JP2004291515A - Inkjet head and manufacturing method therefor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a working method which prevents the falling, peeling and poor conduction of an oscillator from being caused when the individual oscillators are cut out from a piezoelectric element, and which can be applied to heads for various uses while enhancing the yield of manufacture of a driving unit. <P>SOLUTION: In this inkjet head having an actuator wherein a plurality of oscillator groups are formed by dividing the piezoelectric element, joined to a base, in such a manner that one end of the piezoelectric element serves as a free end, a groove is provided in almost the same position as a position of pre-division on a surface, to be joined to the piezoelectric element, of the base, and cutting is performed in accordance with the groove when the piezoelectric element is divided in such a shape as teeth of a comb. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an ink-jet head, and more specifically, in an ink-jet head using a piezoelectric element as a drive source of an on-demand type ink-jet head recording apparatus, a shape of a bonding surface of a base supporting and fixing the piezoelectric element and the piezoelectric element, The material of the base.
[0002]
[Prior art]
As one of the drop-on-demand type ink jet heads, there is a method using a laminated piezoelectric element as a drive source. As the type of multilayer piezoelectric element, the direction of the electric field, such as the longitudinal vibration and lateral vibration divided by the displacement direction, for example, d ₃₃ laminated piezoelectric element, such as d ₃₁ stacked piezoelectric element is generally used.
[0003]
For ink-jet head using a piezoelectric element of d ₃₃ type in these drive source, after attaching a bulk piezoelectric element to the base of the gate-shaped, one end comb teeth-shaped so that the free ends vibrator (For example, see Patent Document 1).
[0004]
Further, the ceramic plate electrode pattern is formed, stuck bulk-shaped piezoelectric element, there is what is cut into strips of laminated piezoelectric element ₃₃ type d using a dicing saw (e.g., Patent Document 2 reference). At this time, since the base surface is also cut at the same time, individual electrode patterns can be formed at the same time, and subsequent wiring becomes easy.
[0005]
[Patent Document 1]
Japanese Patent Publication No. 4-52213 [Patent Document 2]
JP-A-8-142325
[Problems to be solved by the invention]
However, as a problem that occurs when dicing in a strip shape, when the piezoelectric element is cut, the cutting may not be successful depending on the material of the base supporting the piezoelectric element. For this reason, in the invention described in Patent Literature 2, the material of the base is limited to ceramic because a load is applied to the blade. In metal dicing, since a dicing blade that is easily worn is used, the dressing period is shortened and efficiency is poor. Furthermore, when dicing is performed by bonding a piezoelectric element and a base that cannot be hardened, such as SUS430, which is a vibration isolator among metals, a turnover 37 occurs on the metal side serving as the base 3, as shown in FIG. An external force is applied to the vibrator 2 that has been fractured. This may cause the vibrator 2 to be separated. If the nozzle pitch is fine, the vibrator 2 may blow off during dicing.
[0007]
On the other hand, when the base is limited to ceramic and all the channels are made of stainless steel or the like, a high temperature cannot be applied to the joining of the driving unit and the channel because the coefficients of thermal expansion are greatly different. Also, when the ink jet head is used, if the operating temperature becomes high, both ends are displaced due to thermal expansion, resulting in a non-ejection state. In addition, since the mass of ceramic is lower than that of metal, mutual interference (crosstalk) at the time of ink ejection is slightly increased, and the ejection stability is poor.
[0008]
Furthermore, when the bulk-shaped piezoelectric element is cut into a comb-like shape, individual electrode patterns must be formed in advance in accordance with the cutting pitch, which is troublesome. In addition, since the electrode pattern of the piezoelectric element and the electrode pattern of the base must be matched, the number of steps is increased as compared with a rectangular shape.
[0009]
[Means for Solving the Problems]
The present invention constitutes an inkjet head having the following features and manufacturing method, and effectively solves the above-mentioned problems.
