JP2004301245A - Liquid enclosed type damping device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid enclosed type damping device capable of favorably preventing generation of abnormal sound due to cavitation while avoiding large cost increase. <P>SOLUTION: This device comprises a first mounting member 1, a rubber elastic member 2 fixed to the first mounting member 1 on one end side, and having a recess 23 opened on the other end side, a second mounting member 3 fixed to an outer circumference on the other end side of the rubber elastic member 2, and a diaphragm 4 of which circumferential edge part is held by an inner circumference of the second mounting member 2 to form a liquid chamber 45 in which liquid L is enclosed to the second recess 23. It is also provided with a partition member 5 of which circumferential edge part is held by the inner circumference of the second mounting member 3 to part the liquid chamber 45 to a main liquid chamber 45 and a subsidiary liquid chamber 47, and which has a first and a second orifice passages 54 and 56, and a film valve member 6 of which circumferential edge part is held by an inner circumference of the partition member 5 to part the subsidiary liquid chamber 47 to a first subsidiary liquid chamber 47a and a second subsidiary liquid chamber 47b for closing an opening of the second orifice passage 56, which opens the opening when inner pressure in the main liquid chamber 46 becomes a prescribed value or higher. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a liquid filled type vibration damping device suitably used as, for example, an engine mount or a body mount of a vehicle.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, when an engine serving as a vibration source is mounted on a vehicle, an engine mount as a vibration isolator is interposed between a support such as a body frame and a supported body such as a power unit. . As such an engine mount, for example, various liquid-filled vibration damping devices as disclosed in Patent Documents 1 to 3 and the like are known.
[0003]
Among them, the negative pressure switching type liquid-filled vibration damping device disclosed in Patent Document 1 and the like is, for example, as shown in FIG. A rubber elastic body 102 having a concave portion 123 opening to the side, and a bottomed cylindrical shape fixed to the outer periphery of the other end side of the rubber elastic member 102 to close the opening of the concave portion 123 and form an internal space between the rubber elastic body 102 and the concave portion 123. The liquid chamber 145 in which the liquid L is sealed is formed between the second mounting member 103 and the concave portion 123 of the rubber elastic body 102, the peripheral portion being held by the inner periphery of the second mounting member 103, and the second mounting member 103. A diaphragm 104 that forms a switching chamber 148 that can selectively introduce atmospheric pressure and negative pressure between the member 103 and a liquid chamber 145 whose peripheral portion is held by the inner periphery of the second mounting member 103 and a main liquid chamber 146. Partitioned into sub liquid chamber 147 A first orifice passage 154 formed in the portion to extend in the circumferential direction and communicates with the main liquid chamber 146 and the sub liquid chamber 147, and a main liquid chamber 146 formed in the center portion to extend in the axial direction and A partition member 105 having a second orifice passage 156 communicating with the liquid chamber 147; and a coil spring disposed in the switching chamber 148 to bias the central portion of the diaphragm 104 to close the opening of the second orifice passage 156. 106.
[0004]
The liquid filled type vibration damping device configured as described above connects and fixes the first attachment member 101 to one of the attachment portions of the vehicle body and the power unit, and attaches the second attachment member 103 to one of the other attachment portions. It is used by being attached and fixed. The vibration in the high frequency region generated by the operation of the engine is effectively absorbed by the elastic action of the rubber elastic body 102. In addition, vibrations in a low frequency region such as an engine shake (5 to 12 Hz), idle vibration (20 to 30 Hz), and low-speed muffled sound (100 to 150 Hz) are accompanied by changes in the volumes of the main liquid chamber 146 and the sub liquid chamber 147. The liquid L flowing through the first orifice passage 154 and the second orifice passage 156 is effectively absorbed by the liquid column resonance action.
[0005]
The liquid-filled type vibration damping device allows the second orifice passage 156 to be opened and closed by selectively switching between the introduction of atmospheric pressure and the introduction of negative pressure into the switching chamber 148. The orifice passage corresponding to the above can be selectively used.
[0006]
In this regard, the liquid-filled type vibration damping device disclosed in Patent Document 2 does not employ the switching method between the introduction of the atmospheric pressure and the introduction of the negative pressure, and uses an opening / closing member such as the diaphragm 104 for opening and closing the second orifice passage 156 as an actuator. It is driven by.
