JP2004222447A - Countermeasure unit for instantaneous service interruption and instantaneous voltage drop - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a countermeasure unit for an instantaneous service interruption and an instantaneous voltage drop reduced in size and cost and quick to respond to the instantaneous service interruption of a power supply voltage and the instantaneous voltage drop. <P>SOLUTION: The countermeasure unit for the instantaneous service interruption and the instantaneous voltage drop consists of: a rectifier of which the input side is connected to an AC power supply, of which the output side is connected to a drive circuit that drives a motor and which converts AC power from the AC power supply to DC power and feeds the DC power to the drive circuit; and a capacitor unit that is connected between the rectifier and the drive circuit. The countermeasure unit normally keeps the capacitor unit charged, and when the power is instantaneously interrupted or the voltage is instantaneously dropped, the countermeasure unit continues the drive of a device by power discharged from the capacitor unit. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an instantaneous power failure and instantaneous voltage drop countermeasure unit that supplies power to a motor when a momentary power failure or a momentary voltage drop occurs in a commercial power supply.
[0002]
[Prior art]
Since various devices are operated by the electric power supplied from the commercial power supply, the supply of the commercial power supply stops instantaneously (light interruption) due to lightning strikes, etc., or the instantaneous interruption does not occur, but the voltage drops momentarily If (the instantaneous voltage drop), the supply of power to the device stops or becomes insufficient, so that the operation of the device stops or the desired operation stops.
[0003]
Therefore, as a countermeasure against a momentary power failure or instantaneous voltage drop of the commercial power supply, for example, an instantaneous power failure / instantaneous voltage drop countermeasure unit 40 as shown in FIG. 3 is used. The instantaneous stop / instantaneous voltage drop countermeasure unit 40 is based on a so-called battery backup system, and an AC signal supplied from a commercial AC power supply 41 is branched into a first path 42 and a second path 43, The first path 42 is a path through which an AC signal supplied from the AC power supply 41 passes, and the second path 43 is a state in which the battery 45 is charged by the charging circuit 44 in preparation for an instantaneous stop or the like, and This is a path having a function of discharging the power stored in the battery 45 at times.
[0004]
In the second path 43, the output side of the battery 45 is connected to the DC / AC conversion circuit 46, and the output side of the DC / AC conversion circuit 46 is connected between the switching circuit 47 and the rectifier 48. .
[0005]
Normally, an AC signal flowing through the first path 42 is converted into a DC signal by the rectifier 48 and supplied to the drive circuit 49. However, when an instantaneous stop or the like occurs, switching from the switching circuit 47 of the first path 42 is performed. The DC / AC conversion circuit 46 discharges the electric power stored in the battery 45 by the signal, converts the electric power into an AC signal, supplies the AC signal to the rectifier 48, converts the DC power into a direct current in the rectifier 48, and supplies the DC power to the drive circuit 49. The driving circuit 49 is operated by the electric power stored in the driving target 50 to drive the driving target 50. An instantaneous stop / instantaneous voltage drop countermeasure unit having a function similar to this is disclosed in, for example, Patent Document 1.
[0006]
[Patent Document 1]
JP-A-8-251837 (page 5, FIG. 1)
[0007]
[Problems to be solved by the invention]
However, the conventional instantaneous power failure and instantaneous voltage drop countermeasures unit has a complicated circuit configuration, and thus has a slow response to an instantaneous power failure and cannot respond sufficiently to an instantaneous power failure. There is a problem that it cannot be incorporated in the device and cannot cope with space saving.
[0008]
In addition, there is also a problem that the unit is expensive and uneconomical in spite of the fact that it is desirable to be economical because it is necessary as a countermeasure against an instantaneous blackout.
[0009]
Therefore, the instantaneous power failure and instantaneous voltage drop countermeasures unit has a problem in that the response to an instantaneous power failure and the like is quickened to ensure thorough countermeasures, and the unit is reduced in size to save space and to be more inexpensive. Have.