(1) An ink flow including a plurality of nozzles arranged in a row, a plurality of pressure chambers respectively corresponding to the nozzles and communicating with the nozzles, and a diaphragm forming a part of the pressure chambers. A fixing plate having a hole for fixing an ink flow path portion is formed so as to surround the periphery of the pressure chamber row, and the piezoelectric element bonded to one surface of the base is formed such that one end is a free end. By joining a drive unit composed of a group of vibrators divided by the length reaching the base together with the pressure chambers to the ink flow path unit, the displacement of the piezoelectric element is changed via the vibration plate. In the ink jet head that transmits to the pressure chamber and discharges ink from the nozzle,
An ink jet head, characterized in that a groove is provided at a position substantially the same as a position at which a tooth is to be cut on a joining surface of the base with the piezoelectric element.
(2) The ink jet head according to (1), wherein the groove has a depth at which the blade to be divided does not come into contact at the time of splitting or a depth at which a curl generated when cutting is performed does not reach the piezoelectric element. .
(3) The inkjet head according to claim 1, wherein the groove is formed by dicing or injection molding.
(4) A step of providing a groove on the piezoelectric element contact surface of the base supporting the piezoelectric element and applying an adhesive to the piezoelectric element, and joining the base with the base, filling the groove with an adhesive, and curing. A method for manufacturing a driving unit of an ink jet head, comprising: a step of dicing or dividing the piezoelectric element in accordance with a nozzle pitch using a dicing machine or a wire saw.
(5) After joining the first base made of a material having good machinability to the second base made of the same material as the flow path forming member, the first base is joined to the piezoelectric element and the first base. A drive unit of an ink jet head comprising a plurality of vibrators formed by cutting the piezoelectric element and the first base into strips so as to be free ends in conformity with the shape of a pressure chamber.
(6) The drive unit of the inkjet head according to (5), wherein the first base is made of ceramic or hardened stainless steel.
(7) A non-conductive material is used for the material of the first base, and a material on which electrodes are deposited other than the contact surface of the piezoelectric element and the surface on the opposite side is used. 6. The driving unit for an ink jet head according to claim 5, wherein a conductive material is used for the substrate.
(8) a step of joining a first base made of a material having good machinability to a second base made of the same material as the flow path forming member, a step of joining a piezoelectric element and the first base, and a step of joining the piezoelectric element Forming a plurality of vibrators by cutting the piezoelectric element and the first base into strips so that one end of the first base is a free end, and forming a plurality of vibrators. Manufacturing method.
(9) A non-conductive material is used as the material of the first base for fixing the piezoelectric element, and a step of depositing an electrode on the surface other than the contact surface of the piezoelectric element and the surface on the opposite side; The second substrate to be joined is made of a conductive material, and is joined to the first base, and one surface of the piezoelectric element and the electrode surface of the first base, and another surface of the piezoelectric element and A second base, and a step of conducting both ends of the first base and the second base with a conductive adhesive, the method comprising the steps of:
[0010]
By providing a groove on the joint surface of the base with the piezoelectric element, even if the base is made of stainless steel or the like, which has poor machinability, the turn generated when dicing the piezoelectric element does not reach the vibrator. Also, by dividing the base into two plates, one can be divided into one having good machinability and the second can be divided into one having the same coefficient of thermal expansion as the flow path. By cutting the eyes into strips, the expansion due to thermal expansion can be adjusted to the flow path while the bonding between the piezoelectric element and the base is strengthened.
[0011]
BEST MODE FOR CARRYING OUT THE INVENTION
FIG. 1 is an exploded perspective view showing the structure of a first example of an ink jet head according to the present invention, FIG. 2 is a side view in an assembled state, and FIG. 3 is a sectional view of FIG.
[0012]
This head is roughly divided into a driving unit and a channel unit.
[0013]
The drive unit includes a piezoelectric element 1 serving as a displacement source, a base 3 holding the piezoelectric element 1, a Short FPC 4 attached to the base to form an individual electric path and a common electric path, a Short FPC 4, and a control section for electric signals. Is connected to a Long FPC5.
