JP2004265992A - Manufacturing apparatus for composite structure object - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing apparatus for a composite structure object wherein the manufacture of the composite structure object by an aerosol deposition method is ensured without requiring a large-sized chamber and a large-sized exhaust system like before, and the throughput of productivity is improved largely, and film formation is ensured without choosing a substrate size. <P>SOLUTION: In the manufacturing apparatus for a composite structure object, aerosol in which particulate are distributed in gas is made to collide with a substrate, and a structure object composed of structure of the particulate is formed on a surface of base material. The manufacturing apparatus is constituted of a pad which abuts against the surface of the base material and forms closed volume, a nozzle which is fixed with the pad and derives the aerosol generated by aerosol generating equipment to the substrate, and a particulate withdrawal mechanism which is connected to an aperture formed on the pad and sucks particulate which rebounded from the substrate or dissipated. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a composite manufacturing apparatus used when a composite structure including a substrate and a structure is manufactured by spraying an aerosol containing fine particles onto a substrate and forming the structure on the substrate.
[0002]
[Prior art]
The aerosol position device has a structure in which a substrate, a nozzle, and a powder recovery device are placed in a container such as a chamber. A method has been proposed in which an aerosol in which is dispersed in a gas is generated, and a nozzle is made to collide with a substrate at a high speed to form a structure on the surface of the substrate. (For example, Patent Document 1)
[0003]
[Patent Document 1]
JP 2000-21766 A
[Problems to be solved by the present invention]
However, the above-described configuration requires a large-sized chamber, and it is necessary to arrange an exhaust system such as a large-sized vacuum pump having high exhaust performance attached thereto. Further, when the size of the substrate is increased, the size of the chamber needs to be increased according to the size of the substrate. In addition, when a substrate is frequently taken in and out of a chamber for performing a batch process, there is a problem in that improvement of productivity is limited.
[0005]
The present invention enables the production of a composite structure by the aerosol deposition method without requiring a large-sized chamber or a large-sized exhaust system as in the past, and greatly improves the throughput of productivity, regardless of the substrate size. It is an object of the present invention to provide a composite structure manufacturing apparatus capable of forming a film.
[0006]
[Means for Solving the Problems and Functions / Effects]
The present invention provides a composite structure manufacturing apparatus that solves the above-described problems by causing an aerosol in which fine particles are dispersed in a gas to collide with a substrate to form a structure including the fine particles on the substrate surface. The device configuration is provided on the pad, which is in contact with the surface of the base material to form a closed space, a nozzle fixed to the pad, and which guides the aerosol generated by an aerosol generating device to the substrate, and the pad. A fine particle collection mechanism that communicates with the opening and sucks fine particles that bounce off or dissipate from the substrate.
[0007]
As described above, in the present invention, since a space closed by the base material and the pad is configured, a large chamber is not required, and the capacity of the exhaust system of the fine particle collection mechanism can be reduced accordingly, thus significantly reducing the size and simplification of the apparatus. It becomes possible. In addition, since the film-forming space itself is small, the powder can be efficiently collected by the collection mechanism without losing gas flow, and the amount of powder that is dissipated can be minimized to increase the powder usage efficiency. It becomes possible. Furthermore, when forming a large base material, a chamber corresponding to that was necessary, but it was not necessary, and it is possible to form a large base material with a small equipment configuration compared to the conventional equipment configuration It becomes.
[0008]
Further, the inside of the closed space is evacuated by the particulate collection mechanism, and is always kept at a negative pressure with respect to the atmospheric pressure, so that the base material and the pad can be brought into close contact with each other by a differential pressure. In order to enhance the adhesion effect, it is desirable to provide a vacuum seal for adhesion at a portion where the pad and the substrate are in contact. In addition, it is possible to easily form a film even if the base material has a curved surface by driving the nozzle with a curved surface driving actuator etc. by making the pad a shape that can be attracted to a curved surface such as an uneven surface, a semicircular surface, a spherical surface, etc. It is.