[0010]
[Means for Solving the Problems]
As a specific means for solving the above problems, the present invention is an instantaneous power stop / instantaneous voltage drop countermeasure unit for preventing a motor from stopping or a change in the number of revolutions due to an instantaneous power stop or an instantaneous voltage drop. A rectifier that is connected to a power supply and has an output side connected to a drive circuit that drives the motor, converts an AC voltage from an AC power supply to a DC voltage, and supplies the DC voltage to the drive circuit, and is connected between the rectifier and the drive circuit. Provided is a unit for preventing instantaneous power failure and instantaneous voltage drop, which comprises a capacitor unit.
Offer.
[0011]
An additional requirement is that the instantaneous stop / instantaneous voltage drop countermeasure unit can store electric power for driving the motor for 0.5 to 1 second.
[0012]
According to the instantaneous stop / instantaneous voltage drop countermeasure unit configured as described above, since the circuit configuration is simple, the response to the instantaneous stop and the like is fast, and the motor is prevented from being stopped or the rotation speed is fluctuated. And the size of the unit can be reduced.
[0013]
Further, the number of parts is small and the configuration is simplified, so that the cost can be reduced.
[0014]
BEST MODE FOR CARRYING OUT THE INVENTION
An example of an embodiment of the present invention will be described with reference to FIGS. The instantaneous stop / instantaneous voltage drop countermeasure unit 10 shown in FIG. 1 includes a rectifier 11 that converts an AC voltage into a DC voltage, and a large-capacity capacitor unit 12.
[0015]
The input side of the rectifier 11 is connected to a commercial AC power supply 13, and the output side is connected to the input side of the drive circuit 14. Further, the output side of the drive circuit 14 is connected to the motor 15. Further, a capacitor unit 12 is connected between the rectifier 11 and the drive circuit 14.
[0016]
Normally, an AC voltage is supplied from the AC power supply 13 to the rectifier 11, and the rectifier 11 converts the AC voltage into a DC voltage. Then, the DC voltage is supplied to a drive circuit 14 connected to the output side of the rectifier 11.
[0017]
The drive circuit 14 generates a signal for driving the motor 15 from the DC voltage supplied from the rectifier 11 and supplies the signal to the motor 15.
[0018]
Further, while the AC voltage is being supplied from the AC power supply 13 to the rectifier 11, the DC signal output from the rectifier 11 is supplied to the capacitor unit 12, and the capacitor unit 12 is charged. The capacitor unit 12 is configured such that, for example, capacitor elements are connected in parallel and have a large capacity as a whole.
[0019]
When the supply of the AC voltage from the AC power supply 13 is momentarily stopped or the voltage is momentarily dropped due to a lightning strike or the like, the output of the DC voltage from the rectifier 11 is stopped or the voltage value decreases, and the driving circuit 14 Since the potential on the input side decreases, the charge stored in the capacitor unit 12 is immediately discharged, and a DC voltage is supplied to the drive circuit 14.
[0020]
Therefore, even if the supply of the AC voltage from the AC power supply 13 is stopped and the predetermined DC voltage is not supplied from the rectifier 11 to the drive circuit 14, the supply of the DC voltage to the drive circuit 14 may be interrupted. Absent. In addition, since the circuit configuration is simple, the response to an instantaneous stop or the like is fast. Therefore, it is possible to prevent the motor from being stopped or the rotational speed from being deviated, and to reduce the size of the unit and save space.
[0021]
Furthermore, since the number of parts is small and the configuration is simple, the cost can be reduced and the economy can be improved.
[0022]
Since the stop of the supply of the AC voltage due to a lightning strike or the like is instantaneous, the capacitor unit 12 should store at least enough power to drive the motor 15 for about 0.5 to 1 second. Thus, it is considered that the operation of the motor 15 will not be hindered. For this purpose, the electric charge stored in the capacitor unit 12 is individually obtained according to the motor to be driven and its driving circuit.