[0014]
The piezoelectric element 1 is manufactured by alternately laminating electrodes and piezoelectric bodies, and is produced as an elongated plate-shaped bulk material. Multi-layer piezoelectric element 1 may be used either has d ₃₁ type or d ₃₃ type by the polarization direction. In this embodiment uses a _33-inch d.
[0015]
The base 3 has a role of bonding and fixing one end of the piezoelectric element with an adhesive or the like, and an outer peripheral portion of a plate, which is a bonding surface, is processed with high flatness. In addition, since the surface opposite to the contact surface 6 of the piezoelectric element 1 is used as a pressing surface 7 as a reference surface for pressing the drive unit during assembly, the degree of parallelism is very high. The material of the base 3 is required to have a high strength for firmly fixing the piezoelectric element 1 and a material that does not cause any other propagation of vibration. In this case, SUS430 is used. Since the SUS 430 is conductive, it is necessary to devise a method of connecting individual electric signal lines from the piezoelectric element while maintaining insulation from the base 3.
[0016]
The assembling method of the drive unit will be described step by step. First, the four sides of the base of SUS430 are processed with high flatness, and the bonding surface 6 and the pressing surface 7 of the piezoelectric element 1 are processed with high parallelism, and then groove processing is performed. Dicing was performed as processing for forming the groove 8. FIG. 4 shows a state of the base 3 on which the grooves 8 are formed by dicing. At the time of dicing, since the surface is turned up, finish polishing is performed after processing.
[0017]
In addition, there is another metal injection as a method of manufacturing the groove 8. In this case, since the shape is almost complete at the stage of injection molding, the base 3 satisfying the target specification can be manufactured only by performing some post-processing.
[0018]
Next, the piezoelectric element 1 and the base 3 are joined. This bonding is performed by an adhesive. FIG. 5 shows a state in which the piezoelectric element 1 and the base 3 are joined. A high-strength adhesive such as an epoxy-based adhesive is used as the adhesive, and is applied to the piezoelectric element 1 side. As a coating method, a transfer method in which a uniform adhesive layer is formed on a film or the like and pressed against a member to be bonded is used. The adhesive used in the present example is Araldite manufactured by Bantico, which is a cold-setting adhesive. There is also a method of applying an adhesive to the groove 8 side to adjust the amount of the adhesive, and filling the groove 8 with the adhesive. In this case, since dicing only turns up the soft adhesive, the workability is good while improving the bonding strength.
[0019]
Since the piezoelectric element 1 has been subjected to polarization processing in advance, warpage has occurred. Therefore, at the time of joining, pressure is applied so as to follow the surface to be joined appropriately so as to force warpage. The joining positions are arranged so as to be flush with the side surface of the base 3.
[0020]
After joining, polishing is performed so that the pressing surface 7 at the base position and the free end side of the piezoelectric element 1 become the same surface. Here, since the piezoelectric element was designed to slightly protrude from the pressing surface, the piezoelectric element was polished. After polishing, the Short FPC 4 is attached to the side of the base 3 as shown in FIG. The Short FPC 4 includes three layers of polyimide 9-copper wire 10-polyimide 9, and the copper wire 10 is patterned in accordance with the nozzle pitch. Individual electrode patterns 11 are arranged in the center, and common electrode patterns 12 are formed at both ends. The polyimide 9 is a cover for the copper wire 10, the surface in contact with the base 3 is completely covered, and the other surface has the copper wire exposed at both ends. As a result, the base 3 and the copper wire 10 are completely insulated, and on the other side, the connection with the piezoelectric element 1 and the Long FPC is facilitated. The Short FPC 4 and the base are attached with an adhesive. This is also performed by the transfer method in the same manner as the connection between the piezoelectric element 1 and the base 3. Here, the adhesive is transferred to the Short FPC 4 and connected. Araldite is also used for the adhesive. However, if the Short FPC 4 protrudes from the base 3, the adhesive may be broken when the Short FPC 4 is turned up. Therefore, EP001 manufactured by Cemedine, which is an elastic adhesive, may be used. EP001 can be used as an adhesive that can withstand a certain amount of elongation.
