JP2004281090A - Dielectric barrier discharge lamp device and ultraviolet irradiation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dielectric barrier discharge lamp device capable of uniformizing the distribution of excimer discharge along the tube axis direction by uniformly closely disposing an outside electrode along the tube axis direction of the outside surface of an arc tube; and to provide an ultraviolet irradiation device using it. <P>SOLUTION: This dielectric barrier discharge lamp device EXL is equipped with: the outside electrode OE attached to the outside surface of an airtight vessel 1 of the arc tube LT provided with an inside electrode 2 enclosed in the airtight vessel 1 along its axial direction and excimer generation gas enclosed in the airtight vessel 1, and acting so as to generate dielectric barrier discharge in the arc tube LT by cooperation with the inside electrode 2; and support means SS1 and SS2 for bringing the airtight vessel 1 and the outside electrode OE into press contact with each other by making spring force act on at least one of both ends of the arc tube LT to support the arc tube LT. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a dielectric barrier discharge lamp device and an ultraviolet irradiation device using the same.
[0002]
[Prior art]
Excimer discharge lamps, or dielectric barrier discharge lamps, that emit a near-monochromatic radiation by silently discharging a rare gas such as xenon or a mixture of a rare gas such as xenon or krypton and chlorine, have been described in many literatures. It has been known for some time. In the dielectric barrier discharge, a pulsed current flows due to a so-called silent discharge. This pulse-shaped current has a high-speed electron flow and many pauses, so that a substance that emits ultraviolet light, such as xenon, is temporarily combined with the molecular state (excimer state) and reabsorbed when returning to the ground state. Efficiently emits less UV rays.
[0003]
2. Description of the Related Art As a dielectric barrier discharge lamp, a dielectric barrier discharge lamp that performs a dielectric barrier discharge using an elongated tubular airtight container is known (see Patent Document 1).
[0004]
Also, a light-transmitting, elongated tubular, light-transmitting external electrode is provided on the outer surface of the discharge vessel serving also as the first dielectric of the dielectric barrier discharge, and a ratio L / D of length L to diameter D is provided on the inner side. There is also proposed a structure provided with an inner electrode made of a metal rod or a metal pipe of 30 or more (see Patent Document 2).
[0005]
Furthermore, a dielectric barrier discharge lamp in which drooping of the internal electrode is suppressed by arranging the internal electrode by the action of tension or by attaching a position restrictor, ie, an anchor, to the internal electrode is also provided by the present inventor. (See Patent Document 3). According to Patent Literature 3, since the anchor is made of a conductive metal, the anchor also functions as a part of the internal electrode, so that the distance between the internal and external electrodes is reduced, and the startability is improved.
[0006]
Patent Documents 1 to 3 disclose an elongated airtight container, an inner electrode extending in an axial direction in the airtight container, and an arc tube including an excimer-producing gas sealed in the airtight container, and a cooling function. The light-emitting tube is pressed into contact with a lamp body having a concave shape so that a part of the outer surface of the airtight container is fitted therein, and an external electrode is interposed between the lamps, so that the outer surface of the airtight container is The electrodes can be brought into close contact with each other to generate a uniform dielectric barrier discharge along the tube axis direction, and the heat generated from the arc tube can be quickly dissipated to maintain a high luminous efficiency.
[0007]
[Patent Document 1]
JP-A-11-111235
[Patent Document 2]
JP-A-7-272692
[Patent Document 3]
JP 2001-084966 A
[Problems to be solved by the invention]
However, it has been found that close contact of the external electrode with the outer surface of the elongated arc tube is difficult to obtain uniformly along the tube axis direction of the arc tube. Therefore, there is a disadvantage that the distribution of the excimer discharge along the tube axis direction becomes non-uniform. In particular, when the length of the arc tube exceeds 1,000 mm, the tendency becomes remarkable.
[0008]
As a result of the investigation, it was found that the main cause was that the external electrode was not uniformly in close contact with the outer surface along the tube axis direction of the airtight container.
[0009]
Further, it is relatively difficult to form an elongated airtight container made of an ultraviolet-transmissive material such as quartz glass straight, and the bending of the airtight container is caused by the close contact of the external electrode with the outer surface of the arc tube in the tube axis direction of the arc tube. Along one of the causes is difficult to obtain.
[0010]
The present invention relates to a dielectric barrier discharge lamp device in which external electrodes are uniformly intimately contacted along the tube axis direction on the outer surface of the arc tube and the distribution of excimer discharges is uniform along the tube axis direction, and ultraviolet light using the same. It is an object to provide an irradiation device.
[0011]
[Means for achieving the object]
The dielectric barrier discharge lamp device according to the first aspect of the present invention detachably attaches to the outer surface of the arc tube and the airtight container by supporting the arc tube by applying a spring force to at least one end of both ends of the arc tube. It is characterized by having a supporting means for pressing the external electrodes in contact with each other.
[0012]
The dielectric barrier discharge lamp device of the present invention includes a dielectric barrier discharge lamp having an arc tube and an external electrode, and support means for pressing the external electrode against the outer surface of the hermetic container.