[0023]
Next, a cutting device 20 shown in FIG. 2 will be described as an example of a device driven by the instantaneous power failure / instantaneous voltage drop countermeasure unit 10 shown in FIG. The cutting device 20 is a device for cutting a plate-like object, and includes a first motor 21, a second motor 22, a third motor 23, a fourth motor 24, and a fifth motor 25, These are provided by a first drive circuit 21a, a second drive circuit 22a, a third drive circuit 23a, a fourth drive circuit 24a, and a fifth drive circuit 25a connected to the instantaneous stop / instantaneous voltage drop countermeasure unit 10. Driven. In the illustrated example, all the drive circuits are connected to one instantaneous stop / instantaneous voltage drop countermeasure unit 10. However, separate instantaneous stop / instantaneous voltage drop countermeasure units are connected to the individual drive circuits. You may. Each drive circuit has a configuration according to the type of motor and the like, and includes, for example, an inverter circuit and the like.
[0024]
In the cutting device 20, a plate-like object to be cut is held on a chuck table 26. The chuck table 26 is connected to a first motor 21 driven by a first drive circuit 21a and is rotatable. The first motor 21 is fixed to a first base 27, and the lower part of the first base 27 is slidable on a pair of first rails 28 arranged in the X-axis direction. Is engaged.
[0025]
Inside the first rail 28, a first ball screw 29 is disposed in parallel with the first rail 28, and the first ball screw 29 is driven by a second driving circuit 22a. The motor 22 is connected, and is driven by the second motor 22 to rotate the first ball screw 29. Further, a nut (not shown) inside the first base 27 is screwed into the first ball screw 29, and the first base 27 is rotated with the rotation of the first ball screw 29. It is configured to move in the X-axis direction.
[0026]
A cutting blade 30 for cutting a plate-like object by high-speed rotation is mounted on a tip of a spindle 32 rotatably supported by a spindle housing 31, and the spindle 32 is driven by a third drive circuit 23a. It is connected to the third motor 23, and is configured to rotate by being driven by the third motor 23.
[0027]
The spindle housing 31 is supported by an elevating section 33, which is slidably engaged with a second rail 35 provided on the wall section 34 in the Z-axis direction. Further, a nut (not shown) inside the elevating unit 33 is screwed to a second ball screw (not shown) provided in the wall portion 34 in parallel with the second rail 35. Two ball screws are connected to a fourth motor 24 driven by a fourth drive circuit 24a. Accordingly, the elevating unit 33 moves up and down as the second ball screw moves up and down by being driven by the fourth motor 24.
[0028]
An alignment means 36 having an image pickup means 36a for picking up an image of the plate-like object is fixed to a side portion of the spindle housing 31, so that an area of the plate-like object to be cut can be detected. The imaging unit 36a has the same Y coordinate as the cutting blade 30. When the imaging unit 36a moves in the Y-axis direction and detects a region to be cut, the position of the cutting blade 30 in the Y-axis direction is automatically aligned. Is done.
[0029]
The second base 37 having the wall 34 standing upright from the end has its lower part slidably engaged with a pair of third rails 38 arranged in the Y-axis direction. A third ball screw 39 is disposed inside the rail 38 in parallel with the third rail. The third ball screw 39 is connected to a fifth motor 25 driven by a fifth drive circuit, and is configured to rotate by being driven by the fifth motor 25.
[0030]
A nut (not shown) inside the second base 37 is screwed to the third ball screw 39, and the second base 37 is moved along the Y-axis with the rotation of the third ball screw 39. It is configured to move in the direction.
[0031]
When cutting a plate-like object, for example, a semiconductor wafer, the semiconductor wafer is held on the chuck table 26, the chuck table 26 is moved in the + X direction by driving the second motor 22, and the fifth motor 25 is driven by driving the fifth motor 25. While moving the imaging means 36a in the Y-axis direction, the surface of the semiconductor wafer is imaged to detect the street to be cut, and the Y-axis direction alignment with the cutting blade 30 is performed.