[0021]
The distal end of the Short FPC 4 is connected so as to be located closer to the piezoelectric element 1 than the joint between the piezoelectric element 1 and the base 3. This is to prevent the copper wire 10 from coming into contact with the base 3. Then, after the Short FPC 4 is connected, one external electrode 13a of the piezoelectric element 1 is connected to the Short FPC 4 and the other external electrode 13b is connected to the base 3 with the conductive adhesive 14. In addition, the outermost common electrode pattern 12 is electrically connected to the base 3 with the conductive adhesive 14 so as to establish electrical connection with the other external electrode via the conductive base.
[0022]
Thereafter, as shown in FIG. 7, the piezoelectric element 1 is diced according to the nozzle pitch, and divided into a plurality of vibrators 2. Here, the dicing depth was set to a depth that does not contact the groove. Note that dummy vibrators 15 that do not contribute to ink ejection remain at both ends.
[0023]
8A and 8B are enlarged views of the base 3 having grooves 8 formed by metal injection in FIG. 8A and the base 3 having grooves 8 formed by dicing in FIG. 8B. In the case of metal injection, a stable groove width and depth can be realized as compared with dicing. In the case of dicing, the depth or the like changes due to wear of the teeth.
[0024]
After dicing, Long FPC5 is attached to ShotFPC4, as shown in FIG. The attachment is performed using an anisotropic conductive sheet attached to Long FPC5. A drive unit is formed by the above steps.
[0025]
Subsequently, a method of manufacturing the channel unit will be described. As shown in FIG. 10, the flow channel unit is formed of an ink flow channel portion 29 including a nozzle plate 18, a chamber plate 20, and a diaphragm plate 24, and a fixing plate 30 (see FIG. 11) for fixing the ink flow channel portion 29. Is done. Each plate is positioned by flow path unit positioning holes 17 (a) to 17 (c) provided respectively.
[0026]
The nozzle plate 18 has nozzles 19 serving as ink ejection ports, and an ink ejection surface is subjected to an ink-repellent treatment. The material is preferably SUS303, and individual nozzles 19 are manufactured by press working.
[0027]
The chamber plate 20 includes a pressure chamber 21 communicating with the nozzle 19, a manifold 23 serving as an ink reservoir, and a restrictor 22 connecting the pressure chamber 21 and the manifold 23. Silicon is used as a material, and respective portions are formed by wet etching or dry etching.
[0028]
The diaphragm plate 24 includes a vibration plate 25 forming one side wall of the pressure chamber 21, a dummy vibrator joining portion 26 with which the dummy vibrator 15 contacts, an ink introduction hole 27 for introducing ink to the manifold 23, and ink fluctuation in the manifold 23. Is formed. The diaphragm plate 24 is formed by laminating a metal and a resin, and SUS303 is used for the metal and a polyimide film is used for the resin. After bonding the metal and the resin, a predetermined portion of the metal surface is removed by etching to form the diaphragm 25 and the damper 28 surrounded by the metal frame.
[0029]
In assembling the ink flow path section 29, the nozzle plate 18, the chamber plate 20, and the diaphragm plate 24 are respectively bonded with a sheet-like adhesive. Each adhesive layer is about 2 to 3 μm.
