WO2006121534A1 - Pompes non mecaniques activees thermiquement au moyen de canaux a cliquet - Google Patents

Pompes non mecaniques activees thermiquement au moyen de canaux a cliquet Download PDF

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Publication number
WO2006121534A1
WO2006121534A1 PCT/US2006/012395 US2006012395W WO2006121534A1 WO 2006121534 A1 WO2006121534 A1 WO 2006121534A1 US 2006012395 W US2006012395 W US 2006012395W WO 2006121534 A1 WO2006121534 A1 WO 2006121534A1
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WIPO (PCT)
Prior art keywords
channel
ratcheted
segment
fluid
heat
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Application number
PCT/US2006/012395
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English (en)
Inventor
Heiner Linke
Original Assignee
University Of Oregon
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Publication date
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Publication of WO2006121534A1 publication Critical patent/WO2006121534A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/20—Other positive-displacement pumps
    • F04B19/24—Pumping by heat expansion of pumped fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1077—Flow resistance valves, e.g. without moving parts

Definitions

  • the present invention relates generally to devices and techniques for pumping fluids. More specifically, it relates to non-mechanical pumps powered by a source of thermal non-equilibrium.
  • Non-mechanical pumps induce fluid transport without mechanical movements.
  • Non-mechanical micropumps just to give one particularly relevant example, are useful in miniature thermal management systems for cooling microelectronics, chemical microreactors, and lab-on-a-chip devices.
  • Non-mechanical pumps operate by directly converting some form of non-mechanical energy (e.g., electric, magnetic, thermal, chemical, or surface tension forces) into kinetic energy of the fluid.
  • non-mechanical pumps examples include capillary pumps which are based on the capillary effect, electrokinetic pumps which use electric fields to pump fluids, magnetohydrodynamic pumps which use a combination of electric and magnetic fields to propel a fluid, and thermally-driven pumps which use thermal energy to drive fluid movement.
  • many non-mechanical pumps that involve thermal energy are not actually powered by thermal energy but are driven by a precisely controlled electrical energy source.
  • US Pat. No. 6,071,081 discloses a pump that uses an electrically powered laser to deliver pulses of localized thermal energy to a liquid. The thermal energy vaporizes a portion of the liquid to create a vapor bubble in a reservoir, and an associated pulse of pressure pushes the fluid out of the reservoir through a check valve.
  • US Pat. No. 6,130,098 discloses a technique for propelling microdroplets through channels by differentially heating the channels with an array of electrically controlled heating elements. The resulting temperature gradient along the length of the channel produces a difference in the surface tension that causes the droplet to move. Because these pumps only indirectly involve thermal energy and are fundamentally powered by an electrical source, they are quite different from thermally-driven pumps whose fundamental source of power is thermal.
  • Brownian motors or thermal ratchets, are a type of particle transport based on the ratchet effect. It is well known that Brownian motion (i.e., random particle motion due to thermal fluctuations) does not normally result in any net movement of particles. It is possible, however, for the particles to experience a net directed movement if the particles experience a spatially asymmetric energy potential (i.e., a "ratchet") and a displacement from thermal equilibrium (e.g., by pulsing the potential on and off, or by cycling the temperature up and down).
  • This non-mechanical, thermally-driven technique for particle transport acts upon individual microscopic particles. It is not suitable for pumping entire fluid streams or drops.
  • thermally powered non-mechanical pump that is simple, inexpensive, does not require any electrical control or electrical power source, is not limited to propelling drops across a level surface, and can operate relatively independent of gravitational orientation.
  • the present invention provides a simple and elegant technique for thermally-powered non-mechanical fluid transport through a channel.
  • the pump automatically and non-mechanically induces flow of a working fluid through the channel when the temperature of the channel exceeds a desired pump activation temperature, creating a temperature gradient between the channel and the working fluid.
  • most of the working fluid is in liquid phase at a temperature below that of the channel.
  • a non-mechanical pump realizing this technique includes a channel through which the working fluid may flow in liquid phase.
