JP2004278976A - Device for controlling temperature of fluid and air conditioner - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device for controlling temperature of fluid reducing running cost with a simple structure. <P>SOLUTION: Cold water having temperature variation supplied to a cylindrical passage pipe 54 of a cold water mixing tank 10 from a cold water making device 50 rapidly diffuses at a lower layer part 54A of the cylindrical passage pipe 54 right after flowing into the cylindrical passage pipe 54. Consequently, although the cold water gets in a state that temperature variation spatially exists, the temperature variation is gradually reduced by being naturally mixed in the cylindrical passage pipe 54 by hydraulic power of the continuously supplied cold water. The cold water makes rising stream in an upper layer part 54B of the cylindrical passage pipe 54 and is led to a conical passage pipe 58. When the cold water flows in the conical passage pipe 58, fluid with temperature variation is subjected to contraction flow and spatial temperature variation is reduced and temperature is equalized. Then, the cold water is sent out to a second cold water supply pipe 62 from an outlet 56 of the conical passage pipe 58. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a fluid temperature control device and an air conditioner, and more particularly to a fluid temperature control device for controlling the temperature of chilled water supplied to a cooling coil of a clean room air conditioner and the air conditioner.
[0002]
[Prior art]
2. Description of the Related Art In recent years, in a clean room for semiconductor manufacturing, a large-scale integration of semiconductors requires strict temperature control of the room. In particular, in a space where inspection and analysis work is actually performed, it is required that the fluctuation in room temperature be suppressed to ± 1/1000 degrees or less in order to increase the accuracy of inspection and analysis. For this reason, high-precision temperature control is performed in air conditioners for clean rooms.
[0003]
By the way, the air conditioning equipment is provided with a cooling coil for air cooling. If the temperature of the chilled water supplied to the cooling coil fluctuates greatly, reheat adjustment is performed by an electric heater provided immediately before the cooling coil. However, large variations cannot be followed due to the characteristics of the electric heater made of nichrome wire. For this reason, there has been a problem that cold water having a large temperature change is directly supplied to the cooling coil.
[0004]
Therefore, the conventional air-conditioning equipment supplies cold water to the cooling coil, in which the cold water supplied from the cold water production device to the cooling coil is temporarily stored in a tank, and is stirred and mixed here to suppress the temperature unevenness of the cold water. (For example, Non-Patent Document 1).
[0005]
[Non-patent document 1]
Published by Japan Society of Air Conditioning and Sanitary Engineers, “Air Conditioning and Sanitary Engineering, Vol. 65, No. 9,” August 1991, p. 558
[0006]
[Problems to be solved by the invention]
However, the air conditioner described in Non-Patent Document 1 has a disadvantage that a stirrer must be provided in the tank in order to suppress the temperature unevenness of the cold water, and the running cost of the equipment increases.
[0007]
By the way, an air conditioner having a tank as in Non-Patent Document 1 generally has a configuration shown in FIG. The air conditioner shown in FIG. 1 includes a chilled water production device 1, a tank 2, a cooling coil 3, a first chilled water circulation system 4, a second chilled water circulation system 5, and the like.
[0008]
The first chilled water circulation system 4 includes a forward pipe 4A for supplying the chilled water of the chilled water producing apparatus 1 to the tank 2 by the pump 6 and a return pipe 4B for returning most of the chilled water mixed in the tank 2 to the chilled water producing apparatus 1. Be composed. The second chilled water circulation system 5 returns the chilled water heat-exchanged by the cooling coil 3 to the tank 2 and the forward pipe 5A for supplying the chilled water with small temperature unevenness mixed in the tank 2 to the cooling coil 3 by the pump 7. And a return pipe 5B. Note that an electric heater 8, a temperature sensor 9, and the like are attached to the outward pipe 5A.