[0030]
Subsequently, as shown in FIG. 11, after forming the ink flow path portion 29, the fixing plate 30 is joined. The fixing plate 30 has a through hole 32 through which the ink supply path 31 and the drive unit 15 pass, and a surface to be joined to the ink flow path portion 29 is subjected to high flatness processing. The material is SUS430, which has an extremely thick shape compared to the ink flow path portion 29, and thus has high rigidity. Therefore, warpage and undulation generated in the ink flow path portion 29 at the time of joining with the ink flow path portion 29 are corrected by the rigidity of the fixing plate 30. The size of the through hole 32 is such that the drive unit 16 does not come into contact with it. This is because the drive unit 16 and the fixed plate 30 come into contact with or join with each other, thereby causing inclination, thereby significantly reducing the ink discharge characteristics. The channel unit is formed by the above steps.
[0031]
Since the drive unit and the flow path unit are assembled in separate processes, the order of assembly may be either.
[0032]
Subsequently, the units are joined. Joining is performed by a transfer method using an adhesive. Here, EP001, which is a high-strength elastic adhesive, is used as the adhesive. Here, the transfer of the adhesive is performed such that the adhesive is applied to a high flat plate and the vibrator is abutted.
[0033]
After the transfer, the drive unit 16 is joined to the channel unit 33 as shown in FIG. The positioning is performed by image processing using a jig (not shown). After the positioning, the drive unit 16 is inserted into the flow channel unit 33 (step (a)). After the drive unit 16 is abutted, the pressing surface 7 is pressed to be cured by heating (step (b)). Thus, the head is completed.
[0034]
By assembling the ink jet head in the above-described steps, it is possible to prevent a defect (falling or breakage due to curling) occurring when the piezoelectric element 1 is cleaved, and to perform stable cutting even on a base having poor workability.
[0035]
Next, another example of the present invention will be described. In this example, the base 3 is formed of two types of members having different materials. Among these, the first base joined to the piezoelectric element 1 is made of a material having a high cutting property, so that it is possible to prevent the curl generated at the time of dicing of the piezoelectric element, and to use the high temperature of the head for the second base. There is an effect that elongation due to thermal expansion during use can be prevented.
[0036]
The base of the present invention is manufactured by fixing the piezoelectric element 1 to the first base 34 and joining the first base 34 to the second base 35. FIG. 13 shows this state. For the first base 34, ceramic (alumina) is used, and for the second base 35, SUS304, which is a metal, is used. The point of selecting the material of the second base 35 is that a material having a thermal expansion coefficient substantially equal to that of the material used for the flow path unit is selected.
[0037]
Specifically, first, a solid electrode 36 is vapor-deposited in advance on the joint surface of the first base 34 with the second base 35 and the surface on the opposite side. Next, the first base and the second base are fixed with an adhesive. After that, the piezoelectric element 1 and the first base 34 are joined. A cold-setting adhesive was used for the bonding. Next, both surfaces of the external electrode of the piezoelectric element are electrically connected to both surfaces of the electrode surface of the first base 34 by the conductive adhesive 14. In addition, the electrodes on the joint surface side between the second base 35 and the second base 34 of the first base are similarly conducted. The surfaces that conduct electricity are the surface opposite to the fixed surface of the piezoelectric element and both side surfaces thereof. Thus, the second base is conductive, so that conduction between the second base and one surface of the external electrode of the piezoelectric element can be maintained.
[0038]
After joining the piezoelectric element 1 to the bases 34 and 35 and establishing conduction between the respective components, the piezoelectric element 1 is separated. In this case, the piezoelectric element 1 and the first base 34 are cut to a strip-like depth. After cutting in this way, a drive unit as shown in FIG. 14 can be completed by attaching Long FPC5.
[0039]
The ink jet head to which the drive unit manufactured by the above manufacturing method is applied is effective when heated and used. In other words, when the inkjet head is used while being heated, if the components of the flow path are disjointed, the flow path will be warped or undulated due to thermal expansion, and will be broken in the worst case. Need to assemble. However, in a drive unit manufactured without considering the coefficient of thermal expansion of the material, the base may generate accumulated warpage or deflection, and in the worst case, there is a high possibility that non-discharge will occur at both ends. On the other hand, in the configuration of the present example, a difference in thermal expansion occurs for each nozzle, but there is almost no effect on the accumulation, so that it is effective for manufacturing a long drive unit.