  • the channel may be, for example, an open groove in a material, or an enclosed tunnel or pipe.
  • the diameter of the channel may be in the range from several centimeters down to several micrometers.
  • a pumping segment of the channel at least one surface of the channel is ratcheted, i.e., shaped to have a longitudinally asymmetric topography (e.g., a periodic sawtooth surface profile).
  • the ratchet pattern is preferably periodic in the longitudinal direction with period in the range from several centimeters down to several micrometers.
  • the pump is characterized in that the frictional force of the working fluid as it flows through the pumping segment of the channel (i.e., the drag) is extremely small at the pump activation temperature. In one embodiment, the drag is made small by virtue of film boiling of the working fluid at the pump activation temperature.
  • the channel includes vents (e.g., pores, slits, holes, or other openings) through which a vapor phase of the fluid may pass.
  • vents e.g., pores, slits, holes, or other openings
  • these variations may also include a supplementary channel through which the vapor phase may flow.
  • the drag is made small by virtue of a superhydrophobic or analogous surface property of the channel surface in the pumping section. Such a property may be created, for example, by small topographic surface modifications at the micrometer-scale or smaller that significantly reduce the contact between the surface and the liquid.
  • a thermally-driven heat exchanger may be formed by fabricating a closed- cycle channel with hot and cold portions.
  • the ratcheted pumping segment is placed at the hot portion of the cycle and a heat sink is placed in thermal contact with the cold portion of the cycle.
  • the cold portion of the channel may be fabricated in a thermally conductive material that conducts heat from the surface of the channel to the heat sink.
  • the pump activates and fluid begins to flow through the channel, carrying heat from the hot end to the cold end.
  • This heat exchanger has the virtues that it is powered by the very energy that one wants to dissipate and is automatically activated and deactivated as necessary.
  • This type of heat exchanger may be of particular value in various small-scale applications such as cooling electronic circuits and chemical microreactors.
  • Another possible application of the pumping technique is to use the pump as an agitator for mixing microfiuids. After two microfluid streams are combined in a common channel, the fluid mixture is agitated as it propagates through a ratcheted pumping segment.
  • FIG. 1 is a sequence of nine side-view cross-sectional diagrams illustrating the observed motion of a film-boiling droplet on top of a level ratcheted surface.
  • FIG. 2 is a side or top cross-sectional view showing a droplet and a slug being pumped by a ratcheted channel according to an embodiment of the invention.
  • FIGS. 3A-J are side or top cross-sectional views showing variations of ratcheted channel designs according to several embodiments of the invention.
  • FIGS. 4A-B are side or top cross-sectional views showing variations of ratcheted channel designs according to several embodiments of the invention.
  • FIGS. 5A-B are schematic diagrams of a heat exchanger incorporating a ratcheted channel to induce circulation at a desired pump activation temperature according to embodiments of the present invention.
  • FIGS. 6-8 are schematic diagrams of various heat exchangers incorporating several ratcheted channel segments to induce circulation at a desired pump activation temperature according to embodiments of the present invention.
  • FIG. 9 is an axial cross-sectional view of a ratcheted channel including vents and secondary gas channels according to an embodiment of the invention.
  • FIG. 10 is a side or top cross-sectional view illustrating a fluid mixer incorporating a ratcheted channel that serves to both pump and agitate a mixture of liquids.
  • FIG. 11 is a side or top cross-sectional view illustrating an embodiment of the invention including gas vents and a secondary channel for carrying gas vapor.
  • FIG. 12 is a side or top cross-sectional view of a droplet ejection device incorporating ratcheted channels according to an embodiment of the present invention.
  • FIG. 10 is a side or top cross-sectional view illustrating a fluid mixer incorporating a ratcheted channel that serves to both pump and agitate a mixture of liquids.
  • FIG. 11 is a side or top cross-sectional view illustrating an embodiment of the invention including gas vents and a secondary channel for carrying gas vapor.
