JP2004301527A5 - - Google Patents
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- Publication number
- JP2004301527A5 JP2004301527A5 JP2003091659A JP2003091659A JP2004301527A5 JP 2004301527 A5 JP2004301527 A5 JP 2004301527A5 JP 2003091659 A JP2003091659 A JP 2003091659A JP 2003091659 A JP2003091659 A JP 2003091659A JP 2004301527 A5 JP2004301527 A5 JP 2004301527A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003091659A JP4249524B2 (en) | 2003-03-28 | 2003-03-28 | Probe card |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003091659A JP4249524B2 (en) | 2003-03-28 | 2003-03-28 | Probe card |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004301527A JP2004301527A (en) | 2004-10-28 |
| JP2004301527A5 true JP2004301527A5 (en) | 2006-05-18 |
| JP4249524B2 JP4249524B2 (en) | 2009-04-02 |
Family
ID=33404980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003091659A Expired - Fee Related JP4249524B2 (en) | 2003-03-28 | 2003-03-28 | Probe card |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4249524B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5276895B2 (en) * | 2008-05-19 | 2013-08-28 | 新光電気工業株式会社 | Probe card and manufacturing method thereof |
| TWI706139B (en) * | 2019-10-25 | 2020-10-01 | 巨擘科技股份有限公司 | Metal probe structure and method for fabricating the same |
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2003
- 2003-03-28 JP JP2003091659A patent/JP4249524B2/en not_active Expired - Fee Related