[0007]
[Patent Document 1]
Japanese Patent No. 3353082 [Patent Document 2]
JP 2003-4089 A [Patent Document 3]
Japanese Patent Publication No. Hei 7-107416
[Problems to be solved by the invention]
By the way, in the above-described liquid-filled type vibration damping device, when the liquid L in the liquid chamber 145 flows due to vibration input, the liquid L in the liquid L 145 (particularly, the main liquid chamber 146) changes in accordance with the pressure change. Many bubbles are generated by the vaporization of the dissolved oxygen, and cavitation (cavitation phenomenon) occurs. The bubbles generated in the liquid L in this manner generate abnormal noise when they disappear due to a pressure change or a collision, and the abnormal noise is transmitted to the passenger compartment, so that the quietness and the riding comfort are deteriorated. Cause. Such abnormal noise due to cavitation is likely to occur when a large vibration is input, such as during cranking or over a projection while the vehicle is running.
[0009]
In order to prevent the generation of this abnormal noise, in the liquid filled type vibration damping devices of Patent Document 1 and Patent Document 2, the second orifice passage 156 is selectively used in a situation where cavitation is likely to occur, This makes it possible to prevent cavitation by taking measures. However, in these liquid filled type vibration damping devices, since the negative pressure, the coil spring 106, the actuator, or the like is used to open and close the second orifice passage 156, the number of parts increases, and the structure is increased. Is also complicated. For this reason, the number of manufacturing steps and the number of assembling steps for each component are increased, and a significant cost increase cannot be avoided.
[0010]
On the other hand, in the liquid-filled type vibration damping device of Patent Document 3, an elastic plate that functions as a valve by forming a cut (cut portion) is provided at the center of a partition member that separates the main liquid chamber and the sub liquid chamber. This can prevent cavitation from occurring. However, in this case, even when the difference between the internal pressures of the main liquid chamber and the sub liquid chamber is small, the cut portion of the elastic plate tends to be in an open state. It becomes difficult to obtain the liquid column resonance effect, and there is a concern in reliability.
[0011]
The present invention has been made in view of the above circumstances, and provides a liquid-filled cylindrical vibration damping device capable of avoiding a significant increase in cost and favorably preventing generation of abnormal noise due to cavitation. It is an issue to be solved.
[0012]
Means for Solving the Problems, Functions and Effects of the Invention
According to a first aspect of the present invention, there is provided a liquid-filled vibration isolator according to the first aspect of the present invention, wherein the rubber elastic body has a first mounting member and a concave portion having one end fixed to the first mounting member and opened to the other end. A cylindrical second attachment member fixed to the outer periphery of the other end side of the rubber elastic body, and a peripheral portion held by an inner periphery of the second attachment member, and between the concave portion of the rubber elastic body. A diaphragm forming a liquid chamber in which liquid is sealed, and a peripheral portion held on the inner periphery of the second mounting member to partition the liquid chamber into a main liquid chamber and a sub-liquid chamber, and the peripheral portion is formed in a circumferential direction. A first orifice passage formed to extend and communicate the main liquid chamber and the sub liquid chamber; and a central portion formed to extend in the axial direction to communicate the main liquid chamber and the sub liquid chamber. A partition member having a second orifice passage, and a peripheral portion held at the inner periphery of the partition member. The sub-liquid chamber is partitioned into a first sub-liquid chamber and a second sub-liquid chamber, and an opening of the second orifice passage on the side of the sub-liquid chamber is closed at the center thereof, so that the internal pressure of the main liquid chamber is equal to or higher than a predetermined value. And a membrane-shaped valve member that opens the opening that has been closed when the height is higher.
[0013]
In the liquid filled type vibration damping device of the present invention, the opening of the second orifice passage on the side of the auxiliary liquid chamber is normally closed by the membrane valve member. In this state, when a vibration is input to the extent that the internal pressure of the main liquid chamber does not increase to a predetermined value or more, the liquid column resonance action of the liquid flowing through the first orifice passage with the volume change of the main liquid chamber and the first sub liquid chamber. Thereby, vibrations in a low frequency region such as engine shake and idle vibration are effectively absorbed.