[0009]
The amount of chilled water flowing through the first chilled water circulation system 4 is set to be larger than the amount of chilled water flowing through the second chilled water circulation system 5. This promotes the mixing of cold water by supplying a large amount of cold water from the cold water production device 1 to the tank 2, suppresses temperature unevenness by this promoting action, and supplies cold water with suppressed temperature unevenness to the cooling coil 3. This is because they are trying to do so. Therefore, the air-conditioning equipment having the tank 2 has a problem in that the cooling water circulation system requires the first and second circulation systems 4 and 5, which makes the equipment large.
[0010]
The present invention has been made in view of such circumstances, and has as its object to provide a fluid temperature control device that can reduce running costs with a simple structure.
[0011]
[Means for Solving the Problems]
In order to achieve the above object, the present invention provides a fluid temperature control device which supplies a fluid having a variation in temperature and sends the fluid while keeping the variation in the temperature of the fluid within a predetermined range. A cylindrical flow pipe having a supply port formed at a lower part, and a tapered conical flow pipe formed integrally with an upper end of the cylindrical flow pipe and having an outlet for the fluid formed at an upper part thereof; A fluid temperature control device having the following.
[0012]
Further, according to the present invention, in order to achieve the above object, a chilled water production device is connected to a supply port of the cylindrical flow pipe via a first chilled water supply pipe, and an outlet of the conical flow pipe is provided. In addition, the present invention provides an air conditioner in which an inlet of a cooling coil is connected via a second cold water supply pipe, and the cold water producing device is connected to an outlet of the cooling coil via a cold water return pipe.
[0013]
According to the fluid temperature control device of the present invention, the fluid supplied to the cylindrical flow pipe and having a variation in temperature flows into the cylindrical flow pipe and rapidly diffuses, thereby causing spatially uneven temperature. Although it is in a certain state, temperature unevenness is gradually reduced by natural mixing in the cylindrical flow pipe by the hydraulic power of the fluid continuously supplied. Then, the fluid is guided to the conical flow pipe as an ascending flow in the cylindrical flow pipe, and when flowing through the conical flow pipe, the fluid having uneven temperature flows and contracts. Temperature unevenness is reduced and averaged. Then, it is sent out from the outlet of the conical flow pipe.
[0014]
As described above, the fluid temperature control device of the present invention rapidly diffuses the fluid in the cylindrical flow pipe, and then contracts the fluid in the conical flow pipe. Since the structure is such that the temperature unevenness is averaged, the fluid can be sent out while keeping the temperature variation of the fluid within a predetermined range without separately providing a diffusion device.
[0015]
In addition, by providing a rectifying member in the cylindrical flow pipe, the fluid flowing from the cylindrical flow pipe to the conical flow pipe can be rectified, so that there is no drift in the cylindrical flow pipe, and the flow can be uniform. Since mixing is possible, the effect of suppressing temperature unevenness is improved.
[0016]
Further, according to the air conditioning equipment according to the present invention, the chilled water from the chilled water production device is supplied from the supply port of the cylindrical channel tube of the temperature control device to the cylindrical channel tube via the first chilled water supply tube. Supplied. Then, the chilled water whose temperature unevenness has been averaged by the temperature control device is supplied from the outlet of the conical flow pipe to the inlet of the cooling coil via the second chilled water supply pipe. Then, the cold water that has undergone heat exchange in the cooling coil is returned from the outlet of the cooling coil to the cold water production device via a cold water return pipe. Therefore, the air-conditioning equipment of the present invention requires only one circulating system for cold water, which simplifies the equipment.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, preferred embodiments of a fluid temperature control device and an air conditioner according to the present invention will be described in detail with reference to the accompanying drawings.
[0018]
FIG. 1 is a block diagram showing a structure of a clean room air conditioner 12 to which a fluid temperature control device 10 of the embodiment is applied. A clean room 14 shown in FIG. 1 is isolated from the outside by a partition wall 16, and a production line of a precision machine, an inspection analysis device, and the like are installed in the room. In the clean room 14, it is required that the temperature be maintained constant within an allowable error of ± 1/1000 degrees.
[0019]
An air supply panel 18 is provided on a right wall surface of the partition wall 16 in FIG. 1 and an air intake panel 20 is provided on a left wall surface. Punched metal that allows air to pass and also has a rectifying function is used for the panels 18 and 20.
