JP2004280106A - 誘電泳動液体を含むマイクロミラー素子 - Google Patents
誘電泳動液体を含むマイクロミラー素子 Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/04—Networks or arrays of similar microstructural devices
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0109—Bridges
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/904—Micromirror
Abstract
【解決手段】表面(22)を有する基板(20)と、該基板の前記表面から隔置され、及び該基板の該表面と実質的に平行に向けられたプレート(30)であって、該プレートと前記基板とがそれらの間に空洞(50)を画定する、プレート(30)とを含む、マイクロミラー素子。該マイクロミラー素子に電気信号が加えられた際に動くことができる誘電泳動液体(53)が前記空洞内に配置され、前記基板の前記表面と前記プレートとの間に反射素子が配置されて、該反射素子(42)が第1の位置と少なくとも1つの第2の位置との間で動くよう構成される。
【選択図】図1
Description
[関連特許出願への相互参照]
本出願は、本出願人の2002年4月30日出願の同時係属中の米国特許出願第10/136,719号の一部継続出願である。
20 基板
22 表面
30 プレート
40 アクチュエーティング素子
47 第1の位置
48 第2の位置
50 空洞
53 誘電泳動液体
Claims (20)
- マイクロミラー素子であって、
表面(22)を有する基板(20)と、
該基板の前記表面から隔置され、及び該基板の該表面と実質的に平行に向けられた、プレート(30)であって、該プレートと前記基板の前記表面とがそれらの間に空洞(50)を画定する、プレート(30)と、
前記空洞内に配置された誘電泳動液体(53)であって、前記素子に電気信号が加えられた際に動くことができる、該電気泳動液体(53)と、
前記基板の表面と前記プレートとの間に配置された反射素子(42)とを含み、
該反射素子が、第1の位置と少なくとも1つの第2の位置との間で動くよう構成される、マイクロミラー素子。 - 前記誘電泳動液体が、非水素結合液体であり、及び20未満の誘電率を有する、請求項1に記載のマイクロミラー素子。
- 前記誘電泳動液体が、少なくとも約1デバイの双極子モーメントを有する、請求項1に記載のマイクロミラー素子。
- 前記誘電泳動液体が圧縮可能なものである、請求項1に記載のマイクロミラー素子。
- 前記誘電泳動液体が分極可能なものである、請求項1に記載のマイクロミラー素子。
- 前記誘電泳動液体が実質的に透明である、請求項1に記載のマイクロミラー素子。
- 前記誘電泳動液体が、ポリ(フェニルエーテル)x(xは約2〜約6)、約2〜約12炭素原子を有するアルキル、アルケン、及び環状アルキル、パーフルオロアルキル、1,1−ジフェニルエチレン及び1,2−ジフェニルエチレン、ベンゼン及び置換ベンゼン、塩素化芳香族化合物、ポリ塩化ビフェニル、及びパーフルオロエーテルからなるグループから選択される、請求項1に記載のマイクロミラー素子。
- 前記パーフルオロアルキルがパーフルオロデカヒドロナフタレンであり、前記アルケンがドデセン及びオリーブ油から選択される、請求項7に記載のマイクロミラー素子。
- 前記液体が、1,1−ジフェニルエチレン、1,2−ジフェニルエチレン、及びそれらの混合物からなるグループから選択される、請求項1に記載のマイクロミラー素子。
- 前記誘電泳動液体がパーフルオロエーテルである、請求項1に記載のマイクロミラー素子。
- 前記基板の前記表面上に形成された少なくとも1つの電極(60,62)を更に含み、該電極が、前記反射素子とは異なる寸法を有し、
前記反射素子が、前記少なくとも1つの電極に電気信号が加えられたことに応じて動くよう構成され、該電気信号が、前記空洞内に不均一な電界を形成するよう構成される、請求項1に記載のマイクロミラー素子。 - マイクロアクチュエータであって、
表面(22)を有する基板(20)と、
該基板の前記表面から隔置され、及び該基板の該表面と実質的に平行に向けられた、プレート(30)であって、該プレートと前記基板の前記表面とがそれらの間に空洞(50)を画定する、プレート(30)と、
前記空洞内に配置され、及び該マイクロアクチュエータに電気信号が加えられた際に動くことができる、誘電泳動液体(53)と、
前記基板の前記表面と前記プレートとの間に配置されたアクチュエーティング素子とを含み、
該アクチュエーティング素子(40)が、第1の位置と少なくとも1つの第2の位置との間で動くよう構成される、マイクロアクチュエータ。 - 前記誘電泳動液体が、非水素結合液体であり、及び20未満の誘電率を有する、請求項12に記載のマイクロアクチュエータ。