  • FIG. 12 is a
  • FIGS. 14A-B are longitudinal and axial cross-sectional views, respectively, of a concentric flow, counter-current heat exchanger incorporating a ratcheted outer channel according to an embodiment of the present invention.
  • FIG. 1 is a sequence of nine cross- sectional diagrams illustrating the observed motion of a film-boiling droplet 100 along the length of a level ratcheted surface 102.
  • Liquid droplet 100 is suspended on a vapor cushion 104, reducing the friction between the droplet 100 and surface 102.
  • droplet 100 is composed of liquid nitrogen (boiling point is 77 K), and ratcheted surface 102 is composed of brass at room temperature.
  • ratcheted surface 102 is composed of brass at room temperature.
  • Rl 34a 1,1,1,2 tetrafluorethane
  • the mean horizontal droplet radius is approximately equal to the ratchet length L, so that the droplet spans two steps of the ratchet.
  • the nine sequential diagrams are separated in time by a time interval of 8 ms, and the droplet moves with a constant velocity of about 3.5 cm/s. No external forces are present (other than gravity, oriented perpendicular to the movement).
  • FIG. 2 shows a droplet 200 in a ratcheted channel 204 fabricated within a plate 208.
  • a channel is defined to include both open channels (e.g., grooves in a surface) or closed channels (e.g., tunnels or pipes).
  • Channels may be formed with any number of discrete linear walls, with curved walls, or with a combination of the two.
  • the liquid in the channel 204 may also take the form of a slug 202 or a continuous stream.
  • the surface 206 of channel 204 is shaped to have a ratchet profile so that when the surface 206 is heated appropriately the droplet 200 or slug 202 is pumped through the channel. Although it is sufficient for just one of the walls of the channel to be ratcheted, it is preferable in most applications if two or more of the walls are ratcheted to provide additional pumping power.
  • a ratchet or a ratcheted surface is defined to be a surface shaped to have a plurality of topographic ratchet features, each of which is locally asymmetric in the longitudinal direction, i.e., the surface shape of each ratchet feature (e.g., each "tooth") as seen when traveling in one direction through the channel is not the same as the shape seen when traveling in the opposite direction through the channel.
  • the ratchet has a periodic or approximately periodic ratchet pattern.
  • the prototypical ratchet shape is the periodic sawtooth ratchet, illustrated in FIG. 3 A. As shown in the figure, a ratchet of this type is characterized by a sawtooth height H and length L.
  • Opposite walls 304 and 306 of channel 302 both have the same sawtooth ratchet shape.
  • the channel has a mean diameter D and contains an exemplary droplet 300 and slug 308.
  • the parameters L, H, and D may be independently altered to produce other ratcheted channels, as shown in FIGS. 3B, 3 C, and 3D, respectively.
  • the absolute scale of the ratcheted channel can be varied as well.
  • Ratcheted channels also can be tapered, as shown in FIG. 3E, which shows a channel whose mean diameter decreases from a mean diameter Dl to a mean diameter D2.
  • FIG. 3 F shows a ratcheted channel where the opposing faces are ratcheted such that their teeth are displaced in the longitudinal direction by a distance ⁇ L.
  • FIGS. 3G-J illustrate various other ratchet shapes that, like the sawtooth ratchet, have a longitudinally asymmetric topography.
  • a ratcheted channel 402 with exemplary droplet 400 may have differently shaped opposing surfaces or walls 404 and 406.
  • wall 404 is not ratcheted while wall 406 has a sawtooth-shaped ratchet.
  • FIG. 4B illustrates a channel 412 with exemplary droplet 400 where channel walls 408 and 410 are both ratcheted, but with different ratchet shapes.
  • any of the above ratchet shapes can be combined in series to form ratchets with hybrid shapes.
  • open channels with three walls
  • open channels may also be formed with just two walls, or with a wall having a parabolic, circular, elliptical, or other curved shape.
  • closed channels i.e., tunnels
  • closed channels can be formed having three walls, four walls, or more walls, as well as with curved walls.