[0013]
<Regarding Supporting Means> The supporting means supports the both ends of the hermetic container of the arc tube and presses the hermetic container and the external electrode attached to the outer surface of the hermetic container to each other by applying a spring force. Means. The spring force is configured to act on at least one end, preferably both ends, of the airtight container. The specific means for applying the spring force is not particularly limited. For example, the airtight container can be supported via a spring. Further, it is permissible to use a supporting means provided with a supporting portion for supporting the airtight container and a spring portion for applying a spring force in parallel with the supporting portion.
[0014]
In the case of supporting means for supporting the airtight container via a spring, the supporting means has a spring interposed between the fixing portion and the airtight container. As the spring, a plate-shaped or rod-shaped spring material can be processed into various structures and shapes and used. In the case where the external electrode is pressed against the outer surface of the airtight container by applying the spring force over the entire length of the airtight container while disposing the support means for applying the spring force at one end of the airtight container, one end of the airtight container is formed of a hinge. The other end can be rotatably attached to the fixed portion, and the other end can be attached to the fixed portion by a support means for applying a spring force.
[0015]
In order to press the external electrode against the outer surface of the hermetic container, a lamp having rigidity extending along the longitudinal direction of the hermetic container can be provided as a fixing portion. Then, the airtight container can be pressed against the lamp body, and at that time, the external electrode can be sandwiched between the lamp body and the airtight container, so that the external electrode can be in close contact with the outer surface of the airtight container. convenient. In such an embodiment, the external electrode can be formed of a flexible member, and a relatively inexpensive external electrode can be easily obtained by using a member having high ultraviolet reflectivity. Further, by disposing an appropriate cooling means in the lamp body, it is effective to remove the heat of the airtight container via the external electrode and to keep the ultraviolet radiation efficiency high. As a cooling means, a cooling medium, for example, water or the like can be passed through the inside of the lamp body.
[0016]
<Regarding External Electrode> The external electrode is detachably attached to the outer surface of the hermetic container with respect to the arc tube of the dielectric barrier discharge lamp. And it acts so as to cause a dielectric barrier discharge having the wall surface of the hermetic container as a dielectric between the internal electrode sealed inside the hermetic container and the inside of the hermetic container. The external electrode is generally configured to be detachable from the outer surface of the airtight container of the arc tube, for example, to replace only the arc tube. However, if necessary, the external electrode may be irremovably attached to the outer surface of the airtight container.
[0017]
Further, the external electrode has a length in the tube axis direction substantially opposite to the internal electrode. Thereby, a dielectric barrier discharge can be generated along the tube axis direction of the arc tube. The width of the external electrode in the direction perpendicular to the tube axis is generally preferably in the range of about 60 to 300 ° at an angle centered on the tube axis of the airtight container. Therefore, the portion where the airtight container of the arc tube is exposed to the outside without the external electrode is formed in the range of about 300 to 60 °, and the ultraviolet light transmitted through the wall surface of the airtight container is exposed to the light. It can be illuminated from the part to the outside and over a relatively long distance along the tube axis of the arc tube and used for various purposes. However, in order to emit as much ultraviolet rays as possible by the dielectric barrier discharge and irradiate the emitted ultraviolet rays at a preferable angle, the width of the external electrode in the direction perpendicular to the tube axis is preferably about 90 to 240 °. It is better to be within the range. Further, in order to obtain high easiness in attaching and detaching the external electrode and strong pressure contact with the outer surface of the hermetic container under the action of the spring force of the supporting means, the angle is preferably within a range of about 240 ° or less. Therefore, in order to satisfy both the detachability of the external electrode and the ultraviolet radiation, the range of about 60 to 240 ° is optimal.
[0018]
Furthermore, if the external electrode is detachably attached to the outer surface of the airtight container, it may be a thin and flexible conductive metal foil, plate or metal wire, or a thick rigid body. There may be. In any of the above cases, if the inner surface of the external electrode facing the airtight container has a high reflectance with respect to ultraviolet rays, it acts as a reflection means, so that it is effective to increase the amount of ultraviolet rays that can be extracted outside. As a material having a high ultraviolet reflectance, for example, high-purity aluminum or silver can be used. When the external electrode is made of a rigid body, a material that also functions as a lamp can be used.
[0019]
Furthermore, the external electrode may be in any of a continuous planar state and a mesh state. In the mesh shape, a number of unit mesh portions are arranged in the axial direction of the hermetic container through respective gaps, and the unit mesh portions approach the inner wall surface of the hermetic container, and further in the axial direction of the hermetic container. A state in which they are spatially separated from each other but are conductively connected. Further, the unit mesh portion may be continuous in the circumferential direction or may be divided. Therefore, specifically, the unit mesh portion is allowed to have a mesh shape, for example.
[0020]
<Regarding the Operation of the Present Invention> In the present invention, the internal electrode sealed inside the hermetic container and the external electrode detachably attached to the outer surface of the hermetic container by having the above-described configuration are provided. When a voltage, preferably a high frequency voltage, is applied between the excimer gas and the gas, an excimer discharge of the excimer generated gas occurs in the hermetic container. Since the external electrode is pressed against the outer surface of the hermetic container by the support means under the action of the spring force, a gap is less likely to be formed between the outer surface of the hermetic container and the external electrode, and therefore, in the tube axis direction of the hermetic container. Along, a uniform excimer discharge is formed.
