JP2004243227A - Plate-like member foreign matter elimination method and its apparatus - Google Patents

Plate-like member foreign matter elimination method and its apparatus Download PDF

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Publication number
JP2004243227A
JP2004243227A JP2003036015A JP2003036015A JP2004243227A JP 2004243227 A JP2004243227 A JP 2004243227A JP 2003036015 A JP2003036015 A JP 2003036015A JP 2003036015 A JP2003036015 A JP 2003036015A JP 2004243227 A JP2004243227 A JP 2004243227A
Authority
JP
Japan
Prior art keywords
plate
adhesive tape
tape
foreign matter
roll
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003036015A
Other languages
Japanese (ja)
Inventor
Nobukazu Hosogai
信和 細貝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUMIRON KK
Shima Trading Co Ltd
Sanshin Co Ltd
Original Assignee
SUMIRON KK
Shima Trading Co Ltd
Sanshin Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUMIRON KK, Shima Trading Co Ltd, Sanshin Co Ltd filed Critical SUMIRON KK
Priority to JP2003036015A priority Critical patent/JP2004243227A/en
Publication of JP2004243227A publication Critical patent/JP2004243227A/en
Pending legal-status Critical Current

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Abstract

<P>PROBLEM TO BE SOLVED: To adhere and eliminate a foreign matter deposited on a surface of a plate-like member by an adhesive tape by transferring a pressing roll along the surface of the plate-like member in the state that the adhesive tape is brought into press contact with the surface of the plate-like member, to certainly eliminate the foreign matter by press-contact by the pressing roll, transferring in the press-contact state and transferring of the adhesive tape after elimination of the foreign matter and to enhance elimination workability. <P>SOLUTION: The plate-like member foreign matter elimination apparatus is provided with a retaining member 1 retaining the plate-like member W; the adhesive tape 10 capable of adhering and eliminating the foreign matter deposited on the surface of the plate-like member; a tape transferring mechanism 11 capable of being stretched and transferring the adhesive tape at a position near the surface of the plate-like member; a pressing roll 19 capable of press-contacting the adhesive tape with the surface of the plate-like member; a roll press-contact mechanism 20 for press-contacting the adhesive tape with the surface of the plate-like member; and a roll transferring mechanism 21 capable of transferring the pressing roll along the surface of the plate-like member in the state that the adhesive tape is brought into press contact with the surface of the plate-like member. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

【0001】
【発明の属する技術分野】
本発明は例えば多層プリント配線基板、カラー液晶基板、カラーフィルター、銅板等の板状部材の表面に付着している異物を除去する際に用いられる板状部材異物除去方法及びその装置に関するものである。
【0002】
【従来の技術】