[0014]
Then, when a large vibration is input such that the internal pressure of the main liquid chamber becomes higher than a predetermined value, the membrane valve member separates from the opening of the second orifice passage against the pressing force due to the internal pressure of the main liquid chamber, The second orifice passage is opened. Thus, the liquid flows from the main liquid chamber to the second sub liquid chamber via the second orifice passage, and the internal pressure of the main liquid chamber is released. Therefore, the pressure change in the main liquid chamber does not become larger than a predetermined value, and cavitation hardly occurs in the liquid. Thereby, generation of abnormal noise due to cavitation is favorably prevented.
[0015]
When the second orifice passage is opened, vibrations such as idle vibration and muffled sound are effectively absorbed based on the liquid column resonance effect of the liquid flowing through the second orifice passage. Usually, the resonance frequency set in the second orifice passage is set to be higher than the resonance frequency set in the first orifice passage.
[0016]
Therefore, according to the liquid filled type vibration damping device of the present invention, the structure having the film-shaped valve member for opening the opening of the second orifice passage which is closed when the internal pressure of the main liquid chamber becomes higher than a predetermined value is provided. Therefore, a significant increase in cost can be avoided, and generation of abnormal noise due to cavitation can be favorably prevented.
[0017]
According to a second aspect of the present invention, in the first aspect of the invention, the partition member includes an annular first orifice forming portion that forms the first orifice passage, and the partition member is disposed inside the first orifice forming portion. A means comprising a cylindrical second orifice forming part forming a second orifice passage, and a ring-shaped partition wall connecting the first orifice forming part and the second orifice forming part is adopted. are doing.
[0018]
According to this means, the partition member can be made compact and have a more functional structure.
[0019]
According to a third aspect of the present invention, in the invention of the second aspect, the partition wall portion is formed in a ring plate shape by an elastic material, and is inclined so as to become farther from the membrane valve member from the inside to the outside in the radial direction. We adopt the means that we do.
[0020]
According to this means, the opening of the second orifice passage which is integrally connected to the partition wall portion, and the membrane-shaped valve member which is disposed to face the opening so as to close the opening are arranged so as to push each other. Therefore, the opening of the second orifice passage can be more reliably closed by the membrane valve member.
[0021]
According to a fourth aspect of the present invention, in the first to third aspects, the membrane valve member is formed in a dome shape by an elastic material, and is seated at an opening of the second orifice passage at a central portion thereof. Means of having a seat for closing the opening is employed.
[0022]
According to this means, the seat of the membrane valve member can be seated in a state pressed against the opening of the second orifice passage, and the opening of the second orifice passage can be more reliably closed. It becomes possible.
[0023]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0024]
FIG. 1 is a cross-sectional view along the axial direction of a liquid-filled type vibration damping device according to the present embodiment.
[0025]
As shown in FIG. 1, the liquid-filled type vibration damping device of the present embodiment has a first mounting member 1 and a rubber elastic body having one end fixed to the first mounting member 1 and a concave portion 23 opened at the other end. 2, a second mounting member 3 fixed to the outer periphery of the other end of the rubber elastic body 2, a peripheral portion held by the inner circumference of the second mounting member 3, and the liquid L is sealed between the concave portion 23. The liquid chamber 45 is partitioned into a main liquid chamber 46 and a sub-liquid chamber 47 with the peripheral edge held by the inner periphery of the diaphragm 4 forming the liquid chamber 45 and the second mounting member 3, and the first orifice passage 54 and the second A partition member 5 having an orifice passage 56, a sub-liquid chamber 47 partitioned into a first sub-liquid chamber 47a and a second sub-liquid chamber 47b with a peripheral edge held by the inner periphery of the partition member 5, and a second orifice passage And a film-like valve member 6 that opens and closes an opening on the side of the sub liquid chamber 47.
[0026]
The first mounting member 1 is formed of an iron-based metal, and has a shaft portion 11 having a screw hole 11a into which a mounting bolt (not shown) is screwed, and a radially inward direction from one end of the shaft portion 11. And a ring-shaped flange 12 protruding from
[0027]
The rubber elastic body 2 is formed in a cylindrical shape whose one end is closed by vulcanizing and molding a rubber material. The rubber elastic body 2 includes a main body 21 formed in a substantially truncated cone shape, and a cylindrical portion 22 extending in the axial direction from an outer peripheral portion of a large diameter end of the main body 21. On the inside, a concave portion 23 that opens to the other end side is formed. The rubber elastic body 2 has a small-diameter end portion of the main body portion 21 fixed to the outer peripheral surface of the shaft portion 11 of the first mounting member 1 by vulcanization bonding, and is disposed coaxially with the first mounting member 1. .