- 前記誘電泳動液体が、少なくとも約1デバイの双極子モーメントを有する、請求項12に記載のマイクロアクチュエータ。
- 前記誘電泳動液体が、ポリ(フェニルエーテル)x(xは約2〜約6)、約2〜約12炭素原子を有するアルキル、アルケン、及び環状アルキル、パーフルオロアルキル、1,1−ジフェニルエチレン及び1,2−ジフェニルエチレン、ベンゼン及び置換ベンゼン、塩素化芳香族化合物、ポリ塩化ビフェニル、及びパーフルオロエーテルからなるグループから選択される、請求項12に記載のマイクロアクチュエータ。
- 前記基板の前記表面上に形成された少なくとも1つの電極(60,62)を更に含み、該電極が、前記アクチュエーティング素子とは異なる寸法を有し、
前記アクチュエーティング素子が、前記少なくとも1つの電極に電気信号が加えられたことに応じて動くよう構成され、該電気信号が、前記空洞内に不均一な電界を形成するよう構成される、請求項12に記載のマイクロアクチュエータ。 - 前記誘電泳動液体が、所与の駆動エネルギーによって生成される前記アクチュエーティング素子の駆動力を増大させるよう適合される、請求項12に記載のマイクロアクチュエータ。
- 第1の位置と少なくとも1つの第2の位置とに間で動くよう構成されたアクチュエータ素子(40)を含むマイクロアクチュエータにおいて誘電泳動液体(53)を用いる方法であって、
前記マイクロアクチュエータの空洞(50)内に前記誘電泳動液体を配置し、この際に、該誘電泳動液体の上方に前記アクチュエータ素子を配置し、又は該誘電泳動液体内に前記アクチュエータ素子を浸漬させ、
前記第1の位置と前記少なくとも1つの第2の位置との間で前記アクチュエータ素子を動かし、この際、前記マイクロアクチュエータに電気信号を加えることを含み、
前記誘電泳動液体が、前記マイクロアクチュエータに前記電気信号が加えられた際に運動を呈し、該運動が、前記アクチュエータ素子が前記第1の位置と前記少なくとも1つの第2の位置との間で動くことに寄与する、マイクロアクチュエータにおいて誘電泳動液体を用いる方法。 - 前記誘電泳動液体が、非水素結合液体であり、20未満の誘電率を有する、請求項18に記載の誘電泳動液体を用いる方法。
- 前記誘電泳動液体が、少なくとも約1デバイの双極子モーメントを有する、請求項19に記載の誘電泳動液体を用いる方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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US10/387,245 US6954297B2 (en) | 2002-04-30 | 2003-03-12 | Micro-mirror device including dielectrophoretic liquid |
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Publication Number | Publication Date |
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JP2004280106A true JP2004280106A (ja) | 2004-10-07 |
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JP2004070837A Pending JP2004280106A (ja) | 2003-03-12 | 2004-03-12 | 誘電泳動液体を含むマイクロミラー素子 |
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US (1) | US6954297B2 (ja) |
EP (1) | EP1457801A1 (ja) |
JP (1) | JP2004280106A (ja) |
CN (1) | CN1332233C (ja) |
TW (1) | TWI265332B (ja) |
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- 2003-12-12 CN CNB2003101233509A patent/CN1332233C/zh not_active Expired - Fee Related
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US20030202265A1 (en) | 2003-10-30 |
US6954297B2 (en) | 2005-10-11 |
CN1530727A (zh) | 2004-09-22 |
TWI265332B (en) | 2006-11-01 |
TW200417767A (en) | 2004-09-16 |
CN1332233C (zh) | 2007-08-15 |
EP1457801A1 (en) | 2004-09-15 |
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