[0040]
【The invention's effect】
As described above, a plurality of nozzles arranged in a row, a plurality of pressure chambers respectively corresponding to the nozzles and communicating with the nozzles, and a diaphragm forming a part of the pressure chambers, A fixing plate having a hole for fixing the ink flow passage section is formed so as to surround the periphery of the pressure chamber row, and one end of the piezoelectric element bonded to one surface of the base becomes a free end. As described above, a drive unit including a vibrator group divided by a length reaching the base together with the pressure chambers is joined to the ink flow path unit, so that the displacement of the piezoelectric element is reduced by the vibration plate. In the ink jet head that transmits ink to the pressure chamber through a nozzle and ejects ink from a nozzle, a groove is provided at a position substantially equal to a position at which the base is joined to the piezoelectric element, so that metal or the like is formed. Base and pressure made of poor workability material The element at the time of tooth split prevents damage to the vibrator caused by curling occurs can allow the production of stable driving unit. Also, since a fillet is formed between the groove and the vibrator at the same time, the joining strength is high.
[0041]
By setting the depth of the groove to such a depth that the cutting blade does not touch, it is possible to prevent the curling itself.
[0042]
By forming the groove by dicing or injection molding, the groove shape can be easily obtained from various materials such as ceramic, metal and resin.
[0043]
Also, after joining the first base made of a material having good cutting properties to the second base made of the same material as the flow path forming member, the first base is joined to the piezoelectric element and the first base, and one end of the piezoelectric element is free. When the piezoelectric element and the first base are cut into strips in accordance with the shape of the pressure chamber so as to form ends and a plurality of vibrators are formed, the second base is used when the head is heated and used. Since the base is made of the same material as that of the flow path forming member, it is possible to prevent the occurrence of positional displacement or the like due to thermal expansion.
[0044]
By using ceramic or quenched stainless steel for the first base, it can be cut with a blade in the same manner as a piezoelectric element, so that processing becomes easy.
[0045]
A non-conductive material is used for the material of the first base, and a material on which electrodes are deposited other than the contact surface of the piezoelectric element and the surface on the opposite side is used, and a conductive material is used for the second substrate. Since the first base is separated individually by using a material having properties, it is used as an individual electrode, and the second base is used as a common electrode because it is joined to and connected to one end of the first base. And wiring of the electrodes is easy.
[Brief description of the drawings]
FIG. 1 is an exploded view of an ink jet head as an example of the present invention.
FIG. 2 is a front sectional view of the ink jet head of the present invention.
FIG. 3 is a side sectional view of the ink jet head of the present invention.
FIG. 4 is a perspective view showing a state of a base on which a groove is formed by performing dicing.
5A and 5B are a perspective view and a cross-sectional view illustrating a state where the piezoelectric element and the base are joined.
FIGS. 6A and 6B are a perspective view and a cross-sectional view illustrating a state in which a Short FPC is attached to a side surface of a base.
FIG. 7 is a perspective view showing a state where the piezoelectric elements are diced at a predetermined pitch.
FIG. 8 is an enlarged view of a dicing portion.
FIG. 9 is a perspective view of a drive unit according to the present invention.
FIG. 10 is an exploded perspective view and a perspective view of an ink flow path section according to the present invention.
FIG. 11 is a perspective view of a channel unit of the present invention. FIG. 12 is a cross-sectional view showing a state where the drive unit and the channel unit are assembled.
FIG. 13 is a perspective view and a cross-sectional view showing a state in which a piezoelectric element and a base according to another example of the present invention are joined.
FIG. 14 is a perspective view showing a state where a piezoelectric element is diced at a predetermined pitch in another example of the present invention.
FIG. 15 is an explanatory diagram showing a problem of joining a conventional piezoelectric element and a base.