[0020]
A duct 22 is connected to the intake panel 20. An air conditioner 30 including a blower 24, a cooling coil 26, and a heater 28 is connected to the duct 22. A duct 32 is connected to an air outlet of the air conditioner 30, and an air conditioning heater 34 is connected to the duct 32, and the supply panel 18 is connected via a duct 36. The air conditioning system 12 is configured to circulate the air in the clean room 14 by the duct piping.
[0021]
When the blower 24 is operated, air in the clean room 14 is sucked from the intake panel 20 to the air conditioner 30 through the duct 22. The sucked air contacts the cooling coil 26 and is cooled to a predetermined temperature.
[0022]
The heater 28 is a lamp heater having a halogen lamp inside. A temperature sensor 38 is provided in the duct 32 immediately after the heater 28, and the temperature in the duct 32 immediately after the heater 28 exits. Detected. The temperature sensor 38 is connected to a digital controller 40. The digital controller 40 controls a thyristor 42 based on temperature information of the temperature sensor 38, and the thyristor 42 controls a thyristor 42 from a power source (not shown) to the heater 28. To supply power of voltage. The resolution performance of the digital controller 40 is ± 1/100 degrees. With the heater 28 having such a configuration, the air cooled by the cooling coil 26 is heated to a vicinity of a required temperature. For example, when the required temperature is 23.2 degrees Celsius, the heating of the air is controlled by the heater 28 so that the temperature becomes 22.9 degrees Celsius.
[0023]
In the clean room 14, a temperature sensor 44 for detecting the temperature in the clean room 14 is provided. The temperature sensor 44 is connected to a digital controller 46, and the digital controller 46 controls a thyristor 48 based on temperature information of the temperature sensor 44, and the thyristor 48 controls a lamp of the air conditioning heater 34 from a power supply unit (not shown). A power of a predetermined voltage is supplied to a heater (not shown). Here, the resolution of the digital controller 46 is higher than that of the digital controller 40, and a resolution that can be up to ± 1/1000 degrees of the temperature in the clean room 14 is used.
[0024]
The conditioned air blown out from the supply panel 18 by the air conditioning equipment 12 having such a structure is drawn into the clean room 14 as a side flow by being sucked from the intake panel 20. The temperature in the clean room 14 is strictly controlled, and the clean room 14 is maintained at a temperature of 23.2 degrees Celsius and an allowable error within 1/1000 degrees. In particular, since air does not stay in the clean room 14 due to the side flow in the clean room 14, the temperature distribution in the clean room 14 is likely to be uniform, and the occurrence of turbulence can be prevented, so that the temperature controllability is improved.
[0025]
Further, by providing the air conditioner 30 and the air conditioner heater 34 and attaching a temperature sensor for controlling these to the duct, it is possible to perform two-stage temperature control with different temperature resolutions. Can be provided. In particular, since the required temperature is brought close to the required temperature by the heater 28 of the air conditioner 30 and the required temperature is maintained by the air conditioning heater 34, the control calorie of the heater 28 and the air conditioning heater 34 fluctuates less, The room temperature of the clean room 14 can be easily controlled, and the room temperature can be stabilized.
[0026]
On the other hand, the fluid temperature control device 10 of the embodiment is a cold water mixing tank that stirs and mixes the cold water supplied from the cold water production device 50 in the natural flow of the cold water. Hereinafter, the fluid temperature control device 10 is referred to as a cold water mixing tank 10.
[0027]
As shown in FIGS. 1 and 2, the cold water mixing tank 10 has a cylindrical flow pipe 54 having a supply port 52 formed at a lower portion through which cold water is supplied from a cold water production device 50, and a cylindrical flow pipe 54. And a tapered conical flow pipe 58 integrally formed with an upper end of the pipe 54 and having an outlet 56 for cold water formed thereon.
