箇所で相対する第1の容器11と第2の容器12とを同一の形状構成、及び同一のセラミックスにすることにより、気密封止時及びマザー基板などに圧電振動子10をリフロー等により搭載する際の加熱又は放熱の際に生じる、熱膨張率の違いによる封止箇所に加わる応力を最大限に小さくすることができ、応力に因って低融点ガラス23や、第1の容器又は第2の容器の壁頂部付近等に生じるクラックによる気密漏れを防ぐことができる。
【0020】
又、本実施例では、第1の容器11の高さ寸法H1を第1の容器の幅寸法W1の1/2、第2の容器12の高さ寸法H2を第2の容器の幅寸法W2の1/2とすることで、組み立て後の圧電振動子10としての高さ寸法Hと幅寸法W(W1及びW2と同寸法)とをほぼ等しくなるように形成した。このような外形寸法の圧電振動子10にすることで、マザー基板へ圧電振動子10を搭載する際、圧電振動子10の長さ方向のどの側面をマザー基板に面するようにしても搭載可能となり、マザー基板への搭載時に圧電振動子の表裏などを考慮しなくてすみ、非常に簡易に搭載作業をすることができる。
【0021】
更に、第1の容器11と第2の容器12が同一形状構成及び同一材質のため、部品点数としては1点と見なすことができ、筒型のチップ型圧電振動子や蓋と容器とによるパッケージを利用したチップ型の圧電振動子に比べ、製造管理が容易になり、且つ製造コストを削減することができる。
【0022】
【発明の効果】本発明の圧電振動子により、気密封止を行う箇所を1カ所にすることができ、且つ、その1カ所の封止箇所で相対する構造体を同一の形状構成及び材質にすることができ、熱膨張率の違いにより封止箇所に加わる応力を最大限に小さくすることができることにより、気密漏れの発生を防止でき、因って信頼性の高いチップ型圧電振動子を提供できる効果を成す。又、圧電振動子の外形形状を立方体にし、且つ高さ寸法と幅寸法をほぼ同じにすることで、長さ方向のすべての側面を用いてマザー基板への搭載ができることにより、搭載作業の容易な圧電振動子を提供できる効果を成す。
【図面の簡単な説明】
【図1】図1は、本発明におけるチップ型圧電振動子の実施例を示した構成図である。
【図2】図2は、図1に示した線分A1−A2で切断した断面図である。
【図3】図3は、従来のチップ型圧電振動子の斜視図である。
【符号の説明】
10,圧電振動子
11,第1の容器
12,第2の容器
13,圧電振動子
14,18,段差部
15,19,凹部
16,17,20,21,外部接続端子
22,空間
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric vibrator, and more particularly to a small chip type piezoelectric vibrator.
[0002]
2. Description of the Related Art In recent years, there has been a strong demand for miniaturization of electronic components such as a piezoelectric vibrator and a piezoelectric oscillator mounted on an electronic device, and an ultra-small chip shape having a length of 2 mm or less has been desired. . Accordingly, piezoelectric vibrators of various shapes have been invented.
[0003]
FIG. 3 is a diagram illustrating an example of a chip-type piezoelectric vibrator disclosed as a conventional technique. That is, the piezoelectric vibrator 30 includes insulating plates 32 and 33 having the same shape as the piezoelectric vibrating plate 31 such that a cavity is formed in an exciting electrode portion on both surfaces of a piezoelectric vibrating plate 31 having excitation electrodes formed on both main surfaces. Are arranged, and each is fixed to the piezoelectric substrate 31 to form the outer shape of the piezoelectric vibrator 30.
[0004]
A lead electrode is formed from the excitation electrode of the piezoelectric vibrating plate 31 to the edge of the piezoelectric vibrating plate, and this lead electrode is electrically connected to external connection electrodes 34 and 35 formed on the outer surface of the piezoelectric vibrator 30. Thus, a chip-type piezoelectric vibrator is formed.
[0005]
In addition, as another type of chip type piezoelectric vibrator, a piezoelectric vibrating plate is mounted in a cylindrical case, external connection terminals are fitted to both ends of the tube, and an electrode formed on the main surface of the piezoelectric vibrating plate is connected to an external device. A chip-type piezoelectric vibrator electrically connected to a connection terminal is also disclosed.
[0006]
The following documents are disclosed for the piezoelectric vibrator as described above.
[0007]
[Patent Document 1]
Japanese Patent Application Laid-Open No. 06-140868 [Patent Document 2]
JP-A-06-132768
The applicant has not found any prior art documents related to the present invention other than the prior art documents specified in the above-mentioned prior art document information by the time of filing the present application.
[0009]
As the size of the piezoelectric vibrator has been reduced and the maximum external dimension of the piezoelectric vibrator has been reduced to 2 to 3 mm or less, while maintaining or improving various characteristics and reliability of the piezoelectric vibrator, Further, it is required that the mounting on the motherboard is simple.
[0010]
However, in a piezoelectric vibrator having a structure similar to that of the prior art, since the piezoelectric vibrating plate is used as a part of a member constituting an outer shape of the piezoelectric vibrator, a portion to be hermetically sealed is provided on both sides of the piezoelectric vibrating plate. There will be two places and the man-hour will increase. In addition, since the material is different between the piezoelectric vibrating plate and the insulating plate, the risk of airtight leakage increases due to the stress generated by the difference in the coefficient of thermal expansion due to heating during sealing or reflow to the mother substrate, May cause a decrease in the reliability of the device. Further, since the piezoelectric vibrating plate is exposed on the surface of the component, an impact is easily applied to the piezoelectric vibrating plate directly from the outside, and cracks and the like easily occur in the piezoelectric vibrating plate itself.
[0011]
Furthermore, since the external shape of the cylindrical chip type piezoelectric vibrator is cylindrical, it cannot be easily arranged stably at an arbitrary position on the mother substrate. Further, also in the cylindrical chip type piezoelectric vibrator, a portion for hermetically sealing the inside of the cylinder is provided at two places at both ends of the cylinder, so that the number of steps is increased. In addition, since the material is different between the cylindrical body and the electrode portions at both ends, stress generated around the sealing material due to a difference in coefficient of thermal expansion due to heating at the time of sealing or reflow to the mother substrate causes the sealing material or its surroundings. There is a high risk that cracks will occur in the structure and airtight leakage will occur, leading to a reduction in the reliability of the component. Further, since the number of components constituting the piezoelectric vibrator is large, the production management becomes complicated, and the production cost increases.
[0012]
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems in the prior art, and has a connection pad formed therein as a space for accommodating the piezoelectric vibration plate, the connection pad being fixedly connected to the piezoelectric vibration plate. A concave portion having a stepped portion is formed, and external connection electrodes are formed on outer surfaces of both end portions in the length direction, and the connection pad and the external connection electrode are electrically connected to each other. A first container made of a substance and a second container having the same configuration and the same material as the first container are joined at the top of the concave wall of the first container and the second container. A chip-type piezoelectric vibrator characterized in that a piezoelectric vibrating plate is mounted in a space defined by concave portions of a first container and a second container formed by the above method, and the space is hermetically sealed.
[0013]
Further, in the above-mentioned chip type piezoelectric vibrator, the height dimension of the first container and the second container is の of the width dimension of the piezoelectric vibrator.