[0021]
<About airtight containers>
An airtight container made of a material that transmits ultraviolet light can be generally manufactured using synthetic quartz glass. However, the present invention may be made of any material as long as it is transparent to vacuum ultraviolet light of the wavelength to be used.
[0022]
The outer diameter of the hermetic container is preferably 12 mm or more in order to increase the ultraviolet output. In order to lower the discharge starting voltage, the inner diameter is preferably set to 25 mm or less. Further, the thickness can be set to 2 mm or less, preferably about 0.3 to 1 mm. On the other hand, the length of the airtight container is not limited at all, and can be set to an arbitrary length, for example, about 1 m, depending on a required ultraviolet irradiation length. In particular, according to the present invention, the external electrode can be easily pressed uniformly in the axial direction between the airtight containers by the support means, so that the length may be 1 m or more.
[0023]
As a means for exhausting the inside of the airtight container and then filling the excimer generated gas, an exhaust pipe is generally connected to the airtight container. In the present invention, when the exhaust pipe is connected, the exhaust pipe may be connected to any part of the airtight container, but by connecting the exhaust pipe to the side surface, the connection work of the exhaust pipe and the exhaust / sealing work become easy. When the exhaust gas is exhausted through the exhaust pipe, the excimer product gas is sealed in the airtight container from the exhaust pipe, and the exhaust pipe is chipped off, thereby forming an exhaust chip-off portion.
[0024]
In addition, the airtight container may be not only a straight straight tube but also slightly curved as long as it is tubular. In practice, when forming an elongated tube, a slight curve is likely to be formed, for example, a curve having a maximum length of about 1 mm or less can be formed for a total length of about 1200 mm. However, this degree of curvature is acceptable as a substantially straight tube, and according to the present invention, it is possible to press the external electrodes against one another. When the airtight container is curved as described above, or when it is curved in an arc shape, it is preferable to arrange the back portion of the arc so as to face the external electrode. Further, the side surface portion of the arc may be arranged so as to face the external electrode. Therefore, by controlling the arrangement of the external electrodes so that the external electrodes face each other within an arbitrary angle range in the middle, a good pressure contact between the external electrodes and the outer surface of the airtight container can be obtained. The cross-sectional shape of the tube is generally a circle, but a desired cross-sectional shape such as an ellipse or a square can be used if necessary.
[0025]
<About internal electrodes>
The internal electrode may have any configuration. For example, a large number of unit mesh portions are formed in a mesh shape arranged with a gap in the axial direction of the airtight container, or internal electrodes having various configurations as in the above-described conventional technology are adopted as desired. Is allowed. However, since the internal electrodes are formed in a mesh shape, the amount of ultraviolet rays can be relatively increased, which is preferable. It should be noted that "a large number of unit mesh portions are in the form of a mesh arranged in the axial direction of the airtight container with a gap therebetween" means that the unit mesh portion approaches the inner wall surface of the airtight container and is airtight. It refers to a state in which they are spatially separated from each other in the axial direction of the container, but are electrically connected. The unit mesh portion may be continuous in the circumferential direction or may be divided. Therefore, specifically, the unit mesh portion is allowed to have, for example, a ring shape (former of the former), a spiral shape or a coil shape (form of the latter), or a mesh shape. In the case of a mesh, the former or the latter belongs depending on the configuration of the mesh.
[0026]
When the unit mesh portion has a ring shape, by providing a connection portion extending in the axial direction of the airtight container, a large number of unit mesh portions are connected at a predetermined pitch, and are electrically conductive. Can be connected. By forming the connecting portion so as to extend along the central axis of the airtight container, the entire inner electrode is provided with a number of ring anchors (corresponding to a unit mesh portion). And the manufacturing equipment can be diverted to facilitate the manufacturing. However, if necessary, a configuration in which the central axis of the airtight container is removed and the connecting portion is directly connected to the ring portion of the mesh portion may be adopted. The connecting portion may be a single linear shape or a coil shape having an outer diameter of 20% or less of the inner diameter of the hermetic container. Further, the connecting portion can be sealed in a state in which an appropriate value of tension, preferably 2 kg or more, acts on the central axis. In order to exert a tension, it is advantageous to form the internal electrode into a coil shape. Even if it is not a coil shape, a tension in the central axis direction can be applied to the connecting portion. Regardless of the shape of the connecting portion, sealing at both ends of the airtight container at both ends makes it easier to apply tension to the connecting portion. However, if necessary, the connecting part is sealed to only one side of the hermetic container at one end, and the other end is fixed to the sealing part by appropriate means such as an anchor wire at the other end of the hermetic container. Can also be tensioned.
[0027]
On the other hand, when the unit mesh portion has a spiral shape or a mesh shape, the spiral or mesh portion also functions as a connecting portion, and a large number of unit mesh portions are mechanically and electrically conductive with each other. connect. However, the shape retention of the internal electrode can be further imparted by welding a connection portion formed of a single or a plurality of rods to a spiral or mesh unit mesh portion. Alternatively, when a spiral or mesh-shaped unit mesh portion is formed by using a winding frame instead of the connecting portion of the rod-shaped body, shape retention is improved. The winding frame may be either insulating or conductive. If any one of the above-described configurations is employed for the mesh-like portion, shape stability can be imparted to the entire internal electrode, and handling thereof can be facilitated.