[0028]
The second mounting member 3 is formed in a substantially straight cylindrical shape with both ends opened by a ferrous metal. The second mounting member 3 is arranged coaxially with the rubber elastic body 2 by the outer peripheral surface of the rubber elastic body 2 being vulcanized and bonded to the inner peripheral surface thereof. That is, the outer peripheral surfaces of the main body portion 21 and the cylindrical portion 22 of the rubber elastic body 2 are fixed to the inner peripheral surface of the second mounting member 3.
[0029]
The diaphragm 4 is formed in a dome shape by a rubber film, and a peripheral portion thereof is held by being vulcanized and adhered to a holding frame 41 formed in a ring shape. The diaphragm 4 is held by the holding member 41 being fixed to the inner periphery of the end of the second mounting member 3 on the side where the recess 23 opens, with the cylindrical portion 22 interposed therebetween. Thus, a closed liquid chamber 45 is formed between the diaphragm 4 and the concave portion 23 of the rubber elastic body 2. The liquid chamber 45 is filled with an incompressible liquid L such as water, alkylene glycol, or silicone oil.
[0030]
The partition member 5 includes an annular first orifice forming portion 51 forming a first orifice passage 54, and a cylindrical second orifice forming formed inside the first orifice forming portion 51 to form a second orifice passage 56. It comprises a portion 55 and a ring-shaped partition wall portion 57 connecting the first orifice forming portion 51 and the second orifice forming portion 55.
[0031]
The first orifice forming portion 51 is formed by being divided into two parts. As shown in FIGS. 2 and 3, a first metal part 52 having a U-shaped cross section and a ring shape is provided. As shown, a second metal component 53 is formed in a ring shape with a J-shaped cross section, and these are superposed in two stages. The first metal component 52 is formed with a first concave groove 52a that is open on the outer peripheral side and extends in the circumferential direction so as to make substantially one round, and the first concave groove 52a is blocked by the wall portion 52b. On both sides of the wall 52b, that is, at the beginning and end of the first groove 52a, a first opening 52c formed in a side wall not facing the second metal component 53, and a second metal component A second opening 52d is provided in the side wall portion facing 53.
[0032]
The second metal component 53 is formed such that a second concave groove 53a which is open on the side facing the first metal component 52 and extends in the circumferential direction substantially makes a full circle. The second concave groove 53a is formed by a rubber wall. Blocked by 53b. The rubber wall 53b is provided at a position slightly shifted in the circumferential direction from the second opening 52d, and a portion corresponding to the second opening 52d is a starting end of the second concave groove 53a. A third opening 53c is provided at the end of the second groove 53a on the side wall not facing the first metal component 52.
[0033]
As shown in FIG. 1, the first orifice forming portion 51 has a first metal component 52 and a second metal component 53 superimposed in two steps, and a peripheral edge portion is held on the inner periphery of the second mounting member 3. When arranged in the state, the openings on the outer peripheral side of the first groove 52a and the second groove 53a are liquid-tightly covered by the cylindrical portion 22 of the rubber elastic body 2. Thereby, the first groove 52a and the second groove 53a are connected by the second opening 52d, and the first orifice passage 54 extending from the first opening 52c to the third opening 53c is formed. The length and cross-sectional area of the first orifice passage 54 are appropriately set in accordance with the frequency of vibration for the purpose of reducing engine shake, idle vibration, and the like.
[0034]
As shown in FIGS. 1 to 3, the second orifice forming portion 55 is formed of a metal pipe formed in a cylindrical shape slightly shorter than the thickness of the first metal component 52, and has a second orifice passage 56 formed by an inner hole thereof. Is formed. A flange portion is formed at one open end of the second orifice forming portion 55 (on the side facing the membrane valve member 6) by being bent at a substantially right angle in a radially outward direction. The second orifice forming portion 55 is coaxially arranged inside the first metal component 52 at a distance. The length and cross-sectional area of the second orifice passage 56 are set as appropriate in accordance with the frequency of vibration for the purpose of reducing idle vibration and muffled noise, for example.