[0028]
As shown in FIG. 1, the supply port 52 of the cylindrical flow pipe 54 is connected to a chilled water production device 50 via a first chilled water supply pipe 60. The inlet of the cooling coil 26 is connected via a second cold water supply pipe 62. The outlet of the cooling coil 26 is connected to the cold water production device 50 via a cold water return pipe 64. That is, according to the air conditioner 12 of the embodiment, the circulating system of the cold water from the cold water producing device 50 to the cooling coil 26 via the cold water mixing tank 10 is one, and the facility is simplified.
[0029]
The second cold water supply pipe 62 is provided with a heater 66 and a temperature sensor 68. Further, a pump (not shown) is provided in the first cold water supply pipe 60 or the second cold water supply pipe 62, and the pump circulates cold water in the circulation system.
[0030]
The heater 66 is an electric heater having a coil-shaped heat transfer wire. The heater 66 generates heat in the heat transfer wire by energizing the heat transfer wire from a power supply unit (not shown), and transfers heat to the cold water conveyed by the pump. By contacting the wire, it is heated to the desired temperature. Further, the temperature sensor 68 detects the temperature of the cold water immediately after passing through the heater 66. The temperature sensor 68 is connected to a digital controller 70, and the digital controller 70 controls the heater 66 based on temperature information of the temperature sensor 68.
[0031]
Next, the operation of the cold water mixing tank 10 configured as described above will be described.
[0032]
The chilled water having a temperature variation supplied from the chilled water production device 50 to the cylindrical flow pipe 54 immediately flows into the cylindrical flow pipe 54 as shown by the arrow in FIG. It diffuses rapidly at the portion 54A. As a result, the cold water is in a state where the temperature is spatially uneven, but the temperature unevenness is gradually reduced by the natural mixing in the cylindrical flow passage 54 by the hydraulic power of the continuously supplied cold water. It is becoming. Then, the cold water flows upward in the upper layer portion 54 </ b> B of the cylindrical flow pipe 54 and is guided to the conical flow pipe 58. Then, when flowing through the conical flow pipe 58, the fluid having the uneven temperature contracts as shown by the arrow, and the spatial temperature unevenness is reduced and the fluid is averaged. Then, the water is sent from the outlet 56 of the conical flow pipe 58 to the second cold water supply pipe 62 shown in FIG.
[0033]
As described above, the cold water mixing tank 10 causes the temperature unevenness of the cold water in the flow of the cold water in which the cold water is rapidly diffused in the cylindrical flow pipe 54 and then the cold water is contracted in the conical flow pipe 58. , The temperature of the chilled water can be kept within a predetermined range and the chilled water can be sent to the cooling coil 26 without separately providing a diffusion device.
[0034]
As shown in FIG. 3, by providing a porous flow straightening plate 72 in the middle layer of the cylindrical flow pipe 54, cold water flowing from the cylindrical flow pipe 54 to the conical flow pipe 58 is forcibly applied. Therefore, there is no drift in the cylindrical flow pipe 54, and cold water can be uniformly reduced and mixed. Thereby, the temperature controllability is improved.
[0035]
In the embodiment, the fluid temperature control device for supplying cold water to the cooling coil 26 of the clean room air conditioner 12 has been described. However, the present invention is not limited to this. It can also be applied to humidifiers and water jacket temperature controllers.
[0036]
【Example】
FIG. 4 is a graph created by acquiring experimentally the temperature fluctuation state of the cold water sent from the cold water mixing tank 10 with respect to the temperature fluctuation of the cold water supplied from the cold water production device 50. In the figure, a graph A is a graph showing the temperature fluctuation of the chilled water supplied from the chilled water mixing tank 10, and a graph B is a graph showing the temperature fluctuation of the chilled water sent from the chilled water production device 50.
[0037]
5 is a graph showing the temperature fluctuation when the temperature of the chilled water supplied from the chilled water production device 50 is controlled only by the electric heater of the heater 66, and the graph D is supplied from the chilled water production device 50. 6 is a graph showing a temperature change when the temperature of the chilled water is controlled by the chilled water mixing tank 10 and the electric heater of the heater 66. Note that the vertical axes of the graphs in FIGS. 4 and 5 indicate temperature fluctuations, and the horizontal axes indicate elapsed time.