この種の多層プリント配線基板、カラー液晶基板、カラーフィルター、銅板等の板状部材の表面に付着している絶縁樹脂層やメッキ層の染み出しの発生による溢れた部分や塵埃等の異物を除去する手段として、砥石や研磨テープにより板状部材の表面を除去研磨する構造のものが知られている。
【0003】
【発明が解決しようとする課題】
しかしながら上記研磨構造の場合、表面の異物を除去すると共に表面を研磨することになり、表面の研磨を必要としない板状部材での使用に制限されることがあるという不都合を有している。
【0004】
【課題を解決するための手段】
本発明はこのような課題を解決することを目的とするもので、本発明のうちで、請求項1記載の方法の発明は、板状部材の表面に付着している異物を粘着テープにより粘着除去するに際し、上記粘着テープを板状部材の表面近接位置に張架し、該粘着テープを圧接ロールにより該板状部材の表面に圧接した状態で該圧接ロールを該板状部材の表面に沿って移送させて該板状部材の表面に付着している異物を粘着除去することを特徴とする板状部材異物除去方法にある。
【0005】
又、請求項2記載の装置の発明は、板状部材を保持可能な保持部材と、該板状部材の表面に付着している異物を粘着除去可能な粘着テープと、該粘着テープを板状部材の表面近接位置に張架して移送可能なテープ移送機構と、該粘着テープを該板状部材の表面に圧接可能な圧接ロールと、該粘着テープを該板状部材の表面に圧接させるロール圧接機構と、該粘着テープを該板状部材の表面に圧接した状態で該圧接ロールを該板状部材の表面に沿って移送可能なロール移送機構とを具備してなることを特徴とする板状部材異物除去装置にある。
【0006】
又、請求項3記載の装置の発明は、上記粘着テープは基材テープ上に粘着層を形成してなり、該粘着層上に剥離テープを剥離可能に仮粘着してなることを特徴とするものであり、又、請求項4記載の発明は、上記剥離テープを剥離可能な剥離機構を備えてなることを特徴とするものであり、又、請求項5記載の発明にあっては、上記保持部材を移動させる移動機構を備えてなることを特徴とするものである。
【0007】
【発明の実施の形態】
図1乃至図5は本発明の実施の形態例を示し、1は保持部材、2は移動機構であって、保持部材1は異物除去すべき板状部材Wを図示省略の吸着機構により保持するように構成され、この場合、機台3に送り台4をガイド部5により作業位置F及び供給取出位置Tの間で移動自在に設け、送り台4上に保持部材1を取付け、機台3に移動用モータ6・7を取付け、この移動用モータ6・7の主軸にプーリ6a・7aを取付け、プーリ6a・7a間にベルト8を掛回し、送り台4にベルト8の部分を連結部9により連結し、移動用モータ6・7の回転により送り台4上の保持部材1を往復移動自在に設けて構成している。
【0008】
10は粘着テープ、11はテープ移送機構であって、この粘着テープ10は基材テープ10a上に粘着層10bを形成してなり、かつ、粘着層10b上に剥離テープ10cを剥離可能に仮粘着してなり、機台3に一対の立上部材3a・3aを立設し、立上部材3a・3a間に巻出軸12、巻取軸13及び剥離軸14を横設し、巻出軸12に巻出用モータ12aの主軸を連結し、巻取軸13に巻取用モータ13aの主軸を連結し、剥離軸14に剥離用モータ14aの主軸を連結し、粘着テープ10の巻反を巻出軸12に取付け、巻反から引き出した粘着テープ10を案内ロール15により下方に案内し、案内ロール15を経た粘着テープ10の剥離テープ10cを案内ロール16を介して剥離軸14に連結し、板状部材Wの両側面外方位置に粘着テープ10を板状部材Wの表面近接位置に張架可能な一対の案内ロール17・18を対向配置し、この剥離テープ10cが剥離された粘着テープ10を粘着層10bを板状部材Wの表面に対向して一対の案内ロール17・18及びテンションロール18aを介して巻取軸13に連結して構成している。
【0009】
19は圧接ロール、20はロール圧接機構、21はロール移送機構、22は剥離機構であって、この場合、上記機台3に移送台23をガイド部23aにより板状部材Wの一方端部側から他方端部側の間で移動自在に設け、機台3に移送用モータ24・25を取付け、この移送用モータ24・25の主軸にプーリ24a・25aを取付け、プーリ24a・25a間にベルト26を掛回し、移送台23にベルト26の部分を連結部27により連結し、移送用モータ24・25の回転により移送台23を板状部材Wの表面に沿った方向に往復移動自在に設け、かつ、移送台23に取付部材28をガイド部29により板状部材Wの表面に対向する方向である上下方向に上下動自在に設けると共に移送台23に圧接用モータ30を設け、圧接用モータ30に回転板31を取付け、回転板31の半径上の偏心位置に押上ロール32を取付けると共に取付部材28に係合片33を取付け、取付部材28と移送台23との間に押下用バネ34を掛架し、取付部材28に枢軸35によりアーム枠36を吊下支持し、アーム枠36に圧接ロール19を架設し、更に、案内ロール15及び案内ロール16・17により剥離機構21を構成している。
【0010】
しかして、圧接用モータ30を回転させると押上ロール32と係合片33との係合及び押下用バネ34により圧接ロール19は上昇離反及び下降圧接動作することになり、又、移送用モータ24・25の回転により圧接ロール19を板状部材Wの表面に沿って移送させるように設けて構成している。
【0011】
この実施の形態例は上記構成であるから、表面の異物を除去すべき板状部材Wを保持部材1上に保持し、テープ移送機構11により板状部材Wの表面に付着している異物を粘着除去可能な粘着テープ10を板状部材Wの表面近接位置に張架し、ロール圧接機構20により粘着テープTを板状部材Wの表面に圧接させ、圧接ロール19は粘着テープ10の粘着層10bを板状部材Wの表面に線状に圧接し、図1、図4の如く、ロール移送機構21より粘着テープ10を板状部材Wの表面に圧接した状態で圧接ロール19を板状部材の表面に沿って移送し、この移送により板状部材Wの表面に付着している異物を粘着テープ10の粘着層10bにより粘着除去することになり、粘着除去が終了後に、新たな板状部材Wを供給すると共にテープ移送機構11により新たな粘着テープ10を板状部材の表面に張架することになり、従って、粘着テープ10を板状部材Wの表面に圧接した状態で圧接ロール19を板状部材の表面に沿って移送することにより板状部材Wの表面に付着している異物を粘着テープ10の粘着層により粘着除去することができ、圧接ロール19による圧接及びこの圧接状態での移送並びに異物除去後の粘着テープの移送によって確実に異物を除去することができると共に除去作業性を向上することができる。
【0012】