[0014]
By using the chip-type piezoelectric vibrator having such a structure, the hermetic sealing can be performed at one location, and the opposing structures at the one sealing location have the same shape and configuration. It is possible to minimize the stress applied to the sealing portion due to the difference in coefficient of thermal expansion. Further, by making the outer shape of the piezoelectric vibrator into a cubic shape and making the height dimension and the width dimension substantially the same, there is an effect that the piezoelectric vibrator can be mounted on the motherboard using all the side surfaces in the length direction.
[0015]
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a partially exploded configuration diagram of a chip type piezoelectric vibrator according to the present invention. FIG. 2 is a sectional view of the disassembled part of FIG. 1 cut along an assembly line A1-A2. In FIGS. 1 and 2, a part of the structure is not shown for clarity, and the dimensions are partially exaggerated.
[0016]
That is, the outer shape of the chip-type piezoelectric vibrator 10 illustrated in FIGS. 1 and 2 is configured by the first container 11 and the second container 12. First, the first container 11 is formed of ceramics, and serves as a space for accommodating the piezoelectric vibration plate 13 having excitation electrodes formed on the front and back main surfaces therein, and a connection pad (not shown) which is fixedly connected to the piezoelectric vibration plate 13. A recess 15 having a step portion 14 formed with () is formed. External connection electrodes 16 and 17 are formed on the outer surfaces of both ends in the longitudinal direction of the first container 11, and the connection pads and the external connection electrodes 16 and 17 are respectively disposed between adjacent pads and electrodes. Electrically connected.
[0017]
The second container 12 has the same configuration and the same material as the first container 11. That is, as a space for accommodating the piezoelectric vibrating plate 13 formed of ceramics and having excitation electrodes formed on the front and back main surfaces therein, a stepped portion in which connection pads (not shown) which are fixedly connected to the piezoelectric vibrating plate 13 are formed. A recess 19 having 18 is formed. External connection electrodes 20 and 21 are formed on the outer surfaces of both ends in the longitudinal direction of the second container 12, and the connection pads and the external connection electrodes 20 and 21 are respectively disposed between adjacent pads and electrodes. Electrically connected.
[0018]
The first container 11 and the second container 12 described above are joined together in a state in which the piezoelectric vibrating plate 13 is mounted on the space 22 formed by the concave portions 15 and 19 with the wall tops of the concave portions 15 and 19 respectively. The inside of 22 is hermetically sealed. In the present embodiment, a low-melting glass 23, which is one of the sealing materials, is applied to the entire top of the wall of the first container 11 and then the second container 12 is mounted with a piezoelectric vibration plate mounted inside. And the whole is heated to melt the low-melting glass, and the first container 11 and the second container 12 are joined to hermetically seal the piezoelectric vibration plate 13 and the space 22.
[0019]
As described above, since the first container 11 and the second container 12 are simply joined together, the number of sealing locations where air leakage is most likely to occur can be reduced to a minimum of one. The probability of the occurrence of is reduced. In addition, the first container 11 and the second container 12 facing each other at the sealing location are made of the same shape and the same ceramic, so that the piezoelectric vibrator 10 is reflowed at the time of hermetic sealing and on a mother substrate. It is possible to minimize the stress applied to the sealing portion due to the difference in the coefficient of thermal expansion, which occurs during the heating or heat radiation when mounting due to the difference between the low melting point glass 23 and the first Airtight leakage due to cracks generated near the top of the wall of the container or the second container can be prevented.
[0020]
In the present embodiment, the height H1 of the first container 11 is set to 1 / of the width W1 of the first container, and the height H2 of the second container 12 is set to the width W2 of the second container. The height H and the width W (same dimensions as W1 and W2) of the assembled piezoelectric vibrator 10 are made substantially equal to each other. With the piezoelectric vibrator 10 having such external dimensions, when the piezoelectric vibrator 10 is mounted on the motherboard, the piezoelectric vibrator 10 can be mounted even if any side in the length direction of the piezoelectric vibrator 10 faces the motherboard. Therefore, it is not necessary to consider the front and back of the piezoelectric vibrator when mounting the piezoelectric vibrator on the motherboard, and the mounting work can be performed very easily.
[0021]
Further, since the first container 11 and the second container 12 have the same shape and configuration and the same material, the number of parts can be regarded as one, and a package including a cylindrical chip type piezoelectric vibrator or a lid and a container is provided. As compared with a chip-type piezoelectric vibrator utilizing the method, the production management becomes easier and the production cost can be reduced.
[0022]
According to the piezoelectric vibrator of the present invention, the hermetic sealing can be performed at one location, and the opposing structures at the one sealing location have the same shape, structure and material. To minimize the stress applied to the sealing part due to the difference in the coefficient of thermal expansion, thereby preventing the occurrence of airtight leakage and providing a highly reliable chip-type piezoelectric vibrator. The effect that can be achieved. Also, by making the external shape of the piezoelectric vibrator into a cube and making the height and width dimensions almost the same, mounting on the motherboard can be performed using all side surfaces in the length direction, making mounting work easier. This provides an effect that a simple piezoelectric vibrator can be provided.
[Brief description of the drawings]
FIG. 1 is a configuration diagram showing an embodiment of a chip-type piezoelectric vibrator according to the present invention.
FIG. 2 is a sectional view taken along line A1-A2 shown in FIG.
FIG. 3 is a perspective view of a conventional chip-type piezoelectric vibrator.
[Explanation of symbols]
10, piezoelectric vibrator 11, first container 12, second container 13, piezoelectric vibrators 14, 18, step portions 15, 19, concave portions 16, 17, 20, 21, external connection terminal 22, space