[0028]
The internal electrode is configured such that the product p · P of the pitch P (m) of the unit mesh portion with respect to the axial direction and the pressure p (Pa) of the excimer-producing gas described later falls within a predetermined range. .
[0029]
Furthermore, in the present invention, the distance between the unit mesh portion and the inner wall surface of the hermetic container is set to 3 mm or less even when the lamp efficiency is improved by increasing the filling pressure of the excimer generation gas as described later. can do. If the distance is 3 mm or less, the discharge sustaining voltage can be suppressed to 1000 V or less under certain conditions.
[0030]
Further, the material constituting the internal electrode is not particularly limited, and for example, a refractory metal such as tungsten, molybdenum and nickel may be used. Tungsten and nickel have a relatively small work function and easily emit electrons. Therefore, it is effective in lowering the starting voltage.
[0031]
Furthermore, in order to seal the internal electrode to the end of the airtight container made of quartz glass, it is possible to adopt a sealing structure using a sealing metal foil that is frequently used when sealing compactly to quartz glass. it can. Further, the sealing metal foil can be hermetically sealed by pinch sealing the quartz glass.
[0032]
<About excimer generated gas>
The excimer product gas may be a mixture of one or more rare gases such as xenon, krypton, argon or helium, or a mixed gas of a rare gas and a halogen such as fluorine, chlorine, bromine or iodine, for example, XeCl, KrCl or the like. . In addition, a gas that does not generate excimer, such as neon, may be mixed and used in addition to the excimer generating gas.
[0033]
Further, the pressure of the excimer product gas can be set to 20000 Pa or more. As the pressure increases, the lamp efficiency increases and the ultraviolet output increases. However, the lamp efficiency tends to be saturated with an increase in pressure.
[0034]
<Other configurations>
Although not an essential component of the present invention, the following components can be selectively added as desired.
1. (Regarding Lamp Socket) In order to easily supply electricity to the dielectric barrier discharge lamp, a lamp socket having an appropriate shape and structure can be attached to both ends of the hermetic container. Then, the arc tube can be supported by the supporting means via the lamp socket.
2 (Regarding the Lamp) The lamp is disposed so as to sandwich the external electrode between the lamp and the airtight container as described above with respect to the support means.
[0035]
According to a second aspect of the present invention, there is provided an ultraviolet irradiating apparatus, comprising: a dielectric barrier discharge lamp apparatus according to the first aspect; an ultraviolet irradiating apparatus main body provided with the dielectric barrier discharge lamp apparatus; and a high frequency for lighting the dielectric barrier discharge lamp apparatus. And a lighting circuit.
[0036]
In the present invention, the term "ultraviolet irradiation device" means any device that utilizes ultraviolet light generated from a dielectric barrier discharge lamp device. For example, a semiconductor stepper, a light cleaning device, a light curing device, a light drying device, and the like. The “ultraviolet irradiation device main body” means the remaining portion of the ultraviolet irradiation device excluding the dielectric barrier discharge lamp device and the high-frequency generation means.
[0037]
In addition, one or a plurality of dielectric barrier discharge lamp devices can be used as necessary.
[0038]
Further, a high frequency lighting circuit is used to light the dielectric barrier discharge lamp device. The high-frequency lighting circuit includes a high-frequency generating unit, generates a high-frequency voltage, and supplies a dielectric barrier discharge lamp device with high-frequency power required for the lighting thereof. Note that “high frequency” refers to a frequency of 10 kHz or more. However, it is preferably between 100 kHz and 2 MHz. Further, it is preferable that the high frequency lighting circuit applies a high frequency voltage of about 1500 V or less, preferably 700 to 1000 V when the dielectric barrier discharge lamp device is stably operated. Further, the starting voltage of the dielectric barrier discharge lamp device is 2 to 2.3 kVp-p, and the starting can be easily performed by increasing the secondary open-circuit voltage of the high frequency lighting circuit to the starting voltage. In this case, it is preferable that the high frequency generating means is mainly composed of a parallel inverter because a high step-up ratio can be easily obtained. Since the high-frequency output waveform is a sine wave, noise is reduced when the dielectric barrier discharge lamp device is turned on. However, if necessary, a starting pulse voltage generating means may be used in addition to the high frequency generating means. Furthermore, it is preferable that the dielectric barrier discharge lamp device and the high-frequency lighting circuit are arranged at close positions, but if necessary, they can be arranged at positions separated from each other. Unlike a general discharge lamp, the dielectric barrier discharge lamp device does not need to connect current limiting means in series. However, in order to adjust the lamp current to a predetermined value, lighting by connecting an appropriate value of impedance in series can be performed as needed. In addition, when the dielectric barrier discharge lamp device is connected to the high-frequency lighting circuit, if the external electrodes are grounded, noise generation is reduced.