この場合、上記粘着テープ10は基材テープ10a上に粘着層10bを形成してなり、この粘着層10b上に剥離テープ10cを剥離可能に仮粘着してなるから、粘着テープTの巻取及び巻出を容易に行うことができ、又、この場合、上記剥離テープ10cを剥離可能な剥離機構22を備えてなるから、剥離された剥離テープ10cの処理を容易に行うことができ、又、この場合、上記保持部材1を移動させる移動機構2を備えてなるから、板状部材1を供給取出位置Fから作業位置Tへと容易に移動することができ、一層作業性を高めることができる。
【0013】
尚、本発明は上記実施の形態例に限られるものではなく、保持部材1、移動機構2、粘着テープ10、テープ移送機構11、圧接ロール19、ロール圧接機構20、ロール移送機構21、剥離機構22の構造等は適宜変更して設計されるものである。
【0014】
【発明の効果】
本発明は上述の如く、請求項1又は2記載の発明にあっては、粘着テープを板状部材の表面に圧接した状態で圧接ロールを板状部材の表面に沿って移送することにより板状部材の表面に付着している異物を粘着テープにより粘着除去することができ、圧接ロールによる圧接及びこの圧接状態での移送並びに異物除去後の粘着テープの移送によって確実に異物を除去することができると共に除去作業性を向上することができる。
【0015】
又、請求項3記載の発明にあっては、上記粘着テープは基材テープ上に粘着層を形成してなり、この粘着層上に剥離テープを剥離可能に仮粘着してなるから、粘着テープの巻取及び巻出を容易に行うことができ、又、請求項4記載の発明にあっては、上記剥離テープを剥離可能な剥離機構を備えてなるから、剥離された剥離テープの処理を容易に行うことができ、又、請求項5記載の発明にあっては、上記保持部材を移動させる移動機構を備えてなるから、板状部材を供給取出位置から作業位置へと容易に移動することができ、一層作業性を高めることができる。
【0016】
以上、所期の目的を充分達成することができる。
【図面の簡単な説明】
【図1】本発明の実施の形態例の全体正面図である。
【図2】本発明の実施の形態例の部分側断面図である。
【図3】本発明の実施の形態例の部分平面図である。
【図4】本発明の実施の形態例の説明正面図である。
【図5】粘着テープの拡大断面図である。
【符号の説明】
W 板状部材
1 保持部材
2 移動機構
10 粘着テープ
11 テープ移送機構11
19 圧接ロール19
20 ロール圧接機構
21 ロール移送機構
22 剥離機構
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method and an apparatus for removing foreign matter attached to a plate-like member used for removing foreign matter attached to the surface of a plate-like member such as a multilayer printed wiring board, a color liquid crystal substrate, a color filter, and a copper plate. .
[0002]
[Prior art]
Removal of foreign materials such as overflowing parts and dust caused by seepage of the insulating resin layer and plating layer adhering to the surface of plate-shaped members such as this type of multilayer printed wiring board, color liquid crystal board, color filter, copper plate etc. As a means for performing this, there is known a structure in which the surface of a plate-shaped member is removed and polished with a grindstone or a polishing tape.
[0003]
[Problems to be solved by the invention]
However, in the case of the above-mentioned polishing structure, the surface is polished while removing foreign substances on the surface, and there is an inconvenience that the use of the polishing member is limited to a plate-like member that does not require the polishing of the surface.
[0004]
[Means for Solving the Problems]
An object of the present invention is to solve such a problem, and among the present invention, the invention of the method according to claim 1 uses a pressure-sensitive adhesive tape to remove foreign substances adhering to the surface of a plate-like member. Upon removal, the pressure-sensitive adhesive tape is stretched at a position close to the surface of the plate-shaped member, and the pressure-sensitive adhesive roll is pressed along the surface of the plate-shaped member while the pressure-sensitive adhesive tape is pressed against the surface of the plate-shaped member by a pressure roll. And removing the foreign matter adhering to the surface of the plate-like member by adhesion.