[0035]
As shown in FIGS. 1 to 3, the partition wall portion 57 is formed in a flat ring plate shape by vulcanizing a rubber material. The outer peripheral portion of the partition wall portion 57 is vulcanized and bonded to the inner peripheral surface of the first metal component 52, and the inner peripheral portion is vulcanized and bonded to the outer peripheral surface of the second orifice forming portion 55. Thereby, both are integrally connected.
[0036]
As shown in FIG. 1, the partition member 5 configured as described above is arranged such that the first orifice forming portion 51 on the outer peripheral edge thereof is held on the inner periphery of the second mounting member 3. Thus, the partition member 5 partitions the liquid chamber 45 into a main liquid chamber 46 on the first mounting member 1 side and a sub liquid chamber 47 on the diaphragm 4 side. The main liquid chamber 46 and the sub liquid chamber 47 are connected by a first orifice passage 54 and a second orifice passage 56.
[0037]
As shown in FIGS. 1, 4 and 5, the membrane-shaped valve member 6 is formed in a dome shape by vulcanizing a rubber material, and a flat seating portion 61 is provided at the center thereof. I have. The film-shaped valve member 6 is formed by being integrally vulcanized with the second metal component 53, and its peripheral edge is vulcanized and bonded to the inner peripheral surface of the second metal component 53. The membrane valve member 6 is disposed in the auxiliary liquid chamber 47 in a state where the seating portion 61 is pressed against the opening of the second orifice passage 56, whereby the opening of the second orifice passage 56 is moved to the seating portion. It is closed while being constantly pressed by 61. The membrane-shaped valve member 6 partitions the sub liquid chamber 47 into a first sub liquid chamber 47a on the diaphragm 4 side and a second sub liquid chamber 47b on the partition wall 57 side.
[0038]
The liquid-filled cylindrical anti-vibration device according to the present embodiment configured as described above has the first mounting member 1 connected and fixed to one of the mounting portions of the vehicle body and the power unit, and one of the other mounting portions. The second mounting member 3 is attached and used by being connected and fixed.
[0039]
When vibration in a high frequency region generated by the operation of the engine is input, the vibration is effectively absorbed by the elastic action of the rubber elastic body 2. Further, when vibrations in a low frequency region such as engine shake and idle vibration are input, the liquid column resonance of the liquid L flowing through the first orifice passage 54 in accordance with the volume change of the main liquid chamber 46 and the first sub liquid chamber 47a. The action effectively absorbs the vibration.
[0040]
When a large vibration is input such that the internal pressure of the main liquid chamber 46 becomes higher than a predetermined value, the seating portion 61 of the membrane valve member 6 is pressed against the second orifice by the internal pressure of the main liquid chamber 46. The second orifice passage 56 is opened away from the opening of the passage 56. As a result, the liquid L flows from the main liquid chamber 46 to the second sub liquid chamber 47b through the second orifice passage 56, and the internal pressure of the main liquid chamber 46 is released. Therefore, the pressure change in the main liquid chamber 46 does not become larger than a predetermined value, so that cavitation hardly occurs in the liquid L. Thereby, generation of abnormal noise due to cavitation is favorably prevented.
[0041]
When the second orifice passage 56 is opened, vibrations such as idle vibration and muffled sound are effectively absorbed based on the liquid column resonance action of the liquid L flowing through the second orifice passage 56.
[0042]
As described above, according to the liquid-filled cylindrical vibration isolator of the present embodiment, the opening of the second orifice passage 56 that is closed when the internal pressure of the main liquid chamber 46 becomes higher than a predetermined value is opened. Because of the structure having the membrane-shaped valve member 6, a significant increase in cost can be avoided, and generation of abnormal noise due to cavitation can be favorably prevented.
[0043]
In the present embodiment, the partition wall portion 57 of the partition member 5 is formed in a flat ring plate shape by rubber. However, like the partition wall portion 57a shown in FIG. Can be formed so as to be inclined away from the membrane-shaped valve member 6 as going toward. With this configuration, the opening of the second orifice passage 56 integrally connected to the partition wall portion 57a and the membrane valve member 6 opposed to each other so as to close the opening are pressed against each other. Therefore, the opening of the second orifice passage 56 can be more reliably closed by the membrane valve member 6.
[0044]
The partition wall portion 57 of the present embodiment is made of rubber. However, like the partition wall portion 57b shown in FIG. 7, the partition wall portion 57 is made of the same metal as the first metal component 52 and the second orifice forming portion 55 made of metal. And may be formed integrally.