  • Ratcheted channels according to various embodiments of the invention may be fabricated using many different techniques which are appropriately selected depending on the size of the channels, the type of materials, and the requirements of the pumping application.
  • various known metal machining techniques may be used.
  • Other materials and appropriate fabrication processes may also be used to form ratchets, such as molding techniques for polymer materials.
  • various techniques well known in the art of micro fluidic system fabrication may be used, such as surface micromachining using standard micro-electro-mechanical systems (MEMS) fabrication processes, and various types of etching techniques (e.g., wet etching, dry etching, anisotropic etching, isotropic etching).
  • MEMS micro-electro-mechanical systems
  • the channels are formed or processed to have precisely controlled surface quality, e.g., using cleaning methods such as oxide etching, solvent cleaning, sonification, and/or rinsing, depending on the substrate material.
  • cleaning methods such as oxide etching, solvent cleaning, sonification, and/or rinsing, depending on the substrate material.
  • ratchet teeth 312 are composed of a different material than ratchet substrate 310.
  • the two materials may differ with respect to one or more material properties such as thermal conductivity, heat capacity, surface roughness, and hydrophobicity.
  • primary substrate material 310 could be a metal while secondary substrate material forming ratchet teeth 312 could be a plastic.
  • a portion of the substrate may possibly be a thermal insulator, at least one portion of the substrate in the ratcheted segment of the channel is preferably a thermal conductor that efficiently transfers heat from an external heat source to the walls of the channel. It may be of advantage in some embodiments to vary the substrate materials along the length of a channel to provide differences in thermal conductivity, heat capacity, or other properties along the length of the channel.
  • Such variations may be provided in either the ratcheted or smooth portions of the channel, or both. Such variations may be useful to control the heat flow along the channel, and/or to create slight differences in different pump activation temperatures in different areas of the ratchet segment. Such adjustments may be used to control ratchet performance.
  • Both the working fluids and material substrate for the channels are selected with consideration to the desired operating temperature of the device.
  • the fluid is preferably selected so that the Leidenfrost point of the fluid is at or near the desired pump activation temperature.
  • Rl 34a has a Leidenfrost point just above room temperature, making it suitable for applications where the desired pump activation temperature is just above room temperature.
  • Other fluids that may be used include water, ethanol, liquid nitrogen, and any of various customized liquids which are commercially available with specified boiling points (e.g., methyl perfluoropropylether which boils at approximately 30 C and can be used for a pump activation temperature of 70-80 C).
  • the pumping force varies (not necessarily linearly) as the operating temperature continues to rise above the pump activation temperature. It is preferable in some embodiments of the invention that the pump activation temperature is just below the desired operating temperature (e.g., within a few degrees). In other embodiments, it is preferable that the pump activation temperature is substantially below the desired operating temperature range, so that the desired operating temperature range corresponds to an approximately linear dependence of the pumping force on operating temperature.
  • the thermal energy used to power the pump is preferably ambient or waste heat in the environment thermally coupled to the ratcheted channel. In some embodiments, however, it may be preferable to heat the ratcheted channel using power from an electrical, chemical, or other power source.
  • a closed- cycle channel 500 with a ratcheted segment 502 provides a simple and elegant thermally-powered heat exchanger.
  • Ratcheted segment 502 is positioned at the hot end 503 which is thermally coupled to a source of heat (not shown) through a portion of the substrate material.
  • a source of heat not shown
  • the working fluid in the channel is pumped by the ratcheted channel, causing the fluid in the closed-cycle channel 500 to circulate.
  • heat is carried from hot end 503 to cold end 504 which is coupled through a portion of the substrate material to a heat sink at temperature T2.
  • the fluid continues to circulate back to the hot end 503 where it is heated and pumped by the ratcheted segment 502.
  • the fluid stops circulating automatically.