[0005]
Further, the invention of an apparatus according to claim 2 is a holding member capable of holding a plate-like member, an adhesive tape capable of removing foreign substances adhering to the surface of the plate-like member, and forming the adhesive tape into a plate-like shape. A tape transfer mechanism that can be stretched and transferred to a position close to the surface of the member, a pressure roller that can press the adhesive tape against the surface of the plate member, and a roll that presses the adhesive tape against the surface of the plate member A plate comprising: a pressing mechanism; and a roll transfer mechanism capable of transferring the pressing roll along the surface of the plate member in a state where the pressure-sensitive adhesive tape is pressed against the surface of the plate member. In a foreign matter removing device for a shaped member.
[0006]
According to a third aspect of the present invention, the pressure-sensitive adhesive tape is formed by forming a pressure-sensitive adhesive layer on a base tape, and a release tape is temporarily adhered on the pressure-sensitive adhesive layer so as to be peelable. The invention according to claim 4 is characterized by comprising a peeling mechanism capable of peeling the release tape, and in the invention according to claim 5, A moving mechanism for moving the holding member is provided.
[0007]
BEST MODE FOR CARRYING OUT THE INVENTION
1 to 5 show an embodiment of the present invention, wherein 1 is a holding member, 2 is a moving mechanism, and the holding member 1 holds a plate-like member W from which foreign matter is to be removed by a suction mechanism (not shown). In this case, the feed base 4 is provided on the machine base 3 so as to be movable between the working position F and the supply / extraction position T by the guide portion 5, and the holding member 1 is mounted on the feed base 4. The pulleys 6a, 7a are mounted on the main shafts of the transfer motors 6, 7, and the belt 8 is wound between the pulleys 6a, 7a. The holding members 1 on the feed table 4 are reciprocally movable by rotation of motors 6 and 7 for movement.
[0008]
Reference numeral 10 denotes an adhesive tape, and 11 denotes a tape transfer mechanism. This adhesive tape 10 is formed by forming an adhesive layer 10b on a base tape 10a, and temporarily releasing the release tape 10c on the adhesive layer 10b so as to be peelable. A pair of rising members 3a, 3a are erected on the machine base 3, and an unwinding shaft 12, a winding shaft 13, and a peeling shaft 14 are horizontally provided between the rising members 3a, 3a. 12 is connected to the main shaft of the unwinding motor 12a, the winding shaft 13 is connected to the main shaft of the winding motor 13a, and the separating shaft 14 is connected to the main shaft of the separating motor 14a. The adhesive tape 10 attached to the unwinding shaft 12 and pulled out from the winding roll is guided downward by the guide roll 15, and the peeling tape 10 c of the adhesive tape 10 passing through the guide roll 15 is connected to the peeling shaft 14 via the guide roll 16. And sticking to the outer positions on both sides of the plate-shaped member W. A pair of guide rolls 17 and 18 capable of stretching the tape 10 at a position close to the surface of the plate-like member W are opposed to each other, and the adhesive tape 10 from which the release tape 10c has been peeled is used as the adhesive layer 10b. And is connected to the winding shaft 13 via a pair of guide rolls 17 and 18 and a tension roll 18a.
[0009]
Reference numeral 19 denotes a pressing roll, reference numeral 20 denotes a roll pressing mechanism, reference numeral 21 denotes a roll transfer mechanism, reference numeral 22 denotes a peeling mechanism. The transfer motors 24 and 25 are mounted on the machine base 3, and the pulleys 24a and 25a are mounted on the main shafts of the transfer motors 24 and 25, and a belt is provided between the pulleys 24a and 25a. 26, the portion of the belt 26 is connected to the transfer table 23 by the connecting portion 27, and the transfer table 23 is provided so as to be reciprocally movable in the direction along the surface of the plate member W by the rotation of the transfer motors 24 and 25. The mounting member 28 is provided on the transfer table 23 so as to be vertically movable in a vertical direction which is a direction facing the surface of the plate member W by the guide portion 29, and the pressing table motor 30 is provided on the transfer table 23. 3 , A push-up roll 32 is mounted at an eccentric position on the radius of the rotary plate 31, and an engaging piece 33 is mounted on the mounting member 28, and a pressing spring 34 is provided between the mounting member 28 and the transfer table 23. The arm frame 36 is suspended and supported on the mounting member 28 by the pivot 35, the pressure roller 19 is laid on the arm frame 36, and the peeling mechanism 21 is constituted by the guide roll 15 and the guide rolls 16 and 17. I have.