[0038]
As shown by the graph B in FIG. 4, the raw cold water supplied from the cold water producing apparatus 50 fluctuates greatly within a range of ± 0.04 ° C., and its fluctuation frequency is also high. If such cold water is supplied directly to the cooling coil 26 without passing through the cold water mixing tank 10, it cannot follow large fluctuations due to the characteristics of the electric heater of the heater 66, and as shown in the graph C of FIG. Is supplied directly to the cooling coil. This adversely affects the room temperature control of the clean room 14.
[0039]
On the other hand, when the chilled water supplied from the chilled water production device 50 is passed through the chilled water mixing tank 10, the components in the high frequency range are equalized as shown in the graph A of FIG. The temperature is kept in the range of ° C., and as a whole, it becomes cold water in which temperature unevenness is averaged. Further, by further controlling the chilled water discharged from the chilled water mixing tank 10, that is, the chilled water in which the temperature unevenness is averaged, by the heater 66, as shown in a graph D of FIG. Can be suppressed. This is due to the characteristics of the electric heater that can control the temperature if the temperature changes in a low frequency range.
[0040]
As described above, by using the cold water mixing tank 10 of the embodiment and the heater 66 together, highly accurate temperature control becomes possible.
[0041]
【The invention's effect】
As described above, according to the fluid temperature control device of the present invention, the fluid is rapidly diffused in the cylindrical flow pipe, and then the fluid is contracted in the conical flow pipe. Among them, since the structure is such that the temperature unevenness of the fluid is averaged, it is possible to send out the fluid while keeping the temperature variation of the fluid within a predetermined range without separately providing a diffusion device.
[0042]
In addition, by providing a rectifying member in the cylindrical flow pipe, the fluid flowing from the cylindrical flow pipe to the conical flow pipe can be rectified, so that the fluid with reduced temperature unevenness in the cylindrical flow pipe is mixed. The temperature controllability is improved by guiding the flow to the conical flow pipe without performing the above.
[0043]
Further, according to the air-conditioning equipment according to the present invention, only one circulation system for the cold water is required, so that the equipment can be simplified.
[Brief description of the drawings]
FIG. 1 is a block diagram showing the structure of an air conditioner for a clean room to which a fluid temperature control device according to an embodiment is applied. FIG. 2 is a longitudinal sectional view showing the structure of a chilled water mixing tank according to the embodiment. Longitudinal sectional view of a cold water mixing tank with a current plate attached. [Fig. 4] Graph showing cold water temperature fluctuation when a cold water mixing tank is provided. [Fig. 5] Cold water temperature fluctuation when a heater and a cold water mixing tank are provided. FIG. 6 is a block diagram showing the structure of a conventional air-conditioning system.
10: fluid temperature control device (cold water mixing tank), 12: clean room air conditioner, 14: clean room, 26: cooling coil, 30: air conditioner, 34: air conditioner heater, 50: cold water production device, 52: supply port , 54: cylindrical flow pipe, 56: outlet, 58: conical flow pipe, 60: first cold water supply pipe, 62: second cold water supply pipe, 64: cold water return pipe, 66: heater , 68 temperature sensor, 72 rectifier plate

Claims (3)

Fluid with a temperature variation is supplied, in a fluid temperature control device for sending the fluid with the temperature variation within a predetermined range,
A supply port to which the fluid is supplied is formed at a lower portion of a cylindrical flow channel tube, and a tapered shape having an upper portion formed integrally with an upper end portion of the cylindrical flow channel tube and having an outlet for the fluid. A fluid temperature control device, comprising: a conical flow pipe. The fluid temperature control device according to claim 1, wherein a rectifying member that rectifies the fluid supplied from the supply port is provided in the cylindrical channel pipe. The supply port of the cylindrical flow pipe is connected to a chilled water production device via a first chilled water supply pipe, and the outlet of the conical flow pipe is connected to a cooling coil through a second chilled water supply pipe. An air conditioner, wherein an inlet is connected, and the chilled water production device is connected to an outlet of the cooling coil via a chilled water return pipe.

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