  • this heat exchanger is powered by the very heat to be dissipated. It thus requires no additional power source to pump the fluid, and is highly reliable since there is no dependence on additional pumping components, no additional power sources required to produce pumping, no additional heat generated by additional pumping components, and no moving parts. It may also be noted that all prior teaching in the art considers film boiling in a heat exchanger to be a serious problem to be avoided. In sharp contrast, heat exchangers of the present invention take advantage of film boiling in the ratcheted segment of the channel. Moreover, the heat transfer rate in a ratcheted channel is higher than that in a conventional non-ratcheted channel.
  • FIG. 5B shows a heat exchanger in which the heat transfer from the channel 506 to the working fluid takes place both in a ratcheted segment 508 and an
  • the non- ratcheted segment 510 is preferably located just upstream from the ratcheted segment 508.
  • the heat source 514 e.g., a microprocessor
  • the heat source 514 is preferably located proximate to the ratcheted section 508 so that it is the hottest portion of the channel.
  • heat dissipation element 512 may be composed of a thermally conductive portion of the substrate material itself.
  • a thermally conductive material 516 in the cold end dissipates heat from the channel to a heat sink such as ambient air, external fluid, or other substance.
  • a heat sink such as ambient air, external fluid, or other substance.
  • FIG. 6 shows a heat exchanger whose closed-cycle channel 600 transfers heat from a hot end 602 at temperature Tl to a cold end 604 at temperature T2. Segments of channel 600 in hot end 602 are ratcheted to provide pumping when Tl increases above the pump activation temperature.
  • heat transfer to the worldng fluid may take place in both ratcheted and non-ratcheted segments of channel 600 in hot end 602.
  • the channel snakes through the hot end 602 as well as the cold end 604.
  • the channel segments in hot end 602 may be thermally insulated from channel segments in cold end 604.
  • two distinct closed-cycle heat exchangers are thermally coupled to form a single cascaded heat exchanger, as shown in FIG. 7.
  • a first closed-cycle channel 700 circulates a first working fluid between hot end 704 at high temperature Tl and middle section 706 at intermediate temperature T2.
  • a second closed-cycle channel 702 circulates a second working fluid between middle section 706 and cold end 708 at temperature T3.
  • temperature Tl rises above pump activation temperature for the first fluid in the first channel 700, heat exchange carries heat from hot end 704 to middle section 706.
  • heat exchange carries heat from middle section 706 to cold end 708 which is coupled to a heat sink at temperature T3.
  • the fluids in the two channels 700 and 702 may be selected to control the pump activation temperatures of the two exchangers.
  • the relative sizes and heat exchange capacities of the two exchangers may also be adjusted.
  • this cascaded system can provide cooling of different components at different temperatures and with different heat exchange capacities. Extending the principles of this example, multiple heat exchangers of differing capacities can be thermally coupled to satisfy various cooling requirements.
  • FIG. 8 illustrates an embodiment of a heat exchanger having a single closed-cycle channel 800 divided into a hot end 802 at temperature Tl containing a first ratcheted segment of channel 800, an intermediate section 804 at temperature T2 containing a second ratcheted segment of channel 800, and a cold end 806 coupled to a heat sink at temperature T3.
  • This embodiment uses a two-component working fluid, where the two components have different boiling points.
  • the lower- boiling-point component can provide pumping and cooling in the hot end 802 of the cycle, providing complete forced-convection liquid cooling in the intermediate section 804.
  • the lower-boiling-point component provides pumping and cooling in the intermediate section while the higher-boiling-point component (and any residue of the lower-boiling-point component) provides pumping and cooling in the hot end 802.
  • the volume of working fluid present in the channel or channels is preferably sufficient to ensure that fluid will be present in the hot end irrespective of the device orientation, thereby allowing orientation-independent operation.
  • the heat exchanger of FIG. 8 has an over-pressure valve 808 which releases gas when the fluid pressure reaches a predetermined threshold.
  • Other pressure-regulation devices well-known in the art may be used as well.
  • FIGS. 14A-B illustrate a concentric counter-current heat-exchanger employing a ratchet pump according to an embodiment of the present invention.
  • FIG. 14A is a longitudinal cross-sectional view of a portion of the heat exchanger
  • FIG. 14B is an axial cross-sectional view of the same.