[0010]
When the press-contact motor 30 is rotated, the press-contact roll 19 is moved up and away and pressed down by the engagement of the push-up roll 32 with the engagement piece 33 and the press-down spring 34. -The pressure contact roll 19 is provided so as to be transferred along the surface of the plate member W by the rotation of 25.
[0011]
Since this embodiment has the above-described configuration, the plate-like member W from which foreign matter on the surface is to be removed is held on the holding member 1, and the foreign matter adhering to the surface of the plate-like member W by the tape transfer mechanism 11 is removed. The adhesive tape 10 from which the adhesive can be removed is stretched at a position close to the surface of the plate member W, and the adhesive tape T is pressed against the surface of the plate member W by a roll pressing mechanism 20. 1 and 4, the pressure roller 19 is pressed against the surface of the plate member W in a state where the adhesive tape 10 is pressed against the surface of the plate member W by the roll transfer mechanism 21 as shown in FIGS. The foreign material adhering to the surface of the plate-like member W is removed by the adhesive layer 10b of the adhesive tape 10 by this transfer. After the removal of the adhesive, a new plate-like member is transferred. Supply W and transfer tape A new pressure-sensitive adhesive tape 10 is stretched on the surface of the plate-like member by the structure 11, and therefore, with the pressure-sensitive adhesive tape 10 pressed against the surface of the plate-like member W, the pressing roll 19 is moved along the surface of the plate-like member. The foreign matter adhering to the surface of the plate-like member W can be removed by the adhesive layer of the adhesive tape 10 by being transferred by the pressure contact roll 19 and pressed by the pressing roll 19 and transferred in this pressed state, and the adhesive after the foreign substance is removed. By transporting the tape, the foreign matter can be reliably removed, and the removal workability can be improved.
[0012]
In this case, the pressure-sensitive adhesive tape 10 is formed by forming a pressure-sensitive adhesive layer 10b on a base tape 10a, and the release tape 10c is temporarily adhered on the pressure-sensitive adhesive layer 10b so as to be peelable. Unwinding can be easily performed, and in this case, since the peeling tape 10c is provided with the peeling mechanism 22 capable of peeling, the peeled tape 10c can be easily processed. In this case, since the moving mechanism 2 for moving the holding member 1 is provided, the plate-shaped member 1 can be easily moved from the supply / extraction position F to the work position T, and the workability can be further improved. .
[0013]
Note that the present invention is not limited to the above embodiment, and the holding member 1, the moving mechanism 2, the adhesive tape 10, the tape transfer mechanism 11, the press roll 19, the roll press mechanism 20, the roll transfer mechanism 21, the peeling mechanism, and the like. The structure and the like of 22 are appropriately changed and designed.
[0014]
【The invention's effect】
As described above, in the invention according to claim 1 or 2, the pressure-sensitive adhesive tape is pressed against the surface of the plate-shaped member, and the pressing roll is transferred along the surface of the plate-shaped member. Foreign matter adhering to the surface of the member can be removed by adhesion with an adhesive tape, and the foreign matter can be reliably removed by pressing with a pressure roll, transferring in this pressed state, and transferring the adhesive tape after removing the foreign matter. In addition, the removal workability can be improved.
[0015]
In the invention according to claim 3, the pressure-sensitive adhesive tape is formed by forming a pressure-sensitive adhesive layer on a base tape, and the release tape is temporarily adhered on the pressure-sensitive adhesive layer so as to be peelable. Can be easily wound and unwound, and the invention according to claim 4 is provided with a peeling mechanism capable of peeling the peeling tape. According to the fifth aspect of the present invention, since a moving mechanism for moving the holding member is provided, the plate member is easily moved from the supply / extraction position to the working position. Operability can be further improved.
[0016]
As described above, the intended purpose can be sufficiently achieved.
[Brief description of the drawings]
FIG. 1 is an overall front view of an embodiment of the present invention.
FIG. 2 is a partial side sectional view of an embodiment of the present invention.
FIG. 3 is a partial plan view of the embodiment of the present invention.
FIG. 4 is an explanatory front view of the embodiment of the present invention.
FIG. 5 is an enlarged sectional view of an adhesive tape.
