JP2004249723A5 - - Google Patents
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- JP2004249723A5 JP2004249723A5 JP2004014045A JP2004014045A JP2004249723A5 JP 2004249723 A5 JP2004249723 A5 JP 2004249723A5 JP 2004014045 A JP2004014045 A JP 2004014045A JP 2004014045 A JP2004014045 A JP 2004014045A JP 2004249723 A5 JP2004249723 A5 JP 2004249723A5
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- led
- characteristic
- current value
- light
- light amount
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Claims (11)
前記LEDに基準電流値を印加して発光させ、前記LEDから照射される光の分光特性及び光量を測定する工程と、
前記分光特性及び前記光量に基づいた第1のLED特性を求める工程と、
前記第1のLED特性を、前記光量を測定するためのセンサの感度特性に基づいて補正して第2のLED特性を求める工程と、
前記第2のLED特性を、前記感光材料の波長感度特性に基づいて補正して第3のLED特性を求める工程と、
前記第3のLED特性が、基準特性になるように設定電流値を決定する工程と、
を有することを特徴とする露光装置の製造方法。 In an exposure apparatus manufacturing method for exposing a photosensitive material using an LED as a light source,
Applying a reference current value to the LED to emit light, and measuring a spectral characteristic and a light amount of light emitted from the LED; and
Obtaining a first LED characteristic based on the spectral characteristic and the light amount;
Correcting the first LED characteristic based on a sensitivity characteristic of a sensor for measuring the light amount to obtain a second LED characteristic;
Correcting the second LED characteristic based on the wavelength sensitivity characteristic of the photosensitive material to obtain a third LED characteristic;
Determining a set current value so that the third LED characteristic becomes a reference characteristic;
An exposure apparatus manufacturing method characterized by comprising:
前記LEDに第1の電流値を印加して発光させ、前記LEDから照射される光の分光特性及び光量を測定する工程と、
前記光量が基準光量となるように、前記第1の電流値を補正して第2の電流値を決定する工程と、
前記分光特性及び前記基準光量に基づいた第1のLED特性を求める工程と、
前記第1のLED特性を、前記光量を測定するためのセンサの感度特性に基づいて補正して第2のLED特性を求める工程と、
前記第2のLED特性を、前記感光材料の波長感度特性に基づいて補正して第3のLED特性を求める工程と、
前記第3のLEDの特性が、基準特性になるように前記第2の電流値を補正して第3の電流値を決定する工程と、
を有することを特徴とする露光装置の製造方法。 In an exposure apparatus manufacturing method for exposing a photosensitive material using an LED as a light source,
Applying a first current value to the LED to emit light, and measuring the spectral characteristics and the amount of light emitted from the LED; and
Correcting the first current value and determining a second current value so that the light amount becomes a reference light amount; and
Obtaining a first LED characteristic based on the spectral characteristic and the reference light amount;
Correcting the first LED characteristic based on a sensitivity characteristic of a sensor for measuring the light amount to obtain a second LED characteristic;
Correcting the second LED characteristic based on the wavelength sensitivity characteristic of the photosensitive material to obtain a third LED characteristic;
Correcting the second current value so that the characteristic of the third LED becomes a reference characteristic and determining a third current value;
An exposure apparatus manufacturing method characterized by comprising:
前記LEDに基準電流値を印加して発光させ、前記LEDから照射される光の分光特性及び光量を測定する工程と、
前記LEDに基準電流値を印加して発光させ、前記LEDから照射される光の分光特性及び光量を測定する工程と、
前記分光特性及び前記光量に基づいた第1のLED特性を求める工程と、
前記第1のLED特性を、前記光量を測定するためのセンサの感度特性に基づいて補正して第2のLED特性を求める工程と、
前記第2のLED特性を、前記感光材料の波長感度特性に基づいて補正して第3のLED特性を求める工程と、
前記第3のLED特性が、基準特性になるように設定電流値を決定する工程と、を有する調整方法によって、前記LEDが調整されたことを特徴とする露光装置。 An exposure apparatus that exposes a photosensitive material using an LED as a light source,
Applying a reference current value to the LED to emit light, and measuring a spectral characteristic and a light amount of light emitted from the LED; and
Applying a reference current value to the LED to emit light, and measuring a spectral characteristic and a light amount of light emitted from the LED; and
Obtaining a first LED characteristic based on the spectral characteristic and the light amount;
Correcting the first LED characteristic based on a sensitivity characteristic of a sensor for measuring the light amount to obtain a second LED characteristic;
Correcting the second LED characteristic based on the wavelength sensitivity characteristic of the photosensitive material to obtain a third LED characteristic;
An exposure apparatus wherein the LED is adjusted by an adjustment method including a step of determining a set current value so that the third LED characteristic becomes a reference characteristic.