  • a central channel 500 carries a hot stream of fluid in one direction
  • an annular outer channel 504 carries a working fluid 502.
  • the inner surface of the outer channel 504 is ratcheted.
  • the ratcheted surface is heated and the fluid 502 in the outer channel 504 is pumped, providing counter-current heat exchange between the two fluids.
  • the direction of the ratchets is reversed so that the two fluids flow in the same direction, rather than counter-current.
  • FIG. 9 is an axial cross-sectional view of a ratcheted channel 900 having four walls 902 containing an exemplary droplet 904. It should be noted again that three channel walls may be used to form a channel having a triangular cross-section, or multiple walls may be used to form a channel having any polygonal cross-section.
  • Vents 908 in the corners of walls 902 allow gas to escape from the main channel 900 into secondary longitudinal channels 906. These secondary channels 906 allow the gas to freely propagate either with or against the flow of the liquid 904 in channel 900.
  • Many variations on this principle are possible, including providing separate channels 1106 for the gas, connected to the main channel 1102 by connecting passages 1108, as shown in FIG. 11.
  • a vapor phase of the droplet fluid escapes through vents 1108 and flows out through separate channel 1106.
  • Channels 1106 and 1102 may be recombined at a later stage in the fluid cycle.
  • portions of the channel walls may be fabricated of porous material to allow gas to escape into secondary channels for gas propagation.
  • Heat exchangers such as those described above may be used in a variety of thermal management applications including, for example, large-scale industrial heat exchangers and fluid cooling, integrated cooling in lab-on-a-chip devices, chemical microreactors, and microelectronics.
  • a heat exchanger may be integrated directly into the semiconductor chip it is designed to cool, e.g., by processing the side of the chip opposite the side containing the microelectronics and/or microreactors.
  • a heat exchanger can also be separately fabricated and subsequently attached to the chip using a material that provides thermal coupling.
  • FIG. 10 illustrates an embodiment illustrating a fluid mixer according to one embodiment of the invention.
  • Two channel segments 1002 and 1004, carrying first and second fluids, join to form a single channel segment 1006 where the two fluids are combined to form a two-component mixture.
  • multiple channel segments may join to combine multiple fluids to form a multi-component mixture.
  • Channel segment 1006 contains a ratcheted segment 1000 that pumps the fluid mixture when the temperature Tl of segment 1000 rises above a pump activation temperature. As the fluid mixture passes through ratcheted segment 1000, it is also agitated by transient contact with the hot ratcheted surface and thereby enhances the mixing of the two components.
  • This technique for enhancement of mixing across the fluid streams may be used to realize a non-mechanical micromixer in microchannels where slow diffusion rates and laminar flow inhibit mixing.
  • micromixers are of use in a chemical microreactors, lab-on-a-chip (LOC) devices, and other small-scale applications.
  • an array of ratcheted channels such as channels 1200, 1202, 1204 may be used to eject droplets 1212, 1214, 1216 in a droplet ejection device.
  • a droplet ejection device may be used to spray uniformly sized droplets at uniform rates, which may be useful in various applications.
  • Each channel can be individually controlled by separate heating elements 1206, 1208, 1210, or all can be heated uniformly by a single source (not shown).
  • the drag of the working fluid as it flows through the ratcheted pumping section may be reduced by virtue of a superhydrophobic or analogous surface property of the channel surface in the pumping section.
  • FIG. 13 shows a ratcheted channel 1300 whose surface is fabricated with a small topographic surface modification 1304 at the micrometer- scale or smaller.
  • This microscale or nanoscale surface feature 1304 significantly reduces the contact between the surface 1304 and the liquid 1302, dramatically reducing wetting and hence drag.
  • the inside of the entire channel is preferably provided with the surface feature 1304 as well. This technique for reducing the drag may be used to reduce the pump activation temperature below the temperature that would otherwise be required.