Claims (2)

内部に圧電振動板を収納する空間として、該圧電振動板と固着導通する接続パッドが形成された段差部を有する凹部が形成され、長さ方向の両端縁部の外表面上に外部接続電極が形成され、該接続パッドと該外部接続電極とが各々電気的に接続しており、絶縁性物質で構成された第1の容器と、該第1の容器と同形状構成及び同材質の第2の容器とを、該第1の容器及び該第2の容器の凹部壁頂部で接合し、接合により形成された該第1の容器及び該第2の容器の凹部による空間に圧電振動板を搭載し、該空間を気密封止して形成したことを特徴とするチップ型圧電振動子。As a space for accommodating the piezoelectric vibrating plate therein, a concave portion having a stepped portion formed with a connection pad which is fixedly connected to the piezoelectric vibrating plate is formed, and external connection electrodes are provided on outer surfaces of both longitudinal end portions. The connection pad and the external connection electrode are electrically connected to each other, and a first container made of an insulating material, and a second container having the same shape and the same material as the first container. And the first container and the second container are joined at the tops of the recessed walls of the first container and the second container, and the piezoelectric vibrating plate is mounted in a space formed by joining the first container and the second container. A chip-type piezoelectric vibrator characterized in that the space is hermetically sealed. 該第1の容器及び該第2の容器の高さ寸法が、圧電振動子の幅寸法の1/2であることを特徴とする請求項1に記載のチップ型圧電振動子。2. The chip-type piezoelectric vibrator according to claim 1, wherein a height of the first container and a height of the second container are の of a width of the piezoelectric vibrator.
JP2003092985A 2003-03-31 2003-03-31 Chip-type piezoelectric vibrator Expired - Fee Related JP4364537B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003092985A JP4364537B2 (en) 2003-03-31 2003-03-31 Chip-type piezoelectric vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003092985A JP4364537B2 (en) 2003-03-31 2003-03-31 Chip-type piezoelectric vibrator