前記LEDに第1の電流値を印加して発光させ、前記LEDから照射される光の分光特性及び光量を測定する工程と、
前記光量が基準光量となるように、前記第1の電流値を補正して第2の電流値を決定する工程と、
前記分光特性及び前記基準光量に基づいた第1のLED特性を求める工程と、
前記第1のLED特性を、前記光量を測定するためのセンサの感度特性に基づいて補正して第2のLED特性を求める工程と、
前記第2のLED特性を、前記感光材料の波長感度特性に基づいて補正して第3のLED特性を求める工程と、
前記第3のLEDの特性が、基準特性になるように前記第2の電流値を補正して第3の電流値を決定する工程と、を有する調整方法によって、前記LEDが調整されたことを特徴とする露光装置。 An exposure apparatus that exposes a photosensitive material using an LED as a light source,
Applying a first current value to the LED to emit light, and measuring the spectral characteristics and the amount of light emitted from the LED; and
Correcting the first current value and determining a second current value so that the light amount becomes a reference light amount; and
Obtaining a first LED characteristic based on the spectral characteristic and the reference light amount;
Correcting the first LED characteristic based on a sensitivity characteristic of a sensor for measuring the light amount to obtain a second LED characteristic;
Correcting the second LED characteristic based on the wavelength sensitivity characteristic of the photosensitive material to obtain a third LED characteristic;
Correcting the second current value to determine a third current value so that the characteristic of the third LED becomes a reference characteristic, and adjusting the LED, A featured exposure apparatus.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004014045A JP4808929B2 (en) | 2003-01-27 | 2004-01-22 | Exposure apparatus manufacturing method and light source adjusted exposure apparatus |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003017932 | 2003-01-27 | ||
JP2003017932 | 2003-01-27 | ||
JP2004014045A JP4808929B2 (en) | 2003-01-27 | 2004-01-22 | Exposure apparatus manufacturing method and light source adjusted exposure apparatus |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2004249723A JP2004249723A (en) | 2004-09-09 |
JP2004249723A5 true JP2004249723A5 (en) | 2007-03-01 |
JP4808929B2 JP4808929B2 (en) | 2011-11-02 |
Family
ID=33032106
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004014045A Expired - Fee Related JP4808929B2 (en) | 2003-01-27 | 2004-01-22 | Exposure apparatus manufacturing method and light source adjusted exposure apparatus |
Country Status (1)
Country | Link |
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JP (1) | JP4808929B2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006218746A (en) * | 2005-02-10 | 2006-08-24 | Fuji Photo Film Co Ltd | Exposure head, method for correcting quantity of light thereof, and exposure device |
JP2006330163A (en) * | 2005-05-24 | 2006-12-07 | Citizen Watch Co Ltd | Exposure device and manufacturing method for exposure device |
JP4901246B2 (en) * | 2006-03-15 | 2012-03-21 | 財団法人21あおもり産業総合支援センター | Spectral luminance distribution estimation system and method |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1032681A (en) * | 1996-07-16 | 1998-02-03 | Asahi Optical Co Ltd | Color image reader and its adjustment method |
JPH1199698A (en) * | 1997-09-26 | 1999-04-13 | Minolta Co Ltd | Image forming apparatus |
JP2001018450A (en) * | 1999-07-09 | 2001-01-23 | Konica Corp | Image recording apparatus |
JP4618904B2 (en) * | 2001-02-08 | 2011-01-26 | Hoya株式会社 | Electronic endoscope device |
-
2004
- 2004-01-22 JP JP2004014045A patent/JP4808929B2/en not_active Expired - Fee Related
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