[0009]
Furthermore, since the space to be evacuated is sufficiently small, setup time for evacuation of the chamber during film formation, removal of the film-forming body, maintenance, etc. can be greatly reduced, and production efficiency can be greatly increased. is there. Moreover, when exchanging the substrate, the substrate can be easily exchanged by moving the substrate up and down with respect to the pad or the pad with respect to the substrate. That is, the substrate can be replaced without a troublesome process such as taking out the substrate by opening the chamber to the atmosphere as in the related art. The same effect can be obtained when a base material is attached. This makes it possible to increase not only the single-layer film and the multilayer film but also the throughput of the film formation.
In addition, when a negative pressure is applied to the enclosed space, the pad is reinforced to prevent the pad from being crushed due to the pressure difference from the atmospheric pressure. Good to adopt.
[0010]
Further, according to the present invention, a nozzle fixed to the pad moves with respect to the base material so that a film can be formed on the surface of the base material with a certain area or a pattern can be formed.
[0011]
For example, when the pad can be moved with respect to the base material while maintaining a vacuum, an actuator or the like is attached to the pad, and the pad can be moved with respect to the base material. Then, by moving the pad together with the nozzle, it is possible to form a film of a fixed area on the substrate or pattern formation.
In addition, you may make it move a base material instead of moving a pad, or in addition to moving a pad.
[0012]
Further, the present invention may include a mechanism in which a nozzle moves with respect to a pad fixed to the base material, so that a film can be formed on a surface of the base material with a certain area or a pattern can be formed.
[0013]
As described above, the nozzle can move with respect to the pad, so that even when the contact portion or the seal portion of the pad does not move relative to the base material, it is possible to form a film of a fixed area or patterning. It becomes.
As a specific configuration, a nozzle is taken into the pad from the outside with a vacuum introduction bearing or the like, and the nozzle is moved via the vacuum bearing. For example, a magnetic coupling or the like may be used as the vacuum introduction bearing.
[0014]
Further, the present invention provides a mechanism in which the nozzle fixed to the pad and the substrate move relative to each other by deforming the pad itself, so that a film can be formed on the surface of the substrate with a fixed area or a pattern can be formed. You can also.
[0015]
In this way, by deforming the pad itself, it is possible to form a film with a fixed area or patterning even when the contact portion or the seal portion of the pad does not move relative to the base material.
As a specific configuration, urethane rubber is used so that the nozzle fixed to the pad can move with respect to the substrate by deforming the pad in a state where the contact portion or the seal portion between the pad and the base material does not relatively move. And other soft materials. Alternatively, in order to mechanically deform the pad, there is a method of forming the film by moving the nozzle fixed to the pad by deforming the pad with a bellows or the like corresponding to vacuum and moving the nozzle fixed to the pad. In this case, the contact portion between the nozzle and the pad is fixed, and if the actuator is further fixed to the pad, or if the nozzle is fixed to an actuator or the like outside the pad, the nozzle is moved by manual or automatic control. This makes it possible to improve the degree of freedom of the shape of the film formed on the substrate surface.
[0016]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a diagram of a compact film forming pad composite structure manufacturing apparatus of the composite structure manufacturing apparatus. The apparatus includes a substrate 3, a pad 2, a nozzle 1, and a particulate recovery mechanism 8. The pad has an opening, and forms a closed space 9 by bringing the base material into close contact with the opening. An aerosol generating device 7 for supplying aerosol is connected to a stage preceding the nozzle 1, and an exhaust system such as a vacuum pump is installed in the particulate recovery mechanism 8.
The pad 2 and the substrate 3 are constituted by a vacuum-compatible O-ring, a magnetic fluid seal or another sealing mechanism 6 so that no gas leaks at the contact portion. Thereby, the pad 2 and the substrate 3 are in close contact with each other.
[0017]
The shape of the pad and the opening of the pad can be adapted to a wide variety of base materials by manufacturing according to the size and shape of the base material to be formed. For example, when a film is formed on a 12-inch silicon wafer, the film can be formed on the front surface by using a pad having an opening of φ300 mm. If the substrate is large, such as glass for a liquid crystal display, it can be dealt with by increasing the size of the pad or arranging a plurality of pads. In the present invention, a substrate having a size of about 100 × 100 mm is appropriate in terms of production efficiency and has a large effect of reducing the size of the apparatus.