[0032]
After the alignment is performed in this manner, the chuck table 26 is further moved in the + X direction by driving the second motor 22, and the cutting blade 30 is rotated at high speed by driving the third motor 23. When the cutting blade 30 is lowered by driving the fourth motor 24, the cutting blade 30 that rotates at a high speed cuts into the detected street of the semiconductor wafer, and cuts a desired position of the plate-like object.
[0033]
When the chuck table 26 is reciprocated by the driving of the second motor 22 and the cutting is sequentially performed as described above while indexing and feeding the cutting blade 30 in the Y-axis direction by the driving of the fifth motor 25, All streets in the same direction are cut.
[0034]
Further, when the chuck table 26 is rotated by 90 degrees by driving the first motor 21 and the same cutting as described above is performed, all the streets of the semiconductor wafer are cut vertically and horizontally and divided into individual semiconductor chips.
[0035]
As described above, in order to perform precise cutting, it is necessary that all motors operate with high accuracy without stopping, and for that, the voltage supplied to each drive circuit must be stable Is essential. If the supply of the voltage is stopped or the voltage is reduced even for a moment due to a lightning strike or the like, the chuck table 26, the cutting blade 30 or the like stops, the rotation speed fluctuates, the position shifts, and the like. It may damage the object or cause the quality to deteriorate.
[0036]
However, each drive circuit is connected to the instantaneous power failure / instantaneous voltage drop countermeasure unit 10 and is always supplied with a stable voltage. Cutting can be continued.
[0037]
In the above example, the case where the instantaneous stop / instantaneous voltage drop countermeasure unit is used by being connected to the cutting device has been described, but the present invention can also be used in other devices.
[0038]
【The invention's effect】
As described above, the instantaneous power failure and instantaneous voltage drop countermeasure unit according to the present invention has a simpler circuit configuration than the conventional instantaneous power failure and instantaneous voltage drop countermeasure unit. In addition, it is possible to prevent a fluctuation in the rotation speed or the number of rotations, to secure a precise operation, and to reduce the size of the unit to save space.
[0039]
Furthermore, since the number of parts is small and the configuration is simplified, the cost can be reduced and the economy can be improved.
[Brief description of the drawings]
FIG. 1 is a block diagram showing a configuration of a unit for preventing instantaneous interruption and instantaneous voltage drop according to the present invention.
FIG. 2 is a perspective view showing the instantaneous stop / instantaneous voltage drop countermeasure unit and the cutting device.
FIG. 3 is a block diagram showing a conventional instantaneous stop / instantaneous voltage drop countermeasure unit.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 ... Instantaneous stop / instantaneous voltage drop countermeasure unit 11 ... Rectifier 12 ... Capacitor unit 13 ... AC power supply 14 ... Drive circuit 15 ... Motor 20 ... Cutting device 21 ... First motor 22 ... Second motor 23 ... Third motor 24 fourth motor 25 fifth motor 21a first drive circuit 22a second drive circuit 23a third drive circuit 24a fourth drive circuit 25a fifth drive circuit 26 chuck Table 27 First base 28 First rail 29 First ball screw 30 Cutting blade 31 Spindle housing 32 Spindle 33 Lifting section 34 Wall 35 Second rail 36 Alignment means 36a ... Imaging means 37 ... Second base 38 ... Third rail 39 ... Third ball screw

Claims (2)

An instantaneous power failure or instantaneous voltage drop countermeasure unit that prevents motor stoppage or rotation speed fluctuation due to power supply instantaneous power failure or instantaneous voltage drop,
A rectifier having an input side connected to an AC power supply and an output side connected to a drive circuit for driving the motor, converting an AC voltage from the AC power supply into a DC voltage, and supplying the DC voltage to the drive circuit;
An instantaneous blackout / instantaneous voltage drop countermeasure unit comprising a capacitor unit connected between the rectifier and the drive circuit. 2. The unit according to claim 1, wherein the capacitor unit is capable of storing electric power capable of driving the motor for 0.5 to 1 second.

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