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  • General Engineering & Computer Science (AREA)
  • Electromagnetic Pumps, Or The Like (AREA)

Abstract

Selon la présente invention, des pompes non mécaniques activées thermiquement induisent un flux de fluide à travers un canal (500), lorsque la température dans un segment à cliquet (502) du canal excède une température d'activation de pompe. Des diamètres de canaux peuvent être compris entre plusieurs centimètres et plusieurs micromètres. La traînée entre le fluide et le canal à cliquet est extrêmement petit au niveau de la température d'activation de la pompe, en raison de la caléfaction du fluide à la température d'activation de la pompe et/ou de l'utilisation de surfaces superhydrophobes à l'intérieur du canal. Les pompes peuvent être utilisées dans des échangeurs thermiques activés thermiquement pour diverses applications de grande échelle et de micro-échelle. Elles peuvent être, également, utilisées comme agitateurs conçus pour mélanger des microfluides et comme dispositifs de pulvérisation et d'éjection de gouttelettes.
PCT/US2006/012395 2005-05-09 2006-03-31 Pompes non mecaniques activees thermiquement au moyen de canaux a cliquet WO2006121534A1 (fr)

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DE102011115622A1 (de) * 2010-12-20 2012-06-21 Technische Universität Ilmenau Mikropumpe sowie Vorrichtung und Verfahren zur Erzeugung einer Fluidströmung
WO2014000735A1 (fr) 2012-06-28 2014-01-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Dispositif de transport capillaire de liquides, utilisation et procédé de fabrication d'un tel dispositif
US9074778B2 (en) 2009-11-04 2015-07-07 Ssw Holding Company, Inc. Cooking appliance surfaces having spill containment pattern
US20160372313A1 (en) * 2014-03-04 2016-12-22 Micromass Uk Limited Sample Introduction System for Spectrometers
US11092977B1 (en) 2017-10-30 2021-08-17 Zane Coleman Fluid transfer component comprising a film with fluid channels
GB2575380B (en) * 2017-03-29 2022-03-09 Kimberly Clark Co Surface for directional fluid transport including against external pressure

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US20040146409A1 (en) * 2003-01-15 2004-07-29 You-Seop Lee Micro-pump driven by phase change of a fluid
US20050095143A1 (en) * 2003-11-04 2005-05-05 Alcatel Pumping apparatus using thermal transpiration micropumps

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020187503A1 (en) * 2001-05-02 2002-12-12 Michael Harrold Concentration and purification of analytes using electric fields
US20040146409A1 (en) * 2003-01-15 2004-07-29 You-Seop Lee Micro-pump driven by phase change of a fluid
US20050095143A1 (en) * 2003-11-04 2005-05-05 Alcatel Pumping apparatus using thermal transpiration micropumps

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9074778B2 (en) 2009-11-04 2015-07-07 Ssw Holding Company, Inc. Cooking appliance surfaces having spill containment pattern
DE102011115622A1 (de) * 2010-12-20 2012-06-21 Technische Universität Ilmenau Mikropumpe sowie Vorrichtung und Verfahren zur Erzeugung einer Fluidströmung
WO2014000735A1 (fr) 2012-06-28 2014-01-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Dispositif de transport capillaire de liquides, utilisation et procédé de fabrication d'un tel dispositif
DE102012021603A1 (de) * 2012-06-28 2014-01-23 Philipp Comanns Strukturierung bzw. Anordnung von Oberflächen zum gerichteten Transport von Flüssigkeiten in Kapillaren
US20160372313A1 (en) * 2014-03-04 2016-12-22 Micromass Uk Limited Sample Introduction System for Spectrometers
US20190287778A1 (en) * 2014-03-04 2019-09-19 Micromass Uk Limited Sample introduction system for spectrometers
US10991560B2 (en) 2014-03-04 2021-04-27 Micromass Uk Limited Sample introduction system for spectrometers
GB2575380B (en) * 2017-03-29 2022-03-09 Kimberly Clark Co Surface for directional fluid transport including against external pressure
US11092977B1 (en) 2017-10-30 2021-08-17 Zane Coleman Fluid transfer component comprising a film with fluid channels

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