[0018]
The space 9 is evacuated by the vacuum pump in the fine powder recovery mechanism 8 of the present embodiment, and then the aerosol generator 7 generates an aerosol in which fine particles are dispersed in a gas. The generated aerosol is supplied to the nozzle 1 through a tube. The supplied aerosol passes through the inside of the nozzle 1 and is jetted from the tip of the nozzle as an aerosol beam 10 into a closed space 9 constituted by the substrate 3, the pad 2, the nozzle 1, and the fine powder recovery mechanism 8. The jetted aerosol collides with the substrate 3 or the film forming body 4 and a part thereof becomes the film forming body 4. The aerosol bounced off without being formed into a film is again taken in from the opening 5 via the space 9 and guided to the fine powder collecting mechanism 8 to be collected. It is desirable that the aerosol sucked into the fine powder recovery mechanism 8 be recovered by a powder separation mechanism such as a cyclone type or a filter type.
[0019]
The aerosol referred to in the present invention is an oxide such as aluminum oxide, PZT, zinc oxide or titanium oxide, a nitride such as silicon nitride or aluminum nitride, a carbide such as diamond, silicon carbide or titanium carbide, or a mixture thereof. Dispersion of brittle materials, such as multi-element solid solutions, piezoelectric, pyroelectric ceramics, semi-metallic substances, and semiconductor compounds such as lead titanate and strontium titanate, in gases such as nitrogen, helium, and argon Say. The aerosol beam is obtained by ejecting these aerosols together with gas from the nozzle 1 at a high speed of 100 to 400 m / sec.
[0020]
Next, as shown in FIG. 2, the nozzle 21 is fixed to the actuator 30, and the substrate 23 and the pad 22 are relatively moved to form a film having a certain area or a pattern. The introduction part of the nozzle into the pad is vacuum-sealed with an O-ring or the like. As a sealing material, a vacuum-compatible O-ring, a magnetic fluid seal, or the like can be used.
At this time, when the pad 22 can be moved or slid easily by the external force with respect to the base material 23 while maintaining the vacuum, the nozzle 21 or the pad 22 is fixed to the actuator 30 or the like and moved with respect to the base material 23 Film formation with a fixed area or patterning film formation can be performed. The actuator may be moved by a mechanism such as a linear motor or a combination of a rotary motor and a ball screw. When positioning accuracy of the nozzle and straightness during movement are required, an LM guide or a cross roller guide manufactured by THK may be used as the guide.
[0021]
Furthermore, the pad 22 and the base material 23 can move in a non-contact manner by adjusting the flow rate of the compressed air and floating the pad 22 with respect to the base material 23 by using a static pressure bearing as the seal part 26. It can also be a mechanism. The effect in this case is that there is almost no contact resistance because the pad 22 and the base material 23 can be moved without contact. Therefore, the pad and the nozzle can be smoothly moved with respect to the base material, and the actuator can be downsized. Further, it is possible to form a film without damage such as scratching the substrate.
[0022]
When it is difficult to move or slide the pad with respect to the substrate, the nozzle 22 can move with respect to the base material by deforming the pad 22 as shown in FIG. In this case, the pad 22 is made of urethane rubber or another soft material. Further, it is preferable to adopt a structure in which the pad 22 is reinforced in a certain direction so as to prevent the pad 22 from being crushed due to a pressure difference from the atmospheric pressure when the space 29 is pulled to a negative pressure. The reinforcing structure uses a pillar 31 made of metal or the like, and the pad can be deformed by a link mechanism or the like so that the nozzle can move. The reinforcing material may be set inside or outside the pad.