[Explanation of symbols]
W plate-like member 1 holding member 2 moving mechanism 10 adhesive tape 11 tape transferring mechanism 11
19 Pressure roll 19
Reference Signs List 20 roll press mechanism 21 roll transfer mechanism 22 peeling mechanism

Claims (5)

板状部材の表面に付着している異物を粘着テープにより粘着除去するに際し、上記粘着テープを板状部材の表面近接位置に張架し、該粘着テープを圧接ロールにより該板状部材の表面に圧接した状態で該圧接ロールを該板状部材の表面に沿って移送させて該板状部材の表面に付着している異物を粘着除去することを特徴とする板状部材異物除去方法。In removing foreign substances adhering to the surface of the plate-like member with an adhesive tape, the adhesive tape is stretched at a position close to the surface of the plate-like member, and the adhesive tape is applied to the surface of the plate-like member by a pressure roller. A method for removing foreign matter from a plate-like member, comprising transferring the pressure-contact roll along the surface of the plate-like member in a state of being pressed against the surface to remove foreign matter adhering to the surface of the plate-like member. 板状部材を保持可能な保持部材と、該板状部材の表面に付着している異物を粘着除去可能な粘着テープと、該粘着テープを板状部材の表面近接位置に張架して移送可能なテープ移送機構と、該粘着テープを該板状部材の表面に圧接可能な圧接ロールと、該粘着テープを該板状部材の表面に圧接させるロール圧接機構と、該粘着テープを該板状部材の表面に圧接した状態で該圧接ロールを該板状部材の表面に沿って移送可能なロール移送機構とを具備してなることを特徴とする板状部材異物除去装置。A holding member capable of holding the plate-shaped member, an adhesive tape capable of removing foreign substances adhering to the surface of the plate-shaped member, and the adhesive tape stretched to a position close to the surface of the plate-shaped member and can be transferred. A tape transfer mechanism, a pressing roll capable of pressing the adhesive tape against the surface of the plate member, a roll pressing mechanism for pressing the adhesive tape against the surface of the plate member, and And a roll transfer mechanism capable of transferring the press roll along the surface of the plate member in a state of being pressed against the surface of the plate member. 上記粘着テープは基材テープ上に粘着層を形成してなり、該粘着層上に剥離テープを剥離可能に仮粘着してなることを特徴とする請求項2記載の板状部材異物除去装置。3. The apparatus according to claim 2, wherein the pressure-sensitive adhesive tape is formed by forming a pressure-sensitive adhesive layer on a base tape, and the release tape is temporarily adhered to the pressure-sensitive adhesive layer so as to be peelable. 上記剥離テープを剥離可能な剥離機構を備えてなることを特徴とする請求項2又は3記載の板状部材異物除去装置。4. The apparatus according to claim 2, further comprising a peeling mechanism capable of peeling the peeling tape. 上記保持部材を移動させる移動機構を備えてなることを特徴とする請求項2〜4のいずれか1項に記載の板状部材異物除去装置。The plate-shaped member foreign matter removing device according to any one of claims 2 to 4, further comprising a moving mechanism that moves the holding member.
JP2003036015A 2003-02-14 2003-02-14 Plate-like member foreign matter elimination method and its apparatus Pending JP2004243227A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006068706A (en) * 2004-09-06 2006-03-16 Nihon Micro Coating Co Ltd Panel cleaning device and method
JP2015531890A (en) * 2012-08-31 2015-11-05 エーエスエムエル ネザーランズ ビー.ブイ. Reticle cleaning using sticky surfaces
CN106423924A (en) * 2016-10-24 2017-02-22 广东楚天龙智能卡有限公司 Intelligent card chip module cleaning device
JP2017216265A (en) * 2016-05-30 2017-12-07 リンテック株式会社 Device and method for sticking sheet
CN111375604A (en) * 2018-12-27 2020-07-07 美光科技公司 Foreign matter cleaning system for compression molding

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006068706A (en) * 2004-09-06 2006-03-16 Nihon Micro Coating Co Ltd Panel cleaning device and method
JP2015531890A (en) * 2012-08-31 2015-11-05 エーエスエムエル ネザーランズ ビー.ブイ. Reticle cleaning using sticky surfaces
JP2017216265A (en) * 2016-05-30 2017-12-07 リンテック株式会社 Device and method for sticking sheet
CN106423924A (en) * 2016-10-24 2017-02-22 广东楚天龙智能卡有限公司 Intelligent card chip module cleaning device
CN111375604A (en) * 2018-12-27 2020-07-07 美光科技公司 Foreign matter cleaning system for compression molding
CN111375604B (en) * 2018-12-27 2022-08-05 美光科技公司 Foreign matter cleaning system for compression molding

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