[0039]
In a dielectric barrier discharge in which the internal electrode is in a mesh shape and the anode is the anode and the external electrode is the cathode, a large amount of ultraviolet radiation is emitted from the vicinity of the unit mesh portion of the internal electrode, and the adjacent unit mesh UV radiation from the middle of the part is reduced. Therefore, it was found that when the pitch of the unit mesh portion was large, the uniformity of the ultraviolet illuminance in the axial direction of the airtight container was deteriorated, and the ultraviolet illuminance was also reduced. When the phases of the internal electrode and the external electrode are opposite to each other, the above does not occur. If the pitch of the unit mesh portion of the internal electrode is 4 mm or less, the valley portion where the ultraviolet illuminance between the unit mesh portions is low is filled with the region where the intensity of ultraviolet light generated by each unit mesh portion is strong, resulting in airtightness. The uniformity of the UV illuminance in the axial direction of the container is remarkably improved, and the UV illuminance is improved.
[0040]
In addition, since strong afterglow light emission is generated by pulse lighting, it contributes to improvement in ultraviolet illuminance.
[0041]
The high-frequency lighting circuit can output a rectangular pulse by using a rectangular wave output inverter, for example, as long as it outputs a pulse voltage. However, a configuration in which a sine wave pulse is obtained using a sine wave output inverter may be employed.
[0042]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0043]
1 to 3 show a first embodiment of a dielectric barrier discharge lamp device according to the present invention. FIG. 1 is a partially cutaway front view and left and right side views, FIG. 2 is a front view of an arc tube, and FIG. FIG. 4 is an enlarged cross-sectional front view of the main part of the lamp socket and the supporting means on the non-feeding end side, FIG. 5 is a cross-sectional view taken along line VV ′ of FIG. 4, and FIG. 7 is a right side view of FIG. In each of the figures, a dielectric barrier discharge lamp device EXL includes an arc tube LT, an external electrode OE, a lamp socket LS1 on a power supply end side, first support means SS1, a lamp socket LS2 on a non-power supply end side, and a second support means. SS2 is provided. Further, the dielectric barrier discharge lamp device EXL is combined with the lamp body CB to form a dielectric barrier discharge lamp device unit EU. In the figure, ST is a voltage side power supply terminal block. Hereinafter, each component will be described.
[0044]
<Regarding Arc Tube LT> As shown in FIG. 2, the arc tube LT includes an airtight container 1, an internal electrode 2, and a pair of introduction lines 3, 4.
[0045]
The hermetic container 1 has a total length of about 1200 mm, is made of an ultraviolet-permeable material, and has an elongated cylindrical hollow portion 1a and sealing portions 1b formed at both ends of the hollow portion 1a. The sealing portion 1b has a pinch seal structure in which a molybdenum foil 1b1 is embedded.
[0046]
An excimer generated gas is sealed in the hollow portion 1a of the airtight container 1.
[0047]
The internal electrode 2 includes a connecting portion 2a, a number of unit mesh portions 2b, and straight portions 2c at both ends. The connecting portion 2a is mainly composed of a coil 2a formed by winding a thin metal wire. The unit mesh portion 2b is composed of a large number of ring-shaped portions arranged at a constant pitch on the connecting portion 2a. Both end linear portions 2c are formed by extending both ends of the connecting portion 2a. The internal electrode 2 is welded to the one end of the molybdenum foil 1b1 of the sealing portion 1b formed at both ends of the hermetic container 1 while applying a tension of about 2 kg to the one end of the molybdenum foil 1b1. The connecting portion 2a of the internal electrode 2 is stretched by the action of tension while being mounted in the airtight container 1.
[0048]
The inner ends of the pair of introduction wires 3 and 4 are welded to the molybdenum foil 1b1 embedded in the sealing portions 1b formed at both ends of the airtight container 1, and the base ends are exposed to the outside from the sealing portion 1b. I have. However, since the introduction wire 4 is on the non-power supply side, the externally exposed portion is cut after the airtight container 1 is sealed, and thus the length is short. If necessary, a heat-resistant insulator can be applied to cover the exposed portion of the lead wire 4 after cutting.
[0049]
<Regarding External Electrode OE> The external electrode OE mainly includes an electrode main portion 11, a reinforcing ring portion 12, and a packing 13, as shown in FIG. The electrode main part 11 is formed of a gutter-like body formed by molding a high-purity aluminum plate so as to have an opening angle of about 220 ° in cross section and curved in a substantially arc shape, and is formed inside the hermetic container 1 of the arc tube LT. It is fitted to the outer surface of the airtight container 1 over substantially the entire length of the region facing the electrode 2. The reinforcing ring portion 12 is made of a conductive metal, one end of which overlaps the end of the electrode main portion 11 from above, and the other end is inserted into an opening of a lamp socket LS1 on the power supply end described later. The packing 13 is interposed between the reinforcing ring portion 12 and the facing outer surface of the airtight container 1 to seal the inside of the lamp socket LSI on the power supply end side in a waterproof and moisture-proof manner.
[0050]
<Regarding Power Supply End Lamp Socket LS1> The power supply end side lamp socket LS1 mainly has a function of supplying power to the internal electrode 2 of the arc tube LT as shown in FIG. 14, a fastening ring portion 15, a wire harness 16, an insulating disk 17, and an insulating protection portion 18. The socket cylinder 14 has a cylindrical shape with a bottom and encloses the power supply side end of the arc tube LT. And it has a small opening in the center of the bottom. The tightening ring portion 15 is conductively and mechanically fixed to the opening of the socket tube 14, and tightens the end on the power supply side of the arc tube LT via the reinforcing ring portion 12 and the packing 13 of the external electrode OE. It is fixed to the socket cylinder 14.