[0023]
Alternatively, the mechanism itself can be devised so that the pad can be mechanically deformed. That is, a mechanically movable mechanism is added to the pad to relatively move the nozzle and the substrate. For example, as shown in FIG. 3, there is a method of forming a movable portion with a bellows 51 compatible with vacuum and deforming the pad 42. The bellows 51 corresponding to the vacuum can be of a cylindrical type or a square type, and can have a structure that can move back and forth and right and left along the substrate surface. As a type of the vacuum bellows, it is desirable to use a vacuum bellows that can move smoothly and can take a large stroke. It is preferable to adopt a structure in which the pad 42 is reinforced in a certain direction to prevent the pad 42 from being crushed by a pressure difference from the atmospheric pressure when the space 49 is pulled to a negative pressure. As the reinforcing material, a pillar 52 made of metal or the like can be used, and the pad 42 can be deformed by a link mechanism or the like to move the nozzle. The reinforcement may be inside or outside the pad.
[0024]
Further, the actuator 50 is fixed to the nozzle 41 or the pad 42 in order to relatively move the nozzle and the base material. The actuator may be moved by a mechanism such as a combination of a linear motor or a rotary motor and a ball screw. Alternatively, the nozzle can be externally moved by using a bellows type linear introduction machine or a magnetic coupling introduction machine manufactured by Irie Koken Co., Ltd. Further, when positioning accuracy or straightness is required, an LM guide or a cross roller guide manufactured by THK may be used as a guide. With this mechanism, it is possible to form a film on a substrate by manually or automatically controlling an actuator.
[0025]
Further, in this embodiment, the base material can be easily and quickly exchanged by moving the base material up and down with respect to the pad or moving the pad up and down with respect to the base material. For example, in the case of forming a multilayer film, the setup time of the base material can be shortened, and the throughput can be increased.
Further, in the present invention, since the film-forming space for forming a vacuum is also miniaturized, the exhaust system such as a vacuum pump in the particle collection mechanism is also small, and high throughput can be supported. Overall miniaturization is possible.
[0026]
In the present invention, by adhering a pad, a nozzle, or a fine powder collecting mechanism, or by providing a static electricity removing device, it is possible to prevent powder from adhering and further increase the powder collecting efficiency.
[0027]
【The invention's effect】
As described above, by using the apparatus for manufacturing a composite film-forming pad composite structure according to the present invention, a composite structure can be manufactured regardless of the substrate size without requiring a large-sized chamber or an exhaust system.
[Brief description of the drawings]
FIG. 1 is a configuration diagram of a compact pad according to one embodiment of the present invention.
FIG. 2 is a conceptual diagram of a material such as a compact pad rubber according to one embodiment of the present invention.
FIG. 3 is a structural view of a compact pad bellows type according to one embodiment of the present invention.
[Explanation of symbols]
1, 21, 41 ... nozzles 2, 22, 42 ... pads 3, 23, 43 ... substrates 4, 24, 44 ... film-forming bodies 5, 25, 45 ... openings 6, 26, 46 ... sealing mechanisms 7, 27, 47 aerosol generating device 8, 28, 48 particle collecting mechanism 30, 50 actuator 31 support 51 bellows

Claims (4)

An aerosol in which fine particles are dispersed in a gas is caused to collide with a substrate to form a structure made of the structural material of the fine particles on the surface of the base material. A pad that forms a closed space in contact with the base material surface, a nozzle fixed to the pad, and a nozzle that guides the aerosol generated by an aerosol generating device to the substrate, and communicates with an opening provided in the pad, A composite structure manufacturing apparatus comprising: a fine particle collecting mechanism for sucking fine particles bounced off from the substrate. 2. The composite structure manufacturing apparatus according to claim 1, wherein the nozzle fixed to the pad is capable of forming a film on a surface of the substrate or forming a film on the surface of the substrate by moving the nozzle relative to the substrate. The composite structure manufacturing apparatus according to claim 1, further comprising a mechanism for moving the nozzle with respect to a pad fixed to the base material, and capable of forming a film on a surface of the base material or forming a film by patterning on the surface of the base material. 2. The method according to claim 1, wherein the pad itself is deformed to provide a mechanism in which the nozzle fixed to the pad and the base material move relatively, and a film can be formed on the surface of the base material with a constant area, or a pattern can be formed. Composite structure manufacturing equipment.

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