JP2004218644A - 流体の相変化によって駆動されるマイクロポンプ - Google Patents

流体の相変化によって駆動されるマイクロポンプ Download PDF

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Publication number
JP2004218644A
JP2004218644A JP2004008463A JP2004008463A JP2004218644A JP 2004218644 A JP2004218644 A JP 2004218644A JP 2004008463 A JP2004008463 A JP 2004008463A JP 2004008463 A JP2004008463 A JP 2004008463A JP 2004218644 A JP2004218644 A JP 2004218644A
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JP
Japan
Prior art keywords
fluid
pumping chamber
passage
heating element
pumping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2004008463A
Other languages
English (en)
Japanese (ja)
Inventor
You-Seop Lee
有燮 李
Yong-Soo Oh
龍洙 呉
Keon Kuk
健 鞠
Min-Soo Kim
▲ミン▼秀 金
Seung-Ju Shin
承柱 辛
Su-Ho Shin
首鎬 申
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of JP2004218644A publication Critical patent/JP2004218644A/ja
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/20—Other positive-displacement pumps
    • F04B19/24—Pumping by heat expansion of pumped fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0027—Special features without valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/08—Cooling; Heating; Preventing freezing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1077—Flow resistance valves, e.g. without moving parts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/11—Kind or type liquid, i.e. incompressible
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Micromachines (AREA)
  • Jet Pumps And Other Pumps (AREA)
JP2004008463A 2003-01-15 2004-01-15 流体の相変化によって駆動されるマイクロポンプ Withdrawn JP2004218644A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2003-0002727A KR100499141B1 (ko) 2003-01-15 2003-01-15 유체의 상변화에 의해 구동되는 마이크로 펌프

Publications (1)

Publication Number Publication Date
JP2004218644A true JP2004218644A (ja) 2004-08-05

Family

ID=32588958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004008463A Withdrawn JP2004218644A (ja) 2003-01-15 2004-01-15 流体の相変化によって駆動されるマイクロポンプ

Country Status (5)

Country Link
US (1) US20040146409A1 (fr)
EP (1) EP1439307B1 (fr)
JP (1) JP2004218644A (fr)
KR (1) KR100499141B1 (fr)
DE (1) DE602004005506T2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023223556A1 (fr) * 2022-05-20 2023-11-23 三菱電機株式会社 Dispositif de génération d'écoulement de liquide

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JP2006245990A (ja) * 2005-03-03 2006-09-14 Matsushita Electric Ind Co Ltd 弾性表面波素子及びその製造方法
WO2006121534A1 (fr) * 2005-05-09 2006-11-16 University Of Oregon Pompes non mecaniques activees thermiquement au moyen de canaux a cliquet
US20100239436A1 (en) * 2005-05-17 2010-09-23 Honeywell International Inc. A thermal pump
WO2007013287A1 (fr) * 2005-07-27 2007-02-01 Kyushu Institute Of Technology Micropompe sans soupape
KR100707211B1 (ko) * 2006-02-03 2007-04-13 삼성전자주식회사 합성 제트 액츄에이터
WO2008150210A1 (fr) * 2007-06-07 2008-12-11 Ge Healthcare Bio-Sciences Ab Micropompe
CN101975153B (zh) * 2010-10-12 2012-07-04 江苏大学 椭圆组合管无阀压电泵
CN101975154B (zh) * 2010-10-12 2012-07-04 江苏大学 对数螺旋组合管无阀压电泵
DE102011115622A1 (de) * 2010-12-20 2012-06-21 Technische Universität Ilmenau Mikropumpe sowie Vorrichtung und Verfahren zur Erzeugung einer Fluidströmung
KR101343384B1 (ko) 2012-11-29 2013-12-20 한국과학기술연구원 푸리에 코사인 급수법과 유체의 수두차 원리를 응용한 파동함수형 미세 맥동류 발생 장치 및 방법
CN103016287B (zh) * 2012-12-31 2015-05-13 北京工业大学 感应加热相变式微喷驱动器
CN103967740B (zh) * 2014-04-12 2016-05-18 北京工业大学 感应加热的汽泡驱动微泵
CN107075431B (zh) 2014-08-15 2020-08-07 惠普发展公司，有限责任合伙企业 微流体阀
US10208739B2 (en) * 2016-01-05 2019-02-19 Funai Electric Co., Ltd. Microfluidic pump with thermal control
CN107605713A (zh) * 2017-10-26 2018-01-19 电子科技大学 一种大流量的无阀微泵
CN109139406B (zh) * 2018-07-13 2019-10-01 江苏大学 一种基于微流控技术的热驱动微泵实验装置与方法
CN109139433B (zh) * 2018-08-17 2019-09-03 北京理工大学 可利用连续热源的气泡驱动无阀微泵

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SE400841B (sv) * 1976-02-05 1978-04-10 Hertz Carl H Sett att alstra en vetskestrale samt anordning for genomforande av settet
JPH0718408B2 (ja) * 1986-06-23 1995-03-06 謙治 岡安 熱駆動ポンプ
DE4422743A1 (de) * 1994-06-29 1996-01-04 Torsten Gerlach Mikropumpe
TW344713B (en) * 1995-01-13 1998-11-11 Canon Kk Liquid ejecting head, liquid ejecting device and liquid ejecting method
US5751317A (en) * 1996-04-15 1998-05-12 Xerox Corporation Thermal ink-jet printhead with an optimized fluid flow channel in each ejector
US6062678A (en) * 1996-06-26 2000-05-16 Canon Kabushiki Kaisha Ink-jet recording head with a particular arrangement of thermoelectric transducers and discharge openings
US5901037A (en) * 1997-06-18 1999-05-04 Northrop Grumman Corporation Closed loop liquid cooling for semiconductor RF amplifier modules
US6062681A (en) * 1998-07-14 2000-05-16 Hewlett-Packard Company Bubble valve and bubble valve-based pressure regulator
JP4268261B2 (ja) * 1999-05-12 2009-05-27 大日本印刷株式会社 化粧材およびその製造方法
US6402302B1 (en) * 1999-06-04 2002-06-11 Canon Kabushiki Kaisha Liquid discharge head, manufacturing method thereof, and microelectromechanical device
JP4095368B2 (ja) * 2001-08-10 2008-06-04 キヤノン株式会社 インクジェット記録ヘッドの作成方法
US6655924B2 (en) * 2001-11-07 2003-12-02 Intel Corporation Peristaltic bubble pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023223556A1 (fr) * 2022-05-20 2023-11-23 三菱電機株式会社 Dispositif de génération d'écoulement de liquide
JP7459388B1 (ja) 2022-05-20 2024-04-01 三菱電機株式会社 液流発生装置

Also Published As

Publication number Publication date
KR100499141B1 (ko) 2005-07-04
EP1439307A1 (fr) 2004-07-21
KR20040065647A (ko) 2004-07-23
DE602004005506D1 (de) 2007-05-10
EP1439307B1 (fr) 2007-03-28
US20040146409A1 (en) 2004-07-29
DE602004005506T2 (de) 2008-01-24

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