[0051]
The wire harness 16 electrically connects the introduction wire 3 led out of the arc tube LT and a mounting / terminal device 23 described later. The insulating disk 17 is formed of a ceramic disk having a relatively small opening in the center, and insulates and protects the wire harness 16 introduced from the bottom of the socket cylinder 14 through the opening from the socket cylinder 14. The insulating protection portion 18 is formed of a ceramic cylindrical body, and holds the wire harness 16 introduced into the socket cylindrical body 14 insulated while fixing it by inserting the wire harness 16 therein.
[0052]
<Regarding First Support Means SS1> The first support means SS1 mainly supports the lamp socket LS1 on the power supply end side via a spring force as shown in FIG. And it consists of an insulating joint 19, a leaf spring 20, a first arm 21, a second arm 22, and a mounting / terminal device 23.
[0053]
One end of the insulating joint 19 is fixed to the tip of the second arm 22, and a coupling plate 19a protrudes from the other end. Note that the coupling plate 19a is insulated from the second arm 22.
[0054]
The leaf spring 20 has an L shape as a whole, and has a curved spring force applying portion 20a formed at an intermediate portion. One end of the leaf spring 20 is insulated from the socket cylinder 14 of the lamp socket LS1 on the power supply end side via the insulating joint 19 and the second arm 22. Further, the other end of the leaf spring 20 is fixed to the mounting / terminal device 23.
[0055]
The base end of the first arm 21 is welded to the rear end of the socket tube 14, and fixes the insulating protection portion 18 of the lamp socket LS <b> 1 on the power supply end side to the socket tube 14.
[0056]
The base end of the second arm 22 is mainly welded to the front end of the socket cylinder 14 of the lamp socket LS1 on the power supply end side, as shown in FIG.
[0057]
The mounting / terminal device 23 is coupled to the socket tube 15 at a position separated from the socket tube 15, and connects the arc tube LT and the external electrode OE via the power supply side lamp socket LS1 and the first support means SS1. It also functions to apply a spring force and fix it. And, it has a mounting / terminal fitting 23a, a bolt / nut 23b, and a mounting screw 23c. One end of the mounting / terminal fitting 23a is connected to the leaf spring 20 and the wire harness 16 by a bolt / nut 23b. Further, the other end is attached to the voltage-side power supply terminal block T by a mounting screw 23c, for example, in a hanging state as shown in the figure. The bolt / nut 23b supports the power supply end of the dielectric barrier discharge lamp device EXL via the lamp socket LS1 on the power supply end side, and also functions as a terminal fitting, and its plate surface has a dielectric barrier discharge lamp device. It extends substantially parallel to EXL. The bolt / nut 23b mechanically and electrically connects the other end of the wire harness 16 to the mounting / terminal fitting 23a together with the leaf spring 20.
[0058]
<Regarding the Lamp Socket LS2 on the Non-Power Feeding End Side> Although the structure of the lamp socket LS2 on the non-power feeding end side is substantially similar to the structure of the lamp socket LS1 on the power feeding end, as shown in FIG. Is not performed, and is configured so that the external electrode OE is grounded.
[0059]
The socket cylinder 30 has a bottomed cylindrical shape, and surrounds the end on the non-power supply side of the arc tube LT.
[0060]
As shown in FIG. 5, the tightening ring portion 31 has a split structure, and a pair of tightening screws 31a is screwed to connect the reinforcing ring portion of the external electrode and the packing (both are not shown) to a socket. The tube is electrically and mechanically connected to the opening of the tube, and the end on the non-power supply side of the arc tube is fastened to the socket tube in a waterproof and moisture-proof manner.
[0061]
The insulating disk 32 is disposed on the inner surface of the bottom of the socket cylinder 30 and insulates the lead wire 4 connected to the internal electrode 2 of the arc tube LT from the grounded socket cylinder 30.
[0062]
<Regarding the Second Support Means SS2> The second support means SS2 mainly supports the lamp socket LS2 on the power supply end side via a spring force as shown in FIG. The mounting / terminal device 35, leaf spring 36 and arm 37 are provided.
[0063]
The mounting / terminal device 35 includes a mounting / terminal fitting 35a, a screw 35b, and a mounting screw 35c. The mounting / terminal fitting 35a electrically connects the external electrode OE of the dielectric barrier discharge lamp device EXL to a ground power supply terminal block (not shown) via the lamp socket LS2 on the non-feeding end side, and at the same time, connects the dielectric barrier discharge lamp device. It supports the non-feeding end of EXL, and its plate surface extends substantially parallel to the dielectric barrier discharge lamp device EXL. The screw 35b connects the leaf spring 36 to one end of the mounting / terminal fitting 35a. The mounting screw 35c mechanically and electrically mounts the other end of the mounting / terminal fitting 35a to a ground power supply terminal block (not shown).