[0045]
Further, the first mounting member 1 and the second mounting member 3 of the present embodiment may be made of an aluminum-based metal.
[Brief description of the drawings]
FIG. 1 is a sectional view along an axial direction of a liquid-filled type vibration damping device according to an embodiment of the present invention.
FIG. 2 is a plan view of some partition members used in the embodiment of the present invention.
FIG. 3 is a cross-sectional view of a part of a partition member used in the embodiment of the present invention, which is a cross-sectional view taken along line III-III of FIG. 2;
FIG. 4 is a plan view of some partition members and a membrane valve member used in the embodiment of the present invention.
5 is a sectional view of a part of the partition member and the membrane valve member used in the embodiment of the present invention, and is a sectional view taken along line VV in FIG.
FIG. 6 is an explanatory diagram showing a cross section of a modification of the partition member used in the embodiment of the present invention.
FIG. 7 is an explanatory diagram showing a cross section of another modification of the partition member used in the embodiment of the present invention.
FIG. 8 is a cross-sectional view along the axial direction of a conventional liquid filled type vibration damping device.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1, 101 ... 1st attachment member 2, 102 ... Rubber elastic body 3, 103 ... 2nd attachment member 4, 104 ... Diaphragm 5, 105 ... Partition member 6 ... Membranous valve member 11 ... Shaft part 11a ... Screw hole 12 ... Flange part 21 ... Main body part 22 ... Cylinder part 23,123 ... Concave part 41 ... Holding frame 45, 145 ... Liquid chamber 46, 146 ... Main liquid chamber 47, 147 ... Sub liquid chamber 47a ... First sub liquid chamber 47b ... First 2 sub liquid chamber 51: first orifice forming portion 52: first metal component 52a: first concave groove 52b: wall portion 52c: first opening 52d: second opening 53: second metal component 53a: second concave Groove 53b Rubber wall 53c Third opening 54, 154 First orifice passage 55 Second orifice forming portion 56, 156 Second orifice passage 57, 57a, 57b Partition wall 61 Seat 106 Spring 1 8 ... switching chamber L ... Liquid

Claims (4)

A first mounting member;
A rubber elastic body having one end fixed to the first mounting member and having a concave portion opened to the other end;
A cylindrical second mounting member fixed to the outer periphery on the other end side of the rubber elastic body;
A diaphragm having a peripheral portion held on the inner periphery of the second mounting member and forming a liquid chamber in which a liquid is sealed between the second mounting member and the concave portion of the rubber elastic body;
The liquid chamber is partitioned into a main liquid chamber and a sub liquid chamber by holding a peripheral portion on the inner periphery of the second mounting member, and is formed so as to extend in the peripheral direction at the peripheral portion, and the main liquid chamber and the sub liquid chamber are formed. A first orifice passage communicating with the liquid chamber, and a partition member having a second orifice passage formed at the center thereof so as to extend in the axial direction and communicating the main liquid chamber and the sub liquid chamber;
The sub-liquid chamber is partitioned into a first sub-liquid chamber and a second sub-liquid chamber by holding a peripheral portion on the inner periphery of the partition member, and a central portion of the sub-liquid chamber is located on the side of the sub-liquid chamber of the second orifice passage. A membrane valve member that closes an opening and opens the closed opening when the internal pressure of the main liquid chamber becomes higher than a predetermined value,
A liquid filled type vibration damping device characterized by comprising: The partition member includes an annular first orifice forming part that forms the first orifice passage, and a cylindrical second orifice forming part that is disposed inside the first orifice forming part and forms the second orifice passage. The liquid-sealed type vibration damping device according to claim 1, further comprising a ring-shaped partition wall connecting the first orifice forming portion and the second orifice forming portion. 3. The liquid filling device according to claim 2, wherein the partition wall portion is formed in a ring plate shape from an elastic material, and is inclined so as to be more distant from the film-shaped valve member from the inside in the radial direction to the outside. Type anti-vibration device. 2. The membrane valve member according to claim 1, wherein the membrane valve member is formed in a dome shape by an elastic material, and has a seat at a center portion thereof, which seats on an opening of the second orifice passage and closes the opening. 4. A liquid-filled type vibration damping device according to any one of claims 1 to 3.

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