[Explanation of symbols]
1 is a piezoelectric element, 2 is a vibrator, 3 is a base, 4 is a Short FPC, 5 is a Long FPC, 6 is an abutment surface, 7 is a pressing surface, 8 is a groove, 9 is a polyimide, 10 is a copper wire, and 11 is an individual. Electrode pattern, 12 is a common electrode pattern, 13 is an external electrode, 14 is a conductive adhesive, 15 is a dummy vibrator, 16 is a drive unit, 17 is a channel unit positioning hole, 18 is a nozzle plate, 19 is a nozzle, 20 Is a chamber plate, 21 is a pressure chamber, 22 is a restrictor, 23 is a manifold, 24 is a diaphragm plate, 25 is a diaphragm, 26 is a base joint, 27 is an ink inlet, 28 is a damper, and 29 is an ink flow path. Reference numeral 30 denotes a reinforcing plate, 31 denotes an ink supply path, 32 denotes a through hole, 33 denotes a flow path unit, 34 denotes a first base, 35 denotes a second base, 36 denotes a solid electrode, and 37 denotes a turnover.

Claims (9)

An ink flow path section including a plurality of nozzles arranged in a row, a plurality of pressure chambers provided corresponding to each of the nozzles, and a vibration plate forming a part of the pressure chamber; And a driving unit in which a plurality of vibrator groups are formed by dividing one end of the piezoelectric element joined to the base into a free end, and the driving unit is provided with the ink flow. By joining to the path, the displacement of the vibrator group is transmitted to the pressure chamber via the diaphragm, and in the inkjet head that ejects ink from the nozzle, the joining surface of the base with the piezoelectric element is An ink-jet head, wherein a groove is provided at substantially the same position as a position at which the ink is divided in advance. 2. The ink jet head according to claim 1, wherein, when the piezoelectric element is divided into a plurality of vibrator groups, the groove has a depth such that a blade to be divided does not touch the groove. 3. 3. The ink jet head according to claim 1, wherein the groove is formed by dicing or injection molding. The inkjet head according to claim 1,
A step of providing a groove in the piezoelectric element contact surface of the base, a step of applying an adhesive to the piezoelectric element, a step of joining the base and the piezoelectric element, And a step of dividing the piezoelectric element. An ink flow path section including a plurality of nozzles arranged in a row, a plurality of pressure chambers provided corresponding to each of the nozzles, and a vibration plate forming a part of the pressure chamber; And a driving unit in which a plurality of vibrator groups are formed by dividing one end of the piezoelectric element joined to the base into a free end, and the driving unit is provided with the ink flow. In the ink jet head which transmits the displacement of the vibrator group to the pressure chamber via the vibrating plate by joining to the path portion and discharges ink from the nozzle, the base is made of a material having good cutting properties. And a second base made of a material having substantially the same thermal expansion coefficient as that of the ink flow path section, wherein the first base is joined to the piezoelectric element. The ink jet head according to claim 5, wherein ceramic or quenched stainless steel is used as the first base. 6. The ink jet head according to claim 5, wherein a non-conductive material is used for the first base, and a conductive material is used for the second base. The inkjet head according to claim 5,
The driving unit includes a step of joining a first base and a second base, a step of joining the piezoelectric element and the first base, and one end of the piezoelectric element being a free end. Forming a plurality of vibrators by dividing the piezoelectric element and the first base. A non-conductive material is used as the material of the first base for fixing the piezoelectric element, and a step of depositing an electrode on a surface other than the contact surface of the piezoelectric element and the surface on the opposite side, and a step of bonding the first base to the first base. (2) using a conductive material for the substrate and joining the substrate to the first substrate; and forming one surface of the piezoelectric element and the electrode surface of the first base, and the other surface of the piezoelectric element and the second substrate. A method of manufacturing a drive unit of an ink jet head, comprising: a step of connecting the base and both ends of the first base to the second base with a conductive adhesive.

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