[0064]
The leaf spring 36 has an L-shape as a whole, and has a curved spring force applying portion 36a formed at an intermediate portion. One end of the leaf spring 36 is connected via an arm 37 to the socket cylinder 30 of the lamp socket LS2 on the non-power supply end side. The other end of the leaf spring 36 is fixed to the mounting / terminal fitting 35a by a terminal screw 35b. The base end of the arm 37 is welded to the front end of the socket cylinder 30.
[0065]
The arm 37 has a proximal end welded to the socket cylinder 30 and a distal end connected to the leaf spring 36.
[0066]
<Regarding the dielectric barrier discharge lamp device unit EU> The dielectric barrier discharge lamp device unit EU is configured by combining the dielectric barrier discharge lamp device EXL and the lamp body CB.
[0067]
As shown in FIGS. 6 and 7, the lamp body CB is elongated along the arc tube LT, and has a concave portion 40 having a semicircular cross-section in which about half of the airtight container 1 is embedded on the lower surface. In addition, a hollow cooling medium flow passage 41 is formed inside. The cooling medium flow path 41 is configured to flow in from an inflow port 41a provided on one end side of the lamp body CB and flow out from an outflow port (not shown) provided on the other end side. . Further, the lamp body CB has a length whose length is opposed to the effective light emission length of the arc tube LT.
[0068]
<Regarding Operation> The dielectric barrier discharge lamp device EXL has first and second support means in which the upper half thereof is embedded in the concave portion 40 of the lamp body CB of the dielectric barrier discharge lamp device unit EU. The power supply terminal block ST and the ground-side power supply terminal block (not shown) are attached to the voltage-side power supply terminal block ST and the ground-side power supply terminal block via a spring force. Therefore, since the external electrode OE is strongly sandwiched between the inner surface of the concave portion 40 of the lamp body CB and the outer surface of the hermetic container 1, the external electrode OE is mainly located above the hermetic container 1 over the entire tube axis direction. It is uniformly pressed against the outer surface of the half. As a result, a uniform dielectric barrier discharge is generated in the hermetic container 1 along the tube axis direction, so that the uniformity of the ultraviolet intensity obtained from the dielectric barrier discharge lamp device EXL is equal to the dielectric barrier discharge lamp device EXL. Over the entire length of the
[0069]
Hereinafter, another embodiment of the dielectric barrier discharge lamp device of the present invention will be described with reference to FIGS. In each drawing, the same parts as those in FIGS. 1 to 7 are denoted by the same reference numerals, and description thereof will be omitted.
[0070]
FIG. 8 is a conceptual sectional view showing a second embodiment of the dielectric barrier discharge lamp device of the present invention. This embodiment is a preferred configuration when the airtight container 1 is slightly curved. In the drawings, the curvature is exaggerated for easy understanding.
[0071]
That is, when the airtight container 1 is slightly bowed as shown by a solid line in the figure, the dielectric barrier is controlled by controlling the outer surface side of the curved portion, which is the back of the arc, to contact the lamp CB. The discharge lamp device EXL is manufactured.
[0072]
Then, if the both ends of the dielectric barrier discharge lamp device EXL are pressed against the lamp body CB and mounted, the curvature of the airtight container is elastically deformed. Accordingly, the dielectric barrier discharge lamp device EXL is straightened over its entire length as shown by the dotted line in the figure, and the external electrodes are pressed against the outer surface of the hermetic container 1, so that the effective in the axial direction of the tube is effective. The uniformity of generation of ultraviolet rays is improved over the entire length of the light emitting section.
[0073]
FIG. 9 is a conceptual bottom view showing a third embodiment of the dielectric barrier discharge lamp device of the present invention. This embodiment is another configuration suitable for the case where the airtight container 1 is slightly curved. In the drawings, the curvature is exaggerated for easy understanding of the drawings.
[0074]
That is, when the hermetic container 1 is slightly bowed as shown by the solid line in the figure, the arc portion is turned sideways and managed so as to contact the lamp body CB to control the dielectric barrier discharge lamp. The device EXL is being manufactured.
[0075]
Then, when the both ends of the dielectric barrier discharge lamp device EXL are pressed against the lamp body CB side and mounted, the dielectric barrier discharge lamp device EXL has the external electrodes in a state of being straight with respect to the lamp body CB over its entire length. Since it is pressed against the outer surface of the airtight container 1, the uniformity of generation of ultraviolet rays is improved over the entire length of the effective light emitting portion in the tube axis direction.
[0076]
10 to 12 show an ultraviolet cleaning apparatus as one embodiment of the ultraviolet irradiation apparatus of the present invention. FIG. 10 is a front sectional view, FIG. 11 is a bottom view, and FIG. 12 is a line XII-XII ′ in FIG. FIG. In each figure, the same parts as those in FIGS. 1 to 7 are denoted by the same reference numerals, and description thereof will be omitted. The ultraviolet irradiation device UVW includes an ultraviolet irradiation device main body 51, a lighting circuit 52, and a plurality of dielectric barrier discharge lamp device units EU.
[0077]
The ultraviolet irradiation device main body 51 has a box shape as a whole, and the inside is vertically divided into an ultraviolet irradiation room 51a and a power supply room 51b. One end of the ultraviolet irradiation chamber 51a and the power supply chamber 51b is configured to be openable and closable by a hinge 51c.
[0078]
As described later, a plurality of dielectric barrier discharge lamp device units EU are arranged in the ultraviolet irradiation chamber 51a in parallel. Further, the ultraviolet irradiation chamber 51a is fixedly disposed on the upper part of the transfer means of the work cleaning apparatus, has a lower surface opened, and irradiates a work (not shown) with a work (not shown) passing below the lower surface. It is supposed to. Note that, in FIG. 11, the hatched portion indicates an ultraviolet effective irradiation area.
[0079]
The power supply chamber 51b houses therein a lighting circuit 52 and a control circuit (not shown), and is rotatable upward in FIG. 10 around a hinge 51c. In addition, 51b1 is a handle for gripping when the power supply chamber 51b rotates, 51b2 is a handle for transporting the ultraviolet irradiation device body 51 or the power supply chamber 51b, and 51b3 is a protector for the power supply wiring.
[0080]
The lighting circuit 52 is housed in the power supply chamber 51b, converts a power supply introduced into the power supply chamber 51b through the protector 51b3 of the power supply wiring, generates a high-frequency voltage, and generates a plurality of dielectric barrier discharge lamp devices. Power is supplied to each of the dielectric barrier discharge lamp devices of the unit EX.
[0081]
The plurality of dielectric barrier discharge lamp device units EX are arranged adjacent to each other in the ultraviolet irradiation chamber 51a. However, it is detachable for each required dielectric barrier discharge lamp unit EX for ease of manufacture and maintenance.
[0082]
Further, in order to allow the cooling water to flow through the cooling medium flow passage of the lamp body CB, a pipe for supplying cooling water is connected to the inlet, and a pipe for drainage is connected to the outlet. I have.
[0083]
【The invention's effect】
According to the invention of claim 1, an inner electrode sealed in the airtight container along the axial direction and an outer surface of the airtight container of the arc tube including the excimer generation gas sealed in the airtight container, An outer electrode that acts to generate a dielectric barrier discharge in the arc tube in cooperation with the internal electrode, and a hermetic container and an external device that support the arc tube by applying a spring force to at least one end at both ends of the arc tube. With the support means for pressing the electrodes against each other, the external electrodes are uniformly and closely contacted along the tube axis direction on the outer surface of the arc tube, and the distribution of excimer discharge along the tube axis direction is uniform. Dielectric barrier discharge lamp device can be provided.
[0084]
According to the second aspect of the present invention, the dielectric barrier discharge lamp according to the first aspect, the ultraviolet irradiation apparatus main body provided with the dielectric barrier discharge lamp, and the high-frequency lighting circuit are provided. UV irradiation device having the same can be provided.
[Brief description of the drawings]
FIG. 1 is a partially cutaway front view and left and right side views showing a first embodiment of a dielectric barrier discharge lamp device according to the present invention.
FIG. 2 is a front view of the arc tube.
FIG. 3 is a front view of a central section of the same enlarged part.
FIG. 4 is an enlarged cross-sectional front view of a main part of the lamp socket and supporting means on the non-power-feeding end side.
FIG. 5 is a sectional view taken along the line VV ′ of FIG. 4;
FIG. 6 is an enlarged vertical sectional view of the lamp body.
FIG. 7 is a right side view of the same.
FIG. 8 is a conceptual sectional view showing a second embodiment of the dielectric barrier discharge lamp device of the present invention.
FIG. 9 is a conceptual bottom view showing a third embodiment of the dielectric barrier discharge lamp device of the present invention.
FIG. 10 is a front sectional view showing an ultraviolet cleaning device as one embodiment of the ultraviolet irradiation device of the present invention.
FIG. 11 is a bottom view of the same.
FIG. 12 is a sectional view taken along the line XII-XII ′ of FIG. 11;
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Airtight container, 3 ... Introductory wire, 12 ... Reinforcement ring part, 13 ... Packing, 14 ... Socket cylinder, 15 ... Tightening ring part, 16 ... Wire harness, 17 ... Insulating disk, 18 ... Insulation protection part, 19 ... Insulating joint, 20 ... leaf spring, 21 ... first arm, 22 ... second arm, 23 ... attachment / terminal device, 23a ... attachment / terminal fitting, 23b ... bolt nut, 23c ... attachment screw, CB ... light Body, LS1 ... Lamp socket on power supply side, LT ... Arc tube, OE ... External electrode, SS1 ... First support means, T ... Voltage side power supply terminal block

Claims (2)

An elongate tubular hermetic container made of a material that transmits ultraviolet light, an arc tube including an internal electrode sealed in the hermetic container along the axial direction thereof, and an excimer product gas enclosed in the hermetic container;
An outer electrode attached to the outer surface of the airtight container and acting to generate a dielectric barrier discharge in the arc tube in cooperation with the inner electrode;
Supporting means for applying a spring force to at least one end of both ends of the arc tube to support the arc tube and press the airtight container and the external electrode against each other;
A dielectric barrier discharge lamp device comprising: A dielectric barrier discharge lamp according to claim 1;
An ultraviolet irradiation device main body provided with a dielectric barrier discharge lamp;
A high frequency lighting circuit for lighting a dielectric barrier discharge lamp;
An ultraviolet irradiation device, comprising:

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