Publications (2)

Publication Number Publication Date
JP2004304376A true JP2004304376A (en) 2004-10-28
JP4364537B2 JP4364537B2 (en) 2009-11-18

Family

ID=33405884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003092985A Expired - Fee Related JP4364537B2 (en) 2003-03-31 2003-03-31 Chip-type piezoelectric vibrator

Country Status (1)

Country Link
JP (1) JP4364537B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007158465A (en) * 2005-11-30 2007-06-21 Kyocera Kinseki Corp Piezoelectric device
JP2008091971A (en) * 2006-09-29 2008-04-17 Daishinku Corp Piezoelectric vibration device
JP2011066922A (en) * 2010-11-05 2011-03-31 Daishinku Corp Piezoelectric vibration device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007158465A (en) * 2005-11-30 2007-06-21 Kyocera Kinseki Corp Piezoelectric device
JP2008091971A (en) * 2006-09-29 2008-04-17 Daishinku Corp Piezoelectric vibration device
JP4706609B2 (en) * 2006-09-29 2011-06-22 株式会社大真空 Piezoelectric vibration device
JP2011066922A (en) * 2010-11-05 2011-03-31 Daishinku Corp Piezoelectric vibration device

Also Published As

Publication number Publication date
JP4364537B2 (en) 2009-11-18

Similar Documents

Publication Publication Date Title
JP2003318690A (en) Quartz resonator for surface mounting
JP2008078791A (en) Surface mounting crystal oscillator
WO2011010521A1 (en) Surface mount crystal oscillator
JP2005198237A (en) Piezoelectric vibration device
JP4916775B2 (en) Piezoelectric oscillator
JP2007043351A (en) Piezoelectric vibrating device
JP2002325024A (en) Electronic component and method for forming substrate electrode thereof
JP2004304376A (en) Chip piezoelectric vibrator
JP4890914B2 (en) Support structure of quartz crystal resonator element
JP2006033413A (en) Piezoelectric vibration device
JP2007235289A (en) Piezoelectric oscillator
JPH10335970A (en) Surface mounted type piezoelectric vibrator
JP2010136243A (en) Vibrator
JP2001352226A (en) Piezoelectric oscillation device
JP2004357080A (en) Piezoelectric diaphragm
TWI836544B (en) Piezoelectric vibration device and manufacturing method of piezoelectric vibration device
JP2001308213A (en) Method and structure for sealing ceramic package
US11387805B2 (en) Electronic component
JP2007266829A (en) Piezoelectric device
JP4373309B2 (en) Package for electronic components
JP2005333037A (en) Package for electronic parts, and piezo-electric oscillating device using the same
JP2006211065A (en) Piezoelectric oscillator and its manufacturing method
JP2007274071A (en) Piezoelectric vibration device and base thereof
JP2002344277A (en) Package for piezoelectric vibrating device
JP2008005331A (en) Piezoelectric vibrator

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060328

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090226

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090304

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090423

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090519

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090716

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20090811

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20090819

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120828

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

Ref document number: 4364537

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120828

Year of fee payment: 3

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120828

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120828

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130828

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees